CN102985781A - Heat and energy exchange - Google Patents

Heat and energy exchange Download PDF

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Publication number
CN102985781A
CN102985781A CN2011800344672A CN201180034467A CN102985781A CN 102985781 A CN102985781 A CN 102985781A CN 2011800344672 A CN2011800344672 A CN 2011800344672A CN 201180034467 A CN201180034467 A CN 201180034467A CN 102985781 A CN102985781 A CN 102985781A
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wall part
microchannel
normal
fluid
equipment according
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CN2011800344672A
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CN102985781B (en
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斯科特·戴维斯
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Forced Physics LLC
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Forced Physics LLC
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/18Arrangements for modifying heat-transfer, e.g. increasing, decreasing by applying coatings, e.g. radiation-absorbing, radiation-reflecting; by surface treatment, e.g. polishing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F1/00Tubular elements; Assemblies of tubular elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D2015/0225Microheat pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2260/00Heat exchangers or heat exchange elements having special size, e.g. microstructures
    • F28F2260/02Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)

Abstract

Materials, components, and methods are provided that are directed to the fabrication and use of micro-scale channels with a fluid for a heat exchange system, where the temperature and flow of the fluid is controlled, in part, through the macroscopic geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular. Accelerating and decelerating elements provided herein can be configured with micro-scale channels which can trace out a generally spiral path.

Description

The heat and energy exchange
The application requires the priority of the 61/347th, No. 446 U.S. Provisional Application of application on May 23rd, 2010, and its content is incorporated herein by reference.The application relates to the 12/585th, No. 981 U. S. application of the common pending trial of application on September 30th, 2009, and its content is incorporated into by reference, and itself requires the rights and interests of the 61/101st, No. 227 U.S. Provisional Application of 30 applications September in 2008.
Technical field
Meet material of the present disclosure, assembly and method and relate to the manufacturing minitype channel and use minitype channel in conjunction with fluid, wherein said minitype channel is temperature and the stream that is configured at least part of control fluid according to specific macrostructure.
Background of invention
The feature of the volume of fluid (such as air) can be temperature and pressure.When being regarded as a collection of composition particle that comprises for example oxygen molecule and nitrogen molecule, also can be the distribution that forms particle speed in the feature to the fluid volume under the fixed temperature.The feature of this distribution is generally the average speed that is understood as that with the temperature correlation of fluid (for example, gas).
Therefore, the application that can be the heating, cooling and the generation that relate to flow of the internal heat energy of fluid provides energy source.
Summary of the invention
In one aspect, embodiment can provide the system of the one or more minitype channels (" microchannel ") that utilize the stream be constructed to containing fluid, and wherein the wall of minitype channel and the composition particle in the fluid through structure so that the collision that forms between the wall of particle and minitype channel is reflexive basically.And, minitype channel can macrostructure be configured to provide at least the first wall part of near flat at least one wall at least, the 3rd wall part of near flat, the first intermediate wall portion and the second intermediate wall portion, wherein the first border of the border of the first wall part and the first intermediate wall portion joins, the first border of the second wall part and the second boundary of the first intermediate wall portion join, the first border of the second boundary of the second wall part and the second intermediate wall portion joins, and the second boundary of the border of the 3rd wall part and the second intermediate wall portion joins, so that the first wall part, the first intermediate wall portion, the second wall part, the second intermediate wall portion and the 3rd wall part form the wall that joins of the part of microchannel.Further say, embodiment can provide the first normal of the almost plane that is defined by the first wall part to be not parallel to the second normal of the almost plane that is defined by the second wall part, and also be not parallel to the 3rd normal of the almost plane that is defined by the 3rd wall part, and wherein the second normal also is not parallel to the 3rd normal, further say, embodiment can provide the angular deflection between the first normal and the second normal to spend less than 90, and approximate identical with the angular deflection between the second normal and the 3rd normal.If at least N of the Breadth Maximum that the interval between the first wall part and the second wall part is the microchannel strides described interval is (wherein N can be integer) doubly, the angular deflection between the first normal and the second normal can be less than the N/10 degree so.Similarly, if at least N of the Breadth Maximum that the interval between the second wall part and the 3rd wall part is the microchannel strides described interval doubly, the angular deflection between the second normal and the 3rd normal can be less than the N/10 degree so.Property purpose presented for purpose of illustration only, at least 25 times of the Breadth Maximum that the interval between the first wall part and the second wall part if (and the interval between the second wall part and the 3rd wall part) is the microchannel strides described interval, so angular deflection between the first normal and the second normal (and the angular deflection between the second normal and the 3rd normal) can be less than 2.5 degree.Similarly, property purpose presented for purpose of illustration only, if at least 50 times of the Breadth Maximum that the interval between the first wall part and the second wall part is the microchannel strides described interval, the angular deflection between the first normal and the second normal can be less than 5 degree so.
In another aspect, embodiment can comprise molecule and can allow by the heating of enhance fluid volume at fluid provides the stream of convection cell volume and the manipulation of temperature in the situation of population of molecular vibration energy level.If allow the molecular relaxation of these vibrational excitations, embodiment can allow to produce so the electromagnetic radiation of launching and it is handled so.
In another aspect, embodiment can provide the stream of convection cell volume and the manipulation of temperature, and can be provided in heating and cooling, refrigeration, electricity generate, relevant and incoherent light emission, gas pump are taken out, plasma and the interior practical application of particle beam generations, particle beam acceleration, chemical treatment and other scope.
