CN102801093B - All-solid-state pulse excitation source for compact structure type excimer laser - Google Patents
All-solid-state pulse excitation source for compact structure type excimer laser Download PDFInfo
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- CN102801093B CN102801093B CN201210229966.3A CN201210229966A CN102801093B CN 102801093 B CN102801093 B CN 102801093B CN 201210229966 A CN201210229966 A CN 201210229966A CN 102801093 B CN102801093 B CN 102801093B
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Abstract
The invention discloses an all-solid-state pulse excitation source for a compact structure type excimer laser. The all-solid-state pulse excitation source comprises a direct-current power supply, a step-up pulse transformer, a magnetic-pulse compressing switch circuit, an excitation source temperature control system and an oil tank, wherein the direct-current power supply and a filter capacitor are connected in parallel and then are connected on the two ends of a primary coil of the set-up pulse transformer by a semiconductor switch IGBT (Insulated Gate Bipolar Transistor), a secondary coil of the set-up pulse transformer is connected with the magnetic-pulse compressing switch circuit, and the set-up pulse transformer and a two-stage magnetic-pulse compressing switch are integrated in the high-voltage oil tank. The all-solid-state pulse excitation source replaces a conventional excimer laser, adopts a thyratron as the excitation source of a main switch, solves the problems that the whole work performance of the excimer laser is affected due to the defects that the limited discharging service life of the thyratron, residual oscillation, preheating start, self conduction on the ageing process and the like, and meets the demands of high repetition frequency, long service life and stability in operation of the excimer laser.
Description
technical field
The present invention relates to a kind of compact type kHz excimer laser complete solid state pulse driving source, be specially kHz excimer laser complete solid state pulse excitation power supply device, be particularly useful for high repetition frequency, industrial high-power excimer laser.
Background technology
In order to obtain the industrial excimer laser of high-power output, often require it under high repetition frequency, to work, the main switch thyratron that traditional excimer laser driving source uses～10
9subpulse discharge life seems limited, makes above-mentioned fast discharge mode can not adapt to the demand of quasi-molecule high repetition frequency work in the residual oscillation of thyratron, pipeline start up by preheating and ageing process thereof from shortcomings such as conductings in addition.Complete solid state pulse power model utilizes power semiconductor switch to produce high pressure Rapid Pulse in conjunction with the method for multistage magnetic pulse compressor (mpc) and brings alternative thyratron.Semiconductor switch and magnetic field impulse switch performance under long-term high repetition frequency condition, without obvious decline, so this technology is considered life problems hardly, can meet excimer laser operation steady in a long-term under high repetition frequency.
Summary of the invention
Object of the present invention provides a kind of compact type kHz excimer laser complete solid state pulse driving source, substitute traditional excimer laser and adopt the driving source of thyratron as main switch, solve because the discharge life of thyratron is limited, affect the problem of the integral working of excimer laser from shortcomings such as conductings in residual oscillation, pipeline start up by preheating and ageing process thereof.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of compact type kHz excimer laser complete solid state pulse driving source, is characterized in that: comprise DC power supply, filter capacitor C
0, step-up pulse transformer T, magnetic pulse compressor (mpc) circuit, water-filled radiator, fuel tank, described DC power supply and filter capacitor C
0after parallel connection through semiconductor switch IGBT, inductance L
0the elementary two ends of access step-up pulse transformer T, primary coil one end of described step-up pulse transformer T connects inductance L
0, the other end connects filter capacitor C
0one end, the secondary coil access magnetic pulse compressor (mpc) circuit of described step-up pulse transformer T, described magnetic pulse compressor (mpc) circuit comprises three capacitor C parallel with one another
1, C
2, C
d, described capacitor C
1, C
2, C
dcold end common ground, described capacitor C
1with capacitor C
2hot end between be connected with magnetic pulse compressor (mpc) MS
1, described capacitor C
2with capacitor C
dhot end between be connected with magnetic pulse compressor (mpc) MS
2, described capacitor C
1two ends be connected to the secondary coil two ends of pulse booster transformer T, filter capacitor C
0, inductance L
0, pulse booster transformer T, capacitor C
1composition pulse boosting resonant tank, the direct voltage of described DC power supply output through boosting, the pulse voltage that forms after double of resonance, by the high pressure fast pulse that obtains excimer laser after magnetic pulse compressor (mpc) circuit compression and need; Described semiconductor switch IGBT is installed on water-filled radiator, and water-filled radiator is placed in the water-cooling circulating system that water cooling unit is housed, step-up pulse transformer T and two magnetic pulse compressor (mpc) MS
1, MS
2be placed in the fuel tank that is full of transformer oil, between water-filled radiator and fuel tank, be connected with multilayered heat exchanger, water-filled radiator connects the refrigerant passage of heat exchanger, and fuel tank connects the heat medium passage of heat exchanger.
