CN102866457A - Ridge waveguide coupled Y type branching device and 1*N branching device constituted thereby - Google Patents
Ridge waveguide coupled Y type branching device and 1*N branching device constituted thereby Download PDFInfo
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Abstract
The invention discloses a ridge waveguide coupled Y type branching device and a 1*N branching device constituted thereby. The Y type branching device consists of an input gradient ridge waveguide structure, an output gradient ridge waveguide structure and a branch ridge waveguide structure from input to output in sequence, wherein flat plate layers of the three structures are all communicated. Waveguide shafts of two output waveguide ridges of the output gradient ridge waveguide structure form certain opening angles with a waveguide shaft of an input waveguide ridge of the input gradient ridge waveguide structure respectively; and the three waveguide ridges of the two structures are not communicated with one another. The width change rate of the input waveguide ridge simultaneously corresponds to the width change rate and the opening angles of the two output waveguide ridges, i.e., when the width change rate of the input waveguide ridge is large, the width change rate and the opening angels of the two output waveguide ridges are also correspondingly large, and vice versa. The 1*N branching device consists of N-1 ridge waveguide coupled Y type branching devices. Compared with the prior art, the extra loss at a branch joint can be reduced and the size of the device can be reduced by the technology disclosed by the invention.
Description
Technical field
The present invention relates to the y-branch device of a kind of integrated opto-electronic device, particularly a kind of ridge waveguide-coupled and by the splitter of its 1 * N that consists of.
Background technology
Silicon SOI on the dielectric substrate is optical waveguide and the plane PIC photon integrated circuit PLC of substrate, can help to reduce the cost of optical chip, and realizes that multifunctional single-sheet is integrated, and wherein " y-branch device " is a kind of utilization flow dividing structure widely among optical waveguide and the PLC.In optical waveguide and PLC based on SOI or other high Refractive Index of Material contrasts, light is when advancing to branch knot place, and light wave can be appeared at silicon dioxide or other low-index material scatterings in the place ahead suddenly, produces larger excess loss at branch knot place.The excess loss of the general y-branch device take silicon dioxide as substrate is less than 0.5dB, and one typically based on the excess loss of the y-branch device of SOI greater than 1dB, as seen how reducing this excess loss is the difficult problem of structure low-loss device.
Publication number is the large broadband y-branch device that the patented claim of CN 101546014A has proposed mode gradual change principle, and its structure comprises a gradual change input waveguide and two S type taper output optical waveguides, and three waveguides are not communicated with fully.This y-branch device attempts to utilize the Mode Coupling gradual change principle to reduce the excess loss that traditional y-branch device forms owing to the photolithographic constraints of detail place wedge angle, but its structure is serious unreasonable and be not suitable for high index contrast materials, because three waveguides are not communicated with fully, unless size is minimum, efficient coupling can't occur in the high index contrast materials waveguide, and this simple structure of S type conical optical waveguide, make device performance be difficult to optimize, the Mode Coupling gradual change requires very long coupling distance in addition, this requires the curvature of S type little, and little S type curvature can't satisfy the requirement that Y branch opens.
Summary of the invention
Incubation of the present invention is in Dec, 2006, the purpose of this invention is to provide a kind of y-branch device of ridge waveguide-coupled and by its 1 * N splitter that consists of, exquisiteness design by waveguide ridge structure, make light field can by the flat layer that is communicated with realize without the shunting of scattering with separate, with the scattering loss at branched structure branch knot place in the reduction y-branch device, and reduce the device architecture size.
