CN103017949A - Piezoresistive pressure sensor with vibration compensation - Google Patents
Piezoresistive pressure sensor with vibration compensation Download PDFInfo
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- CN103017949A CN103017949A CN2012104955351A CN201210495535A CN103017949A CN 103017949 A CN103017949 A CN 103017949A CN 2012104955351 A CN2012104955351 A CN 2012104955351A CN 201210495535 A CN201210495535 A CN 201210495535A CN 103017949 A CN103017949 A CN 103017949A
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- pressure sensor
- vibration
- piezoresistive pressure
- vibration compensation
- resistance strain
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Abstract
The invention discloses a piezoresistive pressure sensor with vibration compensation. The piezoresistive pressure sensor comprises a Wheatstone bridge consisting of four semiconductor resistance strain gauges, wherein an electric signal filter is connected between the Wheatstone bridge and a control circuit and is used for filtering burrs of an instant voltage change caused by vibration; and each semiconductor resistance strain gauge is arranged on a detection housing through a buffer gasket. According to the invention, the buffer gaskets are additionally arranged between the semiconductor resistance strain gauges and the detector housing, the damage of environment vibration to the detection housing is reduced; and the filter is additionally arranged in a measurement circuit, and the burrs of the instant voltage change caused by the vibration are filtered, thus the measurement precision is ensured, the semiconductor resistance strain gauges are protected, and the service life is prolonged.
Description
Technical field
The present invention relates to a kind of piezoresistive pressure sensor with vibration compensation.
Background technology
Traditional mechanical quantity pressure transducer is based on metal elastic gonosome stress deformation, exported to the electric weight conversion by the mechanical quantity elastic deformation, but the large cost of volume is high.With respect to traditional mechanical quantity sensor, the size of MEMS pressure transducer is less, and maximum is no more than one centimetre, and with respect to tradition " machinery " manufacturing technology, its cost performance increases substantially.Present MEMS pressure transducer is mainly silicon piezoresistance type pressure sensor, and it adopts high-accuracy semiconductor resistor foil gauge to form resistance bridge as power electricity conversion metering circuit, has higher measuring accuracy, lower power consumption and extremely low cost.The piezoresistive transducer of resistance bridge, as changing without pressure, it is output as zero, hardly power consumption.Generally this kind pressure transducer can the Measurement accuracy environmental pressure, if but environment when producing transient vibration can produce temporary impact to the semiconductor resistor foil gauge, cause damaging, further affect measuring accuracy, and demand urgently improving.
Summary of the invention
Problem for prior art exists the object of the invention is to propose a kind of piezoresistive pressure sensor with vibration compensation, by enforcement of the present invention, avoids temporary impact on the impact of measuring accuracy.
For reaching this purpose, the present invention by the following technical solutions:
A kind of piezoresistive pressure sensor with vibration compensation comprises:
By the resistance bridge that four semiconductor resistor foil gauges form, be connected with electrical signal filter between resistance bridge and the control circuit, the burr that the transient voltage that is used for that vibration is caused changes filters; And each semiconductor resistor foil gauge is installed in by buffering spacer and surveys on the shell.
Preferably, described electrical signal filter is choke-condenser filter.
Preferably, described electrical signal filter is connected to output terminal or the input end of described resistance bridge.
Preferably, described buffering spacer is circle, rectangle or ellipse.
Preferably, the material of described buffering spacer is rubber.
Compared with prior art, the present invention has following beneficial effect:
Among the present invention; by between semiconductor resistor foil gauge and probe body, increasing cushion pad; alleviating ambient vibration damages it; and in metering circuit, increase wave filter; the burr that the transient voltage that vibration is caused changes filters; both guarantee measuring accuracy, protected again the semiconductor resistor foil gauge, prolonged the life-span.
The invention accompanying drawing
Fig. 1 is a kind of piezoresistive pressure sensor synoptic diagram with vibration compensation that the embodiment of the invention 1 provides.
