CN102769408A - Reciprocating linear micromotor based on electrothermal driving and gear transmission - Google Patents
Reciprocating linear micromotor based on electrothermal driving and gear transmission Download PDFInfo
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- CN102769408A CN102769408A CN2012102416012A CN201210241601A CN102769408A CN 102769408 A CN102769408 A CN 102769408A CN 2012102416012 A CN2012102416012 A CN 2012102416012A CN 201210241601 A CN201210241601 A CN 201210241601A CN 102769408 A CN102769408 A CN 102769408A
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Abstract
The invention relates to a reciprocating linear micromotor based on electrothermal driving and gear transmission. The reciprocating linear micromotor comprises two drive devices on the left side and the right side, and a transmission device, wherein the drive devices control the engagement state and push a gear by use of a V-shaped electrothermal actuator array; the transmission device includes two pairs of gears; and the gears float on a Poly0 and serve as movable component to amplify the output displacement. An output device including a rack and a chute can be connected with a micro-operation platform, and has the function of large-displacement reciprocating movement. A testing device is used for testing the static characteristics of output force, output displacement and so on by using a micro-spring and a scale. Accordingly, the reciprocating linear micromotor designed by the invention is easy in control, has the advantages of compatibility to the integrated circuit manufacture process, large output displacement, high practicality, high output efficiency, and so on, and can be used for testing the static characteristics.
Description
Technical field
The present invention relates to MEMS field motor, particularly a kind of based on electrothermal drive and gear-driven toward the complex line micro motor, this device utilizes electrothermal drive and gear drive, realizes the straight reciprocating motion of big displacement.
Background technology
Along with the fast development of MEMS technology and the expansion of MEMS application, the research and the increasing demand of MEMS motor with practicality increased.In macroscopical mechanical movement, linear reciprocating motion and rotatablely move between conversion comparatively common, just can realize changing through cam, crank connecting link, gear etc.In the MEMS field, the conversion of linear reciprocating motion and turn campaign is than macroface ratio, difficult realization.The basic principle of transmission agency is the same though this is, the MEMS size is small, and its surface force is occupied an leading position, and adheres to each other easily between the device, occurs adhesive wear between the moving component, the restriction of processing technology.1988; The researcher of Univ California-Berkeley adopt surface treatment made diameter be 120
the electrostatic micro motor; Directly utilize electrostatic force to drive rotor; Though Miniaturizable, with the MEMS process compatible, output torque is little; Rotating speed is high, can't directly use.Calendar year 2001, Jae-Sung proposes to utilize V-type electric heating silicon micro-actuator unit on silicon, to make the thinking of thermal actuation micro motor mechanism, but has only realized rotatablely moving and do not have output function, does not have practicality.
The present invention combine the electric heating actuator have carry-out bit move big with power, operating voltage is little,, favourable characteristics such as motion controlled compatible with IC, utilizes V-type electric heating array of actuators, gear-driven rotatablely moving realized the linear reciprocating motion of tooth bar chute.
Summary of the invention
The objective of the invention is to provides a kind of based on electrothermal drive and gear-driven toward the complex line micro motor to the defective that prior art exists; This micro motor utilizes electrothermal drive and gear drive; Realize the straight reciprocating motion of big displacement; That this micro motor has is compatible mutually with integrated circuit fabrication process, the output displacement is big, practical, but is easy to advantages such as control, the high tested static characteristic of delivery efficiency.
For achieving the above object, design of the present invention is: both sides electric heating array of actuators is worked simultaneously, promotes gear drive, and gear wheel promotes the reciprocating motion of tooth bar chute, realizes this linear reciprocating motion toward the complex line micro motor; Bow font spring is used to test the tooth bar chute and makes progress and downward power output; Scale is used to test the electric heating array of actuators, and both sides engagement controller and tooth bar chute make progress and downward output displacement.Therefore the advantage of this design is: compatible mutually with integrated circuit fabrication process, the output displacement is big, practical, but be easy to control, delivery efficiency high tested static characteristic.
