CN103003909B - For the end cap of magnetron, its manufacture method and magnetron - Google Patents
For the end cap of magnetron, its manufacture method and magnetron Download PDFInfo
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- CN103003909B CN103003909B CN201180035073.9A CN201180035073A CN103003909B CN 103003909 B CN103003909 B CN 103003909B CN 201180035073 A CN201180035073 A CN 201180035073A CN 103003909 B CN103003909 B CN 103003909B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/04—Cathodes
- H01J23/05—Cathodes having a cylindrical emissive surface, e.g. cathodes for magnetrons
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/04—Cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/50—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field
- H01J25/52—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field with an electron space having a shape that does not prevent any electron from moving completely around the cathode or guide electrode
- H01J25/58—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field with an electron space having a shape that does not prevent any electron from moving completely around the cathode or guide electrode having a number of resonators; having a composite resonator, e.g. a helix
- H01J25/587—Multi-cavity magnetrons
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Abstract
Disclose the end cap for magnetron, it is made up of Mo sintered body, it is characterized in that: scope is have 30ppm or less carbon content from the surface of Mo sintered body to the surf zone apart from this degree of depth of 100 μm, and scope be from the core the thickness direction of Mo sintered body to apart from this ± central area of the distance of 100 μm has 50 to 300ppm or less carbon content.By reducing the carbon content in surf zone, long-term reliability can be improved.The end cap of long-term reliability can be had with high rate of finished products manufacture.
Description
Technical field
The present invention relates to a kind of end cap for magnetron, its manufacture method and use the magnetron of this end cap, and more particularly, relate to a kind of end cap for magnetron, its manufacture method and use the magnetron of this end cap, described end cap can extend the life-span of magnetron, and can show the high reliability in long-time section.
Background technology
Along with the cathode portion of magnetron is used for roaster (microwave oven), cathode portion is widely known by the people, and described cathode portion is configured to mainly comprise: coiled type filament 1, for heat of emission electronics; Top end cap 3 and bottom end cap 4, be made up of Mo and joined to upper part and the end portion of coiled type filament 1 by Mo-Ru brazing material 2; Centre pilot (lead) 5, connects and is fixed to top end cap 3; And side guide rod 6, connect and be fixed to bottom end cap 4.
Magnetron is a kind of dipole vacuum tube classifying as electron tube for launched microwave.Magnetron is widely used in: microwave communication facility and household electric appliances (household electrical appliance).
In this magnetron, when the DC high voltage of thousands of volt is applied to cylindrical cathode and around negative electrode anode between part on time, produce and launched microwave.
Now, magnetron has been widely used as the roaster part according to inductive heating system cooking food, uses the microwave with the frequency of 2450MHz and the power output of about 500-1500W in described inductive heating system.
Such as, as manufactured the method for the conventional end cap for magnetron, as at the Japanese patent gazette (No.3-51048 examined; Patent document 1) disclosed in, the method sintering Mo powder has been proposed.In patent document 1, disclose a kind of method, wherein Mo powder is molded, thus Mo sintered body in the middle of manufacturing; And the intermediate sintering body of another Mo-Ru brazing material is arranged on middle Mo sintered body, after this, performs main sintering operation.By this manufacture method, the bond strength between Mo-Ru brazing material and Mo sintered body (end cap) can be improved.
But, causing following problem: when being assembled in magnetron by end cap, having undesirably reduced long-term reliability (shortening the life-span).
List of documents
Patent document
Patent document 1: Japan Patent (examining) No.3-51048
Summary of the invention
The problem that invention will solve
Reduce the result of the reason of above-mentioned long-term reliability as research, the present inventor has been found that the carbon that the surface of Mo sintered body (end cap) exists is the reason reducing long-term reliability.In addition, have also obtained following discovery.Namely carbon source is from resin binder, and described resin binder is used for molded Mo molding.
When carbon is present on the surface of end cap, and when being applied to by high voltage on the end cap in vacuum tube, the surface of end cap becomes and is easy to sputtered.Due to this sputtering phenomenon, the surface earthing of end cap is also etched, thus adds the carbon content in vacuum atmosphere.As a result, confirm the power output reducing magnetron, undesirably reduce the life-span of magnetron.
Under above-mentioned environment, for the end cap of the routine for magnetron, there is the technical requirement improving its life characteristics further.
Realize the present invention for reaching above-mentioned technical requirement, and target of the present invention is to provide and shows the end cap for magnetron of high reliability, provides the method manufacturing end cap, and provide there is fabulous rate of finished products and the magnetron of production efficiency.
The means of dealing with problems
In order to realize above-mentioned target, the invention provides the end cap for magnetron, it is made up of Mo sintered body, it is characterized in that: scope is have 30ppm or less carbon content from the surface of Mo sintered body to the surf zone apart from this degree of depth of 100 μm, scope be from the core the thickness direction of Mo sintered body to apart from this ± central area of the distance of 100 μm has 50 to 300ppm or less carbon content.
In addition, above-mentioned in the end cap of magnetron, preferably Mo sintered body has 9.6 to 10.0g/cm
3density.
In addition, above-mentioned in the end cap of magnetron, preferably, Mo sintered body has the Mo content of 99.9 quality % or more, as 0.005 quality % or less Al content of impurity element, 0.003 quality % or less Ca content, 0.005 quality % or less Cr content, 0.002 quality % or less Cu content, 0.03 quality % or less Fe content, 0.002 quality % or less Mg content, 0.002 quality % or less Mn content, 0.008 quality % or less Ni content, 0.002 quality % or less Pb content, 0.005 quality % or less Si content, and 0.002 quality % or less Sn content.
In addition, it is also preferred that in the end cap of magnetron above-mentioned, provide Mo-Ru brazing material to the end cap for magnetron.
In addition, it is also preferred that in the end cap of magnetron above-mentioned, Mo-Ru brazing material has 0.05 quality % as impurity element or less carbon content, 0.009 quality % or less Fe content, and 0.007 quality % or less Ni content.
In addition, by using the above-mentioned end cap for magnetron to configure according to magnetron of the present invention.
Manufacturing the method for end cap being used for magnetron to comprise: punching course, having the Mo molding of end cap shape for the Mo powder and resin binder stamping die fixture by utilizing the purity with 99.9 % by weight or more; First sintering process, for sintering Mo molding under redox condition, thus obtains the first sintered body; And second sintering process, for sintering the first sintered body under reducing atmosphere, thus obtain the second sintered body.