The present invention realizes by the following technical solutions:
A kind of y-branch device of ridge waveguide-coupled is comprised of ridge waveguide structure, and described ridge waveguide structure is by making the ridge structure at the flat layer of high-index material and covering low-index material and form;
Described y-branch device is comprised of input gradual change ridge waveguide structure, output gradual change ridge waveguide structure and branch's ridge waveguide structure successively from being input to output;
Described input gradual change ridge waveguide structure is comprised of input waveguide ridge and flat layer, and described input waveguide ridge is narrowed down by wide to finishing the end width gradually from initiating terminal, and the width that finishes to hold is not more than the height of its flat layer;
Described output gradual change ridge waveguide structure is comprised of two output waveguide ridges and flat layer, the both sides of described two described input waveguide ridges of output waveguide ridge apportion, its width is broadened by narrow to finishing end gradually from initiating terminal, and the width of initiating terminal is not more than the height of its flat layer, and the waveguide axis of described two output waveguide ridges becomes certain subtended angle with the waveguide axis of described input waveguide ridge respectively;
Described branch ridge waveguide structure is comprised of two branch-waveguide ridges and flat layer, and described two branch-waveguide ridges link to each other with described two output waveguide ridges respectively;
The flat layer of described input gradual change ridge waveguide structure, output gradual change ridge waveguide structure and branch's ridge waveguide structure is communicated with, and the height of each flat layer is identical, and the wave guide ridge of the wave guide ridge of described input gradual change ridge waveguide structure and described output gradual change ridge waveguide structure is not communicated with, and between each wave guide ridge by trench isolations;
The wide variety rate of described input waveguide ridge is corresponding with wide variety rate and the subtended angle of described two output waveguide ridges, and namely when described input waveguide ridge wide variety rate was larger, the wide variety rate of described two output waveguide ridges and subtended angle were also corresponding larger.
The y-branch device of foregoing ridge waveguide-coupled, in certain embodiments, the subtended angle between the waveguide axis of the waveguide axis of described two output waveguide ridges and input waveguide ridge is zero.
The y-branch device of foregoing ridge waveguide-coupled, described two output waveguide ridges are symmetrical or asymmetric about the waveguide axis of described input waveguide ridge.The waveguide axis of described two the output waveguide ridges of y-branch device of foregoing ridge waveguide-coupled is consistent in the wavefront normal direction at its initiating terminal place with the input light field, and perhaps the tangential direction of any point is consistent all the time in the wavefront normal direction at this some place with the input light field on the waveguide axis of described two output waveguide ridges.
The y-branch device of foregoing ridge waveguide-coupled, when the initiating terminal of described two output waveguide ridges at the initiating terminal of described input waveguide ridge with when finishing between the end, aforementioned each channel bottom equates with the flat layer height of its below or unequal to the vertical range of each flat layer, and the groove of isolating described input waveguide ridge and described two output waveguide ridges is about the waveguide axis symmetry of described input waveguide ridge or asymmetric.Described each channel bottom is to vertical range consistent or variation along optical propagation direction of described each flat layer bottom.When described vertical range changed along optical propagation direction, its variation tendency was first increases and then decreases.
The y-branch device of foregoing ridge waveguide-coupled, the initiating terminal of described two output waveguide ridges also can with the end end of described input waveguide ridge on the same cross section vertical with optical propagation direction.
The y-branch device of foregoing ridge waveguide-coupled, wherein, the edge of described input waveguide ridge is parallel or not parallel with described two the output waveguide ridged edges that are adjacent.
A kind of 1 * N splitter that is made of the y-branch device of aforesaid ridge waveguide-coupled, wherein, described 1 * N splitter is made of N-1 described y-branch device cascade.
Technical scheme disclosed by the invention, its beneficial effect comprises:
1, reduced the excess loss at branch knot place, and structure of the present invention is all insensitive to polarization and wavelength, its performance can compare favourably with the integrated optical circuit of low index contrast materials commonly used.
The Light Energy transfer of y-branch device disclosed by the invention is to realize that by the flat layer that is communicated with three ridge waveguide structures scattering loss is few.When light wave is propagated in splitter structure of the present invention, under the cooperatively interacting of input gradual change ridge waveguide structure and output gradual change ridge waveguide structure, Light Energy reduces gradually in the shared ratio in ridge district of input gradual change ridge waveguide structure, the Light Energy ratio that is distributed in flat layer increases gradually, and light field enlarges gradually at the transverse width of flat layer, Light Energy progresses into output gradual change ridge waveguide structure by flat layer, finally becomes the guided mode output of output gradual change ridge waveguide.In this course, the Light Energy in input gradual change ridge waveguide structure ridge district can be transferred to flat layer gradually, finish the end place at the input waveguide ridge, the Light Energy proportion in input gradual change ridge waveguide structure ridge district is very little, therefore reduce the input waveguide ridge and finished the silicon dioxide that suddenly occurs in light wave the place ahead, end place or other low-index materials to the scattering of whole light field, reduced the excess loss at branch knot place.