Other target of the present disclosure and advantage part will be set forth in ensuing description, and part will be apparent from described description, perhaps can meet embodiment of the present disclosure by implementation and learn.Described target and advantage can realize and reach by the element pointed out in the claims of enclosing especially and combination.
Should be appreciated that aforementioned large volume description and hereinafter describe both in detail and only be exemplary and illustrative and do not limit as requested the present invention.
The accompanying drawing summary
The accompanying drawing of incorporating in this specification and consisting of the part of this specification illustrates embodiment of the present disclosure and is used for illustrating together with the description principle of the present disclosure.
Fig. 1 describes to meet exemplary heat exchange system of the present disclosure;
Fig. 2 is the exemplary diagram of the microchannel in the acceleration components of system of Fig. 1;
Fig. 3 is the graphical representation of exemplary that meets reflectivity collision of the present disclosure;
Fig. 4 is the exemplary diagram of the microchannel in the deceleration component of system of Fig. 1;
Fig. 5 describes the exemplary diagram of the interface channel of the acceleration components of system of interface and connection layout 1 and deceleration component; With
Exemplary normal vector and the angular deflection of the wall of the microchannel in the acceleration components of the system of Fig. 6 depiction 1.
The specific embodiment
Now will be in detail with reference to the present embodiment of the present disclosure (exemplary), the feature of the present embodiment shown in the accompanying drawing.No matter when, all will refer to identical reference number identical or like among the figure.
Fig. 1 describes to meet the figure of exemplary heat exchange system 100 of the present disclosure.Pump 150 is constructed to generate flow (for instance such as air) and/or described flow is maintained from passage 152 to passage 151.The exemplary fluid stream of arrow 118 indication admission passages 151, and arrow 128 indications are from the exemplary fluid stream of passage 152.
In general, meet and of the present disclosurely be, subsystem 110 can comprise a plurality of acceleration components 115, and wherein each acceleration components 115 comprises the microchannel (hereinafter will be described further it) that is communicated with passage 151 fluids.In addition, subsystem 120 can comprise a plurality of deceleration components 125, and wherein each deceleration component 125 also comprises the microchannel (hereinafter will be described further it) that is communicated with passage 152 fluids.Further say, what meet exemplary of the present disclosure is, can have man-to-man correspondence between each microchannel of each acceleration components 115 and each microchannel of each deceleration component 125, wherein said man-to-man correspondence can be communicated with the microchannel fluid of deceleration component 125 by interface 130 by the microchannel of guaranteeing each acceleration components 115 and realizes.
In preferred embodiments, the every pair of acceleration components 115 and deceleration component 125 can shift 100 watts to hot side (deceleration component 125) from cold side (acceleration components 115).The size of the such acceleration components 115 in a pair of like this 100 watts of acceleration components and the deceleration component can be 100 millimeters and takes advantage of 100 millimeters.In another embodiment, other exchange heat element (not shown) can be affixed to each acceleration components 115 and deceleration component 125.In meeting embodiment of the present disclosure, other exchange heat element can be basically smooth (be smooth such as acceleration components 115 and deceleration component 125) and is used for heat is spread out of surrounding air (by the other surface area this energy that dissipates is provided) from deceleration component 125, or is used for heat is transmitted to acceleration components 115(again by providing other surface area to be used for the cooling purpose from surrounding air).In one embodiment, other exchange heat element can be 100 millimeters * 100 millimeters, therefore make the acceleration components 115 of combination and other exchange heat element 100 be of a size of 100 millimeters * 200 millimeters, and make the deceleration component 125 of combination and other exchange heat element 100 be of a size of 100 millimeters * 200 millimeters.In the embodiment that Fig. 1 describes, have in 20 (20) the situations to such acceleration components of describing 115 and deceleration component 125, system 100 can be from subsystem 110 transferase 12s kilowatt to subsystem 120.In another preferred embodiment, can shift 3.5 kilowatts from cold side in the situation of hot side having such 35 pairs, the height H of 3.5 kilowatts of systems can be approximate 300 millimeters.If interface 130 is 10 mm wides (and take above-mentioned other exchange heat element), the overall dimension of so such 3.5 kilowatts of system can be 300 millimeters * 210 millimeters * 200 millimeters.In addition, the exemplary diameter of passage 151 and passage 152 can be 25 millimeters or larger.In addition, in such one exemplary 3.5 kilowatts systems, if fluid is air, pump 150 can be 300-500 watt air pump so.Further say, in such exemplary, the air that cycles through system 100 can be drawn from the direct environment of system 100.
Passage 151 is communicated with passage 152 fluids by a plurality of microchannels, interface 130 and the deceleration component 125 in a plurality of acceleration components 115.Arrow 138 describe by interface 130 from acceleration components 115 to deceleration component 125 flow.
