CN102820806B - Piezoelectric micro-energy resource generator with double interdigital electrodes - Google Patents
Piezoelectric micro-energy resource generator with double interdigital electrodes Download PDFInfo
- Publication number
- CN102820806B CN102820806B CN201210306907.1A CN201210306907A CN102820806B CN 102820806 B CN102820806 B CN 102820806B CN 201210306907 A CN201210306907 A CN 201210306907A CN 102820806 B CN102820806 B CN 102820806B
- Authority
- CN
- China
- Prior art keywords
- substrate
- metal
- electrode
- piezoelectric
- interdigital
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002184 metal Substances 0.000 claims abstract description 44
- 229910052751 metal Inorganic materials 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 35
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 229910000906 Bronze Inorganic materials 0.000 claims description 3
- 239000002033 PVDF binder Substances 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 3
- 229910001416 lithium ion Inorganic materials 0.000 description 4
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a piezoelectric micro-energy resource generator with double interdigital electrodes . Existing piezoelectric cantilever micro-energy resource generators are low in electric charge output. A fixed end of a substrate is fixedly arranged on a mounting seat, a free end of the substrate is suspended, piezoelectric patches are arranged on two faces of the substrate respectively, one face of each piezoelectric patch is completely coated on the surface of the substrate, the other face of each piezoelectric patch is provided with an interdigital electrode, each interdigital electrode comprises two single-sided electrodes, each single-sided electrode comprises multiple metal interdigital strips formed by connecting metal strips gathered, the metal interdigital strips of two single-sided electrodes positioned on the same piezoelectric patch are arranged in a staggered manner, widths of all metal interdigital strips are equal, a clearance between each two adjacent metal interdigital strips of the same interdigital electrode is 1.5-5 times of the width of the metal interdigital strips, and clearances of projections of two adjacent metal interdigital strips on the substrate. On the basis of taking full consideration on characteristics of stress distribution of cantilever micro-energy resource generators, the piezoelectric micro-energy resource generator with the double interdigital electrodes is introduced, so that output power density is improved.
Description
Technical field
The invention belongs to technical field of piezoelectricity, relate to two interdigital piezoelectric micromotor power generator, specifically a kind of device providing the energy to the various Embedded micro-systems such as sensor-based system, actuating system, intelligent system.
Background technology
Piezoelectric micromotor power generator is a kind of vibrational energy by automatically gathering in environment, the device of supply circuit system, sensing system energy, can be used for the biology sensor of implant into body, is placed in the distributed sensor system etc. of the tire pressure monitoring system of automobile tire inside, factory's motor.The vibrational energy of environment is utilized to come, to micro-energy source device of system power supply, to have the time-independent feature of output power density relative to traditional lithium battery, as: use 1 year, the decline output power density of power generator of piezoelectricity is 250 μ W/ cm
3, the output power density of rechargeable lithium ion batteries is not 45 μ W/ cm
3; Use 10 years, the output power density of piezoelectric micromotor power generator is still 250 μ W/ cm
3, the output power density of not chargeable Li ion battery is then 35 μ W/ cm
3.Therefrom can find out, piezoelectricity declines the output power density of power generator higher than the output power density of lithium ion battery, and can not as lithium ion battery, output power density passing in time and reducing.
Current piezoelectricity declines power generator many employings suspension beam structure, usually based on d33 and d31 two kinds of patterns.Piezoelectricity based on d33 pattern is hung oneself from a beam the feature with high output voltage of micro-power generator, but electric charge is low.
Summary of the invention
Object of the present invention overcomes the deficiencies in the prior art exactly, provides a kind of two interdigital electrode formula piezoelectric micromotor power generators of high-output power density, is adapted at using in the systems such as biology sensor, tire pressure monitoring, electric machines test.
The present invention includes pedestal, substrate, piezoelectric patches, insert finger electrode.
The cross section of described pedestal is L shape, the mount pad comprising horizontal base and be vertically arranged on horizontal base.
The stiff end of described substrate is fixedly installed on mount pad, free end is unsettled; Described substrate is the sheet metal of strip, adopts elastic metallic material; The two sides of substrate is respectively arranged with piezoelectric patches, and the complete covered substrate surface of one side of piezoelectric patches, another side is provided with to insert and refers to electrode.
Described slotting finger electrode is conductive metal sheet or metal film, covers on piezoelectric patches; Each slotting finger electrode comprises two monolateral electrodes, and each monolateral electrode comprises multiple parallel metal finger, and many metal fingers connect by collecting bonding jumper.The metal finger being positioned at two monolateral electrodes on same piezoelectric patches is crisscross arranged, and is formed to insert to refer to electrode; The width a of all metal fingers is equal, and the gap b of two adjacent metal fingers of same slotting finger electrode is 1.5 ~ 5 times of metal finger width a.Each monolateral Electrode connection is leaded.