In addition, be used in above-mentioned manufacture in the method for the end cap of magnetron, preferably, described redox condition is wet hydrogen gas.In addition, it is also preferred that, perform the first sintering process under the following conditions: the flow rate set of wet hydrogen gas is 0.2m
3/ hour or more, the maximum sintering temperature that reaches is 1000 to 1200 DEG C, and the maximum retention time reaching sintering temperature is 1 to 4 hour.
In addition, be used in above-mentioned manufacture, in the method for the end cap of magnetron, it is also preferred that, cost 3 to 7 hours by Mo molding from the heating temperatures of 600 DEG C to maximum reach the condition of sintering temperature perform the first sintering process.In addition, it is also preferred that, is 0.2m at the flow rate set of hydrogen gas
3/ hour or more, the maximum sintering temperature that reaches is 1600 to 1900 DEG C, and performs the second sintering process under being the condition of 30 minutes to 5 hours in the maximum retention time reaching sintering temperature.
In addition, be used in above-mentioned manufacture, in the method for the end cap of magnetron, it is also preferred that, carrying out tumbling processing (barrel-polishing work) for the second sintered body further, thus obtain tumbling body.In addition, it is also preferred that, carry out punch process further for tumbling body.
In addition, be used in the method for the end cap of magnetron in above-mentioned manufacture, it is also preferred that, the end cap for magnetron of acquisition like this is configured to: scope is be set as 30ppm or less from the surface of Mo sintered body to the carbon content of the surf zone apart from this degree of depth of 100 μm, and scope be from the core the thickness direction of Mo sintered body to apart from this ± carbon content of the central area of the distance of 100 μm is set as 50 to 300ppm or less.
The beneficial effect of the invention
According to the end cap for magnetron of the present invention, carbon content residual in the surf zone of Mo end cap is very little.So when Mo end cap is used as magnetron, Mo end cap is sputtered hardly, therefore can extend the life-span of magnetron, and can obtain the long-term reliability of magnetron.
In addition, be used for the method for the end cap of magnetron according to manufacture of the present invention, end cap of the present invention can be manufactured efficiently with high rate of finished products.
Accompanying drawing explanation
Fig. 1 shows the sectional view of the structure of the cathode portion of magnetron according to an embodiment of the invention.
Fig. 2 shows according to an embodiment of the invention for the sectional view of the structure of the end cap of magnetron.
Fig. 3 shows the sectional view of the state when multiple molding once being loaded sintering furnace.
Embodiment
Hereinafter, pattern of the present invention has been used for reference to accompanying drawing explanation.
The feature of the end cap for magnetron be made up of Mo sintered body is: scope is have 30ppm or less carbon content from the surface of Mo sintered body to the surf zone apart from this degree of depth of 100 μm, and scope be from the core the thickness direction of Mo sintered body to apart from this ± central area of the distance of 100 μm has 50 to 300ppm or less carbon content.
Fig. 2 shows an embodiment of the end cap for magnetron.In fig. 2, Reference numeral 2 represents brazing material, Reference numeral 3 represents top end cap (end cap body divides), Reference numeral 7 represents centre pilot connection hole portions, Reference numeral 8 represents the engagement base part of end cap and brazing material, and Reference numeral 9 represents the engagement sides part of end cap and brazing material.In this regard, although Fig. 2 schematically illustrates top end cap, the basic structure of bottom end cap is substantially the same with the basic structure of top end cap.In addition, Fig. 2 shows brazing material 2 state mounted thereto.
End cap body divides 3 to be formed by Mo sintered body.This Mo sintered body manufactures as follows: be molded Mo powder, sinter molding in predefined conditions, thus preparation Mo sintered body.After a while preferred manufacture method will be described.
End cap for magnetron according to the present invention is made up of Mo sintered body.As shown in Figure 2, be from the surperficial S of Mo sintered body to being 30ppm or less apart from the carbon content the surf zone 11 of this degree of depth of 100 μm in scope, and scope be from the core (central point) 10 thickness direction of Mo sintered body to apart from this ± central area 12 of the distance of 100 μm in carbon content be 50 to 300ppm or less.
In this, term " surface " refers to the arbitrary surfaces S that end cap body divides.Term " scope is the surf zone of the degree of depth from surface to 100 μm " refers to region 11, the scope in described region 11 be from arbitrary surfaces S in the depth direction with the part that the distance of surperficial S is 100 μm.In the present invention, the carbon content in surf zone 11 is appointed as 30ppm or less.Preferably, carbon content is 20ppm or less (comprising zero ppm).
In addition, scope be from the core (central point) 10 thickness direction of Mo sintered body to apart from this ± central area 12 of the distance of 100 μm in carbon content be 50 to 300ppm or less.
In this, term " central area " scope of referring to be from the central point (W/2) of W to apart from this ± region of the distance of 100 μm, described W is the width on the thickness direction of the Mo sintered body shown in Fig. 2.In fig. 2, although schematically illustrate the central area of the sidewall sections of end cap, the sample (sample) of central area can be taken out equally from base section.
The method measuring carbon content is performed according to High Frequency IR-Absorption Spectrometric absorption process.In surf zone 11, the scope of wiping off is be the part of 100 μm apart from surperficial S distance, thus obtains sample (sample).By using by the region of wiping (W/2) ± 100 μm off, the sample prepared carrys out the carbon content in measuring center region.
When the carbon content in the carbon content in surf zone 11 and central area 12 is compared, the invention is characterized in: the carbon content in surf zone 11 is less than the carbon content in central area 12 relatively.When carbon is present in the surf zone 11 of Mo sintered body (end cap body divides), the surface of Mo sintered body is sputtered and is easy to be etched.So preferably carbon is not present in surf zone 11.
On the other hand, when manufacturing Mo sintered body, mixing Mo powder and resin binder, to prepare molding, then sinter this molding.Now, most of resin binder has been burnouted, and a small amount of carbon left behind and becomes impurity, therefore causes substandard products.So, in order to eliminate the ill effect of resin binder, attempt not using resin binder to prepare molding.But, in this case, the problem that the rate of finished products having formed molding reduces greatly.But in an actual situation, the use of resin binder is inevitable really, makes carbon impurity easily be retained in Mo sintered body.
