CN102978712A - Vapor composite-cooled viewing window of sapphire crystal growing furnace - Google Patents
Vapor composite-cooled viewing window of sapphire crystal growing furnace Download PDFInfo
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- CN102978712A CN102978712A CN2012105387223A CN201210538722A CN102978712A CN 102978712 A CN102978712 A CN 102978712A CN 2012105387223 A CN2012105387223 A CN 2012105387223A CN 201210538722 A CN201210538722 A CN 201210538722A CN 102978712 A CN102978712 A CN 102978712A
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- viewing window
- crystal growing
- growing furnace
- sapphire crystal
- aqueous vapor
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Abstract
The invention discloses a vapor composite-cooled viewing window of a sapphire crystal growing furnace. The vapor composite-cooled viewing window comprises a viewing window lens, a flange plate, a seal ring, a viewing window water pipeline, a viewing window air duct, an air inlet, a viewing window protecting separation blade and a viewing window separation blade gyration device. The viewing window is characterized by being compositely cooled by vapor. The viewing window of the sapphire crystal growing furnace can be continuously used for over 48-96 hours by the design of the viewing window, and the failure rate that an operator cannot operate the crystal growing furnace due to polluted viewing window is greatly reduced.
Description
Technical field
The present invention relates to a kind of structure design of sapphire crystal growing furnace, especially a kind of viewing window.
Background technology
The Russian technology of the most uses of present domestic sapphire crystal growing furnace, the operator need use viewing window that the situation of seeding is judged when seeding, this type of furnace has used the stainless steel pipe box of water-cooled to do vision slit, when needs are observed, the catch of viewing window is opened, close when not required catch, keep the cleaning of viewing window wafer.But still having volatile matter evaporate on the viewing window wafer, within 5-10h, viewing window will be blocked by volatile matter, thereby do not see the crystal growing state in Chu's stove, for the tyro, very unfavorable, simultaneously, open and close frequently viewing window, mechanism's sealing-ring of clear view screen catch can wear and tear, under extreme case, can cause vacuum leak, and, also have the volatile matter deposition on the viewing window catch, frequently operational observations window catch, its volatile matter that deposits above can be fallen in the crucible, so that the growth of crystal is affected.
Summary of the invention
Technical problem to be solved by this invention provides a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, solves viewing window and easily pollutes and cause the crystal affected problem of growing.
For solving the problems of the technologies described above; technical scheme of the present invention is: a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window; comprise observation window lens, ring flange, sealing-ring; the viewing window ventilating water pipe; the viewing window breather line, inlet mouth, viewing window protection catch and viewing window catch rotation apparatus; it is characterized in that described viewing window uses the aqueous vapor Compound cooling.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, described observation window lens uses any one in fused silica glass, sapphire eyeglass and three kinds of eyeglasses of common heatproof glass mirror.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, described viewing window ventilating water pipe uses any one in double-layer stainless steel and the carbon steel bi-material, middle water flowing, and pipeline welding is on upper bell.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, it is characterized in that, described viewing window breather line is welded on the ventilating water pipe, in use individual layer stainless steel and the carbon steel bi-material any one, outer wall has the gas access port, and inwall has argon gas export.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, described sealing-ring uses any one in tetrafluoroethylene and complete not rubber or the General Purpose Rubber bi-material.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, described ring flange uses any one materials processing in stainless steel and the carbon steel bi-material to form.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, described viewing window protection catch uses any one materials processing in stainless steel, tungsten, molybdenum and four kinds of materials of carbon steel to form.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, described viewing window catch rotating mechanism is that a cylinder drives the rotation of viewing window protection catch by an axle, covers and expose observation window lens.
Above-mentioned a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window is characterized in that, described axle uses any one in stainless steel, tungsten and three kinds of materials of molybdenum.
The invention has the advantages that: the design of this kind viewing window can so that the sapphire crystal growing furnace viewing window continue to use more than the 48-96h, greatly reduce crystal growing furnace and pollute so that the failure rate that the operator can't operate because of viewing window.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Fig. 1 is the sapphire crystal growing furnace overall schematic.
Fig. 2 is the viewing window synoptic diagram.
Fig. 3 is viewing window and upper furnace cover structure synoptic diagram.
Embodiment
Fig. 1, Fig. 2 and shown in Figure 3, sapphire crystal growing furnace comprise viewing window 1, upper bell 2 and upper thermoscreen 3.Viewing window 1 comprises observation window lens 8, ring flange 9, sealing-ring 10; viewing window ventilating water pipe 13, viewing window breather line 12, inlet mouth 5; viewing window protection catch 17 and viewing window catch rotation apparatus 15 is characterized in that, described viewing window 1 uses the aqueous vapor Compound cooling.Observation window lens 8 materials are silica glass, and viewing window ventilating water pipe 13 materials are stainless steel, are welded on the bell 2, and the centre has water coolant to pass through, and inlet channel 4 and outlet conduit 14 are arranged on it.Viewing window breather line 12 materials are stainless steel, are welded on the viewing window ventilating water pipe 13, and outer wall has air inlet port 6 to connect inlet pipe 5, and inwall has production well 11, and the gas that enters furnace chamber is taken away by vacuum system.Viewing window breather line 12 sealing-ring 10, observation window lens 8 and the ring flanges 9 placed successively from bottom to top suitable for reading.Sealing-ring 10 uses material to be tetrafluoroethylene, and ring flange 9 uses material to be stainless steel, and ring flange 9 is sealingly fastened in observation window lens 8 and sealing-ring 10 on the viewing window breather line 12 by anchor clamps 7.Viewing window catch 17 is positioned in the middle of thermoscreen 3 and the upper bell 2, use coupling shaft 16 to be connected with viewing window catch rotating mechanism 15, viewing window catch 17 uses material to be molybdenum, viewing window catch rotating mechanism 15 is that a pneumatic motor drives 17 rotations of viewing window catch by coupling shaft 16, cover and expose observation window lens 8, coupling shaft uses material to be molybdenum.
