CN102759864B - For the control device preventing the pattern on pattern film from bending - Google Patents
For the control device preventing the pattern on pattern film from bending Download PDFInfo
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- CN102759864B CN102759864B CN201210122114.4A CN201210122114A CN102759864B CN 102759864 B CN102759864 B CN 102759864B CN 201210122114 A CN201210122114 A CN 201210122114A CN 102759864 B CN102759864 B CN 102759864B
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- 238000005452 bending Methods 0.000 title claims abstract description 91
- 238000002372 labelling Methods 0.000 claims abstract description 220
- 238000012937 correction Methods 0.000 claims abstract description 66
- 238000000059 patterning Methods 0.000 claims abstract description 42
- 238000012546 transfer Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 19
- 230000001186 cumulative effect Effects 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 230000001276 controlling effect Effects 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 4
- 239000003550 marker Substances 0.000 abstract description 5
- 238000009434 installation Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 210000002469 basement membrane Anatomy 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
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- 238000004804 winding Methods 0.000 description 1
Abstract
The present invention relates to a kind of control device for preventing the pattern on pattern film from bending, this control device is for including that film transmits equipment and the pattern film producing device of patterning device, this control device includes: indexing unit, this indexing unit forms labelling in the preset reference position of film, uses film to transmit equipment location preset reference position using as reference；Recognition unit, this recognition unit is positioned at the rear portion of this indexing unit, and the position of the labelling that identification is on film；Arithmetic element, the amount of the mathematic interpolation bending between this arithmetic element reference position based on labelling and identified position；Control unit, this control unit produces correction signal, and this correction signal corresponds to the amount of calculated bending and calibration marker unit and the position of patterning device；With correction unit, this correction unit receives correction signal and corrects the position of this indexing unit and this patterning device based on the correction signal received.
Description
Technical field
The present invention relates to a kind of control device for preventing pattern from bending, this device can be at the accurate location subscript of film
Note pattern.
Background technology
With the explosive demand to high definition three dimensional display, the demand of precise pattern blooming is consequently increased.Logical
Cross such as JP 2003-337, on template basement membrane, disclosed in 226, form patterns, can be with pattern-making film.But, in a lot of feelings
Under condition, it is contemplated that making etc., by forming pattern, pattern-making film on convoluted basement membrane while gradually unwinding film.
Owing to a variety of causes generation pattern bends.Such as, when film is not the most fitted when rolled, and the central axis of film is permissible
Skew.Even if film the most suitably winds, can bend when film is not properly balanced or external force is applied to film.
Do not consider this reason, owing to bending causes the defect on film quality when bending occurs, it is impossible on film, form essence
True pattern.Fig. 1 a illustrates when not considering bending, and patterning device forms pattern in constant position, and Fig. 1 b is shown in figure
The actual path of pattern on the film that 1a has been formed.
Additionally, particularly when manufacturing for the pattern film of three dimensional display, it is correct that coarse pattern may result in structure
The problem of 3-D view.
Marginal position controller (EPC) is commonly used to prevent the bending of pattern.But, because EPC only can be with grade control
, so there is restriction for forming micron-sized pattern in the position of pattern.
Meanwhile, bend for identification icon also by the distance compared between the pattern formed on film another
Method, but, the method the most just can detect bending.Accordingly, it would be desirable to for monitoring pattern bending in real time
New technique.
Summary of the invention
Technical problem
The present invention will provide the device of a kind of pattern that can control on film bending.
The present invention will provide one check pattern can bend and can correcting pattern before pattern is labeled on film
The control device of mark position.
The present invention controls device or the method for jointing edge positioner control pattern bending by providing a kind of only use.
Technological means
The present invention provides a kind of control device for preventing pattern from bending, and this control device is used for including that film transmits equipment
With the pattern film producing device of patterning device, this control device includes: indexing unit, and this indexing unit is in the predetermined ginseng of film
Examine formation labelling on position, use film to transmit equipment as reference location preset reference position；Recognition unit, this recognition unit position
In the rear portion of this indexing unit, and the position of the labelling that identification is on film；Arithmetic element, the reference based on labelling of this arithmetic element
The amount of the mathematic interpolation bending between position and identified position；Control unit, this control unit produces correction signal, this school
Positive signal is according to the amount calibration marker unit of the bending calculated and the position of patterning device；With correction unit, this correction
Unit receives correction signal and corrects the position of this indexing unit and this patterning device based on the correction signal received.
