CN102820806B - Piezoelectric micro-energy resource generator with double interdigital electrodes - Google Patents
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- 239000002184 metal Substances 0.000 claims abstract description 48
- 229910052751 metal Inorganic materials 0.000 claims abstract description 48
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 claims description 5
- 229910000906 Bronze Inorganic materials 0.000 claims description 3
- 239000002033 PVDF binder Substances 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 3
- 229910001416 lithium ion Inorganic materials 0.000 description 4
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 3
- 238000011176 pooling Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明属于压电技术领域，涉及双叉指压电微能源发生器，具体是一种给传感系统、致动系统、智能系统等各种嵌入式微系统提供能源的装置。 The invention belongs to the field of piezoelectric technology, and relates to a two-digit piezoelectric micro-energy generator, in particular to a device for providing energy to various embedded micro-systems such as a sensing system, an actuating system, and an intelligent system.
背景技术 Background technique
压电微能源发生器是一种通过自动采集环境中的振动能量，供给电路系统、传感器系统能量的装置，可用于植入人体的生物传感器、置于汽车轮胎内部的胎压监测系统、工厂电机中的分布式传感器系统等。利用环境的振动能来给系统供电的微能源装置，相对于传统的锂电池具有输出功率密度不随时间变化的特点，如：使用一年，压电式微能源发生器的输出功率密度为250μW/ cm3，不可充电锂离子电池的输出功率密度为45μW/ cm3；使用十年，压电微能源发生器的输出功率密度依然为250μW/ cm3，不可充电Li离子电池的输出功率密度则为35μW/ cm3。从中可以看出，压电式微能源发生器的输出功率密度高于锂离子电池的输出功率密度，且不会像锂离子电池那样，输出功率密度随时间的推移而降低。 Piezoelectric micro-energy generator is a device that automatically collects vibration energy in the environment and supplies energy to circuit systems and sensor systems. It can be used for biosensors implanted in the human body, tire pressure monitoring systems placed inside car tires, and factory motors. Distributed sensor systems in etc. The micro-energy device that uses the vibration energy of the environment to power the system has the characteristics that the output power density does not change with time compared to the traditional lithium battery. For example, the output power density of the piezoelectric micro-energy generator is 250μW/cm2 after one year of use. 3. The output power density of the non-rechargeable lithium-ion battery is 45μW/cm 3 ; after ten years of use, the output power density of the piezoelectric micro-energy generator is still 250μW/cm 3 , and the output power density of the non-rechargeable Li-ion battery is 35μW / cm 3 . It can be seen from the figure that the output power density of the piezoelectric micro-energy generator is higher than that of the lithium-ion battery, and the output power density will not decrease over time like the lithium-ion battery.
目前压电式微能源发生器多采用悬梁结构，通常基于d33和d31两种模式。基于d33模式的压电悬梁微能源发生器的具有高输出电压的特点，但电荷低。 At present, the piezoelectric micro-energy generator mostly adopts the cantilever structure, usually based on two modes of d33 and d31. The piezoelectric cantilever microenergy generator based on the d33 mode has the characteristics of high output voltage but low charge.
发明内容 Contents of the invention
本发明的目的就是克服现有技术的不足，提供一种高输出功率密度的双叉指电极式压电微能源发生器，适合在生物传感器、胎压监测、电机检测等系统中使用。 The purpose of the present invention is to overcome the deficiencies of the prior art, and provide a double interdigitated electrode type piezoelectric micro-energy generator with high output power density, which is suitable for use in systems such as biosensors, tire pressure monitoring, and motor detection.
本发明包括基座、基板、压电片、插指电极。 The invention includes a base, a substrate, a piezoelectric sheet, and an interpolated electrode.
所述的基座的截面为L形，包括水平底座和竖直设置在水平底座上的安装座。 The section of the base is L-shaped, including a horizontal base and a mounting seat vertically arranged on the horizontal base.
所述的基板的固定端固定设置在安装座上、自由端悬空；所述的基板为长条形的金属片，采用弹性金属材料；基板的两面分别设置有压电片，压电片的一面完全覆盖基板表面，另一面设置有插指电极。 The fixed end of the substrate is fixedly arranged on the mounting seat, and the free end is suspended in the air; the substrate is a strip-shaped metal sheet made of elastic metal material; two sides of the substrate are respectively provided with piezoelectric sheets, and one side of the piezoelectric sheet is The surface of the substrate is completely covered, and the other side is provided with interdigitated electrodes.
