CN101311657A - Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror - Google Patents
Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror Download PDFInfo
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- CN101311657A CN101311657A CNA2008100186946A CN200810018694A CN101311657A CN 101311657 A CN101311657 A CN 101311657A CN A2008100186946 A CNA2008100186946 A CN A2008100186946A CN 200810018694 A CN200810018694 A CN 200810018694A CN 101311657 A CN101311657 A CN 101311657A
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Abstract
The invention relates to a water cooling double-glazing glass sight glasses of a polysilicon reducing furnace comprising an inner barrel (12), an outer barrel (13), a flange III (10), a flange II (8), a flange I (7), inner layer glass (6), outer layer glass (5), a cooling water inlet I (2), a cooling water inlet II (1), a cooling water outlet II (9), a cooling water outlet I (11); the inner barrel (12) is plugged into an inner hole of the flange III (10); the outer barrel (13) is arranged in an inner end of the flange III (10); the flange II (8) and the flange I (7) are stromatolithically and successively arranged at the outside of the flange III (10); the inner layer glass (6) is arranged between the flange III (10) and the flange II (8), and the outer layer glass (5) is arranged between the flange II (8) and the flange I (7); the inner layer glass (6), the outer layer glass (5) and the flange II (8) form a sealed cavity; the flange II (8) is provided with a cooling water inlet II (2) and a cooling water outlet II (9); the outer barrel (12) is provided with a cooling water inlet I (1) and a cooling water outlet I (11). The cooling water cools down the outer glass, the inner glass, the inner barrel and the outer barrel, and the invention has good cooling effect.
Description
Technical field
The present invention relates to a kind of reduction furnace of producing polysilicon, especially relate to a kind of polycrystalline silicon reducing furnace water-cooling double glass viewing mirror.Belong to the polysilicon preparing technical field.
Background technology
Polysilicon is the direct material of manufacture order crystal silicon.High-purity polycrystalline silicon is the basic material of semiconductor devices such as opto-electronic conversion battery, integrated circuit.Along with the fast development of world semiconductor industry, the extensive application of very large scale integrated circuit, the wilderness demand of photovoltaic cell, All Around The World is significantly increasing the demand of polysilicon.
The method of production polysilicon has multiple, and hydrogen reduction method is modal a kind of method.This method is that silicon halide of purifying and the good hydrogen of purification are fed reduction furnace as raw material, and in hot environment, silicon halide and hydrogen generation chemical reaction generate polysilicon, and be deposited on the heater (silicon rod of minor diameter).Chemical reaction is proceeded, and the polysilicon that is deposited on the heater is more and more, silicon rod is chap gradually, has generated effective depth at last and has been about the polysilicon rod that 2.8m, diameter are about 150mm.
Polycrystalline silicon reducing furnace is the final generation equipment of polysilicon rod, generated in the process of polysilicon rod by hydrogen reducing at silicon halide, can emit a large amount of heat, operating temperature in the reduction furnace surpasses 1000 ℃, the safe handling of the cooling direct relation reduction furnace of reduction furnace and the service life of reduction furnace.
Polycrystalline silicon reducing furnace, domestic existing correlative study is illustrated respectively below.
Patent No. ZL 200420060144.8 also discloses a kind of hydrogen reduction furnace for polysilicon, this reduction furnace comprises end socket and the body of heater that has cooling water cavity, the chassis, air inlet pipe under the chassis and blast pipe, electrode on the chassis, described electrode is 12 pairs, i.e. 24 electrodes, and two circumference uniform distribution settings in the upper edge, chassis; Described air inlet pipe mainly is made of a horizontal endless tube and 9 nozzles connections, and wherein 8 nozzles are arranged on the chassis between two circle electrodes and along same circumference uniform distribution, and a nozzle is arranged on the center chassis position.Be arranged on the excircle in 8 pairs of electrodes, all the other 4 pairs of electrodes are arranged on the inner periphery.In the electrode, positive and negative electrode is provided with on the chassis one by one at interval.The chassis is a water-cooled structure, and cooling water inlet and outlet are set on it.Body of heater is provided with the form of double-layer glass structure.The end socket top is provided with adpting flange.The main weak point of this patent is that visor does not adopt water-cooling structure, can not guarantee to surpass in reduction furnace steady in a long-term use the under 1000 ℃ of hot conditions.
