CN102889963A - Loading method of differential type horizontal micro-force loading device - Google Patents

Loading method of differential type horizontal micro-force loading device Download PDF

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CN102889963A
CN102889963A CN2012103195638A CN201210319563A CN102889963A CN 102889963 A CN102889963 A CN 102889963A CN 2012103195638 A CN2012103195638 A CN 2012103195638A CN 201210319563 A CN201210319563 A CN 201210319563A CN 102889963 A CN102889963 A CN 102889963A
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force
lever
loading
fulcrum
rod
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CN102889963B (en
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王勇
何鲲
孙敬慧
刘正士
刘焕进
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Hefei University of Technology
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Abstract

The invention discloses a loading method of a differential type horizontal micro-force loading device. The loading method of the differential type horizontal micro-force loading device is characterized in that a secondary lever which is arranged vertically serves as a center rod of the loading device, a pair of primary levers is symmetrically positioned on two sides of the secondary lever in the same vertical plane, and the primary levers are respectively connected with the secondary lever through two transitional rods which are respectively arranged on one sides of the primary levers. On the basis of a flexible hinge and lever principle, a secondary lever force reducing mechanism is built, and is used for generating small acting force; and by a flexible hinge, a friction link in a calibration system is omitted, and then the calibration accuracy is improved.

Description

差动式水平微力加载装置的加载方法Loading method of differential horizontal micro-force loading device

本申请是申请日为:20110727、申请号为:2011102124700、发明名称为:差动式水平微力加载装置及加载方法的发明专利申请的分案申请。This application is a divisional application of the invention patent application with the filing date: 20110727, the application number: 2011102124700, and the invention title: differential horizontal micro-force loading device and loading method.

技术领域 technical field

本发明涉及应用在测量技术领域中的微力加载装置的加载方法。The invention relates to a loading method of a micro-force loading device applied in the technical field of measurement.

背景技术 Background technique

随着现代科学技术的蓬勃发展,需要微小力值的场合越来越多,例如微机电系统中微尺度下构件的力学特性研究、微观摩擦现象测量、微传感微机器人装配中微力检测等,因此,微力传感器的研究、制作、生产也就随之开展而来。但是相对其研究制作,微力传感器本身的性能测量发展显得相对滞后。目前常规使用的滑轮砝码方法无法进行微力加载力;已有洛伦兹力和静电力标定方法,因受影响的因素较多带来不稳定性;近年来利用压电元件产生微力的应用越来越多,但这种方法成本高、操作复杂,且产生的力范围较小。With the vigorous development of modern science and technology, there are more and more occasions that require small force values, such as the study of mechanical properties of micro-scale components in micro-electromechanical systems, measurement of micro-friction phenomena, micro-force detection in micro-sensing and micro-robot assembly, etc. Therefore, the research, production, and production of micro force sensors will follow. But compared with its research and production, the performance measurement development of the micro force sensor itself appears to be relatively lagging behind. At present, the routinely used pulley weight method cannot be used for micro-force loading; there are Lorentz force and electrostatic force calibration methods, which cause instability due to many affected factors; in recent years, the application of micro-force using piezoelectric elements has become more and more More and more, but this method is costly, complicated to operate, and produces a small range of forces.

目前柔性铰链机构在精密测量、标定等领域得到了广泛应用,但是关于柔性铰链变形、杠杆重心位置以及温度的变化对测量及标定精度的影响尚缺少综合的考虑和研究,迄今未见为消除重力和温度两方面因素影响的结构设计,而在对微力进行标定或者测量时,为了获得更高的精度,必须要解决以上几方面对微力的标定或测量所造成的影响,因为,重力以及温度产生的影响可能远远大于微力加载的最大量程,对微力加载产生致命的影响。At present, the flexible hinge mechanism has been widely used in the fields of precision measurement and calibration, but there is still a lack of comprehensive consideration and research on the influence of the deformation of the flexible hinge, the position of the center of gravity of the lever, and the change of temperature on the accuracy of measurement and calibration. Structural design influenced by the two factors of temperature and temperature, and in order to obtain higher accuracy when calibrating or measuring the micro force, it is necessary to solve the influence of the above aspects on the calibration or measurement of the micro force, because gravity and temperature produce The impact may be far greater than the maximum range of micro-force loading, which will have a fatal impact on micro-force loading.

