CN102735700B - X-ray micro-imaging system - Google Patents
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- 238000003384 imaging method Methods 0.000 title claims abstract description 103
- 238000012360 testing method Methods 0.000 claims description 29
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- 230000000149 penetrating effect Effects 0.000 claims description 6
- 230000000007 visual effect Effects 0.000 abstract description 23
- 238000001514 detection method Methods 0.000 abstract description 6
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Abstract
The present invention discloses an X-ray micro-imaging system. The system comprises: a ray source, wherein the ray source can move along a longitudinal direction; a sample table; a detector, wherein the detector and the ray source are located on both sides of the sample table in the longitudinal direction, the detector comprises a large visual field detector and a high-resolution detector, the large visual field detector and the high-resolution detector are arranged adjacently, and the detector is configured to respectively move along a horizontal direction and a longitudinal direction, such that X-ray emitted by the ray source penetrates through a sample requiring detection and then is projected to one of the large visual field detector and the high-resolution detector; a controller, wherein the controller is provided for controlling movements of the ray source and the detector; and a computer, wherein the computer is respectively connected with the controller and the detector to respectively sent a control instruction to the controller and carry out image data acquisition on the sample requiring detection. With the imaging system of the present invention, continuous adjustment of the resolution and the visual field in the imaging limit range can be achieved according to the actual need, and the problem of incapability of meeting of the resolution and the visual field in the prior art can be solved.
Description
Technical field
The present invention relates to microscopic CT scanning technical field of imaging, especially relate to a kind of X ray micro imaging system.
Background technology
X ray has that wavelength is short, resolution is high and the advantage such as penetration depth is large, and its noninvasive imaging ability provides technological means for scientific research observation and industrial detection.Using X ray is the new imaging technique that computer technology and radiology combined together produce as the X ray three-dimensional imaging microscope of detection means.Utilize the perspective projection imaging of different angles, in conjunction with Computerized three-dimensional digital imagery constructing technology, construct the 3 D stereo transmission imaging model of object under test, with the clear accurate and visual object to be detected inner structural features that represents of the form of image, provide detailed image information.
There is certain weak point in traditional x-ray imaging system, often meet the requirement of large visual field but resolution is lower, when resolution meets the demands, visual field is smaller again, large visual field of Image-forming instrument and high resolving power are difficult to meet simultaneously, thereby have limited the application of imaging system or Image-forming instrument.
Summary of the invention
The present invention is intended at least solve one of technical matters existing in prior art.For this reason, the object of the invention is to propose a kind of X ray micro imaging system of taking into account large visual field and high-resolution imaging requirement.
According to X ray micro imaging system of the present invention, comprising: for launching the radiographic source of X ray, described radiographic source can be along the longitudinal movement; For carrying the sample stage of testing sample; Detector, described detector and described radiographic source are positioned at the both sides of described sample stage in the vertical, described detector comprises laterally adjacent large field of view detector and high-resolution detector, described detector be configured to can be respectively along horizontal and vertical movement so that the X ray that described radiographic source is launched after penetrating described testing sample, be projected in one of them in described large field of view detector and high-resolution detector; Controller, described controller is for controlling the movement of described radiographic source and described detector; And computing machine, described computing machine is connected to send steering order and testing sample is carried out to image data acquiring to described controller respectively respectively with described detector with described controller.
According to X ray micro imaging system of the present invention, by large field of view detector and high-resolution detector are set, and switch flexibly between the two according to the required imaging requirements of reality, large visual field and high-resolution imaging requirements have been met simultaneously, two kinds of problems that imaging is difficult to take into account are solved, thereby obtain better testing sample inner structural features, density, have the information such as size and position of zero defect and defect, more at large understand the characteristic of testing sample to meet different request for utilizations.
In addition, according to X ray micro imaging system of the present invention, can also there is following additional technical feature:
Described X ray micro imaging system also comprises: radiographic source zoom platform, and described radiographic source is located on described radiographic source zoom platform, and described radiographic source zoom platform is connected with described controller and is along the longitudinal movement to control.By radiographic source zoom platform is set, realized the movement of radiographic source along imaging direction, can by change radiographic source to sample the distance on imaging direction to obtain different imaging enlargement factors.
