CN103003909A - End hat for magnetron, process for producing same, and magnetron - Google Patents
End hat for magnetron, process for producing same, and magnetron Download PDFInfo
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- CN103003909A CN103003909A CN2011800350739A CN201180035073A CN103003909A CN 103003909 A CN103003909 A CN 103003909A CN 2011800350739 A CN2011800350739 A CN 2011800350739A CN 201180035073 A CN201180035073 A CN 201180035073A CN 103003909 A CN103003909 A CN 103003909A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/04—Cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/04—Cathodes
- H01J23/05—Cathodes having a cylindrical emissive surface, e.g. cathodes for magnetrons
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/50—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field
- H01J25/52—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field with an electron space having a shape that does not prevent any electron from moving completely around the cathode or guide electrode
- H01J25/58—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field with an electron space having a shape that does not prevent any electron from moving completely around the cathode or guide electrode having a number of resonators; having a composite resonator, e.g. a helix
- H01J25/587—Multi-cavity magnetrons
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Abstract
Disclosed is an end hat for magnetrons which is constituted of sintered Mo, characterized in that the surface area ranging from the surface of the sintered Mo to a depth of 100 [mu]m therefrom has a carbon content of 30 ppm or less and the central area ranging from the thickness-direction center of the sintered Mo to distances of +-100 [mu]m therefrom has a carbon content of 50-300 ppm. By reducing the carbon content in the surface area, long-term reliability can be improved. The end hat for magnetrons which has high long-term reliability can be produced in a high yield.
Description
Technical field
The magnetron that the present invention relates to a kind of end cap for magnetron, its manufacture method and use this end cap, and more particularly, the magnetron that relates to a kind of end cap for magnetron, its manufacture method and use this end cap, described end cap can prolong the life-span of magnetron, and can show the high reliability in long-time section.
Background technology
Along with the cathode portion of magnetron is used for roaster (microwave oven), cathode portion is widely known by the people, and described cathode portion is configured to mainly comprise: coiled type filament 1 is used for heat of emission electronics; Top end cap 3 and bottom end cap 4 are consisted of and are joined to by Mo-Ru brazing material 2 upper part and the end portion of coiled type filament 1 by Mo; Centre pilot (lead) 5 connects and is fixed to top end cap 3; And side guide rod 6, connect and be fixed to bottom end cap 4.
Magnetron is a kind of dipole vacuum tube that classifies as for the electron tube of launched microwave.Magnetron is widely used in: microwave communication facility and household electric appliances (household electrical appliance).
In this magnetron, when the dc high voltage with thousands of volts is applied on cylindrical cathode and the part between the anode of negative electrode, produce and launched microwave.
Now, magnetron has been widely used as the roaster part according to inductive heating system cooking food, uses the microwave of the power output of frequency with 2450MHz and about 500-1500W in described inductive heating system.
As make the method for the conventional end cap that is used for magnetron, for example, as at the Japanese patent gazette (No.3-51048 that has examined; Patent document 1) disclosed in, the method for sintering Mo powder has been proposed.In patent document 1, a kind of method is disclosed, wherein the Mo powder is carried out molded, thereby Mo sintered body in the middle of making; And in the middle of being arranged on, the intermediate sintering body of another Mo-Ru brazing material on the Mo sintered body, after this, carries out main sintering operation.By this manufacture method, can improve the bond strength between Mo-Ru brazing material and the Mo sintered body (end cap).
Yet, caused following problem: when being assembled to end cap in the magnetron, adversely reduced long-term reliability (having shortened the life-span).
List of documents
Patent document
Patent document 1: Japan Patent (examining) No.3-51048
Summary of the invention
The problem that invention will solve
As the result who studies the reason that reduces above-mentioned long-term reliability, the present inventor has been found that the carbon that exists on the surface of Mo sintered body (end cap) is the reason that reduces long-term reliability.In addition, also obtained following discovery.Be carbon source from resin binder, described resin binder is used for molded Mo molding.
Be present in when carbon on the surface of end cap, and when being applied to high voltage on the end cap in the vacuum tube, the surface of end cap becomes and is easy to by sputter.Because this sputtering phenomenon, the surface earthing of end cap also is etched, thereby has increased the carbon content in the vacuum atmosphere.As a result, confirm to have reduced the power output of magnetron, the life-span of adversely having reduced magnetron.
Under above-mentioned environment, the end cap for the routine that is used for magnetron has the further technical requirement that improves its life characteristics.
Realized the present invention for reaching above-mentioned specification requirement, and target of the present invention provides the end cap that is used for magnetron of showing high reliability, the method for making end cap is provided, and the magnetron with fabulous rate of finished products and production efficiency is provided.
The means of dealing with problems
In order to realize above-mentioned target, the invention provides the end cap for magnetron, it is made of the Mo sintered body, it is characterized in that: scope is for having 30ppm or carbon content still less from the surface of Mo sintered body to the surf zone apart from the degree of depth of this 100 μ m, scope for from the core on the thickness direction of Mo sintered body to apart from this ± central area of the distance of 100 μ m has 50 to 300ppm or still less carbon content.
In addition, at above-mentioned end cap for magnetron, preferably the Mo sintered body has 9.6 to 10.0g/cm
3Density.
In addition, at above-mentioned end cap for magnetron, preferably, the Mo sintered body has 99.9 quality % or more Mo content, as 0.005 quality % of impurity element or Al content still less, 0.003 quality % or Ca content still less, 0.005 quality % or Cr content still less, 0.002 quality % or Cu content still less, 0.03 quality % or Fe content still less, 0.002 quality % or Mg content still less, 0.002 quality % or Mn content still less, 0.008 quality % or Ni content still less, 0.002 quality % or Pb content still less, 0.005 quality % or Si content still less, and 0.002 quality % or Sn content still less.
In addition, at above-mentioned end cap for magnetron, equally preferably, provide the Mo-Ru brazing material to the end cap that is used for magnetron.
In addition, at above-mentioned end cap for magnetron, equally preferably, the Mo-Ru brazing material has 0.05 quality % or the carbon content still less as impurity element, 0.009 quality % or Fe content still less, and 0.007 quality % or Ni content still less.
In addition, by using above-mentioned end cap for magnetron to dispose according to magnetron of the present invention.
The method of making the end cap that is used for magnetron comprises: punching course is used for having 99.9 % by weight or the Mo powder of more purity and the Mo molding that resin binder stamping die fixture has the end cap shape by utilization; The first sintering process is used for sintering Mo molding under redox condition, thereby obtains the first sintered body; And second sintering process, be used for sintering the first sintered body under reducing atmosphere, thereby obtain the second sintered body.