Usually, as the environment for use of magnetron, main flow uses the microwave with the frequency of about 2450MHz and the power output of about 500 to 1500W.Under the magnetron of the anode (not shown) comprising coiled type filament 1 and be arranged in vacuum tube (not shown) is operated in this environment for use, from coiled type filament 1 anode electron emission.The electronics launched by using these, is converted to large microwave by electronic energy.Therefore, by the electronic high-effective launched in vacuum tube to be converted to microwave be important.
In order to be microwave by the electronic switch of transmitting efficiently, it is important for eliminating the impurity from vacuum tube and eliminating the adverse effect of the level and smooth transmission of electronics.In the impurity comprised in Mo sintered body, carbon is a kind of being probably easily sputtered and the easy element-specific forming impurity.In addition, when carbon is sputtered, Mo also becomes and is easily sputtered together with carbon, and the durability of end cap is reduced.So the present invention specifies that carbon content in surf zone is lower than a preset range.
In addition, preferably Mo sintered body has 9.6g/cm
3or more density.More preferably, density is 9.6 to 10.0g/cm
3.When the density of Mo sintered body is less than 9.6g/cm
3time, may exist and not enough worry is become to the intensity of end cap.
On the other hand, the solid density of Mo is 10.22g/cm
3(with reference to " Physical and ChemicalScience Dictionary ").When the density of Mo sintered body is close to solid density, improve the intensity of Mo sintered body.But when density becomes too high, the Ru be included in brazing material becomes and is difficult to diffusion.Correspondingly, Mo sintered body has 9.6g/cm suitably
3or more density, preferred scope is 9.6 to 10.0g/cm
3, and still further preferred scope is 9.6 to 9.8g/cm
3.In this, density measurement is carried out according to Archimedes principle (method).
In addition, preferably for Mo sintered body, Mo(molybdenum) ratio be 99.9 quality % or more.Namely preferably, the amount of impurity element is 0.1 quality % or less.Particularly, the corresponding preferred amounts of impurity is as follows: namely, respectively, as impurity element, Al content is preferably 0.005 quality % or less, Ca content is 0.003 quality % or less, Cr content is 0.005 quality % or less, Cu content is 0.002 quality % or less, Fe content is 0.03 quality % or less, Mg content is 0.002 quality % or less, Mn content is 0.002 quality % or less, Ni content is 0.008 quality % or less, Pb content is 0.002 quality % or less, Si content is 0.005 quality % or less, and Sn content is preferably set to 0.002 quality % or less.
When above-mentioned impurity content is larger, so high impurity content constitutes the reason in the intensity reducing end cap, the life-span shortening magnetron, and becomes the reason of the joint defect between Mo-Ru brazing material and end cap.
In addition, as shown in Figure 2, end cap preferably has the thickness T of diameter L and 4mm or less of 10mm or less.
Then, Mo-Ru type brazing material will hereafter be explained.Preferably, Mo-Ru type brazing material is the brazing material of the Ru content with 35 to 50 quality %.At Ru content too lower than 35 quality % or undue large to such an extent as to more than in two kinds of situations of 50 quality %, the fusing point of brazing material becomes adversely high.Because Mo and Ru forms eutectic crystallization, preferably composition range is 40 to 45 quality % and Mo balance, and wherein composition is 42.9 quality % and Mo balance has the minimum fusing point of 1960 DEG C.
As the method for the fusing point of reduction brazing material, a kind of method can be adopted equally, wherein can add Ni etc. with 40 quality % or less amount to brazing material.In addition, it is also preferred that Mo-Ru type brazing material has 0.05 quality % or less C(carbon) content, 0.009 quality % or less Fe content and 0.007 quality % or less Ni content.When brazing material comprises a large amount of impurity, may exist the worry of these impurity by scattering in vacuum tube or splashing.
In addition, can adopt a kind of structure according to of the present invention equally in the end cap of magnetron, the end cap be wherein made up of Mo sintered body and Mo-Ru type brazing material is that overall joint forms.As shown in Figure 1, end cap is configured to have top end cap and bottom end cap, thus forms the cathode portion of magnetron.
The brazing material attachment part of any one in top end cap and bottom end cap must orientation downwards.Now, if the bond strength of the part between brazing material and end cap is not enough, then brazing material can be peeled off and come off.Peel off when brazing material and when coming off, form defect thus, thus reducing rate of finished products.So, ensure that the firm engagement between end cap and brazing material is important.
In addition, when Mo-Ru brazing material is integrally bonded to Mo sintered body surperficial, preferably, the Ru be included in Mo-Ru brazing material is diffused in Mo sintered body.It is also preferred that, the region of wherein having spread Ru is scope is from joint interface to the region apart from this part of 100 μm.
In this, " joint interface " refers to the surface of Mo-sintered body (end cap).The part of Mo sintered body (end cap) resistance brazing material can comprise engagement base part 8, wherein brazing material is engaged to end cap.In the engagement base part 8 of brazing material and end cap, when Ru spreads on end cap direction, the bond strength of brazing material can be strengthened.
In addition, equally for the situation that brazing material is engaged to the engagement sides part 9 of end cap, the same with the mode in engagement base part 8, when being included in the Ru in brazing material and spreading on end cap direction, the bond strength of brazing material can be improved equally.
As mentioned above, when improving the bond strength of end cap and brazing material, the defect can suppress the disengagement of such as brazing material and peel off in assembling-engaging process and so on, assembles and closing line round filament 1 in described assembling-engaging process.So, the process of the cathode portion manufacturing magnetron can be performed efficiently with high finished product rate.
Then, hereafter will explain that manufacture according to the present invention is used for the method for the end cap of magnetron.There is no particular limitation to be used for the method for end cap of magnetron according to manufacture of the present invention.But, as the method manufacturing end cap with high finished product rate efficiently, following method can be proposed.
Namely, the method characteristic being used for the end cap of magnetron according to manufacture of the present invention is to comprise: punching course, for by utilizing purity to be that the Mo powder of 99.9 quality % or more and resin binder carry out punching press and be molded Mo molding, described Mo molding has end cap shape; First sintering process, it for sintering Mo molding under redox condition, thus obtain the first sintered body; And second sintering process, for sintering the first sintered body under reducing atmosphere, thus obtain the second sintered body.