发明内容 Contents of the invention

本发明是为避免上述现有技术所存在不足之处,提供一种可满足一定精度力值的要求、并且低成本的水平微力加载装置的加载方法,用来对微力传感器、微机电系统以及各种微力检测器进行标定,并为微小力值的测力系统提供支持。In order to avoid the shortcomings of the above-mentioned prior art, the present invention provides a loading method of a low-cost horizontal micro-force loading device that can meet the requirements of a certain precision force value, and is used for micro-force sensors, micro-electromechanical systems and various Calibrate a small force detector and provide support for force measurement systems with small force values.

本发明解决技术问题采用如下技术方案:The present invention solves technical problem and adopts following technical scheme:

本发明差动式水平微力加载装置的加载方法的特点是:The characteristics of the loading method of the differential horizontal micro-force loading device of the present invention are:

设置所述差动式水平微力加载装置为:以竖直设置的二级杠杆为中心杆,在同一竖直平面内,一对一级杠杆对称分处在二级杠杆的两侧,并分别通过各自一侧的过渡杆与二级杠杆相联结。The differential horizontal micro-force loading device is set as follows: take the vertically arranged secondary lever as the central rod, and in the same vertical plane, a pair of primary levers are symmetrically located on both sides of the secondary lever, and pass through the The transition rod on each side is connected with the secondary lever.

所述一级杠杆是由水平杆和竖直杆构成的倒置的“L”型杆,加载砝码设置在作为输入端的水平杆的杆端,一级支点位于水平杆的中部,竖直杆的底端在杆侧部通过一级柔性铰链连接在过渡杆的外端,所述过渡杆的内端通过二级柔性铰链连接在二级杠杆的作用力点上。The primary lever is an inverted "L"-shaped rod composed of a horizontal rod and a vertical rod. The loading weight is arranged at the rod end of the horizontal rod as the input end. The bottom end is connected to the outer end of the transition rod through a primary flexible hinge at the side of the rod, and the inner end of the transition rod is connected to the force point of the secondary lever through a secondary flexible hinge.

所述二级杠杆的底端设置为二级支点,二级杠杆的顶端为自由端,在所述二级杠杆的顶端设置探针,以所述探针与设置在微动平台上的力传感器相接触。The bottom end of the secondary lever is set as a secondary fulcrum, the top of the secondary lever is a free end, a probe is set on the top of the secondary lever, and the probe is connected with the force sensor arranged on the micro-motion platform. touch.

在所述过渡杆的外端固联一对朝向过渡杆内端所在一侧延伸的连杆,在所述连杆的杆端固联过渡杆配重块,使所述过渡杆的重心调整到二级柔性铰链所在位置处;在所述一级杠杆的水平杆杆端处设置一级杠杆配重块,使所述一级杠杆的重心调整到一级支点位置处;在所述二级杠杆上,位于二级支点和二级柔性铰链之间的位置通过固联的悬臂设置二级杠杆配重块,使二级杠杆、过渡杆、连杆及过渡杆配重块共同的重心调整到二级支点的位置上。A pair of connecting rods extending towards the side where the inner end of the transition rod is fixedly connected at the outer end of the transition rod, and a counterweight of the transition rod is fixedly connected at the rod end of the connecting rod, so that the center of gravity of the transition rod is adjusted to Where the secondary flexible hinge is located; at the horizontal rod end of the primary lever a primary lever counterweight is set so that the center of gravity of the primary lever is adjusted to the primary fulcrum position; at the secondary lever On the position between the secondary fulcrum and the secondary flexible hinge, the secondary lever counterweight is set through the fixed cantilever, so that the common center of gravity of the secondary lever, transition rod, connecting rod and transition rod counterweight is adjusted to the second level. level fulcrum position.