Fig. 2 is the schematic diagram of the microchannel 210 in the exemplary acceleration components 115 of Fig. 1.Passage 151 is depicted as the opening in the acceleration components 115 and is communicated with microchannel 210 fluids.Such as the ratio of microchannel 210 depicted in figure 2 only for the diagram purpose.That microchannel 210 can be designed to is small-sized, and (that is, having in preferred embodiments can be little of approximate 3e-11m 2/ linear micron is to 6e-10m 2The interior surface area of/linear micron, it can correspond respectively to has approximate 9 microns passages to 180 micron diameters).As describing among Fig. 2, in exemplary, microchannel 210 is similar to and is limited to flat site (that is, acceleration components 115) and is rendered as conveyor screw so that the fluid that enters from passage 151 enters microchannel 210, draws the arc of radius increase until fluid inlet line passage 220.In preferred embodiments, from passage 151 until arrive the total length of the microchannel 210 of linear passageway 220 and can be approximate more than 10mm to 1 meter.Say further, as above discuss that acceleration components 115 is that width W can be 100 millimeters in the preferred embodiment of one of a pair of 100 watts of acceleration components and deceleration component therein.
In addition, in preferred embodiments, the wall of microchannel 210 can be reflexive basically, and Fig. 3 is the part of depiction 2 in more detail.Specifically, arrow 325 is illustrated in composition particle 310 and collides the velocity component that forms particle 310 before with wall 305.(wall 305 is enlarged drawings of the exemplary wall of microchannel 210, and according to preferred embodiment, forms particle 310 corresponding to the composition particle in the exemplary fluid that flows through microchannel 210.) normal 306 expression is perpendicular to the axle on the plane of being defined by wall 305.Arrow 335 is illustrated in and forms particle 310 and the rear velocity component that forms particle 310 of wall 305 collisions.As used herein, it is wherein to form the velocity component on the local part 301 determined planes 302 that are parallel to the wall 305 that forms the collision near-end between particle 310 and the wall 305 in the particle 310 in the substantially the same collision in collision front and back that composition particle 310 collides with the reflectivity between the wall 305.In addition, during reflectivity collision, can be substantially the same with speed perpendicular to the relevant composition particle 310 of the velocity component on the plane of wall 305 in the collision front and back.Those skilled in the art should understand that as used herein term " reflectivity collision " should not be interpreted as being only applicable to elastic collision.But, owing between the wall 305 of microchannel and a plurality of composition particle 310, can have the transfer of energy (in general), so should be appreciated that the kinetic energy increase that has before forming particle 310 can make the kinetic energy that forms particle 310 collide with respect to it with any one particular reflective collision between the wall 305 or reduce.For example, shift to the energy that forms particle 310 if exist from wall 305, so people will expect form particle 310 and be parallel to acute angle between the plane of wall 305 after collision can than before the collision greatly.Similarly, shift to the energy of wall 305 if exist from forming particle 310, people will expects that the acute angle that forms particle 310 and be parallel between the plane of wall 305 will be than little before colliding after collision so.In addition, be different from the temperature of wall if comprise the temperature of the fluid of a plurality of composition particles, can exist so the internal energy from the fluid to the wall or from the wall to the fluid to shift (temperature which depends on is higher).If the collision between a plurality of composition particles 310 and the wall 305 is as used herein to be reflexive basically, so from the fluid that flows through microchannel 210 to wall 305 or the energy from wall 305 to the fluid that flows through microchannel 210 shift can be mainly by becoming the average change of the speed of particle 310 to occur the composition particle 310 during the collision with perpendicular to the relevant composition of the change of the velocity component on the plane of wall 305.People it is also to be understood that during colliding this variation of the velocity component that forms particle 310 can change the overall rate of the composition particle 310 that collision process causes.
In meeting embodiment of the present disclosure, the surface of the wall of microchannel 210 can comprise any suitable material that is configured to the reflectivity collision, such as silicon, tungsten, gold, platinum and diamond.This surface can be used the arbitrary technology (including but not limited to sputtering method and evaporation deposition method) in the multiple MEM manufacturing technology and be deposited on the microchannel 210.In addition, meet and of the present disclosurely be, the diamond smooth film with the little roughness Ra to 100nm and 20nm of particulate can grow on the conduit wall.In one embodiment, (that is, approximate 4000K under an atmospheric pressure) and its hardness (that is, being a10 in the mohsscale) can be preferably diamond because its fusing point.What meet another embodiment of the present disclosure is that the surface of the wall of microchannel 210 also can comprise tungsten carbide, glass and pyrolytic graphite---at least part of because the high heat conductance of its 1700W/mK.Microchannel 210 also can comprise the diamond nano membrana granulosa on the pyrolytic graphite substrate.
Fig. 4 is the schematic diagram of the microchannel 410 in the exemplary deceleration component 125 of Fig. 1.Passage 152 is depicted as the opening in the deceleration component 125, and is communicated with microchannel 410 fluids.Moreover, such as the ratio of microchannel 410 depicted in figure 4 only for the diagram purpose.That microchannel 410 can be designed to is small-sized, and (that is, having in preferred embodiments can be little of approximate 3e-11m 2/ linear micron is to 6e-10m 2The interior surface area of/linear micron, it can correspond respectively to has approximate 9 microns passages to 180 micron diameters).In exemplary, as describing among Fig. 4, microchannel 410 is approximate to be limited to flat site (that is, acceleration components 125) and to be rendered as conveyor screw so that the fluid that enters from linear passageway 420 enters microchannel 410, draws arc that radius reduces until fluid admission passage 152.In preferred embodiments, from linear passageway 420 until arrive the total length of the microchannel 410 of passage 152 and can be approximate more than 10mm to 1 meter.Say further, as above discuss that deceleration component 125 is that width W can be 100 millimeters in the preferred embodiment of one of a pair of 100 watts of acceleration components and deceleration component therein.In addition, in preferred embodiments, the wall of microchannel 410 can be reflexive basically.
