CN102928912B - Metal-medium coupling resonance cavity for generating Vaino resonance phenomenon - Google Patents
Metal-medium coupling resonance cavity for generating Vaino resonance phenomenon Download PDFInfo
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- CN102928912B CN102928912B CN201210458329.3A CN201210458329A CN102928912B CN 102928912 B CN102928912 B CN 102928912B CN 201210458329 A CN201210458329 A CN 201210458329A CN 102928912 B CN102928912 B CN 102928912B
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Abstract
The invention discloses a metal-medium coupling resonance cavity for generating a Vaino resonance phenomenon. A branch resonance cavity in an MIM (metal-insulator-metal) waveguide and coupling resonance cavities of two baffles are adopted, and different resonance cavities are coupled to generate a steep asymmetric response spectrum line shape, so that the Vaino resonance phenomenon is obtained. In a transmittance spectrum, transmittance can quickly ascend from a valley to a peak of an asymmetric spectrum, so that under the condition that same switching contrast is obtained, required wavelength shift or interval is smaller than spectrum width of a symmetric similar Lorentzian line shape generated in a single resonance cavity, thereby being favorable for reducing a threshold value of a pump energy of a surface plasmon modulator or increasing a wavelength resolution rate of a surface plasmon wavelength division multiplexer and improving sensitivity of a biosensor. Therefore, the metal-medium coupling resonance cavity has very important application in fields of the surface plasmon modulator, a beam splitter, the wavelength division multiplexer and the sensor and the like.
Description
Technical field
The present invention relates to nanophotonics field, be specifically related to a kind of metal-dielectric coupled resonator that produces method promise resonance effect.
Background technology
Surface phasmon (Surface Plasmon Polaritons) SPPs is the focus in current nanophotonics research.Surface phasmon is a kind of light wave at metal and medium interface place and collective oscillation of the interior free electron coupling of metal of being present in, it is a kind of electromagnetic field of special interface constraint pattern, can obtain by the Maxwell equation group solving under the boundary condition at metal-dielectric interface.The feature of SPPs maximum is light field local in the size of metal and medium interface place sub-wavelength, can break through the diffraction limit of traditional optical, also has local fields enhancement effect simultaneously.Therefore, SPPs has obtained researcher's extensive concern in recent years.
At present, because surface phasmon waveguide can break through the diffraction of light limit, caused greatly concern, and be considered to be in most promising replacer in sub-wavelength structure.In diversified surface phasmon waveguide, surface phasmon SPP pattern in metal-dielectric-metal M IM waveguide, can greatly break through traditional diffraction limit, and there is the simplification of long propagation distance, little bending loss and sample processing.Therefore, MIM waveguide has very important application prospect to realizing high integrated photonics loop.Based on MIM waveguide, people have designed and Implemented the surface phasmon photonic device of a lot of compactnesses, for example: wave filter, ring resonator, beam splitter and wavelength division multiplexer.Yet these single resonator cavitys are typically presented as to have almost symmetrical class lorentzian curve.In order to obtain the photonic devices such as modulation, wave length filtering, beam splitting and wavelength-division multiplex of high-contrast, the skew of wavelength or interval must be much larger than the bandwidth of resonator cavity, thereby seriously limited the application of these surface phasmon function elements.
Summary of the invention
In order to solve above problems of the prior art, the present invention proposes a kind of metal-dielectric coupled resonator that can produce method promise resonance effect.By coupled resonator effect, obtain steep asymmetrical response spectra line style, i.e. method promise resonance effect, thus improve significantly the performance of surface phasmon function element.
The object of the present invention is to provide a kind of metal-dielectric coupled resonator that produces method promise resonance effect.
Metal-dielectric coupled resonator of the present invention comprises: metal-dielectric-metal M IM waveguide and the branch's resonator cavity in MIM waveguide and two baffle plates; Wherein, MIM waveguide is three layer flat plate structure, and ground floor and the 3rd layer are metal material, are dielectric layer between the two; Branch's resonator cavity is coupling on the dielectric layer of metal-dielectric-metal M IM waveguide from the side; Two baffle plates are vertically set in dielectric layer, and lay respectively at the both sides of branch's resonator cavity.
