CN102707434A - Intracavity self-adaptive optical beam purification system and method - Google Patents
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Abstract
An intracavity self-adaptive optical beam purification system and method is composed of parallel light source, deformable mirror, Hartmann sensor, data acquisition and control computer, high-voltage amplifier, spectroscope, focusing lens, beam quality diagnosis camera and laser. When the light beam purification is carried out, firstly, the Hartmann sensor is used for presetting the prior surface shape of the deformable mirror, and then the random optimization control method is adopted for carrying out the light beam purification.
Description
Technical field
The present invention relates to a kind of in-chamber adaptive optical light beam cleaning system and method; Be applicable to that be main to distortion in the chamber with the static distortion of repeatability; The little resonator cavity of dynamic disturbances distortion absolute value carries out the chamber inner light beam and purifies, and belongs to adaptive optics field and field of lasers.
Background technology
In-chamber adaptive optical light beam cleaning system is distortion in a kind of real-time follow-up compensation laserresonator chamber, improves the laser works performance, makes the optimum a kind of ADAPTIVE OPTICS SYSTEMS of Laser Output Beam energy or beam quality.The CO that is applied to since ADAPTIVE OPTICS SYSTEMS success first
2The compensation of distortion is (referring to Adaptive laser resonator such as R.H.Freeman in the laser chamber; 1978; Optics Letters); Source---laserresonator from laser produces has improved near-field beam and far-field distribution form, is just obtaining broad research and application aspect the laser instruments such as gas, solid.
In the in-chamber adaptive optical light beam cleaning system, can actively change the distorting lens that face shape is played compensation distortion effect, as a high reflective cavity mirror of laserresonator.Different with traditional adaptive optics based on the control device of phase conjugation principle; Because wavefront distortion in the resonator cavity and the distortion correction amount on the distorting lens do not concern one to one that the disturbing influence of distortion and distoring mirror shape the quality and output energy of Laser Output Beam in the chamber.Therefore the control method of in-chamber adaptive optical light beam cleaning system and control theory are the research focuses always.
At present; The control method of in-chamber adaptive light beam cleaning system mainly contains two kinds; A kind ofly be optimization aim, need not the optimization formula adaptive optics control method of Wavefront sensor that a kind of in addition is to be the phase conjugation control method of correction target with distortion in the chamber with the far field beam quality.
Optimization formula adaptive optics control method distributes with a photoelectric detector (like devices such as CCD, CMOS and photodiodes) detecting laser output intensity; And with the beam quality that calculates from light distribution as optimization aim, optimize the control signal of distorting lens driver according to the random optimization control algolithm.Simple with its control system, be easy to reason such as adjustment; This method is used more extensive; The genetic algorithm optimization distorting lens actuator voltage that adopts like W.Lubeigt in 2004 is (referring to Intracavity adaptive optics optimisation of a grazing-incidence Nd:GdVO4 laser such as W.Lubeigt; 2004OSA/CLE0); People such as Ping Yang in 2007 adopt the mode coefficient of genetic algorithm optimization distorting lens; Optimization formula adaptive optics control algolithms such as (referring to people Intracavity transverse modes controlled by a genetic algorithm based on Zernike mode coefficients such as Ping Yang, 2007, Optics Express).Except the control algolithm of above introduction, in in-chamber adaptive optical light beam cleaning system, also can see the report of random optimization control algolithms such as random paralleling gradient descent algorithm, simulated annealing.
In-chamber adaptive optical control method based on the phase conjugation control technology; Be through measure distortion in the chamber or with the chamber in information before the light wave that is associated of distortion; According to wavefront distortion in the phase conjugation principle compensated cavity, realize improving the purpose of laser works state then.Patent " utilize the in-chamber adaptive optical technology to improve the device of solid state laser beam quality " (one Chinese patent application number: 200610011199.3) introduced a kind of with He-Ne light as beacon beam; Survey the gain media distortion with Hartmann sensor, utilize the adaptive optics of distortion in the distorting lens compensated cavity.
Optimization formula adaptive optics control system adopts system optimizing control; With the laser performance index be concerned about objective function as optimized Algorithm; As parameters optimization, in parameter space, search for optimization solution with iterative manner with the required control signal of distorting lens since an initial value.In the middle of in-chamber adaptive optical light beam cleaning system, the initial value of algorithm search has very big influence to convergence, speed of convergence and convergent stability.
