CN102989300A - Waste gas elution treating process and equipment for producing polycrystalline silicon by improved Siemens method - Google Patents
Waste gas elution treating process and equipment for producing polycrystalline silicon by improved Siemens method Download PDFInfo
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- CN102989300A CN102989300A CN2012105663312A CN201210566331A CN102989300A CN 102989300 A CN102989300 A CN 102989300A CN 2012105663312 A CN2012105663312 A CN 2012105663312A CN 201210566331 A CN201210566331 A CN 201210566331A CN 102989300 A CN102989300 A CN 102989300A
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Abstract
The invention provides a waste gas elution treating process and device and particularly relates to a waste gas elution treating process and equipment for producing polycrystalline silicon by an improved Siemens method for the purpose of treating various chlorosilane or hydrogen chloride harmful gases, belonging to a waste treating field for producing the polycrystalline silicon. On the basis of an experiment, the wastes generated by producing the polycrystalline silicon are subjected to elution treatment; the shape of waste slag generated by elution is controlled; and a special treating device is utilized to design a waste gas treating device which has large treating capability and strong residual slag separation capability and adopts a machine to fish for the slag. A process adopts a 10-15% NaOH alkali solution to carry out the elution treatment; the wastes are eluted by the alkali solution to remove the harmful components chlorosilane/hydrogen chloride in the wastes; the generated waste slag is scraped into an agitating tank through a full-automatic up-down integrated travelling type back-and-forth scraper, and then is conveyed into a novel box type filter press to carry out solid-liquid separation; and then dry slag obtained by separation is conveyed to a slag disposing pit to be stocked; and a filtering solution returns back to an elution circulating tank to be repeatedly utilized, and the purified tail gas is discharged after achieving a national emission standard.
Description
Technical field
The present invention relates to a kind of improved Siemens and produce waste gas drip washing treatment process and the equipment of polysilicon, particularly a kind of in order to process multiple chlorosilane or hydrogen chloride pernicious gas waste gas drip washing treatment process.Belong to the polysilicon generation offal treatment field that produces.
Background technology
The waste gas elution device that existing known improved Siemens is produced polysilicon is by eluting column, spray pump, collects waste liquid pool (a large amount of slags are many by artificial salvaging in the pond) separately and consist of, its spray liquid is take water or calcium hydroxide as main, and waste liquid is conveyed into Sewage Disposal and disposes.But collecting separately a large amount of slag of waste liquid pool generation is that workload is larger by artificial salvaging slag, and will be equipped with special salvaging slag means of transport.
The waste residue moisture content is high and be corrosive, the easy corrosion and damage of transportation facility, transportation and manually drag for the slag process and pollute comparatively serious to surrounding environment.Spray liquid can not be recycling in the lessivation, causes medicament and shower water consumption to strengthen, and increases waste liquid generation and production cost.
In addition, such waste gas elution device is without pulp water separation machinery facility, and waste liquid can not be recycling.
Summary of the invention
It is not enough that the object of the invention is to overcome above-mentioned prior art, proposes a kind of to waste gas produced waste gas drip washing treatment process and the isolated plant that carries out of existing improved Siemens production polysilicon.This waste gas drip washing treatment process and isolated plant can not only conveniently be realized the mechanically actuated that pulp water separates, and allow the utilization of waste liquid repetitive cycling, have solved and have manually dragged for the slag problem, improve the waste liquid recycling rate of waterused, improve simultaneously the disposal ability of emission-control equipment.
The technical solution adopted for the present invention to solve the technical problems is: a kind of improved Siemens is produced waste gas drip washing treatment process and the device of polysilicon, it is characterized in that adopting NaOH alkali lye is that leacheate carries out the drip washing processing to waste gas in eluting column tower body (18), removal is from adopting improved Siemens to produce chlorosilane or the hydrogen chloride harmful components in the combustion gas the polysilicon process, waste gas after the purified treatment is through safe liquid seal tank (22), and waste gas discharges after reaching discharging standards; Waste water after the purified treatment falls into the leacheate of each eluting column (1) and collects ditch (2), the waste water that leacheate collection ditch (2) is collected again aggregation flows into pulp water collecting pit (14) in the gravity flow mode at last in shunting ditch (15), a full-automatic up and down one running vehicle type is housed on each pulp water collecting pit (14) comes and goes scrapper conveyor (4), come and go scrapper conveyor (4) by full-automatic up and down one running vehicle type in the pulp water collecting pit (14) and waste residue is scraped into or collected stirring pool (8), waste residue in the stirring pool (8) is transported to chamber filter press again and carries out Separation of Solid and Liquid subsequently, separating the fixing dried slag that obtains send the slag field to store up, filtrate is back to circulating water pool (11), reuses for eluting column (1).
