CN102868317A - Piezoelectric metal composite beam and method for driving piezoelectric metal composite beam to vibrate in bending manner - Google Patents
Piezoelectric metal composite beam and method for driving piezoelectric metal composite beam to vibrate in bending manner Download PDFInfo
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- CN102868317A CN102868317A CN2012104010751A CN201210401075A CN102868317A CN 102868317 A CN102868317 A CN 102868317A CN 2012104010751 A CN2012104010751 A CN 2012104010751A CN 201210401075 A CN201210401075 A CN 201210401075A CN 102868317 A CN102868317 A CN 102868317A
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Abstract
The invention discloses a piezoelectric metal composite beam and a method for driving the piezoelectric metal composite beam to vibrate in a bending manner, and relates to the piezoelectric metal composite beam and the method for driving the piezoelectric metal composite beam to vibrate in a bending manner. In order to solve the problem of large processing difficulty in a semi-ceramic plate driving mode, two piezoelectric ceramic plates of the piezoelectric metal composite beam are fixedly connected between two end covers; an electrode plate is arranged between each end cover and an adjacent piezoelectric ceramic plate; two electrode plates are arranged between two piezoelectric ceramic plates on the same horizontal plane, and a gap is reserved between two electrode plates; the two piezoelectric ceramic plates are polarized along the thickness direction, and the polarization directions are opposite. The driving method comprises the following steps that the electrode plates between each end cover and the piezoelectric ceramic plates are connected with a common end of two phases of drive signals; the two electrode plates between the two piezoelectric ceramic plates are respectively connected with a drive end of the two phases of drive signals; and the two phases of drive signals are alternating voltage signals and have 180 degrees of phase difference. The piezoelectric metal composite beam is applied to the field of fabrication of an ultrasonic motor.
Description
Technical field
The present invention relates to piezoelectric supersonic Driving technique field.
Background technology
The piezoelectric supersonic Driving technique is a kind of inverse piezoelectric effect of utilizing piezoelectric ceramic, in elastomer, motivate the vibration in the supersonic range, form the particle movement with particular track at surface of elastomer specified point or specific region, and then the microscopic motion of particle is converted to the technology of the macroscopic motion of rotor by the coupling of the friction between stator, the rotor.The piezoelectric supersonic driver has low speed high torque, need not gear, without electromagnetic interference, fast response time and the advantage such as cut off self-lock.
Piezoelectricity metal composite deflection of beam vibration is a kind of mode of oscillation that the piezoelectric supersonic driver generally adopts, for example open day is that January 13, publication number in 2010 are that CN101626203A, denomination of invention are the patent application of " vibrator of beam type linear ultrasonic motor using bending vibration modes ", it has proposed a kind of new configuration of piezoelectric ultrasonic motor that adopts homotype quadrature bending vibration modes to realize the double-driving foot linear drives first, success avoided the mode degeneracy problem in the design process, but have the advantage such as simple in structure, flexible design producing in serial form; But this oscillator has adopted the form of the opposite half sheet potsherd combination of two polarised directions to realize the driving of flexural vibrations, and the processing of half sheet potsherd generally is to form by the cutting of full wafer pottery, to cutting accuracy require very high, difficulty of processing is larger.
Summary of the invention
The present invention existing drives the large problem of the half existing difficulty of processing of sheet potsherd type of drive that piezoelectricity metal composite Beam Vibration adopts in order to solve, thereby the invention provides piezoelectricity metal composite beam and drive the method for this piezoelectricity metal composite Beam Vibration.
Piezoelectricity metal composite beam comprises two end caps, two piezoelectric ceramic pieces and four electrode slices, and described two piezoelectric ceramic pieces are fixedly connected between two end caps, are provided with an electrode slice between the piezoelectric ceramic piece that each end cap is adjacent; Be provided with two electrode slices between two piezoelectric ceramic pieces, described two electrode slices are in the same plane, and leave the gap between described two electrode slices; The equal through-thickness polarization of described two piezoelectric ceramic pieces, and the two polarised direction is opposite.
The method that drives above-mentioned piezoelectricity metal composite Beam Vibration is: adopt the described piezoelectricity metal composite of two-phase drive beam, electrode slice between each end cap and the piezoelectric ceramic piece all is connected with the common port of two-phase driving signal, two plate electrode sheets between two piezoelectric ceramic pieces are connected with the drive end of two-phase driving signal respectively; It all is ac voltage signals that described two-phase drives signal, and described two-phase drives the phase difference that signal has 180 degree in time.
The method of this piezoelectricity metal composite Beam Vibration of driving of the present invention is to adopt the full wafer piezoelectric ceramic piece to cooperate the version of two electrode slices from the maximum different of conventional ADS driving method, the AC drive voltage signal that has the phase difference of 180 degree on the application time drives piezoelectricity metal composite deflection of beam vibration.In the middle of two electrode slices in the middle of two piezoelectric ceramic pieces certain gap is arranged, guaranteed that two-phase drives the insulation between the signal, having avoided of success is cut into that half sheet piezoelectric ceramic piece is existing to require the problems such as very high, that difficulty of processing is larger to cutting accuracy.
The present invention has simplified the structure of piezoelectric ceramic and the processing technology of piezoelectric ceramic fully, is widely used in making various piezoelectric actuators based on the work of piezoelectricity metal composite Beam Vibration.
Description of drawings
Fig. 1 is the cutaway view of piezoelectricity metal composite beam of the present invention;
Fig. 2 is the perspective view of piezoelectricity metal composite beam shown in Figure 1;
Fig. 3 is the perspective view after piezoelectricity metal composite beam shown in Figure 2 is removed half;
Fig. 4 is the vibration shape schematic diagram of piezoelectricity metal composite Beam Vibration shown in Figure 1.
