CN102703967A - Thermocouple device for polycrystal ingot furnace - Google Patents
Thermocouple device for polycrystal ingot furnace Download PDFInfo
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- CN102703967A CN102703967A CN2012101816696A CN201210181669A CN102703967A CN 102703967 A CN102703967 A CN 102703967A CN 2012101816696 A CN2012101816696 A CN 2012101816696A CN 201210181669 A CN201210181669 A CN 201210181669A CN 102703967 A CN102703967 A CN 102703967A
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- thermopair
- thermocouple
- tube
- vacuum
- joint
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Abstract
The invention discloses a thermocouple device for a polycrystal ingot furnace. The thermocouple device is a constituent part of a polycrystal ingot furnace temperature control system, and comprises a thermocouple cabin, wherein the thermocouple cabin comprises a reducing T-joint, a thermocouple joint, an aluminum oxide ceramic tube and a thermocouple, wherein the thermocouple joint is hermetically fixed at one end of the reducing T-joint; the aluminum oxide ceramic tube is hermetically fixed in the reducing T-joint through a ceramic tube fixing base; the thermocouple is fixed in the aluminum oxide ceramic tube through the thermocouple fixing base, and is connected with the thermocouple joint; the reducing T-joint is connected with a pipeline branch tube fitting; the pipeline branch tube fitting is connected with a three-way tube through a vacuum hose; the three-way tube is connected with a vacuum cutoff valve; the vacuum cutoff valve is connected with a vacuum unit; and a vacuum deflation valve is connected to the pipeline branch tube fitting. Due to the adoption of the device disclosed by the invention, the service life of the thermocouple can be prolonged greatly, and a hearth is protected when the aluminum oxide ceramic tube is fractured and leaks air accidentally.
Description
Technical field
The present invention relates to a kind of thermocouple assembly, be specifically related to a kind of polycrystalline ingot furnace thermocouple assembly.
Background technology
Polycrystalline silicon ingot or purifying furnace is the equipment that is used for the casting large-scale polycrystal silicon ingot, and it is with passing through the directional freeze condensation-crystallization after the silicon material high-temperature fusion, making it form the consistent silicon ingot in crystal orientation, thereby reach the requirement of manufacture of solar cells to the silicon chip quality.
The main production process of polycrystalline silicon ingot casting is: be placed on the oriented solidified blocks after packing into polycrystalline silicon material in the quartz crucible that is sprayed with coating, close burner hearth final vacuum system and start, burner hearth is evacuated to base vacuum, then heating.After treating that the silicon material melts fully, heat-insulation cage slowly up promotes, and furnace temperature slowly descends, and what make a level of the interior formation of stove can make silicon material crystalline temperature front, and this interface moves up slowly.This temperature front makes the silicon liquid in the crucible begin to solidify from the bottom, crystal from the melt bottom to grown on top.After long brilliant the completion, silicon ingot is annealed, come out of the stove after the cooling and promptly accomplish whole ingot production process.
Most important in the ingot production process is exactly the control of long brilliant speed, and the control of furnace temperature has played conclusive effect in numerous factors of the long brilliant speed of influence.Furnace temperature is that temperature control system is made up of thermopair, PLC, power controller, heating unit etc. again by temperature controlling system control.Thermopair is a key components of measuring furnace temperature, is the basis of whole temperature controlling system.
Nearly all polycrystalline silicon ingot casting furnace electric thermo-couple all is to adopt import parts in the current actual production, but its mean lifetime also has only half a year, and the maintenance cost of equipment is higher.
Summary of the invention
The present invention is intended to the short defective in work-ing life of the existing polycrystalline ingot furnace thermopair of customer service, proposes a kind ofly can prolong the polycrystalline ingot furnace thermopair polycrystalline ingot furnace thermocouple assembly in work-ing life.
