CN102778730A - Reflecting type array waveguide grating based on multiple-mode interferometer reflector - Google Patents
Reflecting type array waveguide grating based on multiple-mode interferometer reflector Download PDFInfo
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Abstract
The invention provides a reflecting type array waveguide grating based on a multiple-mode interferometer reflector. The reflecting type array waveguide grating comprises an input waveguide, a coupler, an array waveguide, a reflector and an output waveguide, wherein the input waveguide and the output waveguide are arranged on the same side of the coupler, and the array waveguide is arranged on the other side of the coupler. The array waveguide is composed of a plurality of nanometer wire waveguides, one end of each nanometer wire waveguide is connected with the coupler, the other end of each nanometer wire waveguide is connected with the reflector, and the reflector is a plane wave guide structure formed by a multi-mode interferometer and an annular waveguide. The reflecting type array waveguide grating is totally based on the plane light waveguide technology, the waveguide narrowest in width is a single-mode waveguide, and the requirements for manufacture accuracy of the waveguide is totally in accordance with that of the ordinary nanometer wire array waveguide grating. By adopting the reflector based on the multi-mode interferometer, the reflector is not sensitive in errors of the wavelength and the manufacture process. The array waveguide is flexible in structural design and can be distributed randomly according to requirements.
Description
Technical field
The present invention relates to planar optical waveguide integrated device field, particularly relate to reflection type array wave-guide grating.
Background technology
Array waveguide grating is based on the plane light wave waveguide technology; Have that the wavelength interval is little, port number is big, the passage loss is even, size is little, it is integrated to be easy to, be convenient to advantage such as batch process, is considered to be suitable for most the Primary Component of jumbo dense wavelength division multiplexing system.The miniaturization of array waveguide grating is an important research project always.
Array waveguide grating is based on the silicon based silicon dioxide material system the most widely in application at present, and typical sizes is at 10cm
2The order of magnitude.Along with the development of LSI device, miniaturization of devices is an inexorable trend.The refringence that increases waveguide core layer and covering can be limited in light in the littler waveguide, under identical bending loss, can reduce the bending radius of waveguide, under identical crosstalking, can reduce the interval of Waveguide array, thereby reduce size of devices.In the array waveguide grating based on silicon nanowires, typical sizes is about 100 μ m
2Magnitude.
Fig. 1 is one typical 4 * 4 a silicon nanowire array waveguide optical grating.Its principle of work can be described below.Diffraction takes place from input waveguide 1 input in the light of a certain wavelength in input coupler 2, the diffraction light that expands after restrainting is coupled into the Waveguide array 3 that contains N waveguide.In Waveguide array 3, the geometrical length of each adjacent waveguide increases progressively successively, and the phase place of the light of transmission also squints successively therein.The light of this N bundle out of phase interferes in output coupler 4, if place output waveguide 5 in the focal spot of constructive interference, then the light of this wavelength is from output waveguide 5 outputs.For a branch of light that comprises a plurality of wavelength; Its transmission course is similar; Because the phase deviation that in Waveguide array 3, takes place is the function of wavelength; The position of the focus point of the light generation constructive interference of different wave length is also different, is the light of exportable different wave length as long as place output waveguide 5 at corresponding focus point.Can realize the demultiplexing function like this: from a certain passage input complex light, light beams of different wavelengths is respectively from different passage output.Because light path is reversible, as long as, just can realize multiplexing function:, export from same passage from the light beams of different wavelengths that different passages are imported with input port and output port usefulness conversely.
Because the structure of array waveguide grating can add catoptron 6 in centerline about the center line symmetry of Waveguide array 3, constitutes reflection type array wave-guide grating as shown in Figure 2.The length of the Waveguide array 3 of reflection type array wave-guide grating is reduced to original half the, and input waveguide 1 and output waveguide 5 are positioned at the same side of Waveguide array 3, and input coupler 2 overlaps with output coupler 4.This structure has not only reduced the shared area of single array waveguide grating, can on a wafer, produce the chip of greater number, and has reduced the length of the narrower Waveguide array 3 of width, has improved the efficient and the yield of device preparation.