Particularly, described radiographic source zoom platform comprises: the first base, on described the first base, be formed with two the first guide-track grooves, and described two the first guide-track grooves are along being laterally spaced apart from each other; The first mobile platform, the bottom of described the first mobile platform is provided with the first guide rail that two edges are laterally spaced apart from each other, and described two the first guide rails are engaged in respectively in described two the first guide-track grooves correspondingly.
Described X ray micro imaging system, also comprises: detector zoom platform, and described detector zoom platform is connected with described controller and is along the longitudinal movement to control; Detector switching platform, described detector switching platform is located on described detector zoom platform, described detector switching platform is connected to be controlled along transverse shifting with described controller, wherein said large field of view detector and described high-resolution detector are along being laterally located at side by side on described detector switching platform.
Particularly, described detector zoom platform comprises: the second base, on described the second base, be formed with two the second guide-track grooves, and described two the second guide-track grooves are along being laterally spaced apart from each other; The second mobile platform, the bottom of described the second mobile platform is provided with the second guide rail that two edges are laterally spaced apart from each other, and described two the second guide rails are engaged in respectively in described two the second guide-track grooves correspondingly.By detector zoom platform is set, realized the movement of detector along imaging direction, can by change detector to sample the distance on imaging direction to obtain different imaging enlargement factors.
Particularly, described detector switching platform comprises: two the 3rd guide rails, and described two the 3rd guide rails are located on the upper surface of described the second mobile platform and are longitudinally spaced apart from each other; The 3rd mobile platform, the bottom of described the 3rd mobile platform is provided with two the 3rd guide-track grooves, and wherein said two the 3rd guide rails are engaged in respectively in described two the 3rd guide-track grooves correspondingly.By detector switching platform is set, in the time that sample interior structure is surveyed, can in the light of actual conditions between large field of view detector and high-resolution detector, switch, meet the different imaging requirements of different samples.
By radiographic source zoom platform is set, detector zoom platform and detector switching platform, realize on the one hand the switching between large field of view detector and high-resolution detector, meet the imaging requirements of different testing sample high resolving power and large visual field, on the other hand, when when in imaging, field range or resolution exceed the working range of certain detector, can be at any time according to actual needs by the combination of each platform be regulated to change enlargement factor, to obtain better testing sample image information, facilitate the 3-D view of computer reconstruction sample to understand better the inner structural features of testing sample.
Alternatively, described sample stage comprises turntable and three-dimensional localization portion, and described three-dimensional localization portion is located on described turntable and described testing sample is placed in described three-dimensional localization portion.
Further alternatively, the horizontal section of described turntable is the polygon that circle, ellipse or parameter are greater than three.
Further alternatively, described controller and described sample stage be connected to control described sample stage along described in vertically move.
The X ray micro imaging system of reality according to the present invention, can realize the continuous adjusting in areas imaging of resolution and visual field, meet the high resolving power of different samples and the imaging requirements of large visual field, in conjunction with Computerized three-dimensional digital imagery constructing technology, clearly accurate and visual represent sample inner structural features, have the information such as zero defect with the form of image, can be under sample nondestructive state the inner structure of observing samples, understand the characteristic of sample, can be widely used in rock core detection, fossil scanning and electronic component inspection field.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Brief description of the drawings
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination is understood becoming the description of embodiment obviously and easily, wherein:
Fig. 1 is according to the structural representation of X ray micro imaging system of the present invention;
Structure diagram when Fig. 2 is the X ray micro imaging system imaging shown in Fig. 1; With
Fig. 3 is according to the structural representation of detector of the present invention, detector zoom platform and detector switching platform.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Be exemplary below by the embodiment being described with reference to the drawings, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, orientation or position relationship that term " longitudinally ", " laterally " etc. indicate are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, construct and operation with specific orientation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " be only for describing object, and can not be interpreted as instruction or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, the implication of " multiple " is two or more, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.