First, the Mo powder that purity is 99.9 quality % or more is prepared.Mo powder preferably has the average grain size (particle diameter) that scope is 1 to 8 μm.The impurity level be included in Mo powder is limited in 0.1 quality % or less.More preferably, Mo powder has following impurity content: namely as impurity element, Al content is 0.005 quality % or less, Ca content is 0.003 quality % or less, Cr content is 0.005 quality % or less, Cu content is 0.002 quality % or less, Fe content is 0.03 quality % or less, Mg content is 0.002 quality % or less, Mn content is 0.002 quality % or less, Ni content is 0.008 quality % or less, Pb content is 0.002 quality % or less, Si content is 0.005 quality % or less, Sn content is 0.002 quality % or less, and carbon content is 0.01 quality % or less.Preferably, such Mo powder with some impurity contents is used.
Then, mixing Mo powder and resin binder, and make it become graininess, size to be amplified.As resin binder, such as PVA(polyvinyl alcohol can be applied) etc. common resin binder.
Then, perform punching course in the following manner: loaded in metal-molding mould by granular for the one-tenth that so obtains powder, and punching press is molded the granular powder of one-tenth after loading, thus obtains the Mo molding with end cap shape.Now, punching press pressure is preferably set to 3 to 13 tons/cm
2the scope of (294 to 1274MPa).
When punching press pressure is less than 3 tons/cm
2time, the intensity of molding is insufficient.On the other hand, when punching press pressure is undue large to such an extent as to more than 13 tons/cm
2time, the density of molding becomes too greatly and occurs the diffusion of Ru hardly.Preferred punching press pressure set is at 4 to 10 tons/cm
2scope in.
Then, perform the first sintering process in the following manner: under redox condition, sinter the Mo molding so obtained, thus obtain the first sintered body.In this first sintering process, preferably, reach maximum the scope that temperature (most high sintering temperature) is set as 1000 to 1200 DEG C, and maximum reach temperature under retain (maintenance) molding retention time be set in the scope of 1 to 4 hour.When the second sintering process as described later is defined as main sintering, the first sintering process is regarded as interim sintering (or the intermediate sintering before main sintering).
When above-mentioned maximum reach temperature lower than 1000 DEG C time, the densification of molding becomes insufficient.On the other hand, when maximum reach temperature more than 1200 DEG C time, molding is too fine and close, and make in the process engaging Mo-Ru type brazing material, the diffusion of Ru is carried out insufficient.In addition, preferably redox condition is wet hydrogen gas.This wet hydrogen gas refers to the steam-laden hydrogen gas of bag.
The target of the first sintering process is not the process for making the densification of Mo sintered body turn to final products, but for sintering molding under redox condition, thus remove the carbon be present on the surface of Mo sintered body, and the process for preventing Mo sintered body to be too oxidized.
When using wet hydrogen (wrapping steam-laden hydrogen gas), can from the surface removal carbon of Mo sintered body.The carbon removed changes carbon dioxide (CO into
2) or carbon monoxide (CO) and being removed.This is because, the steam (H warm by heating
2o) become and be easy to react with carbon (C), make easily from Mo sintered body with carbon dioxide (CO
2) or carbon monoxide (CO) form remove carbon.
In addition, in the first sintering process, preferably spend 3 to 7 hours that Mo molding is reached temperature from the heating temperatures of 600 DEG C to maximum.When the firing rate in the first sintering process is too high, may occur having the Mo sintered body eliminating the inhomogeneities in resin binder or in the densification of sintered body, described resin binder is included in Mo sintered body.On the other hand, when the time of cost 7 hours or more heats molding, this inhomogeneities can be eliminated.But this process needs a large amount of time, thus reduces production efficiency.
In addition, in the first sintering process, in order to prevent Mo molding oxidized during sintering operation, preferably under the atmosphere comprising wet hydrogen gas, Mo molding is sintered.In this case, consider and prevent undue oxidation, preferably the internal atmosphere of sintering furnace substitutes, so the flow control of wet hydrogen gas is at 0.2m with nitrogen gas
3/ H(hour) or more, and more preferably, control at 0.2 to 17m
3in the scope of/H.
In addition, preferably, supply wet hydrogen gas as gas flow, and controls gas condition, to supply fresh wet hydrogen gas to Mo molding.In addition, if there is the gas flow rate of predetermined abundance, then the carbon content (carbon dioxide, carbon monoxide) removed from Mo molding can to the outside drain of sintering furnace together with this gas flow.
Especially, when multiple Mo molding be arranged in sintering boat (Mo boat) upper and a collection of Mo molding to 200 or more sinters (batch operation) simultaneously, be necessary the flow velocity controlling wet hydrogen gas.Now, preferably, the flow control of the wet hydrogen gas in the inner space of sintering furnace is at 2m
3/ H or more.
Fig. 3 shows when a collection of Mo molding is loaded sintering furnace and sinters it, an example of the layout of multiple Mo molding.In figure 3, Reference numeral 20 represents Mo molding, Reference numeral 21 represents sintering container, and Reference numeral 22 represents the sintering boat it being arranged Mo molding, and Reference numeral 23 represents the separator being used for providing gap to the part between adjacent multiple sintering boats 22.Multiple Mo molding 20 is arranged on sintering boat 22.
Now, for ease of through the gap each Mo molding, the gap between each Mo molding 20 is formed by the distance of 1mm or more.It is arranged multiple sintering boats 22 of multiple Mo molding 20 by the stacking setting of separator 23, thus form stacked body.This stacked body is arranged in sintering container 21.
When above-mentioned sintering container etc. is arranged in sintering furnace, can once sintered a collection of 200 or more, further 400 or more, the further Mo molding of 2000.In this regard, preferably, sintering boat, separator and sintering container are manufactured by Mo, and described Mo is refractory metal.In addition, if necessary, surface-coated can be used to have the sintering boat of oxide ceramics.
Then, perform the second sintering process, to sinter the first sintered body under the atmosphere comprising hydrogen gas, thus obtain the second sintered body.Second sintering process is the process corresponding to so-called main sintering process.
In the second sintering process, preferably, what sintered body was heated to maximumly reaches the scope that temperature (most high sintering temperature) is set as 1600 to 1900 DEG C, and for maximum reach temperature under retain (maintenance) first retention time of sintered body be set as 30 minutes to 5 hours.
When maximum reach temperature lower than 1600 DEG C time, carry out insufficient to the densification of sintered body, and the density of the second sintered body easily becomes and is less than 9.6g/cm
3.