Catoptron is main points of reflection type array wave-guide grating.The scheme that at present existing document is announced comprises metallic mirror, dielectric multi-layer optical thin film catoptron, Bragg grating catoptron and photon crystal reflecting mirror.
Metallic mirror is the end face metal-coated films at Waveguide array 3, for example Cr-Au film.The dielectric multi-layer optical thin film catoptron is end face plating dielectric multi-layer optical thin film, the for example SiO at Waveguide array 3
2/ TiO
2Multilayer film.Multiple tracks technologies such as these two kinds of catoptrons all need grind the end face of Waveguide array 3, polishing, plated film; Complex process not only; Cost an arm and a leg, and the flatness of end reflection face and roughness are very big to the performance impacts such as loss, channel interference and transmission spectrum width of AWG.
The Bragg grating catoptron is that the end at Waveguide array 3 prepares Bragg grating.Because Bragg grating has higher chromatic dispersion, therefore this catoptron only is applicable to narrower wavelength coverage.
Photon crystal reflecting mirror is in the terminal preparation size of Waveguide array 3 hole less than the period profile of 300nm, and the gap between the Kong Yukong utilizes the forbidden band effect of photonic crystal to reflect less than 200nm.The making precision of this structure is very high, and is all high to equipment and operating personnel's requirement, is inappropriate for suitability for industrialized production.
Summary of the invention
The object of the invention is to overcome the above-mentioned deficiency that prior art exists; Reflection type array wave-guide grating based on the multimode interference catoptron is provided; The complete compatible planar optical waveguide technology of reflection type array wave-guide grating of the present invention, catoptron are to wavelength and make that error is insensitive, the Waveguide array layout is flexible, and concrete technical scheme is following.
Based on the reflection type array wave-guide grating of multimode interference catoptron, it comprises input waveguide, coupling mechanism, Waveguide array, catoptron and output waveguide, and input waveguide and output waveguide are positioned at the same side of coupling mechanism, and Waveguide array is positioned at the opposite side of coupling mechanism; Said Waveguide array is made up of many nano wire waveguides, and an end of each root nano wire waveguide links to each other with coupling mechanism, and the other end of each root nano wire waveguide all connects a catoptron separately.
In the above-mentioned reflection type array wave-guide grating, said catoptron is the planar waveguiding structure that is made up of multimode interference and ring-like waveguide.
In the above-mentioned reflection type array wave-guide grating, said multimode interference comprises a single mode input waveguide, two single mode output waveguides and a multimode waveguide, adopts mode converter between single mode waveguide and the multimode waveguide; One end of said input waveguide links to each other with an end of multimode waveguide through a mode converter, and the other end links to each other with a nano wire waveguide in the Waveguide array; Said two single mode output waveguides all have an end to link to each other with the other end of said multimode waveguide through a mode converter separately; Wherein the other end of a single mode output waveguide links to each other with an end of ring-like waveguide, and the other end of another root single mode output waveguide links to each other with the other end of ring-like waveguide.
In the above-mentioned reflection type array wave-guide grating, said mode converter is slab guide, and the width that passes through diminishes gradually, and the end that width is big is connected with multimode waveguide.
In the above-mentioned reflection type array wave-guide grating, said ring-like waveguide is formed by connecting some curved waveguides, and said ring-like waveguide has opening, and the two ends of opening are the junction of said two single mode output waveguides and ring-like waveguide.
The structure of Waveguide array includes but not limited to following three kinds of schemes.
Scheme 1: the waveguide in the Waveguide array is parallel to each other.
Scheme 2: the waveguide in the Waveguide array is fan-shaped distribution.
Scheme 3: the waveguide in the Waveguide array is irregular distribution.
