CN102865821A - Light path balanced type high-speed and high-resolution laser heterodyne interference measurement method and light path balanced type high-speed and high-resolution laser heterodyne interference measurement device - Google Patents
Light path balanced type high-speed and high-resolution laser heterodyne interference measurement method and light path balanced type high-speed and high-resolution laser heterodyne interference measurement device Download PDFInfo
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Abstract
The invention relates to a light path balanced type high-speed and high-resolution laser heterodyne interference measurement method and a light path balanced type high-speed and high-resolution laser heterodyne interference measurement device, belonging to the technical field of laser application. The invention adopts reference light and measurement light which are spatially separated from each other, and a light path balance design is carried out; meanwhile, the method generates two interference measurement signals with opposite Doppler frequency shifts, and selectively uses the two measurement signals for carrying out interference measurement according to the movement direction and speed of a measured target. The method and the device provided by invention not only reduce the influence of temperature change on the measurement, but also eliminate the frequency aliasing phenomenon in an interferometer, thus improving the measurement accuracy of heterodyne interference measurement; and furthermore, the problem of the limitation of laser source frequency difference to the measurement speed can be solved.
Description
Technical field
The invention belongs to the laser application technique field, relate generally to a kind of optical-circuit balance type high speed, high resolution laser heterodyne interference measuring method and device.
Background technology
Laser heterodyne interference is measured because of it to have that antijamming capability is strong, measurement range is large, signal to noise ratio (S/N ratio) is high and is easy to realize that the characteristics such as high precision are widely used in the fields such as ultraprecise processing, litho machine and three coordinate measuring machine.Along with the development of ultraprecise engineering, more and more higher requirement is proposed for machining precision and production efficiency; While has also all proposed new challenge to measuring accuracy, resolution and the speed of difference interference measuring.
In laser heterodyne interference was measured, nonlinearity erron had seriously limited the further raising of measuring accuracy and resolution, and Chinese scholars has been carried out a large amount of research to the laser heterodyne interference nonlinearity erron.Nonlinearity erron comes from the optics aliasing in the optical interference circuit, and traditional interferometer measuration system can't be avoided the optics aliasing in the interferometry, has limited the raising of its measuring accuracy and resolution.
T.L.Schmitz and J.F.Beckwith have proposed the method (Ascousto-optic displacement-measureing interferometer:a new heterodyne interferometer with Anstromlevel periodic error.Journal ofModern Optics 49, pages 2105-2114) that a kind of interferometer is transformed.Compared to traditional measuring method, the method as spectroscope, is separated with measuring beam acousto-optic frequency shifters with reference beam.The method can reduce reference light and measure the light frequency aliasing, is conducive to the nonlinearity erron that reduces to measure, thereby improves measuring accuracy and resolution.But this apparatus structure is complicated and special, in can't being widely used in ultraprecise processing and measuring.
Ki-Nam Joo etc. has developed a kind of new pattern laser interferometry structure (Simple heterodyne laser interferometer with subnanometer periodic errors.Optics Letters/Vol.34, No.3/Fe bruary 1,2009).This structure is that reference beam spatially separates with measuring beam, has eliminated the frequency alias in the interferometry, eliminates nonlinearity erron fully, thereby improves measuring accuracy and Measurement Resolution.In addition, this apparatus structure is simple, and cost is low, compared to front a kind of measuring method, more is conducive to the application in the ultra precise measurement field.But the method measuring speed still is subjected to the restriction of light source frequency difference, has limited its being widely used in the high speed fields of measurement.
Above several interferometric method and device all exist measuring speed to be subjected to the problem of light source frequency difference restriction.Along with ultraprecise is processed improving constantly that measuring speed requires, the frequency difference of interferometer light source also constantly increases, thereby causes the structure of LASER Light Source to become increasingly complex, and cost is more and more expensive, has seriously limited the widespread use of laser interferometry.And Measurement Resolution is conflicted with the measuring speed existence.For measuring speed and the resolution that improves simultaneously interferometer, Chinese scholars has been carried out a large amount of research and has been proposed corresponding solution signal processing system, but the chip of the general all complex structures of existing signal processing system, cost costliness and a lot of particular design of needs; And be subjected to the restriction of existing semi-conductor chip level, interferometry performance boost difficulty.