Is main for distortion in the chamber with the static state distortion; And the distortion time stability is high, and under the little situation of dynamic disturbances distortion amplitude, chamber inner light beam cleaning system convergence back distoring mirror shape can be thought near a static face shape, to be superimposed with the disturbance than small magnitude; Because the distortion of the static state in the chamber has better repeatability; So, when doing chamber inner light beam purification closed-loop control at every turn, the static face shape basically identical of distorting lens; Therefore need not to begin search from distorting lens driver no-voltage, but can begin by magnitude of voltage when last closed loop finishes as conventional search methods.This method has extraordinary linear dependence at distorting lens driver path increment and drive signal, and minute surface is not set up under the prerequisite with the bigger variation of environment temperature generation.But; For some distorting lens such as bimorph deformable mirror; Because the creep effect and the face shape thermal stability of driver are relatively poor, preset voltage can not obtain required distoring mirror shape, and the initial value of algorithm search no longer is from optimum face shape beginning; Magnitude of voltage when therefore presetting last closed loop and finishing, there is bigger uncertainty in the laser system duty.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome existing random optimization control method from the weak point of zero initial value search with the preset voltage method; A kind of distorting lens priori face shape of presetting rapidly and accurately is provided; For providing the chamber inner light beam of an optimum initial value, the random optimization control algolithm purifies control method; This method can effectively be utilized priori data, makes the chamber inner light beam purify shortening greatly consuming time, improves the control stabilization degree of chamber inner light beam cleaning system.
Technical solution of the present invention is: a kind of in-chamber adaptive optical light beam cleaning system; As shown in Figure 1; Comprise: source of parallel light 1, distorting lens 2, Hartmann sensor 3, data acquisition and control computer 4, high-voltage amplifier 5, spectroscope 6, condenser lens 7, beam quality diagnosis camera 8 and laser instrument (9), said distorting lens 2 is as the back mirror of laser instrument 9 resonator cavitys; The collimation parallel beam that source of parallel light 1 is sent, the incident distorting lens 2 at a certain angle, and the parallel beam that source of parallel light 1 is sent covers the hot spot of laser instrument 9 excited radiation lights on distorting lens 2 minute surfaces; Parallel beam after distorting lens 2 reflections is received by Hartmann sensor 3; The light beam that laser instrument 9 sends is through spectroscope 6 beam splitting, and a branch of is to export as laser; Another bundle focuses on through condenser lens 7 and gets into beam quality diagnosis camera 8, and data acquisition receives Hartmann sensor 3 with control computer 4 and links to each other with the signal of beam quality diagnosis camera 8 and with high-voltage amplifier 5; When carrying out the light beam purification; Data acquisition and control computer 4 utilize Hartmann sensor 3 on distorting lens 2, to preset priori face shape; The beam quality of measuring according to beam quality diagnosis camera 8 then; Utilize the controlled output voltage of random optimization control method, thereby play the purpose of optimizing laser instrument 9 output beam qualities.
Said random optimization control algolithm adopts random paralleling gradient descent algorithm, genetic algorithm, climbing method, ant group algorithm or simulated annealing.
A kind of in-chamber adaptive optical light beam purification method, performing step is following:
The first step is demarcated Hartmann sensor 3, and before laser instrument 9 starts, data acquisition and control computer 4 are gathered the light spot image data of multiframe Hartmann sensor 3 outputs, asks average back as initial calibration data, according to formula to the hot spot data
Calculate the initial centroid position coordinate of the hot spot [X in sub-aperture
C0, Y
C0], and construct the hot spot initial slope matrix G that the corresponding facula deviation amount of each sub-aperture is formed
0I wherein
iBe i signal intensity that pixel-by-pixel basis is received in certain sub-aperture in the Hartmann sensor 3, X
iAnd Y
iIt is respectively the coordinate of i pixel;
Second step, experiment measuring distorting lens 2 voltages-slope response matrix R
Xy, J driver to distorting lens 2 applies unit voltage and utilizes Hartmann sensor 3 record hot spot side-play amount matrixes, the voltage of structural deformation mirror 2-slope response matrix R simultaneously successively
Xy, and find the solution R
XyGeneralized inverse matrix
The 3rd step, preset distorting lens priori face shape, the facula deviation moment matrix that distorting lens 2 priori face shapes are corresponding is G, when carrying out the light beam purification first, G=G
0, the voltage vector that distorting lens 2 is applied does
The 4th step; Adopt the random optimization control method to optimize the far field beam quality; Data acquisition and the light distribution data that control computer 4 receiving beam quality diagnosis cameras 8 collect are calculated beam quality, based on the control voltage of random optimization control method real-time update distorting lens 2 each drivers; Follow the tracks of dynamic distortion in compensation distorting lens 2 chambeies, make laser instrument 9 obtain diffraction limited beam output;
The 5th step; Upgrade facula deviation moment matrix G, when the 4th step was optimized laser instrument 9 far field beam qualities, the Beam Wave-Front slope that data acquisition and control computer 4 real time record Hartmann sensors 3 are measured; Hot spot side-play amount matrix G ' when record far field beam quality is optimum; This chamber inner light beam makes the renewal of G=G ' completion facula deviation moment matrix before purifying and finishing, and begins to carry out from " the 3rd step " when the chamber inner light beam purifies once more.
