CN106129783B - A kind of high-voltage great-current Single Pulse Discharge switch and high energy excimer laser - Google Patents
A kind of high-voltage great-current Single Pulse Discharge switch and high energy excimer laser Download PDFInfo
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- CN106129783B CN106129783B CN201610696730.9A CN201610696730A CN106129783B CN 106129783 B CN106129783 B CN 106129783B CN 201610696730 A CN201610696730 A CN 201610696730A CN 106129783 B CN106129783 B CN 106129783B
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0385—Shape
- H01S3/0387—Helical shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
Abstract
The invention discloses a kind of high-voltage great-current Single Pulse Discharge switch and high energy excimer laser, the switch is closed structure, the high pressure gas filled with air pressure constant；The switch includes shell, first electrode, second electrode, rotation electrode and rotary shaft；The rotary shaft runs through the shell；The rotation electrode is set in the rotary shaft；The first electrode and second electrode are located at the rotation electrode two sides, and are stretched out outside the shell respectively；It is the first discharging gap between the rotation electrode and the first electrode；It is the second discharging gap between the rotation electrode and the second electrode；First discharging gap and the second discharging gap two sides are discharge plasma diffusing, buffering area；The shell is equipped with port, and the port is used for the disengaging of gas.Switch of the invention has the characteristics that high working voltage, fast electric discharge, high conducting power, the switch combine four discharge cavities, obtains a kind of laser that can export high energy laser.
Description
Technical field
The present invention relates in field of laser device technology more particularly to a kind of high-voltage great-current Single Pulse Discharge switch and high energy
Excimer laser.
Background technique
At this stage, laser technology is fast-developing, and laser industry also becomes more and more important, and gas laser has
The features such as output power is high, maintenance cost is low, so that it remains very big laser market share, is especially laser machining
With material processing field, high power pulse gas laser is high because of peak power, high with material effects coupling efficiency, so that it
Or the main tool of laser processing and material processing；Have the excimer laser of output ultraviolet wavelength, is then Solid State Laser
The irreplaceable kind of device institute.High power pulse gas laser is the emphasis of energy photoelectronic industry, is laser processing and material
Expect the main tool of processing.
High power pulse gas laser, especially ultraviolet device are directed to the application demand of processing and Material Field, main
To develop in terms of high-power, narrow spaces, monochromaticjty, stability；And more have popularity application demand is then mainly big function
Rate technique direction, other three directions are relatively directed to some special application fields, have not as high-power index
There is the demand of generality；The reason of this generality demand, is very simple, that is, laser energy is needed to promote processing efficiency and matter
Amount needs laser energy to change or improve structure.
Excimer laser photon energy is high, can directly make molecule or atom scission of link；It is high with the coefficient of coup of material effects；
Can focus on the focal spot etc. of very little, a series of special performances that excimer laser has so that this laser have it is important
Application value, be a kind of important research and production tool.But excimer laser technology difficulty is high, system complex, on the one hand
It is because the quasi-molecule group service life is short, it is difficult to implement efficient excitation, lead to that electrical efficiency is low, laser power is lower；
On the other hand, excimer laser needs higher operating air pressure, this difficulty for resulting in regular picture to motivate；There is halogen gas again
It is unfavorable for characteristic, corrosivity and the toxicity of electric discharge, very high requirement also is proposed to Optical Maser System.
Summary of the invention
In view of this, the present invention provides a kind of high-voltage great-current Single Pulse Discharge switch and high energy excimer laser,
Solve the technical issues of above-mentioned excimer laser is unable to steady implementation efficient discharge excitation.
The technological means that the present invention uses is as follows: a kind of high-voltage great-current Single Pulse Discharge switch, the switch are closed
Structure, the high pressure gas filled with air pressure constant；
The switch includes shell, first electrode, second electrode, rotation electrode and rotary shaft；
The rotary shaft runs through the shell；
The rotation electrode is set in the rotary shaft；
The first electrode and second electrode are located at the rotation electrode two sides, and are stretched out outside the shell respectively；It is described
It is the first discharging gap between rotation electrode and the first electrode；
It is the second discharging gap between the rotation electrode and the second electrode；
First discharging gap and the second discharging gap two sides are discharge plasma diffusing, buffering area；
The shell is equipped with port, and the port is used for the disengaging of gas.
