CN105824075A - Folded reflection-type arrayed waveguide grating wavelength division multiplexer assisted by micro-ring reflective optical waveguide - Google Patents
Folded reflection-type arrayed waveguide grating wavelength division multiplexer assisted by micro-ring reflective optical waveguide Download PDFInfo
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- 239000000835 fiber Substances 0.000 claims description 59
- 238000004891 communication Methods 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
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- 238000013461 design Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000008832 photodamage Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29344—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by modal interference or beating, i.e. of transverse modes, e.g. zero-gap directional coupler, MMI
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
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Abstract
The invention relates to a folded reflection-type arrayed waveguide grating wavelength division multiplexer assisted by micro-ring reflective optical waveguide, and belongs to the technical field of semiconductor waveguide communication devices. The arrayed waveguide grating wavelength division multiplexer includes an input optical waveguide, output optical waveguides, a Rowland circle, array optical waveguides, and micro-ring optical waveguides. Each array optical waveguide includes a hammer-shaped waveguide and a bar-shaped waveguide. Each micro-ring optical waveguide includes a 1X2 optical waveguide beam splitter/combiner and a curved optical waveguide. The input optical waveguide and the output optical waveguides are positioned on the same side of the Rowland circle and are connected to an input end of the Rowland circle. An output end of the Rowland circle is separately connected to the hammer-shaped waveguides of the array optical waveguides which are equally spaced. Each hammer-shaped waveguide output end is connected to one bar-shaped waveguide. And each bar-shaped waveguide is connected to one 1X2 optical waveguide beam splitter/combiner of one micro-ring optical waveguide. The two output ends of each 1X2 optical waveguide beam splitter/combiner are respectively connected to the two ends of each curved optical waveguide so as to form an enclosed annular structure. According to the invention, the multiplexer has a half dimension as compared to traditional multiplexers, and has excellent performances.
Description
Technical field
The present invention relates to a kind of micro-loop reflecting light and lead the folding mirror formula arrayed waveguide grating multiplexer of auxiliary, belong to semiconductor waveguide communication device technical field.
Background technology
Optical-fiber network has been obtained for being widely applied, but in current optical-fiber network, each ingredient is all different material system so that in current network system, each device is difficult to integrated, and its cost remains high, bulky, it is difficult to safeguard.In view of current optical-fiber network situation, the size of cost and device in order to reduce device, silicon based photon device has obtained significantly developing.Owing to Refractive Index of Material is relatively big, silicon Photonic Communications devices based on silicon materials have finer and close structure；And the technique of silicon Photonic Communications device is completely compatible with existing CMOS technology, silicon Photonic Communications device can be realized integrated with on the sheet of integrated circuit on silica-based, the most effectively reduce the cost of device, and the size of device can be reduced and improve the reliability of device.Silicon layer thickness is required different by the silicon photonic device of difference in functionality, and silicon photonic modulator based on pn-junction structure requires the quickly transmission of relatively thin silicon layer thickness, beneficially carrier and can improve the modulating speed of device.And for silicon photon array waveguide optical grating, it is more strict to the requirement of technique, under existing process conditions, then requires thicker silicon layer, be conducive to obtaining more preferable device performance.When silicon layer is thicker, the light damage that the curved waveguide of identical complete radius is corresponding will increase.In order to reduce the loss of curved waveguide, the bending radius increasing waveguide will be inevitable.Silicon photon array moire is made up of numerous curved waveguides, and the increase along with curved waveguide structure is increased by its device size.Comparing other silicon photonic device, silicon photon array waveguide optical grating size is relatively big, occupies bigger layout size when domain makes, is unfavorable for the design of integrated device.
The folding mirror formula array waveguide grating of report has two kinds of forms at present, and one is that Waveguide end face directly reflects, and the another end face planting Waveguide array uses etching Bragg waveguide optical grating reflection.But both structures have clearly disadvantageous, affect the performance that device is last.