所述差动式水平微力加载装置的加载方法是按以下方式之一实现差动加载:The loading method of the differential horizontal micro-force loading device is to realize differential loading in one of the following ways:

方式一、在两输入端加载相同质量的加载砝码,此时探针处于初始位置上;设置力传感器在初始位置保持不动,改变两输入端加载砝码的质量差值,在所述力传感器上获得不同的大小的加载力;Method 1: Load the loading weights of the same mass at the two input ends, and the probe is at the initial position at this time; set the force sensor to keep at the initial position, change the mass difference of the loading weights at the two input ends, and when the force Obtain different loading forces on the sensor;

方式二、在两输入端加载相同质量的加载砝码,此时探针处于初始位置上,然后改变两输入端加载砝码的质量差值,使探针出现偏移,由力传感器将探针从偏移的位置逐步推移到初始位置,力传感器距离初始位置越近,探针对力传感器的作用力越大,最终由两输入端加载砝码的质量差值和力传感器的位移决定加载力的大小。Method 2: Load the loading weights of the same mass at the two input ends. At this time, the probe is at the initial position, and then change the mass difference between the loading weights at the two input ends to make the probe offset, and the probe will be moved by the force sensor. Gradually move from the offset position to the initial position, the closer the force sensor is to the initial position, the greater the force of the probe on the force sensor, and finally the loading force is determined by the mass difference between the weights loaded at the two input ends and the displacement of the force sensor the size of.

本发明差动式水平微力加载装置的加载方法,其特点也在于所述差动式水平微力加载装置中,在所述一级支点和二级支点位置处,一级杠杆和二级杠杆分别是通过各支点柔性铰链设置在基座上,所述各支点柔性铰链悬置在机座上,与重力方向成一致。The loading method of the differential horizontal micro-force loading device of the present invention is also characterized in that in the differential horizontal micro-force loading device, at the positions of the primary fulcrum and the secondary fulcrum, the primary lever and the secondary lever are respectively The fulcrum flexible hinges are arranged on the base, and the fulcrum flexible hinges are suspended on the machine base to be consistent with the direction of gravity.

与已有技术相比,本发明有益效果体现在:Compared with the prior art, the beneficial effects of the present invention are reflected in:

1、本发明基于柔性铰链和杠杆原理建立了一种二级杠杆力缩小机构,用于产生微小作用力,柔性铰链的应用减少了标定系统中的摩擦环节,提高了标定精度。1. The present invention establishes a two-stage lever force reduction mechanism based on the principle of flexible hinges and levers, which is used to generate small forces. The application of flexible hinges reduces the friction links in the calibration system and improves the calibration accuracy.

2、本发明利用砝码加载力,简单可靠、操作方便,能在一定范围内进行动态加载,可广泛应用在多种场合。2. The present invention utilizes the loading force of weights, which is simple, reliable, convenient to operate, and can perform dynamic loading within a certain range, and can be widely used in various occasions.

3、本发明通过设置各配重块,首先使过渡杆的重心调整到二级柔性铰链位置处,然后使二级杠杆及带有配重结构的过渡杆共同的重心调整在二级支点位置处;最后使一级杠杆的重心调整在一级支点位置上,消除了重心变化对各杆件造成的影响,使产生的微力更加稳定,抗干扰因素强。3. The present invention first adjusts the center of gravity of the transition rod to the position of the secondary flexible hinge by setting each counterweight, and then adjusts the common center of gravity of the secondary lever and the transition rod with the counterweight structure to the position of the secondary fulcrum Finally, the center of gravity of the first-level lever is adjusted to the position of the first-level fulcrum, which eliminates the influence of the change of the center of gravity on the rods, makes the generated micro-force more stable, and has strong anti-interference factors.

4、本发明采用对称机构,消除了温度的影响,提高了力的加载精度。4. The present invention adopts a symmetrical mechanism, which eliminates the influence of temperature and improves the accuracy of force loading.

5、本发明一级支点和二级支点处的各支点柔性铰链均采用与重力方向成一致的设置,消除了重力对柔性铰链造成的弯曲变形和弯曲应力,否则,重力产生的弯矩会导致柔性铰链的破坏。5. The flexible hinges of each fulcrum at the first-level fulcrum and the second-level fulcrum of the present invention are set in line with the direction of gravity, which eliminates the bending deformation and bending stress caused by gravity on the flexible hinge. Otherwise, the bending moment generated by gravity will cause Destruction of the flexible hinge.

