CN102921338A - Preparation device of trace component in normal-pressure balance stage-by-stage constant volume type gases - Google Patents
Preparation device of trace component in normal-pressure balance stage-by-stage constant volume type gases Download PDFInfo
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- CN102921338A CN102921338A CN2012104180714A CN201210418071A CN102921338A CN 102921338 A CN102921338 A CN 102921338A CN 2012104180714 A CN2012104180714 A CN 2012104180714A CN 201210418071 A CN201210418071 A CN 201210418071A CN 102921338 A CN102921338 A CN 102921338A
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Abstract
The invention relates to a preparation device of a trace component in normal-pressure balance stage-by-stage constant volume type gases. The preparation device comprises a gas bottle, a gas path component, a constant-volume reversing valve component, a constant-volume bottle component and a vacuum pump. The constant-volume bottle component as a core component is composed of the following parts: a bottle opening reversing valve (which serves as a bottle plug), an elastic air bag and an electromagnetic stirrer. The constant-volume reversing valve component is composed of a valve body, a component gas inlet/outlet and a background gas inlet/outlet. Compared with the prior art, the invention can reach the purpose of quantitatively preparing component gases with an extremely low concentration through a series of special modularization structure designs under the premise of avoiding the utilization of a complex pressure dividing apparatus; and meanwhile, gases with different concentrations can be prepared only by replacing different model numbers (constant-volume tube volumes) of constant-volume reversing valve components or adding/reducing the stage number of diluting devices of the constant-volume reversing valve component and the constant-volume bottle component; and the entire device has the characteristics of good convenience and safety and low cost.
Description
Technical field
The present invention relates to a kind of component gas device for formulating, especially relate to the step by step device for formulating of trace components in the constant volume type gas of a kind of normal pressure balance.
Background technology
At present, along with the development of national economy and scientific and technological level, the particularly continuous progress of chemistry, electronics industry, also more and more higher to the requirement of various special gas purity: for example in measuring high-purity gas 10
-6To 10
-9During the trace impurity of mol/mol, need more highly purified " zero gas ", the content of related component gas should also hang down 1-2 the order of magnitude than the content of unknown component gas in the testing sample gas in this zero gas, how to make things convenient for and make fast and accurately the mist that in background gas, contains trace (ppbv, i.e. volume fraction part per billion magnitude) component gas and become a present engineering problem that needs solution.
Nowadays, trace components gas preparation technique mainly is by means of the dividing potential drop control technology, and this depends on comparatively expensive voltage divider system, and has certain danger.The preparation that utilizes volume to control to finish the trace components mist under normal pressure does not also have relevant report at present.For this reality, we have proposed the step by step device for formulating of trace components in the constant volume type gas of a kind of normal pressure balance, this device can be under the condition that need not accuracy controlling background gas and component gas dividing potential drop, make the mist that in background gas, contains trace components gas, have conveniently, safe, quick, economic characteristics, thereby will have more widely development prospect.
Summary of the invention
The object of the invention is to develop the step by step device for formulating of trace components in the constant volume type gas of a kind of normal pressure balance, with minute pressure-controlled air distribution system security that solves present employing and the problem such as expensive.
Purpose of the present invention can be achieved through the following technical solutions:
The normal pressure balance step by step in the constant volume type gas device for formulating of trace components mainly adopt the modularization thinking, the devices such as all kinds of gas cylinders, constant volume reversal valve, constant volume bottle, vavuum pump are organically combined by air-channel system.At first be to have utilized this special device of constant volume reversal valve in this covering device, be equivalent to a quantitative injector, can accomplish in the constant volume bottle, to input the component gas of certain volume for distribution at every turn.Next is integrated bottleneck reversal valve at constant volume bottle stopper place, and the design of similar triple valve can gas circuit be switched between blender and vavuum pump flexibly.Also has built-in elastic bag in the constant volume bottle, the outlet of air bag is connected with atmosphere by control valve, therefore its inner air pressure can switch between normal pressure and vacuum, and the effect of air bag is when utilizing itself and ambient pressure equilibrium swelling, the gaseous mixture in the constant volume bottle to be discharged.At last, in the bottom of constant volume bottle the electromagnetic agitation oar is housed, its effect is the mixing that can accelerate gas in the constant volume bottle.