It is direct deep etching Waveguide array in Waveguide array based on the direct reflection type array wave-guide grating of Waveguide end face, covers metal level at end face and add the reflection of high light.This folding mirror formula array waveguide grating the most reflective based on Waveguide end face has following deficiency, effectively causes the light loss of device.One is, cannot obtain being exactly perpendicularly to the cross section of waveguide by etching in actual processes, and namely reflecting surface is the most vertical with waveguide, causes light can not completely return among Waveguide array when reflection, produces light loss；Two are, be irregular by the cross section of etching, can produce diffuse-reflectance during luminous reflectance on microcosmic, produce the loss of light further；Three are, the imaginary part of metal material refractive index is not zero, say, that light can be partially absorbed by metal material, produce extra light loss.
It is to carry out the reflection of light by being etched in the tail end of each Waveguide array formation Bragg waveguide optical grating based on the reflection type array wave-guide grating that Bragg waveguide optical grating is reflective.This structure has following deficiency, has a strong impact on the uniformity of the responsive bandwidth of device, optical crosstalk and light loss in practical devices.One is, the spectral bandwidth of Bragg waveguide optical grating is the narrowest, general only several nanometers, limits the bandwidth of array waveguide grating, and generic array waveguide optical grating spectral bandwidth is general all in tens to tens nanometers from principle；Two are, Bragg waveguide optical grating screen periods at communication wavelengths little (if the minimum dimension of silica-based Bragg waveguide optical grating is at below 300nm), high to technological requirement, technique being difficult to ensure that, the spectral wavelength of the Bragg waveguide optical grating of each array waveguide grating tail end is identical, thus compress the spectral bandwidth of device further, and easily increase the crosstalk performance of device and the inhomogeneities of light loss.
The reflection type array wave-guide grating based on micro-loop fiber waveguide that the present invention proposes can effectively overcome defect produced by both the above structure, it is possible to obtains the folding mirror formula array waveguide grating of function admirable.Can use the suitable bending optical waveguide structure of radius in this structure, its light loss is the most small.As a example by silica-based fiber waveguide, cross section is that 200nm(is high) × 500nm(width) bent lightguide, when its radius circulates the light loss of a week less than 0.01dB more than 2 microns of time, and this loss can be ignored completely.Meanwhile, bent lightguide is insensitive to wavelength, and the light loss wherein of any wavelength in communication wavelengths can be ignored completely.1 × 2 fiber waveguide beam splitter/combiner in the present invention, either MMI structure or Y structure, its 1-dB light bandwidth is both greater than 100nm, and its bandwidth fully meets the design requirement of array waveguide grating, and the light loss of both structures is the most minimum simultaneously.Meanwhile, the design size of micro-loop fiber waveguide is relatively big, relatively low to technological requirement, it is possible to easily to realize the concordance of each micro-loop fiber waveguide in structure.Therefore, the micro-loop reflecting light proposed in the present invention leads the feature with low optical loss and wide bandwidth.Reflection type array wave-guide grating wavelength division multiplexer based on micro-loop fiber waveguide, it is possible to make the size of generic array waveguide optical grating halve, and there are excellent performance indications.
Summary of the invention
The problem existed for above-mentioned prior art and deficiency, the present invention provides the folding mirror formula arrayed waveguide grating multiplexer that a kind of micro-loop reflecting light leads auxiliary.This micro-loop reflecting light is led the folding mirror formula arrayed waveguide grating multiplexer of auxiliary and is had low optical loss, low-loss uniformity, low crosstalk and the advantage of wide bandwidth, and the present invention is achieved through the following technical solutions.
nullA kind of micro-loop reflecting light leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary，Including input waveguide 1、Output optical waveguide、Rowland circle 6、Array optical waveguide and micro-loop fiber waveguide，Array optical waveguide includes capitate waveguide 7 and slab waveguide 8，Micro-loop fiber waveguide includes 1 × 2 fiber waveguide beam splitter/combiner 9 and bent lightguide 10，Input waveguide 1、Output optical waveguide is positioned at Rowland circle 6 homonymy and is connected with Rowland circle 6 input，The outfan of Rowland circle 6 connects the capitate waveguide 7 in equally spaced array light wave respectively，Each capitate waveguide 7 outfan connects slab waveguide 8，Each slab waveguide 8 connects 1 × 2 fiber waveguide beam splitter/combiner 9 in a micro-loop fiber waveguide，1 × 2 fiber waveguide beam splitter/combiner 9 liang outfan two ends with bent lightguide 10 respectively are connected，Form a loop configuration closed.