In addition, in the method for above-mentioned manufacturing for the end cap of magnetron, preferably, described redox condition is wet hydrogen gas.In addition, equally preferably, carry out under the following conditions the first sintering process: the flow velocity of wet hydrogen gas is set as 0.2m
3/ hour or more, it is 1000 to 1200 ℃ that maximum reaches sintering temperature, and the maximum retention time that reaches sintering temperature is 1 to 4 hour.
In addition, be used for the method for the end cap of magnetron in above-mentioned manufacturing, equally preferably, the Mo molding be heated to from 600 ℃ temperature under the condition that maximum reaches sintering temperature cost 3 to 7 hours and carry out the first sintering process.In addition, equally preferably, be set as 0.2m at the flow velocity of hydrogen gas
3/ hour or more, it is 1600 to 1900 ℃ that maximum reaches sintering temperature, and is to carry out the second sintering process under 30 minutes to 5 hours the condition in the retention time that maximum reaches sintering temperature.
In addition, in the method for above-mentioned manufacturing for the end cap of magnetron, equally preferably, further carry out tumbling processing (barrel-polishing work) for the second sintered body, thereby obtain the tumbling body.In addition, equally preferably, further carry out punch process for the tumbling body.
In addition, the method that is used for the end cap of magnetron in above-mentioned manufacturing, equally preferably, the end cap that is used for magnetron that so obtains is configured to: scope is for being set as 30ppm or still less from the surface of Mo sintered body to the carbon content apart from the surf zone of the degree of depth of this 100 μ m, and scope for from the core on the thickness direction of Mo sintered body to apart from this ± carbon content of the central area of the distance of 100 μ m is set as 50 to 300ppm or still less.
The beneficial effect of the invention
According to the end cap for magnetron of the present invention, carbon content residual in the surf zone of Mo end cap is very little.So when the Mo end cap was used as magnetron, therefore the Mo end cap can prolong the life-span of magnetron, and can obtain the long-term reliability of magnetron hardly by sputter.
In addition, according to the method for manufacturing of the present invention for the end cap of magnetron, can make efficiently end cap of the present invention with high rate of finished products.
Description of drawings
Fig. 1 shows the according to an embodiment of the invention sectional view of the structure of the cathode portion of magnetron.
Fig. 2 shows the sectional view of the structure of the end cap that is used for according to an embodiment of the invention magnetron.
Fig. 3 shows the sectional view of the state when once packing a plurality of moldings into sintering furnace.
Embodiment
Hereinafter, explain for finishing pattern of the present invention with reference to accompanying drawing.
The end cap that is used for magnetron that is made of the Mo sintered body is characterised in that: scope is for having 30ppm or carbon content still less from the surface of Mo sintered body to the surf zone apart from the degree of depth of this 100 μ m, and scope for from the core on the thickness direction of Mo sintered body to apart from this ± central area of the distance of 100 μ m has 50 to 300ppm or still less carbon content.
Fig. 2 shows an embodiment for the end cap of magnetron.In Fig. 2, Reference numeral 2 expression brazing materials, Reference numeral 3 expression top end caps (the end cap body divides), Reference numeral 7 expression centre pilot connection hole portions, the engage base part of Reference numeral 8 expression end caps and brazing material, the engagement sides part of Reference numeral 9 expression end caps and brazing material.In this regard, although Fig. 2 exemplarily shows the top end cap, the basic structure of the bottom end cap basically basic structure with the top end cap is the same.In addition, Fig. 2 shows brazing material 2 state mounted thereto.
The end cap body divides 3 to be formed by the Mo sintered body.This Mo sintered body is made as follows: the Mo powder is carried out molded, sintering molding under predetermined condition, thereby preparation Mo sintered body.After a while preferred manufacture method will be described.
End cap for magnetron according to the present invention is made of the Mo sintered body.As shown in Figure 2, in scope for from the surperficial S of Mo sintered body to the carbon content apart from the surf zone 11 of the degree of depth of this 100 μ m being 30ppm or still less, and scope for the core (central point) 10 from the thickness direction of Mo sintered body to apart from this ± carbon content the central area 12 of the distance of 100 μ m is 50 to 300ppm or still less.
In this, term " surface " refers to the arbitrary surfaces S that the end cap body divides.Term " scope is the surf zone from the degree of depth of surface to 100 μ m " refers to zone 11, and described regional 11 scope is for from arbitrary surfaces S to being the part of 100 μ m with the distance of surperficial S on depth direction.In the present invention, the carbon content in the surf zone 11 is appointed as 30ppm or still less.Preferably, carbon content is 20ppm or still less (comprises zero ppm).
In addition, scope for core (central point) 10 from the thickness direction of Mo sintered body to apart from this ± carbon content the central area 12 of the distance of 100 μ m is 50 to 300ppm or still less.
In this, term " central area " refer to scope for from the central point (W/2) of W to apart from this ± zone of the distance of 100 μ m, described W is the width on the thickness direction of the Mo sintered body shown in Fig. 2.In Fig. 2, although exemplarily show the central area of the sidewall sections of end cap, can take out from base section the sample (sample) of central area equally.
Carry out the method for measuring carbon content according to the High Frequency IR-Absorption Spectrometric absorption process.The scope of wiping off in surf zone 11 is the part of 100 μ m for the surperficial S distance of distance, thereby obtains sample (sample).By using the sample that is prepared by the zone of wiping (W/2) ± 100 μ m off to come carbon content in the measuring center zone.
When the carbon content in the carbon content in the surf zone 11 and the central area 12 is compared, the invention is characterized in: the carbon content in the surf zone 11 is relatively less than the carbon content in the central area 12.When carbon was present in the Mo sintered body surf zone 11 of (the end cap body divides), the surface of Mo sintered body was by sputter and be easy to be etched.So preferably carbon is not present in the surf zone 11.
On the other hand, when making the Mo sintered body, mix Mo powder and resin binder with preparation molding, then this molding of sintering.At this moment, most of resin binder has been burnouted, and a small amount of carbon left behind and become impurity, therefore causes substandard products.So, in order to eliminate the ill effect of resin binder, attempted not preparing molding with resin binder.Yet, in this case, formed the problem that the rate of finished products of molding reduces greatly.Yet in the situation of reality, the use of resin binder is inevitably really, so that carbon impurity is retained in the Mo sintered body easily.
Usually, as the environment for use of magnetron, main flow is to use the microwave of frequency and about power output of 500 to 1500W with about 2450MHz.The magnetron that comprises coiled type filament 1 and be arranged on the anode (not shown) in the vacuum tube (not shown) is operated under this environment for use, from coiled type filament 1 anode electron emission.By using the electronics of these emissions, electronic energy is converted to large microwave.Therefore, it is important being converted to microwave the electronic high-effective that will launch in vacuum tube.