The corresponding surface of the preferably described first electrode, second electrode and the rotation electrode is respectively equipped with electrode disk, described
Electrode disk is refractory metal material；The rotary shaft is stainless steel material.
Preferably, the shell is insulating cylinder, in I-shaped.
Preferably, the inner walls are laid with potsherd.
Preferably, the first electrode and second electrode are in cylindrical structure；The rotation electrode is in cylinder or sphere structure.
Preferably, the central axis of the shell and the rotation electrode central axis are overlapped；The first electrode, second
Electrode is symmetrical with rotation electrode.
Preferably, when the second electrode connects high pressure, first electrode ground connection and rotation electrode connection height
When pressing pulse, the high-voltage great-current Single Pulse Discharge switch is in the conductive state, the high-voltage pulse control height
Pressure high current Single Pulse Discharge switches on-off.
The present invention also provides a kind of pulse low frequency time discharge excitation high energy excimer lasers, provide comprising the present invention
Described in any item high-voltage great-current Single Pulse Discharges switch.
Preferably, further include air storing cavity, set on the air storing cavity there are four energy storage discharge cavity, four discharge cavities are symmetrical
It is laid in the air storing cavity circumference, the discharge cavity described in any item high-voltage great-current pulses provided by the present invention are put
Electric switch control conducting.
Preferably, four discharge cavities share a light path system.
Beneficial effects of the present invention:
Using a kind of high-voltage great-current Single Pulse Discharge switch provided by the present invention, the high-voltage great-current pulse is put
Electric switch is closed structure, filled with air pressure constant high pressure gas, so that high-voltage great-current Single Pulse Discharge switch can be one
It works under constant voltage；Gas in shell is subject to automatic inflatable by the port, is recycled, cooling and filtering makes to discharge again
The gas of preceding region of discharge has good state of insulation；The buffer area is empty to one diffusion of region of discharge high temperature and high pressure gas
Between, be conducive to the insulation recovery of region of discharge and reduce electrode deterioration.When the second electrode connects high pressure, the first electrode connects
When ground and rotation electrode connection high-voltage pulse, the high-voltage great-current Single Pulse Discharge switch is in the conductive state；
For the rotation electrode after applying high-voltage pulse, the first discharging gap between the rotation electrode and first electrode is breakdown,
After breakdown, apply between the second electric discharge that high pressure on the second electrode is just had the ability between breakdown rotation electrode and second electrode
Gap, to realize second electrode to the breakdown process between first electrode；Realizing, there is high working voltage, fast electric discharge, height to lead
The high-voltage great-current Single Pulse Discharge switch of logical power.It is switched using the high-voltage great-current Single Pulse Discharge, one can be obtained
Kind can export the laser of high energy laser.
In addition, solving region of discharge using four discharge cavity synchronization motivationtheory modes and being in high voltage, high current, large volume
The problem of being not easy uniform and stable discharge excitation under discharging condition.The high-voltage great-current Single Pulse Discharge switch combines four
Energy storage discharge cavity forms a kind of pulse low frequency time discharge excitation high energy excimer laser, can export 500~1000 cokes
The laser of ear grade energy.The present invention can push the development of excimer laser device, also provide for laser processing and material processing
A kind of new technological means.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that a kind of high-voltage great-current Single Pulse Discharge of the invention switchs；
Fig. 2 is the schematic diagram of the embodiment of the present invention 2；
Fig. 3 is a kind of circuit system signal of pulse low frequency of the invention time discharge excitation high energy excimer laser
Figure；
Fig. 4 is a kind of pulse low frequency of the invention time discharge excitation high energy excimer laser light path system schematic diagram；
It is as shown in the figure: 1. shells, 2. first electrodes, 3. second electrodes, 4. rotation electrodes, 5. rotary shafts, 6. first electric discharges
Gap, 7. second discharging gaps, 8. buffer areas, 9. first ports, 10. second ports, 11. discharge cavities, 12. electrode disks, 101.
