CN102801093B - A compact all-solid-state pulse excitation source for kHz excimer laser - Google Patents
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Abstract
本发明公开了一种结构紧凑型kHz准分子激光器全固态脉冲激励源，包括直流电源、升压脉冲变压器、磁脉冲压缩开关电路，激励源温度控制系统、油箱，直流电源与滤波电容并联后经半导体开关IGBT连接在升压脉冲变压器初级线圈两端，升压脉冲变压器的次级线圈接入磁脉冲压缩开关电路，升压脉冲变压器及两级磁脉冲压缩开关集成在高压油箱内。本发明替代传统准分子激光器采用闸流管作为主开关的激励源，解决因闸流管的放电寿命有限、残余振荡、预热启动及其老化过程中的自导通等缺点而影响准分子激光器的整体工作性能的问题，满足准分子激光器高重复频率、长寿命、稳定运行需求。
The invention discloses a compact kHz excimer laser all-solid-state pulse excitation source, including a DC power supply, a step-up pulse transformer, a magnetic pulse compression switch circuit, an excitation source temperature control system, an oil tank, and a DC power supply connected in parallel with a filter capacitor. The semiconductor switch IGBT is connected to both ends of the primary coil of the step-up pulse transformer, the secondary coil of the step-up pulse transformer is connected to the magnetic pulse compression switch circuit, and the step-up pulse transformer and the two-stage magnetic pulse compression switch are integrated in the high-voltage fuel tank. The invention replaces the traditional excimer laser by using a thyristor as the excitation source of the main switch, and solves the problems affecting the excimer laser due to the limited discharge life of the thyratron, residual oscillation, preheating start-up and self-conduction in the aging process. The problem of the overall working performance of the excimer laser meets the requirements of high repetition rate, long life and stable operation of the excimer laser.
Description
技术领域 Technical Fields
本发明涉及一种结构紧凑型kHz准分子激光器全固态脉冲激励源，具体为kHz准分子激光器全固态脉冲激励电源装置，尤其适用于高重复频率、大功率工业用准分子激光器。 The invention relates to a compact kHz excimer laser all-solid-state pulse excitation source, in particular to a kHz excimer laser all-solid-state pulse excitation power supply device, and is especially suitable for high repetition frequency and high-power industrial excimer lasers.
背景技术 Background technique
为了获得大功率输出工业用准分子激光器，往往要求其在高重复频率下工作，传统准分子激光器激励源使用的主开关闸流管的～109 次脉冲放电寿命显得有限，加之闸流管的残余振荡、预热启动及其老化过程中的自导通等缺点使上述快放电模式不能适应准分子高重复频率工作的需求。全固态脉冲功率模块利用功率半导体开关结合多级磁脉冲压缩开关的方法产生高压快脉冲来替代闸流管。半导体开关和磁脉冲开关在长期高重复频率条件下性能无明显下降，所以这一技术几乎不考虑寿命问题，能满足准分子激光器在高重复频率下长期稳定运行。 In order to obtain high-power output industrial excimer lasers, it is often required to work at a high repetition rate. The main switching thyristor used in the traditional excimer laser excitation source has a limited discharge life of ~10 9 pulses. The disadvantages of residual oscillation, warm-up start-up and self-conduction in the aging process make the above-mentioned fast discharge mode unable to meet the needs of excimer high repetition frequency work. The all-solid-state pulse power module uses power semiconductor switches combined with multi-stage magnetic pulse compression switches to generate high-voltage fast pulses to replace thyratrons. The performance of semiconductor switches and magnetic pulse switches does not decrease significantly under long-term high repetition rate conditions, so this technology hardly considers life issues, and can meet the long-term stable operation of excimer lasers at high repetition rates.
发明内容 Contents of the invention
本发明的目的提供一种结构紧凑型kHz准分子激光器全固态脉冲激励源，替代传统准分子激光器采用闸流管作为主开关的激励源，解决因闸流管的放电寿命有限、残余振荡、预热启动及其老化过程中的自导通等缺点而影响准分子激光器的整体工作性能的问题。 The purpose of the present invention is to provide a compact kHz excimer laser all-solid-state pulse excitation source, which replaces the traditional excimer laser and uses a thyristor as the excitation source of the main switch, so as to solve the problems caused by the limited discharge life of the thyratron, residual oscillation, pre- Shortcomings such as hot start and self-conduction in the aging process affect the overall performance of the excimer laser.