Described leacheate pH value is less than or equal to 8, and employed NaOH concentration is 10%-15%.
It is that waste gas enters eluting column (1) from the flue gas leading import (17) bottom the eluting column tower body (18) that described drip washing is processed, through alkali lye spray piping (19), and spiral nozzle (20), the purified treatment of (21) three layers of NaOH leacheate of mist eliminator.
Pulp water collecting pit (14) one sides are backflow ditch (6), and opposite side is shunting ditch (15); Pulp water collecting pit (14) arranges three road screen pack grids, first screen pack grid is to collect ditch (2) from leacheate to flow automatically to shunting ditch (15), grid by pulp water collecting pit (14) enters the pond, the second screen pack is mounted in pulp water collecting pit (14) apart from the grid of 0.5 meter of the bottom water surface and backflow ditch (6) joint, and the three layer filtration net is installed in 4 backflow ditch grids (9) of backflow ditch inwall.
Pulp water collecting pit (14) medium position and backflow ditch (6) joint, evenly have three outlets, each outlet has a screen pack (5), and water flows into circulating water pool (11) certainly through the screen pack grid backflow ditch that is embedded in pulp water collecting pit (14) the medium position wall.
Each screen pack (5) is wide 1.2 meters * and high 0.8 meter, screen pack adopts the PVC plate material to make, and the grid specification of screen pack is 1400 * 1300 perforated sub plate.
Chamber filter press is comprised of rack section, filtration fraction, hydraulic system and electrical system four major parts; Rack section is the main body of machine, is used for supporting filtration, connects other parts, and the sheet frame group that is made of thrust plate, pressure strip, oil cylinder and main fine strain of millet parts is housed in the rack section; Filtration fraction includes filter plate and filter cloth, applied by hydraulic system first and compress the sheet frame group, slip is pressed into the sheet frame group by the centre, be distributed between each filter plate in the sheet frame group, by the pressure that feed pump produces, slip is installed in the filter-cloth filtering in the filter plate, because filter cloth effect, solid is stayed and is formed filter cake in the filter chamber, and filtrate is discharged by water nozzle or free flow, and that realizes that solid, liquid separates takes off the liquid method.
Full-automatic up and down one running vehicle type comes and goes scrapper conveyor (4) and is comprised of controller, motor, two-orbit guide rail (44), two-orbit guide rail planet-cycloid reducer, driving (43), upper scraping plate (49) and lower scraping plate (40); Two-orbit guide rail (44) is installed in respectively on the both sides pool wall of pulp water collecting pit (14), driving (43) is placed on the two-orbit guide rail (44), upper scraping plate (49) and lower scraping plate (40) are to be connected by hinge with driving a vehicle between (43), the lifting of upper scraping plate (49) and lower scraping plate (40) is by lifting rope (47) control, controller four the line position travel switches that advance, retreat, promote, descend by sending receive signals, lifting when the control driving comes and goes operation and upper scraping plate (49) and lower scraping plate (40) automatically; Wherein, two-orbit guide rail planet-cycloid reducer drives drives a vehicle when travelling forward, controller rises simultaneously by upper scraping plate (49) and lower scraping plate (40), lower scraping plate (40) leaves pulp water collecting pit (14) bottom and is immersed in the underwater, upper scraping plate (49) only has 2/3rds to rise and to surface, 1/3rd be immersed in the interior underwater of pulp water collecting pit (14), and upper scraping plate (49) will swim in that scum silica frost blows into stirring pool (8) on the water surface; When driving (43) runs to pulp water collecting pit (14) top, all descend simultaneously by upper scraping plate (49) and lower scraping plate (40) by a two-orbit guide rail planet-cycloid reducer, upper scraping plate (49) descends and all is immersed in the interior underwater of pulp water collecting pit (14), lower scraping plate (40) also drops to and pulp water collecting pit (14) end contact position, then, drive driving by two-orbit guide rail planet-cycloid reducer and do return movement (mobile backward), lower scraping plate (40) is scraped the end slag of pulp water collecting pit (14) in top, the pond recess feeder (16), squeeze into stirring pool (8) with pump again, when arriving pulp water, driving (43) operation collects the top, upper scraping plate (49) and lower scraping plate (40) rise simultaneously again, driving (43) is reciprocal back and forth, and upper scraping plate (49) and lower scraping plate (40) continue to repeat above-mentioned action.