On the other hand, when maximum reach temperature more than 1900 DEG C time, reach the fusing point 1960 to 2050 DEG C of temperature close to brazing material due to maximum, will the worry of fractional melting be crossed so may exist to brazing material.
When brazing material crosses fractional melting, defect when engaging with filament or guide rod may be caused.More preferably, the maximum temperature that reaches is in the scope of 1650 to 1800 DEG C.
When being less than 30 minutes in the maximum retention time reached at temperature, the densification of Mo sintered body is insufficient.On the contrary, constantly little more than 5 when the retention time, the worry Ru be included in brazing material is diffused into too much in Mo sintered body may be there is.
In addition, the same with the mode in the first sintering process, in order to prevent Mo sintered body oxidized, be necessary equally to perform the second sintering process under the atmosphere comprising hydrogen gas.Therefore, preferably, following method is taked: the internal atmosphere substituting sintering furnace in advance with nitrogen gas, then to this sintering furnace supply of hydrogen gas.
In addition, owing to preferably supplying fresh hydrogen gas, it is therefore preferable that and control hydrogen gas stream under the condition the same with the condition in the first sintering process.Especially, in order to obtain often a collection of 200 or more, the many uniform sintered body of further 400 or more, is necessary the flow velocity controlling wet hydrogen gas or hydrogen gas.
Hereinafter, explanation is used for the process of arranging Mo-Ru brazing material.Arrange that the method for Mo-Ru brazing material is roughly divided into two kinds of following methods.
First method is the method performing brazing material placement process, wherein, the first sintered body is arranged annular Mo-Ru type brazing material.This placement process can comprise: the method applying Mo-Ru type brazing material paste on the predetermined portions of end cap; End cap arranges the method for preformed ringwise brazing material; End cap is arranged and is pre-formed so that ringwise and be subject to the method for heat treated brazing material.
In order to perform placement process efficiently, preferably use annular brazing material, described brazing material is formed as ringwise and is subject to heat treatment.Due to heat treatment, add the intensity of annular Mo-Ru type brazing material, the serviceability of annular brazing material is improved.
Namely, when the annular brazing material of layout, there are the substandard products damaging annular brazing material hardly.The diameter dimension of annular brazing material is set as the size of the brazing material mounting portion (it corresponds to the composition surface 8 for engaging with brazing material) meeting end cap.The thickness of annular brazing material is preferably set in the scope of 0.3 to 2.5mm.
Second method can comprise: the method applying Mo-Ru brazing material paste on the second sintered body, and arranges annular brazing material, then carries out laser treatment with the method for stationary annular brazing material to it.
First method is the method for the process performed in the interstage between the first sintering process and the second sintering process for arranging brazing material.And second method is the method for the process performed after the second sintering process completes for arranging brazing material.
According to said process, the standard for magnetron (substantially) end cap of being specified by the present invention can be manufactured.Then, the extra process that can increase rate of finished products further will be explained hereinafter.
In the second sintered body, the situation of the projection (burr) partly forming Mo may be there is.In this case, add man-hour when performing tumbling to the second sintered body, can obtain the tumbling body not having burr to produce, be therefore preferred.
In this, the condition of tumbling processing is not particularly limited, but arbitrarily.But, the method as an example can be proposed.Such as, when use is provided with the centrifugal type drum machine of tank (pot), the volume settings of tank is 10 to 15 liters.Then, a collection of 4000 to 15000 Mo sintered bodies are loaded in this tank.In addition, polishing medium (polishing abrasive) and water are loaded in this tank.In this case, with the rotating speed rotary tank time of about 3 to 10 minutes of 60 to 130 turns per minute (r.p.m.), thus perform tumbling process, to remove the defect of such as burr and so on.After completing bowl-feed polishing process, perform the drying course being used for drying roller polishing body.
Then, the punch process being used for punching press tumbling body is preferably performed.When the surface of brazing material is formed as undulate shape, wave surface can be formed as in flat surfaces by punch process.
Although aforementioned tumbling processing is effective for removing the burr that the outer surface of Mo sintered body (end cap) is formed, if but burr formation on the surface of brazing material or burr formation on the inner surface of end cap, then can not obtain and remove enough effects of burr.
In addition, when polishing material is less, may occur that burr produces the situation on the surface of brazing material.In addition, when removing such burr, estimating that the absolute magnitude of brazing material may be not enough, making there is following worry: the shortage of brazing material has adverse effect to operations such as the soldering filaments in back segment process.
Correspondingly, effectively punch process is carried out to tumbling body, thus bring the effect of the profile of finishing (arrangement) brazing material.
In addition, removing the burr of failing to be processed by tumbling removal is possible equally.Arrange shape (removal burr) to be referred to as " sizing ".Arbitrary for performing the punching press pressure of this sizing.But preferably, punching press pressure set is at 6 tons/cm
2or in the scope of less (588MPa or less).
In addition, equally effectively pressing mold is heated to the temperature of 400 to 750 DEG C, then carries out punching operation.Particularly, in order to repair the profile of brazing material efficiently, pressing mold heating is made to be effective.
In addition, when punch process, on pressing mold, apply punching oil (lubricating oil), when then carrying out punch process, effectively can suppress the adhesion of pressing mold and Mo sintered body (end cap).When using punching oil (grease), preferably perform the skimming processes for making the product degreasing after punch process.In this skimming processes, effectively product is heated to the temperature of punching oil vaporization.
In addition, preferably carry out the 3rd sintering process, wherein, the product after degreasing is heat-treated.When carrying out tumbling processing, sizing processing or the degreasing for removing punching oil and processing, there is the possibility that end cap is oxidized.Therefore, preferably perform following process: in a hydrogen atmosphere the product of institute's degreasing is heat-treated, thus remove the oxide formed on the surface of the product.
As for heat treated condition, maximumly reach the scope that temperature is set as 600 to 900 DEG C, and perform heat treatment under hydrogen gas stream.When maximum reach temperature lower than 600 DEG C time, cost long time demonstrate oxide removal effect.On the other hand, when maximum reach temperature more than 900 DEG C time, further effect cannot be obtained and consequently cause increasing the manufacturing cost of end cap.
According to the as above method manufacturing the end cap being used for magnetron, end cap for magnetron can be manufactured efficiently with high rate of finished products.In addition, such as, when performing sintering operation when multiple sintering boat is stacking with multi-level approach, a collection of Mo molding that simultaneously can sinter 200 or more.
