CN207488532U - A kind of filter sheet structure - Google Patents

A kind of filter sheet structure Download PDF

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Publication number
CN207488532U
CN207488532U CN201721715422.2U CN201721715422U CN207488532U CN 207488532 U CN207488532 U CN 207488532U CN 201721715422 U CN201721715422 U CN 201721715422U CN 207488532 U CN207488532 U CN 207488532U
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CN
China
Prior art keywords
layer
membrane system
system layer
glass substrate
sheet structure
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Expired - Fee Related
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CN201721715422.2U
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Chinese (zh)
Inventor
刘毅楠
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SUZHOU DINGWANG TECHNOLOGY Co Ltd
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SUZHOU DINGWANG TECHNOLOGY Co Ltd
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Abstract

The utility model provides a kind of filter sheet structure, and including glass substrate, the upper surface of the glass substrate is equipped with the first membrane system layer, antireflective coating, the second membrane system layer successively, and the lower surface of the glass substrate is equipped with third membrane system layer.The filter sheet structure changes original only in the structure of a face plated film, but carry out plated film in upper and lower surface, third membrane system layer is arranged on to the lower surface of glass substrate, light can play the purpose for redistributing the energy of reflected light and transmitted light when passing through glass substrate, the light that only suitable membrane system layer thickness need to be coordinated to can be achieved with three kinds of wavelength in this way passes through simultaneously, this filter sheet structure only needs an antireflective coating, and the thickness of each membrane system layer all can accordingly reduce, it can not only be effectively increased the translucency of optical filter in this way, and it can effectively reduce the production cost of optical filter.