Two projections of metal finger on substrate of inserting finger electrode being positioned at substrate both sides are crisscross arranged, and form palisade, the gap c of adjacent two projections of metal finger on substrate is identical.
The material of described substrate is phosphor bronze, and the material of described piezoelectric patches is doped PZT pottery or ZnO or AlN or PVDF.
During work, substrate free end when stressed or resonance move up and down, piezoelectric patches bends, the electric energy that horizontal axis deformation produces takes out (namely utilizing d33 vibration mode to generate electricity) by the slotting finger electrode of same layer, and the electric energy that vertical axial deformation produces is inserted by subtend and referred to that electrode takes out (namely utilizing d31 vibration mode to generate electricity).The present invention, on the feature basis taking into full account suspension beam type piezoelectric micromotor power generator stress distribution, proposes the piezoelectric micromotor power generator of two interdigital electrode form, improves output power density.
Accompanying drawing explanation
Fig. 1 is cross-sectional view of the present invention;
Fig. 2 is plan structure schematic diagram of the present invention.
Embodiment
As illustrated in fig. 1 and 2, two interdigital electrode formula piezoelectric micromotor power generator comprises pedestal, substrate, piezoelectric patches, inserts finger electrode.
The cross section of pedestal is L shape, comprises horizontal base 1-1 and is vertically arranged on the mount pad 1-2 on horizontal base.
The stiff end of substrate 2 is fixedly installed on mount pad 1-2, free end is unsettled.Substrate is the sheet metal of strip, adopts elastic metallic material, as phosphor bronze.The two sides of substrate is respectively arranged with piezoelectric patches 3-1 and 3-2, complete covered substrate 2 surface of one side of piezoelectric patches, and another side is provided with to insert and refers to electrode, and the material of piezoelectric patches is doped PZT pottery or ZnO or AlN or PVDF.
Insert and refer to that electrode is conductive metal sheet or metal film, cover on piezoelectric patches.The slotting finger electrode (Fig. 2 solid line is drawn) being arranged in substrate 2 top comprises two monolateral electrodes, and each monolateral electrode comprises multiple parallel metal finger 4-1-1, and many metal finger 4-1-1 connect by collecting bonding jumper 4-1-2.The slotting finger electrode being arranged in substrate 2 bottom comprises two monolateral electrodes (Fig. 2 dotted line is drawn) equally, and each monolateral electrode comprises multiple parallel metal finger 4-2-1, and many metal finger 4-2-1 connect by collecting bonding jumper 4-2-2.
The metal finger being positioned at two monolateral electrodes on same piezoelectric patches is crisscross arranged, and is formed to insert to refer to electrode, as the solid line metal finger in Fig. 2 and dotted line metal finger; The width a of all metal fingers is equal, and the gap b of two adjacent metal fingers of same slotting finger electrode is 1.5 ~ 5 times of metal finger width a.Each monolateral Electrode connection is leaded.
Two projections of metal finger on substrate of inserting finger electrode being positioned at substrate both sides are crisscross arranged, and form palisade, the gap c of adjacent two projections of metal finger on substrate is identical.
During work, substrate free end when stressed or resonance move up and down, piezoelectric layer Bending Deformation, cause the change of piezoelectric surface bound charge, cause the change of electric field, promote the movement of free electron, just have alternating current in the interdigital electrode layer of now piezoelectric layer both sides and export.The alternating current of output is stored after rectification, filtering and can supply electronic installation.
Claims (2)
1. pair interdigital electrode formula piezoelectric micromotor power generator, comprises pedestal, substrate, piezoelectric patches, inserts finger electrode, it is characterized in that:
The cross section of described pedestal is L shape, the mount pad comprising horizontal base and be vertically arranged on horizontal base;
The stiff end of described substrate is fixedly installed on mount pad, free end is unsettled; Described substrate is the sheet metal of strip, adopts elastic metallic material; The two sides of substrate is respectively arranged with piezoelectric patches, the complete covered substrate surface of one side of piezoelectric patches, and another side is provided with to insert and refers to electrode;
Described slotting finger electrode is conductive metal sheet or metal film, covers on piezoelectric patches; Each slotting finger electrode comprises two monolateral electrodes, and each monolateral electrode comprises multiple parallel metal finger, and many metal fingers connect by collecting bonding jumper; The metal finger being positioned at two monolateral electrodes on same piezoelectric patches is crisscross arranged, and is formed to insert to refer to electrode; The width a of all metal fingers is equal, and the gap b of two adjacent metal fingers of same slotting finger electrode is 1.5 ~ 5 times of metal finger width a; Each monolateral Electrode connection is leaded;
Two projections of metal finger on substrate of inserting finger electrode being positioned at substrate both sides are crisscross arranged, and form palisade, the gap c of adjacent two projections of metal finger on substrate is identical.