Of the present invention based on electrothermal drive and gear-driven toward the complex line micro motor; Comprise left side and two drive units in right side; Transmission device, output device and testing apparatus; Motor is made with the MEMS surface treatment, need not assembling, and push rod tooth and pinion are gapped during initial position does not mesh; Positive and negative electrode to the engagement controller applies suitable voltage simultaneously, and both sides engagement controller promotes push rod tooth and pinion; Positive and negative electrode to the electric heating array of actuators applies suitable voltage simultaneously, and the electric heating array of actuators promotes respectively to move on the push rod teeth directional.The push rod tooth promotes pinion, and pinion drives gear wheel, and gear wheel promotes the tooth bar chute and moves upward, and realizes this upwards rectilinear motion toward the complex line micro motor; Positive and negative electrode to the electric heating array of actuators applies suitable voltage simultaneously, and the electric heating array of actuators promotes respectively to move on the push rod teeth directional.Positive and negative electrode to the engagement controller applies suitable voltage simultaneously, and the engagement controller promotes push rod tooth and pinion.Discharge the voltage of the positive and negative electrode of electric heating array of actuators, both sides electric heating array of actuators drives motion under the push rod teeth directional because of heat dissipation.The push rod tooth promotes pinion, and pinion drives gear wheel, and gear wheel promotes the tooth bar chute and moves downward, and realizes this downward rectilinear motion toward the complex line micro motor.
Said testing apparatus comprises two springs and six scales, and two springs are respectively applied for test tooth bar chute and make progress and downward power output; Six scales are used to test the electric heating array of actuators, and both sides engagement controller and tooth bar chute make progress and downward output displacement.
Said drive unit can be an electric heating V-type beam actuator, also can be the straight-line electric heating actuator of other suitable generation.Can be single actuator, also can be the actuator of a plurality of quantity arrays.
Said transmission device can be the two-stage gear drive, also can be single gear drive or multi-stage gear transmission.
According to the foregoing invention design, the present invention adopts following technical proposals:
A kind of based on electrothermal drive and gear-driven toward the complex line micro motor; Comprise left side and two drive units in right side and a transmission device; It is characterized in that: said right driving device is that the middle part of two levels electric heating array of actuators that is formed side by side by six V-type electric heating silicon micro-actuators arranged side by side links to each other with a push rod tooth, and two ends respectively connect a negative electrode and a positive electrode respectively; Two ends with the engagement controller that is formed side by side by three V-type electric heating silicon micro-actuators of the perpendicular direction setting of electric heating array of actuators are connected a positive electrode and a negative electrode respectively, and the middle part connects said push rod tooth; Said left side drive unit is identical with the right driving device structure and be symmetrical set: comprise two electric heating array of actuators that formed side by side by six V-type electric heating silicon micro-actuators; An engagement controller; Two electric heating array of actuators are connected a negative electrode jointly with an end of two electric heating array of actuators; The other end of two electric heating actuators respectively connects a positive electrode respectively; The two ends of engagement controller respectively connect a positive electrode and a negative electrode respectively, and two electric heating array of actuators are connected a push rod tooth with the middle part of meshing controller; Said transmission device is: position central vertical direction is provided with a fixing guide block; A tooth bar chute and this guide block cunning are joined; Two left and right sides gear wheels place left and right sides and the tooth bar engagement of tooth bar chute respectively; Two left and right sides pinions are respectively at the engagement of left and right sides gear wheel, and pinion present position, two left and right sides can be carried out controlled engagement and separate respectively with between push rod tooth and the push rod tooth; Said two gear wheels and two pinion difference movable sets are on fixing Large Gear Shaft During and pinion shaft.
Also include a testing agency in this motor; This testing agency is: two springs are installed in respectively by two shared negative electrodes; Be used to measure the tooth bar chute downward power output that makes progress; Six be separately positioned on by the tooth bar chute upper and lower side, about two other and two scales that the engagement controller is other in electric heating array of actuators middle part, the middle part displacement that is used to measure two electric heating array of actuators and two engagement controllers.
