CN102781153A - X-ray control device - Google Patents

X-ray control device Download PDF

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Publication number
CN102781153A
CN102781153A CN2012100162670A CN201210016267A CN102781153A CN 102781153 A CN102781153 A CN 102781153A CN 2012100162670 A CN2012100162670 A CN 2012100162670A CN 201210016267 A CN201210016267 A CN 201210016267A CN 102781153 A CN102781153 A CN 102781153A
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Prior art keywords
ray
bombardment
current
ray bombardment
unit
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CN2012100162670A
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Chinese (zh)
Inventor
神户悟郎
岩尾快彦
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Shimadzu Corp
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Shimadzu Corp
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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The invention provides a control device which can detect the ON/OFF state of the X-ray radiation at the X-ray radiation unit side, or can detect the X-ray radiation abnormity at the X-ray radiation unit side. A current detecting circuit (11a) detects the X-ray radiation unit side based on the consumption current of an X-ray generating device (31) ( also including an X-ray tube (21)), so that by just monitoring the consumption current, the ON/OFF state of the X-ray radiation at the X-ray generating device (31) side can be detected. In addition, based on the comparison of the consumption current and an X-ray radiation condition, on the condition that the current which is set a X-ray radiation condition is not constant with the monitored consumption current actually, the current detecting circuit (11a) detects the X-ray radiation abnormity, so that by just detecting the consumption current, the X-ray radiation abnormity at the X-ray generating unit side can be detected.

Description

X ray control device
Technical field
The present invention relates to a kind of X ray control device of controlling the x-ray bombardment unit of irradiation X ray.
Background technology
The X ray control device is used for X ray checking device of X ray nondestructive inspection etc. etc.Adopt X ray checking device,, carry out X-ray examination (for example, with reference to patent documentation 1) through shining X ray from X-ray tube for object.In recent years, adopt the X ray generation device of blocking X-ray tube, central arithmetic processing apparatus (CPU), be electrically connected the last level controller of X ray generation device and this X ray generation device of control with cable.
As shown in Figure 3, be used as the cable c1 of the special-purpose switching value I/O of special-purpose I/O (I/O) bus of input and output, the cable c2 that the interlocked control of prohibited acts is used when not satisfying certain condition, the cable c3 that uses to X ray generation device supply power are electrically connected X ray generation device G and last level controller C in order to prevent misoperation etc.The cables of employing RS-232C specification etc. are as these cables.And; Adopt X ray checking device; Through power supply supply, interlocked control, RS-232C communication, switching value I/O etc.; X ray generation device G is carried out the control of tube voltage/tube current of ON/OFF and the X-ray tube of x-ray bombardment from last level controller C, according to from the response of the RS-232C communication of X ray generation device G, switching value I/O etc. state at last level controller C side monitoring X ray generation device C.
The prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid is opened the 2007-114058 communique
Summary of the invention
The problem that invention will solve
But; Under the situation of the single failure that has produced the X ray generation device; Exist the response of RS-232C communication, switching value I/O inconsistent, can't normally detect the such problem of ON/OFF state of x-ray bombardment through last level controller with respect to the state of reality.The situation that consequently has the fault that can't detect the X ray generation device.Here, " single failure " is meant that single part produces the situation of fault.In fact, be extremely low because a plurality of parts produce the probability of the situation of fault simultaneously, as long as therefore can detect single failure, just can carry out control forthwith to X ray generation device (x-ray bombardment unit).
The present invention makes in view of such situation just, and its purpose is to provide a kind of can detect the ON/OFF state of the x-ray bombardment of x-ray bombardment cell side, maybe can detect the unusual X ray control device of the x-ray bombardment of x-ray bombardment cell side.
The means of dealing with problems
In order to solve the above problems, the result of the wholwe-hearted research of inventors is the opinion that obtains following that kind.
That is, existing X ray control device from the ON/OFF of X ray control device side for X-ray tube or X ray generation device indication x-ray bombardment, or is set the x-ray bombardment condition to X-ray tube or X ray generation device (x-ray bombardment unit) control the time.Therefore, produced under the situation of single failure in the x-ray bombardment cell side of X-ray tube or X ray generation device etc., even carried out setting or indication from X ray control device side direction x-ray bombardment cell side, control also can't normally be carried out.