Present invention also offers a kind of use and control the method that device controls pattern bending.
Beneficial effect
According to the present invention it is possible to the easily bending of check pattern and measure deflection distance L and angle of bend θ.Based on this
Distance and this angle, the present invention can provide the correction signal of the position that can form equipment with correcting pattern so that pattern is formed
Equipment can form stable pattern.
Because can detect and bending with sizing, so the present invention can control the quality of film before forming pattern on film.
According to the present invention, because of according to the amount of bow that calculates obtain the position of patterning device and indexing unit, so
Accurate pattern film can be made.
According to the present invention, when applying precise laser generator and high resolution vision system, can measure with micron order and
Control the bending of film.
When making for the pattern film of the display of such as three dimensional display, the control device of the present invention can individually be made
With or jointing edge positioner control bending.
Accompanying drawing explanation
In the accompanying drawings:
Fig. 1 a and 1b illustrates the example being produced error by the bending of film；
Fig. 2 a to Fig. 2 d illustrates the reason of the position needing the curvature correction indexing unit according to film；
Fig. 3 illustrates in the present invention by the first labelling of the first labelling component mark with by the second labelling component mark
Second labelling；
Fig. 4 a, Fig. 4 b and Fig. 4 c illustrate when the direction of film is rotated at an angle from the direction of transfer of film, pass through
The arithmetic element of the present invention calculates deflection distance and the method for angle of bend；
Fig. 5 illustrates the direction of transfer of the film according to the present invention；
Fig. 6 illustrates the bending control device according to present example；
Fig. 7 illustrates deflection distance and angle of bend；
Fig. 8 a and 8b is shown through the rail of the labelling of the first labelling component by recognition unit identification and the second labelling component
Mark, and by the two-dimentional matrix in block form that flag data is divided into according to the coordinate identified block formed；
Fig. 9 illustrates for separating the first labelling and the method for the second labelling from noise.
Figure 10 a and 10b illustrates the deflection distance for calculating the arithmetic element according to the present invention and the side of angle of bend
Method；
Figure 11 illustrates for adjusting patterning device and the second labelling based on the deflection distance calculated and angle of bend
The result producing correction signal of the position of component；
Figure 12 illustrates the result of the experiment control bending according to the present invention；
Figure 13 illustrates for the example controlling bending according to the present invention；And
Figure 14 a and 14b illustrates the method for calculating deflection distance L.
Detailed description of the invention
The present invention relates to a kind of control device for preventing pattern from bending, this control device is used for including that film transmits equipment
With the producing device of the pattern film of patterning device, this control device includes: indexing unit, this indexing unit making a reservation at film
Form labelling on reference position, use film to transmit equipment as reference location preset reference position；Recognition unit, this recognition unit
It is positioned at the rear portion of this indexing unit, and on film, identifies the position of labelling；Arithmetic element, the reference based on labelling of this arithmetic element
The amount that position and the mathematic interpolation identified between position bend；Control unit, this control unit produces correction signal, and this correction is believed
Number for correction corresponding to the indexing unit of the amount of bending calculated and the position of patterning device；With correction unit, it is somebody's turn to do
Correction unit receives correction signal and corrects the position of this indexing unit and this patterning device based on the correction signal received
Put.
Described in detail hereinafter the present invention.
In the present invention, the bending of pattern includes various situation, wherein film transmit equipment centrage and on film arbitrarily
The track of point is not (seeing Fig. 7) parallel to each other.The amount of bending can use deflection distance L and angle of bend θ with arithmetic side
Formula shows.Such as, if the central axis of wound film is upper mobile a certain amount of laterally (being perpendicular to the direction of the direction of transfer of film)
Distance, deflection distance L is identical with the amount of the displacement of wound film, and angle of bend θ is 0 °.
As described below for controlling two ultimate principles of the bending of the pattern on film in the present invention.
(1) occur at indexing unit when bending (that is, the change of the direction of transfer of the movement of the central axis of film and/or film)
And time between recognition unit, by the amount of the movement of the central axis of film or the amount of the change of the direction of transfer of film, recognition unit
(that is, in the direction, central axis has moved or has changed biography to identify the bending direction that is marked at that marked by indexing unit
Send direction) on moved.