In order to be microwave with the electronic switch of emission efficiently, it is important eliminating from the impurity of vacuum tube and the adverse effect eliminated the level and smooth transmission of electronics.In the impurity that comprises in the Mo sintered body, carbon is a kind of probably easily by sputter and consist of easily the element-specific of impurity.In addition, when carbon during by sputter, Mo also becomes easily with carbon by sputter, so that the durability of end cap reduces.So the carbon content in the regulation surf zone of the present invention is lower than a preset range.
In addition, preferably the Mo sintered body has 9.6g/cm
3Or more density.More preferably, density is 9.6 to 10.0g/cm
3When the density of Mo sintered body less than 9.6g/cm
3The time, the worry that may exist the intensity to end cap to become not enough.
On the other hand, the solid density of Mo is 10.22g/cm
3(with reference to " Physical and Chemical Science Dictionary ").When the density of Mo sintered body during near solid density, improved the intensity of Mo sintered body.Yet, when density becomes too high, be included in Ru in the brazing material and become and be difficult to diffusion.Correspondingly, the Mo sintered body has 9.6g/cm suitably
3Or more density, preferred scope is 9.6 to 10.0g/cm
3, and still further preferred scope be 9.6 to 9.8g/cm
3In this, come density measurement according to Archimedes principle (method).
In addition, ratio preferably for the Mo sintered body, Mo(molybdenum) is 99.9 quality % or more.Namely preferably, the amount of impurity element is 0.1 quality % or still less.Particularly, the corresponding preferred amounts of impurity is as follows: namely, respectively, as impurity element, Al content is preferably 0.005 quality % or still less, Ca content is 0.003 quality % or still less, Cr content is 0.005 quality % or still less, and Cu content is 0.002 quality % or still less, and Fe content is 0.03 quality % or still less, Mg content is 0.002 quality % or still less, Mn content is 0.002 quality % or still less, and Ni content is 0.008 quality % or still less, and Pb content is 0.002 quality % or still less, Si content is 0.005 quality % or still less, and Sn content is preferably set to 0.002 quality % or still less.
When above-mentioned impurity content was larger, so high impurity content had consisted of the intensity that reduces end cap, has shortened the reason in the life-span of magnetron, and has become the reason of the joint defect between Mo-Ru brazing material and the end cap.
In addition, as shown in Figure 2, end cap preferably has 10mm or less diameter L and 4mm or less thickness T.
Then, hereinafter will explain Mo-Ru type brazing material.Preferably, Mo-Ru type brazing material is the brazing material with Ru content of 35 to 50 quality %.To such an extent as to too be lower than 35 quality % or undue large surpassing in two kinds of situations of 50 quality % at Ru content, it is adversely high that the fusing point of brazing material becomes.Because Mo and Ru form eutectic crystallization, preferably composition range is 40 to 45 quality % and Mo balance, and wherein composition is that 42.9 quality % and Mo balance have 1960 ℃ minimum fusing point.
Method as the fusing point that reduces brazing material can adopt a kind of method equally, wherein can add Ni etc. to brazing material with 40 quality % or amount still less.In addition, equally preferably Mo-Ru type brazing material has 0.05 quality % or C(carbon still less) content, 0.009 quality % or Fe content still less and 0.007 quality % or Ni content still less.When brazing material comprises a large amount of impurity, may exist to these impurity will be in vacuum tube scattering or the worry of splashing.
In addition, at the end cap for magnetron according to the present invention, can adopt a kind of structure equally, the end cap that wherein is made of Mo sintered body and Mo-Ru type brazing material is that whole the joint forms.As shown in Figure 1, end cap is configured to have top end cap and bottom end cap, thereby consists of the cathode portion of magnetron.
The brazing material attachment part of any one in top end cap and the bottom end cap is orientation downwards.At this moment, if the bond strength of the part between brazing material and the end cap is not enough, then brazing material can be peeled off and come off.When brazing material is peeled off and come off, consist of thus defective, thereby reduced rate of finished products.So, guarantee that the firm engagement between end cap and the brazing material is important.
In addition, when the Mo-Ru brazing material is integrally bonded to Mo sintered body surperficial, preferably, the Ru that is included in the Mo-Ru brazing material is diffused in the Mo sintered body.The zone of equally preferably, wherein having spread Ru is that scope is to the zone apart from the part of this 100 μ m from joint interface.
In this, " joint interface " refers to the surface of Mo-sintered body (end cap).The part of Mo sintered body (end cap) resistance brazing material can comprise engage base part 8, wherein brazing material is engaged to end cap.In the engage base part 8 of brazing material and end cap, when Ru when the end cap direction spreads, can strengthen the bond strength of brazing material.
In addition, the same with mode in the engage base part 8 equally for the situation of engagement sides part 9 that brazing material is engaged to end cap, when the Ru in being included in brazing material spreads in the end cap direction, can improve equally the bond strength of brazing material.
As mentioned above, when having improved the bond strength of end cap and brazing material, in assembling-engaging process, can suppress such as the disengagement of brazing material and the defective peeling off, assembling and closing line round filament 1 in described assembling-engaging process.So, can carry out efficiently with high finished product rate the process of the cathode portion of making magnetron.
Then, hereinafter will explain the method that is used for the end cap of magnetron according to manufacturing of the present invention.Be used for the method for end cap of magnetron there is no particular limitation according to manufacturing of the present invention.Yet the method as make efficiently end cap with high finished product rate can propose following method.
Namely, the method characteristic that is used for the end cap of magnetron according to manufacturing of the present invention is to comprise: punching course, being used for by utilizing purity is that 99.9 quality % or more Mo powder and resin binder come the molded Mo molding of punching press, and described Mo molding has the end cap shape; The first sintering process, it is used for sintering Mo molding under redox condition, thereby obtains the first sintered body; And second sintering process, be used for sintering the first sintered body under reducing atmosphere, thereby obtain the second sintered body.
At first, preparing purity is 99.9 quality % or more Mo powder.The Mo powder preferably has the average grain size that scope is 1 to 8 μ m (particle diameter).Be included in impurity level in the Mo powder and be limited in 0.1 quality % or still less.More preferably, the Mo powder has following impurity content: namely as impurity element, Al content is 0.005 quality % or still less, Ca content is 0.003 quality % or still less, Cr content is 0.005 quality % or still less, Cu content is 0.002 quality % or still less, Fe content is 0.03 quality % or still less, Mg content is 0.002 quality % or still less, and Mn content is 0.002 quality % or still less, and Ni content is 0.008 quality % or still less, Pb content is 0.002 quality % or still less, Si content is 0.005 quality % or still less, and Sn content is 0.002 quality % or still less, and carbon content is 0.01 quality % or still less.Preferably, use such Mo powder with some impurity contents.
