CN102683164A - Method and device for monitoring abnormality of ion implanter - Google Patents
Method and device for monitoring abnormality of ion implanter Download PDFInfo
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- CN102683164A CN102683164A CN2011100575202A CN201110057520A CN102683164A CN 102683164 A CN102683164 A CN 102683164A CN 2011100575202 A CN2011100575202 A CN 2011100575202A CN 201110057520 A CN201110057520 A CN 201110057520A CN 102683164 A CN102683164 A CN 102683164A
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Abstract
The invention discloses a method and a device for monitoring the abnormality of an ion implanter so as to improve the quality of a product and reduce the rejection rate of the product. The device comprises an input isolation unit, a central processing unit and a voice alarm unit, wherein the input isolation unit is used for receiving and outputting an abnormality alarm signal transmitted by a dosage controller of the ion implanter and an implantation operation signal transmitted by a sheet transmitting controller; and after receiving the implantation operation signal outputted by the input isolation unit, the central processing unit is used for outputting a voice alarm notification message when the abnormality alarm signal outputted by the input isolation unit is received; and the voice alarm unit is used for sending out a voice alarm according to the voice alarm notification message outputted by the central processing unit. With the adoption of the technical scheme, an alarm is realized when the vacuum degree in the implantation process of the ion implanter exceeds a preset vacuum degree so as to ensure that the state duration with higher or lower vacuum degree is reduced, thereby improving the quality of the product and reduce the rejection rate of the product.
Description
Technical field
The present invention relates to semiconductor equipment and make the field, relate in particular to the unusual method and apparatus of a kind of monitoring ion implanter.
Background technology
In the manufacturing of integrated circuit, the ion implantor of NV10 such as the NV1080 that EATON company produces, NV10160 series is widely used in current domestic 6 " integrated circuit production line; Ion implantor is a kind of high-vacuum apparatus; In production process (being the injection process of ion implantor); The inner injection vacuum degree of ion implantor will directly have influence on the yield of product, and too high or too low injection vacuum degree will cause the relevant parameter (like the doping resistance) of product to exceed the problem that preset scope causes product rejection then.Existing ion implantor in injection process if vacuum degree cross when low or too high, only can be on the screen of this ion implantor display abnormality, single do not possess warning function; Under the normal condition; Ion implantor its internal vacuum in injection process is stable within the specific limits, and when too high or too low as if vacuum degree, existing ion implantor does not possess warning function; Can not handle accordingly by carrying out initiatively yet; If abnormal conditions continue the long period and can not get in time handling, possibly influence properties of product, even can cause the problem of product rejection; Therefore, in actual production process, vacuum is too high to make that product doping resistance is too high owing to injecting in ion implantor regular meeting, thereby causes the problem of product rejection; It is following to cause injecting the too high main cause of vacuum:
During production; Do not injecting preceding to product or in injection process, because some transfer machine parameters not in the menu scope, the DATALOCK in the ion implantor (being data interlock) system can the volitional check vacuum inject; Thereby make ion implantor be in the abnormality of the state of vacuumizing always; When if operating personnel fail in time to find this abnormality, ion implantor then can be grown because of the pumpdown time and make vacuum degree be higher than preset scope, thereby may cause the problem of product rejection.
Therefore, existing ion implantor can not be guaranteed vacuum degree in preset vacuum ranges in the production process of reality, makes that product doping resistance is too high thereby the vacuum degree of existence injection vacuum is too high, thereby causes the problem of product rejection.
Summary of the invention
To the above-mentioned technical problem that exists in the prior art; The present invention provides a kind of monitoring ion implanter unusual method and apparatus; Report to the police when the vacuum degree of ion implantor in injection process exceeds preset vacuum ranges to be implemented in; Guaranteeing to shorten the higher or lower state duration of vacuum degree, thereby improve the quality and the scrappage that reduces product of product.
The unusual device of a kind of monitoring ion implanter comprises:
The input isolated location; Be connected with biography sheet controller with the dosage control device of ion implantor; Be used to receive the abnormal alarm signal of said dosage control device transmission and the injection run signal that said biography sheet controller sends, and export said abnormal alarm signal and said injection run signal;
CPU is connected with said input isolated location, is used for after the injection run signal that receives said input isolated location output, and when receiving the abnormal alarm signal of said input isolated location output, output audio alert notification message;
The audio alert unit is connected with said CPU, is used for the said audio alert notification message according to said CPU output, carries out audio alert.