为达到上述目的，本发明采用的技术方案如下： In order to achieve the above object, the technical scheme adopted in the present invention is as follows:
一种结构紧凑型kHz准分子激光器全固态脉冲激励源，其特征在于：包括直流电源、滤波电容C0、升压脉冲变压器T、磁脉冲压缩开关电路、水冷散热器、油箱，所述的直流电源与滤波电容C0并联后经半导体开关IGBT、电感L0接入升压脉冲变压器T的初级两端，所述的升压脉冲变压器T的初级线圈一端连接电感L0，另一端连接滤波电容C0的一端,所述的升压脉冲变压器T的次级线圈接入磁脉冲压缩开关电路，所述的磁脉冲压缩开关电路包括三个相互并联的电容C1、C2、Cd，所述的电容C1、C2、Cd的低电位端共同接地，所述的电容C1与电容C2的高电位端间连接有磁脉冲压缩开关MS1，所述的电容C2与电容Cd的高电位端间连接有磁脉冲压缩开关MS2，所述的电容C1的两端连接在脉冲升压变压器T的次级线圈两端，滤波电容C0、电感L0、脉冲升压变压器T、电容C1组成脉冲升压谐振回路，所述的直流电源输出的直流电压经升压、谐振翻倍后形成的脉冲电压，由磁脉冲压缩开关电路压缩后获得准分子激光器需要的高压快脉冲；所述的半导体开关IGBT安装于水冷散热器上，水冷散热器置于装有水冷机的水冷循环系统中，升压脉冲变压器T和两个磁脉冲压缩开关MS1、MS2置于充满变压器油的油箱中，水冷散热器与油箱之间连接有多层热交换器，水冷散热器连接热交换器的冷媒通道，油箱连接热交换器的热媒通道。 A compact kHz excimer laser all-solid-state pulse excitation source is characterized in that it includes a DC power supply, a filter capacitor C 0 , a step-up pulse transformer T, a magnetic pulse compression switch circuit, a water-cooled radiator, and an oil tank. The power supply and the filter capacitor C 0 are connected in parallel to the primary two ends of the step-up pulse transformer T through the semiconductor switch IGBT and the inductor L 0 , one end of the primary coil of the step-up pulse transformer T is connected to the inductor L 0 , and the other end is connected to the filter capacitor One end of C 0 , the secondary coil of the step-up pulse transformer T is connected to the magnetic pulse compression switch circuit, and the magnetic pulse compression switch circuit includes three parallel capacitors C 1 , C 2 , C d , so The low-potential ends of the capacitors C 1 , C 2 , and C d are commonly grounded, and a magnetic pulse compression switch MS 1 is connected between the high-potential ends of the capacitor C 1 and the capacitor C 2 , and the capacitor C 2 and the capacitor A magnetic pulse compression switch MS 2 is connected between the high potential terminals of C d , the two ends of the capacitor C 1 are connected to the two ends of the secondary coil of the pulse step-up transformer T, the filter capacitor C 0 , the inductance L 0 , the pulse booster Transformer T and capacitor C1 form a pulse boosting resonant circuit. The DC voltage output by the DC power supply is boosted and resonantly doubled to form a pulse voltage that is compressed by a magnetic pulse compression switch circuit to obtain the required excimer laser. High-voltage fast pulse; the semiconductor switch IGBT is installed on the water-cooled radiator, the water-cooled radiator is placed in the water-cooled circulation system equipped with a water-cooled machine, the step-up pulse transformer T and two magnetic pulse compression switches MS 1 and MS 2 are placed In the oil tank filled with transformer oil, a multi-layer heat exchanger is connected between the water-cooled radiator and the oil tank, the water-cooled radiator is connected to the refrigerant passage of the heat exchanger, and the oil tank is connected to the heat medium passage of the heat exchanger.
还包括有激励源控制系统，所述的油箱中设有一个热敏电阻，热敏电阻的一端连接激励源控制系统，所述温控开关实时探测水冷散热器的温度，温控开关一端连接激励源控制系统。油箱中的变压器油通过油泵进行循环。 It also includes an excitation source control system, the fuel tank is provided with a thermistor, one end of the thermistor is connected to the excitation source control system, the temperature control switch detects the temperature of the water cooling radiator in real time, and one end of the temperature control switch is connected to the excitation source control system. source control system. The transformer oil in the tank is circulated through the oil pump.