In meeting embodiment of the present disclosure, the surface of the wall of microchannel 410 can comprise any suitable material that is configured to the reflectivity collision, such as silicon, tungsten, gold, platinum and diamond.This surface can be used the arbitrary technology (including but not limited to sputtering method and evaporation deposition method) in the multiple MEM manufacturing technology and be deposited on the microchannel 410.In addition, meet and of the present disclosurely be, the diamond smooth film with the little roughness Ra to 100nm and 20nm of particulate can grow on the conduit wall.In one embodiment, (that is, approximate 4000K in an atmospheric pressure) and its hardness (that is, being a10 in the mohsscale) can be preferably diamond because its fusing point.What meet another embodiment of the present disclosure is that the surface of the wall of microchannel 410 also can comprise tungsten carbide, glass and pyrolytic graphite---at least part of because the high heat conductance of its 1700W/mK.Microchannel 410 also can comprise the diamond nano membrana granulosa on the pyrolytic graphite substrate.
Fig. 5 describes to be connected 510 between linear passageway 220 and the linear passageway 420 by interface 130.
In preferred embodiments, if fluid is air, passage 151 can remain under the relatively high pressure so, and passage 152 can remain under the relatively low pressure, to allow flow by a plurality of acceleration components 115 and deceleration component 125.In preferred embodiments, passage 151 can present approximate 1 atmospheric pressure or above pressure, and passage 152 can present 0.528 pressure of the pressure of approximate passage 151.
With reference to figure 6, it describes the expanded view of microchannel 210, and by using as discussed above pressure differential, the fluid of (that is, the proximal end of inlet opening 601) can be caused and flow through the conveyor screw that radius increases on the interior section of microchannel 210.If the temperature of fluid is T at inlet opening 601 1, forming so particle (such as the composition particle 310 among Fig. 3) can be represented by VELOCITY DISTRIBUTION (its average speed and temperature are proportional).
If the throat of inlet opening 601 littlely (for example, all is 0.01 μ m Anywhere 2To 500 μ m 2, wherein fluid is air), move through so inlet opening 601 and can present to the composition particle in the microchannel 210 and make its component that is parallel to direction 650 greater than its speed perpendicular to the component of direction 650.Therefore, obtain mainly to be parallel to the flowing velocity of direction 650 by the fluid of microchannel 210.The kinetic energy relevant with flow on direction 650 draws from the internal heat energy of fluid, and before fluid entered inlet opening 601, it was in T 1The law of conservation of energy indication is because at T 1Under the part of initial heat energy be converted into kinetic energy by the flow of microchannel 210, so the temperature of the fluid in the microchannel 210 (in the fixing framework of fluid velocity) can be lower than T 1, we are appointed as T with described temperature 2If T 2Also (we are appointed as T with described temperature less than the temperature of the wall 610 of microchannel 210 W), the fluid in the microchannel 210 can cool off the material that comprises acceleration components 115 so.
The microchannel 210 that meets embodiment of the present disclosure is constructed to strengthen this variations in temperature to the impact of the fluid by microchannel 210 at least three kinds of modes.Specifically, if so that wall 610 is reflexive with the collision that forms between the particle basically, so this class collision---it is the mode that shifts energy between wall 610 and fluid---will be given birth on total miscarriage of the fluid by microchannel 210 impact of minimum to the composition particle in wall 610 and the fluid through structure.In other words, if form the collision between particle and the wall 610 so that the speed of composition particle equally may be on away from any direction of wall 610 (namely, nonreflective collision), so a plurality of these class collisions will exert an influence to flow is slowed down, thereby also may the internal temperature of rising microchannel 210 be exerted an influence.The microchannel 210 that meets embodiment of the present disclosure is constructed to strengthen the cooling impact by the impact of optionally avoiding nonreflective collision.
In addition, because the conveyor screw that the outer wall of microchannel 210 is constructed to increase substantially, so the continuous part of 210 wall from the microchannel (such as part 610,615 and 620) specular scattering forms the component that particle can convert the part perpendicular to the velocity component (that is, radial velocity component) of the flow path direction by microchannel 210 to the direction that is parallel to the stream by microchannel 210.210 path becomes large because conveyor screw is along the microchannel, so along with fluid is advanced towards linear passageway 220, form particle and can experience collision (210 the path along the microchannel) with wall fewer and fewerily.
In addition, since microchannel 210 be designed to small-sized (that is, have in preferred embodiments can be little to approximate 3e-11m 2/ linear micron is to 6e-10m 2The interior surface area of/linear micron), relatively large (that is the volume of the fluid that, is wherein surrounded by above-mentioned surface is approximate 8e-17m so the surface area that is represented by the wall of microchannel 210 is to the ratio of the given volume of the fluid in any zone in the microchannel 210 2/ linear micron is to 3e-15m 3/ linear micron).Because the surface area that the wall of microchannel 210 represents to fluid volume is the major way that carries out energy exchange between wall and the fluid 115, so this can be easy to make the interactive maximization of total energy exchange between fluid and the microchannel 210.