Switch, 102. air storing cavities, 103. optical paths.
Specific embodiment
The principles and features of the present invention are described below, and illustrated embodiment is served only for explaining the present invention, is not intended to
It limits the scope of the invention.
Embodiment 1
As shown in Figure 1, a kind of high-voltage great-current Single Pulse Discharge switch, the high-voltage great-current Single Pulse Discharge switch are
Closed structure keeps its air pressure constant by pressure control unit filled with high pressure gas, so that the high-voltage great-current pulse
Discharge switch can work under certain voltage；High-voltage great-current Single Pulse Discharge switch includes shell 1, first electrode 2, the
Two electrodes 3, rotation electrode 4 and rotary shaft 5；The shell 1 is insulating cylinder, and in I-shaped, 1 inner wall of shell is laid with potsherd,
The potsherd improves insulation performance, is also convenient for the cleaning of sputtering object.The rotary shaft 5 be stainless steel material, run through it is described
Shell 1；The rotary shaft 5 rotation using magnetic coupling mode switched outside motor power.The rotation electrode 4 is nested in
In the rotary shaft 5；The first electrode 2 and second electrode 3 are located at 4 two sides of rotation electrode, and stretch out the shell respectively
Outside body 1；The corresponding surface of the first electrode 2, second electrode 3 and rotation electrode 4 is respectively equipped with electrode disk 12, and the corresponding surface is
The reinforcing face of electric discharge, the electrode disk 12 are refractory metal material, and the electrode disk 12 is brazed in respectively using heat-resisting material
The first electrode 2,3 surface of second electrode, the 12 high temperature resistant ablation of electrode disk；Its lap is red copper material；The rotation
Axis is stainless steel material.The first electrode 2 and second electrode 3 are in cylindrical structure, and the rotation electrode 4 is in cylinder or sphere knot
Structure, in the present embodiment, the rotation electrode 4 are cylindrical structure, and in another embodiment, the rotation electrode 4 is in ball
Body structure；The rotation electrode 4 selects cylindrical body or ball-shape face, and the first electrode, second electrode 3 are then corresponding to it selection
Arc surface or ball curved surface, keep electrode spacing value consistent.4 central axis of central axis and the rotation electrode of the shell 1
It is overlapped；The first electrode 2, second electrode 3 and rotation electrode 4 are symmetrical.The rotation electrode 4 and the first electrode 2
Between be the first discharging gap 6；It is the second discharging gap 7 between the rotation electrode 4 and the second electrode 3；Described first
Discharging gap 6 and 7 two sides of the second discharging gap are discharge plasma diffusing, buffering area 8, first discharging gap 6 and
Two discharging gaps 7 are slit areas, will form high temperature and high pressure gas in work, these high temperature and pressure are then given in the buffer area 8
One diffusion space of gas is conducive to the insulation recovery of region of discharge and reduces electrode deterioration.The shell 1 is equipped with port, institute
Stating port includes the first port 9 and the second port 10, and first port 9 and the second port 10 distinguish position 5 end of rotary shaft
Face two sides.First port 9 and the second port 10 are used for the disengaging of gas, and first port 9 and the second port 10 pass through
Gas in shell 1 is subject to circulating cooling and filtering by external circulator, has the gas of region of discharge before discharging again
Good state of insulation.It is connected when the second electrode 3 connects high pressure, the ground connection of the first electrode 2 and the rotation electrode 4
When high-voltage pulse, the high-voltage great-current Single Pulse Discharge switch is in the conductive state, described in the high-voltage pulse control
High-voltage great-current Single Pulse Discharge switches on-off.
In the present embodiment, the high-voltage great-current Single Pulse Discharge switch design parameter is as follows: electrode disk diameter is
80mm, with a thickness of 10mm；4 diameter of rotation electrode is 60mm, is highly 80mm；Electrode spacing is 3.5mm；Drum insulation cylinder shell
1 small internal diameter is 120mm, and big cylinder internal diameter is 260mm；Filling gas is N2, the blowing pressure 3Mpa.