In the present invention, unless otherwise clearly defined and limited, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, also can comprise that the first and second features are not directly contacts but by the other feature contact between them.
Describe according to the X ray micro imaging system 100 of the embodiment of the present invention below with reference to Fig. 1-Fig. 3, can be used for imaging and the detection of the samples such as material science, geology/oil, semiconductor/microelectronics, biology/medical science.
According to the X ray micro imaging system 100 of the embodiment of the present invention, comprising: radiographic source 1, sample stage 2, detector 3, controller 4 and computing machine 8.
As shown in Figure 1, radiographic source 1 is for launching X ray, and radiographic source 1 can be along the longitudinal movement.Here, it should be noted that, " longitudinally " described in the present invention refers to imaging direction, as shown in Figure 1, in the following description, if there is no specified otherwise, longitudinally represents imaging direction.Sample stage 2 is for carrying testing sample 200, and the testing sample 200 of carrying is accurately located.
Detector 3 and radiographic source 1 are positioned at the both sides of sample stage 2 in the vertical, and particularly, as shown in Figure 1, detector 3 is positioned at the downstream of sample stage 2 on imaging direction, and radiographic source 1 is positioned at the upstream side of sample stage 2 on imaging direction.Detector 3 comprises laterally adjacent large field of view detector 31 and high-resolution detector 32, here, large field of view detector 31 is one-level projective amplification system, its imaging enlargement factor is Mp=(a+b)/a, high-resolution detector 32 is secondary projective amplification system, its imaging enlargement factor Mg=Mo ［ (a+b)/a ］, wherein a is the distance of radiographic source 1 to sample 200, b is the distances of detector 3 scintillation screens to sample 200, Mo is that high-resolution detector 32 is the multiplying power of the microlens of high-resolution detector, as shown in Figure 2.Thus, can be by regulating radiographic source 1 to arrive the distance of sample 200 to sample 200 or detector 3, the numerical value that changes a or b obtains different enlargement factors, meets the different imaging demand of sample 200.
It should be noted that, in this area, large field of view detector 31 areas imagings are generally more than 100mm × 100mm, and high-resolution detector 32 areas imagings are generally below 2 μ m.
Detector 3 be configured to can be respectively along horizontal and vertical movement so that the X ray that radiographic source 1 is launched after penetrating testing sample 200, be projected in one of them in large field of view detector 31 and high-resolution detector 32, here, laterally refer to the direction vertical with imaging direction, as shown in Figure 1.Particularly, as shown in figures 1 and 3, detector 3 can be controlled on the one hand along laterally the direction vertical with imaging direction move, realize the switching between large field of view detector 31 and high-resolution detector 32, the X ray of launching via radiographic source 1 is projected on large field of view detector 31 or high-resolution detector 32 after penetrating sample 200, detector 3 also can be controlled longitudinally and be moved along imaging direction on the other hand, thus by this change detector 3 to the distance of sample 200 to obtain required imaging multiple.
Controller 4, for controlling the movement of radiographic source 1 and detector 3, that is to say, controller 4 can be used for controlling radiographic source 1 on the one hand and moves along imaging direction, also can control on the other hand detector 3 and move with the direction vertical with imaging direction along imaging direction.Computing machine 8 is connected respectively to send steering order and testing sample 200 is carried out to image data acquiring to controller 4 respectively with detector 3 with controller 4.
In the time the inner structure of testing sample 200 being surveyed to observation, in the time that needs are observed sample 200 inner structure with large visual field, can be by operation computing machine 8, send steering order by computing machine 8 to controller 4, controller 4 is controlled detector 3 and is moved that along the direction vertical with imaging direction large field of view detector 31 is switched on imaging direction, the X ray sending through radiographic source 1 like this can directly be projected on large field of view detector after penetrating testing sample 200, computing machine 8 is connected the collection and the Image Reconstruction that obtain image-forming information and complete view data with large field of view detector.
And in the time need to observing the inner structure of sample 200 with high resolving power, computing machine 8 can to controller 4 send steering order and by controller 4 control detector 3 along transverse movement so that high-resolution detector 32 is switched on imaging direction, the X ray sending through radiographic source 1 thus can directly be projected on high-resolution detector after penetrating testing sample 200, and computing machine 8 is connected to obtain image-forming information and completes Image Reconstruction with high-resolution detector.