The unusual method of a kind of monitoring ion implanter comprises:
The injection run signal that the abnormal alarm signal that the dosage control device of input isolated location reception ion implantor sends and the biography sheet controller of said ion implantor send, and export said abnormal alarm signal and said injection run signal;
CPU when receiving the abnormal alarm signal of said input isolated location output, is exported the audio alert notification message after the injection run signal that receives said input isolated location output;
The audio alert unit carries out audio alert according to the said audio alert notification message of said CPU output.
The device that the embodiment of the invention provides is after the injection run signal that the biography sheet controller that receives ion implantor sends; When the abnormal alarm signal that the dosage control device that receives this ion implantor sends; Can produce audio alert; Thereby the notifying operation personnel handle the abnormality of this ion implantor timely, avoiding the permanent higher or lower state of vacuum degree that remains on of ion implantor, thereby and influence the problem that properties of product possibly cause product rejection.
Description of drawings
Fig. 1 is the structural representation of the unusual device of monitoring ion implanter in the embodiment of the invention;
Fig. 2 A is the electrical block diagram of input isolated location in the embodiment of the invention;
Fig. 2 B is the electrical block diagram of output isolated location in the embodiment of the invention;
Fig. 3 is the hardware configuration sketch map of the unusual device of monitoring ion implanter in the embodiment of the invention;
Fig. 4 is the unusual method flow diagram of monitoring ion implanter in the embodiment of the invention;
Fig. 5 is the unusual concrete method flow diagram of monitoring ion implanter in the embodiment of the invention.
Embodiment
Technical problem to the prior art existence; The embodiment of the invention provides a kind of monitoring ion implanter unusual method and apparatus; Report to the police when the vacuum degree of ion implantor in injection process exceeds preset vacuum ranges to be implemented in; Guaranteeing to shorten the higher or lower state duration of vacuum degree, thereby improve the quality and the scrappage that reduces product of product; This device can comprise: the input isolated location; Be connected with biography sheet controller with the dosage control device of ion implantor; Be used to receive the abnormal alarm signal of said dosage control device transmission and the injection run signal that said biography sheet controller sends, and export said abnormal alarm signal and said injection run signal; CPU is connected with said input isolated location, is used for after the injection run signal that receives said input isolated location output, and when receiving the abnormal alarm signal of said input isolated location output, output audio alert notification message; The audio alert unit is connected with said CPU, is used for the said audio alert notification message according to said CPU output, carries out audio alert.Adopt device provided by the invention; After the injection run signal that the biography sheet controller that receives ion implantor sends; When the abnormal alarm signal that the dosage control device that receives this ion implantor sends, can produce audio alert, thereby the notifying operation personnel handle to the abnormality of this ion implantor timely; Avoiding the permanent higher or lower state of vacuum degree that remains on of ion implantor, thereby and influence the problem that properties of product possibly cause product rejection.
Below in conjunction with Figure of description technical scheme of the present invention is carried out detailed description.
Referring to Fig. 1, for the present invention is the structural representation of the unusual device of monitoring ion implanter among the embodiment, this device can comprise:
Input isolated location 11; Be connected with biography sheet controller with the dosage control device of ion implantor; Be used to receive the abnormal alarm signal of said dosage control device transmission and the injection run signal that said biography sheet controller sends, and export said abnormal alarm signal and said injection run signal;
Preferably; For improving validity, flexibility and the diversity of audio alert; In the embodiment of the invention; CPU 12 is further used for; Before the said audio alert notification message of output,, determine and the corresponding sound-type of abnormal alarm signal that receives, and in said audio alert notification message, add the identification information of the sound-type of determining according to the abnormal alarm signal of storage and the corresponding relation (this corresponding relation can be stored in the memory of central processing unit) of sound-type; Correspondingly, audio alert unit 13 specifically is used for: adopt the voice corresponding with the identification information of said audio alert notification message to carry out audio alert.Perhaps, CPU 12 is further used for, and before the said audio alert notification message of output, in said audio alert notification message, adds the abnormal alarm signal message; Correspondingly; Audio alert unit 13; Specifically be used for: according to the abnormal alarm signal of storage and the corresponding relation (this corresponding relation can be stored in this audio alert unit 13) of sound-type; Determine with said audio alert notification message in the corresponding sound-type of abnormal alarm signal, and adopt the corresponding voice of this sound-type to carry out audio alert.Adopt aforesaid way, operating personnel can orient abnormality fast according to alarm voice, thereby can solve abnormality fast.