On the other hand, X-ray tube, X ray generation device are under the situation of ON state in x-ray bombardment, and are to compare under the situation of OFF state (non-irradiating state) in x-ray bombardment, and current sinking flows more, consumes more electric power.Can learn thus: the technology of utilizing the current sinking of the x-ray bombardment unit of monitoring X-ray tube or X ray generation device etc.; Even produced single failure, also can detect ON/OFF state or x-ray bombardment unusual of x-ray bombardment based on current sinking in the x-ray bombardment cell side.
Based on so known, the present invention is as following and constitute.
Promptly; X ray control device involved in the present invention (first invention); The x-ray bombardment unit of its control irradiation X ray is characterized in that having the irradiating state detecting unit; Said irradiating state detecting unit detects the ON/OFF state of x-ray bombardment based on the current sinking of said x-ray bombardment unit.
[action effect] is according to X ray control device involved in the present invention (first invention); The irradiating state detecting unit is based on the current sinking of x-ray bombardment unit; Detect the ON/OFF state of x-ray bombardment, check that thus the current sinking of x-ray bombardment unit just can detect the ON/OFF state of the x-ray bombardment of x-ray bombardment cell side.
Again, X ray control device involved in the present invention (second invention), the x-ray bombardment unit of its control irradiation X ray; It is characterized in that; Have the abnormality detection unit, said abnormality detection unit detects the unusual of x-ray bombardment based on the current sinking of x-ray bombardment unit.
[action effect] is according to X ray control device involved in the present invention (second invention); The abnormality detection detecting unit is based on the current sinking of x-ray bombardment unit; Detect the unusual of x-ray bombardment, the current sinking of checking the x-ray bombardment unit thus just can detect the x-ray bombardment cell side x-ray bombardment unusually.
Also can make above-mentioned first invention and the second invention combination, will be (second invents) abnormality detection unit based on (first invention) irradiating state detecting unit dual-purpose that current sinking detects the ON/OFF state of x-ray bombardment.
About second invention, a unusual concrete embodiment who detects x-ray bombardment through the abnormality detection unit is described below.That is, the abnormality detection unit is unusual based on relatively detecting of current sinking and x-ray bombardment condition.Produce under the inconsistent situation between electric current in the x-ray bombardment condition that is set and monitored practically current sinking, can be regarded as x-ray bombardment and produce unusual.
The effect of invention
According to X ray checking device involved in the present invention, based on the current sinking of x-ray bombardment unit, the irradiating state detecting unit can detect the ON/OFF state of x-ray bombardment, and the abnormality detection unit can detect the unusual of x-ray bombardment.
Description of drawings
Fig. 1 is the summary pie graph and the block diagram of the related X ray checking device of embodiment.
Fig. 2 is the block diagram of related X ray control device that X ray checking device adopted of embodiment (going up level controller) and X ray generation device.
Fig. 3 is the block diagram of existing X ray control device (going up level controller) and X ray generation device.
The explanation of symbol
The 1X ray inspection arrangement
6 high voltage generation portions
Level controller on 11
The 11a current detection circuit
The 21X ray tube
31X ray generation device.
Embodiment
Below, with reference to the description of drawings embodiments of the invention.
Fig. 1 is the summary pie graph and the block diagram of the related X ray checking device of embodiment, and Fig. 2 is the block diagram of related X ray control device that X ray checking device adopted of embodiment (going up level controller) and X ray generation device.In the present embodiment, X ray control device (go up level controller) is that example describes with the situation of the X ray checking device that is used for X ray nondestructive inspection etc.
As shown in Figure 1, the related X ray checking device 1 of present embodiment has: the image pickup part 2 that object O is made a video recording, carry objective table 3, the objective table drive division 4 that drives this objective table 3 of putting object O, drive the shooting drive division 5 of image pickup part 2, produce high-tension high voltage generation portion 6 in order to give tube current or tube voltage the X-ray tube 21 of image pickup part 2, image processing part 7 that x-ray detection signal that the X-ray detector 22 through image pickup part 2 is obtained carries out various image processing and exports the radioscopy image.
Image pickup part 2 has to the X-ray tube 21 of object O irradiation X ray with to from X-ray tube 21 irradiations and see through the detector 22 that the X ray of object O detects.About X-ray detector 22, as institutes such as image intensifier tube (I.I), plate type X-ray detector (FPD:Flat Panel Detector) are illustrative, not special the qualification.In the present embodiment, as X-ray detector 22, be that example describes with plate type X-ray detector (FPD).The x-ray bombardment unit that (afterwards stating) X ray generation device 31 that is made up of high voltage generation portion 6 and X-ray tube 21 is equivalent among the present invention.