所述插指电极为导电金属片或金属膜，覆盖在压电片上；每个插指电极包括两个单边电极，每个单边电极包括多个平行的金属指条，多根金属指条通过汇集金属条连接。位于同一压电片上的两个单边电极的金属指条交错设置，形成插指电极；所有金属指条的宽度a相等，同一插指电极的两个相邻金属指条的间隙b为金属指条宽度a的1.5～5倍。每个单边电极连接有引线。 The finger electrode is a conductive metal sheet or metal film, covered on the piezoelectric sheet; each finger electrode includes two unilateral electrodes, and each unilateral electrode includes a plurality of parallel metal fingers, and the plurality of metal fingers Connected by pooling metal strips. The metal fingers of two unilateral electrodes located on the same piezoelectric sheet are interlaced to form interdigitated electrodes; the width a of all metal fingers is equal, and the gap b between two adjacent metal fingers of the same interpolated electrode is the metal finger. 1.5 to 5 times the strip width a. Each unilateral electrode is connected with a lead wire.
位于基板两侧的两个插指电极的金属指条在基板上的投影交错设置，形成栅状，相邻两个金属指条在基板上的投影的间隙c相同。 The projections of the metal finger strips of the two inter-finger electrodes located on both sides of the substrate on the substrate are staggered to form a grid shape, and the gap c between the projections of two adjacent metal finger strips on the substrate is the same.
所述基板的材料为磷青铜，所述压电片的材料为掺杂锆钛酸铅陶瓷、或ZnO、或AlN、或PVDF。 The material of the substrate is phosphor bronze, and the material of the piezoelectric sheet is doped lead zirconate titanate ceramics, or ZnO, or AlN, or PVDF.
工作时，基板自由端在受力或者共振的情况下上下移动，压电片弯曲，水平轴向形变产生的电能由同层的插指电极取出（即利用d33振动模式发电），垂直轴向形变产生的电能由对向插指电极取出（即利用d31振动模式发电）。本发明在充分考虑悬梁式压电微能源发生器应力分布的特点基础上，提出双叉指电极形式的压电微能源发生器，提高了输出功率密度。 When working, the free end of the substrate moves up and down under the condition of force or resonance, the piezoelectric sheet bends, and the electric energy generated by the horizontal axial deformation is taken out by the finger electrode on the same layer (that is, the d33 vibration mode is used to generate electricity), and the vertical axial deformation The generated electric energy is taken out by the opposite interfinger electrode (that is, the d31 vibration mode is used to generate electricity). On the basis of fully considering the characteristics of the stress distribution of the cantilever-type piezoelectric micro-energy generator, the present invention proposes a piezoelectric micro-energy generator in the form of double interdigitated electrodes, which improves the output power density.
附图说明 Description of drawings
图1为本发明的剖面结构示意图； Figure 1 is a schematic cross-sectional structure diagram of the present invention;
图2为本发明的俯视结构示意图。 Fig. 2 is a schematic top view of the structure of the present invention.
具体实施方式 Detailed ways
如图1和2所示，双叉指电极式压电微能源发生器包括基座、基板、压电片、插指电极。 As shown in Figures 1 and 2, the piezoelectric micro-energy generator with two interdigitated electrodes includes a base, a substrate, a piezoelectric sheet, and interdigitated electrodes.
基座的截面为L形，包括水平底座1-1和竖直设置在水平底座上的安装座1-2。 The cross-section of the base is L-shaped, including a horizontal base 1-1 and an installation base 1-2 vertically arranged on the horizontal base.
基板2的固定端固定设置在安装座1-2上、自由端悬空。基板为长条形的金属片，采用弹性金属材料，如磷青铜。基板的两面分别设置有压电片3-1和3-2，压电片的一面完全覆盖基板2表面，另一面设置有插指电极，压电片的材料为掺杂锆钛酸铅陶瓷、或ZnO、或AlN、或PVDF。 The fixed end of the substrate 2 is fixedly arranged on the mounting seat 1-2, and the free end is suspended in the air. The substrate is a strip-shaped metal sheet made of elastic metal material, such as phosphor bronze. The two sides of the substrate are respectively provided with piezoelectric sheets 3-1 and 3-2, one side of the piezoelectric sheet completely covers the surface of the substrate 2, and the other side is provided with interdigitated electrodes, and the material of the piezoelectric sheet is doped lead zirconate titanate ceramics, Or ZnO, or AlN, or PVDF.
