CN102798987A - Tunable optical filter with fixed frequency space and single-mode output - Google Patents

Tunable optical filter with fixed frequency space and single-mode output Download PDF

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Publication number
CN102798987A
CN102798987A CN2012102658736A CN201210265873A CN102798987A CN 102798987 A CN102798987 A CN 102798987A CN 2012102658736 A CN2012102658736 A CN 2012102658736A CN 201210265873 A CN201210265873 A CN 201210265873A CN 102798987 A CN102798987 A CN 102798987A
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catoptron
optical
logical light
glass sheet
inboard
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CN2012102658736A
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CN102798987B (en
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高培良
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Optoelectronic Technology Co Ltd Tianjin Odd Spectrum
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Optoelectronic Technology Co Ltd Tianjin Odd Spectrum
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Priority to PCT/CN2013/076163 priority patent/WO2014019399A1/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/07—Polarisation dependent

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention relates to a tunable optical filter with fixed frequency space and single-mode output. The main technical characteristics of the tunable optical filter are as follows: the optical filter comprises a Fabry-Perot etalon and a transmission frequency tunable Fabry-Perot filter; the Fabry-Perot etalon and the transmission frequency tunable Fabry-Perot filter have the same response rang, and the transmission frequency tunable Fabry-Perot filter is only effective on linearly polarized lights in the specific polarization direction. The optical filter is reasonable to design, and free from mechanical movement component, has the characteristics of stable and reliable performance, simple structure, low cost, small size, simplicity of installation and production and so on, can reliably run under the extreme working environment with small size requirement, and can be widely applied to fields such as laser, optical test, optical fiber communication, biology, medical instrument and optical fiber sensor network.

Description

The tunable optical filter of a kind of fixed frequency interval and single mode output
Technical field
The invention belongs to photoelectric field, the tunable optical filter of especially a kind of fixed frequency interval and single mode output.
Background technology
The traditional optical Fabry-Perot etalon is a kind of filtering device that utilizes the multiple-beam interference principles, mainly contains two kinds: a kind of is the airspace, and another kind is the optical glass interval.The multiple-beam interference effect of the high reflectance institute forming method Fabry-Perot-type cavity through multilayer dielectric film on two logical light faces; Can be implemented in the multi-wavelength narrow-band filtering output in the broad spectrum; Characteristic such as have that stable performance, clear aperature are big, the luminous power damage threshold is high, simple in structure and cost is low; Therefore, be widely used in all kinds of laser instruments, optical gauge and the optical-fibre communications device.Utilize the traditional optical Fabry-Perot etalon also can realize the tuning of transmitted light frequency.Fabry-Perot etalon for the airspace; Can carry out tuningly through the incident angle that changes light, but the tuning range of this method is very little, or realizes with the chamber length of mechanical means (like step motor) change Fabry-Perot etalon; This method can realize big tuning range; But tuning precision is low, and high to the accuracy requirement of mechanical part, and stability is bad.Development along with PZT piezoelectric ceramics (lead zirconate titanate) technology can realize high-precision displacement.It is long to adopt this technology to change the chamber of Fabry-Perot etalon, can improve tuning precision and speed, but is difficult for accomplishing miniaturization, and drive source is also complicated.Though also can realize in a big way tuning through the temperature that changes etalon,, the shortcoming of this method is that speed is slow.
The output of single Fabry-Perot etalon or single fabry-perot filter is multi-frequency or the multimode output of a kind of gap periods for its Free Spectral Range; For example; Free Spectral Range is 100GHz; Then in the 1000GHz scope, 10 arrowband multimode outputs that are spaced apart 100GHz just can be arranged.Have only when frequency range during, could realize single-frequency output less than Free Spectral Range.If the increase Free Spectral Range, will reduce the thickness of Fabry-Perot etalon, for example; To the light wave of 1500 nanometers, if adopt common melting quartz glass, the thickness that the Free Spectral Range of 100GHz and 1000GHz is corresponding is about 1 millimeter and 0.1 millimeter respectively; Therefore; Even accomplish the Free Spectral Range of 1000GHz, be actually difficulty very, say nothing of bigger Free Spectral Range.In sum, in practical application,, a spectrum adopt single fabry-perot filter to go to realize that single mode tuning output almost is impossible in being the wide scope of tens nanometers.
Summary of the invention
The objective of the invention is to overcome the deficiency of prior art; The tunable optical filter of a kind of fixed frequency interval and single mode output is provided; It differs certain intervals through the Free Spectral Range of Fabry-Perot etalon and the intrinsic Free Spectral Range of said tunable fabry-perot filter; And utilize the tunable characteristics of said tunable fabry-perot filter frequencies of transmission, in certain spectral range, realize the tunable single mode output function identical with the Free Spectral Range of Fabry-Perot etalon.
The present invention solves existing technical matters and takes following technical scheme to realize:
The tunable optical filter of a kind of fixed frequency interval and single mode output; A Fabry-Perot etalon and a frequencies of transmission tunable fabry-perot filter of being oppositely arranged by front and back constitute, and this Fabry-Perot etalon and frequencies of transmission tunable fabry-perot filter have the identical spectra responding range and the frequencies of transmission tunable fabry-perot filter is only effective to the linearly polarized light with particular polarization.