Claims (9)
1. aqueous vapor Compound cooling sapphire crystal growing furnace viewing window; comprise observation window lens; ring flange; sealing-ring, viewing window ventilating water pipe, viewing window breather line; inlet mouth; viewing window protection catch and viewing window catch rotation apparatus is characterized in that described viewing window uses the aqueous vapor Compound cooling.
2. according to right 1 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, it is characterized in that described observation window lens uses any one in fused silica glass, sapphire eyeglass and three kinds of eyeglasses of common heatproof glass mirror.
3. according to right 1 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, it is characterized in that described viewing window ventilating water pipe uses any one in double-layer stainless steel and the carbon steel bi-material, middle water flowing, pipeline welding is on upper bell.
4. according to right 1 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, it is characterized in that, it is characterized in that, described viewing window breather line is welded on the ventilating water pipe, in use individual layer stainless steel and the carbon steel bi-material any one, outer wall has the gas access port, and inwall has argon gas export.
5. according to right 1 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, it is characterized in that described sealing-ring uses any one in tetrafluoroethylene and complete not rubber or the General Purpose Rubber bi-material.
6. according to right 1 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, it is characterized in that described ring flange uses any one materials processing in stainless steel and the carbon steel bi-material to form.
7. according to right 1 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, it is characterized in that described viewing window protection catch uses any one materials processing in stainless steel, tungsten, molybdenum and four kinds of materials of carbon steel to form.
8. according to right 1 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing window, it is characterized in that described viewing window catch rotating mechanism is that a pneumatic motor drives the rotation of viewing window protection catch by an axle, covers and expose observation window lens.
9. according to right 8 described a kind of aqueous vapor Compound cooling sapphire crystal growing furnace viewing windows, it is characterized in that described axle uses any one in stainless steel, tungsten and three kinds of materials of molybdenum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105387223A CN102978712A (en) | 2012-12-13 | 2012-12-13 | Vapor composite-cooled viewing window of sapphire crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2012105387223A CN102978712A (en) | 2012-12-13 | 2012-12-13 | Vapor composite-cooled viewing window of sapphire crystal growing furnace |
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| CN102978712A true CN102978712A (en) | 2013-03-20 |
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| CN2012105387223A Pending CN102978712A (en) | 2012-12-13 | 2012-12-13 | Vapor composite-cooled viewing window of sapphire crystal growing furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103741209A (en) * | 2014-01-16 | 2014-04-23 | 哈尔滨工业大学 | Continuous observation window for growth of sapphire crystals by kyropoulos method |
| CN113564721A (en) * | 2021-08-17 | 2021-10-29 | 眉山博雅新材料有限公司 | Observation window device of crystal growth furnace |
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| CN2426966Y (en) * | 2000-06-26 | 2001-04-18 | 佛山市康强工业研究所 | Furnace high-temperature observation visor |
| US20070131162A1 (en) * | 2004-02-05 | 2007-06-14 | Nec Machinery Corporation | Single crystal growing apparatus |
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| CN201302372Y (en) * | 2008-10-28 | 2009-09-02 | 上海森松新能源设备有限公司 | Double-layer sight glass used on polysilicon equipment and provided with bellows thermal compensation structure |
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| CN202064039U (en) * | 2011-04-13 | 2011-12-07 | 常州市天龙光电设备有限公司 | Shading regulation mechanism for observation window of jewel furnace |
| CN102425956A (en) * | 2011-12-07 | 2012-04-25 | 北京有色金属研究总院 | Electron beam melting furnace observation window mechanism and protection method thereof |
| CN202430334U (en) * | 2011-12-19 | 2012-09-12 | 山东紫晶光电新材料有限公司 | In-furnace observation device for gemstone furnace |
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- 2012-12-13 CN CN2012105387223A patent/CN102978712A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2426966Y (en) * | 2000-06-26 | 2001-04-18 | 佛山市康强工业研究所 | Furnace high-temperature observation visor |
| US20070131162A1 (en) * | 2004-02-05 | 2007-06-14 | Nec Machinery Corporation | Single crystal growing apparatus |
| CN101311657A (en) * | 2008-03-12 | 2008-11-26 | 江苏双良锅炉有限公司 | Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror |
| CN201302372Y (en) * | 2008-10-28 | 2009-09-02 | 上海森松新能源设备有限公司 | Double-layer sight glass used on polysilicon equipment and provided with bellows thermal compensation structure |
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| CN202064039U (en) * | 2011-04-13 | 2011-12-07 | 常州市天龙光电设备有限公司 | Shading regulation mechanism for observation window of jewel furnace |
| CN102425956A (en) * | 2011-12-07 | 2012-04-25 | 北京有色金属研究总院 | Electron beam melting furnace observation window mechanism and protection method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103741209A (en) * | 2014-01-16 | 2014-04-23 | 哈尔滨工业大学 | Continuous observation window for growth of sapphire crystals by kyropoulos method |
| CN113564721A (en) * | 2021-08-17 | 2021-10-29 | 眉山博雅新材料有限公司 | Observation window device of crystal growth furnace |
| CN113564721B (en) * | 2021-08-17 | 2022-06-07 | 眉山博雅新材料股份有限公司 | Observation window device of crystal growth furnace |
| WO2023020526A1 (en) * | 2021-08-17 | 2023-02-23 | 眉山博雅新材料股份有限公司 | Window apparatus for oven body |
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Application publication date: 20130320 |