Embodiment
The embodiment of the invention 1 provides a kind of piezoresistive pressure sensor with vibration compensation, as shown in Figure 1, comprise: the resistance bridge that is formed by four semiconductor resistor foil gauges 1, each semiconductor resistor foil gauge is installed in by buffering spacer 2 and surveys on the shell 10, the output terminal of resistance bridge or input end are connected with electrical signal filter 3, the burr that the transient voltage that is used for that vibration is caused changes filters, and can be choke-condenser filter.Wherein, buffering spacer 2 can be circle, rectangle, ellipse or other shapes, and its material can be rubber.
The above; only be the better embodiment of the present invention; but protection scope of the present invention is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the present invention discloses; be equal to replacement or change according to technical scheme of the present invention and inventive concept thereof, all should be encompassed within protection scope of the present invention.
Claims (5)
1. the piezoresistive pressure sensor with vibration compensation is characterized in that, comprising:
By the resistance bridge that four semiconductor resistor foil gauges form, be connected with electrical signal filter between resistance bridge and the control circuit, the burr that the transient voltage that is used for that vibration is caused changes filters; And each semiconductor resistor foil gauge is installed in by buffering spacer and surveys on the shell.
2. the piezoresistive pressure sensor with vibration compensation according to claim 1 is characterized in that, described electrical signal filter is choke-condenser filter.
3. the piezoresistive pressure sensor with vibration compensation according to claim 1 is characterized in that, described electrical signal filter is connected to output terminal or the input end of described resistance bridge.
4. the piezoresistive pressure sensor with vibration compensation according to claim 1 is characterized in that, described buffering spacer is circle, rectangle or ellipse.
5. the piezoresistive pressure sensor with vibration compensation according to claim 1 is characterized in that, the material of described buffering spacer is rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104955351A CN103017949A (en) | 2012-11-28 | 2012-11-28 | Piezoresistive pressure sensor with vibration compensation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104955351A CN103017949A (en) | 2012-11-28 | 2012-11-28 | Piezoresistive pressure sensor with vibration compensation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103017949A true CN103017949A (en) | 2013-04-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012104955351A Pending CN103017949A (en) | 2012-11-28 | 2012-11-28 | Piezoresistive pressure sensor with vibration compensation |
Country Status (1)
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| CN (1) | CN103017949A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108081317A (en) * | 2017-12-25 | 2018-05-29 | 徐宝申 | The load protection device and load protection method of a kind of manipulator |
| CN109141616A (en) * | 2018-07-26 | 2019-01-04 | 耿靓 | A kind of distribution pressure difference measurement sensor and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4699606A (en) * | 1986-08-18 | 1987-10-13 | Celanese Corporation | Apparatus for detecting and/or controlling tension of a moving web, for example, a filamentary tow utilized in the production of cigarette filters |
| CN1043845A (en) * | 1988-12-23 | 1990-07-11 | 法国石油研究所 | Static pressure is changed insensitive signal transducer |
| CN2456146Y (en) * | 2000-12-28 | 2001-10-24 | 宝安区福永塘尾金弓制造厂 | Electronic postal balancer |
| CN1721813A (en) * | 2004-07-14 | 2006-01-18 | 扬州泰司电子有限公司 | Constant-current type static resistance strain gauge |
-
2012
- 2012-11-28 CN CN2012104955351A patent/CN103017949A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4699606A (en) * | 1986-08-18 | 1987-10-13 | Celanese Corporation | Apparatus for detecting and/or controlling tension of a moving web, for example, a filamentary tow utilized in the production of cigarette filters |
| CN1043845A (en) * | 1988-12-23 | 1990-07-11 | 法国石油研究所 | Static pressure is changed insensitive signal transducer |
| CN2456146Y (en) * | 2000-12-28 | 2001-10-24 | 宝安区福永塘尾金弓制造厂 | Electronic postal balancer |
| CN1721813A (en) * | 2004-07-14 | 2006-01-18 | 扬州泰司电子有限公司 | Constant-current type static resistance strain gauge |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108081317A (en) * | 2017-12-25 | 2018-05-29 | 徐宝申 | The load protection device and load protection method of a kind of manipulator |
| CN109141616A (en) * | 2018-07-26 | 2019-01-04 | 耿靓 | A kind of distribution pressure difference measurement sensor and method |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130403 |