Be provided with full-automatic up and down one running vehicle type in the described pulp water collecting pit (14) and come and go scrapper conveyor (4), its full-automatic up and down one running vehicle type comes and goes scrapper conveyor (4) and is comprised of controller, running driver (41), lifting driving device (42), two-orbit guide rail (44), driving (43), scraper stent (48), upper scraping plate (49) and lower scraping plate (40); Travel driving unit (41) provides driving (43) power that commute moves, the power that lifting driving device (42) proposition upper scraping plate (49) and lower scraping plate (40) rise simultaneously and descend, two-orbit guide rail (44) is installed in respectively the pool wall top, both sides of pulp water collecting pit (14), driving (43) integral installation is placed on the two-orbit guide rail (44), running driver (41) and lifting driving device (42) are placed in the driving (43), following vehicle (43) associated movement, upper scraping plate (49) and lower scraping plate (40) are to be connected by hinge with driving a vehicle between (43), the rising of upper scraping plate (49) and lower scraping plate (40) and decline are finished by a lifting rope (47), lifting driving device (42) is connected with lifting rope (47), controller sends the signal that moves forward and backward, driving (43) is automatically done to move around or is come and gone along two-orbit guide rail (44) and moves, controller sends the signal that rises and descend, and upper scraping plate (49) and lower scraping plate (40) are done to promote or down maneuver simultaneously.
Each cleaning shoe (46) chain connection about passing through between scraper stent (48) in the round scrapper conveyor (4) of full-automatic up and down one running vehicle type and the lower scraping plate (40).
This invention waste gas elution device adopts NaOH alkali lye drip washing treatment process, by NaOH alkali lye waste gas is carried out drip washing, remove the harmful components chlorosilane/hydrogen chloride in the waste gas, make discharging waste gas reach discharging standards through safe liquid seal tank again, its chemical equation is as follows:
SiCl
4+H
2O?→H
2SiO
3↓+HCl+H
2
SiHCl
3+H
2O?→H
2SiO
3↓+HCl+H
2
H
2SiO
3+NaO?H?→Na
?2SiO
3↓+?H
2O
H
2SiO
3+NaO?H?→Na
?2SiO
4↓+?H
2O
SiCl
4+H
2+O
2?→SiO
2↓+?HCl
HCl+?NaO?H?→NaCl↓+?H
2O
Can be found out by above-mentioned reaction equation: collecting separately the waste liquid pool waste liquid, to be controlled at the sediment that generates under faintly acid or the neutrallty condition be metasilicic acid H
2SiO
3With silica SiO
2, this type of sediment produces the formed foam-like scum silica frost of a large amount of fine particles and wafts and float on the surface, and scum silica frost slag body is processed easily; The sediment that generates under strong alkaline condition is sodium metasilicate Na
2SiO
3Compound and sodium chloride nacl, this type of sediment is glue or crystalline solid, be deposited on the pond greater than the proportion of water than weight average at the bottom of, difficult machinery drags for slag.
Waste gas drip washing experimental data
Waste gas drip washing technology controlling and process pH value is less than or equal to 8, and pH value is scum silica frost metasilicic acid and silica at 6～8 slags that produce; PH value is squeezed into the sewage operation less than 6 with waste liquid, produces a large amount of scum silica frost metasilicic acid H during this
2SiO
3With silica SiO
2PH value enters eluting column drip washing waste gas greater than 8 circulations, guarantees that discharging waste gas is up to standard, produces a small amount of sediment sodium metasilicate Na during this
2SiO
3Compound and sodium chloride nacl.The slag that produces in so independent collection waste liquid pool is the scum silica frost on the water surface in a large number, the sediment in the bottom, pond on a small quantity, these waste residues come and go scrapper conveyor by running vehicle type and with the speed of 3.0～3.4 meters of per minutes the slag of the water surface are scraped into stirring pool, when scrapper conveyor returns the basin bottom sediment is scraped into top, pond concavity feeder, then squeeze into stirring pool with pump, water then flows into circulating water pool by the centre through screen pack PVC plate 1400 * 1300 perforated sub plate grid backflow ditches that are embedded in the pool wall certainly, and it is recycling to squeeze into eluting column again.
The slag of stirring pool and water are squeezed into chamber filter press by pump and are filtered, and this dried slag enters slag bucket and is transported to the stockyard by car, and press filtration water returns circulating water pool.
Improved Siemens of the present invention is produced the high and automatization level height of waste gas drip washing process unit mechanization degree of polysilicon, and whole device disposal ability is strong, treatment effect good, environmental friendliness, labor strength reduce greatly.Technological operation control, pulp water machinery separation facilities and waste liquid are recycling.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is the horizontal layout state diagram of waste gas drip washing treatment process of the present invention and equipment, and wherein black arrow represents water (flow) direction.
Fig. 2 is pulp water collecting pit of the present invention (14), stirring pool (8), circulating water pool (11), backflow ditch (6) and shunting ditch (15) association structure schematic diagram and the supporting pumping unit plane that enters the pulp water collecting pit, and wherein black arrow represents water (flow) direction.