Working principle: connect when the second electrode 3 connects high pressure, the ground connection of the first electrode 2 and the rotation electrode 4
When connecing high-voltage pulse, the high-voltage great-current Single Pulse Discharge switch is in the conductive state.The rotation electrode 4 is applying height
After pressing pulse, the first discharging gap 6 between the rotation electrode 4 and first electrode 2 is breakdown, after breakdown, is applied to the
The second discharging gap 7 that high pressure on two electrodes 3 is just had the ability between breakdown rotation electrode 4 and second electrode 3, to realize
Second electrode 3 arrives the breakdown process between first electrode 2；Realize the high pressure with high working voltage, fast electric discharge, high conducting power
High current Single Pulse Discharge switch.
Embodiment 2
As shown in figures 1-4, a kind of pulse low frequency time discharge excitation high energy excimer laser, including switch 101, put
Electric chamber 11 and air storing cavity 102, the switch 101 are switched with a kind of high-voltage great-current Single Pulse Discharge of embodiment 1, the electric discharge
The quantity of chamber 11 is four, and four discharge cavities 11 are uniformly set to 102 circumference of air storing cavity, and each discharge cavity 11 is by one
The control conducting of switch 101；Four discharge cavities 11 share a light path system, and the light path system includes four optical paths 103,
Each optical path 103 is corresponding with a discharge cavity 11, and four optical paths 103 form a light path system, the light path system such as Fig. 4
It is shown.
As shown in Fig. 2, the design principle of four discharge cavities 11: the pulse low frequency time discharge excitation high energy quasi-molecule swashs
Light device, region of discharge are under the conditions of high voltage, high current, volume discharge, using four 11 synchronization motivationtheory sides of discharge cavity
Formula can solve the problems, such as that large volume is not easy uniform and stable discharge excitation.Due to pursuing high-energy output, in single or low frequency
The laser output of lower work, four discharge cavities 11 is connected into a light path system, and output power is improved to the water close to 4 times
It is flat.If only with a discharge cavity, it is desirable to achieve the effect that this four discharge cavities 11, the length of discharge cavity will be too long, is intended to
Keep such a overlength degree discharge cavity Uniform Discharge, it is difficult to realize, and overlength degree discharge cavity (6~8 meters) is also difficult to realize.
Therefore four discharge cavities 11 of scientific design enable laser stable discharging in high voltage, high current, large volume.?
In the present embodiment, 11 design parameter of discharge cavity is as follows: the length of its electrode is 2000mm, width 60mm；Between main discharge
Away from for 45mm.
In the present embodiment, the operating voltage of laser is 45kV, and trigger voltage 50kV, frequency is 1~2Hz；Wavelength
For 308nm, single pulse energy 500J.In a further embodiment, it can be achieved that single pulse energy within the scope of 500~1000J.
Working principle: as shown in figure 3, the circuit system of the pulse low frequency time discharge excitation high energy excimer laser
For the fast discharge excitation circuit of typical C-C, wherein C0, C1 are one group of capacitor, and C0 is main storage capacitor, and C1 is to be connected in parallel on laser
Fast discharge process may be implemented in the peaking capacitor of device laser cavity two sides, C1 capacitor, is conducive to laser output；L is charging inductance.
When switch 101 is not turned on, capacitor C0 is in charged state, and high direct voltage gives capacitor C0 fully charged, due to inductance by inductance L
Both end voltage is zero, so stage capacitor C1 does not charge.When switch 101 is connected under trigger pulse control, switch
101, capacitor C0 and laser cavity just constitute a discharge loop, and storage capacitor C0 first charges to peaking capacitor C1, and then C1 is to swashing
Optical cavity electric discharge, the laser gas of exciting laser chamber generate high power, superlaser.