This device specifically comprises following composition structure:
Constant volume bottle assembly: be provided with two groups, the bottleneck reversal valve that comprises constant volume bottle housing that hard glass makes, becomes one with bottle stopper, constant volume bottle housing built-in elastic air bag and magnetic stirrer;
Constant volume reversing valve assembly: be provided with two groups, formed by valve body, component gas gateway and background gas gateway, have one section in the valve body and be equivalent to the quantitatively tube sealing of ring, the constant volume reversing valve assembly lays respectively at the front end of two groups of constant volume bottle assemblies, is connected with constant volume bottle assembly with Pressure gauge by mass flowmenter;
Gas cylinder and gas circuit assembly: comprise the valve that arranges on component gas steel cylinder, background gas steel cylinder, stainless steel pipeline and the pipeline, be connected in series component gas steel cylinder, background gas steel cylinder, constant volume bottle assembly, constant volume reversing valve assembly by the stainless steel pipeline;
Vavuum pump: be connected to the below of constant volume bottle assembly, be comprised of the two-stage pump housing, wherein mechanical pump is as fore pump, and diffusion pump or molecular pump are as secondary pumps.
Described bottleneck reversal valve is the parts of similar triple valve, distributing on the horizontal plane of bottleneck reversal valve mist gateway and vacuum orifice, and the perpendicular bisector upper end is by the logical atmosphere of control valve, and the lower end is connected with elastic bag.
The horizontal component gas circuit of described bottleneck reversal valve is taked the design of similar triple valve, " T " font that is of level has 3 holes on the valve body, two relative holes are respectively the mist gateway, vertical direction also has vacuum orifice with it, the inner core of bottleneck reversal valve can rotate, and can switch to mist pattern/vacuum mode.When switching to the mist pattern, close the control valve at mixed gas outlet place, the mist that will contain quantitative volume constituents gas is introduced in the constant volume bottle and is fully mixed; When distribution finishes, be after most of mist is discharged the constant volume bottle via the elastic bag that expands, the inner core of rotary valve switches to vacuum mode, namely the space is connected with vavuum pump in the bottle, the constant volume bottle can be vacuumized, the pollution of avoiding residual gas to cause, on the vertical direction, the pipeline that the bottleneck reversal valve links to each other with air bag passes the inner core of bottleneck reversal valve.
Described elastic bag is located at the inside of constant volume bottle housing, the top outlet of air bag communicates with atmosphere by control valve, in the use, air bag is evacuated in advance, after gas in the constant volume bottle mixes, slowly open the control valve on air bag top, make its inflation, and the process of utilizing its expansion with configure in the constant volume bottle gas discharge.
Described elastic bag adopts Kynoar (PVDF) the thin-film material manufacturing of surperficial high-flatness, and the volume under normal pressure can be ignored with respect to constant volume bottle internal volume; Elasticity is fine can be changed by proof pressure, and the normal temperature lower surface is little to the suction-operated of various gas molecules.
Described magnetic stirrer is installed in the bottom of constant volume bottle, is comprised of the electromagnetic actuator device of foldable blade and bottom, during use, by the High Rotation Speed of electromagnetic actuator device, utilizes centrifugal force that blade is thrown away.
Described blade is made by the macromolecular material of flexibility, be selected from Kynoar (PVDF) material of surperficial high-flatness, centripetally when not using be folded into less volume, convenient packing into by bottleneck installs in the constant volume bottle, and its surface is less to the suction-operated of various gas molecules at normal temperatures.
Described tube sealing can be connected with component gas/background gas gas circuit respectively by the valve body rotation, it is gone to the component gas gas circuit first during use and be connected, make the component gas of wherein preserving certain volume, then the fast rotational valve body makes it to be connected with the background gas gas circuit, utilizes background gas to purge this section component gas is brought in the constant volume bottle assembly.
Described tube sealing adopts polytetrafluoroethylene (PTFE) (PTFE) or the manufacturing of high density poly propylene (HDPP) material of surperficial high-flatness.