(2) when bending before forming labelling on film, by amount or the biography of film of the movement of the central axis of film
Sending the amount of the change in direction, labelling is formed on when watching from film that (that is, in the direction, central axis is with bending direction
Through mobile or change direction of transfer) on contrary direction.
Fig. 2 illustrates above-mentioned principle.Fig. 2 illustrates and includes having the first fixing labelling component and adjustable second labelling
The example of the indexing unit of component.
As shown in Figure 2 a, when not bending, recognition unit identifies by indexing unit at the normal bit of labelling
Put the labelling of formation.
As shown in Figure 2 b, when bending, the pattern on film gradually moves to side due to bending and identifies
Unit identification this move.But, because the position of indexing unit is not moved, so, due to the phase between indexing unit and film
To position, therefore the labelling formed by indexing unit gradually moves the opposite side to film.This can be moved by the amount according to bending
Move indexing unit and the position of patterning device and be corrected.
As illustrated in fig. 2 c, when bending by stable time, recognition unit identifies to be formed at calibration marker unit and pattern and sets
The labelling being marked before standby position moves to side and is subsequently moved to opposite side.On the other hand, labelling is being adjusted
Unit movement identified with the labelling marked after the position of patterning device is to the side consistent with the movement of film
And keep moved position.
Finally, as shown in fig. 2d, calibration marker unit and the position of patterning device are come without according to bending,
Then recognition unit identifies when the central axis of film still deviates original position, and labelling has returned to home position.Additionally, at this
In situation, because the border of pattern overlaps each other, it is impossible to accurately form pattern on film.
In order to solve the problems referred to above (deviation of the central axis of film can not be identified), according to the bending control device of the present invention
It is configured to the bending according to film and comes the position of movement indicia unit and patterning device.
Be described below the present invention for the control device preventing pattern from bending.
Control device and be used for the producing device of the pattern film including that film transmits equipment and patterning device.
The example of pattern film can be the pattern delayer for realizing 3-D view.Patterning device is for at film
The equipment of upper formation pattern.Such as, patterning device can be exposure sources, and this exposure sources includes light source and mask, or
Roller.The pattern axis of this mask or roller can be the unreeling direction being perpendicular to film.
When forming pattern on sheet shape film, the control device of the present invention can be used, but, when for convoluted
When continually forming pattern on film advantageously.
The device that controls of the present invention is included on film the indexing unit forming labelling.
Fixing film is used to transmit the position of equipment as with reference to the reference position determining indexing unit so that indexing unit can
Bending is not considered to form labelling on fixing point.
Indexing unit is not limited to any particular type, as long as can be formed on film can be single by identifying for this labelling component
Unit's detection or the labelling identified do not damage film simultaneously, and this film is used for the display apparatus of such as LCD etc..It is preferable, however, that make
With laser generator as the indexing unit for the most accurate measurement and control (when indexing unit includes the first labelling component
During with the second labelling component, the first labelling component and the second labelling component can be laser generator).
Indexing unit can be configurable to include one or more labelling component.
When indexing unit includes a labelling component, indexing unit can identify and calculate the bending of pattern, this pattern
Bending caused by the transverse shifting of the central axis of film, i.e. the movement of pattern in the direction be perpendicular to direction of transfer.At this
In situation, use following method can calculate deflection distance L, and angle of bend θ is 0 °.
When indexing unit includes two or more labelling components, each type of bending can be calculated.Hereafter will retouch
State two or more labelling components of use and calculate deflection distance L and the concrete grammar of angle of bend θ.
Two or more labelling components can include the first labelling component and the second labelling component, described second labelling structure
Part is located on the direction of transfer of film and the Vertical Square of the described first labelling component direction of transfer at the d1 with at described film
Upwards with described first labelling component at d2 (d2 can be 0).The labelling formed by above-mentioned labelling component shown in Fig. 3
The example of shape.
And, indexing unit could be included for regulating the first labelling component when forming labelling and the second labelling structure
The parts of the distance between part, and the first labelling component or the position of the second labelling component can be fixed in some cases.
When indexing unit includes two or more labelling components, each labelling component can be formed with difformity
Or the labelling of color so that each labelling easily can be distinguished mutually or distinguished with noise.