The ground floor of MIM waveguide and the 3rd layer adopt the metals such as gold or silver.The thickness h of dielectric layer is between 10 nanometers to 1 micron.In MIM waveguide, surface phasmon field intensity can well be strapped in dielectric layer, can break through greatly diffraction limit, reaches dark sub-wavelength dimensions.
Branch's resonator cavity is coupling on the dielectric layer of MIM waveguide from the side.From Theory of Electromagnetic Field, in thering is the resonator cavity of certain boundary conditions, can only there is the eigenmodes of series of discrete in electromagnetic field, by Maxwell's (Maxwell) system of equations and boundary condition or business software (Comsol Multiphysics, Finite Element Matrix method FDTD etc.), can try to achieve the resonance mode in resonator cavity.
The section of branch's resonator cavity is rectangle, and length d is between 100nm～1000nm; Width w is between 10nm ~ 1000nm.Branch's resonator cavity and dielectric layer are identical medium.This single branch's resonator cavity typically embodies the broadband with almost symmetrical class lorentzian curve and sees through spectrum.The application of the branch's resonator cavity effect based on single, this line style has greatly limited the wavelength resolution (being greater than 200nm) of surface phasmon beam splitter and wavelength division multiplexer.In order to address this problem, in MIM waveguide, increase by two baffle plates, form coupled resonator.
The material of two baffle plates adopts medium or the metal of high index of refraction.The thickness of baffle plate is 1nm ~ 100nm.Only having two baffle plates, do not have in the mim structure of branch's resonator cavity, being easy to obtain surface phasmon SPPs can carry out back reflective between these two baffle plates, thereby forms a Fabry-Perot cavity (Fabry-Perot) FP resonator cavity.
Have at the same time in the mim structure of baffle plate and branch's resonator cavity, different resonator cavitys are coupled mutually, and greatly impact sees through spectrum, produces steep asymmetrical response spectra line style, obtains method promise resonance effect.
Because this seeing through composed the steep asymmetrical response spectra line style with generation method promise resonance effect, transmitance can promptly rise to crest from the trough of asymmetrical spectrum.Obtaining in identical switch contrast ratio situation, required wavelength shift or the interval of this asymmetrical response spectral line type is more much smaller than the spectrum width of the symmetrical class lorentzian curve producing in single resonator cavity, thereby be conducive to reduce the threshold value of the pump energy of surface phasmon modulator, or increase the wavelength resolution of surface phasmon wavelength division multiplexer and the sensitivity of biology sensor.Therefore this steep asymmetrical response spectra line style all has very important application in surface phasmon modulator, beam splitter, wavelength division multiplexer and sensor field.
Advantage of the present invention:
The present invention adopts branch's resonator cavity in MIM waveguide and the coupled resonator of two baffle plates, and different resonator cavitys are coupled mutually, produce steep asymmetrical response spectra line style, obtain method promise resonance effect.This, see through in spectrum, transmitance can promptly rise to crest from the trough of asymmetrical spectrum.Thereby, in the situation that obtain identical switch contrast ratio, required wavelength shift or interval are more much smaller than the spectrum width of the symmetrical class lorentzian curve producing in single resonator cavity, thereby be conducive to reduce the threshold value of the pump energy of surface phasmon modulator, or increase the wavelength resolution of surface phasmon wavelength division multiplexer and the sensitivity of biology sensor.Therefore metal-dielectric coupled resonator of the present invention all has very important application in surface phasmon modulator, beam splitter, wavelength division multiplexer and sensor field.
Accompanying drawing explanation
Fig. 1 is the sectional view of the metal-dielectric coupled resonator of generation method promise resonance effect of the present invention;
Fig. 2 (a) and the metal-dielectric coupled resonator that (b) is respectively generation method promise resonance effect of the present invention are at L
1=L
2=L=110nm and L
1=L
2seeing through under=L=200nm composed.
Embodiment
Below in conjunction with accompanying drawing, by embodiment, the present invention will be further described.