Then, mix Mo powder and resin binder, and make it become graininess, so that size is amplified.As resin binder, can use the polyvinyl alcohol such as PVA() etc. common resin binder.
Then, carry out in the following manner punching course: the granular powder of the one-tenth that will so obtain is packed in the metal-molding mould, and the granular powder of one-tenth that punching press is molded after packing into, thereby obtains Mo molding with end cap shape.At this moment, punching press pressure preferably is set as 3 to 13 tons/cm
2The scope of (294 to 1274MPa).
When punching press pressure less than 3 tons/cm
2The time, the intensity of molding is insufficient.On the other hand, to such an extent as to as the undue large 13 tons/cm that surpasses of punching press pressure
2The time, the density of molding becomes and the diffusion of Ru too occurs greatly and hardly.Preferred punching press pressure is set in 4 to 10 tons/cm
2Scope in.
Then, carry out in the following manner the first sintering process: the Mo molding that sintering so obtains under redox condition, thus obtain the first sintered body.In this first sintering process, preferably, maximum is reached temperature (the highest sintering temperature) be set as 1000 to 1200 ℃ scope, and in maximum reaches under the temperature scope that the retention time that keeps (maintenance) molding is set in 1 to 4 hour.When the second sintering process was defined as main sintering as described later, the first sintering process was regarded as interim sintering (or the intermediate sintering before the main sintering).
When above-mentioned maximum reached temperature and is lower than 1000 ℃, the densification of molding became insufficient.On the other hand, when maximum reached temperature above 1200 ℃, molding was too fine and close, so that in the process that engages Mo-Ru type brazing material, the diffusion of Ru is carried out insufficiently.In addition, preferably redox condition is wet hydrogen gas.This wet hydrogen gas refers to the hydrogen gas that comprises steam.
The target of the first sintering process is not be used to making the densification of Mo sintered body turn to the process of final products, but be used for sintering molding under redox condition, thereby remove the lip-deep carbon that is present in the Mo sintered body, and be used for preventing the process of the undue oxidation of Mo sintered body.
When using wet hydrogen (hydrogen gas that comprises steam), can be from the surface removal carbon of Mo sintered body.The carbon of removing changes carbon dioxide (CO into
2) or carbon monoxide (CO) and being removed.This be because, the warm steam (H by heating
2O) become and be easy to and carbon (C) reaction so that easily from the Mo sintered body with carbon dioxide (CO
2) or the form of carbon monoxide (CO) remove carbon.
In addition, in the first sintering process, preferably spend 3 to 7 hours and the Mo molding is heated to maximum from 600 ℃ temperature reaches temperature.When the firing rate in the first sintering process is too high, may occurs having and eliminate aspect the resin binder or at the Mo sintered body of the inhomogeneities aspect the densification of sintered body, described resin binder is included in the Mo sintered body.On the other hand, when spending 7 hours or more the time heats molding, can eliminate this inhomogeneities.Yet this is processed needs a large amount of time, thereby has reduced production efficiency.
In addition, oxidized during sintering operation in order to prevent the Mo molding in the first sintering process, sintering Mo molding under the atmosphere that comprises wet hydrogen gas preferably.In this case, consider to prevent undue oxidation that preferably the internal atmosphere of sintering furnace substitutes with nitrogen gas, so the flow control of wet hydrogen gas is at 0.2m
3/ H(hour) or more, and more preferably, be controlled at 0.2 to 17m
3In the scope of/H.
In addition, preferably, supply wet hydrogen gas is as gas flow, and the control gas condition, to the fresh wet hydrogen gas of Mo molding supply.In addition, if there is the gas flow rate of predetermined abundance, the carbon content (carbon dioxide, carbon monoxide) of then removing from the Mo molding can be with the outside drain of this gas flow to sintering furnace.
Especially, it is upper and a collection of 200 or more Mo molding are carried out being necessary to control the flow velocity of wet hydrogen gas in the situation of sintering (batch operation) simultaneously to be arranged in sintering boat (Mo boat) at a plurality of Mo moldings.At this moment, preferably, the flow control of the wet hydrogen gas in the inner space of sintering furnace is at 2m
3/ H or more.
Fig. 3 shows when a collection of Mo molding being packed into sintering furnace and when it is carried out sintering, an example of the layout of a plurality of Mo moldings.In Fig. 3, Reference numeral 20 expression Mo moldings, Reference numeral 21 expression sintering containers, Reference numeral 22 represents to arrange on it sintering boat of Mo molding, and Reference numeral 23 expressions are used for providing to the part between adjacent a plurality of sintering boats 22 separator in gap.A plurality of Mo moldings 20 are arranged on the sintering boat 22.
At this moment, in order to facilitate penetration of the gap between each Mo molding, the gap between each Mo molding 20 is formed by 1mm or more distance.A plurality of sintering boats 22 of a plurality of Mo moldings 20 are set by separator 23 stacking settings on it, thereby form stacked body.This stacked body is arranged in the sintering container 21.
When above-mentioned sintering container etc. is arranged in the sintering furnace, can be once sintered a collection of 200 or more, further 400 or more, 2000 Mo molding further.In this regard, preferably, sintering boat, separator and sintering container are made by Mo, and described Mo is refractory metal.In addition, if necessary, can use surface-coated that the sintering boat of oxide ceramics is arranged.
Then, carry out the second sintering process, comprising sintering the first sintered body under the atmosphere of hydrogen gas, thereby obtain the second sintered body.The second sintering process is the process corresponding to so-called main sintering process.
In the second sintering process, preferably, the maximum that sintered body is heated to reaches temperature (the highest sintering temperature) and is set as 1600 to 1900 ℃ scope, and is set as 30 minutes to 5 hours for reach the retention time that keeps (maintenance) first sintered body under the temperature in maximum.
When maximum reaches temperature and is lower than 1600 ℃, carry out insufficiently to the densification of sintered body, and the density of the second sintered body become easily less than 9.6g/cm
3
On the other hand, when maximum reaches temperature and surpasses 1900 ℃, because the maximum temperature that reaches is near 1960 to 2050 ℃ of the fusing points of brazing material, so may there be the worry that will cross fractional melting to brazing material.
When brazing material is crossed fractional melting, may cause the defective when engaging with filament or guide rod.More preferably, maximum reaches temperature in 1650 to 1800 ℃ scope.
When reaching retention time under the temperature in maximum during less than 30 minutes, the densification of Mo sintered body is inadequate.On the contrary, when the retention time surpasses 5 hours, may exist to be diffused into too much worry in the Mo sintered body to being included in Ru in the brazing material.