In brief, can between large field of view detector and high-resolution detector, switch according to actual conditions according to the X ray micro imaging system 100 of the embodiment of the present invention, realize adjustable continuously in imaging limit range of resolution and visual field, take into account the imaging requirements of high resolving power and large visual field.Wherein, in the time using large field of view detector or high-resolution detector, can be by regulating detector 3 to regulate concrete imaging enlargement factor to meet different imaging requirements to the distance of sample 200.
According to the X ray micro imaging system 100 of the embodiment of the present invention, by large field of view detector 31 and high-resolution detector 32 are set, and switch flexibly between the two according to the required imaging requirements of reality, large visual field and high-resolution imaging requirements have been met simultaneously, two kinds of problems that imaging is difficult to take into account are solved, thereby obtain better testing sample 200 inner structural features, density, have the information such as size and position of zero defect and defect, more at large understand the characteristic of testing sample 200 to meet different request for utilizations.
In one embodiment of the invention, as shown in Figure 1, X ray micro imaging system 100 also comprises radiographic source zoom platform 5, and radiographic source 1 is located on radiographic source zoom platform 5, and radiographic source zoom platform 5 is connected with controller 4 and is along the longitudinal movement to control.The concrete structure of radiographic source zoom platform 5 does not have particular/special requirement, moves along imaging direction as long as can meet the radiographic source 1 driving on it.
For example, in an example of the present invention, as shown in Figure 1, radiographic source zoom platform 5 comprises the first base 51 and the first mobile platform 52, wherein on the first base 51, be formed with two the first guide-track grooves, two the first guide-track grooves are along being laterally spaced apart from each other, the bottom of the first mobile platform 52 is provided with the first guide rail that two edges are laterally spaced apart from each other, two the first guide rails are engaged in respectively in two the first guide-track grooves correspondingly, and two the first guide rails can move along imaging direction respectively correspondingly in two the first guide-track grooves.
Certainly, the present invention is not limited to this, in other embodiment of the present invention, the first base 51 also can be provided with the first guide rail, accordingly, the bottom of the first mobile platform 52 can be provided with the first guide-track groove, and the number of the first guide-track groove and the first guide rail can be respectively one can be also respectively multiple certainly, be respectively three or more.
By radiographic source zoom platform 5 is set, realized the movement of radiographic source 1 along imaging direction, can by change radiographic source 1 to sample 200 the distance a on imaging direction to obtain different imaging enlargement factors.
As shown in Figure 2, X ray micro imaging system 100 also comprises detector zoom platform 6 and detector switching platform 7, wherein detector zoom platform 6 is connected to be along the longitudinal movement by control with controller 4, detector switching platform 7 is located on detector zoom platform 6, detector switching platform 7 is connected to be controlled along transverse shifting with controller 4, wherein large field of view detector 31 and high-resolution detector 32 are along being laterally located at side by side on detector switching platform 7.
The concrete structure of detector zoom platform 6 does not have particular/special requirement, moves along imaging direction as long as can realize the detector switching platform 7 and the detector 3 that drive on it.For example, in an example of the present invention, as shown in Figure 2, detector zoom platform 6 comprises the second base 61 and the second mobile platform 62, on the second base 61, be formed with two the second guide-track grooves, two the second guide-track grooves are along being laterally spaced apart from each other, the bottom of the second mobile platform 62 is provided with the second guide rail that two edges are laterally spaced apart from each other, two the second guide rails are engaged in respectively in two the second guide-track grooves correspondingly, and two the second guide rails can move along imaging direction respectively correspondingly in two the second guide-track grooves.Certainly, in other embodiment of the present invention, the second base 61 can be provided with the second guide rail and the bottom of the second mobile platform 62 can correspondingly be provided with the second guide-track groove, and the number of the second guide-track groove and the second guide rail can be respectively one can be also respectively multiple certainly, be respectively three or more.
