CN102759796A - Optical calibration technology of multi-degree-of-freedom imaging optical system for computed-generated holographic multi-point instantaneous positioning - Google Patents
Optical calibration technology of multi-degree-of-freedom imaging optical system for computed-generated holographic multi-point instantaneous positioning Download PDFInfo
- Publication number
- CN102759796A CN102759796A CN2012101424952A CN201210142495A CN102759796A CN 102759796 A CN102759796 A CN 102759796A CN 2012101424952 A CN2012101424952 A CN 2012101424952A CN 201210142495 A CN201210142495 A CN 201210142495A CN 102759796 A CN102759796 A CN 102759796A
- Authority
- CN
- China
- Prior art keywords
- optical system
- school
- light source
- mark
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses an optical calibration technology of a multi-degree-of-freedom imaging optical system for computer-generated holographic multi-point instantaneous positioning. According to the optical calibration technology, a holographic image is designed according to the positioning requirement of various optical elements of an imaging optical system to be mounted and calibrated and a mechanical reference, so that light beams are diffracted and imaged by a computer-generated holographic image to form a set of marking images; the marking images correspond to the optical element of the imaging optical system to be mounted and calibrated and the reference of mechanical assembly parts; relative space positions of the marking images correspond to relative space positions of the optical elements of the imaging optical system to be mounted and calibrated and the reference of mechanical assembly parts; and the set of the marking images forms a stereogram of the optical system to be mounted and calibrated. In the mounting and calibrating process of the imaging optical system, various optical elements of an imaging optical system to be mounted and calibrated and the reference of mechanical assembly parts are aligned to corresponding marking images, and thus coarse tuning of the imaging optical system is finished and further the imaging optical system to be mounted and calibrated enters an interferogram phase; and then fine tuning is finished by a computer-aided aberration decoupling technology.
Description
Technical field
The present invention relates to optical system light school technology, multiple degrees of freedom imaging optical system light school, the instantaneous location of particularly a kind of calculation holographic multiple spot technology.
Technical background
Have the imaging optical system that rotates the symcenter axle for tradition, it adopts the optical element with rotation symcenter axle, and such as spherical mirror, high order aspheric surface mirror, its supporting construction has rotation symcenter axle equally.Debuging of such imaging optical system then utilizes this rotation symmetry characteristic to adorn the school, and its dress school technology is ripe relatively, and assembly tool is perfect, such as transit, Eccentric Instrument, standard length bar etc.
Along with disappear from the axle three-mirror reflective astigmatism optical texture and the design of multiple degrees of freedom free form surface, processing and inspection technology development, the multiple degrees of freedom optics list mirror productive life that has incorporated people gradually, such as automobile lamp, duplicating machine, printer and color CRT etc.
Mostly be that from the axle three-mirror reflective optics list mirror that the astigmatism optical texture adopts that disappears rotation axes of symmetry is positioned at outside the mirror body from an axle high order aspheric surface, from axle high order aspheric surface list mirror self out-of-shape.The multiple degrees of freedom freeform optics surface is because of axis of symmetry without spin, out-of-shape and gaining the name.The irregular multiple degrees of freedom optical surface of these present situations, sphere and high order aspheric surface have more freedom relatively, and it is stronger that it improves optical image mass-energy, has advantages such as the optical instrument of reducing size and weight, therefore, extensively obtains discussing.
The multiple degrees of freedom optical system is difficult to accomplish multiple degrees of freedom imaging optical system dress school because of having multiple degrees of freedom by the used dress calibration method of traditional imaging optical system.
At present, the development of domestic how tame unit is from axle three-mirror reflective imaging optical system, but because of the single mirror that adopts is using from axle of high order aspheric surface, therefore, the dress calibration method of employing is continued to use the dress calibration method of traditional imaging optical system.Meanwhile, domestic discussion to multiple degrees of freedom free form surface imaging optical system rests on the design phase, and the dress school technology of multiple degrees of freedom free form surface imaging optical system there is not breakthrough yet.