For example, as shown in Figure 6, form particle and can enter inlet opening 601, wherein component mainly is parallel to direction 650, and the collision of the reflectivity of the regional area 610 of the wall of experience and microchannel 210; And obtain the velocity component on the direction 651.Form particle and can experience now reflectivity collision with the regional area 615 of the wall of microchannel 210, and obtain the velocity component on the direction 652.Form particle and can experience reflectivity collision with the regional area 620 of the wall of microchannel 210, and obtain another velocity component on the general direction of microchannel 210.
Angle beta is corresponding to the angular deflection between normal 625 and the normal 630.Angle [alpha] is corresponding to the angular deflection between normal 630 and the normal 635.In preferred embodiments, if at least N of the Breadth Maximum that the interval between the first wall part and the second wall part is the microchannel strides described interval times (wherein, N can be integer), the angular deflection between the first normal and the second normal can be less than the N/10 degree so.Similarly, if at least N of the Breadth Maximum that the interval between the second wall part and the 3rd wall part is the microchannel strides described interval doubly, the angular deflection between the second normal and the 3rd normal can be less than the N/10 degree so.For example, preferably, at least 25 times of the Breadth Maximum that the interval between the first wall part and the second wall part if (interval between the second wall part and the 3rd wall part) is the microchannel strides described interval, so angular deflection between the first normal and the second normal (and the angular deflection between the second normal and the 3rd normal) is less than 2.5 degree.Similarly, preferably, if at least 50 times of the Breadth Maximum that the interval between regional area 610 and the regional area 615 is microchannel 210 strides described interval, the angular deflection between normal 625 and the normal 630 can be less than 5 degree so.Similarly, if at least 50 times of the Breadth Maximum that the interval between regional area 615 and the regional area 620 is microchannel 210 strides described interval, the angular deflection between normal 630 and the normal 635 can be less than 5 degree so.
In this way, acceleration components 115 can by fluid pass through cool off, wherein fluid is constructed to present the reflectivity collision with the wall of microchannel 210.In addition, the fluid by acceleration components 115 can be accelerated: namely, when fluid arrived linear passageway 220, the velocity component of the composition particle of fluid was the direction of main linear passageway 220 along leading to connection 510.
Summarizing a little and meeting of the present disclosure is that the translational kinetic energy (TKE) of the composition particle in the fluid (that is, the molecule in the molecular beam) can reduce by the collision with the surface.The percentage of TKE of transferring to the surface from fluid can be depending on the speed of fluid, the smoothness on surface, the inside kinetic energy of the composition particle the fluid and the kinetic energy density on surface.
Smooth surface when placing higher energy density has the transferable more energy of fluid (as molecular beam) of specific root mean square (RMS) speed and constant average incidence angle to the similar face with low kinetic energy density.If the energy density on surface is enough high with respect to the energy density of impacting molecular beam, will there be so energy to transfer to described surface from described bundle.
Cause net energy transfer can reduce the inside kinetic energy energy level of the composition particle in the fluid to the surface collision on surface.When the inside of molecule energy level fully reduced (such as passing through vibration level), it can the frequency suitable with the inside energy level that reduces launch one or more photons.
Identical operating principle can be applicable to deceleration component 125, and wherein microchannel 410 is constructed to represent the conveyor screw of continuous small radii by the fluid to passage 152 from linear passageway 420.In this way, along with fluid is advanced towards passage 152, can experience more and more collision (210 the path along the microchannel) with wall from connecting 510 high-velocity fluids that arrive linear passageway 420.
As acceleration components 115 and microchannel 210, the wall of the microchannel 410 in the deceleration component 125 is constructed to cause by the collision of the experience of the composition particle in the fluid of microchannel 410 reflectivity.
In addition, if the composition particle of fluid is molecule (and, if for example fluid is gas), the certain vibration state that forms so particle can increase population because of the temperature of reaching near the inside opening between microchannel 410 and the passage 152.
Meet and of the present disclosurely be, the molecular beam that can be used in the MEMS device (such as acceleration components 115 and deceleration component 125) of cooling electronic device, refrigeration, air conditioning and other application can present high RMS speed.The molecular beam that is formed, had the RMS speed of 2,000 meter per seconds by room air has still air at the translational kinetic energy of 4,000K when above (temperature just in time exceeds the fusing point of most of material).The hot side heat exchanger of refrigeration system will preferably have from the molecular beam that accelerates and extract the translational kinetic energy of accurate amount and inner kinetic energy and do not damage the heat exchanger that is comprised of conventional material (such as aluminium and have 933K only or the heat-conducting plastic of lower fusing point).
The energy that progressively reduce to allow described surface of translational kinetic energy energy level that has the rapid molecular bundle of high-energy-density with respect to described surface shifts in the length surface of prolongation and occurs.When the temperature that will damage passage or raising device when the extraction of more concentrating exceeds physical constraints, but this is the access method of extraction energy from molecular beam.Use this energy extraction method progressively, in the refrigeration system is that hot side heat exchanger that the aluminium of 933K is made can be used for 2,000m/s or above RMS speed the energy that extracts being transferred to external environment condition and not damaged the passage of heat-exchange device and the excessive any part of the outer surface of heat hot amount switch not from the high-energy molecular beam by fusing point.Use kinetic energy extracting method progressively, almost any conformal channel material (comprising pottery and thermal conductive polymer) can be used as passage and hot packing in hot side heat exchanger is used.