When not bending, labelling draws straight dotted line.When bending, labelling draws shown in such as Fig. 2 b
Line.The transfer rate of film or the angle and distance of bending can affect the shape of line.Line is known by the recognition unit being described below
Do not go out.
Control device according to the present invention includes the recognition unit being positioned at indexing unit rear portion.
Recognition unit is positioned at the rear portion of indexing unit (direction of transfer of film) and identifies when film is sent to cog region
The position of labelling time (that is, in this district, if recognition unit includes photomoduel, then camera module can catch image).
In the present invention, as shown in Figure 5, direction of transfer refers to be perpendicular to the direction of the central axis of wound film.When not having
When bending, direction of transfer is parallel to the longitudinal direction of film.
Recognition unit can include one or more cog region.According to the quantity of cog region, by the first labelling component and second
The labelling that labelling component is formed can be identified simultaneously or identified respectively.
Any labelling that can identify or detect on film and calculate the identification means of the position of labelling or coordinate can be by
Recognition unit as the present invention.Such as, recognition unit comprises the steps that photomoduel, and this photomoduel catches the labelling including film
Image；And computer installation, the image that the storage of this computer installation is caught and the calculating labelling from the image caught
Position.
When using the high-definition picture system of labelling that can identify the diameter with some tens of pm, can be more accurate
Ground measurement markers position change and more accurately control bend.For example, it is preferable to use, there is e.g., less than 10 microns micro-
The photomoduel of meter-sized resolution.
Recognition unit may also include the parts distinguishing noise with labelling.When indexing unit includes laser generator, this portion
Part is the most useful, this is because be possible to prevent impurity produced by laser or dust to be detected as labelling.
Additionally, in order to minimize the error brought due to the shape of labelling, preferably identify border and the identification of each labelling
The centre coordinate of labelling is as the position of labelling.
The control device of the present invention includes arithmetic element.
By based on known reference position determined by film transmission equipment as reference with by the mark of recognition unit identification
Comparison between the position of note, arithmetic element is configured to calculate the bending of pattern.
Figure 14 illustrates the method for calculating deflection distance L.
Figure 14 a illustrates indexing unit and includes the embodiment of a labelling component.In this case, along with the traveling of film
Sequentially form labelling 1,2,3 and 4.When the central axis of film moves to left side, the 5th labelling is from its reference position (broken circle)
Offset and be formed at the position being labeled as 5 in the accompanying drawings, and by the position of recognition unit identification the 5th labelling.In this situation
In, deflection distance L is the distance between reference position and the mark position identified.
Figure 14 b illustrates the embodiment of the indexing unit including the first labelling component and the second labelling component, and described
Two labelling components are located on the direction of transfer of film with described first labelling component at the d1 and in the described transmission of described film
In the vertical direction in direction with described first labelling component at d2.
In this case, labelling 1-1/2-1,1-2/2-2,1-3/2-3 and 1-4/2-4 are sequentially formed along with the traveling of film
(1-A represents the labelling formed by the first labelling component, and 2-B represents the labelling formed by the second labelling component, wherein A and B
It is the integer between 1 to 5).Such as, when when identifying that region is disposed in the vertical direction of direction of transfer of recognition unit, know
Other unit identifies labelling 1-1 and 2-3 simultaneously, then identifies 1-2 and 2-4.When the central axis of film is after 1-2 and 2-4 is formed
When moving to right side, the 5th labelling is with their reference position of distance L skew, and forms what 1-5 and 2-5 in the accompanying drawings represented
Position.
Arithmetic element is by calculating by distance x between 1-3 and 2-5 of recognition unit identification and deducting x from d2 and calculate
Deflection distance L (that is, the distance between the first labelling component in the vertical direction of direction of transfer and the second labelling component).As
Really d2-x is positive number, it means that film is displaced to right side from direction of transfer；And if d2-x is negative, then film is displaced to a left side
Side.
Fig. 4 illustrates the method for calculating angle of bend θ.
In order to calculate angle of bend θ, indexing unit needs have two or more labelling components.When indexing unit includes
First labelling component and the second labelling component, as shown in fig. 14b, described second labelling component be located on the direction of transfer of film with
Described first labelling component at the d1 and in the vertical direction of the described direction of transfer of described film with described first labelling structure
Part, at d2, uses the distance between reference position and the real marking position of indexing unit and d1 and d2 can calculate curved
Bent angle, θ.