Description

A kind of filter sheet structure
Technical field
The utility model is related to be related to optical device field, more particularly to a kind of filter sheet structure for the communications field.
Background technology
Optic communication refers to the communication mode realized using light as information carrier, can be divided into air by the difference of transmission medium Two kinds of laser communication and fiber optic communication.Optic communication have message capacity is big, transmission range is long, electromagnetism interference, transmission quality are good, The advantages that signal cross-talk is small, good confidentiality is the final goal of future transmission network Development, before having boundless market Scape.In the bi-directional transceiver module of optic communication product, by selecting the laser signal of wavelength, and reflect unwanted wave band and lead to Frequently with optical filter(edge filters)It realizes, it may be said that optical filter plays effect of crucial importance in optic communication product. With the rapid development of space technology and optical device, the application of infrared optical system is increasingly taken seriously, optical signal signal The filtering that optical filter, protection window etc. carry out time and space is had to pass through, its radiation when passing through optical filter this requires light Amount must be transmitted as far as possible with maximum value, thus need to be coated on optical element according to different requirements meet the requirements it is thin Film.
Utility model patent(The patent No.:201520149836.8)A kind of three wave band filter sheet structures are disclosed, including one Glass substrate, glass substrate are equipped with the first membrane system layer, the second membrane system layer and third membrane system layer, the first membrane system layer and the glass Substrate contacts, and the first antireflective coating is additionally provided between the first film layer and the second film layer, is equipped between the second film layer and third membrane layer Second antireflective coating.The three wave bands filter sheet structure increases the first anti-reflection film between the first membrane system layer and the second membrane system layer Layer, increases the second antireflective coating between the second antireflection layer and third antireflection layer.
Although this optical filter can realize that the light of three kinds of wavelength passes through simultaneously, the plated film layer thickness on substrate is thicker, Although can play the role of optical filtering, translucency is relatively poor, and is required for more film layer every time, the production of optical filter Cost is higher, and it is necessary to design a kind of three new wave band filter sheet structures thus.
Utility model content
In view of the foregoing deficiencies of prior art, the purpose of this utility model is to provide a kind of plated film layer thickness it is thin, The filter sheet structure that translucency is good, production cost is low.
In order to achieve the above objects and other related objects, the utility model provides a kind of filter sheet structure, including glass base Plate, the upper surface of the glass substrate are equipped with the first membrane system layer, antireflective coating, the second membrane system layer successively, the glass substrate Lower surface is equipped with third membrane system layer, and the structure of the first membrane system layer is HLH, and the structure of the second membrane system layer is LHL, institute The structure for stating third membrane system layer is LHL, and wherein H represents that TiO2 layers, L layers are SiO2 layers, and the antireflective coating includes two layers of MgF2 Film layer and one layer of SiO2Film layer, the SiO2Film layer is located at two layers of MgF2Between film layer.
Preferably, the first layer MgF of the antireflective coating2Thicknesses of layers is 22nm, and SiO2 thicknesses of layers is 52nm, second Layer MgF2Thicknesses of layers is 63nm.
Preferably, the thickness of each layer of the first membrane system layer is followed successively by 63nm, 22nm, 92nm.
Preferably, the thickness of each layer of the second membrane system layer is followed successively by 92nm, 43nm, 32nm.
Preferably, the thickness of the third membrane system layer is followed successively by 35nm, 38nm, 43nm.
Preferably, the thickness of the glass substrate is 0.145mm or 0.21mm.
As described above, the filter sheet structure of the utility model has the advantages that:The original that the filter sheet structure changes Come only in the structure of a face plated film, but plated film is carried out in upper and lower surface, third membrane system layer is arranged on to the following table of glass substrate Face, can play the purpose for redistributing the energy of reflected light and transmitted light when light passes through glass substrate, only need to coordinate in this way The light that suitable membrane system layer thickness can be achieved with three kinds of wavelength passes through simultaneously, and this filter sheet structure only needs an anti-reflection film Layer, and the thickness of each membrane system layer all can accordingly reduce, and can not only be effectively increased the translucency of optical filter in this way, and can have Effect reduces the production cost of optical filter.
Description of the drawings
Fig. 1 is the structure diagram of the utility model embodiment.
Specific embodiment
Illustrate the embodiment of the utility model by particular specific embodiment below, those skilled in the art can be by this Content disclosed by specification understands other advantages and effect of the utility model easily.
It please refers to Fig.1.It should be clear that structure, ratio, size depicted in this specification institute accompanying drawings etc., only coordinating The revealed content of specification, so that those skilled in the art understands and reads, being not limited to the utility model can be real The qualifications applied, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size It is whole, in the case where not influencing the effect of the utility model can be generated and the purpose that can reach, should all still fall in the utility model institute The technology contents of announcement are obtained in the range of covering.Meanwhile in this specification it is cited as " on ", " under ", "left", "right", The term of " centre " and " one " etc. is merely convenient to understanding rather than to limit the enforceable range of the utility model for narration, Its relativeness is altered or modified, in the case where changing technology contents without essence, when being also considered as the enforceable scope of the utility model.
As shown in Figure 1, the utility model provides a kind of filter sheet structure, which includes a glass substrate 1, glass The glass substrate of 0.145mm or 0.21mm thickness can be selected in glass substrate 1.It is set successively from bottom to top in the upper surface of glass substrate 1 There are the first membrane system layer 2, antireflective coating 3, the second membrane system layer 4, the lower surface of glass substrate 1 is equipped with third membrane system layer 5, the first membrane system Layer 2, antireflective coating 3, the second membrane system layer 4 and third membrane system layer 5 are that glass base is attached to by way of sputter alternating deposit On plate 1, wherein the first membrane system layer 2 is contacted with glass substrate 1, antireflective coating 3 is located at the first membrane system layer 2 and the second membrane system layer 4 Between.The structure of first membrane system layer 2 is LHL, and the structure of the second membrane system layer 4 is LHL, and the structure of third membrane system layer 5 is HLH, Middle H represents that TiO2 layers, L layers are SiO2 layers, and antireflective coating 3 includes two layers of MgF2Film layer 31 and one layer of SiO2Film layer 32, SiO2Film layer 32 are located at two layers of MgF2Between film layer 31.
As a kind of specific embodiment, in the first membrane system layer 2 of the optical filter, the thickness of the 1st layer of SiO2 layer 21 is 63nm, the thickness of the 1st layer of TiO2 layer 22 is 22nm, and the thickness of the 2nd layer of SiO2 layer 21 is 92nm(By direction from bottom to top in figure). In the second membrane system layer 4, the thickness of the 1st layer of SiO2 layer 42 is 92nm, and the thickness of the 1st layer of TiO2 layer 41 is 43nm, the 2nd layer of SiO2 The thickness of layer 42 is 32nm(By direction from bottom to top in figure).In third membrane system layer 5, the thickness of the 1st layer of TiO2 layer 51 is 35nm, the thickness of the 1st layer of SiO2 layer 62 is 38nm, and the thickness of the 2nd layer of TiO2 layer 61 is 43nm(By direction from top to bottom in figure). 1st layer of MgF of antireflective coating 32Thicknesses of layers is 22nm, and SiO2 thicknesses of layers is 52nm, the 2nd layer of MgF2Thicknesses of layers is 63nm (By direction from bottom to top in figure).
Using the embodiment optical filter in use, when light can make wavelength be less than 1320nm by the second membrane system layer 4 Light and wavelength be highly transmissive higher than the light of 1380nm and the light high reflection of its commplementary wave length, when light passes through the first antireflective coating 3, can make The energy of reflected light and transmitted light is redistributed, and reduces one step of energy progress of reflected light, when light passes through the first membrane system layer 2 When, the first membrane system layer 2 can make wavelength less than 1400nm and highly transmissive higher than the light of 1540nm and make the light high reflection of other wavelength, Glass substrate 1 can re-start the reflected light of 1300-1400nm wavelength and the energy of transmitted light distribution, 5 meeting of third membrane system layer It is highly transmissive to the light of 1300-1560nm wavelength, and to its light high reflection with wavelength, the energy of reflected light can be made further in this way Reduce, the energy of transmitted light further increases.In this way light by the optical filter can to wavelength for 1310nm, 1390nm, The light of 1550nm forms high transparency.
The filter sheet structure changes original only in the structure of a face plated film, but carries out plated film in upper and lower surface, by the Three membrane system layers are arranged on the lower surface of glass substrate, and the energy by reflected light and transmitted light can be played when light passes through glass substrate The purpose redistributed, the light that only suitable membrane system layer thickness need to be coordinated to can be achieved with three kinds of wavelength in this way passes through simultaneously, this Filter sheet structure only needs an antireflective coating, and the thickness of each membrane system layer all can accordingly reduce, so not only can be effective Increase the translucency of optical filter, and can effectively reduce the production cost of optical filter.
The above, only specific embodiment of the present utility model, in the description of this specification, specific features, knot Structure, material or feature can in an appropriate manner combine in any one or more embodiments or example.Therefore this reality It is not limited thereto with novel protection domain, the skill that any one skilled in the art discloses in the utility model In the range of art, change or replacement can be readily occurred in, should be covered within the scope of the utility model, the utility model Protection domain should be based on the protection scope of the described claims.