FPD is made up of a plurality of detecting elements of arranging in length and breadth accordingly with pixel, and detecting element detects X ray, and the data (charge signal) of X ray to be detected are exported as x-ray detection signal.So, to object O irradiation X ray, check out X ray and export x-ray detection signal, make a video recording by 2 couples of object O of image pickup part that X-ray tube 21 and X-ray detector 22 constitute thus by the X-ray detector 22 that FPD constitutes from X-ray tube 21.
Objective table drive division 4 constitutes by omitting illustrated motor, driving shaft etc., make move horizontally in the drawings X of objective table 3, the Y direction, on the Z direction lifting moving, or in horizontal plane, rotate around the Z axle center.Object O also passes through moving of objective table 3, object O is moved to till the camera position, and make a video recording through image pickup part 2, to carry out X-ray examination.
Shooting drive division 5 and objective table drive division 4 identical ground constitute by omitting illustrated motor, driving shaft etc., make move horizontally in the drawings X of image pickup part 2, the Y direction, on the Z direction lifting moving, or center on the Z axle center and in horizontal plane, rotate.With X-ray tube 21 and X-ray detector 22 relative to form make both move respectively, carry out X-ray examination afterwards.Again, make X-ray tube 21 or X-ray detector 22 go up lifting moving, can change magnification ratio, the minification of X-ray examination in vertical (Z direction).Again, also can make X-ray tube 21 or X-ray detector 22 tilt, from incline direction make a video recording (with reference to two chain-dotted lines the figure).
High voltage generation portion 6 produces high voltage and gives X-ray tube 21 with tube current or tube voltage, and X ray produces from X-ray tube 21 thus, thus the irradiation X ray.Image processing part 7 is exported the radioscopy image relevant with object O through x-ray detection signal being implemented the image processing of gain calibration, correction or lag or gray correction etc.So, the x-ray detection signal (that is, from the x-ray detection signal of X-ray detector 22 outputs) that 7 pairs of image processing parts have been made a video recording by image pickup part 2 carries out image processing and exports the radioscopy image, thus object O is carried out radioscopy and takes.And, object O is carried out X-ray examination.
In addition, X ray checking device 1 has storage part 8, input part 9, efferent 10 and last level controller 11.Last level controller 11 is equivalent to the X ray control device in the present invention.
Storage part 8 writes and stores the data of radioscopy image of being obtained by image processing part 7 etc. through last level controller 11, suitably read as required, and through last level controller 11 the radioscopy image is sent to efferent 10 and export.Storage part 8 is made up of the storage medium of representatives such as ROM (read-only memory), RAM (random access memory), hard disk.
Input part 9 is transported to data, the order that the operator imported in the level controller 11.Input part 9 is made up of the indicating equipment of representatives such as mouse, keyboard, joystick, tracking ball, touch panel.
Efferent 10 is made up of the display part of representatives such as monitor, printer etc.In the present embodiment, will be presented on the monitor of efferent 10 at the image pickup result of image pickup part 2.
Last level controller 11 blanket controls constitute the each several part of X ray checking device 1.The data of radioscopy image that will be obtained by image processing part 7 through last level controller 11 etc. write and store in the storage part 8, and the data delivery of radioscopy picture that perhaps will be obtained by image processing part 7 etc. is exported to efferent 10.Exporting demonstration at efferent 10 under the situation of display part, is to export printing under the situation of printer at efferent 10.The concrete back that is formed in about last level controller 11 is described.
In the present embodiment, as shown in Figure 2, high voltage is produced portion 6, X-ray tube 21, central arithmetic processing apparatus (CPU) 23 blocking to constitute X ray generation device 31.In the present embodiment, last level controller 11 is formed by control basal plate.
Also as Fig. 3 is described; In Fig. 2, be used as the cable c1 of the special-purpose switching value I/O of special-purpose I/O (I/O) bus of input and output, the cable c2 that the interlocked control of prohibited acts is used when not satisfying certain condition, the cable c3 that uses to X ray generation device supply power are electrically connected X ray generation device 31 and last level controller 11 in order to prevent misoperation etc.The cable that adopts the RS-232C specification is as these cables.And; In X ray checking device 1; Through power supply supply, interlocked control, RS-232C communication, switching value I/O etc.; Carry out the control of tube voltage/tube current of ON/OFF and the X-ray tube 21 of x-ray bombardment from 11 pairs of X ray generation devices of last level controller 31, according to state from level controller 11 inspection X ray generation devices 31 in the response utilization of the RS-232C communication of X ray generation device 31, switching value I/O etc.
