CN102808217A - Observation mechanism for single crystal furnace equipment - Google Patents
Observation mechanism for single crystal furnace equipment Download PDFInfo
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- CN102808217A CN102808217A CN2012102972723A CN201210297272A CN102808217A CN 102808217 A CN102808217 A CN 102808217A CN 2012102972723 A CN2012102972723 A CN 2012102972723A CN 201210297272 A CN201210297272 A CN 201210297272A CN 102808217 A CN102808217 A CN 102808217A
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- single crystal
- bed glass
- glass
- carriage
- layer glass
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Abstract
The invention relates to single crystal furnace equipment, in particular to an observation mechanism for the single crystal furnace equipment. The observation mechanism comprises a drive device, a transmission device, fixed layer glass, movable layer glass and a supporting frame, wherein the drive device is mounted on a seat body of a single crystal furnace; the supporting frame is connected with the drive device through the transmission device and driven by the drive device to rotate; the multiple movable layer glass is placed on the supporting frame; the fixed layer glass is mounted on the seat body; and the movable layer glass rotating with the supporting frame is positioned below the fixed layer glass and covers volatile matters in a channel. According to the observation mechanism, the observation window glass is divided into the fixed layer glass and the movable layer glass, the fixed layer glass is relatively fixed, and the movable layer glass is rotated and changed through the transmission device, so that the service time of the fixed layer glass is prolonged, the fixed layer glass does not need to be frequently changed and the operation process is simplified.
Description
Technical field
The present invention relates to single crystal furnace equipment, specifically a kind of sampling mechanism that is used for single crystal furnace equipment.
Background technology
At present, the viewing window in the known single crystal furnace equipment is a single layer structure, and volatile matter pollutes viewing glass very soon in the equipment running process, causes and can't continue observation, needs the frequent change viewing glass, makes operation complicated.Single viewing window generally only can be realized observing, a kind of in the thermometric, camera function, is difficult for realizing single crystal growing furnace crystal growth robotization.
Summary of the invention
The sight glass that exists to above-mentioned individual layer viewing window needs frequent change, viewing window to realize function singleness, be difficult for realizing the crystal growth automation issues, the object of the present invention is to provide a kind of sampling mechanism that is used for single crystal furnace equipment.
The objective of the invention is to realize through following technical scheme:
The present invention includes drive unit, transmission mechanism, immovable bed glass, mobile bed glass and carriage; Wherein drive unit is installed on the pedestal of single crystal growing furnace; Said carriage is connected with drive unit through transmission mechanism, by the drive unit driven in rotation, on carriage, is placed with a plurality of mobile bed glass; Said immovable bed glass is installed on the pedestal, is positioned at the below of immovable bed glass with the mobile bed glass of carriage rotation, shelters from the volatile matter in the passage.
Wherein: said carriage is provided with the endoporus that equates with the mobile bed amount of glass, all is placed with mobile bed glass in each endoporus; Said endoporus is a through hole, and is shoulder hole, and mobile bed glass is placed on the platform of shoulder hole inwall formation; Each blocks area that the mobile bed glass of volatile matter blocks immovable bed glass more than or equal to 50% of the immovable bed glass total area below immovable bed glass; The pedestal of said single crystal growing furnace is installed on the porthole of single crystal growing furnace, is provided with passage in this porthole, said passage be positioned at immovable bed glass under; The inside of said pedestal and porthole forms accommodation space, and said transmission mechanism and carriage are positioned at this accommodation space; Said transmission mechanism comprises driving toothed gear and follower gear, and wherein driving toothed gear links to each other with the output terminal of transmission mechanism, and the gear shaft of follower gear is rotatably installed on the said pedestal through bearing, and is meshed with driving toothed gear; Said carriage is fixed on the follower gear, rotates with follower gear; The said immovable bed observation gland that is provided with on glass.
Advantage of the present invention and positively effect are:
1. the present invention is divided into immovable bed glass and mobile bed glass with viewing glass; Wherein the immovable bed glassy phase is to static, and mobile bed glass is realized the rotation switching through transmission mechanism, prolongs the duration of service of immovable bed glass; Need not frequent change, operating process is simplified.