Described constant volume bottle assembly and constant volume reversing valve assembly are provided with one or more groups, are connected in series successively by the stainless steel pipeline.
The present invention at first is that design has utilized this special device of constant volume reversal valve, is equivalent to a quantitative injector, can accomplish to input the component gas of certain volume for distribution in the constant volume bottle at every turn.Next is integrated bottleneck reversal valve at constant volume bottle stopper place, and the design of similar triple valve can gas circuit be switched between blender and vavuum pump flexibly.Also has built-in elastic bag in the constant volume bottle, the outlet of air bag is connected with atmosphere by control valve, therefore its inner air pressure can switch between normal pressure and vacuum, and the effect of air bag is when utilizing itself and ambient pressure equilibrium swelling, the gaseous mixture in the constant volume bottle to be discharged.At last, in the bottom of constant volume bottle the electromagnetic agitation oar is housed, its effect is the mixing that can accelerate gas in the constant volume bottle.In a word, this device is by the structural design of a series of certain moduli blockings, can use under the prerequisite of complicated dividing potential drop equipment avoiding, and reaches the purpose of the component gas of quantitative preparation extremely low concentration; Simultaneously, wish is prepared the gas of variable concentrations, only needs to change the constant volume reversing valve assembly of different model (constant volume tube volume), and perhaps the progression of increase and decrease " constant volume reversing valve assembly-constant volume bottle assembly " air mix facilities can be realized.
Compared with prior art, the present invention is by the structural design of a series of certain moduli blockings, can use under the prerequisite of complicated dividing potential drop equipment avoiding, and reaches the purpose of the component gas of quantitative preparation extremely low concentration; Simultaneously, wish is prepared the gas of variable concentrations, only needs to change the constant volume reversing valve assembly of different model (constant volume tube volume), and perhaps the progression of increase and decrease " constant volume reversing valve assembly-constant volume bottle assembly " air mix facilities can be realized; The characteristics such as that whole device has is easy, safety, cost are low, mainly utilized " constant volume reversal valve-constant volume bottle " air mix facilities of two-stage series connection, so that this device can be under the condition that need not accuracy controlling background gas and component gas dividing potential drop, make the mist that in background gas, contains trace (ppbv, i.e. volume fraction part per billion magnitude) component gas.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is the structural representation of constant volume bottle assembly;
Fig. 3 is the structural representation of constant volume reversing valve assembly;
Fig. 4 is the structural representation of constant volume reversing valve assembly;
Fig. 5 is the structural representation of bottleneck reversal valve;
Fig. 6 is the structural representation of elastic bag;
Fig. 7 is the structural representation of magnetic stirrer;
Fig. 8 is the structural representation of magnetic stirrer.
Among the figure, 1 is that background gas steel cylinder, 2 is gas vent for vavuum pump, 9 for support, 8 for electromagnetic actuator device, 733 for blade, 732 for magnetic stirrer, 731 for elastic bag, 73 for ventilation capsule outlet, 72 for vacuum orifice, 714 for mixed gas outlet, 713 for mist entrance, 712 for bottleneck reversal valve, 711 for constant volume bottle assembly, 71 for Pressure gauge, 7 for component gas entrance, 6 for background gas entrance, 53 for tube sealing, 52 for constant volume reversing valve assembly, 51 for mass flowmenter, 5 for control valve, 4 for component gas steel cylinder, 3.
The specific embodiment
The present invention is described in detail below in conjunction with the drawings and specific embodiments.
Embodiment
The normal pressure balance step by step in the constant volume type gas structure of the device for formulating of trace components adopt modular construction to form as shown in Figure 1, specifically comprise with lower member:
Constant volume bottle assembly 7, its structure be as shown in Figure 2: be provided with two groups, the bottleneck reversal valve 71 that comprises constant volume bottle housing that hard glass makes, becomes one with bottle stopper, constant volume bottle housing built-in elastic air bag 72 and magnetic stirrer 73.