In sum, existing laser heterodyne interference measuring method all can't satisfy the ultraprecise in-process measurement simultaneously to the requirement of high precision and the high measurement speed of interferometer, has seriously limited the development in ultraprecise in-process measurement field.
Summary of the invention
Deficiency for above-mentioned existing laser heterodyne interferometer, the present invention proposes a kind of optical-circuit balance type high speed, high resolution laser heterodyne interference measuring method and device, improve the measuring accuracy of laser heterodyne interference, solve the LASER Light Source frequency difference to the problem of measuring speed restriction.
Purpose of the present invention is achieved through the following technical solutions:
A kind of optical-circuit balance type high speed, high resolution laser heterodyne interference measuring method, the method step is as follows:
(1) frequency stabilized laser output two bundle frequencies are respectively f
1, f
2Parallel beam;
The fraction of (2) two parallel beams directly is converted to the reference signal that laser heterodyne interference is measured after surveying, its frequency difference value is f
b=f
1-f
2, be expressed as I
r∝ cos (2 π f
bT);
(3) remaining two parallel beams all are divided into two parts by spectroscope, and the reflecting part is as the reference light beam, and transmissive portion is as measuring beam;
(4) reference beam contains frequency and is respectively f
1, f
2Two parallel beams, reference beam is at first by first polarization spectroscope transmission, then after quarter-wave plate and level crossing effect, return first polarization spectroscope, this moment the polarized reference beam direction rotation 90 °, reflected by first polarization spectroscope, and then referenced prismatic reflection returns first polarization spectroscope, and reflected by first polarization spectroscope, after quarter-wave plate and level crossing effect, again return first polarization spectroscope, this moment, the polarized reference beam direction was rotated again 90 °, then returned spectroscope through first polarization spectroscope transmission;
(5) measuring beam contains frequency and is respectively f
1, f
2Two parallel beams, measuring beam is transmitted after entering second polarization spectroscope, then after quarter-wave plate and level crossing effect, return second polarization spectroscope, this moment, the polarization direction of measuring beam rotated 90 °, be reflected into measuring prism, then measured prism and second polarization spectroscope reflection, this reflected light returns second polarization spectroscope again again after quarter-wave plate and level crossing effect, this moment, the polarization direction of measuring beam rotated again 90 °, was returned spectroscope by second polarization spectroscope transmission;
(6) by regulating reference prism and measuring prism so that frequency is f
1Measuring beam and frequency be f
2Reference beam interfere, produce a drive test amount signal, be expressed as I
M1∝ cos[2 π (f
b+ Δ f) t]; Frequency is f
2Measuring beam and frequency be f
1Reference beam interfere, produce another drive test amount signal, be expressed as I
M2∝ cos[2 π (f
b-Δ f) t], two measuring-signals have the Doppler shift of identical, the opposite in sign of size, and its frequency is respectively f
b+ Δ f and f
b-Δ f;
(7) two measuring-signals are sent into respectively two identical phasometer A and phasometer B after photodetector is surveyed, wherein, phasometer A is f for the treatment of frequency
bThe measuring-signal of+Δ f, phasometer B is f for the treatment of frequency
bThe measuring-signal of-Δ f;
(8) according to direction of motion and the movement velocity of measured target transverse plane mirror, use on-off circuit between phasometer A and phasometer B, to select;
(9) according to selected phasometer A or phasometer B the displacement of measured target is calculated.
Two parallel beams of described frequency stabilized laser output are horizontal linear polarization light or perpendicular linear polarization light.
When described phasometer uses on-off circuit to select, when measured target transverse plane mirror positive movement speed is higher than setting value V
1The time, selected phase meter B; When measured target transverse plane mirror negative movement speed is higher than setting value V
2The time, selected phase meter A; Wherein, establishing measured target transverse plane mirror is positive dirction away from the direction of second polarization spectroscope.