By detector zoom platform 6 is set, realized the movement of detector 3 along imaging direction, can by change detector 3 to sample 200 distance b on imaging direction to obtain different imaging enlargement factors.
Detector switching platform 7 comprises two the 3rd guide rails and the 3rd mobile platform 71, wherein two the 3rd guide rails are located on the upper surface of the second mobile platform 62 and are longitudinally spaced apart from each other, the bottom of the 3rd mobile platform 71 is provided with two the 3rd guide-track grooves, wherein two the 3rd guide rails are engaged in respectively in two the 3rd guide-track grooves correspondingly, and two the 3rd guide rails can move along the direction vertical with imaging direction respectively correspondingly in two the 3rd guide-track grooves.Certainly, in other embodiment of the present invention, on the upper surface of the second mobile platform 62, also can be formed with the 3rd guide-track groove, the bottom of the 3rd mobile platform 71 correspondence is formed with the 3rd guide rail, and it can be also respectively multiple certainly that the number of the 3rd guide-track groove and the 3rd guide rail can be respectively one, is respectively three or more.
By detector switching platform 7 is set, in the time that sample 200 inner structures are surveyed, can in the light of actual conditions between large field of view detector 31 and high-resolution detector 32, switch, meet the different imaging requirements of different samples 200.
Wherein, it should be noted that, for reducing the complexity of X ray micro imaging system 100 structures, save device fabrication and R&D costs, the structure of radiographic source zoom platform 5 and detector zoom platform 6 can be roughly the same, particularly, two the 3rd guide-track grooves can be longitudinally set on the upper surface of radiographic source zoom platform 5, by radiographic source zoom platform 5 is simply transformed and is formed detector zoom platform 6, can be identical with the second mobile platform 62 with the first mobile platform 52 for 71 of the 3rd mobile platforms, reduce to greatest extent thus the research and development production cost of equipment, there is good practicality.
By radiographic source zoom platform 5 is set, detector zoom platform 6 and detector switching platform 7, realize on the one hand the switching between large field of view detector 31 and high-resolution detector 32, meet the imaging requirements of different testing sample 200 high resolving power and large visual field, on the other hand, when when in imaging, field range or resolution exceed the working range of certain detector, can be at any time according to actual needs by the combination of each platform be regulated to change enlargement factor, to obtain better testing sample 200 image informations, facilitate the 3-D view of computing machine 8 reconstruct samples 200 to understand better the inner structural features of testing sample 200.
As shown in Figure 2, sample stage 2 is for accurately locating and carrying testing sample 200, sample stage 2 can comprise turntable 21 and three-dimensional localization portion 22, the horizontal section of turntable 21 can be the polygon that circle, ellipse or parameter are greater than three, three-dimensional localization portion 22 is located on turntable 21 and testing sample 200 is placed in three-dimensional localization portion 22, and three-dimensional localization portion 22 is for carrying out the accurate location in three dimensions to testing sample 200.Wherein sample stage 2 is known for prior art and by one of ordinary skilled in the art, is therefore not described in detail here for concrete structure and the principle of work of sample stage 2.Alternatively, controller 4 is connected and is along the longitudinal movement with Quality control platform 2 with sample stage 2, for example, all zoom of radiographic source as described above platforms 5 also can be set in the bottom of sample stage 2, and its concrete structure can be identical with radiographic source zoom platform 5.Thus, by along imaging direction mobile example platform 2, also can realize different enlargement factors to sample 200.
According to the X ray micro imaging system 100 of the embodiment of the present invention, can realize the continuous adjusting in areas imaging of resolution and visual field, meet the high resolving power of different samples 200 and the imaging requirements of large visual field, in conjunction with computing machine 83 D digital imaging constructing technologies, with clear accurate and visual sample 200 inner structural features that represent of the form of image, there are the information such as zero defect, can be under sample 200 nondestructive states the inner structure of observing samples 200, understand the characteristic of sample 200, can be widely used in material science, geology/oil, semiconductor/microelectronics, the fields such as biology/medical science.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And specific features, structure, material or the feature of description can be with suitable mode combination in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: in the situation that not departing from principle of the present invention and aim, can carry out multiple variation, amendment, replacement and modification to these embodiment, scope of the present invention is limited by claim and equivalent thereof.