直流电压以500V—700V输入，经脉冲升压变压器T及两级磁脉冲压缩开关后输出电压约16kV,脉冲上升时间约100ns的高压脉冲，满足准分子激光器激励条件。 The DC voltage is input at 500V-700V. After the pulse step-up transformer T and the two-stage magnetic pulse compression switch, the output voltage is about 16kV, and the high-voltage pulse with a pulse rise time of about 100ns meets the excimer laser excitation conditions.
本发明的有益效果为： The beneficial effects of the present invention are:
本发明采用功率半导体开关结合磁脉冲压缩开关的方法产生高压快脉冲的激励源来代替传统准分子激光器基于闸流管作为主开关的激励源，半导体开关及磁开关均为固态器件，半导体开关比闸流管高3个数量级以上，磁脉冲压缩开关在长期高重复率条件下性能无明显下降，激励源寿命主要取决于半导体开关的寿命，因此本发明相比采用闸流管的准分子激光器激励源寿命较长，并且回路放电不会产生残余能量振荡，使激光头寿命明显延长，运行更加稳定。 The present invention uses a power semiconductor switch combined with a magnetic pulse compression switch to generate a high-voltage fast pulse excitation source to replace the traditional excimer laser based on a thyristor as the excitation source for the main switch. Both the semiconductor switch and the magnetic switch are solid-state devices, and the semiconductor switch ratio The thyratron is more than 3 orders of magnitude higher, and the performance of the magnetic pulse compression switch has no obvious decline under long-term high repetition rate conditions. The life of the excitation source mainly depends on the life of the semiconductor switch. The source life is longer, and the circuit discharge will not produce residual energy oscillation, so that the life of the laser head is significantly prolonged and the operation is more stable.
附图说明 Description of drawings
图1为本发明的电路原理图. Fig. 1 is the circuit schematic diagram of the present invention.
图2为本发明的激励源温度控制系统。 Fig. 2 is the excitation source temperature control system of the present invention.
具体实施方式 Detailed ways
如图1所示，一种结构紧凑型kHz准分子激光器全固态脉冲激励源，包括直流电源1、滤波电容C0、升压脉冲变压器T、磁脉冲压缩开关电路、水冷散热器2、油箱3，直流电源1与滤波电容C0并联后经半导体开关IGBT、电感L0接入升压脉冲变压器T的初级两端，升压脉冲变压器T的初级线圈一端连接电感L0，另一端连接滤波电容C0的一端,升压脉冲变压器T的次级线圈接入磁脉冲压缩开关电路，磁脉冲压缩开关电路包括三个相互并联的电容C1、C2、Cd，电容C1、C2、Cd的低电位端共同接地，电容C1与电容C2的高电位端间连接有磁脉冲压缩开关MS1，电容C2与电容Cd的高电位端间连接有磁脉冲压缩开关MS2，电容C1的两端连接在脉冲升压变压器T的次级线圈两端，滤波电容C0、电感L0、脉冲升压变压器T、电容C1组成脉冲升压谐振回路，直流电源1输出的直流电压经升压、谐振翻倍后形成的脉冲电压，由磁脉冲压缩开关电路压缩后获得准分子激光器需要的高压快脉冲；半导体开关IGBT安装于水冷散热器2上，水冷散热器2置于装有水冷机的水冷循环系统中，升压脉冲变压器T和两个磁脉冲压缩开关MS1、MS2置于充满变压器油的油箱3中，水冷散热器2与油箱3之间连接有多层热交换器4，水冷散热器2连接热交换器4的冷媒通道，油箱3连接热交换器4的热媒通道。 As shown in Figure 1, a compact kHz excimer laser all-solid-state pulse excitation source includes a DC power supply 1, a filter capacitor C 0 , a step-up pulse transformer T, a magnetic pulse compression switch circuit, a water-cooled radiator 2, and an oil tank 3 , the DC power supply 1 and the filter capacitor C 0 are connected in parallel to the primary two ends of the step-up pulse transformer T through the semiconductor switch IGBT and the inductor L 0 , one end of the primary coil of the step-up pulse transformer T is connected to the inductor L 0 , and the other end is connected to the filter capacitor At one end of C 0 , the secondary coil of the step-up pulse transformer T is connected to the magnetic pulse compression switch circuit. The magnetic pulse compression switch circuit includes three parallel capacitors C 1 , C 2 , and C d , and the capacitors C 1 , C 2 , The low potential end of C d is commonly grounded, the magnetic pulse compression switch MS 1 is connected between the high potential end of capacitor C 1 and capacitor C 2 , and the magnetic pulse compression switch MS 2 is connected between capacitor C 2 and the high potential end of capacitor C d , the two ends of the capacitor C 1 are connected to the two ends of the secondary coil of the pulse step-up transformer T, the filter capacitor C 0 , the inductance L 0 , the pulse step-up transformer T, and the capacitor C 1 form a pulse step-up resonant circuit, and the DC power supply 1 outputs The pulse voltage formed by boosting the DC voltage and doubling the resonance is compressed by the magnetic pulse compression switch circuit to obtain the high-voltage fast pulse required by the excimer laser; the semiconductor switch IGBT is installed on the water-cooled radiator 2, and the water-cooled radiator 2 is set In the water-cooling circulation system equipped with a water-cooler, the step-up pulse transformer T and two magnetic pulse compression switches MS 1 and MS 2 are placed in the oil tank 3 filled with transformer oil, and the water-cooling radiator 2 and the oil tank 3 are connected by multiple The layer heat exchanger 4, the water-cooled radiator 2 is connected to the refrigerant passage of the heat exchanger 4, and the oil tank 3 is connected to the heat medium passage of the heat exchanger 4.