The described micro-loop fiber waveguide composition array micro-loop fiber waveguide that some sizes, shape are identical.
The cross section of two outfan fiber waveguides of described 1 × 2 fiber waveguide beam splitter/combiner 9 is identical with bent lightguide 10 cross section of corresponding connection, and cross section is rectangle, trapezoidal, circular, ridged shape.
Described 1 × 2 fiber waveguide beam splitter/combiner 9 structure is MMI-type structure or Y-Shaped structure or DC directional coupler structure.
Described output optical waveguide number is more than 1, is equidistantly distributed in Rowland circle 6 input.
Described array slab waveguide 8 is made up of straight wave guide and curved waveguide, and length difference Δ L is identical for adjacent array slab waveguide 8.Adjacent array slab waveguide 8 length difference Δ L is the half of the adjacent array waveguide length differences of generic array waveguide grating multiplexer.
Using SOI wafer, device architecture based on the present invention and CMOS processing technology, the micro-loop reflecting light that can prepare present invention proposition leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary.Main integrated process flow is as follows:
Step one: first pass through photoetching process, forms the pattern of device of the present invention on the soi wafer.
Step 2: by etching technics, the top layer silicon of SOI wafer is carried out selective etch, forms waveguiding structure.
Step 3: go residual light photoresist and be carried out, obtains clean waveguiding structure.
Step 4: deposition SiO2Top covering, completes the making of device.
The invention has the beneficial effects as follows: can effectively make up existing based on the direct reflective folded array waveguide grating multiplexer of Waveguide end face with high light loss based on Blagg optical grating reflection formula folded array waveguide grating multiplexer, high crosstalk, the defect of narrow bandwidth (the passage light loss uniformity corresponding to high).The design structure of the present invention can reduce technological requirement, it is readily available conforming device architecture, micro-loop reflecting light is led and is had extremely low light damage and to optical wavelength insensitivity simultaneously so that have low light loss crosstalk bad, low, wide bandwidth advantage (the passage light loss uniformity corresponding to low) based on micro-loop fiber waveguide reflection folded array waveguide grating multiplexer.
Accompanying drawing explanation
Fig. 1 is present configuration schematic diagram；
Fig. 2 is fiber waveguide beam splitter/combiner of the present invention and micro-loop reflecting light leads scanning electron microscope (SEM) photograph；
Fig. 3 is test spectral figure of the present invention.
In figure: 1-input waveguide, 2-output optical waveguide I, 3-output optical waveguide II, 4-output optical waveguide III, 5-output optical waveguide IV, 6-Rowland circle, 7-capitate waveguide, 8-slab waveguide, 9-1 × 2 fiber waveguide beam splitter/combiner, 10-bent lightguide.
Detailed description of the invention
Below in conjunction with the accompanying drawings and detailed description of the invention, the invention will be further described.
Embodiment 1
nullAs shown in Figures 1 to 3，This micro-loop reflecting light leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary，Including input waveguide 1、Output optical waveguide、Rowland circle 6、Array optical waveguide and micro-loop fiber waveguide，Array optical waveguide includes capitate waveguide 7 and slab waveguide 8，Micro-loop fiber waveguide includes 1 × 2 fiber waveguide beam splitter/combiner 9 and bent lightguide 10，Input waveguide 1、Output optical waveguide is positioned at Rowland circle 6 homonymy and is connected with Rowland circle 6 input，The outfan of Rowland circle 6 connects the capitate waveguide 7 in equally spaced array light wave respectively，Each capitate waveguide 7 outfan connects slab waveguide 8，Each slab waveguide 8 connects 1 × 2 fiber waveguide beam splitter/combiner 9 in a micro-loop fiber waveguide，1 × 2 fiber waveguide beam splitter/combiner 9 liang outfan two ends with bent lightguide 10 respectively are connected，Form a loop configuration closed.
