CN102889963A - Loading method of differential type horizontal micro-force loading device - Google Patents
Loading method of differential type horizontal micro-force loading device Download PDFInfo
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- CN102889963A CN102889963A CN2012103195638A CN201210319563A CN102889963A CN 102889963 A CN102889963 A CN 102889963A CN 2012103195638 A CN2012103195638 A CN 2012103195638A CN 201210319563 A CN201210319563 A CN 201210319563A CN 102889963 A CN102889963 A CN 102889963A
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Abstract
The invention discloses a loading method of a differential type horizontal micro-force loading device. The loading method of the differential type horizontal micro-force loading device is characterized in that a secondary lever which is arranged vertically serves as a center rod of the loading device, a pair of primary levers is symmetrically positioned on two sides of the secondary lever in the same vertical plane, and the primary levers are respectively connected with the secondary lever through two transitional rods which are respectively arranged on one sides of the primary levers. On the basis of a flexible hinge and lever principle, a secondary lever force reducing mechanism is built, and is used for generating small acting force; and by a flexible hinge, a friction link in a calibration system is omitted, and then the calibration accuracy is improved.
Description
The application is: 20110727, application number is: 2011102124700, denomination of invention is: the dividing an application of the application for a patent for invention of differential type horizontal micro force loading device and loading method.
Technical field
The present invention relates to be applied in the loading method of the micro-force loading device in the field of measuring technique.
Background technology
Flourish along with modern science and technology, need the occasion of little small value force more and more, such as the Research on Mechanical Properties of microscale lower member in the MEMS (micro electro mechanical system), Micro Lub phenomenon measure, little power detection etc. in the assembling of micro sensing Micro-Robot, therefore, the research of Micro-force sensor, making, production are also with regard to thereupon carrying out.But its research is made relatively, and the performance measurement development of Micro-force sensor itself seems and relatively lags behind.The conventional pulley counterweight method of using can't be carried out little power loading force at present; Existing Lorentz force and electrostatic force scaling method are because affected many factors brings instability; The application that utilizes in recent years piezoelectric element to produce little power gets more and more, but this method cost is high, complicated operation, and the power scope that produces is less.
Flexure hinge mechanism is in precision measurement at present, the fields such as demarcation are widely applied, but be out of shape about flexible hinge, the variation of lever centre of gravity place and temperature still lacks comprehensive consideration and research to the impact of measurement and stated accuracy, have no so far as eliminating the structural design of gravity and temperature two aspect factor affecting, and when little power is demarcated or measured, in order to obtain higher precision, must solve the impact that above several respects cause demarcation or the measurement of little power, because, the impact that gravity and temperature produce may be far longer than the maximum range that little power loads, and little power is loaded produce fatal impact.
Summary of the invention
The present invention is for avoiding the existing weak point of above-mentioned prior art, a kind of the satisfy requirement of certain precision power value and the loading method of horizontal micro force loading device cheaply are provided, be used for Micro-force sensor, MEMS (micro electro mechanical system) and various little force detector are demarcated, and provide support for the dynamometric system of little small value force.
Technical solution problem of the present invention adopts following technical scheme:
The characteristics of the loading method of differential type horizontal micro force loading device of the present invention are:
Described differential type horizontal micro force loading device is set is: bar centered by the second lever of vertical setting, in same perpendicular, a pair of one-level lever was in the both sides of second lever in symmetrical minute, and connect mutually with second lever by the transiting rod of a side separately respectively.
Described one-level lever is inverted " L " type bar that is made of horizon bar and vertical bar, the loading counterweight is arranged on the rod end as the horizon bar of input end, the one-level fulcrum is positioned at the middle part of horizon bar, vertically the bottom of bar is connected to the outer end of transiting rod by the one-level flexible hinge at the bar sidepiece, and the inner of described transiting rod is connected on the force position of second lever by the secondary flexible hinge.
The bottom of described second lever is set to the secondary fulcrum, and the top of second lever is free end, on the top of described second lever probe is set, and contacts with power sensor on being arranged on micromotion platform with described probe.
Connect firmly a pair of connecting rod that extends towards the inner place of transiting rod one side in the outer end of described transiting rod, connect firmly the transiting rod balancing weight at the rod end of described connecting rod, the centre of gravity adjustment of described transiting rod is located to secondary flexible hinge position; Horizon bar rod end place at described one-level lever arranges one-level lever balancing weight, makes the centre of gravity adjustment of described one-level lever to one-level position of the fulcrum place; On described second lever, the position between secondary fulcrum and secondary flexible hinge arranges the second lever balancing weight by the cantilever that connects firmly, and makes the common centre of gravity adjustment of second lever, transiting rod, connecting rod and transiting rod balancing weight to the position of secondary fulcrum.
The loading method of described differential type horizontal micro force loading device is to realize one of in the following manner differential loading:
Mode one, load the loading counterweight of equal in quality at two input ends, this moment, probe was on the initial position; The power sensor is set keeps motionless at initial position, change the quality difference that two input ends load counterweight, obtain the loading force of different sizes at described power sensor;
Mode two, load the loading counterweight of equal in quality at two input ends, this moment, probe was on the initial position, then change the quality difference that two input ends load counterweight, make probe skew occur, by the power sensor probe is progressively passed initial position from the position of skew, power sensor distance initial position is nearer, and probe is larger to the acting force of power sensor, and the displacement that finally loads the quality difference of counterweight and power sensor by two input ends determines the size of loading force.
The loading method of differential type horizontal micro force loading device of the present invention, its characteristics also are in the described differential type horizontal micro force loading device, at described one-level fulcrum and secondary position of the fulcrum place, one-level lever and second lever are respectively to be arranged on the pedestal by each supports flexible hinge, described each supports flexible hinge is suspended on the support, becomes consistent with gravity direction.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, the present invention is based on flexible hinge and lever principle and set up a kind of second lever power and dwindle mechanism, for generation of micro force, the application of flexible hinge has reduced the friction link in the calibration system, has improved stated accuracy.
2, the present invention utilizes the counterweight loading force, and is simple and reliable, easy to operate, can carry out within the specific limits dynamic load, can be widely used in multiple occasion.
3, the present invention at first makes the centre of gravity adjustment of transiting rod to secondary flexible hinge position by each balancing weight is set, then make second lever and with the common centre of gravity adjustment of the transiting rod of counter weight construction at secondary position of the fulcrum place; Make at last the centre of gravity adjustment of one-level lever on the one-level position of the fulcrum, eliminated gravity center shift to the impact that each rod member causes, make little power of generation more stable, anti-interference factor is strong.
4, the present invention adopts symmetrical mechanism, has eliminated the impact of temperature, has improved the loading accuracy of power.
5, each supports flexible hinge at one-level fulcrum of the present invention and secondary fulcrum place all adopts and becomes consistent setting with gravity direction, flexural deformation and bending stress that gravity causes flexible hinge have been eliminated, otherwise, the destruction that the moment of flexure that gravity produces can cause flexible hinge.
Description of drawings
Fig. 1 is horizontal micro force loading device schematic diagram among the present invention;
Fig. 2 is counter weight construction schematic diagram on the transiting rod of the present invention;
Number in the figure: 1 second lever; The 1a cantilever; 1b second lever balancing weight; 2 transiting rods; The 2a connecting rod; 2b transiting rod balancing weight; The 3a horizon bar; The vertical bar of 3b; 4 load counterweight; 5 one-level fulcrums; 6 one-level flexible hinges; 7 secondary flexible hinges; 8 secondary fulcrums; 9 probes; 10 micromotion platforms; 11 power sensors; 12 one-level lever balancing weights.
Embodiment
Referring to Fig. 1, Fig. 2, include a pair of by horizon bar 3a and vertically inverted " L " type one-level lever of consisting of of bar 3b, second lever 1 and a pair of transiting rod 2 in the present embodiment; And a pair of one-level lever balancing weight 12, a pair of transiting rod balancing weight 2b and second lever balancing weight 1b arranged;
Shown in Figure 1, bar centered by the second lever 1 of vertical setting, in same perpendicular, a pair of one-level lever was in the both sides of second lever 1 in symmetrical minute, and connect mutually with second lever 1 by the transiting rod 2 of a side separately respectively;
The one-level lever is inverted " L " type bar that is made of horizon bar 3a and vertical bar 3b, loading counterweight 4 is arranged on the rod end as the horizon bar 3a of input end, loading counterweight 4 shown in Figure 1 hangs over the upper one-level heap(ed) capacity F1a that forms of horizon bar 3a, one-level fulcrum 5 is positioned at the middle part of horizon bar 3a, and one-level fulcrum 5 is arranged on the pedestal by flexible hinge; Vertically the bottom of bar 3b is connected to an end of transiting rod 2 by one-level flexible hinge 6 at the bar sidepiece, and the other end of transiting rod 2 is connected on the force position of second lever 1 by secondary flexible hinge 7;
The bottom of second lever 1 is set to secondary fulcrum 8, and secondary fulcrum 8 is arranged on the pedestal by disciform flexible hinge; The top of second lever 1 is free end, on the top of second lever 1 probe 9 is set, and contacts with power sensor 11 on being arranged on micromotion platform 10 with probe 9.To be moved in the horizontal direction by micromotion platform 10 drive sensors 11 in the implementation.
In order to eliminate the impact of temperature, the both sides that are distributed in second lever 1 of two one-level levers and two transiting rod 2 symmetries.
The impact that each rod member is caused in order to eliminate gravity center shift, balancing weight can be set respectively on the relevant position: the outer end that is included in transiting rod 2 connects firmly a pair of connecting rod 2a that extends towards the inner place of transiting rod one side, rod end at connecting rod 2a connects firmly transiting rod balancing weight 2b, and the centre of gravity adjustment of transiting rod 2 is located to secondary flexible hinge 7 positions; Rod end place at the horizon bar 3a of one-level lever arranges one-level lever balancing weight 12, makes the centre of gravity adjustment of one-level lever to the position of one-level fulcrum 5; On second lever 1, position between secondary fulcrum 8 and secondary flexible hinge 7, by the cantilever 1a that connects firmly second lever balancing weight 1b is set, makes the common centre of gravity adjustment of second lever 1, transiting rod 2, connecting rod 2a and transiting rod balancing weight 2b to secondary fulcrum 8 positions.
In the implementation, can remove transiting rod balancing weight 2b, but the loading accuracy that this can exert all one's strength reduction, and the power value scope of dwindling loading force.
At one-level fulcrum and secondary position of the fulcrum place, one-level lever and second lever are respectively to be arranged on the pedestal by each supports flexible hinge, the flexural deformation and the bending stress that flexible hinge are caused in order to eliminate gravity, the destruction that the moment of flexure of avoiding gravity to produce causes flexible hinge, the flexible hinge at one-level fulcrum and secondary fulcrum place are all adopted and are become consistent setting with gravity direction.
Whole device produces little power by counterweight, little power is much smaller than the quality of counterweight, and vertically the input end of the length of bar 3b and one-level lever is larger to the ratio of the distance of one-level fulcrum 5, the length of second lever 1 and secondary fulcrum 8 are larger to the ratio of the distance of secondary flexible hinge 7, then just can produce less little power.
In the implementation, can realize according to following dual mode the differential loading of the little power of level:
Mode one, load the loading counterweight of equal in quality at two input ends, this moment, probe was on the initial position; The power sensor is set keeps motionless at initial position, change the quality difference that two input ends load counterweight, the loading force that makes one of them input end is F1a, the loading force of another input end is F1b, the power difference F1=F1a-F1b that then loads, after this power difference is dwindled by flexure hinge mechanism, by shorting pin loaded to power sensor 11, thereby obtain little power of different sizes;
Mode two, load the loading counterweight of equal in quality at two input ends, this moment, probe was on the initial position, then change the quality difference that two input ends load counterweight, make probe skew occur, by the power sensor probe is progressively passed initial position from the position of skew, power sensor distance initial position is nearer, probe is larger to the acting force of power sensor, the displacement that finally loads the quality difference of counterweight and power sensor by two input ends determines the size of loading force, one non-contact displacement transducer can be set at the probe place, pass through theoretical analysis, numerical evaluation and experimental calibration are based upon different two input ends and load the quality difference test pin biasing displacement of counterweight and the relation between loading force.
Apparatus of the present invention can realize 10
-2The loading of following little power.