附图说明 Description of drawings

图1 为本发明中水平微力加载装置原理图;Fig. 1 is the schematic diagram of horizontal micro-force loading device in the present invention;

图2为本发明过渡杆上配重结构示意图;Fig. 2 is a schematic diagram of the counterweight structure on the transition rod of the present invention;

图中标号:1二级杠杆;1a悬臂;1b二级杠杆配重块;2过渡杆;2a连杆;2b过渡杆配重块;3a水平杆;3b竖直杆;4加载砝码;5一级支点;6一级柔性铰链;7二级柔性铰链;8二级支点;9探针;10微动平台;11力传感器;12一级杠杆配重块。Labels in the figure: 1 secondary lever; 1a cantilever; 1b secondary lever counterweight; 2 transition rod; 2a connecting rod; 2b transition rod counterweight; 3a horizontal rod; 3b vertical rod; 4 loading weight; 5 Level 1 fulcrum; 6 Level 1 flexible hinge; 7 Level 2 flexible hinge; 8 Level 2 fulcrum; 9 Probe; 10 Micro-motion platform; 11 Force sensor; 12 Level 1 lever counterweight.

具体实施方式 Detailed ways

参见图1、图2,本实施例中包括有一对由水平杆3a和竖直杆3b构成的倒置的“L”型一级杠杆、一个二级杠杆1和一对过渡杆2;并有一对一级杠杆配重块12、一对过渡杆配重块2b以及二级杠杆配重块1b;Referring to Fig. 1 and Fig. 2, a pair of inverted "L" type primary levers, a secondary lever 1 and a pair of transition rods 2 composed of a horizontal bar 3a and a vertical bar 3b are included in this embodiment; The primary lever counterweight 12, a pair of transition lever counterweights 2b and the secondary lever counterweight 1b;

图1所示,以竖直设置的二级杠杆1为中心杆,在同一竖直平面内,一对一级杠杆对称分处在二级杠杆1的两侧,并分别通过各自一侧的过渡杆2与二级杠杆1相联结;As shown in Figure 1, with the vertically arranged secondary lever 1 as the center rod, in the same vertical plane, a pair of primary levers are symmetrically located on both sides of the secondary lever 1, and pass through the transition on each side respectively. Rod 2 is connected with secondary lever 1;

一级杠杆是由水平杆3a和竖直杆3b构成的倒置的“L”型杆,加载砝码4设置在作为输入端的水平杆3a的杆端,图1所示的加载砝码4挂在水平杆3a上形成一级加载量F1a,一级支点5位于水平杆3a的中部,一级支点5通过柔性铰链设置在基座上;竖直杆3b的底端在杆侧部通过一级柔性铰链6连接在过渡杆2的一端,过渡杆2的另一端通过二级柔性铰链7连接在二级杠杆1的作用力点上;The primary lever is an inverted "L"-shaped bar made of a horizontal bar 3a and a vertical bar 3b, and the loading weight 4 is arranged on the rod end of the horizontal bar 3a as the input end, and the loading weight 4 shown in Fig. 1 is hung on The primary load F1a is formed on the horizontal rod 3a, the primary fulcrum 5 is located in the middle of the horizontal rod 3a, and the primary fulcrum 5 is arranged on the base through a flexible hinge; the bottom end of the vertical rod 3b passes through a primary flexible hinge at the side of the rod The hinge 6 is connected to one end of the transition rod 2, and the other end of the transition rod 2 is connected to the force point of the secondary lever 1 through the secondary flexible hinge 7;

二级杠杆1的底端设置为二级支点8,二级支点8通过椭圆型的柔性铰链设置在基座上;二级杠杆1的顶端为自由端,在二级杠杆1的顶端设置探针9,以探针9与设置在微动平台10上的力传感器11相接触。具体实施中是由微动平台10带动力传感器11在水平方向移动。The bottom end of the secondary lever 1 is set as a secondary fulcrum 8, and the secondary fulcrum 8 is set on the base through an elliptical flexible hinge; the top of the secondary lever 1 is a free end, and a probe is set on the top of the secondary lever 1 9. Use the probe 9 to contact the force sensor 11 provided on the micro-motion platform 10 . In a specific implementation, the force sensor 11 is driven by the micro-motion platform 10 to move in the horizontal direction.