In order to achieve the above object, technical scheme provided by the invention is:
Said polycrystalline ingot furnace thermocouple assembly is the integral part of polycrystalline ingot furnace temperature control system, and this thermocouple assembly comprises the thermopair storehouse; Said thermopair storehouse comprises reducing tee 2, and sealing and fixing is fixed on the alumina ceramic tube 6 in the reducing tee 2 in the thermal cross 1 of reducing tee 2 one ends through porcelain tube permanent seat 5, is fixed on the thermopair 4 in the alumina ceramic tube 6 through thermopair permanent seat 3; Wherein, thermopair 4 is connected with thermal cross 1; Said reducing tee 2 is connected with line branching pipe fitting 8; Line branching pipe fitting 8 is connected with Y-tube 11 through vacuum hose 10; Y-tube 11 is connected with vaccum stop valve 13 by the PLC of polycrystalline ingot furnace temperature control system control, and vaccum stop valve 13 is connected with the vacuum unit; Be connected to the vacuum deflation valve 9 by the PLC control of polycrystalline ingot furnace temperature control system on the said line branching pipe fitting 8, vacant interface can connect other thermopair storehouse on the line branching pipe fitting 8; Be connected to vacuum gauge 12 on the said Y-tube 11;
Wherein, said thermopair 4 is a R type thermopair; Said alumina ceramic tube 6 overcoats have zirconium oxide porcelain pipe 7; Said line branching pipe fitting 8 is a four-way pipe; Automatic deflation when vacuum deflation valve 9 runs to the high temperature dot of setting at ingot casting.
Below in conjunction with accompanying drawing and principle of design invention and advantage thereof are further specified:
Referring to Fig. 1, thermopair 4 is in the enclosed housing that is made up of thermal cross 1, reducing tee 2, porcelain tube permanent seat 5 and alumina ceramic tube 6 among the present invention; When detecting the thermopair program final vacuum unit that brings into operation automatically, ingot furnace starts working; Said vaccum stop valve 13 is opened; With the state that is evacuated in the thermopair storehouse; Vaccum stop valve 13 is closed then, detects the variation of thermopair storehouse internal pressure through vacuum gauge 12 and judges whether the thermopair storehouse seals; Detection finishes the back through putting into air in the said vacuum deflation valve 9 thermoelectric couple storehouses; Make in the thermopair storehouse and reach normal atmosphere; Burner hearth begins heating then; In heat-processed, open vacuum deflation valve 9 once more in several specific process point, make in the thermopair storehouse to be under the atmospheric environment all the time by procedure auto-control.Wherein, vaccum stop valve 13, vacuum deflation valve 9 are all controlled by PLC automatically, and the control thermopair is vacuum state or atmospheric condition in the storehouse.
Among the present invention, said thermopair 4 is a R type thermopair, and this type thermopair is adapted to the oxidizing atmosphere environment most, can use in a vacuum but is not suitable for the reducing atmosphere environment.After the polycrystalline casting ingot process brings into operation, owing to the air penetrability of the said alumina ceramic tube that raises along with furnace temperature is also increasing, thermopair storehouse pressure is reduced, thermopair is worked under negative pressure or vacuum environment; And along with thermopair storehouse internal pressure reduces, reductibility, corrosive gases in the burner hearth also infiltrate through the thermopair storehouse more easily, make and change the reducing atmosphere environment in the thermopair storehouse into, and said thermopair is least being worked in the adapt circumstance, and the life-span must shorten.Therefore the present invention is at several particular points of program run, controls in the said vacuum deflation valve thermoelectric couple storehouse through PLC and puts into air, makes that environment becomes atmospheric environment again in thermopair the storehouse in, and said thermopair is in the Working environment of the best.
Use device of the present invention significantly to prolong the work-ing life of thermopair, and make and when the unexpected fracture of said alumina ceramic tube, gas leakage, give the burner hearth protection.
Description of drawings
Fig. 1 is the structural representation of an embodiment of the present invention.