In conclusion using a kind of high-voltage great-current Single Pulse Discharge switch provided by the present invention, the big electricity of high pressure
Stream Single Pulse Discharge switch keeps its air pressure constant by pressure control unit filled with high pressure gas for closed structure, so that institute
Stating high-voltage great-current Single Pulse Discharge switch can work under certain voltage；First port 9 and the second port 10 pass through outer
Gas in shell 1 is subject to circulating cooling and filtering by the circulator set, and has the gas of region of discharge before discharging again good
Good state of insulation；One diffusion space of region of discharge high temperature and high pressure gas is given in the buffer area 8, and the insulation for being conducive to region of discharge is extensive
Multiple and reduction electrode deterioration.Connect when the second electrode 3 connects high pressure, the ground connection of the first electrode 2 and the rotation electrode 4
When connecing high-voltage pulse, the high-voltage great-current Single Pulse Discharge switch is in the conductive state.The rotation electrode 4 is applying height
After pressing pulse, the first discharging gap 6 between the rotation electrode 4 and first electrode 2 is breakdown, after breakdown, is applied to the
The second discharging gap 7 that high pressure on two electrodes 3 is just had the ability between breakdown rotation electrode 4 and second electrode 3, to realize
Second electrode 3 arrives the breakdown process between first electrode 2；Realize the high pressure with high working voltage, fast electric discharge, high conducting power
High current Single Pulse Discharge switch.It is switched using the high-voltage great-current Single Pulse Discharge, can obtain one kind can export height
The laser of energy laser.
In addition, using four 11 synchronization motivationtheory modes of discharge cavity, solves region of discharge and be in high voltage, high current, substantially
Accumulate the problem of being not easy uniform and stable discharge excitation under electric condition.The high-voltage great-current Single Pulse Discharge switch combines four
A energy storage discharge cavity 11 forms a kind of pulse low frequency time discharge excitation high energy excimer laser, it can export 500~
The laser of 1000 joules of grade energy.The present invention can push the development of excimer laser device, also be laser processing and material processing
Provide a kind of new technological means.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent substitution, improvement and etc. done be should be included within the scope of the present invention.
Claims (7)
1. a kind of pulse low frequency time discharge excitation high energy excimer laser, which is characterized in that including high-voltage great-current simple venation
Impulse electricity switch and air storing cavity,
The high-voltage great-current Single Pulse Discharge switch is closed structure, the high pressure gas filled with air pressure constant；
The high-voltage great-current Single Pulse Discharge switch includes shell, first electrode, second electrode, rotation electrode and rotary shaft；
The rotary shaft runs through the shell；
The rotation electrode is set in the rotary shaft；
The first electrode and second electrode are located at the rotation electrode two sides, and are stretched out outside the shell respectively；The rotation
It is the first discharging gap between electrode and the first electrode；
It is the second discharging gap between the rotation electrode and the second electrode；
First discharging gap and the second discharging gap two sides are discharge plasma diffusing, buffering area；
The shell is equipped with port, and the port is used for the disengaging of gas；
The first electrode and second electrode are in cylindrical structure；The rotation electrode is in cylinder or sphere structure；
It is set on the air storing cavity there are four energy storage discharge cavity, four discharge cavities are symmetrically laid in the air storing cavity circumference, institute
Discharge cavity is stated to be connected by the high-voltage great-current Single Pulse Discharge switch control.
2. a kind of pulse low frequency according to claim 1 time discharge excitation high energy excimer laser, which is characterized in that
The corresponding surface of the first electrode, second electrode and the rotation electrode is respectively equipped with electrode disk, and the electrode disk is high temperature resistant
Metal material；The rotary shaft is stainless steel material.
3. a kind of pulse low frequency according to claim 1 time discharge excitation high energy excimer laser, which is characterized in that
The shell is insulating cylinder, in I-shaped.
4. a kind of pulse low frequency according to claim 1 time discharge excitation high energy excimer laser, which is characterized in that
The inner walls are laid with potsherd.
5. a kind of pulse low frequency according to claim 1 time discharge excitation high energy excimer laser, which is characterized in that
The central axis of the shell and the rotation electrode central axis are overlapped；The first electrode, second electrode and rotation electrode
It is symmetrical.
6. a kind of pulse low frequency according to claim 1 time discharge excitation high energy excimer laser, which is characterized in that
It is described when the second electrode connects high pressure, first electrode ground connection and rotation electrode connection high-voltage pulse
High-voltage great-current Single Pulse Discharge switch is in the conductive state, and the high-voltage pulse control high-voltage great-current pulse is put
The on-off of electric switch.