Claims (2)
1. the loading method of a differential type horizontal micro force loading device is characterized in that:
Described differential type horizontal micro force loading device is set is: bar centered by the second lever (1) of vertical setting, in same perpendicular, a pair of one-level lever was in the both sides of second lever (1) in symmetrical minute, and connect mutually with second lever (1) by the transiting rod of a side (2) separately respectively;
Described one-level lever is inverted " L " type bar that is made of horizon bar (3a) and vertical bar (3b), load the rod end that counterweight (4) is arranged on the horizon bar (3a) as input end, one-level fulcrum (5) is positioned at the middle part of horizon bar, vertically the bottom of bar (3b) is connected to the outer end of transiting rod (2) by one-level flexible hinge (6) at the bar sidepiece, and the inner of described transiting rod (2) is connected on the force position of second lever (1) by secondary flexible hinge (7);
The bottom of described second lever (1) is set to secondary fulcrum (8), the top of second lever (1) is free end, probe (9) is set on the top of described second lever, contacts with power sensor (11) on being arranged on micromotion platform (10) with described probe (9);
Connect firmly a pair of connecting rod (2a) that extends towards the inner place of transiting rod one side in the outer end of described transiting rod (2), rod end at described connecting rod (2a) connects firmly transiting rod balancing weight (2b), and the centre of gravity adjustment of described transiting rod (2) is located to secondary flexible hinge (7) position; Horizon bar (3a) rod end place at described one-level lever arranges one-level lever balancing weight (12), makes the centre of gravity adjustment of described one-level lever to the position of one-level fulcrum (5); On described second lever (1), the position that is positioned between secondary fulcrum (8) and the secondary flexible hinge (7) arranges second lever balancing weight (1b) by the cantilever (1a) that connects firmly, and makes the common centre of gravity adjustment of second lever (1), transiting rod (2), connecting rod (2a) and transiting rod balancing weight (2b) to the position of secondary fulcrum (8);
The loading method of described differential type horizontal micro force loading device is to realize one of in the following manner differential loading:
Mode one, load the loading counterweight of equal in quality at two input ends, this moment, probe was on the initial position; The power sensor is set keeps motionless at initial position, change the quality difference that two input ends load counterweight, obtain the loading force of different sizes at described power sensor;
Mode two, load the loading counterweight of equal in quality at two input ends, this moment, probe was on the initial position, then change the quality difference that two input ends load counterweight, make probe skew occur, by the power sensor probe is progressively passed initial position from the position of skew, power sensor distance initial position is nearer, and probe is larger to the acting force of power sensor, and the displacement that finally loads the quality difference of counterweight and power sensor by two input ends determines the size of loading force.
2. the method for differential type horizontal micro force loading device according to claim 1, it is characterized in that: in described differential type horizontal micro force loading device, in described one-level fulcrum (5) and secondary fulcrum (8) position, one-level lever and second lever are respectively to be arranged on the pedestal by each supports flexible hinge, described each supports flexible hinge is suspended on the support, becomes consistent with gravity direction.
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| CN201210319563.8A CN102889963B (en) | 2011-07-27 | 2011-07-27 | Loading method of differential type horizontal micro-force loading device |
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| CN201210319563.8A CN102889963B (en) | 2011-07-27 | 2011-07-27 | Loading method of differential type horizontal micro-force loading device |
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| CN 201110212470 Division CN102359844B (en) | 2011-07-27 | 2011-07-27 | Differential horizontal micro force loading device and loading method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901224A (en) * | 2014-04-17 | 2014-07-02 | 合肥工业大学 | Three-dimensional ocean current sensor capable of measuring upwelling currents and method for measuring upwelling currents and horizontal currents |
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| JP2006023266A (en) * | 2004-07-07 | 2006-01-26 | Hitoshi Arisei | Method and device for generating horizontal-directional reference force |
| CN2924505Y (en) * | 2006-04-28 | 2007-07-18 | 陕西省计量科学研究院 | Vertical shaft micro torque calibrating device |
| CN101059381A (en) * | 2007-05-10 | 2007-10-24 | 大连理工大学 | Piezoelectric film cantilever beam type micro-force sensor micro-force loading device |
| CN101319980A (en) * | 2008-07-11 | 2008-12-10 | 天津大学 | Micro/nano scale ultra-micro force measuring device and force value tracing method |
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- 2011-07-27 CN CN201210319563.8A patent/CN102889963B/en active Active
Patent Citations (4)
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|---|---|---|---|---|
| JP2006023266A (en) * | 2004-07-07 | 2006-01-26 | Hitoshi Arisei | Method and device for generating horizontal-directional reference force |
| CN2924505Y (en) * | 2006-04-28 | 2007-07-18 | 陕西省计量科学研究院 | Vertical shaft micro torque calibrating device |
| CN101059381A (en) * | 2007-05-10 | 2007-10-24 | 大连理工大学 | Piezoelectric film cantilever beam type micro-force sensor micro-force loading device |
| CN101319980A (en) * | 2008-07-11 | 2008-12-10 | 天津大学 | Micro/nano scale ultra-micro force measuring device and force value tracing method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103901224A (en) * | 2014-04-17 | 2014-07-02 | 合肥工业大学 | Three-dimensional ocean current sensor capable of measuring upwelling currents and method for measuring upwelling currents and horizontal currents |
| CN103901224B (en) * | 2014-04-17 | 2016-04-06 | 合肥工业大学 | A kind of three-dimensional ocean current sensor surveying upward flow and the measuring method measuring upward flow and horizontal flow |
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