Among the figure: 1, thermal cross; 2, reducing tee; 3, thermopair permanent seat; 4, thermopair; 5, porcelain tube permanent seat; 6, alumina ceramic tube; 7, zirconium white porcelain tube; 8, line branching pipe fitting; 9, vacuum deflation valve; 10, vacuum hose; 11, Y-tube; 12, vacuum gauge; 13, vaccum stop valve.
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Embodiment
Embodiment 1
As shown in Figure 1; Said thermopair storehouse comprises reducing tee 2; Sealing and fixing is fixed on the alumina ceramic tube 6 in the reducing tee 2 in the thermal cross 1 of reducing tee 2 one ends through porcelain tube permanent seat 5, is fixed on the thermopair 4 in the alumina ceramic tube 6 through thermopair permanent seat 3; Wherein, thermopair 4 is connected with thermal cross 1; Said reducing tee 2 is connected with line branching pipe fitting 8, and line branching pipe fitting 8 is connected with Y-tube 11 through vacuum hose 10, and Y-tube 11 is connected with vaccum stop valve 13, and the B interface of vaccum stop valve 13 is connected with the vacuum unit; Be connected to vacuum deflation valve 9 on the said line branching pipe fitting 8; Wherein, line branching pipe fitting 8 is a four-way pipe, and A interface vacant on it connects other thermopair storehouse; Be connected to vacuum gauge 12 on the said Y-tube 11.
Claims (4)
1. a polycrystalline ingot furnace thermocouple assembly is characterized in that said thermocouple assembly comprises the thermopair storehouse; Said thermopair storehouse comprises reducing tee (2); Sealing and fixing is in the thermal cross (1) of reducing tee (2) one ends; Through the alumina ceramic tube (6) of porcelain tube permanent seat (5) sealing and fixing in reducing tee (2), be fixed on the thermopair (4) in the alumina ceramic tube (6) through thermopair permanent seat (3); Said thermopair (4) is connected with thermal cross (1); Said reducing tee (2) is connected with line branching pipe fitting (8); Line branching pipe fitting (8) is connected with Y-tube (11) through vacuum hose (10); Y-tube (11) is connected with vaccum stop valve (13), and vaccum stop valve (13) is connected with the vacuum unit; Be connected to vacuum deflation valve (9) on the said line branching pipe fitting (8), line branching pipe fitting (8) is gone up vacant interface and is connected other thermopair storehouse; Be connected to vacuum gauge (12) on the said Y-tube (11).
2. thermocouple assembly as claimed in claim 1 is characterized in that, said thermopair (4) is a R type thermopair.
3. thermocouple assembly as claimed in claim 1 is characterized in that, said alumina ceramic tube (6) overcoat has zirconium oxide porcelain pipe (7).