Specifically, supply with the high voltage generation portion 6 of the cable c3 of usefulness through power supply from last level controller 11 with supply voltage (for example direct current (DC) 24V) supply X ray generation device 31.Supply with through this power supply, make high voltage generation portion 6 produce high voltage, give X-ray tube 21 tube currents or tube voltage, to shine X ray from X-ray tube 21.ON about the x-ray bombardment of reality; Be to carry out through sending the indication that is made as ON to the central processing unit 23 of X ray generation device 31 from last level controller 11; About the OFF of x-ray bombardment, be to carry out through sending the indication that is made as OFF to central processing unit 23 from last level controller 11.Again, from last level controller 11, the cable of using through interlocked control carries out interlocked control from c2 to the central processing unit 23 of X ray generation device 31.Through carrying out this interlocked control, when not satisfying certain condition, forbid the action of central processing unit 23, to prevent misoperation etc.Again, in order to confirm between X ray generation device 31 and last level controller 11, whether to carry out mutual communication, the cable c1 through switching value I/O carries out RS-232C communication.
Further, as shown in Figure 2 in the present embodiment, last level controller 11 has current detection circuit 11a.The power supply that current detection circuit 11a monitoring is supplied with to X ray generation device 31 from last level controller 11 is supplied with the current sinking of the cable c3 of usefulness.As known, X-ray tube 21, X ray generation device 31 are under the situation of ON state in x-ray bombardment, are that the situation of OFF state (non-irradiating state) is compared with x-ray bombardment, and current sinking flows more, consumes more electric power.
About X-ray tube 21, monitor x-ray bombardment when being the current sinking more than the OFF state (non-irradiating state) at current detection circuit 11a, detecting x-ray bombardment is the ON state.During the little current sinking of the current sinking when current detection circuit 11a monitors than x-ray bombardment to minimum x-ray bombardment condition, then detecting x-ray bombardment is OFF state (non-irradiating state).Like this, current detection circuit 11a detects the ON/OFF state of x-ray bombardment according to X ray generation device 31 current sinking of (also comprising X-ray tube 21).Current detection circuit 11a is equivalent to the irradiating state detecting unit among the present invention.
Again, in the present embodiment, the current detection circuit 11a that is equivalent to the irradiating state detecting unit among the present invention is also used as the abnormality detection unit among the present invention.That is, current detection circuit 11a monitors current sinking, and is unusual based on relatively detecting of current sinking and x-ray bombardment condition.Like this, current detection circuit 11a detects the unusual of x-ray bombardment based on X ray generation device 31 current sinking of (also comprising X-ray tube 21).Current detection circuit 11a is equivalent to the abnormality detection unit among the present invention.
Electric current when no matter whether setting the x-ray bombardment condition; In fact; Utilizing current detection circuit 11a to monitor out under the situation with the current sinking of the electric current different value that is set; Produce inconsistently between electric current under the x-ray bombardment condition that is set and the current sinking that is monitored to practically, then can be regarded as x-ray bombardment and produce unusual.
Again; For example; As stated, no matter whether x-ray bombardment is set to ON (the x-ray bombardment condition is ON), under the situation of the little current sinking of actual current sinking when utilizing current detection circuit 11a to monitor than x-ray bombardment to the x-ray bombardment condition of minimum; Produce inconsistently between electric current under the x-ray bombardment condition that is set and the current sinking that is monitored to practically, then can be regarded as x-ray bombardment and produce unusual.On the contrary; No matter whether x-ray bombardment is set to OFF; Monitor under the situation of x-ray bombardment for the current sinking more than the OFF state (non-irradiating state) at the actual current detection circuit 11a that utilizes; Produce inconsistently between x-ray bombardment condition that is set and the seized practically current sinking that monitors, then can be regarded as producing unusually about x-ray bombardment.
The X ray control device related (going up level controller 11) according to the present embodiment that possesses above-mentioned formation; Based on X ray generation device 31 current sinking of (also comprising X-ray tube 21); Current detection circuit 11a detects the ON/OFF state of x-ray bombardment, thus as long as the monitoring current sinking just can detect the ON/OFF state of the x-ray bombardment of X ray generation device 31 sides.
In the present embodiment; Based on X ray generation device 31 current sinking of (also comprising X-ray tube 21); Current detection circuit 11a detects the unusual of x-ray bombardment, thus if the monitoring current sinking just can detect X ray generation device 31 sides x-ray bombardment unusually.