Two drive units in said left side and right side and transmission device are prepared on the nitration case of silicon substrate; Fixed structure layer Poly0 arranged on this nitration case; Structure sheaf Poly2 fixing on Poly0 constitutes Large Gear Shaft During and pinion shaft and guide block, and Poly0 is last to have bascule layer Poly1 to constitute gear wheel and pinion and tooth bar chute.
The present invention has following conspicuous outstanding substantive distinguishing features and marked improvement compared with prior art:
(1) adopt electric heating to activate mode, compatible mutually with integrated circuit fabrication process.
(2), realize need not other structure toward swivel motion through the discharge of electric heating actuator.
(3) the output displacement is amplified in gear drive.
(4) practical, be easy to control, delivery efficiency height.
Description of drawings
Fig. 1 is the sketch map of right side actuating device among the present invention.Fig. 2 is an overall construction drawing of the present invention.Fig. 3 is the test structure sketch map of test output device.Fig. 4 is the profile of the two pairs of gears and chute among the present invention.
Embodiment
The preferred embodiments of the present invention combine detailed description of the drawings following:
Embodiment one: referring to Fig. 1 and Fig. 2, this comprises left side and two drive units in right side and a transmission device based on electrothermal drive and gear-driven toward the complex line micro motor, it is characterized in that:
1) said right driving device is two levels electric heating array of actuators a (1a that is formed side by side by six V-type electric heating silicon micro-actuators arranged side by side; Middle part 1b) links to each other with a push rod tooth a (3a); And two ends respectively connect respectively a negative electrode (5a, 5b) with positive electrode (4a, 4b); Two ends with the engagement controller a (2a) that is formed side by side by three V-type electric heating silicon micro-actuators of the perpendicular direction setting of electric heating array of actuators are connected a positive electrode (6a) and a negative electrode (6b) respectively, and the middle part connects said push rod tooth a (3a);
2) said left side drive unit is identical with the right driving device structure and be symmetrical set: comprise two electric heating array of actuators b that form side by side by six V-type electric heating silicon micro-actuators (1c, 1d), an engagement controller b (2b); Two electric heating array of actuators a (1a; 1b) with two electric heating array of actuators b (1c, end 1d) is common connect a negative electrode (5a, 5b); Two electric heating actuator b (1c; Other end 1d) respectively connect respectively a positive electrode (4c, 4d), the engagement controller b (2b) two ends respectively connect a positive electrode (6c) and a negative electrode (6d) respectively; (1c 1d) is connected a push rod tooth b (3b) with the middle part of meshing controller b (2b) to two electric heating array of actuators b;
3) said transmission device is: position central vertical direction is provided with a fixing guide block (12), and a tooth bar chute (11) is joined two left and right sides gear wheel (9a with this guide block (12) is sliding; 9b) place left and right sides and the tooth bar engagement of tooth bar chute (11) respectively; (7a is 7b) respectively at left and right sides gear wheel (9a, 9b) engagement for two left and right sides pinions; Two left and right sides pinions (7a, 7b) present position can be carried out controlled engagement and separate respectively with between push rod tooth a (3a) and the push rod tooth b (3b); Said two gear wheels (9a, 9b) with two pinions (7a, 7b) respectively movable set fixing Large Gear Shaft During (10b, 10a) and pinion shaft (8b, 8a) on.
Embodiment two:
Present embodiment and embodiment one are basic identical, and special feature is following: said based on electrothermal drive and gear-drivenly comprise a testing agency toward the complex line micro motor, this testing agency is: two springs (13) are installed in two shared negative electrode (5a respectively; 5b) other, be used to measure tooth bar chute (11) the downward power output that makes progress, six be separately positioned on by tooth bar chute (11) upper and lower side, about two electric heating array of actuators a, b (1a; 1b, 1c, 1d) other and two the engagement controller a in middle part, b (2a; 2b) the scale (14) on side; Be used to measure two electric heating array of actuators a, b (1a, 1b, 1c; 1d) with two engagement controller a, b (2a, middle part displacement 2b).Two drive units in said left side and right side and transmission device are prepared on the nitration case of silicon substrate, and fixed structure layer Poly0 arranged on this nitration case, and structure sheaf Poly2 fixing on Poly0 constitutes Large Gear Shaft During and pinion shaft (8b; 10b, 10a, 8a) and guide block (12); Poly0 is last to have bascule layer Poly1 to constitute gear wheel and pinion (9b; 9a, 7b, 7a) and tooth bar chute (11).
Embodiment three: referring to Fig. 1 and Fig. 2, this comprises left side and two drive units in right side based on electrothermal drive and gear-driven toward the complex line micro motor, transmission device, output device and testing apparatus.Said right driving device mainly comprise two electric heating array of actuators that form side by side by six V-type electric heating silicon micro-actuators (1a, 1b), an engagement controller (2a), a push rod tooth (3a); Three positive electrodes (4a, 4b is 6a) with three negative electrode (5a; 5b, 6b).Said left side drive unit mainly comprise two electric heating array of actuators that form side by side by six V-type electric heating silicon micro-actuators (1c, 1d), an engagement controller (2b), a push rod tooth (3b); Three positive electrodes (4c, 4d is 6c) with three negative electrode (5a; 5b, 6d).Two pairs of gears about said transmission device mainly comprises, promptly two pinions (7a, 7b), two pinion shafts (8a, 8b), two gear wheels (9a, 9b) with two Large Gear Shaft During (7a, 7b).Said output device comprises tooth bar chute (11), and guide block (12).(2a's both sides engagement controller 2b) is in series by three V-type electric heating silicon micro-actuators.
To left and right sides engagement controller (2a, positive and negative electrode 2b) (6a, 6b; 6c 6d) applies suitable voltage simultaneously, both sides engagement controller (2a; 2b) expanded by heating produces displacement or power on the top, and (3a is 3b) to intermediary movements to promote the push rod tooth respectively; Thereby make that (3a, 3b) (7a 7b) meshes the push rod tooth with pinion respectively.To left and right sides electric heating array of actuators (1a, 1b, 1c, positive and negative electrode 1d) (4a, 4b; 6a, 5a, 5b 6b) applies suitable voltage simultaneously, electric heating array of actuators (1a; 1b, 1c, 1d) expanded by heating produces displacement or power on the top, and (3a 3b) moves upward to promote the push rod tooth respectively.Push rod tooth (3a) thus move upward and promote pinion (7a) and rotate counterclockwise around pinion shaft (8a), simultaneously push rod tooth (3b) thus move upward and promote pinion (7b) and clockwise rotate around pinion shaft (8b).Pinion (7a) drives gear wheel (9a) and clockwise rotates around Large Gear Shaft During (10a), and pinion (7b) drives gear wheel (9b) and rotates counterclockwise around Large Gear Shaft During (10b).Left side gear wheel (9a) and right side gear wheel (9b) promote tooth bar chute (11) simultaneously and move upward guide block (12) longitudinal restraint tooth bar chute (11).Through above-mentioned steps, realize this upwards rectilinear motion toward the complex line micro motor.