Preferably, in injection process, be in the problem of the higher state of vacuum degree for a long time for avoiding ion implantor, in the vacuum ranges that is provided with, the said apparatus in the embodiment of the invention also comprises output isolated location 14 with the vacuum degree of guaranteeing ion implantor;
Output isolated location 14 is connected with CPU 12, is used for forbidding injecting signal (as adopting END STATION HOLD signal) to the biography sheet controller transmission of said ion implantor, stops to inject to control said biography sheet controller.
Preferably; Being convenient to CPU 12 controls output isolated location 14 said apparatus timely and can also comprise: timing unit 15; Be connected with CPU 12; Be used in the audio alert unit 13 and pick up counting when carrying out audio alert, and when the timing duration arrived the said first duration threshold value, notice CPU 12 had arrived the first duration threshold value.
Preferably; Guarantee the normal use of ion implantor; In the embodiment of the invention; CPU 12 is further used for, and confirms in the second duration threshold value after the injection run signal that receives 11 outputs of input isolated location that said ion implantor does not start when injecting flow process, starts output isolated location 14.
Preferably, being convenient to CPU 12 controls output isolated location 14 said apparatus timely and can also comprise:
Preferably, the said apparatus in the embodiment of the invention can also comprise:
Injection run signal in the embodiment of the invention can be used " RUN " expression; For improving the warning effect, cause the unusual injection stage so that orient fast, in the embodiment of the invention; Can report to the police in the difference that the process that product is injected occurs according to ion implantor, corresponding with it abnormal alarm signal type is set, as: AMU Error (Atomic Mass error; It is the atomic weight rub-out signal; When actual atomic weight exceeds setting range, can produce this signal), VAC Error (Vacuum error, i.e. vacuum rub-out signal can not produce this signal when vacuum values also reaches when injecting the vacuum set point), SPEED Error (Rotary speed error; It is rolling disc rotating speed rub-out signal; When rotating speed is not in range of set value, can produce this signal), E-SHOW Error (Electron shower error, promptly the electron gun rub-out signal can not produce this signal when electron gun current reaches set point), SERVO Error (Scan servo error; It is the scanning servo system error signal; When scanning system occurs can producing this signal when unusual), DATALOCK (DATA LOCK ERROR, i.e. data latching terminal rub-out signal is when manufacturing parameter can produce this signal during not in the menu scope) etc.
In conjunction with actual applied environment, aspect the hardware realization, the CPU 12 in the embodiment of the invention can adopt chip microcontroller (like 89S52 type single-chip microcomputer); Audio alert unit 13 can combine through sound circuit and loud speaker and realize; Input isolated location 11 in the embodiment of the invention can be realized through the circuit shown in Fig. 2 A; This circuit can be realized through light lotus root integrated chip (like chips such as CNY17, MCT6); The realization principle is following: when the input of input isolated location 11 received the abnormal alarm signal that is sent by the dosage control device of ion implantor or biography sheet controller or injects run signal, this abnormal alarm signal or injection run signal can be the low level signal of 0V; The diode of light lotus root chip internal is lighted, the light conducting that phototriode sends because of receiving diode; The output of input isolation circuit 11 is through the phototriode ground connection of light lotus root chip internal, and the low level signal of exporting 0V at output is to CPU 12; And to other situation (being non-reception abnormal alarm signal or the situation of injecting run signal); Input isolated location 11 inputs receive+the 12V high level signal; The diode of light lotus root chip internal extinguishes, and output then can export+and the high level signal of 5V gives CPU 12.Output isolated location 14 in the embodiment of the invention can be realized through the circuit shown in Fig. 2 B; This output isolated location 14 can adopt light lotus root integrated chip (like chips such as CNY17, MCT6) to realize; Concrete principle is following: the input of output isolation circuit 14 forbids injecting signal what receive CPU 12 outputs, and this forbids injecting signal can be 0 signal; The diode of light lotus root chip internal is lighted, phototriode is because of receiving the light conducting of diode; Therefore will export the biography sheet controller of the low level signal of a 0V at the output of output isolated location 14, stop current implant operation so that indication passes the sheet controller to ion implantor; And under other situation (being the situation that non-reception forbids injecting signal), the input of output isolated location 14 will receive+high level signal of 5V, and output will be exported the high level signal of one+12V and gives and pass the sheet controller.Based on above-mentioned concrete hardware circuit implementation; Can obtain the structural representation of the unusual device of monitoring ion implanter as shown in Figure 3; In this device; The dosage control device of ion implantor can be connected through 6 data wires with input isolated location 11, and these six data wires are respectively applied for and transmit AMU Error, VAC Error, SPEED Error, E-SHOW Error, SERVO Error, DATALOCK abnormal alarm signal; The biography sheet controller of ion implantor is connected through a data wire with input isolated location 11, and this data wire is used to send the RUN signal; Correspondingly; Input isolated location 11 is connected through 7 data wires with CPU 12, and these 7 data wires are respectively applied for and send AMU Error, VAC Error, SPEED Error, E-SHOW Error, SERVO Error, DATALOCK abnormal alarm signal and RUN signal; Output isolated location 14 is connected through a data wire with the biography sheet controller of ion implantor, and this data wire is used for sending forbids injecting signal (like END STATION HOLD).