Fig. 4 a is shown without the example of bending.In this case, marked by the first labelling component and the second labelling component
Labelling between identification distance identical with d2.Use formula 1 (d1 is given value) that angle of bend θ can be calculated.
[formula 1]
θ=atan [(d2-d2)/d1]=0 °
Fig. 4 b illustrates the example when bending in the left side of direction of transfer.The first labelling of first being marked (by
The labelling of the first labelling component mark) move to form the second labelling (by the second labelling component mark with the angle of bend θ in left side
Labelling) position.In this case, worked as by the distance between the labelling of the first labelling component and the formation of the second labelling component
When film moves ahead closer to.Recognition unit identification the first labelling and the second labelling, and formula 2 can be used to calculate angle of bend
θ.In formula 2, ▲ represent that the distance mechanically determined between the first labelling component and the second labelling component (or is not having
Distance between first labelling and the second labelling when having bending), and α due to bending cause ▲ changing value.α at Fig. 4 b and
Formula 2 represents (that is ,-α) by minus sign "-" because the distance between labelling than in Fig. 4 b ▲ due to bending closer to.
[formula 2]
θ=atan [(d2-d2-α)/d1]=atan [(-α)/d1]=-▲ °
Fig. 4 c illustrates the example when bending from the right side of direction of transfer.First the first labelling marked is (by
The labelling of one labelling component mark) move to form the second labelling (by the second labelling component mark with the angle of bend θ on right side
Labelling) position.In this case, the distance between the labelling formed by the first labelling component and the second labelling component along with
Becoming separately when moving ahead of film.Recognition unit identification the first labelling and the second labelling, and formula 3 can be used to calculate bending
Angle, θ.In equation 3, ▲ represent between the first labelling component and the second labelling component mechanically determine distance (or
The distance between the first labelling and the second labelling when not bending), and α be due to bending cause ▲ change value.α is at figure
In 4c and formula 3 with plus sige "+" represent (that is ,+α) because the distance between labelling than in Fig. 4 c ▲ become due to bending
Farther.
[formula 3]
θ=atan [(d2-d2+ α)/d1]=atan [(+α)/d1]=+ ▲ °
First labelling component and the second labelling component be preferably arranged in be perpendicular to patterning device pattern mask (or
Pattern roller) straight line on.
The angle of bend θ calculated forms the position of equipment for correcting pattern.Meanwhile, the first labelling component is (main
Labelling component) position in the vertical direction of direction of transfer, be conditioned α.
Computing unit may also include the structure of the periodically amount (that is, deflection distance L and/or angle of bend θ) of cumulative bending
Part.In this case, the control unit being described below only can be configured to when accumulation amount is more than predetermined threshold produce school
Positive signal.
The control device of the present invention includes control unit, and control unit produces at least to be formed for indexing unit and pattern and sets
Standby correction signal.Control unit produce by the position of calibration marker unit and patterning device and based on arithmetic element
The correction signal that the amount of bending of the calculating of the pattern calculated is corresponding.
When whenever bending is identified, control unit can produce amount (that is, the deflection distance of the bending corresponding to pattern
L and/or angle of bend θ) correction signal.Or, control unit can periodically produce corresponding to cumulative amount of bow (i.e.,
Cumulative deflection distance L and/or cumulative angle of bend θ) correction signal.Or, control unit can only be more than when accumulation amount
Correction signal is produced during predetermined threshold.
Such as, when cumulative deflection distance is more than 20 μm, control unit can produce correction signal.Or, such as, when tired
When the angle of bend θ added is more than 0.5 °, control unit can produce correction signal.
As necessary, control unit also can produce additional correction signal, needs regulation for the amount regulation according to bending
The position of miscellaneous part (cutting element etc. of such as recognition unit or film).
Control unit can produce and transmit the correction signal of the part for indexing unit.Such as, when indexing unit bag
When including the first labelling component and the second labelling component, control unit can produce for the first labelling component and/or the second labelling structure
The correction signal of part.Or, when the first labelling component is adjustable, when the second labelling component is fixed simultaneously, control single
Unit can produce the correction signal being only used for the first labelling component.
The control device of the present invention includes correcting unit, and this correction unit receives correction signal before forming pattern on film
With based on the correction signal correction received or aignment mark unit and the position of patterning device.