Compared with prior art, the invention has the beneficial effects as follows:
1, the present invention adopts reflection type array wave-guide grating; Not only reduced the shared area of single array waveguide grating; Can on a wafer, produce the chip of greater number, and reduce the length of the narrower Waveguide array of width, improve the efficient and the yield of device preparation.
2, the present invention is fully based on planar optical waveguide technology, and the narrowest waveguide of width is the waveguide of single mode nano wire, make precision requirement and common nano-wire array waveguide optical grating require in full accord.
3, the present invention adopts the catoptron based on multimode interference, and catoptron is insensitive to wavelength and preparation technology's error.
4, the structural design of Waveguide array of the present invention is flexible, as required arbitrary placement.
Description of drawings
The structural representation of the silicon nanowire array waveguide optical grating of Fig. 1 typical 4 * 4.
Fig. 2 the present invention program 1 structural representation.
Fig. 3 the present invention program 2 structural representation.
Fig. 4 the present invention program 3 structural representation.
Fig. 5 is based on the structural representation of the catoptron of multimode interference.
Among the figure, 1, input waveguide, 2, coupling mechanism, 3, Waveguide array; 4, coupling mechanism, 5, output waveguide, 6, catoptron; 7, the single mode input waveguide of multimode interference, 8, mode converter, 9, multimode waveguide; 10, mode converter, 11, the single mode output waveguide of multimode interference, 12, ring-like waveguide.
Embodiment
Below in conjunction with accompanying drawing practical implementation of the present invention is described further, but enforcement of the present invention and protection domain are not limited thereto.
Like Fig. 2, a kind of structural representation for based on the reflection type array wave-guide grating of multimode interference catoptron comprises input waveguide 1, coupling mechanism 2, Waveguide array 3, catoptron 6 and output waveguide 5.Input waveguide 1 and output waveguide 5 are positioned at the same side of coupling mechanism 2, and Waveguide array 3 is positioned at the opposite side of coupling mechanism 2; Said Waveguide array 3 is made up of many silicon nanowires waveguides, and an end of each root silicon nanowires waveguide links to each other with coupling mechanism 2, and the other end links to each other with a catoptron 6.
The length difference Δ of adjacent silicon nano wire waveguide
LCan be expressed as:
Wherein
mBe diffraction progression,
λ 0Be centre wavelength,
n Eff It is the effective refractive index of Waveguide array.Δ
LBe the generic array waveguide optical grating the waveguide of adjacent silicon nano wire length difference 1/2.
Rowland circle structure to coupling mechanism 2 is adjusted, and can improve the consistance that channel inserts loss.
The layout of Waveguide array 3 can design arbitrarily as required, but the minor increment between two silicon nanowires waveguides should be greater than 1.3 μ m.As shown in Figure 3, Waveguide array is fan-shaped distribution.As shown in Figure 4, Waveguide array is irregular distribution.
Like Fig. 5, catoptron 6 is the planar waveguiding structures that are made up of multimode interference and ring-like waveguide 12.Said multimode interference comprises a single mode input waveguide 7, two single mode output waveguides 11 and multimode waveguides 9, adopts mode converter 8 and 10 between single mode waveguide and the multimode waveguide; One end of said input waveguide 7 links to each other with an end of multimode waveguide 9 through a mode converter 8, and the other end links to each other with a silicon nanowires waveguide in the Waveguide array 3; Said two single mode output waveguides 11 all have an end to link to each other with the other end of said multimode waveguide 9 through a mode converter 10 separately; Wherein the other end of a single mode output waveguide 10 links to each other with an end of ring-like waveguide 12, and the other end of another root single mode output waveguide 10 links to each other with the other end of ring-like waveguide 12.Said mode converter 8 and 10 is for slab guide, and the width that passes through diminishes gradually, and the end that width is big is connected with multimode waveguide 9.Said ring-like waveguide 12 is formed by connecting some curved waveguides, and ring-like waveguide 12 has opening (promptly not sealing connection), and the two ends of opening are the junction of said two single mode output waveguides and ring-like waveguide 12.