Ion implantor in the embodiment of the invention can be the ion implantor of NV10 series such as the NV1080 that produces of EATION company, NV10160; The zone number of the corresponding ion implantor board of dosage control device is 3A10, and the zone number that passes the corresponding ion implantor board of sheet controller is 5A1.
The unusual device of the monitoring ion implanter that provides in the embodiment of the invention can be the hardware device that is independent of ion implantor, also can be arranged on the inner equipment of ion implantor.
Referring to Fig. 4, for adopting the flow chart of the unusual method of assembly monitor ion implantor as shown in Figure 1 in the embodiment of the invention, this method comprises:
The injection run signal that the abnormal alarm signal that the dosage control device of step 401, input isolated location 11 reception ion implantores sends and the biography sheet controller of said ion implantor send, and export said abnormal alarm signal and said injection run signal.
The said audio alert notification message that step 403, audio alert unit 13 are exported according to CPU 12 carries out audio alert.
In the above-mentioned process step 402; CPU 12 is before output audio alert notification message; Also can comprise step: CPU 12 is according to the abnormal alarm signal of storage and the corresponding relation of sound-type; The corresponding sound-type of abnormal alarm signal of determining and receiving, and the identification information of the sound-type that interpolation is determined in said audio alert notification message; In the above-mentioned steps 403, audio alert unit 13 carries out audio alert, specifically can comprise: adopt with said audio alert notification message in the corresponding voice of identification information carry out audio alert.Perhaps, in the above-mentioned steps 402, CPU 12 also can may further comprise the steps before the said audio alert notification message of output: in said audio alert notification message, add the abnormal alarm signal message; In the above-mentioned process step 403; Said audio alert unit carries out audio alert; Specifically comprise: according to the abnormal alarm signal of storage and the corresponding relation of sound-type; Determine with said audio alert notification message in the corresponding sound-type of abnormal alarm signal, and adopt the corresponding voice of this sound-type to carry out audio alert.
Preferably, in the above-mentioned process step 403, also can comprise step: central processor unit 12 in the audio alert unit 13 carry out audio alert duration when arriving the first preset duration threshold value, start output isolated location 14; Output isolated location 14 forbids injecting signal to the biography sheet controller transmission of this ion implantor, stops to inject to control said biography sheet controller.
Preferably; In the above-mentioned process step 403; Also can comprise step: CPU 12 is further used for, and confirms in the second duration threshold value after the injection run signal that receives 11 outputs of input isolated location that said ion implantor does not start when injecting flow process, starts output isolated location 14; Forbid injecting signal by output isolated location 14 to the biography sheet controller transmission of this ion implantor again, pass the sheet controller with control and stop to inject.
Preferably, in the above-mentioned process step 403, also can comprise step: reset unit 17 sends the audio alert erasure signal to CPU 12 after confirming unusual the elimination, stops to report to the police with indication CPU 12 control voice alarm unit 13.
For further in detail, clearly technical scheme of the present invention is carried out detailed description, the embodiment of the invention also provides a kind of monitoring ion implanter unusual concrete grammar flow chart, and is as shown in Figure 5.