When use be used for the process of end cap of magnetron according to manufacture of the present invention time, even if the Mo molding of process 200 or more, rate of finished products also can be increased to 80% or more.
In addition, after said process, when perform tumbling processing, punch process (sizing processing), degreasing processing and the 3rd sintering process time, rate of finished products can be increased to 99% or more.
[embodiment]
Then, embodiments of the invention are specifically described hereinafter with reference to accompanying drawing and following concrete example.
(example 1 to 5)
Prepare high-purity Mo powder, described Mo powder has the average grain size of 3 μm and the purity of 99.9% or more.As the result of the amount of the impurity element of this high-purity Mo powder of investigation, the amount (involatile constituent) of impurity element is 0.08 quality % or less.As for the amount of each impurity element, Al content is 0.005 quality % or less, Ca content is 0.003 quality % or less, Cr content is 0.005 quality % or less, Cu content is 0.002 quality % or less, Fe content is 0.03 quality % or less, Mg content is 0.002 quality % or less, Mn content is 0.002 quality % or less, Ni content is 0.008 quality % or less, and Pb content is 0.002 quality % or less, and Si content is 0.005 quality % or less, Sn content is 0.002 quality % or less, and carbon content is 0.01 quality % or less.
(process A: molding process)
Then, Mo powder mixes with resin binder (PVA: polyvinyl alcohol (poly vinyl alcohol)), thus is prepared into granular powder.Then, granular powder will be become to load in molding die, thus become molding.Each punching press pressure (molded pressure) is set as the value shown in table 1.In this, the size of molding is as described below.That is, the diameter L of end cap is 7.5mm, and the thickness T of end cap is 2.5mm, and its internal diameter is 3.3mm, and the internal diameter it being arranged the part of brazing material is 3.9mm.
[table 1]
| Molding process A | Molded pressure |
| A1 | 3 tons/cm 2（294MPa） |
| A2 | 5 tons/cm 2（490MPa） |
| A3 | 10 tons/cm 2（980MPa） |
(the process B: the first sintering process)
As shown in Figure 3, the Mo boat 22 with following size as sintering boat 22 is prepared: long 320mm, wide 220mm, thick 15mm.Then, gap Mo boat arranged between the contiguous Mo molding of 500 Mo molding 20(ensures 1mm or more).Sintering boat 22 is upwards stacked into ten grades by separator 23, and the sintering boat piling poststack is arranged in (a collection of 5000 Mo moldings) in sintering container 21.Sintering container 21 grade is all loaded in push type sintering furnace, sinters under the sintering condition then shown in table 2, thus preparation the first sintered body.When loading sintering container, internal atmosphere substitutes with nitrogen gas, after this, with the predetermined flow velocity hereafter shown in table 2 to sintering furnace supply wet hydrogen gas.
[table 2]
(the process C: the second sintering process)
About the first sintered body of so preparation, under the sintering condition hereafter shown in table 3, perform the second sintering process.In the second sintering process, to carrying out stacking with the identical sintering boat used in the first sintering process, and stacking sintering container is loaded in the second sintering furnace.In addition, for when sintering the second sintered body, furnace atmosphere substitutes with nitrogen gas in advance, after this, controls the flow velocity of the hydrogen gas to stove supply.
[table 3]
As described hereinafter, combine above-mentioned molding process A, the first sintering process B and the second sintering process C, and perform the process combined, thus divide according to each body for the end cap of magnetron of example 1 to 5 preparation.
Example 1:A1 → B1 → C1
Example 2:A1 → B2 → C2
Example 3:A2 → B2 → C2
Example 4:A2 → B3 → C3
Example 5:A3 → B4 → C4
In addition, as comparative example 1, except the wet hydrogen gas and changing in process B4 is hydrogen gas, the anabolic process identical with example 5 is performed, thus according to the end cap of comparative example 1 for the preparation of magnetron.
About the end cap for magnetron according to example 1 to 5 and comparative example 1 of like this preparation, measure density and the rate of finished products of Mo sintered body (end cap).In addition, 11(scope in measured surface region is from the surface of Mo sintered body to the region apart from this part of 100 μm) and central area 12(scope be from the core 10 thickness direction of the sidewall of Mo sintered body to apart from this ± central area of the distance of 100 μm) in carbon content (wt.ppm).
Above-mentioned density is measured by using Archimedes method.In addition, rate of finished products is measured as the ratio of the qualified product (good merchantable brand) often in a collection of 5000.In addition, by using High Frequency IR-Absorption Spectrometric absorption process to measure carbon content.In hereafter measurement result shown in table 4.
[table 4]
Can find out significantly from the result shown in table 4, about the end cap for magnetron according to each example, the density of end cap is 9.6g/cm
3or more, and rate of finished products is 90% or more.In addition, according to the end cap of each example, the carbon amounts (carbon content) in surf zone is lower than the carbon amounts of central area.
Then, magnetron is manufactured by using by the end cap formed according to the Mo sintered body of each example and comparative example.Then, the life-span of magnetron is measured.
In other words, the predetermined portions of end cap applies Mo-Ru brazing material paste (comprising Ru, 0.05wt% of Mo, 43wt% of 57wt% or less carbon impurity, 0.009wt% or less iron and 0.007wt% or less Ni).Then, as shown in Figure 1, soldering is carried out to centre pilot 5, side guide rod 6 and coiled type filament 1, thus manufacture cathode construction.Then, this cathode construction is assembled in vacuum tube, thus is configured to magnetron.Subsequently, by using magnetron configuration microwave oven, and the life-span of microwave oven is measured.
The life-span of microwave oven is measured according to following methods.That is, the operational cycle of the 1500W of 5 minutes is defined as one group of operation.After completing 1000 groups and 10000 groups of operational cycle, check whether the Mo sintered body (end cap surface) of each microwave oven occurs corroding.In hereafter result shown in table 5.
[table 5]
Can find out significantly from the result shown in table 5, until complete in end caps all in the short time period of 1000 groups of operational cycle and all there is no substandard products (erosion).But, until complete in the long-time section of 10000 groups of operational cycle, observe the erosion of the cathode construction its surface being comprised to a large amount of carbon, as in comparative example 1.