As described herein, when molecular beam experiences a series of surface collision of the arc that progressively reduces with radius, progressively extract translational kinetic energy and inner kinetic energy.Multiple MEMS device channels designs can allow molecular beam to experience this a series of collisions of the arc that progressively reduces with radius.For example, be configured to initial radium large, along with length progressively is reduced to the spirochetal passage of small radii, and the whole diameters place that uses the centrifugal force of screw to remain on the passage of decay is close to described surface and the helical molecule bundle that advances by passage is two embodiment of this class design.Any Energy extraction design progressively will be used for promoting that bundle kinetic energy convert IR wavelength and the optical wavelength of light to, even also be like this when the average energy content of bundle can produce higher frequency and launches in the unexpected slack-off or situation about stopping of bundle.For the application that needs upper frequency emission, promote the design of more unexpected energy extraction method certainly can be applied and be in the scope of the present disclosure.
Description can be derived by kinetic theory to the equation of the approximate energy transfer of impact surfaces temperature from the energy of the translational energy of molecular beam.At equation (3kT)/2=(mv 2In)/2, k is Boltzmann (Boltzmann) constant, and T is the temperature take degree Kelvin as unit, and m is that quality and v are speed.Since energy with speed square increase increase, so the amount of kinetic energy that can be by very fast bundle per second being slowed down one meter transfer to the surface can be more than the amount that can be reduced to transfer to by slower molecular beam similar face with identical speed.The local temperature of impact surfaces can be controlled with the impingement angle of supplying of the known speed scope with molecular beam with the hot path that extends to outer surface.
The heat exchanger that meet the disclosure, progressively absorbs kinetic energy from the high-energy molecular beam can be heated by the inner passage Surface absorption of heat exchanger along with the kinetic energy from molecular beam.Suppose between the outer surface of surface, inner passage and heat exchanger, to exist the path of abundant heat conduction, can make heat exchanger and molecular beam channel surface and surrounding environment keep the variation of the Δ T(temperature of wanting by means of the usual manner of the transfer of heat from the heat exchanger to the surrounding environment so).The heat exchanger that extracts equably energy along channel surface from molecular beam can be similar to the almost condition of isothermal very much.
The energy that extracts from the balance molecular beam can be used for accurately quantizing the energy model the channel lumens.Planck (Plank) radiation formula provides the emission of the light with measurable energy, and it equals Planck's constant and multiply by frequency.Planck radiation formula can be used for calculating any average energy of wanting frequency from the light of MEMS device passage emission.
When aiming and balance molecular beam were transferred to passage surperficial with the energy of high-resolution amount, continuous relevant spontaneous emission also can occur.Can allow light to escape from passage to the passage transparency of the light frequency of launching and be used for practical use, described practical use comprises that any laser is used and as from the conversion of the generable light energy of light diode array in the flux path of the phototonus emission of passage to electric current.The voltage of electric current can relate to the band-gap energy of channel material.Coherent transmitting can allow optical diode to have narrow bandwidth efficiently the energy that is extracted is transformed into the electric current of the voltage of being wanted from molecular beam.
Can use the easily series of parallel channel surface acquisition from the MEMS device of super optical flat circular surfaces from the coherent transmitting of some passages and homophase emission.The energy density of coherent transmitting can realize with the sub-micron gap between the parallel channels.MEMS device with the homogeneous optics of the splendid optics of tool and UV transparent channel can use the multiple material manufacturing.As germanium and Amtir institute can as, silicon can provide suitable transparent optical homogeney to some infrared frequencies.Sapphire, yittrium oxide and yttrium-aluminium-garnet also provide splendid infrared optical transmittance.Can use optical glass for UV and optical wavelength.
In preferred embodiments, framework or microchannel 210 and microchannel 410 can reduce pump and take out power demand.At least part of owing to this framework, the value relevant with the coefficient of performance (" COP ") can be 10 or larger.
In meeting another embodiment of the present disclosure, by operating under different pressures, the value of COP can be 10 or larger.For example, in exemplary, each forms the required power of particle (or molecule) is the function of pressure ratio and non-pressure.For operation under elevated pressures but be constructed to present the example system 100 of uniform pressure ratio, the pump of each composition particle is pumped into this and will be kept identical, if higher heat transfer can be provided and can produce 10 or higher COP but form particle, the density higher (that is, molecular beam density is higher) that flows so.
Meet material of the present disclosure and assembly, such as above-mentioned exemplary means, provide solution to the whole issue that has been identified.
After the explanation of having considered embodiment disclosed herein and practice, those skilled in the art will understand and meet other embodiment of the present disclosure.It is exemplary to wish that specification and embodiment only are regarded as, and true scope of the present invention and spirit are indicated by following claims.

Claims (70)

1. equipment, it comprises:
The microchannel, it comprises wall part; With
Fluid, it comprises the composition particle;
Wherein said microchannel is constructed to be contained in the flow on the first direction of the cross section that is substantially perpendicular to described microchannel; And
Wherein said wall part and described composition particle are through constructing so that the collision between described composition particle and the described wall part is reflexive basically; And
Wherein said wall part comprises the first wall part, the second wall part, the 3rd wall part, the first intermediate wall portion and the second intermediate wall portion at least;
The first border of the border of wherein said the first wall part and described the first intermediate wall portion joins, the first border of described the second wall part and the second boundary of described the first intermediate wall portion join, the first border of the second boundary of described the second wall part and described the second intermediate wall portion joins, and the second boundary of the border of described the 3rd wall part and described the second intermediate wall portion joins, so that described the first wall part, described the second intermediate wall portion, described the second wall part, described the second intermediate wall portion and described the 3rd wall part form the joining part of the described wall of described microchannel; And
The first normal of wherein said the first wall part is not parallel to the second normal of described the second wall part, and also is not parallel to the 3rd normal of described the 3rd wall part, and wherein said the second normal also is not parallel to described the 3rd normal; And
Angular deflection between wherein said the first normal and described the second normal is spent less than 90, and approximate identical with the angular deflection between described the second normal and described the 3rd normal.