Also include driving source control system, be provided with a thermistor in described fuel tank, one end of thermistor connects driving source control system, the temperature of described temperature detect switch (TDS) real-time detection water-filled radiator, and temperature detect switch (TDS) one end connects driving source control system.Transformer oil in fuel tank circulates by oil pump.
Direct voltage is with 500V-700V input, the about 16kV of output voltage after pulse booster transformer T and two-stage magnetic pulse compressor (mpc), pulse rise time about 100ns high-voltage pulse, meet excimer laser incentive condition.
Beneficial effect of the present invention is:
The driving source that the present invention adopts power semiconductor switch to produce high pressure fast pulse in conjunction with the method for magnetic pulse compressor (mpc) replace traditional excimer laser based on thyratron the driving source as main switch, semiconductor switch and magnetic switch are solid state device, semiconductor switch is higher 3 more than the order of magnitude than thyratron, magnetic pulse compressor (mpc) under long-term high-repetition-rate condition performance without obvious decline, the driving source life-span depends primarily on the life-span of semiconductor switch, therefore the present invention compares and adopts the excimer laser driving source life-span of thyratron longer, and loop electric discharge can not produce residual amount of energy vibration, the laser head life-span is obviously extended, move more stable.
Brief description of the drawings
Fig. 1 is circuit theory diagrams of the present invention.
Fig. 2 is driving source temperature control system of the present invention.
Embodiment
As shown in Figure 1, a kind of compact type kHz excimer laser complete solid state pulse driving source, comprises DC power supply 1, filter capacitor C
0, step-up pulse transformer T, magnetic pulse compressor (mpc) circuit, water-filled radiator 2, fuel tank 3, DC power supply 1 and filter capacitor C
0after parallel connection through semiconductor switch IGBT, inductance L
0the elementary two ends of access step-up pulse transformer T, primary coil one end of step-up pulse transformer T connects inductance L
0, the other end connects filter capacitor C
0one end, the secondary coil access magnetic pulse compressor (mpc) circuit of step-up pulse transformer T, magnetic pulse compressor (mpc) circuit comprises three capacitor C parallel with one another
1, C
2, C
d, capacitor C
1, C
2, C
dcold end common ground, capacitor C
1with capacitor C
2hot end between be connected with magnetic pulse compressor (mpc) MS
1, capacitor C
2with capacitor C
dhot end between be connected with magnetic pulse compressor (mpc) MS
2, capacitor C
1two ends be connected to the secondary coil two ends of pulse booster transformer T, filter capacitor C
0, inductance L
0, pulse booster transformer T, capacitor C
1composition pulse boosting resonant tank, the direct voltage that DC power supply 1 is exported through boosting, the pulse voltage that forms after double of resonance, by the high pressure fast pulse that obtains excimer laser after magnetic pulse compressor (mpc) circuit compression and need; Semiconductor switch IGBT is installed on water-filled radiator 2, and water-filled radiator 2 is placed in the water-cooling circulating system that water cooling unit is housed, step-up pulse transformer T and two magnetic pulse compressor (mpc) MS
1, MS
2be placed in the fuel tank 3 that is full of transformer oil, between water-filled radiator 2 and fuel tank 3, be connected with multilayered heat exchanger 4, water-filled radiator 2 connects the refrigerant passage of heat exchanger 4, and fuel tank 3 connects the heat medium passage of heat exchanger 4.