Fig. 3 is eluting column tower body of the present invention (18) and drip washing frame structure schematic diagram.
Fig. 4 is the concavity feeder (16) on pulp water collecting pit shown in Figure 2 (14), stirring pool (8), circulating water pool (11), pulp water collecting pit top and shunting ditch (15) the A-A profile that enters the pulp water collecting pit.
Fig. 5 is backwater ditch of the present invention (6) section of structure, and wherein black arrow represents water (flow) direction.
Fig. 6 is that pulp water collecting pit of the present invention (14), backflow ditch (6) and full-automatic up and down one running vehicle type come and go scrapper conveyor (4) syndeton generalized section.
Fig. 7 is that the round scrapper conveyor of the full-automatic up and down one running vehicle type of the present invention is finished five kinds of different operating view in the cover salvaging waste residue process.
Fig. 8 is that the round scrapper conveyor of the full-automatic up and down one running vehicle type of the present invention is installed in the pulp water collecting pit syndeton schematic diagram between driving, scraper plate, the scraper stent.
Fig. 9 is that the round scrapper conveyor of the full-automatic up and down one running vehicle type of the present invention is installed in the top view in the pulp water collecting pit.
Figure 10 is that the round scrapper conveyor of the full-automatic up and down one running vehicle type of the present invention is installed in the structure side pseudosection in the pulp water collecting pit.
Figure 11 is the structural representation that the full-automatic up and down one running vehicle type of the present invention comes and goes scrapper conveyor middle scraper support.
Figure 12 is that the full-automatic up and down one running vehicle type of the present invention comes and goes the annexation structural representation between the lower scraping plate and cleaning shoe in the scrapper conveyor.
Above-mentioned each number in the figure implication: 1, eluting column, 2, leacheate is collected ditch, 3, the shunting ditch enters the grid in pond, 4, full-automatic up and down one running vehicle type comes and goes scrapper conveyor, and 5, screen pack, 6, the backflow ditch, 7, mixer, 8, stirring pool., 9, backflow ditch grid, 10, supporting pumping unit installation region; 11, circulating water pool, 12., diving slurry pump, 13, detergent circulator or alkali lye centrifugal pump, 14, the pulp water collecting pit, 15., the shunting ditch; 16, concavity feeder, 17, the flue gas leading import, 18, the eluting column tower body, 19, alkali lye spray piping, 20, spiral nozzle, 21, mist eliminator, 22, safe liquid seal tank, 23, the toxic emission chimney, 40, lower scraping plate, 41, running driver, 42, lifting driving device, 43, driving, 44, two-orbit guide rail, 46, cleaning shoe, 47, lifting rope, 48, scraper stent, 49, upper scraping plate.
The specific embodiment
The discarded object that improved Siemens of the present invention is produced polysilicon enters the off-gas buffer tank storage after collecting, enter subsequently eluting column 1 usefulness 10-15% alkali lye drip washing, remove the harmful components chlorosilane/hydrogen chloride in the waste gas, make the waste gas of discharging reach discharging standards through safe liquid seal tank 22 again, leacheate flows into pulp water collecting pit 14 in the gravity flow mode, and the machinery that carries out pulp water separates.
As shown in Figure 3 explanation, waste gas enters in the eluting column 1 from the flue gas leading 17 that enters of eluting column tower body 18 bottoms, waste gas is in bottom-up flow process, sprayed alkaline leacheate drip washing from spiral nozzle 20, discharge from toxic emission chimney 23 behind the waste gas purification, the waste water that shower is crossed injects the bottom leacheate and collects ditch 2, is pooled at last in the shunting ditch 15 rear inflow pulp water collecting pits 14 of pulp water collecting pit 14.