As shown in Figure 1, the metal-dielectric coupled resonator of generation method promise resonance effect of the present invention comprises: metal-dielectric-metal M IM waveguide and the branch's resonator cavity 4 in MIM waveguide and two baffle plates 5; Wherein, MIM waveguide is three layer flat plate structure, and ground floor 1 and the 3rd layer 3 are metal material, are dielectric layer 2 between the two; Branch's resonator cavity 4 is coupling in the dielectric layer 2 of metal-dielectric-metal M IM waveguide from the side; Two baffle plates 5 are vertically set in dielectric layer 2, and lay respectively at the both sides of branch's resonator cavity 4; Branch's resonator cavity 4 and dielectric layer 2 are identical medium; For two-dimensional structure.
In the present embodiment, the metal of the ground floor 1 of MIM waveguide and the 3rd layer 3 is silver, and the medium of dielectric layer 2 and branch's resonator cavity is air, and two baffle plates 5 are argent Ag.
In order to study this coupling effect, adopt finite element method (finite element method) FEM and transmission matrix theory to carry out numerical value and analytical Calculation.
In the present embodiment, baffle plate adopts silver-colored Ag; Thickness h=the 50nm of the dielectric layer of MIM waveguide; The length d of branch's resonator cavity and width w are respectively d=500nm and w=50nm.The selection of this structural parameters is arbitrarily, and the geometric parameter of FP resonator cavity is adjustable, thereby can reach the wavelength of expectation.The spectrum that sees through of SPPs is defined as the structure with branch's resonator cavity and two baffle plates and the business that can flow who there is no the observation point of this structure.The Poynting vector normalization that can flow by the xsect at passage obtains.By changing input wavelength λ, obtain seeing through spectrum.Can from document, obtain and take the dielectric constant of the Ag that λ is function, and utilize method of interpolation to be expanded.
Analytical model based on scattering matrix theory is used for describing and explains and of the present inventionly in coupled resonator, sees through spectrum.
As shown in Figure 2 (a) and (b), first baffle plate is positioned at the distance L of branch's resonator cavity
1, second baffle plate is positioned at the distance L of branch's resonator cavity
2, the thickness of two baffle plates is respectively t
1and t
2, work as L
1=L
2=L=110nm and L
1=L
2=L=200nm, t
1=t
2during=10nm, in coupled resonator, demonstrate steep asymmetrical response spectra line style, produce method promise resonance effect, in Fig. 2, with solid line, represent, compare completely different from the line style that sees through spectrum in branch's resonator cavity single.The line style that sees through spectrum in single branch's resonator cavity is almost symmetrical class lorentzian curve, is represented by dotted lines resonant wavelength λ in Fig. 2
0=970nm, bandwidth Delta lambda
fWHM≈ 180nm.Can see equally, in coupled resonator, see through spectrum and can promptly from the trough of asymmetrical spectrum, rise to crest.And the position of the trough of spectrum is fixed on λ
0=970nm, the namely resonant wavelength of branch's resonator cavity; And the position of the crest of spectrum changes along with the change of the position of two baffle plates.Therefore,, by changing the position of two baffle plates, can be easy to modulate steep asymmetrical response spectra line style.
In MIM waveguide, only be provided with two baffle plates and there is no branch's resonator cavity, can see, the spectrum of two baffle plates (representing with a solid line in Fig. 2) comprises smooth spectrum and class Lorentz resonance peak, the spectral quality except asymmetric part that sees through in spectrum that has kept coupled resonator, as Fig. 2 (a) and (b) as shown in white part.
Asymmetrical response spectra line style Shi You branch resonator cavity in coupled resonator and be formed on that the relative position of the resonant wavelength of inner FP resonator cavity determines.
Seeing through spectrum and can make transmitance promptly rise to crest from the trough of asymmetrical spectrum due to this steep asymmetrical response spectra line style with generation method promise resonance effect, obtaining in identical switch contrast ratio situation, required wavelength shift or the interval of this asymmetrical response spectral line type, more much smaller than the spectrum width of the symmetrical class lorentzian curve producing in single resonator cavity.For example,, as the position of baffle plate L
1=L
2=L=110nm, for identical switch contrast ratio (0% ~ 61%), the method promise required wavelength shift of resonating is Δ λ=30nm, more much smaller than the wavelength shift (Δ λ '=110nm) with the response spectra of symmetrical class lorentzian curve, as shown in Figure 2 (a) shows.And, for L
1=L
2=L=110nm, when wavelength shift is all Δ λ=30nm, in single resonator cavity situation, switch contrast ratio is 0% ~ 9%, and in resonator cavity of the present invention, contrast is 0% ~ 61%, is 7 times under conventional situation.This is conducive to reduce the pump energy threshold value of surface phasmon modulator, or increases the wavelength resolution of surface phasmon wavelength division multiplexer and the sensitivity of biology sensor.
