CN102801369B - Auxiliary current loop setting device based on double-table exchange system - Google Patents
Auxiliary current loop setting device based on double-table exchange system Download PDFInfo
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- CN102801369B CN102801369B CN201210241762.1A CN201210241762A CN102801369B CN 102801369 B CN102801369 B CN 102801369B CN 201210241762 A CN201210241762 A CN 201210241762A CN 102801369 B CN102801369 B CN 102801369B
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- guide rail
- current loop
- planar motor
- slide block
- double
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- 229910000831 Steel Inorganic materials 0.000 claims abstract description 15
- 239000010959 steel Substances 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 9
- 239000010703 silicon Substances 0.000 claims abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 239000000725 suspension Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The invention discloses an auxiliary current loop setting device based on a double-table exchange system. The double-table exchange system comprises a base table, two silicon chip tables with the same structure and a planar motor, wherein the stator of the planar motor has a planar permanent magnet array, and the rotor of the planar motor has a coil array; and the rotor of the planar motor is supported by air floatation; and the auxiliary current loop setting device comprises a magnetic steel array, a moving part and a driver component, wherein the rotor of the planar motor is arranged on the moving part of the auxiliary current loop setting device; each group of coils of the rotor are sequentially subjected to current loop setting by adopting a driver; and after the setting is finished, the driver corresponding to the rotor of the planar motor and the coils is moved to the double-table exchange system. A simple and rapid current loop setting mode is provided for a single-table or multi-table system provided with a complex rotor coil structure, and the trouble that auxiliary equipment is increased in structure or control in the current loop setting process in the single-table or multi-table system is avoided.
Description
Technical field
The present invention relates to motor coil electric current loop setting device, particularly the auxiliary setting device of the planar motor coil electric current loop of control system in silicon wafer stage separate unit or multiple stage switching system, belong to planar motor coil electric current loop and to adjust technology.
Background technology
Present stage, in working control engineering field, drive unit is absolutely necessary part, and the use of each quasi-driver is also comparatively extensive.In the use procedure of driver, adjusting of electric current loop is a crucial step, directly affects the performance that control system is final.
In the control system that structure is comparatively complicated, the simplicity that electric current loop is adjusted is the problem needing to consider.As maglev planar motor system, because system mover is the state freely suspended, need in tuning process people in original system be add as guide rail and so on can retrain mover motion device, complete after electric current loop adjusts, the device of the constraint movers such as guide rail is needed to remove, like this in structure and control, unnecessary trouble is caused to whole system, and waste resource.Therefore, for the above-mentioned system mentioned, need the mode that a kind of more convenient direct electric current loop of searching is adjusted.
Summary of the invention
Object of the present invention provides a kind of electric current loop based on double-platform switching system to assist setting device, to overcome separate unit or several system in electric current loop tuning process structurally or increase the problem that optional equipment causes on controlling.On the basis not changing original system structure, the invention provides a kind of for motor current ring adjust, practical and easy servicing unit.
To achieve the above object of the invention, the technical scheme taked of the present invention is as follows:
Electric current loop based on double-platform switching system assists a setting device, and described double-platform switching system comprises the identical silicon wafer stage of base station, two structures and planar motor, and planar motor stator adopts plane permanent magnetic array, is fixedly mounted on base station; Planar motor rotor adopts gas suspension, bottom is coil array, two silicon wafer stages are fixedly connected with described planar motor rotor, it is characterized in that, described electric current loop assists setting device to comprise to adjust pedestal, magnetic steel array of adjusting, moving-member and actuator assembly;
Described magnetic steel array arrangement mode of adjusting is consistent with the arrangement mode of the plane permanent magnetic array of described double-platform switching system, described in magnetic steel array of adjusting be fixedly mounted on and adjust on pedestal;
Described moving-member comprises guide rail base, the first guide rail, the second guide rail, the 3rd guide rail, the first slide block, the second slide block, the 3rd slide block, Four-slider, first crossbeam and second cross beam;
Wherein guide rail base is fixedly mounted on and adjusts on pedestal, and the first guide rail is fixed on guide rail base in X direction; First slide block, the second slide block, the 3rd slide block are all fixedly connected with first crossbeam with Four-slider, and the first slide block and the second slide block move along guide rail direction on the first guide rail; Second guide rail matches with the 3rd slide block, and the 3rd guide rail matches with Four-slider, and the second guide rail and the 3rd guide rail are all along Y-direction; Second guide rail is connected by second cross beam with the 3rd guide rail;
Actuator assembly comprises the multiple drivers identical with planar motor coil number, often organizes the corresponding driver of coil, carries out electric current loop respectively adjust to coil.