When the surf zone of end cap has been etched, carbon content will spread in vacuum tube, thus reduce the function of magnetron.In other words, about the magnetron not causing the end cap corroded using each example, can determine that corresponding magnetron is very outstanding in long-term reliability.
(example 6 to 10)
Then, as can the method for enhance yield further, the example being wherein integrated with following process will be explained.
About the end cap for magnetron of example 2 and 3, perform following process.
(process D: brazing material placement process)
As brazing material placement process, carry out following process.
Process D1: will arrange that the process conformity of preburned Mo-Ru brazing material is the interstage between the first sintering process (process B) and the second sintering process (process C).
Process D2: will arrange preburned Mo-Ru brazing material, the process conformity after this engaging this brazing material by laser emission is the stage after process C.
(process E: bowl-feed polishing process)
The end cap each being used for magnetron mixes with polishing material and water.About this mixing, under the condition (a collection of amount, the rotary speed of tank and polishing time) hereafter shown in table 6, perform bowl-feed polishing process.
[table 6]
| Bowl-feed polishing process E | The amount of 1 batch | Tank rotary speed/Min | Polishing time (Min) |
| E1 | 5000 | 60 | 5 |
| E2 | 8000 | 100 | 8 |
| E3 | 12000 | 120 | 10 |
(process F: type-approval process)
For each end cap for magnetron through process E, perform type-approval process, the punching press pressure shown in table 7 is applied to end cap, thus repair the shape relaxed of (finishing) brazing material.In this, when applying punching press pressure, the surface of molding die is coated with lubricating oil.
[table 7]
(process G: skimming processes)
For each end cap for magnetron through process F, perform skimming processes, to make end cap degreasing, thus remove lubricating oil.
(the process H: the three sintering process)
About each end cap for magnetron through process G, under the condition hereafter shown in table 8, perform the 3rd sintering process of sintering end cap further.
[table 8]
| 3rd sintering process H | Maximumly reach temperature | Hydrogen gas flow velocity |
| H1 | 640℃ | 3m 3/H |
| H2 | 700℃ | 5m 3/H |
| H3 | 850℃ | 7m 3/H |
For aforesaid example 2 and 3, as mentioned below, above-mentioned for each shown in table 6 to 8 brazing material placement process D, bowl-feed polishing process E, type-approval process F, skimming processes G and the 3rd sintering process H are combined, and perform anabolic process, thus preparation is according to each end cap for magnetron of example 6 to 10.
Example 6: example 2 → (process D1) → process E1 → process F1 → process G → process H3.
Example 7: example 2 → (process D1) → process E2 → process F1 → process G → process H1.
Example 8: example 2 → process D2 → process E3 → process F2 → process G → process H2.
Example 9: example 3 → process D2 → process E2 → process F1 → process G → process H1.
Example 10: example 3 → process E3 → process G → process H2 → apply and dry brazing material paste.
For the end cap for magnetron of the preparation like this according to example 6 to 10, measure rate of finished products in the mode the same with the mode in example 1.In hereafter measurement result shown in table 9.
[table 9]
Can find out significantly from the result shown in table 9, according to the end cap for magnetron through bowl-feed polishing process E, type-approval process F, skimming processes G and the 3rd sintering process H of each example, become possibility by having because burr or the defective end cap being used for magnetron that loses the open defect that shape is brought convert qualified product (good merchantable brand) to.
In addition, according to the example of the method for the end cap manufactured for magnetron, even if can guarantee, when implementing various method with brazing material placement process D, still greatly can improve rate of finished products.
In this regard, as the result measured according to the carbon amounts in the surf zone of the end cap of each example, in carbon amounts, there is not the change of the state from example 2 and 3.So, can determine that the end cap of example 6 to 10 is also very outstanding in long-term reliability equally.
Industrial applicability
According to the end cap for magnetron of the present invention, carbon content residual in the surf zone of Mo end cap is less.So when Mo end cap is used as magnetron, Mo end cap is sputtered hardly, thus can extend the life-span of magnetron, and can obtain the long-term reliability of magnetron.In addition, be used for the method for the end cap of magnetron according to manufacture of the present invention, end cap of the present invention can be manufactured efficiently with high rate of finished products.
Description of reference numerals
1 ... coiled type filament, 5 ... centre pilot, 6 ... side guide rod, 7 ... centre pilot connection hole portions, 8 ... the engagement base part of end cap and brazing material, 9 ... the engagement sides part of end cap and brazing material, 10 ... central point on thickness direction, 11 ... surf zone, 12 ... central area, 20 ... Mo molding, 21 ... sintering container, 22 ... sintering boat, S ... surface
Claims (13)
1. the end cap for magnetron be made up of Mo sintered body, it is characterized in that: scope is have 30ppm or less carbon content from the surface of described Mo sintered body to the surf zone apart from this degree of depth of 100 μm, scope be from the core the thickness direction in the sidewall portion of described Mo sintered body to apart from this ± central area of the distance of 100 μm has the carbon content of 50 to 300ppm.
2. the end cap for magnetron according to claim 1, wherein, described Mo sintered body has 9.6 to 10.0g/cm
3density.
3. the end cap for magnetron according to claim 1 and 2, wherein, described Mo sintered body has the Mo content of 99.9 quality % or more, as 0.005 quality % or less Al content of impurity element, 0.003 quality % or less Ca content, 0.005 quality % or less Cr content, 0.002 quality % or less Cu content, 0.03 quality % or less Fe content, 0.002 quality % or less Mg content, 0.002 quality % or less Mn content, 0.008 quality % or less Ni content, 0.002 quality % or less Pb content, 0.005 quality % or less Si content, and 0.002 quality % or less Sn content.
4. the end cap for magnetron according to claim 1 and 2, wherein, the described end cap for magnetron is provided with Mo-Ru brazing material.
5. the end cap for magnetron according to claim 4, wherein, described Mo-Ru brazing material has 0.05 quality % as impurity element or less carbon content, 0.009 quality % or less Fe content, and 0.007 quality % or less Ni content.
6. a magnetron, forms according to the configuration of the end cap for magnetron in claim 1-5 described in any one by using.