2, be conducive to reducing of waveguide dimensions.
The wide variety rate of input waveguide ridge is corresponding with wide variety rate and the subtended angle of two output waveguide ridges.When the wide rate of change of input waveguide ridge ridge was large, the wide variety rate of described two output waveguide ridges and described subtended angle were also corresponding larger, so device size is corresponding less.Otherwise the wide variety rate of described two output waveguide ridges and subtended angle are then corresponding less, and device size is corresponding larger.
Groove between described input waveguide ridge and the output waveguide ridge, its bottom affect to the vertical range of flat layer bottom the Light Energy transfer velocity of splitter structure of the present invention and output light field two hot spots separate speed.Begin when flat layer is transferred to output gradual change ridge waveguide structure from input gradual change ridge waveguide structure at Light Energy, increasing described vertical range can make Light Energy transfer to quickly output gradual change ridge waveguide structure, when transferring to output gradual change ridge waveguide structure, most of Light Energy reduces described vertical range, two hot spots of light field in the output gradual change ridge waveguide structure can be separated fast, and become the guided mode of output gradual change ridge waveguide structure, again through branch's ridge waveguide structure output, situation about therefore equating with the flat layer height of its below to the vertical range bottom each flat layer with respect to channel bottom, the physical dimension of whole device can be reduced greatly.
Description of drawings
Fig. 1 is the synoptic diagram of an embodiment of the y-branch device of ridge waveguide-coupled disclosed by the invention.
Fig. 2 is the vertical view of the y-branch device of ridge waveguide-coupled shown in Figure 1.
Fig. 3 (a)-(c) is the optical field distribution figure of a-c place xsect on the y-branch device optical transmission direction of corresponding diagram 1 ridge waveguide-coupled.
Fig. 4 has provided the cross section structure synoptic diagram of common ridge waveguide.
Fig. 5 is xsect optical field distribution figure corresponding to ridge waveguide different size shown in Figure 4.
Fig. 7 is the cross sectional representation of y-branch device disclosed by the invention b section in Fig. 1.
Fig. 8 is the synoptic diagram of second embodiment of the y-branch device of ridge waveguide-coupled disclosed by the invention.
Fig. 9 is the synoptic diagram of the 3rd embodiment of the y-branch device of ridge waveguide-coupled disclosed by the invention.
Figure 10 is the vertical view of 1 * N splitter of consisting of of the y-branch device of ridge waveguide-coupled disclosed by the invention, take 1 * 4 as example.
Embodiment
Also by reference to the accompanying drawings the present invention is described in detail below by specific embodiment:
Fig. 1 has provided embodiment of y-branch device of the present invention.Y-branch device shown in Figure 1 is on the SOI wafer or the flat layer of other high-index materials is made the ridge structure, and covers SiO
2Or other low-index materials formation, formed by input gradual change ridge waveguide structure 1, output gradual change ridge waveguide structure 2 and branch's ridge waveguide structure 3 successively from being input to output.Wherein, input gradual change ridge waveguide structure 1 is comprised of input waveguide ridge 10 and flat layer 11, and input waveguide ridge 10 is narrowed down by wide to finishing the end width gradually from initiating terminal, and the width that finishes to hold is not more than the height H 11 of flat layer 11; Output gradual change ridge waveguide structure 2 by two output waveguide ridges 20,21 and flat layer 22 form, the both sides of two output waveguide ridges 20, the described input waveguide ridge 10 of 21 apportions, its width is broadened by narrow to finishing end gradually from initiating terminal, and the width of initiating terminal is not more than the height H 22 of flat layer 22; Branch's ridge waveguide structure 3 by two branch- waveguide ridges 30,31 and flat layer 32 form, two branch- waveguide ridges 30,31 link to each other with described two output waveguide ridges 20,21 respectively.The flat layer 11,22,32 of input gradual change ridge waveguide structure 1, output gradual change ridge waveguide structure 2 and branch's ridge waveguide structure 3 is communicated with, and its height H 11, H22, H32 all equate, but input waveguide ridge 10 and output waveguide ridge 20,21 are not communicated with.