In addition, the same with mode in the first sintering process, oxidized in order to prevent the Mo sintered body, be necessary equally to carry out the second sintering process under the atmosphere of hydrogen gas comprising.Therefore, preferably, take following method: substitute in advance the internal atmosphere of sintering furnace with nitrogen gas, then to this sintering furnace supply of hydrogen gas.
In addition, owing to preferably supply fresh hydrogen gas, it is therefore preferable that under the condition the same with condition in the first sintering process and control hydrogen gas stream.Especially, in order to obtain every a collection of 200 or more, further 400 or more many uniform sintered bodies are necessary to control the flow velocity of wet hydrogen gas or hydrogen gas.
Hereinafter, the process that is used for arranging the Mo-Ru brazing material will be explained.The method of arranging the Mo-Ru brazing material roughly is divided into two kinds of following methods.
First method is to carry out the method for brazing material placement process, wherein, arranges annular Mo-Ru type brazing material at the first sintered body.This placement process can comprise: the method that applies Mo-Ru type brazing material paste at the predetermined portions of end cap; The method of preformed ringwise brazing material is set at end cap; Arrange at end cap and to be pre-formed so that ringwise and be subject to the method for heat treated brazing material.
In order to carry out efficiently placement process, preferably use annular brazing material, described brazing material forms ringwise and is subject to heat treatment.Owing to heat treatment, increased the intensity of annular Mo-Ru type brazing material, so that the serviceability of annular brazing material improves.
Namely, when arranging annular brazing material, the substandard products of annular brazing material can appear damaging hardly.The diameter dimension of annular brazing material is set as the size of the brazing material mounting portion (it is corresponding to the composition surface 8 that is used for engaging with brazing material) that meets end cap.The thickness of annular brazing material preferably is set in 0.3 to 2.5mm the scope.
Second method can comprise: apply the method for Mo-Ru brazing material paste at the second sintered body, and arrange annular brazing material, then it is carried out laser treatment with the method for stationary annular brazing material.
First method is to carry out the method for the process that is used for arranging brazing material in interstage between the first sintering process and the second sintering process.And second method is to carry out the method for the process that is used for the layout brazing material after the second sintering process is finished.
According to said process, can make standard (substantially) end cap that is used for magnetron by appointment of the present invention.Then, will explain hereinafter the extra process that can further increase rate of finished products.
In the second sintered body, may there be the situation of the projection (burr) that partly forms Mo.In this case, adding man-hour when the second sintered body is carried out tumbling, can obtain not have the tumbling body of burr generation, is preferred therefore.
In this, the condition of tumbling processing is not particularly limited, but arbitrarily.Yet, the method as an example can be proposed.For example, be provided with in use in the situation of centrifugal type cylinder machine of tank (pot), the volume settings of tank is 10 to 15 liters.Then, a collection of 4000 to 15000 Mo sintered bodies are packed in this tank.In addition, will polish medium (polishing abrasive) and water packs in this tank.In this case, turn about 3 to 10 minutes time of rotating speed rotary tank of (r.p.m.) with per minute 60 to 130, process thereby carry out tumbling, so that the defective of removal such as burr.After finishing bowl-feed polishing process, carry out the drying course that is used for the drying roller polishing body.
Then, preferably carry out the punch process that is used for punching press tumbling body.Form on the surface of brazing material in the situation of undulate shape, can the wave surface be formed by punch process and be flat surfaces.
Although aforementioned tumbling processing is effective for the burr that forms on the outer surface of removing Mo sintered body (end cap), if but burr formation then can not obtain to remove enough effects of burr on the surface of brazing material or on the inner surface of burr formation at end cap.
In addition, when polishing material hour, the lip-deep situation that burr is created in brazing material may appear.In addition, when removing such burr, estimate that the absolute magnitude of brazing material may be not enough, so that may there be following worry: the shortage of brazing material has adverse effect to the operations such as soldering filament in the back segment process.
Correspondingly, effectively the tumbling body is carried out punch process, thereby bring the effect of the profile of finishing (arrangement) brazing material.
In addition, removing the burr of failing to be removed by tumbling processing is possible equally.Arrangement shape (removal burr) is known as " typing ".The punching press pressure that is used for this typing of execution is arbitrarily.Yet preferably, punching press pressure is set in 6 tons/cm
2Or in the scope of less (588MPa or less).
In addition, equally effectively pressing mold is heated to 400 to 750 ℃ temperature, then carries out punching operation.Particularly, in order to repair efficiently the profile of brazing material, it is effective making the pressing mold heating.
In addition, when punch process, applying punching oil (lubricating oil) to pressing mold, then carrying out effectively to suppress the adhesion of pressing mold and Mo sintered body (end cap) in the situation of punch process.In the situation of using punching oil (grease), preferably carry out the skimming processes that is used for making the product degreasing after the punch process.In this skimming processes, effectively product is heated to the temperature of punching oil vaporization.
In addition, preferably carry out the 3rd sintering process, wherein, the product after the degreasing is heat-treated.Carrying out there is the possibility that makes the end cap oxidation in tumbling processing, typing processing or the situation for the degreasing processing of removing punching oil.Therefore, preferably carry out following process: under hydrogen atmosphere, the product of institute's degreasing is heat-treated, thereby remove the lip-deep oxide that is formed on product.
As for heat treated condition, it is 600 to 900 ℃ scope that maximum reaches Temperature Setting, and carries out heat treatment under hydrogen gas stream.When maximum reached temperature and is lower than 600 ℃, the cost long time demonstrated the oxide removal effect.On the other hand, when maximum reaches temperature and surpasses 900 ℃, can't obtain further effect and consequently cause increasing the manufacturing cost of end cap.
Be used for the method for the end cap of magnetron according to aforesaid manufacturing, can make efficiently end cap for magnetron with high rate of finished products.In addition, for example, when when a plurality of sintering boats are carried out sintering operation in the stacking situation of multistage mode, a collection of simultaneously 200 of sintering or more Mo molding.
When using when being used for the process of end cap of magnetron according to manufacturing of the present invention, even process 200 or more Mo molding, rate of finished products also can be increased to 80% or more.
In addition, after the said process, when carrying out tumbling processing, punch process (typing processing), degreasing processing and the 3rd sintering process, rate of finished products can be increased to 99% or more.
[embodiment]
Then, hereinafter specifically describe embodiments of the invention with reference to accompanying drawing and following concrete example.