Claims (9)
1. an X ray micro imaging system, is characterized in that, comprising:
For launching the radiographic source of X ray, described radiographic source can be along the longitudinal movement, and described " longitudinally " refers to imaging direction;
For carrying the sample stage of testing sample;
Detector, described detector and described radiographic source are positioned at the both sides of described sample stage in the vertical, described detector comprises laterally adjacent large field of view detector and high-resolution detector, described detector be configured to can be respectively along horizontal and vertical movement so that the X ray that described radiographic source is launched is projected in one of them in described large field of view detector and high-resolution detector after penetrating described testing sample, describedly laterally refer to the direction vertical with imaging direction;
Controller, described controller is for controlling the movement of described radiographic source and described detector; With
Computing machine, described computing machine is connected to send steering order and testing sample is carried out to image data acquiring to described controller respectively respectively with described detector with described controller.
2. X ray micro imaging system according to claim 1, it is characterized in that, also comprise: radiographic source zoom platform, described radiographic source is located on described radiographic source zoom platform, and described radiographic source zoom platform is connected with described controller and is along the longitudinal movement to control.
3. X ray micro imaging system according to claim 2, is characterized in that, described radiographic source zoom platform comprises:
The first base, is formed with two the first guide-track grooves on described the first base, described two the first guide-track grooves are along being laterally spaced apart from each other;
The first mobile platform, the bottom of described the first mobile platform is provided with the first guide rail that two edges are laterally spaced apart from each other, and described two the first guide rails are engaged in respectively in described two the first guide-track grooves correspondingly.
4. X ray micro imaging system according to claim 1, is characterized in that, also comprises:
Detector zoom platform, described detector zoom platform is connected with described controller and is along the longitudinal movement to control;
Detector switching platform, described detector switching platform is located on described detector zoom platform, described detector switching platform is connected to be controlled along transverse shifting with described controller, wherein said large field of view detector and described high-resolution detector are along being laterally located at side by side on described detector switching platform.
5. X ray micro imaging system according to claim 4, is characterized in that, described detector zoom platform comprises:
The second base, is formed with two the second guide-track grooves on described the second base, described two the second guide-track grooves are along being laterally spaced apart from each other;
The second mobile platform, the bottom of described the second mobile platform is provided with the second guide rail that two edges are laterally spaced apart from each other, and described two the second guide rails are engaged in respectively in described two the second guide-track grooves correspondingly.
6. X ray micro imaging system according to claim 5, is characterized in that, described detector switching platform comprises:
Two the 3rd guide rails, described two the 3rd guide rails are located on the upper surface of described the second mobile platform and are longitudinally spaced apart from each other;
The 3rd mobile platform, the bottom of described the 3rd mobile platform is provided with two the 3rd guide-track grooves, and wherein said two the 3rd guide rails are engaged in respectively in described two the 3rd guide-track grooves correspondingly.
7. X ray micro imaging system according to claim 1, is characterized in that, described sample stage comprises turntable and three-dimensional localization portion, and described three-dimensional localization portion is located on described turntable and described testing sample is placed in described three-dimensional localization portion.
8. X ray micro imaging system according to claim 7, is characterized in that, the horizontal section of described turntable is the polygon that circle, ellipse or limit number are greater than three.
9. X ray micro imaging system according to claim 1, is characterized in that, described controller and described sample stage be connected to control described sample stage along described in vertically move.
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| CN113325009A (en) * | 2020-02-28 | 2021-08-31 | 中国石油天然气股份有限公司 | Rock slice amplifying imaging device, system and method |
| CN111272782A (en) * | 2020-03-13 | 2020-06-12 | 彭晟 | X-ray device with self-adaptive view field and method for self-adaptively adjusting view field |
| CN114563429B (en) | 2022-03-25 | 2022-11-29 | 深圳技术大学 | Super-resolution X-ray shadow imaging system and imaging method thereof |
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