Among the embodiment shown in Figure 1, making has low-index material to exist as lower caldding layer below the flat layer of ridge structure, thereby makes flat layer become the planar waveguide layer.
Subtended angle in subtended angle between two branch-waveguide ridges 30 of branch- waveguide structure 3 and 31 and the output gradual change ridge waveguide structure between two output waveguide ridges 20 and 21 is corresponding, be that the waveguide axis of branch-waveguide ridge 30 and the waveguide axis of output waveguide ridge 20 overlap, the waveguide axis of the waveguide axis of branch-waveguide ridge 31 and output waveguide ridge 21 overlaps.In the less situation of input waveguide ridge 10 wide variety rates, the subtended angle between the waveguide axis of the waveguide axis of branch-waveguide ridge 30 and branch-waveguide ridge 31, between the waveguide axis of the waveguide axis of output waveguide ridge 20 and output waveguide ridge 21 can be 0.In such cases, branch- waveguide ridge 30 and 31 back connect S type curved waveguide to finish branch.
Fig. 2 is vertical view embodiment illustrated in fig. 1.As shown in Figure 2, between input waveguide ridge 10 and the output waveguide ridge 20 by between groove 4 isolation, input waveguide ridge 10 and the output waveguide ridge 21 by groove 5 isolation. Output waveguide ridge 20,21 initiating terminal are at the initiating terminal of input waveguide ridge 10 and finish between the end, and output waveguide ridge 20,21 symmetrical about the waveguide axis X1 of input waveguide ridge 10.The edge of input waveguide ridge 10 and adjacent output waveguide ridge 20,21 edge are not parallel, and the I that its minimum spacing is generally manufacturing process allows width.
The end end width W 10 of input waveguide ridge 10 is not more than the height H 11 of Fig. 1 middle plateform layer 11, output waveguide ridge 20,21 initial width W 20, W21 are not more than Fig. 1 middle plateform layer 22 height H 22, X2 is the waveguide axis of output waveguide ridge 20, X3 is the waveguide axis of output waveguide ridge 21, the angle of the waveguide axis X1 of X2, X3 and input waveguide ridge 10 is respectively α 1, α 2, and α 1 more than or equal to 0, α 2 is more than or equal to 0.The wavefront of light field is propagated in the dotted line representative among Fig. 2, and the direction of X2, X3 is consistent with the normal direction of the initiating terminal place wavefront of two output waveguide ridges.The wide variety rate of input waveguide ridge 10 and output waveguide ridge 20,21 wide variety rate and output waveguide ridge 20,21 with the subtended angle α 1 of the waveguide axis X1 of input waveguide ridge 10, α 2 is corresponding, namely when the wide variety rate of input waveguide ridge 10 is larger, the wavefront radian is corresponding larger, mean the waveguide axis X2 consistent with the normal direction of wavefront, the subtended angle of X3 and X1 is larger, it is output waveguide ridge 20,21 subtended angle α 1+ α 2 is larger, so be conducive to the reducing of physical dimension of y-branch device, simultaneously, for avoid energy loss, output waveguide ridge 20 as far as possible, 21 wide variety rate also must be corresponding larger.
Fig. 3 (a)-(c) provided y-branch device shown in Figure 1 on the optical propagation direction from front to back the Light Energy on the cross section of a, b, three diverse locations of c distribute.Shown in Fig. 3 (a), this moment, Light Energy was distributed in the input ridge waveguide structure 1.Along with input waveguide ridge 10 width narrow down gradually, and output waveguide ridge 20,21 appearance, Light Energy reduces gradually in the shared ratio in ridge district of input gradual change ridge waveguide structure 1, the Light Energy ratio that is distributed in flat layer increases gradually, and light field enlarges gradually at the transverse width of flat layer, Light Energy progresses into output gradual change ridge waveguide structure 2 by flat layer, and two output waveguide ridges 20, the shared ratios of 21 interior Light Energies also increase gradually, shown in Fig. 3 (b).Along with the end of input waveguide ridge 10 and output waveguide ridge 20,21 width broaden, Light Energy enters output gradual change ridge waveguide structure 2 by flat layer 22 overwhelming majority and becomes the guided mode of output gradual change ridge waveguide structure 2, then be branched ridge waveguide structure 3 outputs, shown in Fig. 3 (c).In this course, the Light Energy in input gradual change ridge waveguide structure 1 ridge district can be transferred to flat layer gradually, finish the end place at input waveguide ridge 10, the Light Energy proportion in input gradual change ridge waveguide structure 1 ridge district is very little, therefore reduce the input waveguide ridge and finished the silicon dioxide that suddenly occurs in light wave the place ahead, end place or other low-index materials to the scattering of whole light field, reduced the excess loss at branch knot place.Symmetrical about the waveguide axis X1 of input waveguide ridge owing to whole y-branch device in addition, so two hot spot symmetries of branch's ridge waveguide structure 3 outputs, realized the even light splitting output of y-branch device.