Constant volume reversing valve assembly 5, its structure is as shown in Figure 3-4: be provided with two groups, respectively as elementary constant volume and secondary constant volume, formed by valve body, background gas entrance 52, component gas entrance 53, have one section in the valve body and be equivalent to the quantitatively tube sealing 51 of ring, constant volume reversing valve assembly 5 lays respectively at the front end of two groups of constant volume bottle assemblies 7, is connected with Pressure gauge by mass flowmenter 4 to be connected with constant volume bottle assembly 7, and constant volume reversing valve assembly 5 also is connected with gas vent 9.
Gas cylinder and gas circuit assembly: comprise the valve that arranges on component background gas steel cylinder 1, gas bomb 2, stainless steel pipeline and the pipeline, be connected in series background gas steel cylinder 1, gas bomb 2, constant volume bottle assembly 7, constant volume reversing valve assembly 5 by the stainless steel pipeline.
Vavuum pump 8: be connected to the below of constant volume bottle assembly 7, be comprised of the two-stage pump housing, wherein mechanical pump is as fore pump, and diffusion pump or molecular pump are as secondary pumps.
The structure of bottleneck reversal valve 71 as shown in Figure 5, the horizontal component gas circuit is taked the design of similar triple valve, " T " font that is of level has 3 holes on the valve body, two relative holes are respectively mist entrance 711, mixed gas outlet 712, vertical direction also has vacuum orifice 713 and the ventilation capsule that is connected with elastic bag 72 outlet 714 with it, the inner core of bottleneck reversal valve can rotate, and can switch to mist pattern/vacuum mode.When switching to the mist pattern, close the control valve at mixed gas outlet 712 places, the mist that will contain quantitative volume constituents gas is introduced in the constant volume bottle and is fully mixed; When distribution finishes, be after most of mist is discharged the constant volume bottle via the elastic bag 72 that expands, the inner core of rotary valve switches to vacuum mode, namely the space is connected with vavuum pump 8 in the bottle, the constant volume bottle can be vacuumized, the pollution of avoiding residual gas to cause, on the vertical direction, the pipeline that the bottleneck reversal valve links to each other with air bag passes the inner core of bottleneck reversal valve.
The structure of elastic bag 72 as shown in Figure 6, be located at the inside of constant volume bottle housing, the top outlet of air bag communicates with atmosphere by control valve, in the use, air bag is evacuated in advance, after the gas in the constant volume bottle mixes, slowly opens the control valve on air bag top, make its inflation, and the process of utilizing its expansion with configure in the constant volume bottle gas discharge.Elastic bag 72 adopts Kynoar (PVDF) the thin-film material manufacturing of surperficial high-flatness, and the volume under normal pressure can be ignored with respect to constant volume bottle internal volume; Elasticity is fine can be changed by proof pressure, and the normal temperature lower surface is little to the suction-operated of various gas molecules.
Magnetic stirrer 73 is installed in the bottom of constant volume bottle, its structure is shown in Fig. 7-8, electromagnetic actuator device 732 and support 733 by foldable blade 731, bottom form, during use, High Rotation Speed by electromagnetic actuator device, utilize centrifugal force that blade 731 is thrown away, Fig. 7 and Fig. 8 are respectively the folding and situation when opening of blade 731.Blade 731 is made by the macromolecular material of flexibility, be selected from Kynoar (PVDF) material of surperficial high-flatness, centripetally when not using be folded into less volume, convenient packing into by bottleneck installs in the constant volume bottle, and its surface is less to the suction-operated of various gas molecules at normal temperatures.
Contain in the Gas Mixture Preparation process of trace components gas, open background gas steel cylinder 1 and component gas steel cylinder 2, open control valve 3, treat that under the control of mass flowmenter 4 flow speed stability is in constant current, to be screwed to as the constant volume reversing valve assembly 5 of elementary constant volume with the component gas gas circuit first and be connected, make the component gas of wherein preserving certain volume, then the valve body of fast rotational constant volume reversing valve assembly 5 makes it to be connected with the background gas gas circuit, utilizes background gas to purge this section component gas is brought in the constant volume bottle assembly 7.