The present invention prepares silicon-based micro ring reflecting light and leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary.This multiplexer uses the top layer silicon SOI wafer of 220nm, and oxygen buried layer thickness is 2 μm.Waveguide array 8 is 220nm × 400nm for sectional dimension, and Rowland circle 6 radius is 92.88 μm, and Waveguide array 6 length difference Δ L is 24.39nm, micro-loop curved waveguide 10 least radius is 3 μm, Waveguide array 8 minimum spacing is 2.5 μm, and Waveguide array 8 number is 32, and output waveguide number is 4.The spectrogram that test obtains is as shown in Figure 3, as can be seen from the results: the folding mirror formula arrayed waveguide grating multiplexer that the present invention proposes has good partial wave performance, insertion loss is 3.5dB, Channel depletion inhomogeneities is 1.35dB, channel spacing is about 6.4nm, and adjacency channel optical crosstalk is 20dB.
Embodiment 2
nullAs shown in Figures 1 to 3，This micro-loop reflecting light leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary，Including input waveguide 1、Output optical waveguide、Rowland circle 6、Array optical waveguide and micro-loop fiber waveguide，Array optical waveguide includes capitate waveguide 7 and slab waveguide 8，Micro-loop fiber waveguide includes 1 × 2 fiber waveguide beam splitter/combiner 9 and bent lightguide 10，Input waveguide 1、Output optical waveguide is positioned at Rowland circle 6 homonymy and is connected with Rowland circle 6 input，The outfan of Rowland circle 6 connects the capitate waveguide 7 in equally spaced array light wave respectively，Each capitate waveguide 7 outfan connects slab waveguide 8，Each slab waveguide 8 connects 1 × 2 fiber waveguide beam splitter/combiner 9 in a micro-loop fiber waveguide，1 × 2 fiber waveguide beam splitter/combiner 9 liang outfan two ends with bent lightguide 10 respectively are connected，Form a loop configuration closed.
The described micro-loop fiber waveguide composition array micro-loop fiber waveguide that the most some sizes, shape are identical；The cross section of two outfan fiber waveguides of described 1 × 2 fiber waveguide beam splitter/combiner 9 is identical with bent lightguide 10 cross section of corresponding connection, and cross section is ridged shape；1 × 2 fiber waveguide beam splitter/combiner 9 structure is MMI-type structure；Output optical waveguide number is more than 1, is equidistantly distributed in Rowland circle 6 input；Array slab waveguide 8 is made up of straight wave guide and curved waveguide, and length difference Δ L is identical for adjacent array slab waveguide 8.Multiplexer uses the top layer silicon SOI wafer of 300nm, and oxygen buried layer thickness is 3 μm.Ridged Waveguide array width is 300nm, a height of 120nm of ectoloph, and Rowland circle 6 radius is 125.54 μm, Waveguide array 8 length difference Δ L is 32.56nm, micro-loop curved waveguide 10 least radius is 5 μm, and Waveguide array 8 minimum spacing is 3 μm, and Waveguide array 8 number is 45, output waveguide number is 8, output waveguide spacing is 3 μm, a length of 3.2 μm of MMI, and MMI width is 2.0 μm, MMI output waveguide is spaced apart 1.0 μm, and design channel spacing is 3.2nm.
Embodiment 3
nullThis micro-loop reflecting light leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary，Including input waveguide 1、Output optical waveguide、Rowland circle 6、Array optical waveguide and micro-loop fiber waveguide，Array optical waveguide includes capitate waveguide 7 and slab waveguide 8，Micro-loop fiber waveguide includes 1 × 2 fiber waveguide beam splitter/combiner 9 and bent lightguide 10，Input waveguide 1、Output optical waveguide is positioned at Rowland circle 6 homonymy and is connected with Rowland circle 6 input，The outfan of Rowland circle 6 connects the capitate waveguide 7 in equally spaced array light wave respectively，Each capitate waveguide 7 outfan connects slab waveguide 8，Each slab waveguide 8 connects 1 × 2 fiber waveguide beam splitter/combiner 9 in a micro-loop fiber waveguide，1 × 2 fiber waveguide beam splitter/combiner 9 liang outfan two ends with bent lightguide 10 respectively are connected，Form a loop configuration closed.