Among the embodiment illustrated in figures 1 and 2, waveguide axis X2, the X3 of output waveguide ridge is consistent with the normal direction of output waveguide ridge initiating terminal light field wavefront.This structure is convenient to design.According to the difference of input waveguide ridge along the wide variety of light propagation direction, the wavefront normal of light field may not can strictly extends by the radial straight line of gang, this moment is in order to reduce the wastage better, can adopt meticulousr design, therefore in further embodiments, the tangential direction of any point is consistent all the time in the wavefront normal direction at this some place with the input light field on the waveguide axis of two output waveguide ridges.
Fig. 4 has provided the structural representation in common ridge waveguide cross section, and Fig. 5 is the wide w of the different ridges of common ridge waveguide, the high h of ridge and optical field distribution figure corresponding to flat layer height H that Fig. 4 provides.Shown in Fig. 5 (a)-(c), for the ridge waveguide of certain flat layer height H and the high h of ridge, along with reducing of the wide w of ridge, the part energy proportion of (gray area among Fig. 4) also can reduce the mould spot in the ridge district.The size in ridge waveguide cross section: H=3um among Fig. 5 (a)-(c), h=2um, w is respectively 5um, 3um, 1um, the energy in ridge district accounts for respectively 23%, 9.6%, 0.05% of gross energy, as seen in the certain situation of the high h of ridge and flat layer height H, the shared ratio regular meeting of energy that is distributed in the ridge district in the ridge waveguide reduces along with reducing gradually of the wide w of ridge.Therefore, when the input waveguide ridge 10 of input gradual change ridge waveguide structure 1 of the present invention finishes end width W 10 and is not more than flat layer 11 height, can make the excess loss at branch knot place drop to the scope of permission.Usually, the end end width of input waveguide ridge 10 of the present invention and output waveguide ridge 20,21 the initiating terminal width I that all can be decided to be manufacturing process allows width.Simultaneously because the energy of the wide little ridge waveguide structure mould spot of ridge mainly is distributed in flat layer, and the energy of the mould spot after two wide ridge waveguide structures of little ridge superpose also mainly is distributed in flat layer, therefore the pattern of the wide input gradual change ridge waveguide structure of the medium and small ridge of the present invention can be mated well with the overlay model of the wide output gradual change ridge waveguide structure of two little ridges, thus realize as shown in Figure 1 gradual change input ridge waveguide and gradual change output ridge waveguide structure between the ultra-low loss Light Energy transmission at (branch knot place).
Among Fig. 5 (d)-(e), the wave guide ridge end face of ridge waveguide is in the certain situation of flat layer bottom surface vertical range, and w=3um, H are respectively 2.5um, 3um, 3.5um, and the energy in ridge district accounts for respectively 24%, 9.6%, 3.4% of gross energy.As seen, in flat layer bottom surface vertical range and the wide certain situation of ridge, the shared ratio regular meeting of energy that is distributed in the ridge district in the ridge waveguide reduces along with the gradually increase of flat layer height H at the wave guide ridge end face of ridge waveguide.The energy proportion is less in the ridge district, and the scattering loss that the appearance of when light is propagated because wave guide ridge end end place low-index material causes is less.