Summary of the invention
The objective of the invention is to overcome above-mentioned deficiency, a kind of polycrystalline silicon reducing furnace water-cooling double glass viewing mirror that has water-cooling structure is provided.
The object of the present invention is achieved like this: a kind of polycrystalline silicon reducing furnace water-cooling double glass viewing mirror, comprise inner core, urceolus, flange III, flange II, flange I, inner layer glass, glass outer, cooling water inlet I, cooling water inlet II, coolant outlet II and coolant outlet I, described inner core and the coaxial setting of urceolus, inner core is plugged in the flange III endoporus, urceolus is arranged on flange III the inner, flange II and flange I successively stacked in the flange III outside, inner layer glass is arranged between flange III and the flange II, glass outer is arranged between flange II and the flange I, inner layer glass, surround a sealing cavity volume between glass outer and the flange II, flange II is provided with cooling water inlet II and coolant outlet II, and urceolus is provided with cooling water inlet I and coolant outlet I.Cooling water cools off glass outer, inner layer glass, inner core, urceolus.
Compare with visor with existing polycrystalline silicon reducing furnace, the present invention can guarantee long-term, the reliably working of visor, with long-term, safety, the operation efficiently that realizes reduction furnace.
Description of drawings
Fig. 1 is a polycrystalline silicon reducing furnace water-cooling double glass viewing mirror structural representation of the present invention.
Among the figure: cooling water inlet I 1, cooling water inlet II 2, bolt 3, nut 4, glass outer 5, inner layer glass 6, flange I 7, flange II 8, coolant outlet II 9, flange III10, coolant outlet I 11, inner core 12, urceolus 13.
The specific embodiment
Referring to Fig. 1, polycrystalline silicon reducing furnace water-cooling double glass viewing mirror mainly is made up of inner core 12, urceolus 13, flange III10, flange II8, flange I 7, inner layer glass 6, glass outer 5, cooling water inlet I 2, cooling water inlet II 1, coolant outlet II 9 and coolant outlet I 11.Described inner core 12 is plugged in the flange III10 endoporus with urceolus 13 coaxial settings, inner core 12, and urceolus 13 is arranged on flange III10 the inner, and flange II8 and flange I 7 stacked successively and fix with bolt 3 and nut 4 in the flange III10 outside.Inner layer glass 6 is arranged between flange III10 and the flange II8.Glass outer 5 is arranged between flange II 8 and the flange I 7.Surround a sealing cavity volume between inner layer glass 6, glass outer 5 and the flange II 8.Flange II 8 is provided with cooling water inlet II 2 and coolant outlet II 9.Urceolus 12 is provided with cooling water inlet I 1 and coolant outlet I 11.One road cooling water enters, flows through gap between glass outer 5 and the inner layer glass 6 from cooling water inlet II 2, and glass outer 5 and inner layer glass 6 are cooled off, and discharges from coolant outlet II 9.Another road cooling water enters from cooling water inlet I 1, and inner core 12, urceolus 13 are cooled off, and discharges from coolant outlet I 11.