Pulp water collecting pit 14 interior slags come and go scrapper conveyor 4 by full-automatic up and down one running vehicle type and with the speed of 3.0～3.4 meters of per minutes water surface slag are scraped into stirring pool, when full-automatic up and down one running vehicle type comes and goes scrapper conveyor 4 and returns the basin bottom slag scraped into the concavity feeder 16 usefulness pumps on top, pond and squeeze into stirring pool 8, water then flows into circulating water pool 11 by the centre through screen pack 5PVC plate 1400 * 1300 perforated sub plate grid backflow ditches that are embedded in the pool wall certainly, squeezes into eluting column 1 recycling again.Full-automatic up and down one running vehicle type comes and goes scrapper conveyor 4 and mainly is comprised of control cabinet, two-orbit guide rail 44, driving 43, scraper plate.Scraper plate is to be connected by hinge with driving a vehicle between 43, and scraping plate lifting is by lifting rope 47 controls.Control cabinet receives signal by 4 stroke-limits (advance, retreat, promote, descend) switch and automatically controls the lifting that driving comes and goes operation and scraper plate.Two-orbit guide rail planet-cycloid reducer drive driving 43 is advanced during operation, promoting simultaneously upper scraping plate 49 surfaces and 2/3rds water surface scum silica frost is scraped into stirring pool 8, when running to the top, pond, by another one two-orbit guide rail planet-cycloid reducer lower cleaning shoe is lowered to at the bottom of the pond and contacts, then, drive driving by two-orbit guide rail planet-cycloid reducer and retreat (returning), bed mud scraped into top, pond concavity feeder 16 usefulness pumps squeeze into stirring pool, arrive that upper scraping plate 49 is then risen on the top, pond, driving 43 is advanced and repeated above-mentioned action.
Among Fig. 7: 1.-2. be that the full-automatic up and down one running vehicle type of the present invention comes and goes scrapper conveyor moment and promotes simultaneously upper scraping plate and lower scraping plate, guarantee that upper scraping plate is in the suitably state diagram of liquid level position.
2.-3. be that the upper scraping plate that the full-automatic up and down one running vehicle type of the present invention comes and goes in the scrapper conveyor advances to the other end from pulp water collecting pit one end, scrape the process schematic diagram of upper strata scum silica frost.
3.-4. be that the full-automatic up and down one running vehicle type of the present invention comes and goes scrapper conveyor moment and puts down simultaneously upper scraping plate and lower scraping plate, guarantee that lower scraping plate arrives the state diagram of appropriate location.
4.-5. be that the lower scraping plate that the full-automatic up and down one running vehicle type of the present invention comes and goes in the scrapper conveyor retreats to the other end from pulp water collecting pit bottom one end, scrape the process schematic diagram of bottom waste residue.
The waste residue that waste gas drip washing produces swims in pulp water collecting pit 14 in a large number, and the waste residue that small part proportion is larger then is deposited at the bottom of the pond.A track is respectively installed on the pool wall limit in pulp water collecting pit 14 both sides, and the driving of full-automatic up and down integral type comes and goes scrapper conveyor 4 integral body and is placed on two-orbit guide rail 44 positions, does the commute motion.Full-automatic up and down one running vehicle type comes and goes scrapper conveyor 4 up and down two scraper plates, respectively upper strata scum silica frost and bottom sediment is removed by moving back and forth.
The full-automatic up and down one running vehicle type of the present invention comes and goes scrapper conveyor 4 and scrapes slag in two-orbit guide rail 44 precalculated positions realizations ' coming ' and ' returning ', travel driving unit 41 and lifting driving device 42 are powered to control cabinet by the flexible cable power supply mode, receive the lifting moving that signal Automatic Control walking scrapper conveyor comes and goes operation and scraper plate by four stroke-limits (advance, retreat, promote, descend) switch.Upper scraping plate 49 and lower scraping plate 40 obtain power by lifting driving device 42 and realize automatic-ascending and decline, realize the level height conversion of upper and lower scraper plate, to reduce the resistance of a scraper plate another piece scraper plate when working.Installing reductor additional by motor in the travel driving unit 41 obtains power and realizes the moving around in orbit of scrapper conveyor integral body.Pulp water collecting pit 14 floating scum silica frost are scraped into tank diameter and concavity feeder 16, again by slag stock pump transport process, thereby realized the automatic scraping slag.
The driving of full-automatic up and down one comes and goes scrapper conveyor 4 and has separately independently upper scraping plate 49 and lower scraping plate 40, during the forward operation, 2/3rds upper scraping plate 49 exposes on the pulp water collecting pit 14 interior waters surface, whole pulp water collecting pit 14 interior underwaters that are immersed in of lower scraping plate 40, driving 43 is mobile simultaneously with speed drive upper scraping plate 49 and the lower scraping plate 40 of 3.0～3.4 meters of per minutes, and upper scraping plate 49 will swim in the slag foam on water surface top and scrape in the stirring pool 8; During return operation, lower scraping plate 40 will drop to pulp water collecting pit 14 bottoms, whole pulp water collecting pit 14 interior underwaters that are immersed in of upper scraping plate 49, driving 43 drives upper scraping plate 49 and lower scraping plate 40 with the speed of 3.0～3.4 meters of per minutes and does simultaneously return movement and return, lower scraping plate 40 is scraped the waste residue of pulp water collecting pit 14 bottoms in the concavity feeder 16 of termination, pulp water collecting pit bottom, with pump the waste residue in the concavity feeder 16 is squeezed into stirring pool 8 again; Pulp water collecting pit 14 middle parts do not have the water of slag, behind pulp water collecting pit middle part backflow ditch 6, certainly flow into repetitive cycling utilization in the circulating water pool 11.