还包括有激励源控制系统5，油箱3中设有一个热敏电阻6，热敏电阻6的一端连接激励源控制系统5，水冷散热器2上装有温控开关7，温控开关7的一端连接激励源控制系统5。油箱3中的变压器油通过油泵9进行循环。 Also includes an excitation source control system 5, a thermistor 6 is arranged in the oil tank 3, one end of the thermistor 6 is connected to the excitation source control system 5, a temperature control switch 7 is installed on the water-cooled radiator 2, and one end of the temperature control switch 7 Connect the excitation source control system 5. The transformer oil in the oil tank 3 is circulated through the oil pump 9 .
如图1，电容Cd两端并联负载准分子激光头8。 As shown in FIG. 1 , the excimer laser head 8 is loaded in parallel at both ends of the capacitor C d .
直流电源,1输出电压经滤波电容C0，通过半导体开关IGBT、脉冲升压、谐振形成高压宽脉冲，高压宽脉冲再经过两级磁脉冲压缩开关压缩后形成高压窄脉冲，输出到激光放电电极两端，从而实现对激光工作气体的放电激励。 DC power supply, the output voltage of 1 passes through the filter capacitor C 0 , forms a high-voltage wide pulse through the semiconductor switch IGBT, pulse boost, and resonance, and the high-voltage wide pulse is compressed by a two-stage magnetic pulse compression switch to form a high-voltage narrow pulse, which is output to the laser discharge electrode Both ends, so as to realize the discharge excitation of the laser working gas.
如图1所示，电路中C0=100uF，C1=C2=10nF，Cd=8nF。直流电源输出电压为500-700V。C0、S0、L0、T、C1串联在一起构成LC脉冲升压谐振充电回路，脉冲升压变压器T是变比为1：15脉冲升压变压器，其耦合系数较高，漏感很小。通过控制S0的断开和闭合，C1可以被充电到最高近20kV。此能量转移过程一般在数微秒，这里设计为6μs左右。在C1电压逐渐升高过程中，磁脉冲压缩开关MS1处于非饱和状态，可近似认为断路；当C1电压达到最高时，MS1正好饱和，此时MS1近似为一空心小电感，C1快速向C2放电。同理，经过MS2的压缩过程，电容Cd上的电压上升时间达到约100ns，最后激光器电极对工作气体数十纳秒快速放电泵浦产生准分子激光。 As shown in Figure 1, C 0 =100uF, C 1 =C 2 =10nF, and C d =8nF in the circuit. The output voltage of the DC power supply is 500-700V. C 0 , S 0 , L 0 , T, and C 1 are connected in series to form an LC pulse step-up resonant charging circuit. The pulse step-up transformer T is a pulse step-up transformer with a transformation ratio of 1:15. very small. By controlling the opening and closing of S 0 , C 1 can be charged up to nearly 20kV. This energy transfer process is generally in a few microseconds, and here it is designed to be about 6 μs. During the gradual increase of the voltage of C 1 , the magnetic pulse compression switch MS 1 is in a non-saturated state, which can be considered as an open circuit; when the voltage of C 1 reaches the highest level, MS 1 is just saturated, and at this time MS 1 is approximately a small air-core inductor. C1 quickly discharges to C2 . Similarly, after the MS 2 compression process, the voltage rise time on the capacitor C d reaches about 100ns, and finally the laser electrode pumps the working gas with a rapid discharge of tens of nanoseconds to generate excimer laser light.