2. two interdigital electrode formula piezoelectric micromotor power generator as claimed in claim 1, is characterized in that: the material of described substrate is phosphor bronze, and the material of described piezoelectric patches is doped PZT pottery or ZnO or AlN or PVDF.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210306907.1A CN102820806B (en) | 2012-08-27 | 2012-08-27 | Piezoelectric micro-energy resource generator with double interdigital electrodes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210306907.1A CN102820806B (en) | 2012-08-27 | 2012-08-27 | Piezoelectric micro-energy resource generator with double interdigital electrodes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102820806A CN102820806A (en) | 2012-12-12 |
| CN102820806B true CN102820806B (en) | 2015-05-20 |
Family
ID=47304714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210306907.1A Expired - Fee Related CN102820806B (en) | 2012-08-27 | 2012-08-27 | Piezoelectric micro-energy resource generator with double interdigital electrodes |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102820806B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104270034A (en) * | 2014-10-20 | 2015-01-07 | 吉林大学 | Curved surface piezoelectric power generation cantilever beam |
| CN106921310B (en) * | 2017-05-02 | 2019-03-08 | 西安电子科技大学 | A kind of electric field energy collection device |
| CN107623068B (en) * | 2017-09-18 | 2020-11-27 | 中北大学 | Flexible stretchable piezoelectric nano generator based on interdigital electrode structure and preparation method thereof |
| CN107870350B (en) * | 2017-12-13 | 2023-12-15 | 中国地质大学（武汉） | Differential dual-piezoelectric-patch geophone core and piezoelectric geophone |
| CN113824423B (en) * | 2021-09-13 | 2023-08-04 | 江苏卓胜微电子股份有限公司 | Transducer structure for improving Q value and inhibiting transverse mode and surface acoustic wave resonator |
| CN114509651B (en) * | 2022-04-15 | 2022-07-19 | 湖北工业大学 | GIS partial discharge external ultrasonic and ultrahigh frequency integrated sensor and detection method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202713189U (en) * | 2012-08-27 | 2013-01-30 | 杭州电子科技大学 | Double-interdigital electrode piezoelectric micro energy generator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5120502B2 (en) * | 2009-06-15 | 2013-01-16 | 株式会社村田製作所 | Piezoelectric generator |
-
2012
- 2012-08-27 CN CN201210306907.1A patent/CN102820806B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202713189U (en) * | 2012-08-27 | 2013-01-30 | 杭州电子科技大学 | Double-interdigital electrode piezoelectric micro energy generator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102820806A (en) | 2012-12-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102820423B (en) | Combined piezoelectric micro-power generator | |
| CN102820806B (en) | Piezoelectric micro-energy resource generator with double interdigital electrodes | |
| CN202713190U (en) | Piezoelectric/electromagnetic combined-type micro energy device | |
| CN204071608U (en) | Piezoelectric type generating carpet | |
| CN202503456U (en) | Piezoelectricity-magnetoelectricity mixing energy harvesting device | |
| EP2532434A3 (en) | Electrostatic precipitator | |
| US8269401B1 (en) | Graphene power-mill system | |
| CN108540013B (en) | A kind of piezoelectric energy recovery device of integrated adaptive mechanical switch | |
| WO2011161052A3 (en) | Electromechanical converter, method for producing same, and use thereof | |
| CN108847788B (en) | One kind being based on multistable piezoelectric harvester | |
| CN102611351A (en) | Piezoelectricity-magnetic electricity mixed energy collection device | |
| CN102820805B (en) | Piezoelectric and electromagnetic combined micro-energy resource device | |
| CN204156752U (en) | A kind of piezoelectricity and the electric hybrid generator of friction | |
| KR20170068977A (en) | Electrode adhesive strenth measuring apparatus | |
| CN111049426A (en) | Piezoelectric type multi-direction broadband vibration energy collecting device | |
| CN207475428U (en) | Electret energy collecting device based on more gap structures | |
| CN202797092U (en) | Composite piezoelectric micro power generator | |
| CN202713189U (en) | Double-interdigital electrode piezoelectric micro energy generator | |
| CN208548842U (en) | One kind being based on multistable piezoelectric harvester | |
| CN107681924A (en) | A kind of piezoelectricity Electromagnetic heating energy accumulator based on piezoelectricity curved beam | |
| CN203608112U (en) | Miniature piezoelectric-type energy collector based on low-frequency environment vibration and driving | |
| US10181805B2 (en) | Vibration power generator | |
| CN110350822A (en) | A kind of foot's mechanical energy acquisition device and its acquisition method | |
| CN111669073A (en) | Novel vibration energy collect device | |
| EP2323147A3 (en) | Dye-sensitized solar cell electrode and dye-sensitized solar cell |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 Termination date: 20160827 |