A kind of optical-circuit balance type high speed, high resolution laser heterodyne interference measurement mechanism, this device comprises frequency stabilized laser, spectroscope, polarization spectroscope B, measuring prism, quarter-wave plate B, level crossing B, photodetector A, photodetector B, and this device also comprises polarization spectroscope A, quarter-wave plate A, level crossing A, reference prism, phasometer A, phasometer B, on-off circuit, metering circuit; Wherein, spectroscope is positioned at the output terminal of frequency stabilized laser; Polarization spectroscope A, quarter-wave plate A and level crossing A are placed on spectroscopical reflection direction successively, and reference prism is positioned on the reflection direction of polarization spectroscope A; Polarization spectroscope B, quarter-wave plate B and level crossing B are placed on spectroscopical transmission direction successively, and measuring prism is positioned at the reflection direction of polarization spectroscope B; Spectroscope output two-way interferometric beams wherein one the tunnel meets photodetector A, and another road meets photodetector B; The output termination phasometer A input end of photodetector A, photodetector B output termination phasometer B input end; The reference signal output terminal of frequency stabilized laser is connected input end with phasometer A respectively and is connected with phasometer B, the output terminal of phasometer A and phasometer B connects the on-off circuit input end simultaneously; The output termination metering circuit input end of on-off circuit;
Described reference prism is prism of corner cube, and measuring prism is right-angle prism simultaneously.
Described reference prism is right-angle prism, and measuring prism is prism of corner cube simultaneously.
Described reference prism is comprised of two prism of corner cubes, and measuring prism is prism of corner cube simultaneously.
Described reference prism is prism of corner cube, and measuring prism is comprised of two prism of corner cubes simultaneously.
The present invention has following characteristics and good result:
(1) among the present invention, reference light spatially separates with measurement light, lap over do not occur before arriving detector, has eliminated the root of the nonlinearity erron generation of interferometer.
(2) adopt polarization splitting prism to carry out beam separation in the conventional interference instrument, interference mirror group adjusting difficulty is high and cost is high; Use common unpolarized Amici prism among the present invention instead and replace polarization splitting prism, because of its polarization state to LASER Light Source change insensitive, thereby greatly reduce the adjusting difficulty of interference mirror group, simultaneously, use unpolarized Amici prism can reduce the interferometer cost.
(3) among the present invention, two measuring-signals that interferometer produces have that size is identical, the Doppler shift of opposite in sign, according to movement direction of object two measuring-signals are selected, and can guarantee that Doppler shift makes frequency difference increase all the time.Compared to traditional interferometer, the interferometer among the present invention makes the no longer restriction of Stimulated Light light source frequency difference of measuring speed, during traditional little frequency difference laser instrument also can be applied to measure at a high speed.
(4) among the present invention, because the laser frequency difference is less, signal processing system can be utilized ordinary clock signal acquisition high resolving power, has simplified the design of Signal Measurement System, has reduced the cost of system.
Description of drawings
Accompanying drawing is apparatus of the present invention structural representation
Among the figure, 1 frequency stabilized laser, 2 spectroscopes, 3 polarization spectroscope A, 4 quarter-wave plate A, 5 level crossing A, 6 reference prisms, 7 polarization spectroscope B, 8 measuring prisms, 9 quarter-wave plate B, 10 level crossing B, 11 photodetector A, 12 photodetector B, 13 phasometer A, 14 phasometer B, 15 on-off circuits, 16 metering circuits.
Embodiment
Below in conjunction with accompanying drawing example of the present invention is described in detail.