Claims (1)
1, a kind of polycrystalline silicon reducing furnace water-cooling double glass viewing mirror, it is characterized in that described visor comprises inner core (12), urceolus (13), flange III (10), flange II (8), flange I (7), inner layer glass (6), glass outer (5), cooling water inlet I (2), cooling water inlet II (1), coolant outlet II (9) and coolant outlet I (11), described inner core (12) and the coaxial setting of urceolus (13), inner core (12) is plugged in flange III (10) endoporus, urceolus (13) is arranged on flange III (10) the inner, flange II (8) and flange I (7) successively stacked in flange III (10) outside, inner layer glass (6) is arranged between flange III (10) and the flange II (8), glass outer (5) is arranged between flange II (8) and the flange I (7), inner layer glass (6), surround a sealing cavity volume between glass outer (5) and the flange II (8), flange II (8) is provided with cooling water inlet II (2) and coolant outlet II (9), and urceolus (12) is provided with cooling water inlet I (1) and coolant outlet I (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810018694 CN100575843C (en) | 2008-03-12 | 2008-03-12 | Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810018694 CN100575843C (en) | 2008-03-12 | 2008-03-12 | Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror |
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| Publication Number | Publication Date |
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| CN101311657A true CN101311657A (en) | 2008-11-26 |
| CN100575843C CN100575843C (en) | 2009-12-30 |
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| CN 200810018694 Active CN100575843C (en) | 2008-03-12 | 2008-03-12 | Polycrystalline silicon reducing furnace water-cooling double glass viewing mirror |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953122A (en) * | 2012-11-14 | 2013-03-06 | 吴江亿泰真空设备科技有限公司 | Novel observation window mechanism of sapphire crystal growth device |
| CN102978712A (en) * | 2012-12-13 | 2013-03-20 | 苏州工业园区杰士通真空技术有限公司 | Vapor composite-cooled viewing window of sapphire crystal growing furnace |
| CN107098349A (en) * | 2017-05-05 | 2017-08-29 | 中国矿业大学 | Observe visor and polycrystalline silicon reducing furnace |
| US9845247B2 (en) | 2013-07-29 | 2017-12-19 | Wacker Chemie Ag | Process for producing polycrystalline silicon |
| CN113341523A (en) * | 2021-06-07 | 2021-09-03 | 西安康拓医疗技术股份有限公司 | Window mirror device for high-temperature processing environment |
| WO2023173786A1 (en) * | 2022-03-14 | 2023-09-21 | 银川隆基光伏科技有限公司 | Connecting assembly, image collection apparatus and high-temperature furnace |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2686967B1 (en) * | 1992-02-04 | 1999-04-09 | France Telecom | DEVICE FOR COOLING AN ELEMENT TREATMENT OVEN AND FURNACE EQUIPPED WITH SUCH A DEVICE. |
| CN2708213Y (en) * | 2004-07-08 | 2005-07-06 | 成都蜀菱贸易发展有限公司 | Polysilicon hydrogen reducing furnace |
| CN2789283Y (en) * | 2005-05-23 | 2006-06-21 | 北京有色金属研究总院 | Non-disassembling cleaning water-cooling viewing window for crystal furnace |
| CN2844146Y (en) * | 2005-09-22 | 2006-12-06 | 长春理工大学 | Observation window of vacuum crystal growth furnace with volatile-matter self-removing function |
| CN201180089Y (en) * | 2008-03-12 | 2009-01-14 | 江苏双良锅炉有限公司 | Water cooling double-layer glass viewing mirror of novel polysilicon reduction furnace |
-
2008
- 2008-03-12 CN CN 200810018694 patent/CN100575843C/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953122A (en) * | 2012-11-14 | 2013-03-06 | 吴江亿泰真空设备科技有限公司 | Novel observation window mechanism of sapphire crystal growth device |
| CN102978712A (en) * | 2012-12-13 | 2013-03-20 | 苏州工业园区杰士通真空技术有限公司 | Vapor composite-cooled viewing window of sapphire crystal growing furnace |
| US9845247B2 (en) | 2013-07-29 | 2017-12-19 | Wacker Chemie Ag | Process for producing polycrystalline silicon |
| US10562779B2 (en) | 2013-07-29 | 2020-02-18 | Wacker Chemie Ag | Process for producing polycrystalline silicon |
| CN107098349A (en) * | 2017-05-05 | 2017-08-29 | 中国矿业大学 | Observe visor and polycrystalline silicon reducing furnace |
| CN113341523A (en) * | 2021-06-07 | 2021-09-03 | 西安康拓医疗技术股份有限公司 | Window mirror device for high-temperature processing environment |
| WO2023173786A1 (en) * | 2022-03-14 | 2023-09-21 | 银川隆基光伏科技有限公司 | Connecting assembly, image collection apparatus and high-temperature furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100575843C (en) | 2009-12-30 |
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Owner name: JIANGSU SHUANGLIANG NEW ENERGY EQUIPMENT CO., LTD. Free format text: FORMER OWNER: SHUANGLIANG BOILER CO., LTD. JIANGSU Effective date: 20121205 |
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Effective date of registration: 20121205 Address after: 214444 Jiangsu city of Wuxi province Jiangyin City Li Town Road No. 115 West Patentee after: Shuangliang New Energy Equipment Co., Ltd. Address before: 214444 Jiangsu city of Jiangyin Province Li Town Road No. 1 West Patentee before: Shuangliang Boiler Co., Ltd. Jiangsu |