And said Fabry-Perot etalon has certain Free Spectral Range and acutance coefficient; The intrinsic Free Spectral Range of said frequencies of transmission tunable fabry-perot filter when added electric field not be less than the Free Spectral Range of Fabry-Perot etalon, and its difference is greater than the acutance coefficient of Fabry-Perot etalon or greater than the acutance coefficient of said frequencies of transmission tunable fabry-perot filter.
And; Described frequencies of transmission tunable fabry-perot filter comprises first catoptron, liquid crystal material, second catoptron and driving circuit; The logical light face arranged outside high reflectance multilayer dielectric film of said first catoptron; The inboard ground floor of the logical light face of first catoptron is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The arranged outside high reflectance multilayer dielectric film of said second catoptron; The inboard ground floor of second catoptron is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode; Cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first catoptron inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of first catoptron and second catoptron.
And; Described frequencies of transmission tunable fabry-perot filter comprises first catoptron, liquid crystal material, second catoptron and driving circuit; The logical light face arranged outside optical anti-reflective film of said first catoptron; The inboard ground floor of the logical light face of first catoptron is provided with the high reflectance multilayer dielectric film, on this high reflectance multilayer dielectric film, transparency electrode is set; The arranged outside high reflectance multilayer dielectric film of said second catoptron; The inboard ground floor of second catoptron is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode; Cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first catoptron inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face inboard of first catoptron and second catoptron.
And; Described frequencies of transmission tunable fabry-perot filter comprises first catoptron, liquid crystal material, second catoptron and driving circuit; The logical light face arranged outside optical anti-reflective film of said first catoptron; The inboard ground floor of the logical light face of first catoptron is provided with the high reflectance multilayer dielectric film, on this high reflectance multilayer dielectric film, transparency electrode is set; The arranged outside optical anti-reflective film of said second catoptron; The inboard ground floor of second catoptron is provided with the high reflectance multilayer dielectric film; On this high reflectance multilayer dielectric film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode; Cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first catoptron inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, the logical light face of first catoptron inboard keeping parallelism of logical light face inboard and second catoptron and mechanics Fabry-Perot-type multiple-beam interference chamber.
And described frequencies of transmission tunable fabry-perot filter comprises first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and second catoptron; The logical light face arranged outside high reflectance multilayer dielectric film of said first catoptron, the logical light face inboard of first catoptron is the optical polish face; It is inboard that the first optical clear glass sheet is arranged on first catoptron; The logical light face outside of the first optical clear glass sheet is the optical polish face; The inboard ground floor of the logical light face of the first optical clear glass sheet is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The logical light face arranged outside high reflectance multilayer dielectric film of said second catoptron, the logical light face inboard of second catoptron is the optical polish face; It is inboard that the second optical clear glass sheet is arranged on second catoptron; The logical light face outside of the second optical clear glass sheet is the optical polish face; The inboard ground floor of the second optical clear glass sheet is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode, cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of first catoptron and second catoptron.
And described frequencies of transmission tunable fabry-perot filter comprises first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and second catoptron; The logical light face arranged outside optical anti-reflective film of said first catoptron, the logical light face inboard of first catoptron is provided with the high reflectance multilayer dielectric film; It is inboard that the first optical clear glass sheet is arranged on first catoptron; The logical light face outside of the first optical clear glass sheet is for the optical polish face or optical anti-reflective film is set; The inboard ground floor of the logical light face of the first optical clear glass sheet is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The logical light face arranged outside high reflectance multilayer dielectric film of said second catoptron, the logical light face inboard of second catoptron is the optical polish face; It is inboard that the second optical clear glass sheet is arranged on second catoptron; The logical light face outside of the second optical clear glass sheet is the optical polish face; The inboard ground floor of the second optical clear glass sheet is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode, cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, liquid crystal material is placed in this cavity; Driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face inboard of first catoptron and second catoptron.
And described frequencies of transmission tunable fabry-perot filter comprises first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and second catoptron; The logical light face arranged outside optical anti-reflective film of said first catoptron, the logical light face inboard of first catoptron is provided with the high reflectance multilayer dielectric film; It is inboard that the first optical clear glass sheet is arranged on first catoptron; The logical light face outside of the first optical clear glass sheet is for the optical polish face or optical anti-reflective film is set; The inboard ground floor of the logical light face of the first optical clear glass sheet is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The logical light face arranged outside optical anti-reflective film of said second catoptron, the inboard ground floor of the logical light face of second catoptron is provided with the high reflectance multilayer dielectric film; It is inboard that the second optical clear glass sheet is arranged on second catoptron; The logical light face outside of the second optical clear glass sheet is for the optical polish face or optical anti-reflective film is set; The inboard ground floor of the second optical clear glass sheet is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode, cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Said driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, the logical light face of first catoptron inboard keeping parallelism of logical light face inboard and second catoptron and mechanics Fabry-Perot-type multiple-beam interference chamber.
And what described liquid crystal material adopted is nematic phase type liquid crystal, and the thickness of this liquid crystal layer is several microns to tens microns.
And described first catoptron is optically transparent material and has identical optical index with second catoptron.
And described driving circuit is that a kind of frequency is the square-wave pulse circuit of 1 KHz to 10 KHzs, and pulse voltage amplitude is adjustable to 5 volts from 0 volt.
