CN102798613B - Loop mirror-based channel type waveguide reflective index sensor - Google Patents

Loop mirror-based channel type waveguide reflective index sensor Download PDF

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CN102798613B
CN102798613B CN201210325147.9A CN201210325147A CN102798613B CN 102798613 B CN102798613 B CN 102798613B CN 201210325147 A CN201210325147 A CN 201210325147A CN 102798613 B CN102798613 B CN 102798613B
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waveguide
loop mirror
grooved
index sensor
light
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CN102798613A (en
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徐飞
寇君龙
陆延青
胡伟
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Nanjing University
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Nanjing University
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Abstract

The invention discloses a loop mirror-based channel type waveguide reflective index sensor. The loop mirror-based channel type waveguide reflective index sensor is characterized in that a channel type waveguide with a high reflective index is added into a loop mirror; light passing through an input end is divided into two paths of light through a directional coupler and enters a waveguide ring; the two paths of light pass through the channel type waveguide of the waveguide ring and then is polarized to rotate; and after the light secondarily passes through the directional coupler, one part of light is received by an output end. The loop mirror-based channel type waveguide reflective index sensor disclosed by the invention can be used for measuring the reflective index of an object by using different responses of different polarized lights to the outside reflective index and has extremely-high sensitivity (103nm/RIU (Refractive Index Unit)); and in addition, the loop mirror-based channel type waveguide reflective index sensor is simple and compact in structure and can be manufactured by using a traditional photoetching means.

Description

A kind of grooved waveguide index sensor based on loop mirror
Technical field
The present invention relates to photoelectron technology field, be specifically related to a kind of grooved waveguide index sensor based on loop mirror.
Background technology
Due to semi-conductor industry, the develop rapidly of especially silica-based process technology, is operated in the nanometer scale precision of communication band, the device of centimetre magnitude size has become possibility.This substance system of silicon-on-insulator (silicon-on-insulator, SOI) is applicable to the integrated of passive device and likely becomes the mainstream development direction of following silica-based industry very much.In the past these years in, many SOI devices are implemented, they comprise beam splitter, wave filter, modulator and sensor etc.And these devices are all the waveguide systems based on different, what wherein attract people's attention is exactly grooved waveguide.Grooved waveguide can be strapped in light in the material of low-refraction.This constraint character to light due to grooved waveguide causes it to have larger birefringence exactly, and this character has also obtained certain application, and for example, optical delay line, non-linear position match etc.And due to this peculiar character, grooved waveguide also studied persons is applied in other substance systems, for example optical fiber, silicon nitride/silicon dioxide mixed system.
On the other hand, the loop mirror that includes high birefringence optical fiber is the study hotspot of optical-fibre communications and sensing.They are widely used in that flat gain, multiple-wavelength laser, the dispersion of wavelength division multiplexer, Erbium-Doped Fiber Amplifier (EDFA) are cut out, optical fibre gyro, stress and temperature sensing etc. field.
Summary of the invention
The present invention proposes a kind of grooved waveguide index sensor based on loop mirror, by by loop mirror and grooved waveguide combination, can obtain high birefringence.
In order to realize foregoing invention object, the technical solution used in the present invention is as follows:
A kind of grooved waveguide index sensor based on loop mirror, by substrate layer and ducting layer, formed, ducting layer comprises input end, optical fiber loop mirror and output terminal, and described optical fiber loop mirror is comprised of with the waveguide ring being connected with directional coupler two output ports directional coupler; Described waveguide ring is connected and composed by ridge waveguide and grooved waveguide; Light by described input end is divided into two-way light through directional coupler and enters described waveguide ring, and described two-way light rotates through the grooved waveguide rear polarizer of waveguide ring, and again by after directional coupler, a part of light is output termination and receives.
Further, described directional coupler is 50:50 to the coupling coefficient of signal.
Further, the material of described substrate layer is the low-index material of silicon dioxide or magnesium fluoride, and described ducting layer is the high-index material of silicon or lithium niobate.
Further, the length in the grooved region of described grooved waveguide is tens to hundreds of micron.
Further, the service band of described sensor is C+L communication band, and the ranges of indices of refraction of its measurement is 1-3, and measured object is gas or liquid.
The present invention, by the grooved waveguide of high birefringence is integrated in loop mirror, has formed refractive index sensitivity up to 10 3the sensor of nm/RIU.Compared with prior art, remarkable advantage of the present invention is: (1) formed sensor has high birefringence, reaches 10 -1, can greatly reduce the size of sensor; (2) than the index sensor that utilizes merely evanescent field, the high order of magnitude of this device sensitivity; (3) can utilize traditional silica-based photoetching process to produce this sensor in batches, cost of manufacture is cheap.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is done further and illustrated, so that advantage of the present invention is known, represent.
Fig. 1 is the schematic diagram that the present invention is based on the grooved waveguide index sensor of loop mirror.
Fig. 2 is schematic cross-section and the light field figure of theoretical grooved waveguide of calculating.
Fig. 3 is in different groove widths and the high situation of groove, and grooved waveguide of the present invention is in (a) air and (b) birefringence in water.
Fig. 4 is in different groove widths and the high situation of groove, and grooved waveguide of the present invention is in (a) air and (b) the refractive index sensing sensitivity in water.
Embodiment
Sensor construction schematic diagram of the present invention is as shown in Figure 1: the input end that port A is light, and the output terminal that port B is light, substrate layer adopts earth silicon material, and ducting layer material adopts silicon.The light of inputting by port A enters the directional coupler of 50:50 through path 1, have respectively 50% the light clockwise via path 3() and path 4(counterclockwise) enter loop mirror.This two-way light rotates and again via path 3 and path 4, by the light splitting of directional coupler rear portion, by path 2, by port B, is received through grooved waveguide region rear polarizer.The length L in the grooved region of grooved waveguide can be for tens to hundreds of micron.
Fig. 2 is the optical field distribution figure of the accurate transverse electric basic mode of grooved waveguide that calculates by Finite Element Method, and design parameter is: groove width=50nm, and groove depth=400nm, ridge is wide=200nm, calculating wavelength is 1550nm, white arrow has been indicated polarization direction.
Fig. 3 is the grooved waveguide of calculating by the Finite Element Method birefringence under different groove widths and groove depth, and birefringence is effective refractive index poor of the accurate horizontal magnetic basic mode of grooved waveguide and accurate transverse electric basic mode, and calculating wavelength is 1550nm.
Fig. 4 is the grooved waveguide of calculating by the Finite Element Method sensitivity under different groove widths and groove depth, and computing formula used is: , wherein calculate wavelength X 0for 1550nm, n analytefor the refractive index of analyte, B is birefringence.
The present invention proposes a kind of method of utilizing micro optical fiber to make novel high birefringence device.The grooved waveguide of this sensor has very high birefringence (10 -1magnitude) and the remolding sensitivity that utilizes its birefringence the to obtain highly sensitive order of magnitude that utilizes merely evanescent field to obtain, reached 10 3nm/RIU magnitude.This high birefringence device has a wide range of applications in fields such as Internet of Things, Fibre Optical Sensor, integrated opticss.

Claims (6)

1. the grooved waveguide index sensor based on loop mirror, it is characterized in that, this sensor is comprised of substrate layer and ducting layer, ducting layer comprises input end, optical fiber loop mirror and output terminal, and described optical fiber loop mirror is comprised of with the waveguide ring being connected with directional coupler two output ports directional coupler; Described waveguide ring is connected and composed by ridge waveguide and grooved waveguide; Light by described input end is divided into two-way light through directional coupler and enters described waveguide ring, and described two-way light rotates through the grooved waveguide rear polarizer of waveguide ring, and again by after directional coupler, a part of light is output termination and receives.
2. a kind of grooved waveguide index sensor based on loop mirror according to claim 1, is characterized in that, described directional coupler is 50:50 to the coupling coefficient of signal.
3. a kind of grooved waveguide index sensor based on loop mirror according to claim 2, is characterized in that, the material of described substrate layer is the low-index material of silicon dioxide or magnesium fluoride, and described ducting layer is the high-index material of silicon or lithium niobate.
4. according to a kind of grooved waveguide index sensor based on loop mirror described in claim 1,2 or 3, it is characterized in that, the length in the grooved region of described grooved waveguide is tens to hundreds of micron.
5. a kind of grooved waveguide index sensor based on loop mirror according to claim 4, is characterized in that, the service band of described sensor is C+L communication band.
6. a kind of grooved waveguide index sensor based on loop mirror according to claim 5, is characterized in that, the ranges of indices of refraction of described sensor measurement is 1-3, and the object of its measurement is gas or liquid.
CN201210325147.9A 2012-09-05 2012-09-05 Loop mirror-based channel type waveguide reflective index sensor Active CN102798613B (en)

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CN103900550B (en) * 2014-03-06 2017-04-12 哈尔滨工程大学 Circulating interference type optical gyroscope based on orientation coupling modulator
CN110160984B (en) * 2019-01-08 2021-12-24 南开大学 On-chip terahertz sensing enhancement device based on super-surface and lithium niobate mixed structure

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US20050135733A1 (en) * 2003-12-19 2005-06-23 Benoit Reid Integrated optical loop mirror
CN101694463B (en) * 2009-10-19 2011-07-20 浙江大学 Light micro-flow biosensor in inner cavity of semiconductor laser
EP2450693A1 (en) * 2010-11-08 2012-05-09 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO An arrayed waveguide grating (AWG)
CN102410990B (en) * 2011-08-01 2013-08-21 暨南大学 High-sensitivity micro-nano optical fiber refractive index sensor and preparation method thereof
CN202305405U (en) * 2011-09-06 2012-07-04 杭州有源光电科技有限公司 Refractive index meter based on high double refraction D type optical fiber environments
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