The pulp water of stirring pool 8 is squeezed into chamber filter press by pump and is filtered, and chamber filter press is comprised of four major parts such as rack section, filtration fraction (filter plate, filter cloth), hydraulic system and electrical system.Rack section is the main body of machine, is used for supporting filtration, connects other parts.It mainly is comprised of parts such as thrust plate, pressure strip, oil cylinder and main fine strains of millet.The principle of filter press work operation is fairly simple, applied by hydraulic pressure first and compress the sheet frame group, slip is entered by the centre, be distributed between each filter cloth, the pressure of borrowing feed pump to produce filters, because the effect of filter cloth is stayed solid and formed filter cake in the filter chamber, filtrate is discharged by water nozzle (free flow), and that realizes that solid, liquid separates takes off the liquid method.This dried slag enters slag bucket and is transported to the stockyard by car, and press filtration water returns circulating water pool 11.
The waste gas elution device list of main equipment that improved Siemens is produced polysilicon sees the following form.
Improved Siemens is produced the waste gas elution device list of main equipment of polysilicon
The invention has the beneficial effects as follows and carry out recycling by the pulp water separation facilities to waste liquid.The waste gas drip washing process unit mechanization degree that improved Siemens is produced polysilicon is high, and automatization level is high.Whole device disposal ability is strong, treatment effect good, environmental friendliness, labor strength reduce greatly.
Claims (9)
1. an improved Siemens is produced waste gas drip washing treatment process and the device of polysilicon, it is characterized in that adopting NaOH alkali lye is that leacheate carries out the drip washing processing to waste gas in eluting column tower body (18), removal is from adopting improved Siemens to produce chlorosilane or the hydrogen chloride harmful components in the combustion gas the polysilicon process, waste gas after the purified treatment is through safe liquid seal tank (22), and waste gas discharges after reaching discharging standards; Waste water after the purified treatment falls into the leacheate of each eluting column (1) and collects ditch (2), the waste water that leacheate collection ditch (2) is collected again aggregation flows into pulp water collecting pit (14) in the gravity flow mode at last in shunting ditch (15), a full-automatic up and down one running vehicle type is housed on each pulp water collecting pit (14) comes and goes scrapper conveyor (4), come and go scrapper conveyor (4) by full-automatic up and down one running vehicle type in the pulp water collecting pit (14) and waste residue is scraped into or collected stirring pool (8), waste residue in the stirring pool (8) is transported to chamber filter press again and carries out Separation of Solid and Liquid subsequently, separating the fixing dried slag that obtains send the slag field to store up, filtrate is back to circulating water pool (11), reuses for eluting column (1).
2. described improved Siemens is produced waste gas drip washing treatment process and the device of polysilicon according to claim 1, and it is characterized in that: described leacheate pH value is less than or equal to 8, and employed NaOH concentration is 10%-15%.
3. described improved Siemens is produced waste gas drip washing treatment process and the device of polysilicon according to claim 1, it is characterized in that: it is that waste gas enters eluting column (1) from the flue gas leading import (17) bottom the eluting column tower body (18) that described drip washing is processed, through alkali lye spray piping (19), spiral nozzle (20), the purified treatment of (21) three layers of NaOH leacheate of mist eliminator.
4. improved Siemens according to claim 3 is produced waste gas drip washing treatment process and the device of polysilicon, and it is characterized in that: pulp water collecting pit (14) one sides are backflow ditch (6), and opposite side is shunting ditch (15); Pulp water collecting pit (14) arranges three road screen pack grids, first screen pack grid is to collect ditch (2) from leacheate to flow automatically to shunting ditch (15), grid by pulp water collecting pit (14) enters the pond, the second screen pack is mounted in pulp water collecting pit (14) apart from the grid of 0.5 meter of the bottom water surface and backflow ditch (6) joint, and the three layer filtration net is installed in 4 backflow ditch grids (9) of backflow ditch inwall.
Pulp water collecting pit (14) medium position and backflow ditch (6) joint, evenly have three outlets, each outlet has a screen pack (5), and water flows into circulating water pool (11) certainly through the screen pack grid backflow ditch that is embedded in pulp water collecting pit (14) the medium position wall.
5. improved Siemens according to claim 4 is produced waste gas drip washing treatment process and the device of polysilicon, it is characterized in that: each screen pack (5) is wide 1.2 meters * and high 0.8 meter, screen pack adopts the PVC plate material to make, and the grid specification of screen pack is 1400 * 1300 perforated sub plate.
6. improved Siemens according to claim 3 is produced the waste gas drip washing treatment process of polysilicon, it is characterized in that chamber filter press is comprised of rack section, filtration fraction, hydraulic system and electrical system four major parts; Rack section is the main body of machine, is used for supporting filtration, connects other parts, and the sheet frame group that is made of thrust plate, pressure strip, oil cylinder and main fine strain of millet parts is housed in the rack section; Filtration fraction includes filter plate and filter cloth, applied by hydraulic system first and compress the sheet frame group, slip is pressed into the sheet frame group by the centre, be distributed between each filter plate in the sheet frame group, by the pressure that feed pump produces, slip is installed in the filter-cloth filtering in the filter plate, because filter cloth effect, solid is stayed and is formed filter cake in the filter chamber, and filtrate is discharged by water nozzle or free flow, and that realizes that solid, liquid separates takes off the liquid method.
7. improved Siemens according to claim 3 is produced waste gas drip washing treatment process and the device of polysilicon, it is characterized in that: full-automatic up and down one running vehicle type comes and goes scrapper conveyor (4) and is comprised of controller, motor, two-orbit guide rail (44), two-orbit guide rail planet-cycloid reducer, driving (43), upper scraping plate (49) and lower scraping plate (40); Two-orbit guide rail (44) is installed in respectively on the both sides pool wall of pulp water collecting pit (14), driving (43) is placed on the two-orbit guide rail (44), upper scraping plate (49) and lower scraping plate (40) are to be connected by hinge with driving a vehicle between (43), the lifting of upper scraping plate (49) and lower scraping plate (40) is by lifting rope (47) control, controller four the line position travel switches that advance, retreat, promote, descend by sending receive signals, lifting when the control driving comes and goes operation and upper scraping plate (49) and lower scraping plate (40) automatically; Wherein, two-orbit guide rail planet-cycloid reducer drives drives a vehicle when travelling forward, controller rises simultaneously by upper scraping plate (49) and lower scraping plate (40), lower scraping plate (40) leaves pulp water collecting pit (14) bottom and is immersed in the underwater, upper scraping plate (49) only has 2/3rds to rise and to surface, 1/3rd be immersed in the interior underwater of pulp water collecting pit (14), and upper scraping plate (49) will swim in that scum silica frost blows into stirring pool (8) on the water surface; When driving (43) runs to pulp water collecting pit (14) top, all descend simultaneously by upper scraping plate (49) and lower scraping plate (40) by a two-orbit guide rail planet-cycloid reducer, upper scraping plate (49) descends and all is immersed in the interior underwater of pulp water collecting pit (14), lower scraping plate (40) also drops to and pulp water collecting pit (14) end contact position, then, drive driving by two-orbit guide rail planet-cycloid reducer and do return movement (mobile backward), lower scraping plate (40) is scraped the end slag of pulp water collecting pit (14) in top, the pond recess feeder (16), squeeze into stirring pool (8) with pump again, when arriving pulp water, driving (43) operation collects the top, upper scraping plate (49) and lower scraping plate (40) rise simultaneously again, driving (43) is reciprocal back and forth, and upper scraping plate (49) and lower scraping plate (40) continue to repeat above-mentioned action.
8. improved Siemens according to claim 1 is produced waste gas drip washing treatment process and the device of polysilicon, it is characterized in that: be provided with full-automatic up and down one running vehicle type in the described pulp water collecting pit (14) and come and go scrapper conveyor (4), its full-automatic up and down one running vehicle type comes and goes scrapper conveyor (4) and is comprised of controller, running driver (41), lifting driving device (42), two-orbit guide rail (44), driving (43), scraper stent (48), upper scraping plate (49) and lower scraping plate (40); Travel driving unit (41) provides driving (43) power that commute moves, the power that lifting driving device (42) proposition upper scraping plate (49) and lower scraping plate (40) rise simultaneously and descend, two-orbit guide rail (44) is installed in respectively the pool wall top, both sides of pulp water collecting pit (14), driving (43) integral installation is placed on the two-orbit guide rail (44), running driver (41) and lifting driving device (42) are placed in the driving (43), following vehicle (43) associated movement, upper scraping plate (49) and lower scraping plate (40) are to be connected by hinge with driving a vehicle between (43), the rising of upper scraping plate (49) and lower scraping plate (40) and decline are finished by a lifting rope (47), lifting driving device (42) is connected with lifting rope (47), controller sends the signal that moves forward and backward, driving (43) is automatically done to move around or is come and gone along two-orbit guide rail (44) and moves, controller sends the signal that rises and descend, and upper scraping plate (49) and lower scraping plate (40) are done to promote or down maneuver simultaneously.