2. use sampling mechanism of the present invention, can make single viewing window realize observation, thermometric, camera function simultaneously, be easy to realize the crystal growth robotization.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the vertical view of Fig. 1;
Wherein: 1 is drive unit, and 2 is driving toothed gear, and 3 is follower gear, and 4 is immovable bed glass, and 5 is mobile bed glass, and 6 is carriage, and 7 is pedestal, and 8 is porthole, and 9 for observing gland, and 10 is passage, and 11 is accommodation space, and 12 is bearing.
Embodiment
Below in conjunction with accompanying drawing the present invention is made further detailed description.
Like Fig. 1, shown in Figure 2; The present invention includes drive unit 1, transmission mechanism, immovable bed glass 4, mobile bed glass 5 and carriage 6; The pedestal 7 of single crystal growing furnace is installed on the porthole 8, has path 10 in the porthole 8, and pedestal 7 forms accommodation space 11 with the inside of porthole 8.
Drive unit 1 is installed on the pedestal 7, can be motor; Transmission mechanism is positioned at this accommodation space 11, can be geartransmission, the transmission of belt pulley etc., and the transmission mechanism of present embodiment is geartransmission, comprise driving toothed gear 2 and follower gear 3.The output shaft of motor stretches in the accommodation space 11, and is connected with driving toothed gear 2; The gear shaft of follower gear 3 is rotatably installed on the pedestal 7 through bearing 12, and is meshed with driving toothed gear 2.In accommodation space 11, also be equipped with carriage 6, this carriage 6 is fixed on the follower gear 3, with follower gear 3 rotations.
Offer a plurality of endoporus of quantity on the carriage 6, all be placed with mobile bed glass 5 in each endoporus, when 6 rotations of driven by motor carriage, mobile bed glass 5 is with carriage 6 rotations.Endoporus is a through hole, and is shoulder hole, and mobile bed glass 5 is placed on the platform of shoulder hole inwall formation.
On immovable bed glass 4, be provided with and observe gland 9, keep static to guarantee immovable bed glass 4 relative mobile bed glass 5; Observing gland 9 is hollow structure, so that observe through immovable bed glass 4.The immovable bed glass 4 of present embodiment is at least one, when carriage 6 is rotated by electric motor driving, can be sheltered from a plurality of immovable bed glass 4 by different mobile bed glass 5 simultaneously.
Principle of work of the present invention is:
Drive unit 1 work drives driving toothed gear 2 rotations, through with the engaged transmission of follower gear 3, drive carriage 6 rotations; Be placed on the i.e. rotation thereupon of the mobile bed glass 5 in the endoporus on the carriage 6.Immovable bed glass 4 is motionless, and carriage 6 every rotation set angles make mobile bed glass 5 shelter from and are no less than 50% immovable bed glass 4 areas, thereby realizes that the 5 rotation switchings of mobile bed glass are blocked, immovable bed glass 4 antipollution purposes.
Claims (7)
1. sampling mechanism that is used for single crystal furnace equipment; It is characterized in that: comprise drive unit (1), transmission mechanism, immovable bed glass (4), mobile bed glass (5) and carriage (6); Wherein drive unit (1) is installed on the pedestal (7) of single crystal growing furnace; Said carriage (6) is connected with drive unit (1) through transmission mechanism, by drive unit (1) driven in rotation, on carriage (6), is placed with a plurality of mobile bed glass (5); Said immovable bed glass (4) is installed on the pedestal (7), is positioned at the below of immovable bed glass (4) with the mobile bed glass (5) of carriage (6) rotation, shelters from the volatile matter in the passage (10).
2. by the said sampling mechanism that is used for single crystal furnace equipment of claim 1, it is characterized in that: said carriage (6) is provided with the endoporus that equates with mobile bed glass (5) quantity, all is placed with mobile bed glass (5) in each endoporus.
3. by the said sampling mechanism that is used for single crystal furnace equipment of claim 2, it is characterized in that: said endoporus is a through hole, and is shoulder hole, and mobile bed glass (5) is placed on the platform of shoulder hole inwall formation.