Discharge all positive and negative electrodes (4a, 4b, 6a, 5a, 5b, 6b, 6c, voltage 6d).Two drive units of left and right sides are got back to initial displacement because of discharge.To left and right sides electric heating array of actuators (1a, 1b, 1c, positive and negative electrode 1d) (4a, 4b; 6a, 5a, 5b 6b) applies suitable voltage simultaneously, electric heating array of actuators (1a; 1b, 1c, 1d) expanded by heating produces displacement or power on the top, and (3a 3b) moves upward to promote the push rod tooth respectively.To left and right sides engagement controller (2a, positive and negative electrode 2b) (6a, 6b; 6c 6d) applies suitable voltage simultaneously, both sides engagement controller (2a; 2b) expanded by heating produces displacement or power on the top, and (3a is 3b) to intermediary movements to promote the push rod tooth respectively; Thereby make that (3a, 3b) (7a 7b) meshes the push rod tooth with pinion respectively.Release left and right sides electric heating array of actuators (1a, 1b, 1c, positive and negative electrode 1d) (4a, 4b, 6a, 5a, 5b, voltage 6b), both sides electric heating array of actuators (1a, 1b, 1c, 1d) (3a 3b) moves downward because of heat dissipation drives the push rod tooth.Push rod tooth (3a) thus move downward and promote pinion (7a) and clockwise rotate around pinion shaft (8a), simultaneously push rod tooth (3b) thus move downward and promote pinion (7b) and rotate counterclockwise around pinion shaft (8b).Pinion (7a) drives gear wheel (9a) and rotates counterclockwise around Large Gear Shaft During (10a), and pinion (7b) drives gear wheel (9b) and clockwise rotates around Large Gear Shaft During (10b).Left side gear wheel (9a) and right side gear wheel (9b) promote tooth bar chute (11) simultaneously and move downward.Through above-mentioned steps, realize this downward rectilinear motion toward the complex line micro motor.
Embodiment four: referring to Fig. 3, present embodiment and embodiment one are basic identical, on the basis of embodiment one, realize the function of tested static output characteristic: comprise two springs (13) and six scales (14).Two springs (13) are respectively applied for test tooth bar chute (11) and make progress and downward power output.Six scales (14) be used to test the electric heating array of actuators (1a, 1b, 1c, 1d), both sides engagements controller (2a, 2b) with tooth bar chute (11) upwards with downward output displacement.
In the accompanying drawing 4, (9a is 9b) with the sectional view of tooth bar chute (11) for 7a, 7b for gear.The present invention adopts the MEMS surface treatment to make, and need not assembling, and two pinions (7a, 7b), (9a is structure sheaf Poly1 with tooth bar chute (11) 9b) to two gear wheels, floats on Poly0, is movable piece; Two pinion shafts (8a, 8b), two Large Gear Shaft During (10a, 10b) and guide block (12) be structure sheaf Poly2, be fixed on the Poly0, be fixture, and Z direction constrain structure sheaf Poly1 layer upper member.
Basic principle:
Electric heating silicon micro-actuator is a kind of typical solid thermal expansion micro-actuator; Be characterized in the silicon micro mechanical mechanism that on base material, produces as driving element; And the silicon structure layer has certain resistance value, so but structure sheaf double as heater again itself, when through control input voltage or power; Owing to the structure expanded by heating produces the actuating effect, thus output displacement or power.
Claims (3)
1. one kind based on electrothermal drive and gear-driven toward the complex line micro motor, comprises left side and two drive units in right side and a transmission device, it is characterized in that:
1) said right driving device is two levels electric heating array of actuators a (1a that is formed side by side by six V-type electric heating silicon micro-actuators arranged side by side; Middle part 1b) links to each other with a push rod tooth a (3a); And two ends respectively connect respectively a negative electrode (5a, 5b) with positive electrode (4a, 4b); Two ends with the engagement controller a (2a) that is formed side by side by three V-type electric heating silicon micro-actuators of the perpendicular direction setting of electric heating array of actuators are connected a positive electrode (6a) and a negative electrode (6b) respectively, and the middle part connects said push rod tooth a (3a);
2) said left side drive unit is identical with the right driving device structure and be symmetrical set: comprise two electric heating array of actuators b that form side by side by six V-type electric heating silicon micro-actuators (1c, 1d), an engagement controller b (2b); Two electric heating array of actuators a (1a; 1b) with two electric heating array of actuators b (1c, end 1d) is common connect a negative electrode (5a, 5b); Two electric heating actuator b (1c; Other end 1d) respectively connect respectively a positive electrode (4c, 4d), the engagement controller b (2b) two ends respectively connect a positive electrode (6c) and a negative electrode (6d) respectively; (1c 1d) is connected a push rod tooth b (3b) with the middle part of meshing controller b (2b) to two electric heating array of actuators b;
3) said transmission device is: position central vertical direction is provided with a fixing guide block (12), and a tooth bar chute (11) is joined two left and right sides gear wheel (9a with this guide block (12) is sliding; 9b) place left and right sides and the tooth bar engagement of tooth bar chute (11) respectively; (7a is 7b) respectively at left and right sides gear wheel (9a, 9b) engagement for two left and right sides pinions; Two left and right sides pinions (7a, 7b) present position can be carried out controlled engagement and separate respectively with between push rod tooth a (3a) and the push rod tooth b (3b); Said two gear wheels (9a, 9b) with two pinions (7a, 7b) respectively movable set fixing Large Gear Shaft During (10b, 10a) and pinion shaft (8b, 8a) on.