4. thermocouple assembly as claimed in claim 1 is characterized in that, said line branching pipe fitting (8) is a four-way pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101816696A CN102703967A (en) | 2012-06-05 | 2012-06-05 | Thermocouple device for polycrystal ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101816696A CN102703967A (en) | 2012-06-05 | 2012-06-05 | Thermocouple device for polycrystal ingot furnace |
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| Publication Number | Publication Date |
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| CN102703967A true CN102703967A (en) | 2012-10-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2012101816696A Pending CN102703967A (en) | 2012-06-05 | 2012-06-05 | Thermocouple device for polycrystal ingot furnace |
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| CN (1) | CN102703967A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116026487A (en) * | 2023-03-31 | 2023-04-28 | 内蒙古晶环电子材料有限公司 | Liquid level temperature measuring method, liquid level temperature measuring device, computer equipment and storage medium |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1280189C (en) * | 1986-03-10 | 1991-02-12 | General Electric Company | Apparatus for monitoring temperatures of implements during brazing |
| WO1993010427A1 (en) * | 1991-11-22 | 1993-05-27 | Siemens Aktiengesellschaft | Vacuum-tight probe for a thermal element |
| JPH07174640A (en) * | 1993-12-16 | 1995-07-14 | Kawasou Denki Kogyo Kk | Manufacture of thermocouple device |
| US5806980A (en) * | 1996-09-11 | 1998-09-15 | Novellus Systems, Inc. | Methods and apparatus for measuring temperatures at high potential |
| CN2786581Y (en) * | 2005-04-05 | 2006-06-07 | 谭铁桥 | Thermocouple with outside arranged gas resource protector |
| CN201672982U (en) * | 2010-05-04 | 2010-12-15 | 武汉钢铁(集团)公司 | Gas-filled protection thermocouple |
| CN101942697A (en) * | 2010-08-23 | 2011-01-12 | 清华大学 | Evacuating device of temperature thermocouple casing of photovoltaic polycrystalline silicon ingot casting furnace |
| CN201731951U (en) * | 2010-05-25 | 2011-02-02 | 西安电炉研究所有限公司 | Tungsten-rhenium thermoelectric couple for vacuum furnace |
| CN201793815U (en) * | 2010-08-23 | 2011-04-13 | 清华大学 | Temperature thermocouple sleeve evacuating device of photovoltaic polycrystalline silicon ingot furnace |
| CN202643882U (en) * | 2012-06-05 | 2013-01-02 | 湖南红太阳光电科技有限公司 | Polycrystalline ingot casting furnace thermocouple device |
-
2012
- 2012-06-05 CN CN2012101816696A patent/CN102703967A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1280189C (en) * | 1986-03-10 | 1991-02-12 | General Electric Company | Apparatus for monitoring temperatures of implements during brazing |
| WO1993010427A1 (en) * | 1991-11-22 | 1993-05-27 | Siemens Aktiengesellschaft | Vacuum-tight probe for a thermal element |
| JPH07174640A (en) * | 1993-12-16 | 1995-07-14 | Kawasou Denki Kogyo Kk | Manufacture of thermocouple device |
| US5806980A (en) * | 1996-09-11 | 1998-09-15 | Novellus Systems, Inc. | Methods and apparatus for measuring temperatures at high potential |
| CN2786581Y (en) * | 2005-04-05 | 2006-06-07 | 谭铁桥 | Thermocouple with outside arranged gas resource protector |
| CN201672982U (en) * | 2010-05-04 | 2010-12-15 | 武汉钢铁(集团)公司 | Gas-filled protection thermocouple |
| CN201731951U (en) * | 2010-05-25 | 2011-02-02 | 西安电炉研究所有限公司 | Tungsten-rhenium thermoelectric couple for vacuum furnace |
| CN101942697A (en) * | 2010-08-23 | 2011-01-12 | 清华大学 | Evacuating device of temperature thermocouple casing of photovoltaic polycrystalline silicon ingot casting furnace |
| CN201793815U (en) * | 2010-08-23 | 2011-04-13 | 清华大学 | Temperature thermocouple sleeve evacuating device of photovoltaic polycrystalline silicon ingot furnace |
| CN202643882U (en) * | 2012-06-05 | 2013-01-02 | 湖南红太阳光电科技有限公司 | Polycrystalline ingot casting furnace thermocouple device |
Non-Patent Citations (1)
| Title |
|---|
| 李国纲等: "铂铑热电偶材料的生产及应用", 《贵金属》, vol. 29, no. 01, 15 February 2008 (2008-02-15) * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116026487A (en) * | 2023-03-31 | 2023-04-28 | 内蒙古晶环电子材料有限公司 | Liquid level temperature measuring method, liquid level temperature measuring device, computer equipment and storage medium |
| CN116026487B (en) * | 2023-03-31 | 2023-08-08 | 内蒙古晶环电子材料有限公司 | Liquid level temperature measuring method, liquid level temperature measuring device, computer equipment and storage medium |
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Application publication date: 20121003 |