CN102692657A - Multi-layer coating-film new technology of optical part - Google Patents
Multi-layer coating-film new technology of optical part Download PDFInfo
- Publication number
- CN102692657A CN102692657A CN2011100733583A CN201110073358A CN102692657A CN 102692657 A CN102692657 A CN 102692657A CN 2011100733583 A CN2011100733583 A CN 2011100733583A CN 201110073358 A CN201110073358 A CN 201110073358A CN 102692657 A CN102692657 A CN 102692657A
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- China
- Prior art keywords
- layer
- new technology
- coating
- multicoating
- optical element
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Abstract
The invention relates to a multi-layer coating-film new technology of an optical part. The new technology comprises a vacuum-pumping process and a coating-film process. The new technology is characterized in that: a coating of the coating-film process comprises six layers, wherein a first layer is H4, a second layer is Al2O3, a third layer is H4, a fourth layer is Al2O3, a fifth layer is H4 and a sixth layer is MgF2. The new technology of the invention has the following advantages that: because of using the H4, the Al2O3 and the MgF2 as a coating material, only six layers can achieve a wide wave field minus reflection requirement; cost can be saved and a minus reflection effect can be increased.
Description
Technical field
The present invention relates to a kind of multicoating new technology of optical element coating process, especially optical mirror slip.
Background technology
The coating of optical lens conventional process comprises and vacuumizes operation and filming process that wherein in order to reach the antireflection requirement, plated film is used MgF always
2And H
4Be plating material, one deck MgF
2One deck H
4Stack like this is in order to reach wide wave zone antireflection requirement (400-700nm R≤0.4%; 700-750nm R≤1.3%), will plate the 7-9 layer usually, cost is high, and anti-reflective effect is also undesirable.
Summary of the invention
To above-mentioned existing problems, the present invention provides a kind of optical element multicoating new technology, and the change through plating material and coating reaches the saving cost, improves the purpose of anti-reflective effect.
The present invention takes following technical scheme, and a kind of optical element multicoating new technology comprises vacuumizing operation and filming process, it is characterized in that: the coating of said filming process is six layers, and ground floor is H
4, the second layer is AL
2O
3, the 3rd layer is H
4, the 4th layer is AL
2O
3, layer 5 is H
4, layer 6 is MgF
2
Advantage of the present invention is: owing to adopt H
4, AL
2O
3And MgF
2For the plating material, just can reach the antireflection requirement so only need 6 layers, practiced thrift cost, improved anti-reflective effect.
Embodiment
Below in conjunction with embodiment the present invention is described further.
Embodiment one
A kind of optical element multicoating new technology comprises vacuumizing operation and filming process, it is characterized in that: the coating of said filming process is six layers, and ground floor is H
4, the second layer is AL
2O
3, the 3rd layer is H
4, the 4th layer is AL
2O
3, layer 5 is H
4, layer 6 is MgF
2
The antireflecting film index of the optical mirror slip that is made through optical element multicoating new technology of the present invention is: 400-700nm R=0.3-0.35%; 700-750nm R≤1.0%
Embodiment two
With a kind of optical element multicoating new technology of embodiment one, its difference is: the thickness initial value of each coating respectively is: 0.5,0.5,1,0.5,0.5,1.
Embodiment three
With a kind of optical element multicoating new technology of embodiment one, its difference is: the said initial depression that vacuumizes operation is 4.5*10
-4Pa-7.0*10
-4Pa is (at 4.5*10
-4Pa and 7.0*10
-4Arbitrary initial depression between the Pa can).Routine is generally 3.0*10
-3Pa.
Embodiment four
A kind of optical element multicoating new technology with embodiment one; Its difference is: the parameter of said filming process also comprises temperature, oxygen-adding amount and plated film speed; Its temperature is controlled to be the 290-320 degree, and oxygen-adding amount is a 30-50 standard ml/min (sccm), and plated film speed is 0.5nm/s.
Except that the foregoing description, the present invention can also have other embodiment.All employings are equal to the technical scheme of replacement or equivalent transformation formation, all drop in the protection domain of requirement of the present invention.