And the outside of the inboard of said first catoptron and the first optical clear glass sheet is connected together or adopts industry to go up the assemble method of no glue on the logical light light path commonly used with the optical clear refractive index match is gluing: promptly stick with glue in logical light light path junction in addition and connect; The outside of the inboard of said second catoptron and the second optical clear glass sheet is connected together or adopts industry to go up the assemble method of no glue on the logical light light path commonly used with the optical clear refractive index match is gluing: promptly stick with glue in logical light light path junction in addition and connect; Described first catoptron, second catoptron, the first optical clear glass sheet and the second optical clear glass sheet are optically transparent material and have identical or essentially identical optical index; The refractive index and the optically transparent material refractive index of said optical clear refractive index match glue are basic identical.
And incident light gets into said frequencies of transmission tunable fabry-perot filter from the logical light face of said Fabry-Perot etalon.
And incident light is from the tunable Fabry of described frequencies of transmission--the logical light face of perot filter gets into said Fabry-Perot etalon.
Advantage of the present invention and good effect are:
The present invention is reasonable in design; It combines a Fabry-Perot etalon and a frequencies of transmission tunable fabry-perot (Fabry-Perot) wave filter effectively; Liquid crystal is placed in the chamber of Fabry-Perot etalon and utilizes the electro-optic birefringent effect of liquid crystal and the linearly polarized light of a certain particular polarization of incident is produced the optical phase modulation; Realization to the linear polarization light frequency that sees through fabry-perot filter continuously, fast and fine tune.Because the thickness of liquid crystal layer is extremely thin, wideband adjustable fabry-perot filter that therefore can manufactured size is little, Free Spectral Range is big, simultaneously, the fast precise that can be implemented in the light frequency in the broad spectrum is tuning.The present invention have no mechanical moving-member, stable and reliable for performance, simple in structure, cost is low, size is little, be easy to install and characteristics such as production; Can satisfy for the reliability service that requires under the little and extreme working environment of size, in other fields such as laser instrument, optic test, optical-fibre communications, biology, medicine equipment and Fibre Optical Sensor network, have a wide range of applications.
Description of drawings
Fig. 1 is the synoptic diagram of common Fabry-Perot etalon;
Fig. 2 is a kind of structural representation that comprises the tunable fabry-perot filter of nematic phase type liquid crystal material layer;
Fig. 3 is the change curve synoptic diagram of the phase place of light transmission liquid crystal material with extra electric field;
Fig. 4 is the synoptic diagram of the tunable fabry-perot filter that comprises nematic phase type liquid crystal material layer of another kind of structure;
Fig. 5 is the synoptic diagram of Fabry-Perot etalon transmitted spectrum;
Fig. 6 is the synoptic diagram of tunable fabry-perot filter transmitted spectrum;
Fig. 7 is a structural representation of the present invention;
Fig. 8 is an intrinsic transmitted spectrum synoptic diagram of the present invention;
Fig. 9 is that fixed intervals of the present invention and single mode are exported tunable transmitted spectrum synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing the embodiment of the invention is done further detailed description.
Fig. 1 is a kind of synoptic diagram of common Fabry-Perot (Fabry-Perot) light standard tool 100.The material of this Fabry-Perot light standard tool 100 generally adopts to resemble near infrared and visible light wave range and melts quartz or the such optical glass of BK7; The refractive index of supposing material is n; Two logical light faces 2 and 4 all plate highly reflecting films, suppose that reflectivity is R, and thickness is h; Light is with the incident angle incident near zero degree, and then the Free Spectral Range FSR of light standard tool 100 can be expressed as: Δ λ=λ 2/ (2nh), or use frequency representation: Δ ν=c/ (2nh), wherein c is the light velocity.The crest frequency of transmitted light can be expressed as: ν=mc/ (2nh), and wherein m is an order of interference, transmission light frequency broadband can be expressed as: Δ ν 1/2(FWHM)=c (1-R)/(2nhR 1/2), wherein c is the light velocity.
Can find out that from above-mentioned two formula the Free Spectral Range FSR of light standard tool 100 and thickness are that h is inversely proportional to.The refractive index of supposing material is n=1.5, realize FSR 1=100GHz, 1 millimeter of thickness h ≈.Require FSR big more, thickness is just more little.After the material of etalon and thickness were confirmed, transmission light frequency broadband was main relevant with reflectivity R, and reflectivity is high more, and (finesse) is more little for frequency broadband or acutance.The characteristics of the transmitted spectrum of Fabry-Perot (Fabry-Perot) etalon are that the bandwidth of each transmission spectrum can accomplish very narrow, and the frequency interval of transmitted spectrum equates and the non-constant width of optical frequency bandwidth, generally can cover the above optical frequency bands of a spectrum of 100 nanometers.Fig. 5 has provided the synoptic diagram of Fabry-Perot light standard tool 100 output spectrums.