In certain embodiments, by the groove structure parameter described in optimal design the present invention, help to reduce the loss of light field transmitting energy and reduce the device architecture size.Here with Fig. 6 this problem is described.Fig. 7 is the cross sectional representation of y-branch device disclosed by the invention b section in Fig. 1.As shown in Figure 6, between input waveguide ridge 10 and two the output waveguide ridges 20,21 by two grooves 4,5 isolation, groove 4,5 vertical depth are respectively d4, d5, groove 4,5 bottoms are respectively H4, H5 to the vertical range of flat layer bottom, wherein can equate between height H 22 threes of H4, H5 and flat layer, also can be unequal mutually, that is d4, d5 can equal respectively, be less than or greater than with the ridge of groove 4,5 adjacent wave guide ridge high, and its size is in 0.5～1.5 times of high scope of adjacent wave guide ridge ridge.As mentioned before, at the wave guide ridge end face of ridge waveguide in flat layer bottom surface vertical range and the wide certain situation of ridge, the shared ratio regular meeting of energy that is distributed in the ridge district in the ridge waveguide reduces along with the gradually increase of flat layer height H, therefore in the actual optimization design process, can be according to the needs of Light Energy distribution, at different H4, the H5 of optical propagation direction diverse location place design, to realize the transmission of ultra-low loss Light Energy and less physical dimension.As the process of Light Energy from input tapered waveguide ridge structure to the transfer of output tapered waveguide ridge structure, increase H4, H5, so that the Light Energy transfer is faster, after the Light Energy overwhelming majority has been transferred to output gradual change ridge waveguide structure, two hot spots in the output gradual change ridge waveguide structure reduce H4, H5, so that can separate faster.Certainly, also can design asymmetric H4 and H5 and realize that Light Energy is in the asymmetric output of branch's ridge waveguide structure output terminal.
Two output waveguide ridges of the output gradual change ridge waveguide structure of y-branch device disclosed by the invention can be symmetrical or asymmetric about the waveguide axis of input waveguide ridge.Fig. 8 has provided the asymmetric embodiment in two output waveguide ridge positions of y-branch device of the present invention.As shown in Figure 8, two output waveguide ridges 20,21 initiating terminal are positioned at the diverse location of optical propagation direction.The initiating terminal of output waveguide ridge 21 is gone forward in the initiating terminal of output waveguide ridge 20 at optical propagation direction.Like this, on optical propagation direction, along with the appearance of output waveguide ridge 21, the Light Energy in the input gradual change ridge waveguide structure 1 enters in the output waveguide ridge 21 by flat layer first.After output waveguide ridge 20 occurred, the Light Energy of input gradual change ridge waveguide structure 1 will enter in two output waveguide ridges 20,21 by flat layer simultaneously.In this way, can regulate the ratio of the Light Energy distribution of two branch-waveguide ridge output terminals, realize asymmetric output.
In addition, at output waveguide ridge design aspect, except passing through the output waveguide ridge 20 with the same structure size, 21 are designed to about the asymmetric Light Energy of realizing of the waveguide axis of input waveguide ridge outside the asymmetric output of branch's ridge waveguide structure output terminal, can also be by two output gradual change ridge waveguide structures that output waveguide ridge structure parameter is not identical of design, realize that Light Energy is in the asymmetric output of branch's ridge waveguide structure output terminal, for example, can be with the length of two output waveguide ridges, initiating terminal and finish the ridge width of end is designed to the different asymmetric output that realizes Light Energy with the subtended angle philosophy of the waveguide axis of input waveguide ridge.
It is to be noted in addition, dissymmetrical structure among Fig. 7 embodiment, because output waveguide ridge 20,21 initiating terminal position are different, their wide variety rate and and input waveguide ridge 10 between isolated groove 4,5 width also can adjust accordingly, to optimize the splitter performance.For example, when the reference position of output waveguide ridge 21 lags behind output waveguide ridge 20, the width of the isolated groove 5 between output waveguide ridge 21 and the input waveguide ridge 10 can be simultaneously greater than the width of the isolated groove 4 between output waveguide ridge 20 and the input waveguide ridge 10, and the wide variety rate of output waveguide ridge 21 also can be greater than the wide variety rate of output waveguide ridge 20.