Close each gas inlet-outlet of the bottleneck reversal valve 71 at constant volume bottle top, open the magnetic stirrer 73 of constant volume bottle bottom, after mist in the constant volume bottle mixes, open the mixed gas outlet 712 in the bottleneck reversal valve 71 of constant volume bottle napex, and then slowly open the control valve on elastic bag 72 tops, make elastic bag 72 inflations, and utilize the expansion of elastic bag 72 that the mist that configures in the constant volume bottle assembly 7 is discharged.
Utilize similar the 2nd grade of " constant volume reversing valve assembly 5-constant volume bottle assembly 7 " air mix facilities as secondary constant volume, can further dilute component gas.
For this type normal pressure balance step by step in the constant volume type gas the simple estimation of the device for formulating distribution effect of trace components as follows: suppose that employed constant volume tube volume is 0.1ml, constant volume bottle assembly 7 internal volumes are that 1000ml (is about 10 of constant volume tube volume
4Doubly); Through the two-stage serial dilution, can prepare component gas concentration 10 like this
-8The mist of (10ppbv, i.e. volume fraction 1/100000000th magnitude).
The gas of wish preparation variable concentrations, only need to change the constant volume reversing valve assembly 5 of different model (constant volume tube volume), the characteristics the such as perhaps progression of increase and decrease " constant volume reversing valve assembly 5-constant volume bottle assembly 7 " air mix facilities can be realized, that whole device has is easy, safety, modularization, cost are low.
Those of ordinary skill in the art will be appreciated that, the above specific embodiment only is that patent of the present invention is described, and be not the restriction that is used as patent of the present invention, as long as in the connotation scope of patent of the present invention, all will drop in claims scope of patent of the present invention variation, the modification of the above specific embodiment.
Claims (10)
1. the normal pressure balance device for formulating of trace components in the constant volume type gas step by step is characterized in that, this device comprises:
Constant volume bottle assembly: the bottleneck reversal valve that comprises constant volume bottle housing that hard glass makes, becomes one with bottle stopper, constant volume bottle housing built-in elastic air bag and magnetic stirrer;
Constant volume reversing valve assembly: formed by valve body, component gas gateway and background gas gateway, have one section in the valve body and be equivalent to the quantitatively tube sealing of ring, the constant volume reversing valve assembly lays respectively at the front end of two groups of constant volume bottle assemblies, is connected with constant volume bottle assembly with Pressure gauge by mass flowmenter;
Gas cylinder and gas circuit assembly: comprise the valve that arranges on component gas steel cylinder, background gas steel cylinder, stainless steel pipeline and the pipeline, be connected in series component gas steel cylinder, background gas steel cylinder, constant volume bottle assembly, constant volume reversing valve assembly by the stainless steel pipeline;
Vavuum pump: be connected to the below of constant volume bottle assembly, be comprised of the two-stage pump housing, wherein mechanical pump is as fore pump, and diffusion pump or molecular pump are as secondary pumps.
2. a kind of normal pressure balance according to claim 1 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, described bottleneck reversal valve is the parts of similar triple valve, mist gateway and vacuum orifice are distributing on the horizontal plane of bottleneck reversal valve, the perpendicular bisector upper end is by the logical atmosphere of control valve, and the lower end is connected with elastic bag.
3. a kind of normal pressure balance according to claim 2 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, the horizontal component gas circuit of described bottleneck reversal valve is taked the design of similar triple valve, " T " font that is of level has 3 holes on the valve body, two relative holes are respectively the mist gateway, vertical direction also has vacuum orifice with it, and the inner core of bottleneck reversal valve can rotate, and can switch to mist pattern/vacuum mode.When switching to the mist pattern, close the control valve at mixed gas outlet place, the mist that will contain quantitative volume constituents gas is introduced in the constant volume bottle and is fully mixed; When distribution finishes, be after most of mist is discharged the constant volume bottle via the elastic bag that expands, the inner core of rotary valve switches to vacuum mode, namely the space is connected with vavuum pump in the bottle, the constant volume bottle can be vacuumized, the pollution of avoiding residual gas to cause, on the vertical direction, the pipeline that the bottleneck reversal valve links to each other with air bag passes the inner core of bottleneck reversal valve.