The described micro-loop fiber waveguide composition array micro-loop fiber waveguide that the most some sizes, shape are identical；The cross section of two outfan fiber waveguides of described 1 × 2 fiber waveguide beam splitter/combiner 9 is identical with bent lightguide 10 cross section of corresponding connection, and cross section is trapezoidal shape；1 × 2 fiber waveguide beam splitter/combiner 9 structure is Y-Shaped structure (or DC directional coupler structure)；Multiplexer uses the top layer silicon SOI wafer of 350nm, and oxygen buried layer thickness is 3 μm.The upper and lower width of trapezoidal Waveguide array is respectively 400nm, 450nm, duct height is 350nm, Rowland circle 6 radius is 163.31 μm, micro-loop curved waveguide 10 least radius is 6 μm, Waveguide array 8 minimum spacing is 3.5 μm, output waveguide spacing is 3.5 μm, the least radius of Y-Shaped structure beam splitter/combiner 9 is a length of 15 μm (or a length of 10.4 μm of DC directional coupler 9 of 6 μm/Y-Shaped structure beam splitter/combiner 9,9 liang of waveguide minimum spacings of DC directional coupler are 300nm), output waveguide number is 6, is equidistantly distributed in Rowland circle 6 input；Array slab waveguide 8 is made up of straight wave guide and curved waveguide, and Waveguide array 8 number is 62, and length difference Δ L is identical for adjacent array slab waveguide 8, and Δ L-value is 67.98nm, and design channel spacing is 1.6nm.
Above in association with accompanying drawing, the detailed description of the invention of the present invention is explained in detail, but the present invention is not limited to above-mentioned embodiment.In the ken that those of ordinary skill in the art are possessed, it is also possible on the premise of without departing from present inventive concept, various changes can be made.
Claims (6)
- null1. a micro-loop reflecting light leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary，It is characterized in that: include input waveguide (1)、Output optical waveguide、Rowland circle (6)、Array optical waveguide and micro-loop fiber waveguide，Array optical waveguide includes capitate waveguide (7) and slab waveguide (8)，Micro-loop fiber waveguide includes 1 × 2 fiber waveguide beam splitter/combiner (9) and bent lightguide (10)，Input waveguide (1)、Output optical waveguide is positioned at Rowland circle (6) homonymy and is connected with Rowland circle (6) input，The outfan of Rowland circle (6) connects the capitate waveguide (7) in equally spaced array light wave respectively，Each capitate waveguide (7) outfan connects slab waveguide (8)，Each slab waveguide (8) connects 1 × 2 fiber waveguide beam splitter/combiner (9) in a micro-loop fiber waveguide，1 × 2 fiber waveguide beam splitter/combiner (9) two outfan two ends with bent lightguide (10) respectively are connected，Form a loop configuration closed.
- Micro-loop reflecting light the most according to claim 1 leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary, it is characterised in that: the described micro-loop fiber waveguide composition array micro-loop fiber waveguide that some sizes, shape are identical.
- Micro-loop reflecting light the most according to claim 2 leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary, it is characterised in that: the cross section of two outfan fiber waveguides of described 1 × 2 fiber waveguide beam splitter/combiner (9) is identical with bent lightguide (10) cross section of corresponding connection.
- Micro-loop reflecting light the most according to claim 2 leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary, it is characterised in that: described 1 × 2 fiber waveguide beam splitter/combiner (9) structure is MMI-type structure or Y-Shaped structure or DC directional coupler structure.
- Micro-loop reflecting light the most according to claim 1 leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary, it is characterised in that: described output optical waveguide number is more than 1, is equidistantly distributed in Rowland circle (6) input.
- Micro-loop reflecting light the most according to claim 1 leads the folding mirror formula arrayed waveguide grating multiplexer of auxiliary, it is characterized in that: described array slab waveguide (8) is made up of straight wave guide and curved waveguide, Δ L is identical for adjacent array slab waveguide (8) length difference.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107329208A (en) * | 2017-07-10 | 2017-11-07 | 昆明理工大学 | A kind of silicon photon spot-size converter of refractive index gradient change |
| CN113568094A (en) * | 2021-08-09 | 2021-10-29 | 华中科技大学 | Optical signal processing chip based on array waveguide grating |
| CN113589429A (en) * | 2021-07-26 | 2021-11-02 | 北京邮电大学 | Array waveguide grating based on auxiliary waveguide |
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| CN113589429B (en) * | 2021-07-26 | 2022-07-01 | 北京邮电大学 | Array waveguide grating based on auxiliary waveguide |
| CN113568094A (en) * | 2021-08-09 | 2021-10-29 | 华中科技大学 | Optical signal processing chip based on array waveguide grating |
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