Fig. 2 has provided a kind of nematic phase type liquid crystal refractive index to linearly polarized light under electric field action of utilizing and has produced the tunable fabry-perot filter that changes and design.General liquid crystal material as photoelectric device has high resistivity.Therefore, can be considered to desirable dielectric substance.Because constitute the orderly orientation of molecule and the form of extension elongation, liquid crystal has anisotropic dielectric characteristic and single shaft symmetry, as a uniaxial crystal, the direction of its optical axis is consistent with the oriented of molecule.When liquid crystal molecule under extraneous effect of electric field, can form electric dipole.Under the formed moment loading of electric dipole, make the orientation of liquid crystal molecule turn to the direction of electric field, can change the direction of the optical axis of liquid crystal through changing the power of electric field.Therefore, can utilize this characteristic of liquid crystal, make optical phase modulator, tunable optic filter, or other photoelectric devices are like photoswitch and light intensity modulator etc.The general thickness that is used as the liquid crystal rete of photoelectric device is several microns to tens microns.
As shown in Figure 2, a kind of tunable fabry-perot filter 200 comprises that first catoptron 10, liquid crystal material 18, second catoptron 20 and driving circuit 14, the first catoptrons 10 and second catoptron 20 are optically transparent material.
Tunable fabry-perot filter 200 has three kinds of various structure, below explanation respectively:
200 first kinds of structures of tunable fabry-perot filter are: on the logical light face outer surface 8 and 22 of first catoptron 10 and second catoptron 20, be coated with the high reflectance multilayer dielectric film respectively, forming method Fabry-Perot-type (Fabry-Perot) chamber between two high reflectance multilayer dielectric films; Be provided with optical anti-reflective film 12 and transparency electrode rete 16 from inside to outside successively in the logical light face inboard of first catoptron 10; Logical light face inboard at second catoptron 20 is provided with optical anti-reflective film 24, transparency electrode 26 and non-conducting material film 19 from inside to outside successively, and optical anti-reflective film 12 and optical anti-reflective film 24 are plated in the logical light face inside surface of first catoptron 10 respectively and at the logical light face inside surface of second catoptron 20.The thickness of non-conducting material film 19 is several microns to tens microns, covers other parts and one the one wide passage that leads to the catoptron edge of millimeter except that clear aperature, and purpose is for being infused in liquid crystal unnecessary in the chamber exit passageway to be provided.The cavity that it is tens microns in several microns roads that the inboard of this non-conducting material film 19 and said first catoptron 10 constitutes a thickness is used to be provided with liquid crystal material 18; What this liquid crystal material 18 adopted is nematic phase type liquid crystal, and the thickness of this liquid crystal material is about several microns to tens microns.Because therefore the thickness very little (several microns to tens microns) of liquid crystal, can make the tunable fabry-perot filter of intrinsic Free Spectral Range (i.e. the Free Spectral Range of the tunable optic filter when no extra electric field).Two transparency electrodes are connected with driving circuit 14, and the drive signal that is produced by driving circuit forms driving electric field between two transparency electrode retes; Utilize electric field to change the brilliant effective refractive index n of Fabry-Perot intraluminal fluid, regulate the light frequency ν and the Free Spectral Range (FSR) of the transmitted light of fabry-perot filter.Common driving electric field is that voltage is several volts, and frequency is the square-wave signal of 1 KHz to several KHzs.
In like Fig. 2, the light beam 6 that incides wave filter 200 is a branch of along the propagation of z direction, and polarization axle is the linearly polarized light of x direction; The refractive index of supposing light transparent materials is n, and two logical light faces 8 and 22 all plate highly reflecting films, suppose that reflectivity is R; Thickness is D, then the Free Spectral Range FSR of wave filter 200 1Be respectively with the transmitted light frequency: Δ λ=λ 2/ (2nD+ Γ), or use frequency representation: Δ ν=c/ (2nD+ Γ), wherein c is the light velocity, the Γ representative changes light path to incident light produced by refraction by liquid crystal under the extra electric field effect.The crest frequency of transmitted light can be expressed as: ν=mc/ (2nD+ Γ), and wherein m is an order of interference, transmission light frequency broadband (also claiming the acutance coefficient) can be expressed as: Δ ν 1/2(FWHM)=c (1-R)/((2nD+ Γ) R 1/2), wherein c is the light velocity.
Fig. 3 provided a thickness be 10 microns nematic phase type liquid crystal under the driving of 2KHz square-wave voltage, be the relation that the phase of light wave of 1550 nanometers changes to optical wavelength.The maximum light phase of about 2 π of can realizing postpones.According to above-mentioned formula, tunable fabry-perot filter 200 can obtain the tuning range of the transmitted light frequency of about 100GHz for the linearly polarized light near zero degree incident.Comparatively speaking, according to top formula, to the frequency band broadband Δ ν of Free Spectral Range Δ ν and transmitted light 1/2Change be much smaller.Fig. 6 is the transmitted spectrum synoptic diagram of tunable fabry-perot filter 200.
This shows that tunable fabry-perot filter 200 can be realized transmitted light frequency tuning in a big way and do not change transmission light frequency broadband and Free Spectral Range basically under the effect of extra electric field.This characteristic is for in tunable fabry-perot filter 200 many application, and is significant like laser instrument and frequency spectrum instrument etc.
Second kind of structure of tunable fabry-perot filter 200 is: at first catoptron, 10 logical light face outer surface 8 light-plated anti-reflection films; Be provided with high reflectance multilayer dielectric film 12 and transparency electrode rete 16 from inside to outside successively in the logical light face inboard of first catoptron 10, other structures are identical with first kind of structure of tunable fabry-perot filter 200.The characteristics of second kind of structure of tunable fabry-perot filter 200 are can realize than first kind of Free Spectral Range that structure is bigger.