2. equipment according to claim 1, the interval between wherein said the first wall part and described the second wall part be the described microchannel Breadth Maximum of striding described interval at least Integer N doubly.
3. equipment according to claim 2, the described angular deflection between wherein said the first normal and described the second normal is less than the M degree, and wherein M equals N/10.
4. equipment according to claim 1, the interval between wherein said the first wall part and described the second wall part are at least 25 times of the described microchannel Breadth Maximum of striding described interval.
5. equipment according to claim 4, the described angular deflection between wherein said the first normal and described the second normal are at least 2.5 degree.
6. equipment according to claim 1, the interval between wherein said the first wall part and described the second wall part are at least 50 times of the described microchannel Breadth Maximum of striding described interval.
7. equipment according to claim 6, the described angular deflection between wherein said the first normal and described the second normal is less than 5 degree.
8. equipment according to claim 1, wherein said fluid is gas.
9. equipment according to claim 8, wherein said gas comprises air.
10. equipment according to claim 1, wherein said microchannel is limited to flat site basically.
11. equipment according to claim 10, the path of wherein said microchannel are the conveyor screws with interior section and exterior section, the radius of wherein said exterior section is greater than the radius of described interior section.
12. equipment according to claim 11, wherein the described stream of fluid microchannel is to described exterior section from described interior section.
13. equipment according to claim 11, wherein the described stream of fluid microchannel is to described interior section from described exterior section.
14. a system that is used for exchange heat, it comprises:
Acceleration components, it comprises equipment according to claim 12;
Deceleration component, it comprises equipment according to claim 13;
The interface, it comprises the microchannel that is communicated with the described microchannel fluid of the described microchannel of described acceleration components and described deceleration component;
The described fluid of wherein said acceleration components comprise described fluid basically the described fluid of the first under the first pressure and described deceleration component comprise described fluid basically less than the second portion under the second pressure of described the first pressure.
15. equipment according to claim 1, wherein said particle is selected from least one in molecule or the atom.
16. equipment according to claim 1, the cross section of wherein said microchannel is basically rounded.
17. equipment according to claim 1, the cross section of wherein said microchannel is ovalize basically.
18. equipment according to claim 1, the cross section of wherein said microchannel are square basically.
19. equipment according to claim 1, the cross section of wherein said microchannel is basically rectangular.
20. system according to claim 14, it also comprises the thermoelectric device of described deceleration component near-end.
21. system according to claim 14, it also comprises the electrooptical device of described deceleration component near-end.
22. system according to claim 14, it also comprises the exchange heat element that is affixed to conductively described deceleration component.
23. system according to claim 14, it also comprises the exchange heat element that is affixed to conductively described acceleration components.
24. system according to claim 14, wherein said acceleration components and described deceleration component are constructed to at least 100 watts speed heat energy be transferred to described deceleration component from described acceleration components.
25. being approximate 100 millimeters, system according to claim 24, each in wherein said acceleration components and the described deceleration component take advantage of 100 millimeters.
26. system according to claim 25, each of at least a portion of at least a portion of the described microchannel of wherein said acceleration components and the described microchannel of described deceleration component is configured with between approximate 3e-11m 2/ linear micron is to 6e-10m 2Interior surface area between the/linear micron.
27. equipment according to claim 1, wherein said wall part comprise the material that uses the sputtering method deposition.
28. equipment according to claim 1, wherein said wall part comprise the material that uses the evaporation deposition method deposition.
29. comprising, equipment according to claim 1, wherein said wall part has dystectic material.
30. comprising, equipment according to claim 1, wherein said wall part has highdensity material.
31. equipment according to claim 1, wherein said wall part also comprises coating material.
32. equipment according to claim 1, wherein said wall part comprises the coating material that uses sputtering method to deposit at substrate, and described between wherein said composition particle and the described wall part is essentially reflexive collision and comprises reflexive collision that is essentially between described composition particle and the described coating material.
33. equipment according to claim 1, wherein said wall part comprises the coating material that uses evaporation deposition method to deposit at baseplate material, and described between wherein said composition particle and the described wall part is essentially reflexive collision and is included in reflexive collision that is essentially between described composition particle and the described coating material.
34. equipment according to claim 32, wherein said substrate are copper.
35. equipment according to claim 34, wherein said coating material are tungsten.
36. it is smooth substantially that equipment according to claim 1, wherein said wall part are manufactured to.