7. pulse low frequency according to claim 1 time discharge excitation high energy excimer laser, which is characterized in that four
The discharge cavity shares a light path system.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610696730.9A CN106129783B (en) | 2016-08-19 | 2016-08-19 | A kind of high-voltage great-current Single Pulse Discharge switch and high energy excimer laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610696730.9A CN106129783B (en) | 2016-08-19 | 2016-08-19 | A kind of high-voltage great-current Single Pulse Discharge switch and high energy excimer laser |
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| CN106129783A CN106129783A (en) | 2016-11-16 |
| CN106129783B true CN106129783B (en) | 2019-07-26 |
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| CN201610696730.9A Expired - Fee Related CN106129783B (en) | 2016-08-19 | 2016-08-19 | A kind of high-voltage great-current Single Pulse Discharge switch and high energy excimer laser |
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| CN111585152B (en) * | 2020-04-08 | 2022-02-08 | 中国科学院微电子研究所 | Electrode for laser cavity, laser system and exposure equipment |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4280098A (en) * | 1979-05-25 | 1981-07-21 | Veradyne Corp. | Coaxial spark gap switch |
| US4556981A (en) * | 1981-09-14 | 1985-12-03 | Kraftwerk Union Aktiengesellschaft | Laser of the TE type, especially a high-energy laser |
| CN1088359A (en) * | 1993-03-27 | 1994-06-22 | 牡丹江市光电技术研究所 | Controllable ratory switch |
| CN1510802A (en) * | 2002-12-20 | 2004-07-07 | 中国科学院电子学研究所 | Pulse preionization high-frequency discharging panel gas laser |
| CN2914408Y (en) * | 2005-07-11 | 2007-06-20 | 华南师范大学 | Dielectric electrode of motivating carbon dioxide laser by high frequency and discharge electrode thereof |
| CN101119008A (en) * | 2006-08-03 | 2008-02-06 | 苏州六六视觉科技股份有限公司 | Excimer laser for generating circular light spot |
| CN101295852A (en) * | 2008-05-19 | 2008-10-29 | 牡丹江师范学院 | Oxygen iodine laser for co-cavity discharging and initiating enclosed circulating impulse |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6584132B2 (en) * | 2000-11-01 | 2003-06-24 | Cymer, Inc. | Spinodal copper alloy electrodes |
| CN102522698B (en) * | 2011-12-06 | 2013-04-17 | 西安交通大学 | Rodlike three-electrode high-energy pulse discharge switch under vacuum environment |
| CN202586910U (en) * | 2012-05-04 | 2012-12-05 | 上海理工大学 | Controllable high-voltage air switch device for pulse power supply |
-
2016
- 2016-08-19 CN CN201610696730.9A patent/CN106129783B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4280098A (en) * | 1979-05-25 | 1981-07-21 | Veradyne Corp. | Coaxial spark gap switch |
| US4556981A (en) * | 1981-09-14 | 1985-12-03 | Kraftwerk Union Aktiengesellschaft | Laser of the TE type, especially a high-energy laser |
| CN1088359A (en) * | 1993-03-27 | 1994-06-22 | 牡丹江市光电技术研究所 | Controllable ratory switch |
| CN1510802A (en) * | 2002-12-20 | 2004-07-07 | 中国科学院电子学研究所 | Pulse preionization high-frequency discharging panel gas laser |
| CN2914408Y (en) * | 2005-07-11 | 2007-06-20 | 华南师范大学 | Dielectric electrode of motivating carbon dioxide laser by high frequency and discharge electrode thereof |
| CN101119008A (en) * | 2006-08-03 | 2008-02-06 | 苏州六六视觉科技股份有限公司 | Excimer laser for generating circular light spot |
| CN101295852A (en) * | 2008-05-19 | 2008-10-29 | 牡丹江师范学院 | Oxygen iodine laser for co-cavity discharging and initiating enclosed circulating impulse |
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| Publication number | Publication date |
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| CN106129783A (en) | 2016-11-16 |
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