Correction signal can be for movement indicia unit at a certain distance and patterning device and/or with certain angle
Degree rotary label unit and the signal of patterning device.
Therefore, the position of correction or aignment mark unit and patterning device refers to that movement indicia unit and pattern are formed
Equipment certain distance and/or at a certain angle rotary label unit and patterning device.
As described above, but when bending returns to normal, the position of indexing unit and the position quilt of patterning device
Regulation so that the control device of the present invention can identify normal condition (state the most not bent).Therefore, according to the present invention,
The problem that can solve can not form consistent pattern because the part on the border of pattern is overlapping.
The present invention can be configured to correcting pattern before forming pattern and forms the position of equipment.
The control device of the present invention can include initialization unit, by this correction unit correct this patterning device and
After the position of this indexing unit, this initialization unit sets the correction position conduct of this patterning device and this indexing unit
New reference position.
The bending control method controlling to perform on device in the present invention can include such as, is respectively disposed at for use
The first labelling component in precalculated position and the second labelling member period ground form the first labelling and the step of the second labelling, are used for
Periodically identify the first labelling and the second labelling and the step of distance calculated between the first labelling and the second labelling, be used for making
Calculate with the distance between the first labelling and the second labelling and the reference distance between the first labelling and the second labelling and tire out
Add the step of deflection distance and angle of bend, be used for for producing when cumulative deflection distance or angle of bend are more than predetermined value
Correcting pattern forms the step of the correction signal of at least one in the position of equipment, the first labelling or the second labelling component, with
And, in the position receiving correction signal and correcting pattern formation equipment, the first labelling component or the second labelling component extremely
The step of few one.
The control method of the present invention includes for movement indicia unit at a certain distance and patterning device and/or with one
Determine angle rotary label unit and the step of patterning device.
The control method of present invention method the most as shown in fig. 13 that.
The control device of the present invention can be utilized separately for effectively controlling the bending of the pattern on film, however, it is more preferred to knot
Close and control device use marginal position controller (EPC).
Hereinafter, the invention provides example for convenience of understanding.But, the following embodiment provided is only used as this
The example of invention, and, to one skilled in the art it is easily understood that present invention disclosed herein can be made and replacing
Change and change and without prejudice to scope and spirit of the present invention, and such change and modification can be considered such as claim
In the scope of the present invention that book is limited.
Example
Fig. 6 illustrates the exemplary control arrangement according to the present invention.
As shown in Figure 6, indexing unit includes the first labelling component and the second labelling component.There is the width of 15 ± 3 μm
Linear laser generator is used as the first labelling component and the second labelling component.Linear laser generator is disposed near winding
At the right margin of film, and the distance between the first labelling component and the second labelling component is the sender of film (d1=100mm)
It is upwards 100mm, and is 2mm in the vertical direction of the direction of transfer of film (d2=2mm).Therefore, when angle of bend θ with
0.1 ° when being changed, d2 increases with 177 μm [100*tan (0.1) μm] or reduces.
Recognition unit includes: photomoduel, and this photomoduel has the resolution of 3.0 μ m in size；And computer installation, should
Computer installation can calculate the position of the labelling from the image that photomoduel is caught.Photomoduel is with the distance of 750mm
It is arranged in the rear portion of the second indexing unit.
Exposure sources and mask are disposed in the rear portion of recognition unit, and two fixing labellings are disposed in each of mask
Side is to check the alignment of mask, and another photomoduel is installed on mask for setting fixing labelling.Fixing mark
Distance between note and other photomoduels is 45mm.
Additionally, computing unit is configured to use predetermined value d1 and d2 and by the first labelling component of recognition unit identification
And the distance that second between labelling component, calculate deflection distance L and angle of bend θ.
Control unit is designed to often to advance based on film deflection distance L of 20mm and angle of bend θ, by correction signal transmission
To patterning device and indexing unit.
Experiment
1. the generation of the bending of the pattern on film
On-line velocity be the tension force of 3m/min and 5m/min and film be to check bending in the case of 130N, 200N and 250N
Whether occur.
For experimental result as shown in table 1, CONSIDERING EDGE positioner (ETC), does not occurs in each case
Significant bending.
[table 1]
2. control the bending of pattern on film according to the present invention
The control device according to examples detailed above is used to carry out in the case of the linear velocity of 5m/min and the layer tension of 200N
Simulation to the control of the bending of film.The threshold value not applying EPC and bending is 10 μm.