In the world, U.S. NASA is the IRMOS imaging spectrometer of Kitt Peak country observational astronomy platform development, and the SCUBA-2 multi-object telescope of James Clark Maxwell Telescope has adopted the single mirror of multiple degrees of freedom freeform optics surface.The tolerance of these two cameras is pine relatively, and the translation tolerance is 0.125mm, and the inclination tolerance is 0.016 degree; Its dress school relies on machining precision fully and guarantees; Therefore, support frame adopts one processing, and the scope inner plane degree that is processed in 1.2m * 2.4m of reference field is 0.025mm; Thereby guaranteed the bearing accuracy in dress school, camera encircled energy halfwidth is 55um.
In sum; The multiple degrees of freedom freeform optics surface is improved, is improved the imaging optical system aspect of performance and has clear superiority at aberration; Obtained extensive discussions; But the dress calibration method of multiple degrees of freedom free form surface imaging optical system is still in the exploratory stage, and the performance of the advantage of freeform optics surface is restricted.
Summary of the invention
The present technique invention is to propose to a multiple degrees of freedom high-precision optical instrument dress school difficult problem, solves the dress school difficult problem of part optical texture form, advances the application of multiple degrees of freedom high-precision optical free form surface in imaging optical system.
This dress school technology is to adopt light beam through calculation holographic image diffraction imaging; Form with school to be installed optical system in each optical element and machinery group parts benchmark corresponding ' mark ' as set; In the process of optical system bulk cargo school; With the benchmark of each optical element of school to be installed imaging optical system and mechanical group of portion and corresponding ' mark ' as aligning, thereby accomplish the coarse adjustment of imaging optical system, make school to be installed imaging optical system get into the interferogram stage; Afterwards, utilize area of computer aided aberration decoupling technology to accomplish accurate adjustment.
Technical scheme
Each optical element or component of machine can be regarded as a rigid body, and three points, a space curve or other complex space figures all can indicate its locus on it.The optical instrument that the dress school finishes can be regarded as a rigid body equally; It simultaneously also is the set of forming the ray machine parts rigid body of this optical instrument; Therefore, the locus relative fixed between point, space curve or other complex space figures corresponding with the ray machine parts.
Along with the development of calculation holographic technology, can make diversified calculation holographic pattern.Light can produce different picture through the various computing hologram pattern.The benchmark of optical element and component of machine is at once in different picture and school to be installed optical system, ' mark ' that these pictures then become the reference space position that indicates optical element and component of machine in the optical system of school to be installed and shape as.' mark ' as set then become ' stereographic map ' of school to be installed optical system.
Based on above-mentioned analysis, this dress school technical scheme mainly comprise dress school light path design, build, the coarse adjustment and the accurate adjustment of optical system.
Several steps below the design of dress school light path divides:
1) schemes by the structure mould dress of school to be installed optical system; The design feature of clear and definite school to be installed optical system; Seek an angle, make the light source of adorning the school light path can see the optical element and the component of machine part or whole in all or part school to be installed in the optical system of school to be installed simultaneously.
2) on the optical element and component of machine in dress school; The visible position design basis of light source of dress school light path; This benchmark can be spatial complex figures such as point, line, crosshair, ring or polygon etc.; In the processing testing process, this benchmark to be carved or is indicated on optical element and the component of machine, the processing and fabricating of benchmark or the precision of sign are by the coarse adjustment tolerance decision of school to be installed optical system.
3), according to 2) the middle benchmark that designs, design dress school light path; Dress school light path comprises light source and calculation holographic plate, and wherein, the calculation holographic plate designs a plurality of area of the pattern; Each area of the pattern has different functions, and the benchmark ' mark ' of the optical element in corresponding school to be installed and component of machine is as locating with light source, when light source incides on the pattern of light source location respectively; Diffraction returns along original optical path, interferes with the reference light in the interferometer, in order to the location between light source and the calculation holographic plate; When light source incides on benchmark ' mark ' picture pattern, diffraction imaging, and with 2) benchmark of design is corresponding in; ' mark ' that becomes its space as, in order to locate school to be installed optical element and mechanical component.Calculation holographic plate design of patterns; According to relative position, the holographic plate of light source type, light source and holographic plate and treat the school optical system ' stereographic map ' relative position and ' mark ' in ' stereographic map ' as with the corresponding relation of mechanical-optical setup benchmark, Optimal design and calculation hologram pattern.For the location between light source and the calculation holographic plate, the light source location pattern on the calculation holographic plate is incident to light source location pattern with light source, and diffraction returns along original optical path, interferes with the reference light in the interferometer, and producing 0 speckle pattern interferometry pattern is design standards.' mark ' that benchmark ' mark ' picture pattern of light source on the calculation holographic plate produces as.As required, ' mark ' is as being spatial complex figures such as point, line, crosshair, ring or polygon.' mark ' as with school to be installed light path in the ray machine benchmark corresponding one by one, its corresponding relation comprises locus and shape facility.' mark ' as linear precision and positional precision by the coarse adjustment tolerance decision of school to be installed optical system.