插指电极为导电金属片或金属膜，覆盖在压电片上。位于基板2上部的插指电极（图2中实线所画）包括两个单边电极，每个单边电极包括多个平行的金属指条4-1-1，多根金属指条4-1-1通过汇集金属条4-1-2连接。位于基板2下部的插指电极同样包括两个单边电极（图2中虚线所画），每个单边电极包括多个平行的金属指条4-2-1，多根金属指条4-2-1通过汇集金属条4-2-2连接。 The finger electrode is a conductive metal sheet or a metal film, which is covered on the piezoelectric sheet. The finger electrode (drawn by the solid line in Fig. 2) located on the upper part of the substrate 2 includes two unilateral electrodes, and each unilateral electrode includes a plurality of parallel metal finger strips 4-1-1, and multiple metal finger strips 4-1-1 1-1 connected by pooling metal strips 4-1-2. The finger electrode located at the lower part of the substrate 2 also includes two unilateral electrodes (drawn by dotted lines in Figure 2), each unilateral electrode includes a plurality of parallel metal fingers 4-2-1, and multiple metal fingers 4- 2-1 are connected by pooling metal strips 4-2-2.
位于同一压电片上的两个单边电极的金属指条交错设置，形成插指电极，如图2中的实线金属指条和虚线金属指条；所有金属指条的宽度a相等，同一插指电极的两个相邻金属指条的间隙b为金属指条宽度a的1.5～5倍。每个单边电极连接有引线。 The metal fingers of the two unilateral electrodes on the same piezoelectric sheet are interlaced to form interpolated electrodes, such as the solid-line metal fingers and dotted-line metal fingers in Figure 2; the width a of all metal fingers is equal, and the same interpolation The gap b between two adjacent metal fingers of the finger electrode is 1.5 to 5 times the width a of the metal fingers. Each unilateral electrode is connected with a lead wire.
位于基板两侧的两个插指电极的金属指条在基板上的投影交错设置，形成栅状，相邻两个金属指条在基板上的投影的间隙c相同。 The projections of the metal finger strips of the two inter-finger electrodes located on both sides of the substrate on the substrate are staggered to form a grid shape, and the gap c between the projections of two adjacent metal finger strips on the substrate is the same.
工作时，基板自由端在受力或者共振的情况下上下移动，压电层弯曲形变，导致压电表面束缚电荷的改变，引起电场的变化，推动自由电子的移动，此时压电层两侧的叉指电极层中就会有交流电输出。将输出的交流电流经整流、滤波后存储起来可供给电子装置。 When working, the free end of the substrate moves up and down under the condition of force or resonance, and the piezoelectric layer bends and deforms, resulting in a change of the bound charge on the piezoelectric surface, causing a change in the electric field, and promoting the movement of free electrons. At this time, the piezoelectric layer on both sides There will be alternating current output in the interdigitated electrode layer. The output AC current is rectified and filtered and then stored for supply to electronic devices.
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| CN104270034A (en) * | 2014-10-20 | 2015-01-07 | 吉林大学 | Curved surface piezoelectric power generation cantilever beam |
| CN106921310B (en) * | 2017-05-02 | 2019-03-08 | 西安电子科技大学 | A kind of electric field energy collection device |
| CN107623068B (en) * | 2017-09-18 | 2020-11-27 | 中北大学 | Flexible and stretchable piezoelectric nanogenerator based on interdigitated electrode structure and preparation method |
| CN107870350B (en) * | 2017-12-13 | 2023-12-15 | 中国地质大学（武汉） | Differential dual-piezoelectric-patch geophone core and piezoelectric geophone |
| CN113824423B (en) * | 2021-09-13 | 2023-08-04 | 江苏卓胜微电子股份有限公司 | Transducer structure for improving Q value and inhibiting transverse mode and surface acoustic wave resonator |
| CN114509651B (en) * | 2022-04-15 | 2022-07-19 | 湖北工业大学 | GIS partial discharge external ultrasonic and UHF integrated sensor and detection method |
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