A kind of optical-circuit balance type high speed, high resolution laser heterodyne interference measurement mechanism, this device comprises frequency stabilized laser 1, spectroscope 2, polarization spectroscope B7, measuring prism 8, quarter-wave plate B9, level crossing B10, photodetector A11, photodetector B12, it is characterized in that this device also comprises polarization spectroscope A3, quarter-wave plate A4, level crossing A5, reference prism 6, phasometer A13, phasometer B14, on-off circuit 15, metering circuit 16; Wherein, spectroscope 2 is positioned at the output terminal of frequency stabilized laser 1; Polarization spectroscope A3, quarter-wave plate A4 and level crossing A5 are placed on the reflection direction of spectroscope 2 successively, and reference prism 6 is positioned on the reflection direction of polarization spectroscope A3; Polarization spectroscope B7, quarter-wave plate B9 and level crossing B10 are placed on the transmission direction of spectroscope 2 successively, and measuring prism 8 is positioned at the reflection direction of polarization spectroscope B7; Spectroscope 2 output two-way interferometric beams wherein one the tunnel meet photodetector A11, and another road meets photodetector B12; The output termination phasometer A13 input end of photodetector A11, photodetector B12 output termination phasometer B14 input end; The reference signal output terminal of frequency stabilized laser 1 is connected input end with phasometer A13 respectively and is connected with phasometer B14, the output terminal of phasometer A13 and phasometer B14 connects on-off circuit 15 input ends simultaneously; Output termination metering circuit 16 input ends of on-off circuit 15;
A kind of optical-circuit balance type high speed, high resolution laser heterodyne interference measuring method, the method step is as follows:
(1) frequency stabilized laser 1 output two bundle frequencies are respectively f
1, f
2Parallel beam;
The fraction of (2) two parallel beams directly is converted to the reference signal that laser heterodyne interference is measured after surveying, its frequency difference value is f
b=f
1-f
2, be expressed as I
r∝ cos (2 π f
bT);
(3) remaining two parallel beams all are divided into two parts by spectroscope 2, and the reflecting part is as the reference light beam, and transmissive portion is as measuring beam;
(4) reference beam contains frequency and is respectively f
1, f
2Two parallel beams, reference beam at first is polarized spectroscope A3 transmission, then after quarter-wave plate A4 and level crossing A5 effect, return polarization spectroscope A3, this moment the polarized reference beam direction rotation 90 °, be polarized spectroscope A3 reflection, and then referenced prism 6 is reflected back polarization spectroscope A3, and be polarized spectroscope A3 reflection, after quarter-wave plate A4 and level crossing A5 effect, again return polarization spectroscope A3, this moment, the polarized reference beam direction was rotated again 90 °, then returned spectroscope 2 through polarization spectroscope A3 transmission;
(5) measuring beam contains frequency and is respectively f
1, f
2Two parallel beams, measuring beam is transmitted after entering polarization spectroscope B7, then after quarter-wave plate B9 and level crossing B10 effect, return polarization spectroscope B7, this moment, the polarization direction of measuring beam rotated 90 °, be reflected into measuring prism 8, then measured prism 8 and polarization spectroscope B7 reflection, this reflected light returns polarization spectroscope B7 again again after quarter-wave plate B9 and level crossing B10 effect, this moment, the polarization direction of measuring beam rotated again 90 °, was polarized spectroscope B7 transmission and returned spectroscope 2;
(6) by regulating reference prism 6 and measuring prism 8 so that frequency is f
1Measuring beam and frequency be f
2Reference beam interfere, produce a drive test amount signal, be expressed as I
M1∝ cos[2 π (f
b+ Δ f) t]; Frequency is f
2Measuring beam and frequency be f
1Reference beam interfere, produce another drive test amount signal, be expressed as I
M2∝ cos[2 π (f
b-Δ f) t], two measuring-signals have the Doppler shift of identical, the opposite in sign of size, and its frequency is respectively f
b+ Δ f and f
b-Δ f;
(7) two measuring-signals are surveyed by photodetector A11 and photodetector B12 respectively;
(8) photodetector A11 output frequency is f
bThe measuring-signal of+Δ f, and signal sent among the phasometer A13 process;
(9) photodetector B 12 output frequencies are f
bThe measuring-signal of-Δ f, and signal sent among the phasometer B14 process;
(10) processing signals of phasometer A13 and phasometer B14 is sent into on-off circuit 15 simultaneously, selects between the two phase place meter according to level crossing B10 direction of motion and the movement velocity of measured target end; The measurement range of phasometer A13 and phasometer B14 exists a part overlapping.This lap as " hysteresis district " that phasometer switches, is higher than the upper limit V in " hysteresis district " when level crossing B10 positive movement speed
1The time, switching to phasometer B14 by phasometer A13, phasometer B14 output is admitted to phase accumulator.In like manner, be lower than the lower limit-V in " hysteresis district " when level crossing B10 movement velocity
2The time, switch back phasometer A13 by phasometer B14.When measured target speed is in " hysteresis district ", do not carry out the phasometer blocked operation, thereby eliminated circuit noise and speed noise to the impact of blocked operation, wherein, establishing level crossing B10 is positive dirction away from the direction of polarization spectroscope B7.