The present invention's advantage compared with prior art is:
(1) the present invention adopts the facula mass center deviation data of Hartmann sensor output to weigh the relative variation of distoring mirror shape; And need not accurately to try to achieve the face shape of distorting lens minute surface; This apparatus structure is simple, and anti-environmental disturbances ability is strong, and is less demanding to the control system computing velocity.
(2) the present invention presets the optimum priori face shape of distorting lens through Hartmann sensor; Overcome existing random optimization control method from the weak point of zero initial value search with the preset voltage method; A kind of optimum priori face of distorting lens shape of presetting rapidly and accurately is provided, purifies control method for the random optimization control algolithm provides the chamber inner light beam of an optimum initial value, this method can effectively be utilized priori data; Make the chamber inner light beam purify shortening greatly consuming time, improve the degree of stability that the chamber inner light beam purifies.
Description of drawings
Fig. 1 light path synoptic diagram of the present invention;
Fig. 2 embodiment of the invention light path synoptic diagram;
Position of components synoptic diagram in the resonator cavity to be clean chamber in Fig. 3 embodiment of the invention;
Among Fig. 4 the present invention on distorting lens driver distribution plan and the minute surface basic mode hot spot with survey facula position figure.
Embodiment
As shown in Figure 2; The light path synoptic diagram of a kind of embodiment of in-chamber adaptive optical light beam cleaning system; The source of parallel light of forming by 650nm semiconductor laser 1.1, microcobjective 1.2, pin hole 1.3, collimation lens 1.4 1; Distorting lens 2, the Hartmann sensor 3 that the bundle device that contracts 3.1, microlens array 3.2, camera 3.3 are formed, data acquisition and control computer 4, high-voltage amplifier 5, spectroscope 6, condenser lens 7, beam quality diagnosis camera 8, laser instrument 9 are formed.
The source of parallel light that 650nm semiconductor laser 1.1, microcobjective 1.2, pin hole 1.3 and collimation lens 1.4 are formed is sent the uniform parallel beam of light intensity with 22 ° of incident distorting lenss 2.The bundle device that contracts 3.1 is positioned at distorting lens about 300 millimeters places afterwards; Bore is 50 millimeters; With coaxial through the 650nm parallel beam after the distorting lens reflection; Playing contracts 30 millimeters detecting light beams restraints the bore that is complementary with microlens array 3.2, makes light beam behind the bundle that contracts get into microlens array 3.2 fully and does not exceed the target surface of microlens array 3.2 and camera 3.3.Camera 3.3 links to each other with control computer 4 with data acquisition through capture card.
The composition of laser instrument 9 is as shown in Figure 3, is followed successively by 2 two lens of 37 unit bimorph deformable mirrors, aperture, Nd:YAG gain media, output coupling mirror from left to right.Distorting lens 2 adopts 37 unit bimorph deformable mirrors of Photoelectric Technology Inst., Chinese Academy of Sciences's development; The drive electrode of distorting lens 2 distributes as shown in Figure 4; After the state adjustment of laser instrument 9 and directional light was accomplished, the hot spot on distorting lens 2 minute surfaces distributed as shown in Figure 4, and the directional light of 650nm is because certain angle incident distorting lens 2; Ovalize on minute surface (solid black lines is oval), and cover the hot spot (black dotted lines oval) of laser instrument 9 basic mode light beams on distorting lens fully.