(example 1 to 5)
Prepare high-purity Mo powder, described Mo powder has the average grain size and 99.9% or more purity of 3 μ m.As the result of the amount of the impurity element of investigation this high-purity Mo powder, the amount of impurity element (involatile constituent) is 0.08 quality % or still less.Amount as for each impurity element, Al content is 0.005 quality % or still less, Ca content is 0.003 quality % or still less, Cr content is 0.005 quality % or still less, Cu content is 0.002 quality % or still less, Fe content is 0.03 quality % or still less, Mg content is 0.002 quality % or still less, Mn content is 0.002 quality % or still less, Ni content is 0.008 quality % or still less, and Pb content is 0.002 quality % or still less, and Si content is 0.005 quality % or still less, Sn content is 0.002 quality % or still less, and carbon content is 0.01 quality % or still less.
(process A: molding process)
Then, Mo powder and resin binder (PVA: polyvinyl alcohol (poly vinyl alcohol)) mix, thereby be prepared into granular powder.Then, will become granular powder to pack in the molding die, thereby become molding.Each punching press pressure (molded pressure) is set as the value shown in the table 1.In this, the size of molding is as described below.That is, the diameter L of end cap is 7.5mm, and the thickness T of end cap is 2.5mm, and its internal diameter is 3.3mm, and arranges on it that internal diameter of the part of brazing material is 3.9mm.
[table 1]
| Molding process A | Molded |
| A1 | |
| 3 tons/cm 2（294MPa） | |
| |
5 tons/cm 2（490MPa） |
| |
10 tons/cm 2（980MPa） |
(process B: the first sintering process)
As shown in Figure 3, prepare the Mo boat 22 with following size as sintering boat 22: long 320mm, wide 220mm, thick 15mm.Then, guarantee to be 1mm or more in the gap that the Mo boat arranges between the contiguous Mo molding of 500 Mo molding 20().Sintering boat 22 upwards is stacked into ten grades by separator 23, and the sintering boat after stacking is arranged in (a collection of 5000 Mo moldings) in the sintering container 21.Sintering container 21 grades are all packed into to be pushed away in the type sintering furnace, then carries out sintering under the sintering condition shown in the table 2, thereby prepares the first sintered body.In the sintering container of packing into, internal atmosphere substitutes with nitrogen gas, after this, with the predetermined flow velocity shown in the table 2 hereinafter to sintering furnace supply wet hydrogen gas.
[table 2]
(process C: the second sintering process)
About the first sintered body of preparation like this, carry out hereinafter the second sintering process under the sintering condition shown in the table 3.In the second sintering process, to the first sintering process in the identical sintering boat that uses carry out stackingly, and stacking sintering container packed in the second sintering furnace.In addition, when being used for sintering the second sintered body, furnace atmosphere substitutes with nitrogen gas in advance, and after this, control is to the flow velocity of the hydrogen gas of stove supply.
[table 3]
As described hereinafter, make up above-mentioned molding process A, the first sintering process B and the second sintering process C, and carry out the process that makes up, thereby divide according to each body for the end cap of magnetron of example 1 to 5 preparation.
Example 1:A1 → B1 → C1
Example 2:A1 → B2 → C2
Example 3:A2 → B2 → C2
Example 4:A2 → B3 → C3
Example 5:A3 → B4 → C4
In addition, as a comparative example 1, except the wet hydrogen gas and changing among the process B4 is hydrogen gas, carry out the anabolic process identical with example 5, thereby according to the end cap of comparative example 1 for the preparation of magnetron.
About the end cap that is used for magnetron according to example 1 to 5 and comparative example 1 of preparation like this, measure density and the rate of finished products of Mo sintered body (end cap).In addition, measuring surf zone 11(scope be to the zone apart from the part of this 100 μ m from the surface of Mo sintered body) and central area 12(scope be from the thickness direction of the sidewall of Mo sintered body core 10 to apart from this ± central area of the distance of 100 μ m) carbon content (wt.ppm).
By measure above-mentioned density with Archimedes method.In addition, rate of finished products is measured as the ratio of the qualified product (good merchantable brand) in every a collection of 5000.In addition, by measuring carbon content with the High Frequency IR-Absorption Spectrometric absorption process.Measurement result shown in the table 4 hereinafter.
[table 4]
Can find out significantly that from the result shown in the table 4 about the end cap that is used for magnetron according to each example, the density of end cap is 9.6g/cm
3Or more, and rate of finished products is 90% or more.In addition, according to the end cap of each example, the carbon amount (carbon content) in the surf zone is lower than the carbon amount of central area.
Then, by using the end cap that is consisted of by the Mo sintered body according to each example and comparative example to make magnetron.Then, measure the life-span of magnetron.
In other words, the predetermined portions at end cap applies Mo-Ru brazing material paste (Ru, the 0.05wt% or carbon impurity still less, 0.009wt% or iron still less and 0.007wt% or the Ni still less that comprise Mo, the 43wt% of 57wt%).Then, as shown in Figure 1, centre pilot 5, side guide rod 6 and coiled type filament 1 are carried out soldering, thereby make cathode construction.Then, this cathode construction is assembled in the vacuum tube, thereby is configured to magnetron.Subsequently, dispose microwave oven by using magnetron, and measure the life-span of microwave oven.
Measure the life-span of microwave oven according to following methods.That is, the operational cycle with 5 minutes 1500W is defined as one group of operation.Finish after 1000 groups and the 10000 groups of operational cycle, check whether the Mo sintered body (end cap surface) of each microwave oven occurs corroding.Result shown in the table 5 hereinafter.
[table 5]
Can find out significantly from the result shown in the table 5, until finish and all do not have substandard products (erosion) in the end caps all in the short time period of 1000 groups of operational cycle.Yet, until finish in long-time section of 10000 groups of operational cycle, observe the erosion that its surface is comprised the cathode construction of a large amount of carbon, as in comparative example 1.
When the surf zone of end cap has been etched, carbon content will spread in vacuum tube, thereby reduce the function of magnetron.In other words, about using the magnetron that does not cause the end cap that corrodes of each example, can determine that corresponding magnetron is very outstanding aspect long-term reliability.
(example 6 to 10)
Then, as the further method of enhance yield, will explain the example that wherein is integrated with following process.
About the end cap that is used for magnetron of example 2 and 3, carry out following process.
(process D: the brazing material placement process)
As the brazing material placement process, carry out following process.
Process D1: the process conformity that will arrange preburned Mo-Ru brazing material is the interstage between the first sintering process (process B) and the second sintering process (process C).
Process D2: will arrange preburned Mo-Ru brazing material, the process conformity that after this engages this brazing material by laser emission is the stage after the process C.