The building method of dress school light path is: the light source of dress school light path adopts the interferometer light source, can be parallel light source, also can be the sphere light source.Make the incident of interferometer light source and cover the calculation holographic plate; The position of adjustment interferometer and calculation holographic plate; The beam diffraction that order is incident to light source location pattern returns along original optical path, interferes with the reference light in the interferometer, when interference figure 0 striped; And the beam diffraction that incides benchmark ' mark ' picture pattern become ' mark ' as the time, the light path adjustment of dress school finishes;
The optical system coarse adjustment is: after the building of school to be installed light path finished, ' mark ' that the benchmark and the dress school light path of the optical element of school to be installed optics and component of machine produced be as aiming at, thereby make school to be installed optical system produce interferogram;
The optical system accurate adjustment does; When school to be installed optical system produces interferogram; Utilize area of computer aided aberration decoupling technology, from interferogram, demodulate school to be installed optical system misalignment rate, and regulate; Thereby make school to be installed optical system arrive the expection picture element, thereby the dress school of accomplishing imaging optical system.
This dress school technology has the advantage that bearing accuracy height, the interpretation of position of optical element error are directly perceived, assembly period is short.
Description of drawings
Fig. 1: optics list mirror and on datum line.
Fig. 2: the optics list mirror of three marks location of usefulness, wherein, mark 1, mark 2 and mark 3 are crosshair among the figure, respectively with Fig. 1 in benchmark 1, benchmark 2 and benchmark 3 corresponding.
Fig. 3: an optical system and being used to indicates ' mark ' set of whole optical system position of optical element; Wherein, Optics list mirror 1 indicates with two groups of thirty word cross hairs respectively with optics list mirror 3; Spatial loop mark of optics list mirror 2 usefulness, mark 1, mark 2, mark 3, mark 4, mark 5, mark 6 and Marking ring constitute optical system space ' stereographic map '.
Fig. 4: the calculation holographic plate, be divided into eight zones, the corresponding different diffraction of zones of different pattern ' mark ' as with the light source positioning function.
Fig. 5: calculation holographic diffraction dress school light path synoptic diagram; Pointolite through calculation holographic plate diffraction be shaped a plurality of ' marks ' as set, thereby sketch the contours of ' stereographic map ' of optical system, simultaneously; Segment beam is met light source location pattern; Diffraction returns along former road, interferes with reference light, thereby is used for the location positioning between light source and the calculation holographic plate.
Fig. 6: optical element is assembled to ' mark ' image set and closes optical system ' stereographic map ' position of sketching the contours of, ' mark ' aimed at as the optical element benchmark corresponding with it.
Fig. 7: dress school optical system accurate adjustment light path, the system aberration of dress school optical system obtains by means of interferometer and autocollimatic light path.
Embodiment
With a dress calibration method explanation present technique invention from the axle three-mirror reflective optical system.
Every optics list mirror in the axle three-mirror reflective optical system can be regarded as rigid body with the optical instrument that the dress school finishes.Every optics list mirror and supported mechanical parts all can utilize the laser sign of the high-precision line of etching or other complex space figures above that in development process.
From axle in the three-mirror reflective optical system ' optics list mirror 1 ' self out-of-shape is as shown in Figure 1.In the process, can utilize the laser high-precision line of etching above that, ' groove of optics list mirror 1 ' is elected the center line of four side planes of optical element as.' mark ' that dress school light path becomes as as ' mark 1 ', ' mark 2 ' and ' mark 3 ' among Fig. 2 with crisis-cross; Respectively with ' groove in the optics list mirror 1 ' ' benchmark 1 ', ' benchmark 2 ' is with ' benchmark 3 ' is corresponding, is used for indicating ' the position of optics list mirror 1 '.Equally, can be according to the resemblance of optical element, adopt ' spatial loop ' perhaps spatial complex figures such as ' spatial triangles ' indicate the locus of optical element.