Light beam that laser instrument 9 sends is divided into two parts through spectroscope 6, a branch ofly is the output as laser instrument of the high power portion that sees through, and the ingoing power meter carries out the measurement of power; A branch of partial low-power for reflection has identical light distribution and PHASE DISTRIBUTION with high-power light beam, therefore can weigh the beam quality of high power-beam with low power optical beam.In order effectively to utilize the space of experiment optical table; Using a high reflective mirror 11 that the light beam of partial low-power is turned back, to incide focal length be in 300 millimeters the condenser lens 7; Beam quality diagnosis camera 8 is positioned on the focal plane of condenser lens 7, and beam quality diagnosis camera 8 is MV-D1024E CMOS cameras that photon focus company produces.
The data collecting card that links to each other with camera 3.3 and beam quality diagnosis camera 8 is respectively arranged on the mainboard of data acquisition and control computer 4, receive the data that camera 3.3 and beam quality are diagnosed camera 8; The D/A that data acquisition and control computer 4 usefulness are 3 16 tunnel sticks into the digital-to-analogue of row control voltage to be changeed, and links to each other with high-voltage amplifier 5.High-voltage amplifier 5 links to each other with distorting lens 2 through the distorting lens data line after the analog voltage signal that receives is amplified.
The face shape of distorting lens 2 is with corresponding one by one through the 650nm directional light wavefront distortion of inciding after distorting lens 2 reflection before the microlens array 3.2; Also with corresponding, so can use the side-play amount of spot array on the camera 3.3 to represent the relative variation of distorting lens 2 minute surface face shapes through microlens array 3.2 beam split and the facula deviation that focuses on camera 3.3 target surfaces.The relative variation of facula deviation amount needs a contrast benchmark; The primary face shape of selecting distorting lens in the experiment for use is benchmark as a reference; Microlens array 3.2 and the Hartmann sensor 3 that camera 3.3 is formed are demarcated, to confirm the initial hot spot side-play amount matrix (being also referred to as initial calibration data) of distorting lens.The driver of distorting lens 2 making alive not when carrying out initial alignment; It on the camera target surface hot spot dot matrix that is evenly distributed; The straight line of level and numerical value is divided into a plurality of little square region with camera 3.3 target surfaces, and each square region is corresponding with a sub-lens of microlens array 3.2; Then, gather multiframe light spot image data,
Ask average conduct initially to calibrate data, again according to formula
Calculate the facula mass center position [X in each sub-aperture
C0, Y
C0] and the hot spot initial offset moment matrix G that forms of the corresponding facula mass center side-play amount of each sub-aperture
0=[X
0, Y
0], I in the above relational expression
iBe i signal intensity that pixel-by-pixel basis is received in certain sub regions, X
iAnd Y
iIt is respectively the coordinate of i pixel in this subregion.
In ADAPTIVE OPTICS SYSTEMS, drive continuous surface deformable mirror for separation, directly the slope method is the most simple and effective control method.Adopt direct slope method that distorting lens 2 minute surfaces are preset in this embodiment.Directly the basic theories of slope method is described below, and establishing distorting lens has n driver, and corresponding facula deviation amount response is R to j driver to Hartmann sensor 3 detectors l sub-aperture
Xj(l) and R
Yj(l); The pairing facula deviation moment matrix of target face shape that presets distorting lens is G=[G
x, G
y], the control voltage that the j driver will load is V
jIf breathe out Hartmann sensor 3 the m sub-aperture is arranged, the zone of l sub-aperture is S
lEach driver is a linear superposition to the influence of hot spot side-play amount on the Hartmann sensor 3 sub-apertures, so there is the average gradient in the Hartmann sensor 3 l sub-aperture to be:
Following formula can be expressed as matrix form:
ε is a dimensionless, R
XyBe voltage-facula deviation amount response matrix.So get the minimum load voltage is
is the pseudo-inverse matrix of matrix R.Before carrying out closed-loop control, successively distorting lens 2 each driver are applied unit voltage, the facula deviation amount deducts initial hot spot side-play amount matrix G in the zone that each lenticule is corresponding on the record Hartmann sensor 3
0, construct voltage-facula deviation amount response matrix R, and calculate the pseudo inverse matrix of R
And be stored in the internal memory of data acquisition and control computer 4, for computing time is saved in real-time closed-loop control.