(process E: bowl-feed polishing process)
Each end cap that is used for magnetron is mixed with polishing material and water.Mix about this, hereinafter the lower bowl-feed polishing process of carrying out of the condition shown in the table 6 (a collection of amount, the rotary speed of tank and polishing time).
[table 6]
| Bowl-feed polishing process E | 1 batch amount | Tank rotary speed/Min | Polishing time (Min) |
| E1 | 5000 | 60 | 5 |
| E2 | 8000 | 100 | 8 |
| E3 | 12000 | 120 | 10 |
(process F: type-approval process)
For each end cap that is used for magnetron through process E, carry out type-approval process, in order to the punching press pressure shown in the table 7 is applied to end cap, thus the lax shape of repairing (finishing) brazing material.In this, when applying punching press pressure, be coated with lubricating oil on the surface of molding die.
[table 7]
(process G: skimming processes)
For each end cap that is used for magnetron through process F, carry out skimming processes, in order to make the end cap degreasing, thereby remove lubricating oil.
(process H: the 3rd sintering process)
About each end cap that is used for magnetron through process G, carry out hereinafter the 3rd sintering process of further sintering end cap under the condition shown in the table 8.
[table 8]
| The 3rd sintering process H | Maximum reaches temperature | The hydrogen gas flow velocity |
| H1 | 640℃ | 3m 3/H |
| H2 | 700℃ | 5m 3/H |
| H3 | 850℃ | 7m 3/H |
For aforesaid example 2 and 3, as mentioned below, table 6 is combined to each above-mentioned brazing material placement process D, bowl-feed polishing process E, type-approval process F, skimming processes G and the 3rd sintering process H shown in 8, and the execution anabolic process, thereby preparation is according to each end cap for magnetron of example 6 to 10.
Example 6: example 2 → (process D1) → process E1 → process F1 → process G → process H3.
Example 7: example 2 → (process D1) → process E2 → process F1 → process G → process H1.
Example 8: example 2 → process D2 → process E3 → process F2 → process G → process H2.
Example 9: example 3 → process D2 → process E2 → process F1 → process G → process H1.
Example 10: example 3 → process E3 → process G → process H2 → coating and oven dry brazing material paste.
For the end cap that is used for magnetron according to the preparation like this of example 6 to 10, measure rate of finished products in the mode the same with mode in the example 1.Measurement result shown in the table 9 hereinafter.
[table 9]
Can find out significantly from the result shown in the table 9, according to the end cap that is used for magnetron of process bowl-feed polishing process E, type-approval process F, skimming processes G and the 3rd sintering process H of each example, will have because burr or the defective end cap that is used for magnetron that loses the open defect that shape brings convert qualified product (good merchantable brand) possibility that becomes to.
In addition, according to the example of the method for making the end cap that is used for magnetron, implementing still can greatly to improve rate of finished products in the situation of the whole bag of tricks with brazing material placement process D even can guarantee.
In this regard, as the result of measurement according to the carbon amount in the surf zone of the end cap of each example, do not exist from the variation of the state of example 2 and 3 aspect the carbon amount.So the end cap that can determine equally example 6 to 10 also is very outstanding aspect long-term reliability.
Industrial applicability
According to the end cap for magnetron of the present invention, carbon content residual in the surf zone of Mo end cap is less.So, when the Mo end cap when the magnetron, the Mo end cap is hardly by sputter, thereby can prolong the life-span of magnetron, and can obtain the long-term reliability of magnetron.In addition, according to the method for manufacturing of the present invention for the end cap of magnetron, can make efficiently end cap of the present invention with high rate of finished products.
Description of reference numerals
1 ... the coiled type filament, 5 ... centre pilot, 6 ... the side guide rod, 7 ... the centre pilot connection hole portions, 8 ... the engage base part of end cap and brazing material, 9 ... the engagement sides part of end cap and brazing material, 10 ... central point on the thickness direction, 11 ... surf zone, 12 ... the central area, 20 ... the Mo molding, 21 ... sintering container, 22 ... sintering boat, S ... the surface
Claims (14)
1. end cap that is used for magnetron that is consisted of by the Mo sintered body, it is characterized in that: scope is for having 30ppm or carbon content still less from the surface of described Mo sintered body to the surf zone apart from the degree of depth of this 100 μ m, scope for from the core on the thickness direction of Mo sintered body to apart from this ± central area of the distance of 100 μ m has 50 to 300ppm or still less carbon content.
2. the end cap for magnetron according to claim 1, wherein, described Mo sintered body has 9.6 to 10.0g/cm
3Density.
3. the end cap for magnetron according to claim 1 and 2, wherein, described Mo sintered body has 99.9 quality % or more Mo content, as 0.005 quality % of impurity element or Al content still less, 0.003 quality % or Ca content still less, 0.005 quality % or Cr content still less, 0.002 quality % or Cu content still less, 0.03 quality % or Fe content still less, 0.002 quality % or Mg content still less, 0.002 quality % or Mn content still less, 0.008 quality % or Ni content still less, 0.002 quality % or Pb content still less, 0.005 quality % or Si content still less, and 0.002 quality % or Sn content still less.
4. the described end cap for magnetron of any one according to claim 1-3, wherein, the described end cap that is used for magnetron is provided with the Mo-Ru brazing material.
5. the end cap for magnetron according to claim 4, wherein, described Mo-Ru brazing material has 0.05 quality % or the carbon content still less as impurity element, 0.009 quality % or Fe content still less, and 0.007 quality % or Ni content still less.
6. a magnetron forms by the described end cap configuration for magnetron of any one in using according to claim 1-5.
7. a manufacturing is used for the method for the end cap of magnetron, and described method comprises:
Punching course is used for having 99.9 % by weight or the Mo powder of more purity and the Mo molding that resin binder stamping die fixture has the end cap shape by utilization;
The first sintering process is used for the described Mo molding of sintering under redox condition, thereby obtains the first sintered body; And
The second sintering process is used for described the first sintered body of sintering under reducing atmosphere, thereby obtains the second sintered body.
8. manufacturing according to claim 7 is used for the method for the end cap of magnetron, and wherein, described redox condition is wet hydrogen gas.
According to claim 7 or 8 described manufacturings be used for the method for the end cap of magnetron, wherein, be set as 0.2m at the flow velocity of described wet hydrogen gas
3/ hour or more, it is 1000 to 1200 ℃ that maximum reaches sintering temperature, and described maximum to reach retention time under the sintering temperature be to carry out described the first sintering process under 1 to 4 hour the condition.
According to claim 7 in 9 the described manufacturing of any one be used for the method for the end cap of magnetron, wherein, described Mo molding is heated to from 600 ℃ temperature under the condition that described maximum reaches sintering temperature cost 3 to 7 hours and carries out described the first sintering process.