Claims (4)
1. an optical element multicoating new technology comprises vacuumizing operation and filming process, it is characterized in that: the coating of said filming process is six layers, and ground floor is H
4, the second layer is AL
2O
3, the 3rd layer is H
4, the 4th layer is AL
2O
3, layer 5 is H
4, layer 6 is MgF
2
2. a kind of optical element multicoating new technology according to claim 1, it is characterized in that: the thickness initial value of said each coating respectively is: 0.5,0.5,1,0.5,0.5,1.
3. a kind of optical element multicoating new technology according to claim 1 is characterized in that: the said initial depression that vacuumizes operation is 4.5*10
-4Pa-7.0*10
-4Pa.
4. according to claim 1,2 or 3 described a kind of optical element multicoating new technologies; It is characterized in that: the parameter of said filming process also comprises temperature, oxygen-adding amount and plated film speed; Its temperature is controlled to be the 290-320 degree; Oxygen-adding amount is a 30-50 standard ml/min (sccm), and plated film speed is 0.5nm/s.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100733583A CN102692657A (en) | 2011-03-25 | 2011-03-25 | Multi-layer coating-film new technology of optical part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100733583A CN102692657A (en) | 2011-03-25 | 2011-03-25 | Multi-layer coating-film new technology of optical part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102692657A true CN102692657A (en) | 2012-09-26 |
Family
ID=46858235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100733583A Pending CN102692657A (en) | 2011-03-25 | 2011-03-25 | Multi-layer coating-film new technology of optical part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102692657A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102896827A (en) * | 2012-11-01 | 2013-01-30 | 福建福光光电科技有限公司 | Strong-washing and boiling resistant film system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1365956A (en) * | 2000-12-29 | 2002-08-28 | 默克专利股份有限公司 | Gaseous phase sedimentary material for producing high refractive index optical coating layer and production method of said gaseous phase sedimentary material |
| CN1532563A (en) * | 2002-09-09 | 2004-09-29 | ͬ�Ϳ�ҵ��ʽ���� | Optical anti-reflection film and its film coating method |
| US20060103783A1 (en) * | 2004-11-12 | 2006-05-18 | Hon Hai Precision Industry Co., Ltd. | Polarizer and equipment for manufacturing the same |
| CN1885065A (en) * | 2005-06-20 | 2006-12-27 | 亚洲光学股份有限公司 | Film layer structure of optical lens |
| CN101846756A (en) * | 2010-05-26 | 2010-09-29 | 湖南大学 | MgF2/oxide composite membrane used for anti-reflection of glass surface |
-
2011
- 2011-03-25 CN CN2011100733583A patent/CN102692657A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1365956A (en) * | 2000-12-29 | 2002-08-28 | 默克专利股份有限公司 | Gaseous phase sedimentary material for producing high refractive index optical coating layer and production method of said gaseous phase sedimentary material |
| CN1532563A (en) * | 2002-09-09 | 2004-09-29 | ͬ�Ϳ�ҵ��ʽ���� | Optical anti-reflection film and its film coating method |
| US20060103783A1 (en) * | 2004-11-12 | 2006-05-18 | Hon Hai Precision Industry Co., Ltd. | Polarizer and equipment for manufacturing the same |
| CN1885065A (en) * | 2005-06-20 | 2006-12-27 | 亚洲光学股份有限公司 | Film layer structure of optical lens |
| CN101846756A (en) * | 2010-05-26 | 2010-09-29 | 湖南大学 | MgF2/oxide composite membrane used for anti-reflection of glass surface |
Non-Patent Citations (1)
| Title |
|---|
| 刘春玲等: "电子束蒸镀H4膜工艺及其在808nm激光器腔面膜上的应用", 《中国激光》, vol. 37, no. 12, 31 December 2010 (2010-12-31), pages 3140 - 3143 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102896827A (en) * | 2012-11-01 | 2013-01-30 | 福建福光光电科技有限公司 | Strong-washing and boiling resistant film system |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120926 |