2. according to claim 1ly it is characterized in that comprising a testing agency based on electrothermal drive and gear-driven toward the complex line micro motor, this testing agency is: two springs (13) are installed in two shared negative electrode (5a respectively; 5b) other, be used to measure tooth bar chute (11) the downward power output that makes progress, six be separately positioned on by tooth bar chute (11) upper and lower side, about two electric heating array of actuators a, b (1a; 1b, 1c, 1d) other and two the engagement controller a in middle part, b (2a; 2b) scale (14) on side is used to measure two electric heating array of actuators a, b (1a, 1b; 1c is 1d) with two engagement controller a, b (2a, middle part displacement 2b).
3. according to claim 1 based on electrothermal drive and gear-driven toward the complex line micro motor, it is characterized in that: two drive units in said left side and right side and transmission device are prepared on the nitration case of silicon substrate, and fixed structure layer Poly0 arranged on this nitration case; Structure sheaf Poly2 fixing on Poly0 constitutes Large Gear Shaft During and pinion shaft (8b; 10b, 10a, 8a) and guide block (12); Poly0 is last to have bascule layer Poly1 to constitute gear wheel and pinion (9b; 9a, 7b, 7a) and tooth bar chute (11).
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| CN201210241601.2A CN102769408B (en) | 2012-07-13 | 2012-07-13 | A kind of based on electrothermal drive and gear-driven reciprocating linear micro motor |
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| CN201210241601.2A CN102769408B (en) | 2012-07-13 | 2012-07-13 | A kind of based on electrothermal drive and gear-driven reciprocating linear micro motor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| CN104150432A (en) * | 2014-07-30 | 2014-11-19 | 西安交通大学 | Secondary buckling amplification based MEMS (micro-electromechanical system) actuator for detonator |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040245869A1 (en) * | 2003-06-03 | 2004-12-09 | Dooley Kevin Allan | Method, apparatus and system for controlling an electric machine |
| US7548145B2 (en) * | 2006-01-19 | 2009-06-16 | Innovative Micro Technology | Hysteretic MEMS thermal device and method of manufacture |
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2012
- 2012-07-13 CN CN201210241601.2A patent/CN102769408B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040245869A1 (en) * | 2003-06-03 | 2004-12-09 | Dooley Kevin Allan | Method, apparatus and system for controlling an electric machine |
| US7548145B2 (en) * | 2006-01-19 | 2009-06-16 | Innovative Micro Technology | Hysteretic MEMS thermal device and method of manufacture |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| CN103288041B (en) * | 2013-05-14 | 2015-11-25 | 西安交通大学 | One is detonated sequence V-structure MEMS actuator |
| CN104150432A (en) * | 2014-07-30 | 2014-11-19 | 西安交通大学 | Secondary buckling amplification based MEMS (micro-electromechanical system) actuator for detonator |
| CN104150432B (en) * | 2014-07-30 | 2016-04-13 | 西安交通大学 | A kind of fuse MEMS actuator of amplification of buckling based on secondary |
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