11. the described manufacturing of any one is used for the method for the end cap of magnetron in 10 according to claim 7, wherein, is set as 0.2m at the flow velocity of hydrogen gas
3/ hour or more, it is 1600 to 1900 ℃ that maximum reaches sintering temperature, and described maximum to reach retention time under the sintering temperature be to carry out described the second sintering process under 30 minutes to 5 hours the condition.
12. the described manufacturing of any one is used for the method for the end cap of magnetron in 11 according to claim 7, wherein, described the second sintered body is further carried out tumbling processing, thereby obtains the tumbling body.
13. manufacturing according to claim 12 is used for the method for the end cap of magnetron, wherein, described tumbling body is further carried out punch process.
14. manufacturing according to claim 7 is used for the method for the end cap of magnetron, wherein, the end cap that is used for magnetron that so obtains is configured to: scope is for being set as 30ppm or still less from the surface of described Mo sintered body to the carbon content apart from the surf zone of the degree of depth of this 100 μ m, and scope for from the core on the thickness direction of Mo sintered body to apart from this ± carbon content of the central area of the distance of 100 μ m is set as 50 to 300ppm or still less.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010162202 | 2010-07-16 | ||
| JP2010-162202 | 2010-07-16 | ||
| PCT/JP2011/066243 WO2012008580A1 (en) | 2010-07-16 | 2011-07-15 | End hat for magnetron, process for producing same, and magnetron |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103003909A true CN103003909A (en) | 2013-03-27 |
| CN103003909B CN103003909B (en) | 2015-08-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180035073.9A Active CN103003909B (en) | 2010-07-16 | 2011-07-15 | For the end cap of magnetron, its manufacture method and magnetron |
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| Country | Link |
|---|---|
| JP (1) | JP5814236B2 (en) |
| KR (1) | KR101368145B1 (en) |
| CN (1) | CN103003909B (en) |
| MY (1) | MY157350A (en) |
| WO (1) | WO2012008580A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106531597A (en) * | 2016-12-29 | 2017-03-22 | 广东威特真空电子制造有限公司 | Magnetron, cathode assembly thereof and method for manufacturing cathode assembly of magnetron |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58157593A (en) * | 1982-03-12 | 1983-09-19 | Tokyo Tungsten Co Ltd | Method for brazing to metallic parts having high melting point and hard meltability |
| JPS6086731A (en) * | 1983-10-18 | 1985-05-16 | Tokyo Tungsten Co Ltd | Manufacture of parts for magnetron |
| JPH01156449A (en) * | 1987-12-11 | 1989-06-20 | Tokyo Tungsten Co Ltd | Molybdenum sintered compact and its production |
| JPH08339768A (en) * | 1994-05-10 | 1996-12-24 | Tokyo Tungsten Co Ltd | Ring for brazing |
| CN1176479A (en) * | 1996-07-15 | 1998-03-18 | 株式会社东芝 | Terminal cap parts for magnetron and its producing method |
| JPH11335705A (en) * | 1998-05-28 | 1999-12-07 | Toshiba Corp | Production of sintered article |
| JP2000173483A (en) * | 1998-12-03 | 2000-06-23 | Matsushita Electronics Industry Corp | Negative electrode part for magnetron, and magnetron device using it |
| KR20090093637A (en) * | 2008-02-29 | 2009-09-02 | 안의현 | Melting contact metal for connecting filament and Mo hat for magnetron cathod |
| CN101568402A (en) * | 2007-10-31 | 2009-10-28 | 东芝北斗电子株式会社 | Soldering material, lamp bulb, magnetron and soldering method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62208527A (en) * | 1986-03-07 | 1987-09-12 | Toho Kinzoku Kk | Manufacture of end cap for magnetron |
| JP2690901B2 (en) * | 1987-07-13 | 1997-12-17 | 株式会社日立製作所 | Magnetron |
| JP3718321B2 (en) * | 1996-07-15 | 2005-11-24 | 株式会社東芝 | End hat component for magnetron and manufacturing method thereof |
-
2011
- 2011-07-15 JP JP2012524611A patent/JP5814236B2/en active Active
- 2011-07-15 CN CN201180035073.9A patent/CN103003909B/en active Active
- 2011-07-15 MY MYPI2012701313A patent/MY157350A/en unknown
- 2011-07-15 KR KR1020137001043A patent/KR101368145B1/en active IP Right Grant
- 2011-07-15 WO PCT/JP2011/066243 patent/WO2012008580A1/en active Application Filing
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58157593A (en) * | 1982-03-12 | 1983-09-19 | Tokyo Tungsten Co Ltd | Method for brazing to metallic parts having high melting point and hard meltability |
| JPS6086731A (en) * | 1983-10-18 | 1985-05-16 | Tokyo Tungsten Co Ltd | Manufacture of parts for magnetron |
| JPH01156449A (en) * | 1987-12-11 | 1989-06-20 | Tokyo Tungsten Co Ltd | Molybdenum sintered compact and its production |
| JPH08339768A (en) * | 1994-05-10 | 1996-12-24 | Tokyo Tungsten Co Ltd | Ring for brazing |
| CN1176479A (en) * | 1996-07-15 | 1998-03-18 | 株式会社东芝 | Terminal cap parts for magnetron and its producing method |
| JPH11335705A (en) * | 1998-05-28 | 1999-12-07 | Toshiba Corp | Production of sintered article |
| JP2000173483A (en) * | 1998-12-03 | 2000-06-23 | Matsushita Electronics Industry Corp | Negative electrode part for magnetron, and magnetron device using it |
| CN101568402A (en) * | 2007-10-31 | 2009-10-28 | 东芝北斗电子株式会社 | Soldering material, lamp bulb, magnetron and soldering method |
| KR20090093637A (en) * | 2008-02-29 | 2009-09-02 | 안의현 | Melting contact metal for connecting filament and Mo hat for magnetron cathod |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106531597A (en) * | 2016-12-29 | 2017-03-22 | 广东威特真空电子制造有限公司 | Magnetron, cathode assembly thereof and method for manufacturing cathode assembly of magnetron |
| CN106531597B (en) * | 2016-12-29 | 2019-04-02 | 广东威特真空电子制造有限公司 | The method of the cathode assembly of magnetron and its cathode assembly and manufacture magnetron |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101368145B1 (en) | 2014-02-27 |
| JPWO2012008580A1 (en) | 2013-09-09 |
| MY157350A (en) | 2016-05-31 |
| JP5814236B2 (en) | 2015-11-17 |
| KR20130020921A (en) | 2013-03-04 |
| WO2012008580A1 (en) | 2012-01-19 |
| CN103003909B (en) | 2015-08-19 |
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