为了消除温度的影响,两个一级杠杆和两个过渡杆2对称的分布在二级杠杆1的两侧。In order to eliminate the influence of temperature, two primary levers and two transition rods 2 are symmetrically distributed on both sides of the secondary lever 1 .

为了消除重心变化对各杆件造成的影响,可以在相应位置上分别设置配重块:包括在过渡杆2的外端固联一对朝向过渡杆内端所在一侧延伸的连杆2a,在连杆2a的杆端固联过渡杆配重块2b,使过渡杆2的重心调整到二级柔性铰链7所在位置处;在一级杠杆的水平杆3a的杆端处设置一级杠杆配重块12,使一级杠杆的重心调整到一级支点5的位置处;在二级杠杆1上,位于二级支点8和二级柔性铰链7之间的位置处,通过固联的悬臂1a设置二级杠杆配重块1b,使二级杠杆1、过渡杆2、连杆2a及过渡杆配重块2b四者共同的重心调整到二级支点8所在位置上。In order to eliminate the influence of the change of the center of gravity on the rods, counterweights can be set at the corresponding positions: a pair of connecting rods 2a extending toward the inner end of the transition rod are fixedly connected to the outer end of the transition rod 2. The rod end of the connecting rod 2a is fixedly connected to the transition rod counterweight 2b, so that the center of gravity of the transition rod 2 is adjusted to the position of the secondary flexible hinge 7; a primary lever counterweight is set at the rod end of the horizontal rod 3a of the primary lever Block 12 adjusts the center of gravity of the first-level lever to the position of the first-level fulcrum 5; on the second-level lever 1, it is located between the second-level fulcrum 8 and the second-level flexible hinge 7, and is set by a fixed cantilever 1a The secondary lever counterweight 1b adjusts the common center of gravity of the secondary lever 1, the transition rod 2, the connecting rod 2a and the transition rod counterweight 2b to the position of the secondary fulcrum 8.

具体实施中,可以去掉过渡杆配重块2b,但这会使力的加载精度降低,并缩小加载力的力值范围。In a specific implementation, the transition rod counterweight 2b can be removed, but this will reduce the loading accuracy of the force and narrow the range of the force value of the loading force.

在一级支点和二级支点位置处,一级杠杆和二级杠杆分别是通过各支点柔性铰链设置在基座上,为了消除重力对柔性铰链造成的弯曲变形和弯曲应力,避免重力产生的弯矩导致柔性铰链的破坏,一级支点和二级支点处的柔性铰链均采用与重力方向成一致的设置。At the position of the first-level fulcrum and the second-level fulcrum, the first-level lever and the second-level lever are respectively arranged on the base through the flexible hinges of each fulcrum. In order to eliminate the bending deformation and bending stress caused by gravity on the flexible hinge, avoid the bending caused by gravity The moment leads to the destruction of the flexible hinge, and the flexible hinges at the primary fulcrum and the secondary fulcrum are all set to be consistent with the direction of gravity.

整个装置由砝码产生微力,微力远小于砝码的质量,且竖直杆3b的长度与一级杠杆的输入端到一级支点5的距离的比值越大,二级杠杆1的长度与二级支点8到二级柔性铰链7的距离的比值越大,则就能够产生越小的微力。The whole device generates a slight force by the weight, which is far less than the weight of the weight, and the larger the ratio of the length of the vertical rod 3b to the distance from the input end of the primary lever to the primary fulcrum 5, the greater the ratio of the length of the secondary lever 1 to the second The larger the ratio of the distance from the primary fulcrum 8 to the secondary flexible hinge 7, the smaller the micro force can be generated.