In the present embodiment, the irradiating state detecting unit dual-purpose that detects the ON/OFF state of x-ray bombardment based on current sinking is the unusual abnormality detection unit that detects x-ray bombardment based on current sinking, and it is realized through current detection circuit 11a.
In the present embodiment, current detection circuit 11a is unusual based on relatively checking out of current sinking and x-ray bombardment condition.Between the electric current of the x-ray bombardment condition that is set and the current sinking that is monitored to practically, produce under the inconsistent situation, can be regarded as x-ray bombardment and produce unusual.
The present invention is not limited to above-mentioned example, also can as hereinafter, be out of shape enforcement.
(1) as long as can become the object of X-ray examination, limits especially as object.As stated; As the institutes such as mold article of the through hole/pattern/braze welding joint of installation base plate, multilager base plate, the foundry goods that is configured in electronic unit before the installation of integrated circuit (IC) on the backing plate and so on, metal etc., video tape recorder and so on are illustrative, as long as it is just passable that object is carried out X-ray examination.
(2) in the above embodiments, be carry out X-ray examination, but taking under the situation of carrying out and also can be suitable for for the X-ray examination of object through object being carried out CT for object through object being had an X-rayed take.Under the situation of shooting of combination radioscopy and CT shooting carrying out X-ray examination, also can be suitable for again.
(3) in the above embodiments; X ray control device (go up level controller) is that the situation that is used for the X ray checking device of X ray nondestructive inspection etc. is that example describes, and still also can be applicable to medical diagnostic apparatus (for example radioscopy camera, X-ray tomograph, X ray CT device) in medical etc.
(4) in the above embodiments; The irradiating state detecting unit dual-purpose that detects the ON/OFF state of x-ray bombardment based on current sinking is the unusual abnormality detection unit that detects x-ray bombardment based on current sinking; It is realized through current detection circuit 11a, but current detection circuit 11a also can only have the function of the irradiating state detecting unit of the ON/OFF state that detects x-ray bombardment.
(5) in the above embodiments; The irradiating state detecting unit dual-purpose that detects the ON/OFF state of x-ray bombardment based on current sinking is the unusual abnormality detection unit that detects x-ray bombardment based on current sinking; It is realized through current detection circuit 11a, but current detection circuit 11a also can only have the function of the unusual abnormality detection unit that detects x-ray bombardment.
(6) in the above embodiments; As shown in Figure 2; High voltage is produced portion 6, X-ray tube 21, central processing unit 23 blocking and constitute X ray generation device 31; But as the x-ray bombardment unit of irradiation X ray, central processing unit, high voltage generation portion are not prerequisite, can have X-ray tube separately yet.Again, also can CPU be combined in the X ray control device (the last level controller among the embodiment) to constitute a control device, also can high voltage generation portion be combined in the X ray control device.
(7) in the above embodiments; X-ray bombardment unit (the high voltage generation portion 6 among the embodiment, X-ray tube 21) and X ray control device (the last level controller among the embodiment) constitute respectively, but also can in the X ray control device, make up the x-ray bombardment unit.

Claims (4)

1. X ray control device; The x-ray bombardment unit of its control irradiation X ray is characterized in that having the irradiating state detecting unit; Said irradiating state detecting unit detects the ON/OFF state of x-ray bombardment based on the current sinking of said x-ray bombardment unit.
2. X ray control device, the x-ray bombardment unit of its control irradiation X ray is characterized in that having the abnormality detection unit, said abnormality detection unit detects the unusual of x-ray bombardment based on the current sinking of said x-ray bombardment unit.
3. X ray control device as claimed in claim 2 is characterized in that, will be also used as said abnormality detection unit based on the irradiating state detecting unit that said current sinking detects the ON/OFF state of x-ray bombardment.
4. like claim 2 or 3 described X ray control device, it is characterized in that said abnormality detection unit is said unusual based on relatively detecting of said current sinking and x-ray bombardment condition.
CN2012100162670A 2011-05-10 2012-01-18 X-ray control device Pending CN102781153A (en)

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JP6849521B2 (en) 2017-05-01 2021-03-24 キヤノン電子管デバイス株式会社 X-ray system and X-ray tube inspection method
JP6983966B1 (en) * 2020-09-16 2021-12-17 株式会社東芝 Thickness measuring device

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Application publication date: 20121114