The size of auxiliary setting device magnetic steel array is 1.2 ~ 2 times of planar motor rotor size.
Owing to have employed above technical scheme, the present invention has the following advantages and gives prominence to effect: the electric current loop achieving double-platform switching system motor coil is adjusted, on the basis not changing original system structure, provide a kind of for motor current ring adjust, practical and easy servicing unit.Technique effect of the present invention has important practical significance to motor current ring aspect research and development of adjusting.
Accompanying drawing explanation
Fig. 1 is that electric current loop of the present invention assists setting device schematic diagram.
Fig. 2 is double-platform switching system structural representation of the present invention.
Fig. 3 is planar motor rotor upward view of the present invention.
Fig. 4 is that electric current loop of the present invention assists setting device upward view.
Fig. 5 is moving-member axonometric drawing of the present invention.
Fig. 6 is moving-member front view of the present invention.
Wherein:
100-double-platform switching system; 101-base station; 102-silicon wafer stage; 103-drive assembly; 104-cable;
201-planar motor stator; 202-planar motor rotor; 202a-coil array;
300-electric current loop assists setting device; 301-adjusts magnetic steel array; 302-moving-member; 303-adjusts pedestal;
3020-guide rail base; 3021-first guide rail; 3022-first slide block; 3023-second slide block; 3024-first crossbeam; 3025-the 3rd slide block; 3026-Four-slider; 3027-second guide rail; 3028-the 3rd guide rail; 3029-second cross beam.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described further in detail.
Fig. 1 is that electric current loop of the present invention assists setting device schematic diagram, Fig. 2 is double-platform switching system structural representation of the present invention, double-platform switching system 100 comprises base station 101, the silicon wafer stage 102 that two structures are identical and planar motor, planar motor stator 201 adopts plane permanent magnetic array, be fixedly mounted on base station, planar motor rotor 202 adopts gas suspension, bottom is coil array 202a, two silicon wafer stages 102 are fixedly connected with described planar motor rotor 202, it is characterized in that, electric current loop assists setting device 300 to comprise pedestal 303 of adjusting, to adjust magnetic steel array 301, moving-member 302 and actuator assembly 103.
Described magnetic steel array 301 of adjusting is fixedly mounted on to be adjusted on pedestal 303, magnetic steel array 301 arrangement mode of adjusting is consistent with the arrangement mode of the plane permanent magnetic array of described double-platform switching system 100, consider the boundary effect of magnetic steel array, magnetic steel array 301 size of adjusting is 1.2 ~ 2 times of planar motor rotor 202 size.
Fig. 5 is moving-member axonometric drawing of the present invention, Fig. 6 is moving-member front view of the present invention, and moving-member 302 comprises guide rail base 3020, first guide rail 3021, second guide rail 3027, the 3rd guide rail 3028, first slide block 3022, second slide block 3023, the 3rd slide block 3025, Four-slider 3026, first crossbeam 3024 and second cross beam 3029.
Wherein guide rail base 3020 is fixedly mounted on and adjusts on pedestal 303, and the first guide rail 3021 is fixed on guide rail base 3020 in X direction; First slide block 3022, second slide block 3023, the 3rd slide block 3025 are all fixedly connected with first crossbeam 3024 with Four-slider 3026, and the first slide block 3022 and the second slide block 3023 on the first guide rail 3021 along guide rail movement; Second guide rail 3027 matches with the 3rd slide block 3025, and the 3rd guide rail 3028 matches with Four-slider 3026, and the second guide rail 3027 and the 3rd guide rail 3028 are all along Y-direction; Second guide rail 3027 is connected by second cross beam with the 3rd guide rail 3028.
Actuator assembly 103 comprises the multiple drivers identical with planar motor coil number.
Planar motor electric current loop assists tuning process as follows, planar motor rotor 202 is arranged on electric current loop and assists on the moving-member 302 of setting device 300, adopt the driver corresponding with coil to carry out electric current loop to planar motor rotor 202 all coils respectively to adjust, after all coils has all been adjusted, by planar motor rotor 202 and corresponding driver, be installed on double-platform switching system 100.
Fig. 3 is planar motor rotor upward view of the present invention, it is characterized in that four groups of three-phase coil array 202a that planar motor rotor 202 lower surface fixed installation structure is identical, wherein two groups of coils in X direction, and all the other two groups of coils, along Y-direction, are often organized three-phase coil and all adopted star-like method of attachment.