First, noise and extraction are eliminated by the first labelling component and the second labelling component from the flag data shown in Fig. 8 a
The track of labelling, by this flag data of recognition unit identification.Specifically, by flag data being divided according to the coordinate identified
In bulk and form two dimension matrix in block form, the block of connection is segmented into speckle and eliminates from flag data and be smaller in size than the speckle of 3000 μm
Point (such as noise), and study main connection curve and separately the first labelling track (line on top) and the second labelling track
(line of bottom) (seeing Fig. 9).
When F represents whole piecemeal group and S1, S2..., SnRepresent when including each piecemeal of F respectively, below they meet
Formula 4.
[formula 4]
Arithmetic element calculates deflection distance L and angle of bend θ based on the data relevant with the first labelling and the second labelling.
As shown in figure 11, formula 5 is used to calculate angle of bend θ to every section.Formula 5 is used to calculate at the first labelling and second
Distance d between labelling, and by using the tangent value (tan (d)) of d to obtain angle, θ.In formula 5, d3 is sender
The upwards distance between the first laser generator and the second laser generator, and d4 is on the direction vertical with direction of transfer
Distance between first laser generator and the second laser generator.In above-mentioned simulation, d3 is 100mm and d4 is 2mm.
[formula 5]
As shown in figure 11, the coordinate utilizing formula 6 and the second labelling to every section calculates deflection distance L.In formula 6,
x1..., xnFor the coordinate on the direction vertical with direction of transfer.
[formula 6]
L=intermediate value (x1, x2..., xn)
When deflection distance L is bigger than predetermined value 10 μm, control unit sends correction signal, and correction position is set to
New reference position.In fig. 11, the section the most having sent correction signal is noted as inspected.
Figure 12 illustrates the result of the experiment control bending according to the present invention.
Claims (22)
1., for the control device preventing pattern from bending, described control device is used for including that fixing film transmits equipment and pattern
The pattern film producing device of formation equipment, described control device includes:
Indexing unit, described indexing unit forms labelling in the preset reference position of film, uses described fixing film to transmit equipment
Position as with reference to determining described preset reference position；
Recognition unit, described recognition unit is positioned at the rear portion of described indexing unit, and identifies described labelling on the membrane
Position；
Arithmetic element, described arithmetic element is based on the difference between described preset reference position and the identified position of described labelling
Value calculates the amount of bending；
Wherein, described indexing unit includes that described preset reference position on the membrane periodically forms the labelling structure of labelling
Part；
Wherein, described arithmetic element is based on the difference between described preset reference position and the described identified position of described labelling
Value calculates the amount of the described bending that the transverse shifting of the central axis by described film causes, the central axis of described film horizontal
Mobile distance L moved corresponding to the central axis of described film on the direction of direction of transfer being perpendicular to described film；
Control unit, described control unit produces correction signal, and described correction signal corresponds to the amount of calculated bending and comes school
The most described indexing unit and the position of described patterning device；With
Correction unit, described correction unit receives described correction signal and corrects described mark based on the described correction signal received
Note unit and the position of described patterning device.
Control device the most according to claim 1, wherein, described control unit is according to being perpendicular to the described biography of described film
Sending described distance L on the direction in direction, generation is for moving the position of described indexing unit and described patterning device
Described correction signal.
Control device the most according to claim 1, wherein, described arithmetic element also includes the described bending that periodically adds up
The parts of amount, wherein, the amount of described bending includes deflection distance L.
Control device the most according to claim 3, wherein, when described deflection distance L cumulative by described arithmetic element
During more than predetermined threshold, described control unit produces correction signal.