Because the Light Energy of y-branch device disclosed by the invention shifts by flat layer and realizes, therefore the initiating terminal of the output ridge waveguide of y-branch device disclosed by the invention can be before the end end of input ridge waveguide, flush afterwards or with it.Fig. 9 has provided the embodiment that the end end of the input waveguide ridge of y-branch device of the present invention flushes with the output terminal of two output waveguide ridges.As shown in Figure 9, the end end of the input waveguide ridge 10 among this embodiment and output waveguide ridge 20,21 initiating terminal are on same cross section d.Two output waveguide ridges 20,21 are by groove 6 isolation, and groove 6 bottoms equate with H22 to the vertical range of flat layer 22 bottoms.In certain embodiments, groove 6 bottoms are unequal to vertical range and the H22 of flat layer 22 bottoms.Along with the width of input waveguide ridge 10 diminishes to finishing end gradually from initiating terminal, the Light Energy proportion of flat layer 11 increases gradually, and the transverse width of light field enlarges gradually.Finish on the cross section d of end at input waveguide ridge 10, the Light Energy in the input gradual change ridge waveguide structure 1 overwhelming majority is transferred to flat layer, and light field is in the flat layer 22 that has laterally extended to output gradual change ridge waveguide structure 2.This moment design will export gradual change ridge waveguide structure 2 two corresponding ridge waveguide patterns of output waveguide ridge be superimposed upon the upper pattern match with inputting gradual change ridge waveguide structure 1 of cross section d, light field just can realize the ultra-low loss transmission so, export subsequently in interior realizations of output gradual change ridge waveguide structure 2 branch, and via branch's ridge waveguide structure.In addition, when the wide rate of change of the ridge of input waveguide ridge 10 increases, the wavefront radian of light field also will increase, and waveguide axis X2 is consistent with the normal direction of the light field wavefront at the initiating terminal place of two output waveguide ridges with X3, therefore the subtended angle of X2 and X3 also correspondingly increases, this just can when realizing that the ultra-low loss Light Energy transmits under satisfied output gradual change ridge waveguide and the pattern match prerequisite of input gradual change ridge waveguide on the d of cross section, reduce the physical dimension of y-branch device.
Figure 10 has provided a kind of 1 * 4 branched structure that is made of y-branch device disclosed by the invention cascade, and it comprises 3 y-branch devices, 3 curved waveguides 7 and two straight wave guide outputs 8.N-1 described y-branch device cascade can be consisted of 1 * N splitter by this mode.
Above embodiment has been described in detail the present invention, and those skilled in the art can make kind of a variation example to the present invention according to the above description.Thereby some details in the embodiment should not consist of limitation of the invention, and the scope that the present invention will define with appended claims is as protection scope of the present invention.
Claims (13)
1. the y-branch device of a ridge waveguide-coupled is characterized in that:
Described y-branch device is comprised of ridge waveguide structure, and described ridge waveguide structure is by making the ridge structure at the flat layer of high-index material and covering low-index material and form;
Described y-branch device is comprised of input gradual change ridge waveguide structure, output gradual change ridge waveguide structure and branch's ridge waveguide structure successively from being input to output;
Described input gradual change ridge waveguide structure is comprised of input waveguide ridge and flat layer, and described input waveguide ridge is narrowed down by wide to finishing the end width gradually from initiating terminal, and the width that finishes to hold is not more than the height of its flat layer;
Described output gradual change ridge waveguide structure is comprised of two output waveguide ridges and flat layer, the both sides of described two described input waveguide ridges of output waveguide ridge apportion, its width is broadened by narrow to finishing end gradually from initiating terminal, and the width of initiating terminal is not more than the height of its flat layer, and the waveguide axis of described two output waveguide ridges becomes certain subtended angle with the waveguide axis of described input waveguide ridge respectively;
Described branch ridge waveguide structure is comprised of two branch-waveguide ridges and flat layer, and described two branch-waveguide ridges link to each other with described two output waveguide ridges respectively;
The flat layer of described input gradual change ridge waveguide structure, output gradual change ridge waveguide structure and branch's ridge waveguide structure is communicated with, and the height of each flat layer is identical, and the wave guide ridge of the wave guide ridge of described input gradual change ridge waveguide structure and described output gradual change ridge waveguide structure is not communicated with, and between each wave guide ridge by trench isolations;
The wide variety rate of described input waveguide ridge is corresponding with wide variety rate and the subtended angle of described two output waveguide ridges, namely when described input waveguide ridge wide variety rate is larger, the wide variety rate of described two output waveguide ridges and subtended angle are also corresponding larger, and vice versa.