The third structure of tunable fabry-perot filter 200 is: the light-plated anti-reflection film in the logical light face outside of second catoptron 20; Logical light face inboard at second catoptron 20 is provided with high reflectance multilayer dielectric film 24, transparency electrode 26 and non-conducting material film 19 from inside to outside successively.Other structures are identical with second kind of structure of tunable fabry-perot filter 200.The characteristics of the third structure of tunable fabry-perot filter 200 are can realize than second kind of Free Spectral Range that structure is bigger.
Because tunable fabry-perot filter 200 when making, requires the surface of logical light face of two catoptrons plating high reflectance multilayer dielectric films strict parallel, brings certain difficulty in this assembling for tuning fabry-perot filter 200.For this reason, we have designed other a kind of tunable fabry-perot filter 300, and are as shown in Figure 4.Tunable fabry-perot filter 300 comprises first catoptron 32, first optical glass sheet 36, liquid crystal material 41, second optical glass sheet 50, second catoptron 46 and driving circuit 56.The difference of wave filter 300 and wave filter 200 is; In the wave filter 300; At first be positioned over liquid crystal material 41 between two optical clear glass sheet 36 and 50; Above-mentioned two optical clear glass sheet 36 and 50 logical light face inboard are coated with optics antireflection layer 38 and 52 respectively; Transparency electrode 40 and 54, and the inboard of the thin layer 41 that one deck non-conducting material is set on optical clear glass sheet 50 and first optical clear glass sheet 36 cavity that to constitute a thickness be tens microns in several microns roads is used to place liquid crystal material.Above-mentioned two optical clear glass sheet 36 and another logical light face of 50 be plated film or light-plated anti-reflection film not, and optical clear glass sheet 36 and 50 constitutes a liquid crystal cell with liquid crystal material 42.When the above-mentioned liquid crystal cell of assembling, need optical clear glass sheet 36 is strict not parallel with 50 logical light face maintenance, like this, be easier to operation at assembling time ratio.
Tunable fabry-perot filter 300 also has three kinds of various structure, below explanation respectively:
First kind of structure of tunable fabry-perot filter 300 is: the logical light face 30 in the outside of first catoptron 32 is coated with high reflection film, and inboard logical light face is the polished surface that does not have plated film.At first the inboard of first catoptron 32 and the outside of the optical clear glass sheet 36 on the above-mentioned liquid crystal cell are bonded together with refractive index match glue 34.The logical light face 44 in the outside of second catoptron 46 is coated with high reflection film, and inboard logical light face is the polished surface that does not have plated film.Then the outside of the logical light face in the inboard of second catoptron 46 with the optical clear glass sheet 50 on refractive index match glue 48 and the above-mentioned liquid crystal cell is bonded together; In this process; Just need the face 30 of two catoptrons 32 and 46 two plating high reflection films is strict parallel with 44 adjustment, with the effect of the multiple-beam interference of realization Fabry-Perot etalon.Generally, because the optically transparent material of 32,36,50 and 46 employings has identical or near identical light refractive index, refractive index match glue 48 also is identical or approaching identical with refractive index match glue 34.Owing to adopted four optically transparent materials, so the shortcoming of wave filter 300 this structures is that its thickness is bigger than wave filter 200.According to the calculating of front, to the light of 1550 nanometers and common optical glass material (refractive index is about 1.5), when Free Spectral Range is 100GHz, thickness H is approximately 1 millimeter, and bigger if desired Free Spectral Range is difficult to realize.
Second kind of structure of tunable fabry-perot filter 300 is: the outside of first catoptron 32 leads to light face 30 light-plated anti-reflection films, inboard logical light face plating high reflection film.The outside of the optical clear glass sheet 36 on the above-mentioned liquid crystal cell can the light-plated anti-reflection film, also the polished surface of plated film not.Optical clear glass sheet 36 outsides on the inboard of first catoptron 32 and the above-mentioned liquid crystal cell are bonded together with refractive index match glue 34; Also can adopt industry to go up the assemble method of no glue on the light path commonly used, promptly only the logical light light path of two optical elements place in addition sticked with glue and connect.Other structures are identical with first kind of structure of wave filter 300.Because Fabry-Perot-type cavity is to be made up of the high reflection film on the logical light face in the outside of the logical light face in the inboard of first catoptron 32 and second catoptron 46; Therefore, the characteristics of this structure are first kind of Free Spectral Ranges that structure more strengthens can realizing than wave filter 300.
The third structure of tunable fabry-perot filter 300 is: the difference of second kind of structure of this structure and wave filter 300 is: the outside of second catoptron 46 leads to light face 44 light-plated anti-reflection films, inboard logical light face plating high reflection film.The logical light face in the outside of the optical clear glass sheet 50 on the above-mentioned liquid crystal cell can light-plated anti-reflection film film, also can be the polished surface of plated film not.The inboard of second reflection 46 and the outside of the optical clear glass sheet 50 on the above-mentioned liquid crystal cell are with the refractive index match glue bond together; Also can adopt industry to go up the assemble method of no glue on the light path commonly used, promptly only the logical light light path of two optical elements place in addition sticked with glue and connect.Other structures are identical with second kind of structure of wave filter 300.Because Fabry-Perot-type cavity is to be made up of the high reflection film on the logical light face in inboard of the logical light face in the inboard of first catoptron 32 and second catoptron 46; Therefore, the characteristics of this structure are second kind of Free Spectral Ranges that structure is bigger can realizing than wave filter 300.