如图2所示，本发明包括激励源温度控制系统，采用的半导体开关管 IGBT在1000Hz工作时温升速度加大，设计水冷散热器2对半导体开关管IGBT进行散热，两级磁开关和脉冲升压变压器共消耗功率约1kW，加上他们都是高压器件，为了更好的绝缘散热，减小激励源体积，把脉冲升压变压器及两级磁脉冲压缩开关集成到充满变压器油的高压油箱内，用油泵对变压器油进行循环，水、油通过多层水冷热交换器进行热交换。水冷循环系统由大功率水冷机对冷却介质——水进行冷却，水冷机包括进水管和出水管，出水管流出的是经水冷机冷却后的水，温度由水冷机设定，进水管是冷却后的水通过水冷散热器和油箱热交换器后，水温有所升高的水。温度控制系统包括水冷散热器的温度控制及油箱温度控制两部分，水冷散热器温度控制系统主要是对半导体开关IGBT的保护作用，水冷散热器上装有温控开关，温控开关连接在主回路控制系统中，低温时呈闭合状态，超过其标定温度40 ℃时证明IGBT发热异常，自动断开，激励源停止工作。油箱温度控制系统由浸在油箱内的温控热敏电阻连接在主回路控制系统控制，温度升高到标定值，温控电阻阻值减小到标定值，系统停止工作。 As shown in Figure 2, the present invention includes an excitation source temperature control system, the temperature rise rate of the semiconductor switching tube IGBT is increased when it works at 1000 Hz, and the water-cooled radiator 2 is designed to dissipate heat from the semiconductor switching tube IGBT, and the two-stage magnetic switch and pulse The total power consumption of the step-up transformer is about 1kW. In addition, they are all high-voltage devices. In order to better insulate and dissipate heat and reduce the volume of the excitation source, the pulse step-up transformer and two-stage magnetic pulse compression switch are integrated into a high-voltage oil tank filled with transformer oil. Inside, the oil pump is used to circulate the transformer oil, and the water and oil are exchanged through multi-layer water-cooled heat exchangers. The water-cooling cycle system uses a high-power water cooler to cool the cooling medium—water. The water cooler includes a water inlet pipe and an outlet pipe. The outlet pipe flows out of water cooled by the water cooler. The temperature is set by the water cooler. After the final water passes through the water-cooled radiator and the heat exchanger of the oil tank, the water temperature increases. The temperature control system includes two parts: the temperature control of the water-cooled radiator and the temperature control of the fuel tank. The temperature control system of the water-cooled radiator is mainly to protect the semiconductor switch IGBT. The temperature control switch is installed on the water-cooled radiator, and the temperature control switch is connected to the main circuit control In the system, it is in a closed state at low temperature, and when the temperature exceeds 40 °C, it proves that the IGBT is abnormally heated, and it is automatically disconnected, and the excitation source stops working. The temperature control system of the oil tank is controlled by the temperature control thermistor immersed in the oil tank connected to the main circuit control system. When the temperature rises to the calibrated value, the resistance of the temperature control resistor decreases to the calibrated value, and the system stops working.
油箱中置有脉冲升压变压器、两级磁脉冲压缩开关，650 V左右的直流电压输入脉冲升压变压器后，经电容充电系统形成电压约为20 kV，上升时间约为6us的高压脉冲，经两级磁脉冲压缩后形成电压约16kV,电压上升时间约100ns的高压脉冲，满足准分子激光器激励条件。内部器件均为在高压条件下工作，所以集成在充满变压器油的油箱内，有利于更好的绝缘，极大的缩减了系统体积，集成化程度更高。 The fuel tank is equipped with a pulse step-up transformer and a two-stage magnetic pulse compression switch. After the DC voltage of about 650 V is input to the pulse step-up transformer, a high-voltage pulse with a voltage of about 20 kV and a rise time of about 6us is formed through the capacitor charging system. After the two-stage magnetic pulse is compressed, a high-voltage pulse with a voltage of about 16kV and a voltage rise time of about 100ns is formed, which meets the excitation conditions of the excimer laser. The internal components all work under high voltage conditions, so they are integrated in the oil tank filled with transformer oil, which is conducive to better insulation, greatly reduces the system volume, and has a higher degree of integration.
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