Also include driving source control system 5, be provided with a thermistor 6 in fuel tank 3, one end of thermistor 6 connects driving source control system 5, and temperature detect switch (TDS) 7 is housed on water-filled radiator 2, and one end of temperature detect switch (TDS) 7 connects driving source control system 5.Transformer oil in fuel tank 3 circulates by oil pump 9.
As Fig. 1, capacitor C
dtwo ends shunt load excimer laser 8.
DC power supply, 1 output voltage is through filter capacitor C
0form high pressure broad pulse by semiconductor switch IGBT, pulse boosting, resonance, high pressure broad pulse forms high voltage narrow pulse again after the compression of two-stage magnetic pulse compressor (mpc), outputs to laser discharge electrode two ends, thereby realizes the discharge excitation to laser working gas.
As shown in Figure 1, C in circuit
0=100uF, C
1=C
2=10nF, C
d=8nF.DC power output voltage is 500-700V.C
0, S
0, L
0, T, C
1be cascaded and form LC pulse boosting resonant charging loop, pulse booster transformer T is that no-load voltage ratio is 1:15 pulse booster transformer, and its coupling coefficient is higher, and leakage inductance is very little.By controlling S
0disconnection and closure, C
1can be charged to the highest nearly 20kV.This energy transfer process, generally in several microseconds, is designed to 6 μ s left and right here.At C
1voltage is gradually in elevation process, magnetic pulse compressor (mpc) MS
1in unsaturated state, can be similar to and think and open circuit; Work as C
1when voltage reaches the highest, MS
1just in time saturated, now MS
1be approximately a hollow small inductor, C
1fast to C
2electric discharge.In like manner, through MS
2compression process, capacitor C
don voltage rising time reach about 100ns, last laser electrode produces excimer laser to the repid discharge pumping of tens of nanosecond of working gas.
As shown in Figure 2, the present invention includes driving source temperature control system, the semiconductor switch pipe IGBT adopting temperature rise speed in the time that 1000Hz works strengthens, design water-filled radiator 2 dispels the heat to semiconductor switch pipe IGBT, two-stage magnetic switch and pulse booster transformer be the about 1kW of consumed power altogether, add that they are high tension apparatus, for better insulating radiation, reduce driving source volume, pulse booster transformer and two-stage magnetic pulse compressor (mpc) are integrated in the pressure-oil tank that is full of transformer oil, transformer oil is circulated with oil pump, water, oil carries out heat exchange by multilayer water cool-heat-exchanger.Water-cooling circulating system by high-power water-cooling machine to coolant---water carries out cooling, water cooling unit comprises water inlet pipe and outlet pipe, what outlet pipe flowed out is through the cooled water of water cooling unit, temperature is set by water cooling unit, water inlet pipe be cooled water by water-filled radiator and fuel tank heat exchanger after, the water that water temperature raises to some extent.Temperature control system comprises temperature control and fuel tank temperature control two parts of water-filled radiator; water-filled radiator temperature control system is mainly the protective effect to semiconductor switch IGBT; temperature detect switch (TDS) is housed on water-filled radiator; temperature detect switch (TDS) is connected in major loop control system; when low temperature, be closure state; exceed when it demarcates 40 DEG C of temperature and prove that IGBT heating is abnormal, automatically disconnect, driving source quits work.Fuel tank temperature control system is connected to the control of major loop control system by the temperature control thermistor being immersed in fuel tank, and temperature is elevated to calibration value, and temperature resistance resistance is reduced to calibration value, and system quits work.
In fuel tank, be equipped with pulse booster transformer, two-stage magnetic pulse compressor (mpc), after the direct voltage input pulse step-up transformer of 650 V left and right, form voltage through capacitor charging system and be about 20 kV, rise time is about the high-voltage pulse of 6us, after two-stage magnetic pulse compression, form the about 16kV of voltage, the high-voltage pulse of the about 100ns of voltage rising time, meets excimer laser incentive condition.Internal components is under condition of high voltage and works, so be integrated in the fuel tank that is full of transformer oil, is conducive to better insulation, has reduced greatly system bulk, and integrated degree is higher.