The present invention will be described below in conjunction with Fig. 7.
The tunable optical filter 400 of a kind of fixed frequency interval and single mode output is made up of Fabry-Perot etalon 100 and tunable fabry-perot filter 200 or 300.The Free Spectral Range of Fabry-Perot etalon 100 is FSR 1, tunable fabry- perot filter 200 or 300 Free Spectral Range are FSR 2, FSR 2Compare FSR 1Little Δ f is like Fig. 5 and shown in Figure 6.If Δ f=0.25FSR 1, then in the spectral range of ν 1 to ν 4, seeing through Fabry-Perot etalon 100 has 4 moulds, and see through tunable fabry- perot filter 200 or 300 5 moulds is arranged.Therefore, what see through tunable optic filter 400 has only ν 1 and 4 two moulds of ν, and in other words, tunable optic filter 400 is 4 times FSR 2Or 3 times FSR 1, as shown in Figure 8.Can find out through Fig. 8,, can increase the Free Spectral Range FSR of tunable optic filter 400 greatly through regulating the value of Δ f 3
When practical application, can regulate the poor of FSR2 and FSR1 as required, can regulate FSR 3, but its lowest difference is apart from the Δ ν that should be equal to or greater than two times 1/2, to guarantee the single mode output characteristics of tunable optic filter 400.
Describe in the face of tuning process of the present invention down: with reference to figure 5 and Fig. 6, the transmission spectrum ν when tunable fabry- perot filter 200 or 300 2aBe tuned to the ν of Fabry-Perot etalon 100 2During coincidence, in spectrum FSR3 scope, has only ν 2Can see through tunable optic filter 400.Likewise, as the transmission spectrum ν of tunable fabry- perot filter 200 or 300 3aBe tuned to the ν of Fabry-Perot etalon 100 3During coincidence, in spectrum FSR3 scope, has only ν 3Can see through tunable optic filter 400, as shown in Figure 8.But at tuning ν 3aProcess in because ν 2aCan be through ν 2, therefore, can see through tunable optic filter 400, a method eliminating this phenomenon is in tuning process, at fast optical switch based of output terminal increase of wave filter 400.When from a mould be tuned to the process of another mould, photoswitch is closed, by the time ν 3aAnd ν 3After the coincidence, open photoswitch again.Other moulds tuning, can and the like.Because the difference of the Fabry-Perot etalon 100 and the maximum of tunable fabry- perot filter 200 or 300 two adjacent transmission spectrums is less than FSR1; Therefore; As long as can guarantee that the tunable range of the transmission spectrum of tunable fabry- perot filter 200 or 300 equals or near FSR1; Tunable optic filter 400 just can be implemented in realizes in the spectrum FSR3 scope that frequency interval is the tunable output of uniformly-spaced single mode of FSR1, and its tunable transmitted spectrum is as shown in Figure 9.It should be noted that; When incident light when the logical light face of tunable fabry- perot filter 200 or 300 enters into said tunable optical filter 400; Also can realize the output at interval of same single mode and fixed frequency, but in different application, its output spectrum width may be different.
It is emphasized that above-mentioned explanation only plays demonstration and description, is not an explanation in detail exhaustively, and also intention does not limit the present invention on the described concrete form.Through top description, all possibly occur many changes of the present invention and variation.Selected practical implementation only is in order better to explain the application in principle of the present invention and the reality.This explanation can make the people who is familiar with this field can better utilization the present invention, based on the different practical implementation of actual needs design with change accordingly.

Claims (14)

1. the tunable optical filter exported with single mode at interval of a fixed frequency; It is characterized in that: a Fabry-Perot etalon and a frequencies of transmission tunable fabry-perot filter of being oppositely arranged by front and back constitute, and this Fabry-Perot etalon and frequencies of transmission tunable fabry-perot filter have the identical spectra responding range and the frequencies of transmission tunable fabry-perot filter is only effective to the linearly polarized light with particular polarization.
2. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output, it is characterized in that: said Fabry-Perot etalon has certain Free Spectral Range and acutance coefficient; The intrinsic Free Spectral Range of said frequencies of transmission tunable fabry-perot filter when added electric field not be less than the Free Spectral Range of Fabry-Perot etalon, and its difference is greater than the acutance coefficient of Fabry-Perot etalon or greater than the acutance coefficient of said frequencies of transmission tunable fabry-perot filter.
3. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output; It is characterized in that: described frequencies of transmission tunable fabry-perot filter comprises first catoptron, liquid crystal material, second catoptron and driving circuit; The logical light face arranged outside high reflectance multilayer dielectric film of said first catoptron; The inboard ground floor of the logical light face of first catoptron is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The arranged outside high reflectance multilayer dielectric film of said second catoptron; The inboard ground floor of second catoptron is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode; Cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first catoptron inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of first catoptron and second catoptron.
4. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output; It is characterized in that: described frequencies of transmission tunable fabry-perot filter comprises first catoptron, liquid crystal material, second catoptron and driving circuit; The logical light face arranged outside optical anti-reflective film of said first catoptron; The inboard ground floor of the logical light face of first catoptron is provided with the high reflectance multilayer dielectric film, on this high reflectance multilayer dielectric film, transparency electrode is set; The arranged outside high reflectance multilayer dielectric film of said second catoptron; The inboard ground floor of second catoptron is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode; Cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first catoptron inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face inboard of first catoptron and second catoptron.
5. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output; It is characterized in that: described frequencies of transmission tunable fabry-perot filter comprises first catoptron, liquid crystal material, second catoptron and driving circuit; The logical light face arranged outside optical anti-reflective film of said first catoptron; The inboard ground floor of the logical light face of first catoptron is provided with the high reflectance multilayer dielectric film, on this high reflectance multilayer dielectric film, transparency electrode is set; The arranged outside optical anti-reflective film of said second catoptron; The inboard ground floor of second catoptron is provided with the high reflectance multilayer dielectric film; On this high reflectance multilayer dielectric film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode; Cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first catoptron inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, the logical light face of first catoptron inboard keeping parallelism of logical light face inboard and second catoptron and mechanics Fabry-Perot-type multiple-beam interference chamber.
6. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output, it is characterized in that: described frequencies of transmission tunable fabry-perot filter comprises first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and second catoptron; The logical light face arranged outside high reflectance multilayer dielectric film of said first catoptron, the logical light face inboard of first catoptron is the optical polish face; It is inboard that the first optical clear glass sheet is arranged on first catoptron; The logical light face outside of the first optical clear glass sheet is the optical polish face; The inboard ground floor of the logical light face of the first optical clear glass sheet is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The logical light face arranged outside high reflectance multilayer dielectric film of said second catoptron, the logical light face inboard of second catoptron is the optical polish face; It is inboard that the second optical clear glass sheet is arranged on second catoptron; The logical light face outside of the second optical clear glass sheet is the optical polish face; The inboard ground floor of the second optical clear glass sheet is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode, cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of first catoptron and second catoptron.
7. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output, it is characterized in that: described frequencies of transmission tunable fabry-perot filter comprises first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and second catoptron; The logical light face arranged outside optical anti-reflective film of said first catoptron, the logical light face inboard of first catoptron is provided with the high reflectance multilayer dielectric film; It is inboard that the first optical clear glass sheet is arranged on first catoptron; The logical light face outside of the first optical clear glass sheet is for the optical polish face or optical anti-reflective film is set; The inboard ground floor of the logical light face of the first optical clear glass sheet is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The logical light face arranged outside high reflectance multilayer dielectric film of said second catoptron, the logical light face inboard of second catoptron is the optical polish face; It is inboard that the second optical clear glass sheet is arranged on second catoptron; The logical light face outside of the second optical clear glass sheet is the optical polish face; The inboard ground floor of the second optical clear glass sheet is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode, cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, liquid crystal material is placed in this cavity; Driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, the logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face inboard of first catoptron and second catoptron.
8. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output, it is characterized in that: described frequencies of transmission tunable fabry-perot filter comprises first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and second catoptron; The logical light face arranged outside optical anti-reflective film of said first catoptron, the logical light face inboard of first catoptron is provided with the high reflectance multilayer dielectric film; It is inboard that the first optical clear glass sheet is arranged on first catoptron; The logical light face outside of the first optical clear glass sheet is for the optical polish face or optical anti-reflective film is set; The inboard ground floor of the logical light face of the first optical clear glass sheet is provided with optical anti-reflective film, on this optical anti-reflective film, transparency electrode is set; The logical light face arranged outside optical anti-reflective film of said second catoptron, the inboard ground floor of the logical light face of second catoptron is provided with the high reflectance multilayer dielectric film; It is inboard that the second optical clear glass sheet is arranged on second catoptron; The logical light face outside of the second optical clear glass sheet is for the optical polish face or optical anti-reflective film is set; The inboard ground floor of the second optical clear glass sheet is provided with optical anti-reflective film; On this optical anti-reflective film, transparency electrode is set; Thickness be set be several microns to tens microns non-conducting material film on this transparency electrode, cover the wide passage that leads to the catoptron edge of part and one one millimeter except that clear aperature and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, said liquid crystal material is placed in this cavity; Said driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, the logical light face of first catoptron inboard keeping parallelism of logical light face inboard and second catoptron and mechanics Fabry-Perot-type multiple-beam interference chamber.
9. according to each described frequencies of transmission tunable fabry-perot filter of claim 3 to 8, it is characterized in that: what described liquid crystal material adopted is nematic phase type liquid crystal, and the thickness of this liquid crystal layer is several microns to tens microns.
10. according to each described frequencies of transmission tunable fabry-perot filter of claim 3 to 8, it is characterized in that: described first catoptron is optically transparent material and has identical optical index with second catoptron.
11. according to each described frequencies of transmission tunable fabry-perot filter of claim 3 to 8; It is characterized in that: described driving circuit is that a kind of frequency is the square-wave pulse circuit of 1 KHz to 10 KHzs, and pulse voltage amplitude is adjustable to 5 volts from 0 volt.
