CN102945813A - 一种用于全自动引线键合设备上的键合头装置 - Google Patents
一种用于全自动引线键合设备上的键合头装置 Download PDFInfo
- Publication number
- CN102945813A CN102945813A CN201210412618XA CN201210412618A CN102945813A CN 102945813 A CN102945813 A CN 102945813A CN 201210412618X A CN201210412618X A CN 201210412618XA CN 201210412618 A CN201210412618 A CN 201210412618A CN 102945813 A CN102945813 A CN 102945813A
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- Prior art keywords
- bonding
- assembly
- wire clamp
- sparking
- wire
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210412618.XA CN102945813B (zh) | 2012-10-25 | 2012-10-25 | 一种用于全自动引线键合设备上的键合头装置 |
Applications Claiming Priority (1)
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---|---|---|---|
CN201210412618.XA CN102945813B (zh) | 2012-10-25 | 2012-10-25 | 一种用于全自动引线键合设备上的键合头装置 |
Publications (2)
Publication Number | Publication Date |
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CN102945813A true CN102945813A (zh) | 2013-02-27 |
CN102945813B CN102945813B (zh) | 2016-12-21 |
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CN201210412618.XA Expired - Fee Related CN102945813B (zh) | 2012-10-25 | 2012-10-25 | 一种用于全自动引线键合设备上的键合头装置 |
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CN (1) | CN102945813B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103177980A (zh) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | 一种用于全自动引线键合设备上的键合头装置 |
CN105552002A (zh) * | 2015-12-18 | 2016-05-04 | 中国电子科技集团公司第二研究所 | 一种引线楔焊微小力输出机构 |
CN105590874A (zh) * | 2015-12-18 | 2016-05-18 | 中国电子科技集团公司第二研究所 | 一种引线楔焊微小力输出机构的工作方法 |
CN105598613A (zh) * | 2015-12-18 | 2016-05-25 | 中国电子科技集团公司第二研究所 | 全自动引线键合机焊头 |
CN110034032A (zh) * | 2019-04-25 | 2019-07-19 | 广东工业大学 | 一种力反馈闭环控制复合键合装置 |
CN111752314A (zh) * | 2019-03-29 | 2020-10-09 | 上海微电子装备(集团)股份有限公司 | 键合头压力控制装置及控制方法、键合设备 |
CN111863644A (zh) * | 2020-08-04 | 2020-10-30 | 广东金田半导体科技有限公司 | 一种半导体封装超声铝线键合装置 |
CN118712122A (zh) * | 2024-08-30 | 2024-09-27 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | 热声键合机的联动式断线装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58111334A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | シヨツクアブソ−バ−機構 |
WO2001053032A1 (de) * | 2000-01-21 | 2001-07-26 | Hesse & Knipps Gmbh | Halteeinrichtung für ultraschall-transducer |
CN102157409A (zh) * | 2011-03-17 | 2011-08-17 | 南通富士通微电子股份有限公司 | 键合机 |
CN202816884U (zh) * | 2012-10-25 | 2013-03-20 | 广东工业大学 | 用于全自动引线键合设备上的键合头装置 |
-
2012
- 2012-10-25 CN CN201210412618.XA patent/CN102945813B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58111334A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | シヨツクアブソ−バ−機構 |
WO2001053032A1 (de) * | 2000-01-21 | 2001-07-26 | Hesse & Knipps Gmbh | Halteeinrichtung für ultraschall-transducer |
CN102157409A (zh) * | 2011-03-17 | 2011-08-17 | 南通富士通微电子股份有限公司 | 键合机 |
CN202816884U (zh) * | 2012-10-25 | 2013-03-20 | 广东工业大学 | 用于全自动引线键合设备上的键合头装置 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103177980A (zh) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | 一种用于全自动引线键合设备上的键合头装置 |
CN105552002A (zh) * | 2015-12-18 | 2016-05-04 | 中国电子科技集团公司第二研究所 | 一种引线楔焊微小力输出机构 |
CN105590874A (zh) * | 2015-12-18 | 2016-05-18 | 中国电子科技集团公司第二研究所 | 一种引线楔焊微小力输出机构的工作方法 |
CN105598613A (zh) * | 2015-12-18 | 2016-05-25 | 中国电子科技集团公司第二研究所 | 全自动引线键合机焊头 |
CN111752314A (zh) * | 2019-03-29 | 2020-10-09 | 上海微电子装备(集团)股份有限公司 | 键合头压力控制装置及控制方法、键合设备 |
CN111752314B (zh) * | 2019-03-29 | 2021-10-01 | 上海微电子装备(集团)股份有限公司 | 键合头压力控制装置及控制方法、键合设备 |
CN110034032A (zh) * | 2019-04-25 | 2019-07-19 | 广东工业大学 | 一种力反馈闭环控制复合键合装置 |
CN110034032B (zh) * | 2019-04-25 | 2020-10-20 | 广东工业大学 | 一种力反馈闭环控制复合键合装置 |
CN111863644A (zh) * | 2020-08-04 | 2020-10-30 | 广东金田半导体科技有限公司 | 一种半导体封装超声铝线键合装置 |
CN111863644B (zh) * | 2020-08-04 | 2021-03-09 | 广东金田半导体科技有限公司 | 一种半导体封装超声铝线键合装置 |
CN118712122A (zh) * | 2024-08-30 | 2024-09-27 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | 热声键合机的联动式断线装置 |
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Publication number | Publication date |
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CN102945813B (zh) | 2016-12-21 |
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Inventor after: Chen Xin Inventor after: Cao Zhanlun Inventor after: Wu Xiaohong Inventor after: Jiang Yongjun Inventor after: Gao Jian Inventor after: Li Zexiang Inventor before: Cao Zhanlun Inventor before: Chen Xin Inventor before: Wu Xiaohong Inventor before: Jiang Yongjun Inventor before: Gao Jian |
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Granted publication date: 20161221 Termination date: 20211025 |