This is as shown in Figure 3 from the axle three-mirror reflective optical system; Wherein ' optics list mirror 2 ' back is a plane; The side is a face of cylinder, is easy to make up spatial relation with physical construction, and therefore ' optics list mirror 1 ' is a reference for installation in this school to be installed optical system selection.' optics list mirror 2 ' is easy to and physical construction makes up spatial relation, therefore, this dress school light path need not to design with relevant ' sign ' of physical construction as.
As shown in Figure 3; ' optics list mirror 1 ' with ' optics list mirror 3 ' is used crisis-cross ' mark 1 ' ' mark 2 ', ' mark 3 ', ' mark 4 ' respectively, ' mark 5 ' is with ' mark 6 ' indicates, and ' optics list mirror 2 ' indicates with spatial loop ' Marking ring '.Optical element datum line and reference rings locus are corresponding in ' mark 1 ' ' mark 2 ', ' mark 3 ', ' mark 4 ', ' mark 5 ', ' mark 6 ' and ' Marking ring ' relative position and the school to be installed optical system model, promptly sketch the contours of ' stereographic map ' of optical system.
' mark 1 ' ' mark 2 ', ' mark 3 ', ' mark 4 ', ' mark 5 ', ' mark 6 ' and ' Marking ring ' and corresponding locus are built calculation holographic diffraction dress school light path through design and are realized.The calculation holographic plate is as shown in Figure 4; Its zones of different has the different functions pattern; The generation ' mark ' that shines the calculation holographic plate when light beam of light source as the zone produce ' mark 1 ' ' mark 2 ', ' mark 3 ', ' mark 4 ', ' mark 5 ', ' mark 6 ' and ' Marking ring ' respectively; The interferometer light source irradiation is to the light source position location, and beam diffraction returns along former road with interferometer interferes, thereby confirms the relative position of light source and calculation holographic plate.
It is as shown in Figure 5 to build calculation holographic diffraction dress school light path; The sphere light beam of light source through calculation holographic be diffracted into ' mark ' as---' mark 1 ' ' mark 2 ', ' mark 3 ', ' mark 4 ', ' mark 5 ', ' mark 6 ' and ' Marking ring ' constitute optical system ' stereographic map '.Afterwards; Auxiliary dress calibration equipment is calculated in utilization, school to be installed each optical element of optical system is assembled to ' mark 1 ' ' mark 2 ', ' mark 3 ', ' mark 4 ', ' mark 5 ', ' position of ' stereographic map ' sign that mark 6 ' and ' Marking ring ' are sketched the contours of, and make ' mark ' to aim at as optical element datum line corresponding and reference rings with it; As shown in Figure 6; Make the interference autocollimatic light path of school to be installed optical system get into the interferogram stage, accomplish the coarse adjustment of optical system, as shown in Figure 7.At last, utilize the aberration decoupling technology, the dress school of optical system to desirable picture element, is accomplished in optical system picture element dress school.