1 * 2 multimode interference in this instance designs based on symmetrical interference theory, the width of multimode waveguide 9
W M For:
Wherein
w s Be the distance between two single mode output waveguides 11 of multimode interference,
w s Greater than 1.3 μ m.The position of two single mode output waveguides 11
x p Be about:
The length of multimode waveguide 9
L M Be about:
Wherein
n Si It is the refractive index of silicon materials.
x p With
L M Exact value can be through confirming after the numerical method emulation.
Be to reduce the insertion loss of multimode interference, can between single mode waveguide and multimode waveguide 9, adopt waveguide that width gradually changes as mode converter, waveguide exists
zThe width at place
WShould satisfy:
Wherein
W 0Be the waveguide width at narrow place,
λ Eff Be
zThe effective wavelength at place.
W(
z) satisfy but be not limited to following curve form: straight line, para-curve, hyperbolic curve, quafric curve.
Ring-like waveguide 12 is formed by connecting the silicon nanowires curved waveguide of some radius-of-curvature greater than 3 μ m.For further reducing the radiation loss of curved waveguide, can increase the radius-of-curvature of curved waveguide.
The course of work of reflection type array wave-guide grating that the present invention is based on the multimode interference catoptron is following.Diffraction takes place from input waveguide 1 input in the light of a certain wavelength in coupling mechanism 2, the diffraction light that expands after restrainting is coupled into the Waveguide array 3 that contains N nano wire waveguide.The light of each nano wire waveguide gets into a multimode waveguide 9 respectively, forms two aplanatic pictures through multiple-mode interfence at the end of multimode waveguide 9; These two pictures are coupled to an output waveguide 11 of multimode interference respectively, get into multimode waveguide 9 again via ring-like waveguide 12; Because light path is reversible, this two-beam is combined into a branch of light at the input end of multimode waveguide 9, and is coupled to the input waveguide 7 of multimode interference; Thereby will reflect back from the light of this Waveguide array input, and return along former road.In Waveguide array 3, the geometrical length of each adjacent waveguide increases progressively successively, and the phase place of the light of transmission also squints successively therein.The light of this N bundle out of phase interferes in coupling mechanism 2, from corresponding output waveguide 5 outputs.For a branch of light that comprises a plurality of wavelength; Its transmission course is similar; Because the phase deviation that in Waveguide array 3, takes place is the function of wavelength, the position of the focus point of the light generation constructive interference of different wave length is also different, can realize the demultiplexing function from corresponding output waveguide 5 outputs.Because light path is reversible, as long as, just can realize multiplexing function with input port and output port usefulness conversely.
Claims (5)
1. based on the reflection type array wave-guide grating of multimode interference catoptron; Comprise input waveguide, coupling mechanism, Waveguide array, catoptron and output waveguide; It is characterized in that input waveguide and output waveguide are positioned at the same side of coupling mechanism, Waveguide array is positioned at the opposite side of coupling mechanism; Said Waveguide array is made up of many nano wire waveguides, and an end of each root nano wire waveguide links to each other with coupling mechanism, and the other end of each root nano wire waveguide all connects a catoptron separately.
2. reflection type array wave-guide grating as claimed in claim 1 is characterized in that said catoptron is the planar waveguiding structure that is made up of multimode interference and ring-like waveguide (12).
3. reflection type array wave-guide grating as claimed in claim 2 is characterized in that said multimode interference comprises a single mode input waveguide, two single mode output waveguides (11) and a multimode waveguide, adopts mode converter between single mode waveguide and the multimode waveguide; One end of said input waveguide links to each other with an end of multimode waveguide through a mode converter, and the other end links to each other with a nano wire waveguide in the Waveguide array; Said two single mode output waveguides (11) all have an end to link to each other with the other end of said multimode waveguide through a mode converter (10) separately; Wherein the other end of a single mode output waveguide (11) links to each other with an end of ring-like waveguide (12), and the other end of another root single mode output waveguide (11) links to each other with the other end of ring-like waveguide (12).