Finally it should be noted that, the object of publicizing and implementing mode is to help further to understand the present invention, but it will be appreciated by those skilled in the art that: without departing from the spirit and scope of the invention and the appended claims, various substitutions and modifications are all possible.Therefore, the present invention should not be limited to the disclosed content of embodiment, and the scope that the scope of protection of present invention defines with claims is as the criterion.
Claims (4)
1. a metal-dielectric coupled resonator, is characterized in that, described coupled resonator comprises: metal-dielectric-metal M IM waveguide and the branch's resonator cavity (4) in MIM waveguide and two baffle plates (5); Wherein, described MIM waveguide is three layer flat plate structure, and ground floor (1) and the 3rd layer (3) are metal material, is dielectric layer (2) between the two; Described branch resonator cavity (4) is coupling on the dielectric layer (2) of metal-dielectric-metal M IM waveguide from the side; Described two baffle plates (5) are vertically set in dielectric layer (2), and lay respectively at the both sides of described branch resonator cavity (4); The thickness h of described dielectric layer (2) is between 10 nanometers to 1 micron; The section of described branch resonator cavity (4) is rectangle, and length d is between 100nm～1000nm; Width w is between 10nm～1000nm; The thickness of described two baffle plates (5) is 1nm～100nm.
2. coupled resonator as claimed in claim 1, is characterized in that, the ground floor of described MIM waveguide (1) and the 3rd layer (3) adopt gold or silver-colored.
3. coupled resonator as claimed in claim 1, is characterized in that, described branch resonator cavity (4) and dielectric layer (2) are identical medium.
4. coupled resonator as claimed in claim 1, is characterized in that, the material of described two baffle plates (5) adopts medium or the metal of high index of refraction.
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| CN103236643B (en) * | 2013-04-18 | 2015-08-12 | 北京大学 | The unidirectional exciter of a kind of wideband surface phasmon |
| CN105424220B (en) * | 2016-01-25 | 2018-03-16 | 哈尔滨工业大学 | A kind of temperature sensor based on surface phasmon |
| CN105651400A (en) * | 2016-02-02 | 2016-06-08 | 浙江大学 | Ultrahigh-precision wavelength resolver based on Fano resonance |
| CN105606250B (en) * | 2016-02-15 | 2021-07-13 | 深圳市诺安太赫兹技术有限公司 | High-resolution temperature sensor based on built-in liquid bag and fixed wavelength |
| CN109239013B (en) * | 2018-10-16 | 2022-05-13 | 深圳大学 | Fano resonance MHM super-surface high-sensitivity background refractive index sensor |
| CN109212664B (en) * | 2018-10-30 | 2020-08-25 | 中天通信技术有限公司 | Bilateral coupling resonant cavity T-shaped wavelength division multiplexer based on plasmon |
| CN113295647B (en) * | 2021-05-13 | 2022-04-12 | 山东大学 | Terahertz waveguide sensing device based on Fano resonance coupling resonant cavity and preparation method thereof |
| CN113540723B (en) * | 2021-09-16 | 2022-07-22 | 江苏大学 | Frequency modulation dual-band sub-wavelength acoustic signal filtering device |
| CN115453433B (en) * | 2022-11-09 | 2023-01-20 | 南方电网数字电网研究院有限公司 | Graphene asymmetric structure magnetic sensor and parameter determination method thereof |
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| CN101083383A (en) * | 2006-05-31 | 2007-12-05 | 佳能株式会社 | Laser device |
| CN202395127U (en) * | 2011-12-15 | 2012-08-22 | 摩比天线技术（深圳）有限公司 | Coupled structure between adjacent dielectric resonators of TE01 mold and filter |
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| CN202395127U (en) * | 2011-12-15 | 2012-08-22 | 摩比天线技术（深圳）有限公司 | Coupled structure between adjacent dielectric resonators of TE01 mold and filter |
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