(11) signal after will selecting through on-off circuit 15 be sent in the metering circuit 16 and process, thereby obtain the level crossing B10 movable information of measured target end.
Claims (8)
1. optical-circuit balance type high speed, high resolution laser heterodyne interference measuring method is characterized in that the method step is as follows:
(1) frequency stabilized laser output two bundle frequencies are respectively f
1, f
2Parallel beam;
The fraction of (2) two parallel beams directly is converted to the reference signal that laser heterodyne interference is measured after surveying, its frequency difference value is f
b=f
1-f
2, be expressed as I
r∝ cos (2 π f
bT);
(3) remaining two parallel beams all are divided into two parts by spectroscope, and the reflecting part is as the reference light beam, and transmissive portion is as measuring beam;
(4) reference beam contains frequency and is respectively f
1, f
2Two parallel beams, reference beam is at first by first polarization spectroscope transmission, then after quarter-wave plate and level crossing effect, return first polarization spectroscope, this moment the polarized reference beam direction rotation 90 °, reflected by first polarization spectroscope, and then referenced prismatic reflection returns first polarization spectroscope, and reflected by first polarization spectroscope, after quarter-wave plate and level crossing effect, again return first polarization spectroscope, this moment, the polarized reference beam direction was rotated again 90 °, then returned spectroscope through first polarization spectroscope transmission;
(5) measuring beam contains frequency and is respectively f
1, f
2Two parallel beams, measuring beam is transmitted after entering second polarization spectroscope, then after quarter-wave plate and level crossing effect, return second polarization spectroscope, this moment, the polarization direction of measuring beam rotated 90 °, be reflected into measuring prism, then measured prism and second polarization spectroscope reflection, this reflected light returns second polarization spectroscope again again after quarter-wave plate and level crossing effect, this moment, the polarization direction of measuring beam rotated again 90 °, was returned spectroscope by second polarization spectroscope transmission;
(6) by regulating reference prism and measuring prism so that frequency is f
1Measuring beam and frequency be f
2Reference beam interfere, produce a drive test amount signal, be expressed as I
M1∝ cos[2 π (f
b+ Δ f) t]; Frequency is f
2Measuring beam and frequency be f
1Reference beam interfere, produce another drive test amount signal, be expressed as I
M2∝ cos[2 π (f
b-Δ f) t], two measuring-signals have the Doppler shift of identical, the opposite in sign of size, and its frequency is respectively f
b+ Δ f and f
b-Δ f;
(7) two measuring-signals are sent into respectively two identical phasometer A and phasometer B after photodetector is surveyed, wherein, phasometer A is f for the treatment of frequency
bThe measuring-signal of+Δ f, phasometer B is f for the treatment of frequency
bThe measuring-signal of-Δ f;
(8) according to direction of motion and the movement velocity of measured target transverse plane mirror, use on-off circuit between phasometer A and phasometer B, to select;
(9) according to selected phasometer A or phasometer B the displacement of measured target is calculated.