Claims (2)
1. a compact type kHz excimer laser complete solid state pulse driving source, is characterized in that: comprise DC power supply, filter capacitor C
0, pulse booster transformer T, magnetic pulse compressor (mpc) circuit, water-filled radiator, fuel tank, described DC power supply and filter capacitor C
0after parallel connection through semiconductor switch IGBT, inductance L
0the elementary two ends of access pulse booster transformer T, primary coil one end of described pulse booster transformer T connects inductance L
0, the other end connects filter capacitor C
0one end, the secondary coil access magnetic pulse compressor (mpc) circuit of described pulse booster transformer T, described magnetic pulse compressor (mpc) circuit comprises three capacitor C parallel with one another
1, C
2, C
d, described capacitor C
1, C
2, C
dcold end common ground, described capacitor C
1with capacitor C
2hot end between be connected with magnetic pulse compressor (mpc) MS
1, described capacitor C
2with capacitor C
dhot end between be connected with magnetic pulse compressor (mpc) MS
2, described capacitor C
1two ends be connected to the secondary coil two ends of pulse booster transformer T, filter capacitor C
0, inductance L
0, pulse booster transformer T, capacitor C
1composition pulse boosting resonant tank, the direct voltage of described DC power supply output through boosting, the pulse voltage that forms after double of resonance, by obtaining high pressure fast pulse after magnetic pulse compressor (mpc) circuit compression; Described semiconductor switch IGBT is installed on water-filled radiator, and water-filled radiator is placed in the water-cooling circulating system that water cooling unit is housed, pulse booster transformer T and two magnetic pulse compressor (mpc) MS
1, MS
2be placed in the fuel tank that is full of transformer oil, between water-filled radiator and fuel tank, be connected with multilayered heat exchanger, water-filled radiator connects the refrigerant passage of heat exchanger, and fuel tank connects the heat medium passage of heat exchanger;
Described driving source includes driving source control system, is provided with a thermistor in described fuel tank, and one end of thermistor connects driving source control system, the temperature of temperature detect switch (TDS) real-time detection water-filled radiator, and temperature detect switch (TDS) one end connects driving source control system.
2. compact type kHz excimer laser complete solid state pulse driving source according to claim 1, is characterized in that: the transformer oil in described fuel tank circulates by oil pump.
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|---|---|---|---|
| CN201210229966.3A CN102801093B (en) | 2012-07-04 | 2012-07-04 | All-solid-state pulse excitation source for compact structure type excimer laser |
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| CN201210229966.3A CN102801093B (en) | 2012-07-04 | 2012-07-04 | All-solid-state pulse excitation source for compact structure type excimer laser |
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| CN102801093B true CN102801093B (en) | 2014-09-24 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103094824A (en) * | 2012-12-27 | 2013-05-08 | 中国科学院安徽光学精密机械研究所 | Laser power supply |
| CN103560810B (en) * | 2013-11-15 | 2016-04-06 | 哈尔滨工业大学 | Based on the wireline test controller of CAN communication |
| CN109548349B (en) * | 2018-11-30 | 2023-09-19 | 中国工程物理研究院流体物理研究所 | High repetition frequency solid-state pulse power source integrated prototype device |
| CN111146678B (en) * | 2019-05-06 | 2021-04-23 | 南京瑞贻电子科技有限公司 | Dynamic coupling control device and method for linear compensation of high-power fiber laser |
| CN113552476A (en) * | 2020-04-24 | 2021-10-26 | 北京科益虹源光电技术有限公司 | Magnetic pulse compression switch characteristic test system |
| CN117543324A (en) * | 2022-12-27 | 2024-02-09 | 北京科益虹源光电技术有限公司 | Synchronous control method and control equipment for dual-cavity excimer laser and laser |
| CN118566333B (en) * | 2024-07-31 | 2024-10-11 | 西安电子科技大学 | Magneto-acoustic imaging device and method based on all-solid-state nanosecond pulse excitation |
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