CN102881547B - Positioning device for rotating part in vacuum cavity - Google Patents
Positioning device for rotating part in vacuum cavity Download PDFInfo
- Publication number
- CN102881547B CN102881547B CN201210390288.9A CN201210390288A CN102881547B CN 102881547 B CN102881547 B CN 102881547B CN 201210390288 A CN201210390288 A CN 201210390288A CN 102881547 B CN102881547 B CN 102881547B
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- seal
- frame
- cavity
- positioner
- seal frame
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Abstract
The invention discloses a positioning device for a rotating part in a vacuum cavity, and belongs to the technical field of micro-electronics. The device comprises a laser reflecting device, sealing parts, an extra-cavity glass sealing piece and a sealing frame, wherein the laser reflecting device is positioned in a reaction chamber and in threaded connection with the top of the sealing frame; the sealing frame is arranged in the reaction chamber from bottom to top and fixedly connected with the reaction chamber through screws; the extra-cavity glass sealing piece is in threaded connection with the bottom of the sealing frame; the sealing parts are arranged at the joint of the reaction chamber and the sealing frame; and the sealing parts and glass are arranged at the joint of the extra-cavity glass sealing piece and the bottom of the sealing frame. The positioning device is used in a sputtering table, has a simple structure and is low in cost and high in operability, accuracy and maintainability, and the high-speed rotating part can be positioned at high accuracy particularly in polluted high-temperature vacuum environment.
Description
Technical field
The present invention relates to microelectronics technology, particularly a kind of positioner of vacuum chamber inner rotatable part.
Background technology
In semiconductor preparing process, need accurately to locate the device of reaction chamber inside, as manipulator film conveying and withdrawing, electrode movement and target position motion etc., this just needs to implement accurately location to the parts under vacuum environment; Require that transducer does not enter vacuum environment, or not by the pollution of reaction chamber inside, this just needs a set ofly can detect that the parts of reaction chamber internal motion again can by signal transmission device out simultaneously.
In vacuum environment, semiconductor preparing process process is many with pollution, high temperature etc., and general transducer cannot work under these conditions.Existing industrial sensor, such as: travel switch, can cause short circuit owing to being subject to process contamination; Magnetic switch, can cause inefficacy, and precision is not high owing to being subject to the impact of high temperature.Stop method if adopt direct electrical contact or touch rotatable parts are stopped, inductor deformation or short circuit can be caused to guarantee positioning precision.In a word, existing industrial conventional process, vacuum, high temperature, with pollute environment under all cannot use, cause vacuum chamber inner rotatable part accurately not locate.
Summary of the invention
In order to solve the accurate orientation problem of vacuum with the vacuum chamber inner rotatable part under pollution, hot environment, the invention provides a kind of positioner of vacuum chamber inner rotatable part, comprise laser reflection device, seal member, the outer glass seal of cavity and seal frame; Described laser reflection device is positioned at reative cell, and is threaded connection with the top of described seal frame; Described seal frame loads reative cell from bottom to top, and is fixedly connected with reative cell by screw; The bottom of the outer glass seal of described cavity and seal frame is threaded connection; Described reative cell is connected part and is provided with described seal member with seal frame; The outer glass seal of described cavity is connected part with seal frame bottom and is provided with described seal member and glass; Described laser reflection device has internal thread; Described laser reflection device inside is provided with metal mirror; Described metal mirror is aluminum metal reflecting surface; The side of the seal frame being positioned at reative cell is provided with antifouling slit breach.
Top and the bottom of described seal frame have external screw thread.
The center of the outer glass seal of described cavity is provided with through hole, and the outer glass seal of described cavity has internal thread.
Described seal member is " O " RunddichtringO.
Described seal frame is made by metallic aluminium, and has double containment flange-interface.
Described double containment flange-interface is respectively arranged with dovetail type seal groove.
Positioner provided by the invention accurately can be located robot movement position or target position in vacuum is with the semiconductor preparing process process under pollution, hot environment, and this apparatus structure is simple, with low cost simultaneously, reliability is high, easy maintenance and repair.
Accompanying drawing explanation
Fig. 1 is the cutaway view of the positioner of the vacuum chamber inner rotatable part that the embodiment of the present invention provides;
Fig. 2 is the cutaway view of seal frame in the embodiment of the present invention.
Embodiment
Below in conjunction with drawings and Examples, technical solution of the present invention is further described.
See Fig. 1 and Fig. 2, embodiments provide a kind of positioner of vacuum chamber inner rotatable part, comprise laser reflection device 2, seal member 9, the outer glass seal 12 of cavity and seal frame 1.Wherein, laser reflection device 2 is positioned at reative cell 6, and is threaded connection with the top of seal frame 1; Seal frame 1 loads reative cell 6 from bottom to top, and is fixedly connected with reative cell 6 by screw 10; The outer glass seal 12 of cavity is threaded connection with the bottom of seal frame 1; Reative cell 6 is connected part with seal frame 1 and is provided with seal member 9; The outer glass seal 12 of cavity is connected part with seal frame 1 bottom and is provided with seal member 9 and glass 13.