Claims (4)
1. the instantaneous location of calculation holographic multiple spot multiple degrees of freedom imaging optical system light calibration method, comprise dress school light path design, build, the coarse adjustment and the accurate adjustment of optical system, it is characterized in that:
Several steps below the design of described dress school light path divides:
1) schemes by the structure mould dress of school to be installed optical system; The design feature of clear and definite school to be installed optical system; Seek an angle, make the light source of adorning the school light path can see the optical element and the component of machine part or whole in all or part school to be installed in the optical system of school to be installed simultaneously;
2) on the optical element and component of machine in dress school; The visible position design basis of light source of dress school light path; This benchmark can be point, space curve or other complex space figures etc.; In the processing testing process, this benchmark to be carved or is indicated on optical element and the component of machine, the processing and fabricating of benchmark or the precision of sign are by the coarse adjustment tolerance decision of school to be installed optical system;
3) according to 2) the middle benchmark that designs, design dress school light path, dress school light path comprises light source and calculation holographic plate; Wherein, the calculation holographic plate designs a plurality of area of the pattern, and each area of the pattern has different functions; The benchmark ' mark ' of the optical element in corresponding school to be installed and component of machine is located on the pattern when light source incides light source as locating with light source respectively, and diffraction returns along original optical path; Interfere with the reference light in the interferometer, in order to the location between light source and the calculation holographic plate, when light source incides on benchmark ' mark ' picture pattern; Diffraction imaging; And with 2) in the benchmark of design corresponding, ' mark ' that becomes its space as, in order to locate school to be installed optical element and mechanical component;
The building method of said dress school light path is: the light source of dress school light path adopts the interferometer light source; Make the incident of interferometer light source and cover the calculation holographic plate, the position of adjustment interferometer and calculation holographic plate, the beam diffraction that order is incident to light source location pattern returns along original optical path; Interfere with the reference light in the interferometer; When interference figure 0 striped, and the beam diffraction that incides benchmark ' mark ' picture pattern become ' mark ' as the time, the light path adjustment of dress school finishes;
Described optical system coarse adjustment is: after the building of school to be installed light path finished, ' mark ' that the benchmark and the dress school light path of the optical element of school to be installed optics and component of machine produced be as aiming at, thereby make school to be installed optical system produce interferogram;
Described optical system accurate adjustment does; When school to be installed optical system produces interferogram; Utilize area of computer aided aberration decoupling technology, from interferogram, demodulate school to be installed optical system misalignment rate, and regulate; Thereby make school to be installed optical system arrive the expection picture element, thereby the dress school of accomplishing imaging optical system.
2. the instantaneous location of a kind of calculation holographic multiple spot according to claim 1 multiple degrees of freedom imaging optical system light calibration method; It is characterized in that: described calculation holographic plate design of patterns method is following: according to relative position, the holographic plate of light source type, light source and holographic plate and treat the school optical system ' stereographic map ' relative position and ' mark ' in ' stereographic map ' as with the corresponding relation of mechanical-optical setup benchmark, Optimal design and calculation hologram pattern.For the location between light source and the calculation holographic plate, the light source location pattern on the calculation holographic plate is incident to light source location pattern with light source, and diffraction returns along original optical path, interferes with the reference light in the interferometer, and producing 0 speckle pattern interferometry pattern is design standards; ' mark ' that benchmark ' mark ' picture pattern of light source on the calculation holographic plate, diffraction produce as linear precision determine with the coarse adjustment tolerance of positional precision by school to be installed optical system.
3. the instantaneous location of a kind of calculation holographic multiple spot according to claim 1 multiple degrees of freedom imaging optical system light calibration method; It is characterized in that: ' mark ' that the benchmark of described optical element and component of machine and dress school light path produce is as corresponding; Its corresponding relation comprises locus and shape facility; Ray machine benchmark and ' mark ' as, as required, can be point, line, crosshair, ring or polygon space diagram.