7. manufacture a method for the end cap being used for magnetron, described method comprises:
Punching course, Mo powder and resin binder stamping die fixture for being had the purity of 99.9 quality % or more by utilization have the Mo molding of end cap shape;
First sintering process, for sintering described Mo molding under redox condition, thus obtains the first sintered body; And
Second sintering process, for sintering described first sintered body under reducing atmosphere, thus obtains the second sintered body and Mo sintered body,
The end cap for magnetron of acquisition like this is configured to: scope is be set as 30ppm or less from the surface of described Mo sintered body to the carbon content of the surf zone apart from this degree of depth of 100 μm, and scope be from the core the thickness direction in the sidewall portion of described Mo sintered body to apart from this ± carbon content of the central area of the distance of 100 μm is set as 50 to 300ppm.
8. manufacture according to claim 7 is used for the method for the end cap of magnetron, and wherein, described redox condition is wet hydrogen gas.
9. manufacture according to claim 8 is used for the method for the end cap of magnetron, wherein, is 0.2m at the flow rate set of described wet hydrogen gas
3/ hour or more, the maximum sintering temperature that reaches is 1000 to 1200 DEG C, and the described maximum retention time reached under sintering temperature performs described first sintering process under the condition of 1 to 4 hour.
10. manufacture according to claim 9 is used for the method for end cap of magnetron, wherein, cost 3 to 7 hours by described Mo molding from the heating temperatures of 600 DEG C to maximum reach the condition of sintering temperature perform described first sintering process.
11. manufactures according to claim 7 or 8 are used for the method for the end cap of magnetron, wherein, are 0.2m at the flow rate set of hydrogen gas
3/ hour or more, the maximum sintering temperature that reaches is 1600 to 1900 DEG C, and the described maximum retention time reached under sintering temperature performs described second sintering process under the condition of 30 minutes to 5 hours.
12. manufactures according to claim 7 or 8 are used for the method for the end cap of magnetron, wherein, carry out tumbling processing further to described second sintered body, thus obtain tumbling body.
13. manufactures according to claim 12 are used for the method for the end cap of magnetron, wherein, carry out punch process further to described tumbling body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010162202 | 2010-07-16 | ||
| JP2010-162202 | 2010-07-16 | ||
| PCT/JP2011/066243 WO2012008580A1 (en) | 2010-07-16 | 2011-07-15 | End hat for magnetron, process for producing same, and magnetron |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103003909A CN103003909A (en) | 2013-03-27 |
| CN103003909B true CN103003909B (en) | 2015-08-19 |
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|---|---|
| JP (1) | JP5814236B2 (en) |
| KR (1) | KR101368145B1 (en) |
| CN (1) | CN103003909B (en) |
| MY (1) | MY157350A (en) |
| WO (1) | WO2012008580A1 (en) |
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| CN106531597B (en) * | 2016-12-29 | 2019-04-02 | 广东威特真空电子制造有限公司 | The method of the cathode assembly of magnetron and its cathode assembly and manufacture magnetron |
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|---|---|---|---|---|
| JPS58157593A (en) * | 1982-03-12 | 1983-09-19 | Tokyo Tungsten Co Ltd | Method for brazing to metallic parts having high melting point and hard meltability |
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| CN1176479A (en) * | 1996-07-15 | 1998-03-18 | 株式会社东芝 | Terminal cap parts for magnetron and its producing method |
| JPH11335705A (en) * | 1998-05-28 | 1999-12-07 | Toshiba Corp | Production of sintered article |
| JP2000173483A (en) * | 1998-12-03 | 2000-06-23 | Matsushita Electronics Industry Corp | Negative electrode part for magnetron, and magnetron device using it |
| KR20090093637A (en) * | 2008-02-29 | 2009-09-02 | 안의현 | Melting contact metal for connecting filament and Mo hat for magnetron cathod |
| CN101568402A (en) * | 2007-10-31 | 2009-10-28 | 东芝北斗电子株式会社 | Soldering material, lamp bulb, magnetron and soldering method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62208527A (en) * | 1986-03-07 | 1987-09-12 | Toho Kinzoku Kk | Manufacture of end cap for magnetron |
| JP2690901B2 (en) * | 1987-07-13 | 1997-12-17 | 株式会社日立製作所 | Magnetron |
| JP3718321B2 (en) * | 1996-07-15 | 2005-11-24 | 株式会社東芝 | End hat component for magnetron and manufacturing method thereof |
-
2011
- 2011-07-15 JP JP2012524611A patent/JP5814236B2/en active Active
- 2011-07-15 WO PCT/JP2011/066243 patent/WO2012008580A1/en active Application Filing
- 2011-07-15 CN CN201180035073.9A patent/CN103003909B/en active Active
- 2011-07-15 MY MYPI2012701313A patent/MY157350A/en unknown
- 2011-07-15 KR KR1020137001043A patent/KR101368145B1/en active IP Right Grant
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58157593A (en) * | 1982-03-12 | 1983-09-19 | Tokyo Tungsten Co Ltd | Method for brazing to metallic parts having high melting point and hard meltability |
| JPS6086731A (en) * | 1983-10-18 | 1985-05-16 | Tokyo Tungsten Co Ltd | Manufacture of parts for magnetron |
| JPH01156449A (en) * | 1987-12-11 | 1989-06-20 | Tokyo Tungsten Co Ltd | Molybdenum sintered compact and its production |
| JPH08339768A (en) * | 1994-05-10 | 1996-12-24 | Tokyo Tungsten Co Ltd | Ring for brazing |
| CN1176479A (en) * | 1996-07-15 | 1998-03-18 | 株式会社东芝 | Terminal cap parts for magnetron and its producing method |
| JPH11335705A (en) * | 1998-05-28 | 1999-12-07 | Toshiba Corp | Production of sintered article |
| JP2000173483A (en) * | 1998-12-03 | 2000-06-23 | Matsushita Electronics Industry Corp | Negative electrode part for magnetron, and magnetron device using it |
| CN101568402A (en) * | 2007-10-31 | 2009-10-28 | 东芝北斗电子株式会社 | Soldering material, lamp bulb, magnetron and soldering method |
| KR20090093637A (en) * | 2008-02-29 | 2009-09-02 | 안의현 | Melting contact metal for connecting filament and Mo hat for magnetron cathod |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5814236B2 (en) | 2015-11-17 |
| JPWO2012008580A1 (en) | 2013-09-09 |
| CN103003909A (en) | 2013-03-27 |
| KR101368145B1 (en) | 2014-02-27 |
| WO2012008580A1 (en) | 2012-01-19 |
| KR20130020921A (en) | 2013-03-04 |
| MY157350A (en) | 2016-05-31 |
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