When carrying out chamber inner light beam purification, data acquisition and control computer 4 need utilize Hartmann sensor 3 to preset the priori face shape of distorting lens.Suppose the pairing facula deviation moment matrix of the priori face shape G=[G of distorting lens
x, G
y] (the light beam cleaning system build and finish after G=G during closed loop first
0), the voltage vector that distorting lens is applied does
Owing to reason such as the creep effect of distorting lens 2 drivers and minute surface face shape thermal stability be relatively poor; For the first time the distorting lens driver is applied voltage control signal with direct slope method; 2 shape distance objectives of distorting lens surface form deviation is bigger; In the embodiment of the present invention, utilize direct slope method to carry out iteration control distorting lens minute surface 3 times.
In the embodiment of the present invention; Utilize Hartmann sensor that 3 distorting lens driving voltages have been carried out iteration three times, distoring mirror shape is almost approached priori face shape, at this moment; Data acquisition and control computer 4 no longer with the facula deviation amount as the FEEDBACK CONTROL index; Begin the data that beam quality diagnosis camera 8 collects are handled, calculate the far field beam beam quality, in the embodiment of the invention with power (PIB) in the bucket of light beam as the far field beam quality.The gray-scale value I that far field beam light intensity and camera are measured (x, y) corresponding.Coordinate (the x of intensity peak
Max, y
Max) be I (x, the y) coordinate of gray-scale value maximum point, the bucket radius be r=15 pixel, the light beam gross energy:
E＝∑∑I(x,y)
Energy in the bucket:
E
PIB＝∑∑I(x,y) (x-x
max)
2+(y-y
max)
2＜r
2；
Power P IB=E in the bucket
PIB, then with the controlled target of PIB, utilize each driver control voltage of random paralleling gradient descent algorithm real-time update distorting lens as the random paralleling gradient descent algorithm, follow the tracks of dynamical distortion in the compensated cavity, make laser instrument keep optimum duty.The implementation procedure of random paralleling descent algorithm is that the hypothesis control system does through k-1 iteration time back distorting lens driving voltage
When the k time iteration, formation voltage random perturbation vector
System performance evaluation index change amount did after the distorting lens driver applied positive disturbance
After the distorting lens driver applied negative disturbance
System performance evaluation index change amount does
So during the k time iteration, the voltage that is applied on distorting lens 2 drivers is u
k=u
K-1+ γ δ u
kδ J
kFor the first time during closed loop, the voltage vector that distorting lens 2 is applied does in system
Because G=G during closed loop first
0In fact distorting lens 2 is applied no-voltage, adopt the random optimization control algolithm that the laser remote field beam quality is controlled then, control procedure is equivalent to the traditional random optimal control method, and beam system expends and reaches 12 seconds, just converge to the basic mode pattern.
When laser instrument 9 far field beam qualities are optimized; Data acquisition and control computer 4 are measured the pairing facula deviation moment matrix of distoring mirror shape in real time; Facula deviation moment matrix G ' when record far field beam quality is optimum; Before control system withdraws from, make G=G ', accomplish the renewal of facula deviation moment matrix.
Method of the present invention can effectively be utilized priori data to carry out the chamber inner light beam and purify; But system does not have priori data when closed loop first; Still the primary face shape from distorting lens begins to search for, and therefore can not show due advantage, after the priori data first time has been arranged; Control system can make full use of the priori data of last closed loop, and the system closed-loop speed of making is accelerated greatly.
After the priori data of closed-loop control has for the first time been arranged, carry out the chamber inner light beam purification experiment second time below, utilize the validity and the raising speed of convergence actual effect of the present invention of priori data with checking the present invention.Voltage on the distorting lens driver makes zero; The voltage vector that distorting lens is applied utilizes Hartmann sensor that the distorting lens driving voltage has been carried out iteration three times for
; Distoring mirror shape is almost approached the optimum face shape of target; Then according to each driver control voltage of random paralleling gradient descent algorithm real-time update distorting lens; Control system only expends that 0.7s just converges to the basic mode pattern, than having reduced 11.3s with the common 12s consuming time of control method for improving at random.