2. optical-circuit balance type high speed, high resolution laser heterodyne interference measuring method according to claim 1 is characterized in that two parallel beams of frequency stabilized laser output are horizontal linear polarization light or perpendicular linear polarization light.
3. optical-circuit balance type high speed, high resolution laser heterodyne interference measuring method according to claim 1 is when is characterized in that using on-off circuit to select, when measured target transverse plane mirror positive movement speed is higher than setting value V
1The time, selected phase meter B; When measured target transverse plane mirror negative movement speed is higher than setting value V
2The time, selected phase meter A; Wherein, establishing measured target transverse plane mirror is positive dirction away from the direction of second polarization spectroscope.
4. optical-circuit balance type high speed, high resolution laser heterodyne interference measurement mechanism, this device comprises frequency stabilized laser (1), spectroscope (2), polarization spectroscope B (7), measuring prism (8), quarter-wave plate B (9), level crossing B (10), photodetector A (11), photodetector B (12) is characterized in that this device also comprises polarization spectroscope A (3), quarter-wave plate A (4), level crossing A (5), reference prism (6), phasometer A (13), phasometer B (14), on-off circuit (15), metering circuit (16); Wherein, spectroscope (2) is positioned at the output terminal of frequency stabilized laser (1); Polarization spectroscope A (3), quarter-wave plate A (4) and level crossing A (5) are placed on the reflection direction of spectroscope (2) successively, and reference prism (6) is positioned on the reflection direction of polarization spectroscope A (3); Polarization spectroscope B (7), quarter-wave plate B (9) and level crossing B (10) are placed on the transmission direction of spectroscope (2) successively, and measuring prism (8) is positioned at the reflection direction of polarization spectroscope B (7); Spectroscope (2) output two-way interferometric beams wherein one the tunnel meets photodetector A (11), and another road meets photodetector B (12); Output termination phasometer A (13) input end of photodetector A (11), photodetector B (12) output termination phasometer B (14) input end; The reference signal output terminal of frequency stabilized laser (1) is connected 14 with phasometer A (13) with phasometer B respectively) input end be connected, the output terminal of phasometer A (13) and phasometer B (14) connects on-off circuit (15) input end simultaneously; Output termination metering circuit (16) input end of on-off circuit (15).
5. high speed, high resolution laser heterodyne interference measurement mechanism according to claim 4, when it is characterized in that reference prism (6) for prism of corner cube, measuring prism (8) is right-angle prism.
6. high speed, high resolution laser heterodyne interference measurement mechanism according to claim 4, when it is characterized in that reference prism (6) for right-angle prism, measuring prism (8) is prism of corner cube.
7. high speed, high resolution laser heterodyne interference measurement mechanism according to claim 4, when it is characterized in that reference prism (6) is comprised of two prism of corner cubes, measuring prism (8) is prism of corner cube.
8. high speed, high resolution laser heterodyne interference measurement mechanism according to claim 4, when it is characterized in that reference prism (6) for prism of corner cube, measuring prism (8) is comprised of two prism of corner cubes.
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| CN104767112A (en) * | 2015-03-23 | 2015-07-08 | 哈尔滨工业大学 | Orthogonal dual-frequency laser generating method and device based on dual-polarization spectroscope light combining |
| NL2026398B1 (en) * | 2020-03-02 | 2021-10-14 | Harbin Inst Technology | Heterodyne Laser Interferometer Based on Integrated Secondary Beam Splitting Component |
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| CN104767112A (en) * | 2015-03-23 | 2015-07-08 | 哈尔滨工业大学 | Orthogonal dual-frequency laser generating method and device based on dual-polarization spectroscope light combining |
| CN104767112B (en) * | 2015-03-23 | 2017-12-08 | 哈尔滨工业大学 | Orthogonal double-frequency laser generation method and device based on dual-polarization spectroscope closing light |
| NL2026398B1 (en) * | 2020-03-02 | 2021-10-14 | Harbin Inst Technology | Heterodyne Laser Interferometer Based on Integrated Secondary Beam Splitting Component |
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