具体实施中,可以按照以下两种方式实现水平微力的差动加载:In specific implementation, the differential loading of horizontal micro force can be realized in the following two ways:

方式一、在两输入端加载相同质量的加载砝码,此时探针处于初始位置上;设置力传感器在初始位置保持不动,改变两输入端加载砝码的质量差值,使其中一个输入端的加载力为F1a,另一个输入端的加载力为F1b,则所加载的力差值F1=F1a-F1b,该力差值通过柔性铰链机构进行缩小后,通过探针加载到力传感器11上,从而获得不同大小的微力;Method 1: Load the loading weights of the same mass at the two input ends, and the probe is at the initial position at this time; set the force sensor to keep at the initial position, change the mass difference of the loading weights at the two input ends, and make one of the input ends The loading force at the input end is F1a, and the loading force at the other input end is F1b, then the loaded force difference F1=F1a-F1b, after the force difference is reduced by the flexible hinge mechanism, it is loaded on the force sensor 11 through the probe, In order to obtain micro-forces of different sizes;

方式二、在两输入端加载相同质量的加载砝码,此时探针处于初始位置上,然后改变两输入端加载砝码的质量差值,使探针出现偏移,由力传感器将探针从偏移的位置逐步推移到初始位置,力传感器距离初始位置越近,探针对力传感器的作用力越大,最终由两输入端加载砝码的质量差值和力传感器的位移决定加载力的大小,可以在探针处设置一非接触式位移传感器,通过理论分析、数值计算和实验标定,建立在不同两输入端加载砝码的质量差值下探针偏置位移和加载力间的关系。Method 2: Load the loading weights of the same mass at the two input ends. At this time, the probe is at the initial position, and then change the mass difference between the loading weights at the two input ends to make the probe offset, and the probe will be moved by the force sensor. Gradually move from the offset position to the initial position, the closer the force sensor is to the initial position, the greater the force of the probe on the force sensor, and finally the loading force is determined by the mass difference between the weights loaded at the two input ends and the displacement of the force sensor A non-contact displacement sensor can be installed at the probe. Through theoretical analysis, numerical calculation and experimental calibration, the relationship between the bias displacement of the probe and the loading force can be established under the difference in mass of the weights loaded at the two input ends. relation.

本发明装置可以实现10-2以下的微力的加载。The device of the present invention can realize the loading of micro force below 10 -2 .

Claims (2)