See Fig. 2, the top of seal frame 1 and bottom have external screw thread 7, and the side of seal frame 1 is provided with antifouling slit breach 18; Laser reflection device 2 inside is provided with aluminum metal reflecting surface 4 and internal thread 3, being threaded between laser reflection device 2 and the external screw thread 7 on seal frame 1 top is realized by internal thread 3, manual adjustments laser reflection device 2 screws in the degree of depth on seal frame 1 top, to regulate the height on aluminum metal reflecting surface 4 and seal frame 1 top, and then control the return path of laser beam; The center of the outer glass seal 12 of cavity is provided with through hole, and the outer glass seal 12 of cavity has internal thread 3, realizes outer being threaded between glass seal 12 and the external screw thread 7 of seal frame 1 bottom of cavity by internal thread 3.In the present embodiment, seal member 9 is " O " RunddichtringO; Seal frame 1 is made by metallic aluminium, and has double containment flange-interface 20, for vacuum seal with make laser beam pass through; Double containment flange-interface 20 is respectively arranged with the dovetail type seal groove 19 for sealing between semiconductor vacuum equipment, " O " RunddichtringO is separately positioned in dovetail type seal groove 19.In actual applications, laser reflection device 2 inside can not arrange aluminum metal reflecting surface 4, can realize invention equally, is only that laser reflection effect is not as the present embodiment.
Before the positioner using the embodiment of the present invention, need to install, specifically: seal frame 1 is loaded reative cell 6 from bottom to top, hold-down screw 10 is sealed by " O " RunddichtringO 9 pairs of seal frames after tightening; The laser reflection device 2 of reative cell 6 inside is fixed by the external screw thread 7 of internal thread 3 and seal frame; Reative cell 6 outside is connected by the internal thread 3 of the outer glass seal 12 of external screw thread 7 and cavity, screw the outer glass seal 12 of cavity and then apply pressure to glass, " O " RunddichtringO 9 passes through glass 13 by outer glass seal 12 press seal of cavity, to ensure vacuum seal; Laser 16 is fixed on seal frame 1, is adjusted the position of laser by hold-down screw 10.In the position fixing process of rotatable parts, after the laser beam launched of laser 16 is mapped to aluminum metal reflecting surface 4 by the through hole at outer glass seal 12 center of cavity and glass 13, the receiver of reflect back into laser 16, motion is identified by laser 16 without object signal; When the laser absorption label 5 driven when there being target electrode is by antifouling slit breach 18, laser beam is absorbed label 5 and is absorbed, and makes laser beam cannot the receiver of return laser light device 16, and moving object signal is identified by laser 16.In actual applications, the width of antifouling slit breach 18 can be 3mm, so not only can ensure that laser absorption label 5 can pass through and mechanical strength smoothly, but also can prevent the contaminants aluminum metal reflecting surface 4 in reative cell and glass 13.
The positioner of the embodiment of the present invention is used in sputtering unit, particularly under the vacuum environment having pollution and high temperature, can realize the hi-Fix of high-speed rotating component, and apparatus structure is simple, with low cost, workable, precision is high and maintainability good.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. a positioner for vacuum chamber inner rotatable part, is characterized in that, comprises laser reflection device, seal member, the outer glass seal of cavity and seal frame; Described laser reflection device is positioned at reative cell, and is threaded connection with the top of described seal frame; Described seal frame loads reative cell from bottom to top, and is fixedly connected with reative cell by screw; The bottom of the outer glass seal of described cavity and seal frame is threaded connection; Described reative cell is connected part and is provided with described seal member with seal frame; The outer glass seal of described cavity is connected part with seal frame bottom and is provided with described seal member and glass; Described laser reflection device has internal thread; Described laser reflection device inside is provided with metal mirror; Described metal mirror is aluminum metal reflecting surface; The side of the seal frame being positioned at reative cell is provided with antifouling slit breach.
2. the positioner of vacuum chamber inner rotatable part as claimed in claim 1, it is characterized in that, top and the bottom of described seal frame have external screw thread.
3. the positioner of vacuum chamber inner rotatable part as claimed in claim 1, is characterized in that, the center of the outer glass seal of described cavity is provided with through hole, and the outer glass seal of described cavity has internal thread.
4. the positioner of vacuum chamber inner rotatable part as claimed in claim 1, it is characterized in that, described seal member is " O " RunddichtringO.
5. the positioner of vacuum chamber inner rotatable part as claimed in claim 1, it is characterized in that, described seal frame is made by metallic aluminium, and has double containment flange-interface.
6. the positioner of vacuum chamber inner rotatable part as claimed in claim 5, is characterized in that, described double containment flange-interface is respectively arranged with dovetail type seal groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210390288.9A CN102881547B (en) | 2012-10-15 | 2012-10-15 | Positioning device for rotating part in vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210390288.9A CN102881547B (en) | 2012-10-15 | 2012-10-15 | Positioning device for rotating part in vacuum cavity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102881547A CN102881547A (en) | 2013-01-16 |
| CN102881547B true CN102881547B (en) | 2015-07-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210390288.9A Expired - Fee Related CN102881547B (en) | 2012-10-15 | 2012-10-15 | Positioning device for rotating part in vacuum cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102881547B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956163A (en) * | 2009-07-13 | 2011-01-26 | 三菱重工业株式会社 | The vacuum vapor deposition device |
| CN102506712A (en) * | 2011-11-04 | 2012-06-20 | 中国科学院微电子研究所 | Laser detection device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003065711A (en) * | 2001-07-31 | 2003-03-05 | Applied Materials Inc | Semiconductor manufacturing apparatus and method for detecting substrate |
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2012
- 2012-10-15 CN CN201210390288.9A patent/CN102881547B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956163A (en) * | 2009-07-13 | 2011-01-26 | 三菱重工业株式会社 | The vacuum vapor deposition device |
| CN102506712A (en) * | 2011-11-04 | 2012-06-20 | 中国科学院微电子研究所 | Laser detection device |
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| Publication number | Publication date |
|---|---|
| CN102881547A (en) | 2013-01-16 |
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| C10 | Entry into substantive examination | ||
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150708 Termination date: 20201015 |