4. by the said sampling mechanism that is used for single crystal furnace equipment of claim 1, it is characterized in that: each blocks area that the mobile bed glass (5) of volatile matter blocks immovable bed glass (4) more than or equal to 50% of immovable bed glass (4) total area in immovable bed glass (4) below.
5. by the said sampling mechanism that is used for single crystal furnace equipment of claim 1; It is characterized in that: the pedestal of said single crystal growing furnace (7) is installed on the porthole (8) of single crystal growing furnace; Be provided with passage (10) in this porthole (8), said passage (10) be positioned at immovable bed glass (4) under; Said pedestal (7) forms accommodation space (11) with the inside of porthole (8), and said transmission mechanism and carriage (6) are positioned at this accommodation space (11).
6. by claim 1 or the 5 said sampling mechanisms that are used for single crystal furnace equipment; It is characterized in that: said transmission mechanism comprises driving toothed gear (2) and follower gear (3); Wherein driving toothed gear (2) links to each other with the output terminal of transmission mechanism; The gear shaft of follower gear (3) is rotatably installed on the said pedestal (7) through bearing (12), and is meshed with driving toothed gear (2); Said carriage (6) is fixed on the follower gear (3), rotates with follower gear (3).
7. by the said sampling mechanism that is used for single crystal furnace equipment of claim 1, it is characterized in that: said immovable bed glass (4) is provided with observes gland (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102972723A CN102808217A (en) | 2012-08-21 | 2012-08-21 | Observation mechanism for single crystal furnace equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102972723A CN102808217A (en) | 2012-08-21 | 2012-08-21 | Observation mechanism for single crystal furnace equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102808217A true CN102808217A (en) | 2012-12-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012102972723A Pending CN102808217A (en) | 2012-08-21 | 2012-08-21 | Observation mechanism for single crystal furnace equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN102808217A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103741209A (en) * | 2014-01-16 | 2014-04-23 | 哈尔滨工业大学 | Continuous observation window for growth of sapphire crystals by kyropoulos method |
| CN109252223A (en) * | 2018-10-16 | 2019-01-22 | 徐州华奥纺织有限公司 | A kind of observation window for single crystal growing furnace |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87200071U (en) * | 1987-01-08 | 1987-12-31 | 岑众 | Experimental cabinet |
| JPH03229632A (en) * | 1990-02-05 | 1991-10-11 | Matsushita Electric Ind Co Ltd | Viewing port |
| CN2263798Y (en) * | 1996-10-31 | 1997-10-01 | 中国科学院沈阳科学仪器研制中心 | Large visual angle guard |
| CN101274759A (en) * | 2008-05-15 | 2008-10-01 | 北京京运通科技有限公司 | Viewing device for polysilicon furnace |
| CN201669543U (en) * | 2010-05-20 | 2010-12-15 | 浙江碧晶科技有限公司 | Device for replacing observation window glass of vacuum furnaces |
-
2012
- 2012-08-21 CN CN2012102972723A patent/CN102808217A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87200071U (en) * | 1987-01-08 | 1987-12-31 | 岑众 | Experimental cabinet |
| JPH03229632A (en) * | 1990-02-05 | 1991-10-11 | Matsushita Electric Ind Co Ltd | Viewing port |
| CN2263798Y (en) * | 1996-10-31 | 1997-10-01 | 中国科学院沈阳科学仪器研制中心 | Large visual angle guard |
| CN101274759A (en) * | 2008-05-15 | 2008-10-01 | 北京京运通科技有限公司 | Viewing device for polysilicon furnace |
| CN201669543U (en) * | 2010-05-20 | 2010-12-15 | 浙江碧晶科技有限公司 | Device for replacing observation window glass of vacuum furnaces |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103741209A (en) * | 2014-01-16 | 2014-04-23 | 哈尔滨工业大学 | Continuous observation window for growth of sapphire crystals by kyropoulos method |
| CN109252223A (en) * | 2018-10-16 | 2019-01-22 | 徐州华奥纺织有限公司 | A kind of observation window for single crystal growing furnace |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20121205 |