Claims (3)
1. in-chamber adaptive optical light beam cleaning system; It is characterized in that comprising: source of parallel light (1), distorting lens (2), Hartmann sensor (3), data acquisition and control computer (4), high-voltage amplifier (5), spectroscope (6), condenser lens (7), beam quality diagnosis camera (8) and laser instrument (9), said distorting lens (2) is as the back mirror of laser instrument (9) resonator cavity; The collimation parallel beam that source of parallel light (1) is sent, the parallel beam that incident distorting lens (2), and source of parallel light at a certain angle (1) sends covers the hot spot of laser instrument (9) excited radiation light on distorting lens (2) minute surface; Parallel beam after distorting lens (2) reflection is received by Hartmann sensor (3); The light beam that laser instrument (9) sends is through spectroscope (6) beam splitting, and a branch of is to export as laser; Another bundle focuses on through condenser lens (7) and gets into beam quality diagnosis camera (8), and data acquisition receives Hartmann sensor (3) with control computer (4) and links to each other with the signal of beam quality diagnosis camera (8) and with high-voltage amplifier (5); When carrying out the light beam purification; Data acquisition and control computer (4) utilize Hartmann sensor (3) on distorting lens (2), to preset priori face shape; The beam quality of measuring according to beam quality diagnosis camera (8) then; Utilize the controlled output voltage of random optimization control method, thereby play the purpose of optimizing laser instrument (9) output beam quality.
2. a kind of in-chamber adaptive optical light beam cleaning system according to claim 1 is characterized in that: said random optimization control algolithm adopts random paralleling gradient descent algorithm, genetic algorithm, climbing method, ant group algorithm or simulated annealing.
3. in-chamber adaptive optical light beam purification method is characterized in that performing step is following:
The first step is demarcated Hartmann sensor (3), and before laser instrument (9) start, data acquisition and control computer (4) are gathered the light spot image data of multiframe Hartmann sensor (3) output, asks average back as initial calibration data, according to formula to the hot spot data
Calculate the initial centroid position coordinate of the hot spot [X in sub-aperture
C0, Y
C0], and construct the hot spot initial slope matrix G that the corresponding facula deviation amount of each sub-aperture is formed
0I wherein
iBe i signal intensity that pixel-by-pixel basis is received in certain sub-aperture in the Hartmann sensor (3), X
uAnd Y
iIt is respectively the coordinate of i pixel;
Second step, experiment measuring distorting lens (2) voltage-slope response matrix R
Xy, J driver to distorting lens (2) applies unit voltage and utilizes Hartmann sensor (3) record hot spot side-play amount matrix, the voltage of structural deformation mirror (2)-slope response matrix R simultaneously successively
Xy, and find the solution R
XyGeneralized inverse matrix
The 3rd step, preset distorting lens priori face shape, the facula deviation moment matrix that distorting lens (2) priori face shape is corresponding is G, when carrying out the light beam purification first, G=G
0, the voltage vector that distorting lens (2) is applied does
The 4th step; Adopt the random optimization control method to optimize the far field beam quality; Data acquisition and the light distribution data that control computer (4) receiving beam quality diagnosis camera (8) collects are calculated beam quality, based on the control voltage of each driver of random optimization control method real-time update distorting lens (2); Follow the tracks of dynamic distortion in compensation distorting lens (2) chamber, make laser instrument (9) obtain diffraction limited beam output;
The 5th step; Upgrade facula deviation moment matrix G, when the 4th step was optimized laser instrument (9) far field beam quality, the Beam Wave-Front slope that data acquisition and control computer (4) real time record Hartmann sensor (3) is measured; Hot spot side-play amount matrix G ' when record far field beam quality is optimum; This chamber inner light beam makes the renewal of G=G ' completion facula deviation moment matrix before purifying and finishing, and begins to carry out from " the 3rd step " when the chamber inner light beam purifies once more.
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| CN102980743A (en) * | 2012-10-26 | 2013-03-20 | 中国人民解放军国防科学技术大学 | Full light path aberration correction system and full light path aberration correction method based on double Hartmann sensors |
| CN103217223A (en) * | 2013-03-22 | 2013-07-24 | 中国科学院光电技术研究所 | Method for improving measurement precision of transfer matrix of adaptive optical system |
| CN104377540A (en) * | 2014-12-14 | 2015-02-25 | 中国科学技术大学 | Resonant cavity system with automatic output power optimization function for high-power solid laser device |
| CN113608359A (en) * | 2021-08-19 | 2021-11-05 | 中国科学院光电技术研究所 | Mode-adjustable intracavity vortex light beam generation device |
| CN114859577A (en) * | 2022-07-07 | 2022-08-05 | 浙江大学 | Self-adaptive optical correction system based on biological tissue imaging |
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| CN103217223B (en) * | 2013-03-22 | 2015-05-20 | 中国科学院光电技术研究所 | Method for improving measurement precision of transfer matrix of adaptive optical system |
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| CN113608359B (en) * | 2021-08-19 | 2023-08-11 | 中国科学院光电技术研究所 | Mode-adjustable intracavity vortex beam generating device |
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