37. a method, it comprises:
The microchannel that comprises wall part is provided; With
Provide and comprise the fluid that forms particle;
Be adjacent to the stream that described wall part causes described fluid;
Wherein said microchannel is constructed to be contained in the described flow on the first direction of the cross section that is substantially perpendicular to described microchannel; And
Wherein said wall part and described composition particle are through constructing so that the collision between described composition particle and the described wall part is reflexive basically; And
Wherein said wall part comprises the first wall part, the second wall part, the 3rd wall part, the first intermediate wall portion and the second intermediate wall portion at least;
The first border of the border of wherein said the first wall part and described the first intermediate wall portion joins, the first border of described the second wall part and the second boundary of described the first intermediate wall portion join, the first border of the second boundary of described the second wall part and described the second intermediate wall portion joins, and the second boundary of the border of described the 3rd wall part and described the second intermediate wall portion joins, so that described the first wall part, described the first intermediate wall portion, described the second wall part, described the second intermediate wall portion and described the 3rd wall part form the joining part of the described wall of described microchannel; And
The first normal of wherein said the first wall part is not parallel to the second normal of described the second wall part, and also is not parallel to the 3rd normal of described the 3rd wall part, and wherein said the second normal also is not parallel to described the 3rd normal; And
Angular deflection between wherein said the first normal and described the second normal is spent less than 90, and approximate identical with the angular deflection between described the second normal and described the 3rd normal.
38. at least Integer N of the Breadth Maximum that described method according to claim 37, the interval between wherein said the first wall part and described the second wall part are described microchannels strides described interval doubly.
39. described method according to claim 38, the described angular deflection between wherein said the first normal and described the second normal is less than the M degree, and wherein M equals N/10.
At least 25 times of the Breadth Maximum that 40. described method according to claim 37, the interval between wherein said the first wall part and described the second wall part are described microchannels strides described interval.
41. described method according to claim 40, the described angular deflection between wherein said normal and described the second normal is less than 2.5 degree.
At least 50 times of the Breadth Maximum that 42. described method according to claim 37, the interval between wherein said the first wall part and described the second wall part are described microchannels strides described interval.
43. described method according to claim 42, the described angular deflection between wherein said the first normal and described the second normal is less than 5 degree.
44. described method according to claim 37, wherein:
Provide the step of the microchannel that comprises wall part to comprise:
Under the first temperature, provide described wall part in the very first time; And wherein
The part of described fluid is flowing through described microchannel between the described very first time and during being later than period between the second time of the described very first time; And wherein
Described wall part presents the second temperature less than described the first temperature in described the second time.
45. described method according to claim 37, wherein said fluid is gas.
46. described method according to claim 45, wherein said gas comprises air.
47. described method according to claim 37, wherein said particle is at least one that is selected from molecule or the atom.
48. described method according to claim 37, wherein said microchannel is limited to flat site basically.
49. described method according to claim 48, the path of wherein said microchannel is the conveyor screw with interior section and exterior section, and the radius of wherein said exterior section is greater than the radius of described interior section.
50. described method according to claim 49, wherein the described stream of fluid microchannel is to described exterior section from described interior section.
51. described method according to claim 49, wherein the described stream of fluid microchannel is to described interior section from described exterior section.
52. an exchange heat method, it comprises:
Acceleration components is provided, and it comprises according to claim 50 described method;
Deceleration component is provided, and it comprises according to claim 51 described method;
The interface is provided, and described interface comprises the microchannel that is communicated with the described microchannel fluid of the described microchannel of described acceleration components and described deceleration component;
The described fluid of wherein said acceleration components comprise described fluid basically the described fluid of the first under the first pressure and described deceleration component comprise described fluid basically less than the second portion under the second pressure of described the first pressure.
53. described method according to claim 37, the cross section of wherein said microchannel is basically rounded.
54. described method according to claim 37, the cross section of wherein said microchannel is ovalize basically.
55. described method according to claim 37, the cross section of wherein said microchannel are square basically.
56. described method according to claim 37, the cross section of wherein said microchannel is basically rectangular.
57. 2 described methods according to claim 5, it also comprises the thermoelectric device that described deceleration component near-end is provided.
58. 2 described methods according to claim 5, it also comprises the electrooptical device that described deceleration component near-end is provided.
59. 2 described methods according to claim 5, it also comprises provides the exchange heat that is affixed to conductively described deceleration component element.
60. 2 described methods according to claim 5, it also comprises provides the exchange heat that is affixed to conductively described acceleration components element.
61. 2 described methods according to claim 5, wherein said acceleration components and described deceleration component are constructed to at least 100 watts speed heat energy be transferred to described deceleration component from described acceleration components.
62. being approximate 100 millimeters, 1 described method according to claim 6, each in wherein said acceleration components and the described deceleration component take advantage of 100 millimeters.
63. 2 described methods according to claim 6, each of at least a portion of at least a portion of the described microchannel of wherein said acceleration components and the described microchannel of described deceleration component is constructed to have between approximate 3e-11m 2/ linear micron is to 6e-10m 2Interior surface area between the/linear micron.
64. described method wherein provides the microchannel that comprises wall part also to comprise: to use sputtering method deposition materials on the surface of described microchannel according to claim 37.
65. described method wherein provides the microchannel that comprises wall part also to comprise: to use evaporation deposition method deposition materials on the surface of described microchannel according to claim 37.
66. described method according to claim 37, wherein said wall part comprises having dystectic material.
67. described method according to claim 37, wherein said wall part comprises having highdensity material.
68. 4 described methods according to claim 6, wherein said surface is copper.
69. 8 described methods according to claim 6, wherein said material is tungsten.
70. described method according to claim 37, it is smooth substantially that wherein said wall part is manufactured to.
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