4. a kind of normal pressure balance according to claim 1 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, described elastic bag is located at the inside of constant volume bottle housing, the top outlet of air bag communicates with atmosphere by control valve, and in the use, air bag is evacuated in advance, after gas in the constant volume bottle mixes, slowly open the control valve on air bag top, make its inflation, and the process of utilizing its expansion with configure in the constant volume bottle gas discharge.
5. a kind of normal pressure balance according to claim 4 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, described elastic bag adopts Kynoar (PVDF) the thin-film material manufacturing of surperficial high-flatness, and the volume under normal pressure can be ignored with respect to constant volume bottle internal volume; Elasticity is fine can be changed by proof pressure, and the normal temperature lower surface is little to the suction-operated of various gas molecules.
6. a kind of normal pressure balance according to claim 1 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, described magnetic stirrer is installed in the bottom of constant volume bottle, electromagnetic actuator device by foldable blade and bottom forms, during use, by the High Rotation Speed of electromagnetic actuator device, utilize centrifugal force that blade is thrown away.
7. a kind of normal pressure balance according to claim 6 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, described blade is made by the macromolecular material of flexibility, be selected from Kynoar (PVDF) material of surperficial high-flatness, centripetally when not using be folded into less volume, convenient packing into by bottleneck installs in the constant volume bottle, and its surface is less to the suction-operated of various gas molecules at normal temperatures.
8. a kind of normal pressure balance according to claim 1 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, described tube sealing can be connected with component gas/background gas gas circuit respectively by the valve body rotation, it is gone to the component gas gas circuit first during use and be connected, make the component gas of wherein preserving certain volume, then the fast rotational valve body makes it to be connected with the background gas gas circuit, utilizes background gas to purge this section component gas is brought in the constant volume bottle assembly.
9. a kind of normal pressure balance according to claim 8 device for formulating of trace components in the constant volume type gas step by step, it is characterized in that, described tube sealing adopts polytetrafluoroethylene (PTFE) (PTFE) or the manufacturing of high density poly propylene (HDPP) material of surperficial high-flatness.
10. a kind of normal pressure balance according to claim 1 device for formulating of trace components in the constant volume type gas step by step is characterized in that, described constant volume bottle assembly and constant volume reversing valve assembly are provided with one or more groups, are connected in series successively by the stainless steel pipeline.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103196709A (en) * | 2013-03-29 | 2013-07-10 | 重庆市电力公司电力科学研究院 | Standard gas acquisition device and gas supply system based on standard gas |
| CN105003820A (en) * | 2014-04-15 | 2015-10-28 | 宁波宝新不锈钢有限公司 | Inflation apparatus and inflation method of GIS switch |
| CN105716933A (en) * | 2016-01-29 | 2016-06-29 | 南京捷发科技有限公司 | Device and method for achieving constant-volume proportional dilution |
| CN109444218A (en) * | 2018-12-17 | 2019-03-08 | 西南科技大学 | Improved ambient condition simulator and application method in a kind of reaction of oxidation kinetics |
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Address after: 200062 room 2004-C, Wuning Road, Shanghai, Putuo District, 509 Co-patentee after: Shanghai Chemical Research Institute Co., Ltd. Patentee after: Shanghai Tianke Chemical Detection Co., Ltd. Address before: 200062 room 2004-C, Wuning Road, Shanghai, Putuo District, 509 Co-patentee before: Shanghai Research Institute of Chemical Industry Patentee before: Shanghai Tianke Chemical Detection Co., Ltd. |
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Address after: 200062 6, building 252, 345 Yunling East Road, Putuo District, Shanghai Co-patentee after: Shanghai Chemical Research Institute Co., Ltd. Patentee after: Shanghai Chemical Institute Testing Co., Ltd. Address before: 200062 2004-C room, No. 509, Wuning Road, Shanghai, Putuo District Co-patentee before: Shanghai Chemical Research Institute Co., Ltd. Patentee before: Shanghai Tianke Chemical Detection Co., Ltd. |
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