4. reflection type array wave-guide grating as claimed in claim 3 is characterized in that said mode converter is slab guide, and the width that passes through diminishes gradually, and the end that width is big is connected with multimode waveguide.
5. reflection type array wave-guide grating as claimed in claim 2; It is characterized in that said ring-like waveguide (12) is formed by connecting some curved waveguides; Said ring-like waveguide (12) has opening, and the two ends of opening are the junction of said two single mode output waveguides and ring-like waveguide (12).
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104849807A (en) * | 2015-04-27 | 2015-08-19 | 南京大学 | Turning device of high-density waveguide superlattice |
| CN104880767A (en) * | 2015-06-11 | 2015-09-02 | 苏州旭创科技有限公司 | Array waveguide grating and wavelength division multiplexing/demultiplexing device using the same |
| CN105824075A (en) * | 2016-04-29 | 2016-08-03 | 昆明理工大学 | Folded reflection-type arrayed waveguide grating wavelength division multiplexer assisted by micro-ring reflective optical waveguide |
| WO2017107133A1 (en) * | 2015-12-24 | 2017-06-29 | 华为技术有限公司 | Arrayed waveguide grating |
| CN107305270A (en) * | 2016-04-25 | 2017-10-31 | 迈络思科技有限公司 | Compact optical fiber shunt |
| CN110542950A (en) * | 2019-07-18 | 2019-12-06 | 北京大学 | Mode demultiplexer based on degenerate mode group of spatial three-dimensional waveguide |
| CN113568094A (en) * | 2021-08-09 | 2021-10-29 | 华中科技大学 | Optical signal processing chip based on array waveguide grating |
| CN113904726A (en) * | 2021-11-15 | 2022-01-07 | 东南大学 | Large time delay difference dispersion waveguide structure |
| CN117334761A (en) * | 2023-11-27 | 2024-01-02 | 之江实验室 | Reflection-type germanium-silicon avalanche photodetector |
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| CN102005697A (en) * | 2010-10-15 | 2011-04-06 | 北京大学 | Line cavity laser with super-narrow line width based on parallel feedback |
| CN202870343U (en) * | 2012-07-02 | 2013-04-10 | 华南理工大学 | Reflecting type array waveguide grating based on multiple-mode interferometer reflector |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104849807A (en) * | 2015-04-27 | 2015-08-19 | 南京大学 | Turning device of high-density waveguide superlattice |
| CN104880767A (en) * | 2015-06-11 | 2015-09-02 | 苏州旭创科技有限公司 | Array waveguide grating and wavelength division multiplexing/demultiplexing device using the same |
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| CN107305270A (en) * | 2016-04-25 | 2017-10-31 | 迈络思科技有限公司 | Compact optical fiber shunt |
| CN105824075A (en) * | 2016-04-29 | 2016-08-03 | 昆明理工大学 | Folded reflection-type arrayed waveguide grating wavelength division multiplexer assisted by micro-ring reflective optical waveguide |
| CN110542950A (en) * | 2019-07-18 | 2019-12-06 | 北京大学 | Mode demultiplexer based on degenerate mode group of spatial three-dimensional waveguide |
| CN110542950B (en) * | 2019-07-18 | 2023-11-07 | 北京大学 | Mode demultiplexer of degenerated mode group based on space three-dimensional waveguide |
| CN113568094A (en) * | 2021-08-09 | 2021-10-29 | 华中科技大学 | Optical signal processing chip based on array waveguide grating |
| CN113904726A (en) * | 2021-11-15 | 2022-01-07 | 东南大学 | Large time delay difference dispersion waveguide structure |
| CN117334761A (en) * | 2023-11-27 | 2024-01-02 | 之江实验室 | Reflection-type germanium-silicon avalanche photodetector |
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