5., for the control device preventing pattern from bending, described control device is used for including that fixing film transmits equipment and pattern
The pattern film producing device of formation equipment, described control device includes:
Indexing unit, described indexing unit forms labelling in the preset reference position of film, uses described fixing film to transmit equipment
Position as with reference to determining described preset reference position；
Recognition unit, described recognition unit is positioned at the rear portion of described indexing unit, and identifies described labelling on the membrane
Position；
Arithmetic element, described arithmetic element is based on the difference between described preset reference position and the identified position of described labelling
Value calculates the amount of bending；
Wherein, described indexing unit includes: the first labelling component；With the second labelling component, described second labelling component is at film
On direction of transfer with described first labelling component distance d1 at, on the direction of described direction of transfer being perpendicular to described film
With described first labelling component distance d2, described first labelling component and described second labelling component making a reservation at described film
Labelling is periodically formed on reference position；
Wherein, between described arithmetic element physical location based on described first labelling component and described second labelling element numeral
The difference of distance and d2 calculate the amount of the described bending that the transverse shifting of the central axis by described film causes, described film
The transverse shifting of central axis moves corresponding to the central axis of described film on the direction of direction of transfer being perpendicular to described film
Distance L；
Control unit, described control unit produces correction signal, and described correction signal corresponds to the amount of calculated bending and comes school
The most described indexing unit and the position of described patterning device；With
Correction unit, described correction unit receives described correction signal and corrects described mark based on the described correction signal received
Note unit and the position of described patterning device.
Control device the most according to claim 5, wherein, described indexing unit also includes regulating when described labelling is formed
The component of the distance between described first labelling component and described second labelling component.
Control device the most according to claim 5, wherein, described first labelling component or the position of described second labelling component
Put and fixed.
8. according to the control device described in claim 6 or 7, wherein, described arithmetic element use described first labelling component and
The reference position of described second labelling component, by described first labelling component and the physical location of described second labelling element numeral
Between the difference of distance, distance d1 and distance d2 calculate angle of bend θ.
Control device the most according to claim 8, wherein, described control unit is produced according to described distance L and described angle, θ
The described correction signal of the raw position for correcting described indexing unit and described patterning device.
The most according to claim 1 or 5, control device, wherein, described recognition unit includes:
Photomoduel, described photomoduel periodically catches the image of the described labelling including described film；With
Periodically store the image caught and the component of the coordinate from the image described labelling of calculating caught.
11. control device according to claim 1 or 5, and wherein, described recognition unit also includes distinguishing noise and described mark
The component of note.
12. control devices according to claim 5, wherein, described arithmetic element also includes periodically adding up described curved
The parts of bent amount, and
Wherein, the amount of described bending includes deflection distance L and/or angle of bend θ.
13. control devices according to claim 12, wherein, when described deflection distance L added up by described arithmetic element
When described angle of bend θ that is bigger than predetermined threshold and/or that added up by described arithmetic element is bigger than predetermined threshold, described control unit
Produce described correction signal.
14. control devices according to claim 5, wherein, described control unit produces for described first labelling component
Or the correction signal of described second labelling component.
15. control device according to claim 1 or 5, and wherein, described patterning device includes being disposed in described
The mask on direction that the described direction of transfer of film is vertical or roller.
16. control device according to claim 1 or 5, also include initialization unit, and described initialization unit is passing through
Set after stating the position that correction unit corrects described patterning device and described indexing unit described patterning device and
The correction position of described indexing unit is as reference position.
17. control device according to claim 1 or 5, and wherein, described indexing unit includes generating device of laser, described
Generating device of laser can form the labelling of a diameter of 15 ± 3 microns, and described recognition unit includes high resolution vision system
System, described high resolution vision system is capable of identify that diameter is less than the described labelling of 10 microns.
18. control devices according to claim 17, wherein, in labelling described in described high resolution vision system identification
Heart coordinate is as the coordinate of described labelling, to reduce the error produced due to the shape of described labelling.
19. control device according to claim 1 or 5, and wherein, described control unit also produces for correcting described film
The correction signal of the position of cutting element.
20. control device according to claim 1 or 5, and wherein, described recognition unit is positioned at described patterning device
Anterior and identify the bending of described pattern of described film before forming described pattern on the membrane.
The method of 21. 1 kinds of bendings controlling device control pattern used as described in claim 1 or 5.
22. methods according to claim 21, wherein, described method combines described control device and uses marginal position to control
Device EPC.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20110037635 | 2011-04-22 | ||
| KR10-2011-0037635 | 2011-04-22 | ||
| KR1020110095852A KR101829308B1 (en) | 2011-04-22 | 2011-09-22 | Controlling device for preventing snaking of patterns of patterned flims |
| KR10-2011-0095852 | 2011-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102759864A CN102759864A (en) | 2012-10-31 |
| CN102759864B true CN102759864B (en) | 2016-11-30 |
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