Fig. 4 is that electric current loop of the present invention assists setting device upward view, and one group of coil only corresponding driver, should be identical with double-platform switching system with the corresponding relation of driver at electric current loop tuning process coil, need ensure both corresponding relations.
Claims (2)
1. assist setting device based on the electric current loop of double-platform switching system for one kind, described double-platform switching system (100) comprises base station (101), silicon wafer stage (102) that planar motor is identical with two structures, planar motor stator (201) adopts plane permanent magnetic array, is fixedly mounted on base station; Planar motor rotor (202) adopts gas suspension, bottom is coil array (202a), two silicon wafer stages (102) are fixedly connected with described planar motor rotor (202), it is characterized in that: described electric current loop assists setting device (300) to comprise pedestal of adjusting (303), magnetic steel array of adjusting (301), moving-member (302) and actuator assembly (103);
Described magnetic steel array of adjusting (301) is fixedly mounted on pedestal of adjusting (303), and the arrangement mode of magnetic steel array of adjusting (301) is consistent with the arrangement mode of the plane permanent magnetic array of described double-platform switching system (100);
Described moving-member (302) comprises guide rail base (3020), the first guide rail (3021), the second guide rail (3027), the 3rd guide rail (3028), the first slide block (3022), the second slide block (3023), the 3rd slide block (3025), Four-slider (3026), first crossbeam (3024) and second cross beam (3029);
Wherein guide rail base (3020) is fixedly mounted on pedestal of adjusting (303), and the first guide rail (3021) is fixed on guide rail base (3020) in X direction; First slide block (3022), the second slide block (3023), the 3rd slide block (3025) are all fixedly connected with first crossbeam (3024) with Four-slider (3026), and the first slide block (3022) and the second slide block (3023) on the first guide rail (3021) along guide rail movement; Second guide rail (3027) moves along Y-direction on the 3rd slide block (3025), and the 3rd guide rail (3028) moves along Y-direction on Four-slider (3026); Second guide rail (3027) is connected by second cross beam with the 3rd guide rail (3028);
Described actuator assembly (103) comprises the multiple drivers identical with planar motor coil number, often organizes the corresponding driver of coil, carries out electric current loop respectively adjust to coil.
2. a kind of electric current loop based on double-platform switching system according to claim 1 assists setting device, it is characterized in that: the size of described magnetic steel array of adjusting (301) is 1.2 ~ 2 times of planar motor rotor (202) size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210241762.1A CN102801369B (en) | 2012-07-12 | 2012-07-12 | Auxiliary current loop setting device based on double-table exchange system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210241762.1A CN102801369B (en) | 2012-07-12 | 2012-07-12 | Auxiliary current loop setting device based on double-table exchange system |
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| Publication Number | Publication Date |
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| CN102801369A CN102801369A (en) | 2012-11-28 |
| CN102801369B true CN102801369B (en) | 2015-05-20 |
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| CN201210241762.1A Active CN102801369B (en) | 2012-07-12 | 2012-07-12 | Auxiliary current loop setting device based on double-table exchange system |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103973172B (en) * | 2013-01-25 | 2016-09-28 | 上海微电子装备有限公司 | A kind of moving-wire ring type levitation planar motor magnetic is to Barebone and alignment methods thereof |
| CN104104198B (en) * | 2013-04-15 | 2017-02-08 | 上海微电子装备有限公司 | Moving coil-type maglev motor and magnetic angle detection method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6927505B2 (en) * | 2001-12-19 | 2005-08-09 | Nikon Corporation | Following stage planar motor |
| CN101694560A (en) * | 2009-04-03 | 2010-04-14 | 清华大学 | Silicon wafer stage double-stage exchange system by adopting air-floatation planar motor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101609265B (en) * | 2009-07-21 | 2011-09-14 | 清华大学 | Silicon slice platform multi-platform exchange system adopting magnetic levitation planar motor |
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- 2012-07-12 CN CN201210241762.1A patent/CN102801369B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6927505B2 (en) * | 2001-12-19 | 2005-08-09 | Nikon Corporation | Following stage planar motor |
| CN101694560A (en) * | 2009-04-03 | 2010-04-14 | 清华大学 | Silicon wafer stage double-stage exchange system by adopting air-floatation planar motor |
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| CN102801369A (en) | 2012-11-28 |
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Address after: 100084 Beijing, Haidian District, 100084 box office box office, Tsinghua University, Patentee after: Tsinghua University Patentee after: U-PRECISION TECH CO., LTD. Address before: 100084 Beijing, Haidian District, 100084 box office box office, Tsinghua University, Patentee before: Tsinghua University Patentee before: U-Precision Tech Co., Ltd. |