2. y-branch device according to claim 1 is characterized in that: the subtended angle between the waveguide axis of the waveguide axis of described two output waveguide ridges and input waveguide ridge is zero.
3. y-branch device according to claim 1 is characterized in that: described two output waveguide ridges are symmetrical or asymmetric about the waveguide axis of described input waveguide ridge.
4. y-branch device according to claim 3 is characterized in that: the waveguide axis of described two output waveguide ridges is consistent in the wavefront normal direction at its initiating terminal place with the input light field.
5. y-branch device according to claim 3 is characterized in that: the tangential direction of any point is consistent all the time in the wavefront normal direction at this some place with the input light field on the waveguide axis of described two output waveguide ridges.
6. it is characterized in that according to claim 4 or 5 described y-branch devices: the initiating terminal of described two output waveguide ridges is at the initiating terminal of described input waveguide ridge and finish between the end.
7. y-branch device according to claim 6 is characterized in that: the groove of isolating described input waveguide ridge and described two output waveguide ridges is symmetrical or asymmetric about the waveguide axis of described input waveguide ridge.
8. y-branch device according to claim 6 is characterized in that: described each channel bottom equates with flat layer height below it or unequal to the vertical range of each flat layer bottom.
9. y-branch device according to claim 8 is characterized in that: described each channel bottom is consistent along optical propagation direction to the vertical range of described each flat layer bottom.
10. y-branch device according to claim 8 is characterized in that: the bottom of described each groove is to the vertical range of described each flat layer bottom along the optical propagation direction first increases and then decreases.
11. the described y-branch device of arbitrary claim in 5 according to claim 1 is characterized in that: the initiating terminal of described two output waveguide ridges can with the end end of described input waveguide ridge on the same cross section vertical with optical propagation direction.
12. according to claim 1 and 2 or 3 described y-branch devices, it is characterized in that: the edge of described input waveguide ridge is parallel or not parallel with described two the output waveguide ridged edges that are adjacent.
13. the 1 * N splitter that is made of claim 1 or 2 or 3 described y-branch devices is characterized in that: described 1 * N splitter is made of N-1 described y-branch device cascade.
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| CN201110265974.9A CN102866457B (en) | 2011-07-05 | 2011-08-29 | The y-branch device of ridge waveguide-coupled and the 1 × N splitter being made up of it |
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| CN2011101868766 | 2011-07-05 | ||
| CN201110265974.9A CN102866457B (en) | 2011-07-05 | 2011-08-29 | The y-branch device of ridge waveguide-coupled and the 1 × N splitter being made up of it |
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| CN102866457B CN102866457B (en) | 2016-12-14 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112394447A (en) * | 2020-11-10 | 2021-02-23 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
| CN112433295A (en) * | 2020-11-10 | 2021-03-02 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
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| CN114114550A (en) * | 2021-11-26 | 2022-03-01 | 中南民族大学 | Silicon-based waveguide-based generator carrying two opposite chiral photon orbital angular momentum |
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| CN112394447A (en) * | 2020-11-10 | 2021-02-23 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
| CN112433295A (en) * | 2020-11-10 | 2021-03-02 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
| CN112433295B (en) * | 2020-11-10 | 2022-08-16 | 武汉光谷信息光电子创新中心有限公司 | Ultra-wideband beam splitting and combining device |
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| CN113376740B (en) * | 2021-06-18 | 2022-11-22 | 南京刻得不错光电科技有限公司 | Light splitting/combining element and photonic device |
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| CN114326101A (en) * | 2022-01-10 | 2022-04-12 | 南通大学 | Design method of adiabatic mode evolver |
| CN114326101B (en) * | 2022-01-10 | 2023-10-13 | 南通大学 | Design method of adiabatic mode evolution device |
| WO2024021873A1 (en) * | 2022-07-27 | 2024-02-01 | 苏州旭创科技有限公司 | Optical coupling device, optical chip and optical module |
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