9. improved Siemens according to claim 1 is produced waste gas drip washing treatment process and the device of polysilicon, it is characterized in that: each cleaning shoe (46) chain connection about passing through between the scraper stent (48) in the round scrapper conveyor (4) of full-automatic up and down one running vehicle type and the lower scraping plate (40).
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| CN201210566331.2A CN102989300B (en) | 2012-12-24 | 2012-12-24 | Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon |
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| CN201210566331.2A CN102989300B (en) | 2012-12-24 | 2012-12-24 | Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon |
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| CN102989300B CN102989300B (en) | 2015-12-23 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103432871A (en) * | 2013-09-06 | 2013-12-11 | 中国恩菲工程技术有限公司 | Elution treatment equipment and process for tail gas generated during production of polycrystalline silicon |
| CN103961963A (en) * | 2014-05-07 | 2014-08-06 | 苏州皇森机电科技有限公司 | Systematic dust collector |
| CN104445512A (en) * | 2014-10-30 | 2015-03-25 | 安徽国祯环保节能科技股份有限公司 | Equipment for removing dross on surface of anaerobic tank of urban sewage treatment plant |
| CN105084369A (en) * | 2014-04-23 | 2015-11-25 | 新特能源股份有限公司 | Chlorosilane-containing waste gas recovery treatment apparatus |
| CN105327600A (en) * | 2014-08-08 | 2016-02-17 | 新特能源股份有限公司 | Treating apparatus for chlorosilane-containing tail gas produced in polysilicon production process |
| CN110087750A (en) * | 2016-11-17 | 2019-08-02 | 龙沙有限公司 | Filter mobile device |
| CN111249887A (en) * | 2020-02-24 | 2020-06-09 | 洛阳中硅高科技有限公司 | Method for treating silicon tetrachloride tail gas |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101700466A (en) * | 2009-12-11 | 2010-05-05 | 乐山乐电天威硅业科技有限责任公司 | Process for treating residual liquid and tail gas in polysilicon production by improved Siemens method |
| CN201492977U (en) * | 2009-09-22 | 2010-06-02 | 河北科技大学 | Reciprocating type oil-residue scraping machine |
-
2012
- 2012-12-24 CN CN201210566331.2A patent/CN102989300B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201492977U (en) * | 2009-09-22 | 2010-06-02 | 河北科技大学 | Reciprocating type oil-residue scraping machine |
| CN101700466A (en) * | 2009-12-11 | 2010-05-05 | 乐山乐电天威硅业科技有限责任公司 | Process for treating residual liquid and tail gas in polysilicon production by improved Siemens method |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103432871A (en) * | 2013-09-06 | 2013-12-11 | 中国恩菲工程技术有限公司 | Elution treatment equipment and process for tail gas generated during production of polycrystalline silicon |
| CN105084369A (en) * | 2014-04-23 | 2015-11-25 | 新特能源股份有限公司 | Chlorosilane-containing waste gas recovery treatment apparatus |
| CN105084369B (en) * | 2014-04-23 | 2018-02-09 | 新特能源股份有限公司 | A kind of recycling and processing device of chlorine-containing silane waste gas |
| CN103961963A (en) * | 2014-05-07 | 2014-08-06 | 苏州皇森机电科技有限公司 | Systematic dust collector |
| CN105327600A (en) * | 2014-08-08 | 2016-02-17 | 新特能源股份有限公司 | Treating apparatus for chlorosilane-containing tail gas produced in polysilicon production process |
| CN104445512A (en) * | 2014-10-30 | 2015-03-25 | 安徽国祯环保节能科技股份有限公司 | Equipment for removing dross on surface of anaerobic tank of urban sewage treatment plant |
| CN104445512B (en) * | 2014-10-30 | 2016-05-04 | 安徽国祯环保节能科技股份有限公司 | For the removing equipment of municipal sewage plant's anaerobic pond surface scum |
| CN110087750A (en) * | 2016-11-17 | 2019-08-02 | 龙沙有限公司 | Filter mobile device |
| CN111249887A (en) * | 2020-02-24 | 2020-06-09 | 洛阳中硅高科技有限公司 | Method for treating silicon tetrachloride tail gas |
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Address after: No. 9, Sanjiang Avenue, Qujing economic and Technological Development Zone, Yunnan Province, Yunnan Patentee after: YUNNAN METALLURGICAL YUNXIN SILICON MATERIAL CO.,LTD. Address before: 655011 Sanjiang Avenue, Qujing economic and Technological Development Zone, Qujing, Yunnan Province, No. 9 Patentee before: KUNMING YEYAN NEW-MATERIAL Co.,Ltd. |
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Granted publication date: 20151223 Termination date: 20211224 |