Claims (6)

1. a kind of filter sheet structure, including glass substrate, it is characterised in that:The upper surface of the glass substrate is equipped with first successively Membrane system layer, antireflective coating, the second membrane system layer, the lower surface of the glass substrate are equipped with third membrane system layer, first membrane system Layer is LHL structures, and the second membrane system layer is LHL structures, and the third membrane system layer is HLH structures, and wherein H represents TiO2 layers, L Layer is SiO2 layers, and the antireflective coating includes two layers of MgF2Film layer and one layer of SiO2Film layer, the SiO2Film layer is located at two layers of MgF2 Between film layer.
2. filter sheet structure according to claim 1, it is characterised in that:The first layer MgF of the antireflective coating2Film layer is thick It spends for 22nm, SiO2 thicknesses of layers is 52nm, second layer MgF2Thicknesses of layers is 63nm.
3. filter sheet structure according to claim 1, it is characterised in that:The thickness of each layer of first membrane system layer is followed successively by 63nm、22nm、92nm。
4. filter sheet structure according to claim 1, it is characterised in that:The thickness of each layer of second membrane system layer is followed successively by 92nm、43nm、32nm。
5. filter sheet structure according to claim 1, it is characterised in that:The thickness of the third membrane system layer is followed successively by 35nm、38nm、43nm。
6. filter sheet structure according to claim 1, it is characterised in that:The thickness of the glass substrate for 0.145mm or 0.21mm。
CN201721715422.2U 2017-12-11 2017-12-11 A kind of filter sheet structure Expired - Fee Related CN207488532U (en)

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Application Number Priority Date Filing Date Title
CN201721715422.2U CN207488532U (en) 2017-12-11 2017-12-11 A kind of filter sheet structure

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Application Number Priority Date Filing Date Title
CN201721715422.2U CN207488532U (en) 2017-12-11 2017-12-11 A kind of filter sheet structure

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CN207488532U true CN207488532U (en) 2018-06-12

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110320583A (en) * 2019-07-15 2019-10-11 杭州美迪凯光电科技有限公司 Three wave crest coating process of visible light

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110320583A (en) * 2019-07-15 2019-10-11 杭州美迪凯光电科技有限公司 Three wave crest coating process of visible light

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Granted publication date: 20180612

Termination date: 20181211

CF01 Termination of patent right due to non-payment of annual fee