12. according to claim 6 or 7 or 8 described frequencies of transmission tunable fabry-perot filters, it is characterized in that: the outside of the inboard of said first catoptron and the first optical clear glass sheet is connected together or adopts industry to go up the assemble method of no glue on the logical light light path commonly used with the optical clear refractive index match is gluing: promptly stick with glue in logical light light path junction in addition and connect; The outside of the inboard of said second catoptron and the second optical clear glass sheet is connected together or adopts industry to go up the assemble method of no glue on the logical light light path commonly used with the optical clear refractive index match is gluing: promptly stick with glue in logical light light path junction in addition and connect; Described first catoptron, second catoptron, the first optical clear glass sheet and the second optical clear glass sheet are optically transparent material and have identical or essentially identical optical index; The refractive index and the optically transparent material refractive index of said optical clear refractive index match glue are basic identical.
13. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output, it is characterized in that: incident light gets into said frequencies of transmission tunable fabry-perot filter from the logical light face of said Fabry-Perot etalon.
14. the tunable optical filter of a kind of fixed frequency interval according to claim 1 and single mode output is characterized in that: incident light gets into said Fabry-Perot etalon from the logical light face of described frequencies of transmission tunable fabry-perot filter.
CN201210265873.6A 2012-07-30 2012-07-30 Tunable optical filter with fixed frequency space and single-mode output Expired - Fee Related CN102798987B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014019399A1 (en) * 2012-07-30 2014-02-06 天津奇谱光电技术有限公司 Tunable optical filter of fixed frequency intervals and of single-mode output
CN108291800A (en) * 2015-07-30 2018-07-17 科技创新动量基金（以色列）有限责任合伙公司 Spectrum imaging method and system
CN113614633A (en) * 2020-06-30 2021-11-05 深圳市海谱纳米光学科技有限公司 Fabry-Perot cavity-based imaging system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5592314A (en) * 1993-12-02 1997-01-07 Yazaki Corporation Tunable wavelength filter formed by 2 lcds in series having opposite twist angles of n*π/2 and a dielectric mirror layer on each substrate
US20030161567A1 (en) * 2002-02-28 2003-08-28 Baxter Glenn W. Tunable wavelength multiplexer
US20050094964A1 (en) * 2002-06-04 2005-05-05 Nec Corporation Tunable filter, manufacturing method thereof and optical switching device comprising the tunable filter
WO2010147606A1 (en) * 2009-06-17 2010-12-23 Cogo Optronics, Inc. Tunable laser
CN102280809A (en) * 2011-07-14 2011-12-14 余模智 Outer cavity type electrooptically tuned laser device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835424A (en) * 1981-08-28 1983-03-02 Canon Inc Liquid crystal fabry-perot interference device
US5469279A (en) * 1989-10-30 1995-11-21 The University Of Colorado Foundation, Inc. Chiral smectic liquid crystal multipass optical filters including a variable retarder (and a variable isotropic spacer)
US6545739B1 (en) * 1997-09-19 2003-04-08 Nippon Telegraph And Telephone Corporation Tunable wavelength filter using nano-sized droplets of liquid crystal dispersed in a polymer
US6842217B1 (en) * 2001-08-23 2005-01-11 Cambridge Research And Instrumentation, Inc. Fabry-perot etalons and tunable filters made using liquid crystal devices as tuning material
WO2008068753A2 (en) * 2006-12-04 2008-06-12 Ben-Gurion University Of The Negev - Research And Development Authority Polarization independent birefringent tunable filters
CN101533159B (en) * 2009-04-09 2011-09-21 浙江大学 Third level Fabry-Perot cavity type tunable ray filter system
CN102798987B (en) * 2012-07-30 2015-01-21 天津奇谱光电技术有限公司 Tunable optical filter with fixed frequency space and single-mode output

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5592314A (en) * 1993-12-02 1997-01-07 Yazaki Corporation Tunable wavelength filter formed by 2 lcds in series having opposite twist angles of n*π/2 and a dielectric mirror layer on each substrate
US20030161567A1 (en) * 2002-02-28 2003-08-28 Baxter Glenn W. Tunable wavelength multiplexer
US20050094964A1 (en) * 2002-06-04 2005-05-05 Nec Corporation Tunable filter, manufacturing method thereof and optical switching device comprising the tunable filter
WO2010147606A1 (en) * 2009-06-17 2010-12-23 Cogo Optronics, Inc. Tunable laser
CN102280809A (en) * 2011-07-14 2011-12-14 余模智 Outer cavity type electrooptically tuned laser device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014019399A1 (en) * 2012-07-30 2014-02-06 天津奇谱光电技术有限公司 Tunable optical filter of fixed frequency intervals and of single-mode output
CN108291800A (en) * 2015-07-30 2018-07-17 科技创新动量基金（以色列）有限责任合伙公司 Spectrum imaging method and system
CN113614633A (en) * 2020-06-30 2021-11-05 深圳市海谱纳米光学科技有限公司 Fabry-Perot cavity-based imaging system
CN113614633B (en) * 2020-06-30 2023-03-10 深圳市海谱纳米光学科技有限公司 Fabry-Perot cavity-based imaging system

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