1.一种差动式水平微力加载装置的加载方法,其特征是:1. A loading method of a differential horizontal micro-force loading device, characterized in that: 设置所述差动式水平微力加载装置为:以竖直设置的二级杠杆(1)为中心杆,在同一竖直平面内,一对一级杠杆对称分处在二级杠杆(1)的两侧,并分别通过各自一侧的过渡杆(2)与二级杠杆(1)相联结;The differential horizontal micro-force loading device is set as follows: with the vertically arranged secondary lever (1) as the central rod, in the same vertical plane, a pair of primary levers are symmetrically located at the center of the secondary lever (1). Both sides are connected with the secondary lever (1) through the transition rod (2) on each side respectively; 所述一级杠杆是由水平杆(3a)和竖直杆(3b)构成的倒置的“L”型杆,加载砝码(4)设置在作为输入端的水平杆(3a)的杆端,一级支点(5)位于水平杆的中部,竖直杆(3b)的底端在杆侧部通过一级柔性铰链(6)连接在过渡杆(2)的外端,所述过渡杆(2)的内端通过二级柔性铰链(7)连接在二级杠杆(1)的作用力点上;The first-stage lever is an inverted "L"-shaped bar made of a horizontal bar (3a) and a vertical bar (3b), and the loading weight (4) is arranged on the bar end of the horizontal bar (3a) as the input end. The first-level fulcrum (5) is positioned at the middle part of the horizontal bar, and the bottom end of the vertical bar (3b) is connected to the outer end of the transition bar (2) by a first-order flexible hinge (6) at the bar side, and the transition bar (2) The inner end is connected on the force point of the secondary lever (1) through the secondary flexible hinge (7); 所述二级杠杆(1)的底端设置为二级支点(8),二级杠杆(1)的顶端为自由端,在所述二级杠杆的顶端设置探针(9),以所述探针(9)与设置在微动平台(10)上的力传感器(11)相接触;The bottom end of described secondary lever (1) is set as secondary fulcrum (8), and the top of secondary lever (1) is free end, and probe (9) is set at the top of described secondary lever, with described The probe (9) is in contact with the force sensor (11) arranged on the micro-motion platform (10); 在所述过渡杆(2)的外端固联一对朝向过渡杆内端所在一侧延伸的连杆(2a),在所述连杆(2a)的杆端固联过渡杆配重块(2b),使所述过渡杆(2)的重心调整到二级柔性铰链(7)所在位置处;在所述一级杠杆的水平杆(3a)杆端处设置一级杠杆配重块(12),使所述一级杠杆的重心调整到一级支点(5)的位置处;在所述二级杠杆(1)上,位于二级支点(8)和二级柔性铰链(7)之间的位置通过固联的悬臂(1a)设置二级杠杆配重块(1b),使二级杠杆(1)、过渡杆(2)、连杆(2a)及过渡杆配重块(2b)共同的重心调整到二级支点(8)的位置上;A pair of connecting rods (2a) extending toward the inner end of the transition rod are fixedly connected to the outer end of the transition rod (2), and the transition rod counterweight is fixed at the rod end of the connecting rod (2a) ( 2b), the center of gravity of the transition rod (2) is adjusted to the position of the secondary flexible hinge (7); the primary lever counterweight (12) is set at the rod end of the horizontal bar (3a) of the primary lever ), so that the center of gravity of the primary lever is adjusted to the position of the primary fulcrum (5); on the secondary lever (1), it is between the secondary fulcrum (8) and the secondary flexible hinge (7) Set the secondary lever counterweight (1b) through the fixed cantilever (1a), so that the secondary lever (1), transition lever (2), connecting rod (2a) and transition lever counterweight (2b) The center of gravity is adjusted to the position of the secondary fulcrum (8); 所述差动式水平微力加载装置的加载方法是按以下方式之一实现差动加载:The loading method of the differential horizontal micro-force loading device is to realize differential loading in one of the following ways: 方式一、在两输入端加载相同质量的加载砝码,此时探针处于初始位置上;设置力传感器在初始位置保持不动,改变两输入端加载砝码的质量差值,在所述力传感器上获得不同的大小的加载力;Method 1: Load the loading weights of the same mass at the two input ends, and the probe is at the initial position at this time; set the force sensor to keep at the initial position, change the mass difference of the loading weights at the two input ends, and when the force Obtain different loading forces on the sensor; 方式二、在两输入端加载相同质量的加载砝码,此时探针处于初始位置上,然后改变两输入端加载砝码的质量差值,使探针出现偏移,由力传感器将探针从偏移的位置逐步推移到初始位置,力传感器距离初始位置越近,探针对力传感器的作用力越大,最终由两输入端加载砝码的质量差值和力传感器的位移决定加载力的大小。Method 2: Load the loading weights of the same mass at the two input ends. At this time, the probe is at the initial position, and then change the mass difference between the loading weights at the two input ends to make the probe offset, and the probe will be moved by the force sensor. Gradually move from the offset position to the initial position, the closer the force sensor is to the initial position, the greater the force of the probe on the force sensor, and finally the loading force is determined by the mass difference between the weights loaded at the two input ends and the displacement of the force sensor the size of. 2.根据权利要求1所述的差动式水平微力加载装置的方法,其特征是:在所述差动式水平微力加载装置中,在所述一级支点(5)和二级支点(8)位置处,一级杠杆和二级杠杆分别是通过各支点柔性铰链设置在基座上,所述各支点柔性铰链悬置在机座上,与重力方向成一致。2. the method for differential type horizontal micro-force loading device according to claim 1, is characterized in that: in described differential type horizontal micro-force loading device, at described primary fulcrum (5) and secondary fulcrum (8) ) position, the primary lever and the secondary lever are respectively arranged on the base through the flexible hinges of each fulcrum, and the flexible hinges of each fulcrum are suspended on the machine base to be consistent with the direction of gravity.
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