4. the instantaneous location of a kind of calculation holographic multiple spot according to claim 1 multiple degrees of freedom imaging optical system light calibration method is characterized in that: the light beam that the described interferometer light source that dress school light path adopts sends is plane wave light beam or spherical wave light beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210142495.2A CN102759796B (en) | 2012-05-09 | 2012-05-09 | Optical calibration technology of multi-degree-of-freedom imaging optical system for computed-generated holographic multi-point instantaneous positioning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210142495.2A CN102759796B (en) | 2012-05-09 | 2012-05-09 | Optical calibration technology of multi-degree-of-freedom imaging optical system for computed-generated holographic multi-point instantaneous positioning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102759796A true CN102759796A (en) | 2012-10-31 |
| CN102759796B CN102759796B (en) | 2014-07-23 |
Family
ID=47054299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210142495.2A Active CN102759796B (en) | 2012-05-09 | 2012-05-09 | Optical calibration technology of multi-degree-of-freedom imaging optical system for computed-generated holographic multi-point instantaneous positioning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102759796B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113031296A (en) * | 2021-03-24 | 2021-06-25 | 长春长光智欧科技有限公司 | Method for assembling and adjusting metal-based free-form surface three-reflection optical system capable of being assembled and adjusted quickly |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080180816A1 (en) * | 2007-01-31 | 2008-07-31 | Enplas Corporation | Imaging lens and imaging device including the imaging lens |
| CN101390382A (en) * | 2005-12-27 | 2009-03-18 | 京瓷株式会社 | Imaging device and its image processing method |
| US20090136580A1 (en) * | 2007-09-22 | 2009-05-28 | Boise State University | PREFERENTIAL KILLING OF CANCER CELLS AND ACTIVATED HUMAN T CELLS USING ZnO NANOPARTICLES |
-
2012
- 2012-05-09 CN CN201210142495.2A patent/CN102759796B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101390382A (en) * | 2005-12-27 | 2009-03-18 | 京瓷株式会社 | Imaging device and its image processing method |
| US20080180816A1 (en) * | 2007-01-31 | 2008-07-31 | Enplas Corporation | Imaging lens and imaging device including the imaging lens |
| US20090136580A1 (en) * | 2007-09-22 | 2009-05-28 | Boise State University | PREFERENTIAL KILLING OF CANCER CELLS AND ACTIVATED HUMAN T CELLS USING ZnO NANOPARTICLES |
Non-Patent Citations (1)
| Title |
|---|
| 任淑艳等: "基于神经网络的锥光全息测量系统校准技术研究", 《电子测量与仪器学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113031296A (en) * | 2021-03-24 | 2021-06-25 | 长春长光智欧科技有限公司 | Method for assembling and adjusting metal-based free-form surface three-reflection optical system capable of being assembled and adjusted quickly |
| CN113031296B (en) * | 2021-03-24 | 2022-08-19 | 长春长光智欧科技有限公司 | Method for assembling and adjusting metal-based free-form surface three-reflection optical system capable of being assembled and adjusted quickly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102759796B (en) | 2014-07-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Fang et al. | Manufacturing and measurement of freeform optics | |
| CN102661719B (en) | Near-null compensator, surface shape measuring instrument and measuring method for matching measurement of sub-apertures of aspheric surfaces | |
| CN102997863B (en) | Direct detection system for surface-shape errors in full-aperture optical aspheric surfaces | |
| CN107250714B (en) | Method and apparatus for interferometric detection | |
| WO2012169935A2 (en) | Device for aligning a two-mirror centered optical system | |
| CN104515470B (en) | Holoscan exposes two-dimentional work bench displacement and deflection angle measurement light channel structure | |
| Risse et al. | Development and fabrication of a hyperspectral, mirror based IR-telescope with ultra-precise manufacturing and mounting techniques for a snap-together system assembly | |
| KR101159644B1 (en) | An Apparatus For Measuring Geometric Error of Index Table in Machine Tool Using Laser Interferometer And Method Thereof | |
| CN102519397A (en) | Method for measuring curvature radius of optical spherical surface | |
| Burge et al. | Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces | |
| US9296161B2 (en) | Method for producing an optical assembly having at least two optical functional surfaces, an optical device and unit for carrying out the method | |
| CN105890543A (en) | Concave post surface and post surface divergent mirror detection method and device | |
| Semenov et al. | Methods of fabrication and testing of unique large-size optics in LZOS, JSC (VST, VISTA and other projects) | |
| CN105783780B (en) | A kind of unconventional sub-aperture stitching interferometer detection device of free form surface and method | |
| CN111895934A (en) | Optical element surface local gradient surface shape error interferometry method and device | |
| West et al. | Alignment and use of the optical test for the 8.4-m off-axis primary mirrors of the Giant Magellan Telescope | |
| CN105676409A (en) | Method and system for adjusting main reflector and main frame of spatial optical camera | |
| CN110567392B (en) | Method for testing surface shape of convex free-form surface reflector | |
| CN102759796B (en) | Optical calibration technology of multi-degree-of-freedom imaging optical system for computed-generated holographic multi-point instantaneous positioning | |
| JP2022551063A (en) | Measuring device for interferometric measurement of surface shape | |
| US20190204571A1 (en) | Method and Device for Producing an Optical Component Having at Least Three Monolithically Arranged Optical Functional Surfaces and Optical Component | |
| Xu et al. | Calibration method of laser plane equation for vision measurement adopting objective function of uniform horizontal height of feature points | |
| CN110702036B (en) | Complex beam angle sensor and small-sized aspheric surface morphology detection method | |
| Tuell et al. | Fabrication of the LSST monolithic primary-tertiary mirror | |
| Martin et al. | Progress in manufacturing the first 8.4 m off-axis segment for the Giant Magellan Telescope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |