CN102796998B - Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor - Google Patents
Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor Download PDFInfo
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- CN102796998B CN102796998B CN2012102673632A CN201210267363A CN102796998B CN 102796998 B CN102796998 B CN 102796998B CN 2012102673632 A CN2012102673632 A CN 2012102673632A CN 201210267363 A CN201210267363 A CN 201210267363A CN 102796998 B CN102796998 B CN 102796998B
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Abstract
The invention discloses a method for operating and controlling the position of a nano-grating deposition substrate in a vacuum vessel and a device for operating and controlling the position of the nano-grating deposition substrate in the vacuum vessel. The device mainly consists of an electromagnetic striking machine, a displacement generator, a standard displacement object collector, a transmission mechanism and a substrate displacement part. The method that the movement of the position of the nano-grating deposition substrate in the vacuum vessel is realized by the means that the displacement generator in the vessel outputs a stepping action by a controller outside the vacuum vessel is a novel operating and controlling method, so that the device designed aiming at the method can be used for simply, conveniently and quickly adjusting the position of the deposition substrate, and can avoid the influence of the electromagnetic interference, the electron component gas release and explosion in the vacuum vessel and the like to the research of the nano-grating deposition substrate, so that the device is relatively high in practical application value.
Description
Technical field
The present invention relates to a kind of method and device thereof of realizing that in vacuum vessel, nanometer grating deposition substrate position is controlled, for making and the research field of nanometer grating deposition substrate.
Background technology
Utilizing laser standing wave field to converge beam of neutral atoms deposition making nanometer grating technology is a study hotspot in the nanometer field, the ultimate principle of this technology is under vacuum environment, to utilize the motion of the radiation pressure control atom of particular spatial distribution laser standing wave field, make the space density of atomic beam produce corresponding the distribution, then Direct precipitation is on substrate, thereby forms the nanometer grating structure.
In actual experimental implementation process, because deposition substrate is in vacuum vessel, very inconvenient for operations such as the movement of deposition substrate in vacuum vessel, replacings.The position of each mobile deposition substrate or replacing deposition substrate, all need to open vacuum vessel and adjust or change, and then re-starts and vacuumize again, because the time vacuumized is longer at every turn, greatly extended experimental period.
Position for deposition substrate in the nanometer grating vacuum vessel is controlled and is changed, and the group of correlative study both at home and abroad is in the analysis aspect this and study lessly, and methods involving and achievement seldom are seen in report.Only have a few studies group to carry out the research that robot device is controlled substrate method in container, the large Libiee's Sa Fuso of university that complies with one's wishes teaches research group the deposition of the nanometer grating in caesium atom vacuum vessel has been carried out to correlative study, adopting the outer control device of container to control mechanical manipulator changes the deposition substrate in container, by this mode, successfully realized the outer replacing to deposition substrate in container of vacuum vessel.But because robot device is comparatively complicated, manipulation process is comparatively loaded down with trivial details, the method can only realize the inside of deposition substrate is changed simultaneously, can not realize the position of deposition substrate is controlled, and can not realize Multiple depositions and the comparison of nanometer grating under equal vacuum condition.
Summary of the invention
The object of the present invention is to provide a kind of outside vacuum vessel control method and the device to nanometer grating deposition substrate position in vacuum vessel, made up the replacing that can only control deposition substrate in container in the prior art outside container and defect that can not shift position.In addition, conventional stepper-motor is owing to having used electronic devices and components and permanent magnet material, can't avoid electronic devices and components in the vacuum vessel implode and adhere to air release, and the permanent magnet material magnetic line of force is to the interference in substrate nanometer grating deposition process, the present invention adopts and does not use electronic devices and components and permanent magnet material, only uses the method for coil and mechanical part successfully to design this device.
The technical scheme that realizes the object of the invention is:
The control method of nanometer grating deposition substrate position in a kind of vacuum vessel, it is a kind of mode of utilizing the outer control device of vacuum vessel to make container intrinsic displacement producer output stepwise operation, realize the method for the movement of nanometer grating deposition substrate position in vacuum vessel, the method comprises the steps:
(1) actuation means that comprises the grating deposition substrate position of electromagnetism pounder, displacement generator, standard displacement articles collecting device, transmission rig, substrate displacement component is set in vacuum vessel;
(2) utilize the outer control device of vacuum vessel to control the sense of current of coil on the fixed coil of the electromagnetism pounder in device in above-mentioned vacuum vessel and moving core striking head, striking head unshakable in one's determination is done straight reciprocating motion under the effect of electromagnetic force, the impacting rod that drive is attached thereto, push the standard displacement object in the barrel be arranged in displacement generator in standard displacement articles collecting device;
The stroke of (3) standard displacement object of the every release of impacting rod, displacement traction apparatus mobile standard displacement object size size under the effect of elastic article;
(4) by connecting displacement traction apparatus and the steel wire flexible cord and the pulley that are arranged on the balance on the substrate displacement component, the substrate displacement frame that drive is attached thereto and be installed in substrate on this identical stroke of standard displacement object size that moves up, or directly the steel wire flexible cord is connected on the substrate displacement frame, and make its substrate move down the stroke of a standard displacement object size, can realize that the position of deposition substrate is controlled.
The device of realizing aforesaid method mainly is comprised of electromagnetism pounder, displacement generator, standard displacement articles collecting device, transmission rig and substrate displacement component, electromagnetism pounder and standard displacement articles collecting device are placed in respectively the barrel through hole both sides of displacement generator, displacement traction apparatus on displacement generator stretches out the outer part of barrel and is connected with substrate displacement frame or balance on the substrate displacement component by transmission rig, and substrate displacement frame and balance interconnect by steel wire flexible cord, pulley.
Described electromagnetism pounder comprises two fixed coils with the through hole iron core, be placed between fixed coil belt coil moving core striking head with moving core striking head axis on the nonmetal impacting rod that is connected.Nonmetal impacting rod can be free to slide in the through hole unshakable in one's determination of fixed coil, outside container, control under the control of device, fixed coil and striking head coil generation electromagnetic action, promote striking head and produce straight reciprocating motion, moved rear deenergization, avoided electromagnetic induction and adopted permanent-magnet component to the interference in the research of laser standing wave field nanometer grating.The power supply of each coil of electromagnetism pounder provides three groups of power supplys by the outer control device of vacuum vessel, adopts the conventional means sealing to introduce.
Described displacement generator comprises that several use has the identical shaped consistent spheroid of size that the material of certain rigidity such as metal, tetrafluoroethylene, pottery, glass etc. makes or has right cylinder or the polyhedron object (following referred to as standard displacement object) of two parallel end faces at least, and displacement traction apparatus, elastic article, barrel.Standard displacement object, displacement traction apparatus, elastic article are placed in barrel, and the displacement traction apparatus is placed between standard displacement object and elastic article, and the displacement traction apparatus stretches out the end that barrel partly connects the steel wire flexible cord.Diameter 2-14mm when standard displacement object is spheroid, when standard displacement object was right cylinder or polyhedron, two parallel end faces were apart from 2-14mm, standard displacement object, displacement traction apparatus, elastic article, barrel interior dimensions support the use, and standard displacement object, displacement traction apparatus and barrel are slidably matched.
Described barrel two ends band packaged unit, one end is close to sealing part and is had the through hole perpendicular to the barrel axis, hole size can be for the turnover of standard displacement object, the tank circuit on barrel parallels to the axis, and the nonmetal impacting rod connected on belt coil moving core striking head can be released standard displacement object by this through hole.Be placed in the standard displacement object that the standard displacement articles collecting device of through hole opposite side is pushed out for collection.
Described substrate displacement component comprises substrate displacement frame, balance, pulley, support.On the substrate displacement frame, plain clamp is housed, balance connects the other end of steel wire flexible cord, and substrate displacement frame and balance interconnect by another steel wire flexible cord, pulley.
Utilize the described substrate position actuation means of this invention, can realize controlling the movement of substrate position in container outside vacuum vessel, and the distance that each substrate moves can be carried out different adjustings as required, thereby can be in the change in location that guarantees to realize under the constant condition of vacuum tightness deposition substrate, be conducive to realize the comparison of nanometer grating deposition characteristics under equal vacuum degree condition, to judge that other factors are on the impact of nanometer grating deposition and the carrying out of work in every.
The accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of nanometer grating deposition substrate position actuation means in vacuum vessel;
Fig. 2 is the structural representation of electromagnetism pounder and displacement generator parts in Fig. 1.
Embodiment
As Fig. 1, shown in 2, a kind of device of realizing that in vacuum vessel, nanometer grating deposition substrate position is controlled, comprise electromagnetism pounder 1, displacement generator 2, standard displacement articles collecting device 3, transmission rig, substrate displacement component 5, electromagnetism pounder 1 and standard displacement articles collecting device 3 are placed in respectively the barrel through hole both sides of displacement generator 2, displacement traction apparatus 202 on displacement generator 2 stretches out the outer part of barrel and is connected with substrate displacement frame 501 or balance 502 on substrate displacement component 5 by transmission rig, substrate displacement frame 501 and balance 502 are by the steel wire flexible cord, pulley interconnects.
When the substrate displacement operation, undertaken by the control device outside vacuum vessel, by this control device, controlled the sense of current of coil on the fixed coil 101 of electromagnetism pounder and moving core striking head 102, the moving core striking head 102 of electromagnetism pounder 1 advances or retreats under electromagnetic force, band is dynamically connected after standard displacement object (this example is steel ball) 201 releases in will barrel 204 of nonmetal impacting rod 103 on it and enters the standard displacement articles collecting device 3 that is positioned at barrel through hole opposite side.Standard displacement object 201 of the every release of nonmetal impacting rod 103, under the effect of the interior elastic article 203 of barrel 204, the distance of displacement traction apparatus 202 Mobile steel spherical diameter sizes, and by being connected to the move up stroke of a steel ball size size of substrate that steel wire flexible cord 4 on displacement traction apparatus 202 and balance 502 and pulley 503 drive fixed placement on substrate displacement frames 501 and frame, also steel wire flexible cord 4 can be connected on substrate displacement frame 501 and make substrate move down the stroke of a steel ball size size, reach the effect of stepping, deposition substrate is fixed on substrate displacement frame 501 with fixture, thereby the position of having realized deposition substrate is controlled.
Utilize the method for the invention and device, can realize simply, easily and efficiently the position adjustments of deposition substrate, and avoided the impact on the research of nanometer grating deposition substrate such as electromagnetic interference, electronic devices and components air release and blast in vacuum vessel, have stronger actual application value, solved nanometer grating deposition substrate research field key issue anxious to be resolved for many years.
Claims (6)
1. control method of realizing nanometer grating deposition substrate position in vacuum vessel, comprise the control device that vacuum vessel is outer, it is characterized in that: utilize the outer control device of vacuum vessel to make the mode of container intrinsic displacement producer output stepwise operation realize the movement of nanometer grating deposition substrate position in vacuum vessel, the method comprises the steps:
(1) actuation means that comprises the grating deposition substrate position of electromagnetism pounder, displacement generator, standard displacement articles collecting device, transmission rig, substrate displacement component is set in vacuum vessel;
(2) utilize the outer control device of vacuum vessel to control the sense of current of coil on the fixed coil of the electromagnetism pounder in device in above-mentioned vacuum vessel and moving core striking head, striking head unshakable in one's determination is done straight reciprocating motion under the effect of electromagnetic force, the impacting rod that drive is attached thereto, push the standard displacement object be arranged in the barrel of displacement generator in standard displacement articles collecting device;
The stroke of (3) standard displacement object of the every release of impacting rod, displacement traction apparatus mobile standard displacement object size size under the effect of elastic article;
(4) by connecting displacement traction apparatus and the steel wire flexible cord and the pulley that are arranged on the balance on the substrate displacement component, the substrate displacement frame that drive is attached thereto and be installed in substrate on this substrate displacement frame identical stroke of standard displacement object size that moves up, or directly the steel wire flexible cord is connected on the substrate displacement frame, and make its substrate move down the stroke of a standard displacement object size, can realize that the position of deposition substrate is controlled.
2. a right to use requires 1 described method and the interior nanometer grating deposition substrate of custom-designed vacuum vessel position actuation means, it is characterized in that: comprise electromagnetism pounder (1), displacement generator (2), standard displacement articles collecting device (3), transmission rig and substrate displacement component (5), electromagnetism pounder (1) and standard displacement articles collecting device (3) are placed in respectively the barrel through hole both sides of displacement generator (2), displacement traction apparatus (202) on displacement generator (2) stretches out the outer part of barrel and is connected with substrate displacement frame (501) or balance (502) on substrate displacement component (5) by transmission rig, substrate displacement frame (501) and balance (502) are by steel wire flexible cord (4), pulley (503) interconnects.
3. device according to claim 2 is characterized in that: described electromagnetism pounder (1) by two fixed coils with the through hole iron core (101), be placed between fixed coil belt coil moving core striking head (102) with moving core striking head (102) axis on the nonmetal impacting rod (103) that is connected form.
4. device according to claim 2, it is characterized in that: described displacement generator (2) comprises several standard displacement objects (201) and displacement traction apparatus (202), elastic article (203), barrel (204), standard displacement object (201), displacement traction apparatus (202), elastic article (203) are placed in barrel (204), and displacement traction apparatus (202) is placed between standard displacement object (201) and elastic article (203).
5. device according to claim 4 is characterized in that: described standard displacement object (201) is the rigidity object that size is identical and is shaped as spheroid or has right cylinder or the polyhedron of two parallel end faces at least.
6. device according to claim 2, it is characterized in that: described transmission rig is comprised of steel wire flexible cord (4), pulley (503).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012102673632A CN102796998B (en) | 2012-07-31 | 2012-07-31 | Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012102673632A CN102796998B (en) | 2012-07-31 | 2012-07-31 | Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor |
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| Publication Number | Publication Date |
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| CN102796998A CN102796998A (en) | 2012-11-28 |
| CN102796998B true CN102796998B (en) | 2013-11-27 |
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| CN2012102673632A Expired - Fee Related CN102796998B (en) | 2012-07-31 | 2012-07-31 | Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2204224Y (en) * | 1994-06-28 | 1995-08-02 | 金鑫 | Multi-function electric nailing gun |
| CN1536640A (en) * | 2003-02-20 | 2004-10-13 | 应用材料有限公司 | Method for positioning substratge relatively to supporting table and its equipment |
| CN201348479Y (en) * | 2008-12-11 | 2009-11-18 | 中冶建筑研究总院有限公司 | Standard displacement generator and displacement monitoring device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07258839A (en) * | 1994-03-18 | 1995-10-09 | Hitachi Ltd | Sputtering device |
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- 2012-07-31 CN CN2012102673632A patent/CN102796998B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2204224Y (en) * | 1994-06-28 | 1995-08-02 | 金鑫 | Multi-function electric nailing gun |
| CN1536640A (en) * | 2003-02-20 | 2004-10-13 | 应用材料有限公司 | Method for positioning substratge relatively to supporting table and its equipment |
| CN201348479Y (en) * | 2008-12-11 | 2009-11-18 | 中冶建筑研究总院有限公司 | Standard displacement generator and displacement monitoring device |
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| CN102796998A (en) | 2012-11-28 |
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Granted publication date: 20131127 Termination date: 20160731 |