Embodiment
Embodiment one, specify the described piezoelectricity metal composite of present embodiment beam in conjunction with Fig. 1 to Fig. 3, comprise two end caps 1, two piezoelectric ceramic pieces 2 and four electrode slices 3, described two piezoelectric ceramic pieces 2 are fixedly connected between two end caps 1, are provided with an electrode slice 3 between the piezoelectric ceramic piece 2 that each end cap 1 is adjacent; Be provided with two electrode slices 3 between two piezoelectric ceramic pieces 2, described two electrode slices 3 are in the same plane, and leave the gap referring to shown in Figure 3 between described two electrode slices 3; Described two piezoelectric ceramic pieces, 2 equal through-thickness polarization, and the two polarised direction is opposite.
In the middle of two electrode slices in the middle of described two piezoelectric ceramic pieces of present embodiment certain gap is arranged, guaranteed that two-phase drives the insulation between the signal, having avoided of success is cut into that half sheet piezoelectric ceramic piece is existing requires the problems such as very high, that difficulty of processing is larger to cutting accuracy.
Embodiment two, specify present embodiment in conjunction with Fig. 1 to Fig. 4, the method that drives embodiment one described piezoelectricity metal composite Beam Vibration is: adopt the described piezoelectricity metal composite of two-phase drive beam, electrode slice 3 between each end cap 1 and the piezoelectric ceramic piece 2 all is connected with the common port of two-phase driving signal, two plate electrode sheets 3 between two piezoelectric ceramic pieces 2 are connected with the drive end of two-phase driving signal respectively; It all is ac voltage signals that described two-phase drives signal, and described two-phase drives the phase difference that signal has 180 degree in time.
Adopt the described method of present embodiment to drive piezoelectricity metal composite beam, the stretching vibration that replaces by the piezoelectric ceramic piece both sides realizes the driving to piezoelectricity metal composite Beam Vibration, at this moment, described piezoelectricity metal composite beam completely state referring to shown in Figure 4.Present embodiment adopts the version of two electrode slices of full wafer piezoelectric ceramic piece cooperation, has the AC drive voltage signal of 180 degree phase differences on the application time, drives piezoelectricity metal composite deflection of beam vibration.
Claims (2)
1. piezoelectricity metal composite beam, comprise two end caps (1), two piezoelectric ceramic pieces (2) and four electrode slices (3), it is characterized in that: described two piezoelectric ceramic pieces (2) are fixedly connected between two end caps (1), are provided with an electrode slice (3) between the piezoelectric ceramic piece (2) that each end cap (1) is adjacent; Be provided with two electrode slices (3) between two piezoelectric ceramic pieces (2), described two electrode slices (3) are in the same plane, and leave the gap between described two electrode slices (3); All through-thickness polarization of described two piezoelectric ceramic pieces (2), and the two polarised direction is opposite.
2. drive the method for piezoelectricity metal composite Beam Vibration claimed in claim 1, it is characterized in that: described method is to adopt the described piezoelectricity metal composite of two-phase drive beam, electrode slice (3) between each end cap (1) and the piezoelectric ceramic piece (2) all is connected with the common port of two-phase driving signal, two plate electrode sheets (3) between two piezoelectric ceramic pieces (2) are connected with the drive end of two-phase driving signal respectively; It all is ac voltage signals that described two-phase drives signal, and described two-phase drives the phase difference that signal has 180 degree in time.
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CN201210401075.1A CN102868317B (en) | 2012-10-19 | 2012-10-19 | Piezoelectric metal composite beam and drive the method for these piezoelectric metal composite beam flexural vibrations |
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CN201210401075.1A CN102868317B (en) | 2012-10-19 | 2012-10-19 | Piezoelectric metal composite beam and drive the method for these piezoelectric metal composite beam flexural vibrations |
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CN102868317A true CN102868317A (en) | 2013-01-09 |
CN102868317B CN102868317B (en) | 2016-01-20 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110957940A (en) * | 2018-09-27 | 2020-04-03 | 佳能株式会社 | Vibration type driving device, vibration type driving apparatus, driving control device, and driving control method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022256A (en) * | 2007-03-20 | 2007-08-22 | 哈尔滨工业大学 | Sandwich transducer type longitudinal and bending linear ultrasound motor with frequency-modulating variable-amplitude rod |
CN101707444A (en) * | 2009-11-12 | 2010-05-12 | 南京航空航天大学 | In-plane traveling wave rotary ultrasonic motor and control method |
US20100327696A1 (en) * | 2009-06-29 | 2010-12-30 | Samsung Electronics Co., Ltd. | Ultrasonic motor and manufacturing method of the same |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022256A (en) * | 2007-03-20 | 2007-08-22 | 哈尔滨工业大学 | Sandwich transducer type longitudinal and bending linear ultrasound motor with frequency-modulating variable-amplitude rod |
US20100327696A1 (en) * | 2009-06-29 | 2010-12-30 | Samsung Electronics Co., Ltd. | Ultrasonic motor and manufacturing method of the same |
CN101707444A (en) * | 2009-11-12 | 2010-05-12 | 南京航空航天大学 | In-plane traveling wave rotary ultrasonic motor and control method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110957940A (en) * | 2018-09-27 | 2020-04-03 | 佳能株式会社 | Vibration type driving device, vibration type driving apparatus, driving control device, and driving control method |
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