Referring to Fig. 5, be the unusual concrete grammar flow chart of monitoring ion implanter in the embodiment of the invention, this method comprises:
The injection run signal that the dosage control device whether step 503, CPU 12 detect has ion implantor sends through input isolated location 11, if then execution in step 504 is arranged, otherwise execution in step 502.
Whether 12 monitorings of step 506, CPU receive the abnormal alarm signal of input isolated location 11 outputs, if execution in step 507 then, otherwise execution in step 512.
13 when carrying out audio alert, control timing unit 15 picks up counting, and can adopt reverse countdown mode (promptly picking up counting from 0) in the audio alert unit for step 508, CPU 12.
In the embodiment of the invention; On the one hand, after the injection run signal that the biography sheet controller that receives ion implantor sends, when the abnormal alarm signal that the dosage control device that receives this ion implantor sends; Can produce audio alert; Thereby the notifying operation personnel handle the abnormality of this ion implantor timely, avoiding the permanent higher or lower state of vacuum degree that remains on of ion implantor, thereby and influence the problem that properties of product possibly cause product rejection; On the other hand; Under long situation of audio alert time if also be not eliminated unusually; Biography sheet controller transmission from the trend ion implantor forbids injecting signal; Pass the sheet controller with indication and stop to inject flow process, thereby further avoid the permanent higher state of vacuum degree that remains on of ion implantor, thereby and influence the problem that properties of product possibly cause product rejection; Again on the one hand; According to the various abnormal alarm signals of ion implantor in injection process corresponding audio alert type is set; When the corresponding unusual generation of this abnormal alarm signal; Can adopt the voice of the sound-type corresponding to carry out audio alert, thereby foundation is provided for operating personnel orient abnormal cause fast and accurately with this abnormal alarm signal.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, belong within the scope of claim of the present invention and equivalent technologies thereof if of the present invention these are revised with modification, then the present invention also is intended to comprise these changes and modification interior.
Claims (12)
1. the device that the monitoring ion implanter is unusual is characterized in that, comprising:
The input isolated location; Be connected with biography sheet controller with the dosage control device of ion implantor; Be used to receive the abnormal alarm signal of said dosage control device transmission and the injection run signal that said biography sheet controller sends, and export said abnormal alarm signal and said injection run signal;
CPU is connected with said input isolated location, is used for after the injection run signal that receives said input isolated location output, and when receiving the abnormal alarm signal of said input isolated location output, output audio alert notification message;
The audio alert unit is connected with said CPU, is used for the said audio alert notification message according to said CPU output, carries out audio alert.
2. device as claimed in claim 1; It is characterized in that; Said CPU is further used for; Before the said audio alert notification message of output,, determine and the corresponding sound-type of abnormal alarm signal that receives, and in said audio alert notification message, add the identification information of the sound-type of determining according to the abnormal alarm signal of storage and the corresponding relation of sound-type; Said audio alert unit specifically is used for: adopt the voice corresponding with the identification information of said audio alert notification message to carry out audio alert;
Perhaps, said CPU is further used for, and before the said audio alert notification message of output, in said audio alert notification message, adds the abnormal alarm signal message; Said audio alert unit; Specifically be used for: according to the abnormal alarm signal of storage and the corresponding relation of sound-type; Determine with said audio alert notification message in the corresponding sound-type of abnormal alarm signal, and adopt the corresponding voice of this sound-type to carry out audio alert.
3. according to claim 1 or claim 2 device is characterized in that, also comprises the output isolated location;
Said CPU is further used for, and when the duration that carries out audio alert in said audio alert unit arrives the first preset duration threshold value, starts the output isolated location;
The output isolated location is connected with said CPU, is used for forbidding injecting signal to the biography sheet controller transmission of said ion implantor, stops to inject to control said biography sheet controller.
4. device as claimed in claim 3 is characterized in that, also comprises:
Timing unit is connected with said CPU, picks up counting when being used for carrying out audio alert in said audio alert unit, and when the timing duration arrives the said first duration threshold value, notifies said CPU to arrive the first duration threshold value.
5. device as claimed in claim 3; It is characterized in that; Said CPU is further used for; Confirm in the second duration threshold value after the injection run signal that receives said input isolated location output that said ion implantor does not start when injecting flow process, starts said output isolated location.
6. device as claimed in claim 5 is characterized in that, also comprises:
Time display unit; Be connected with said CPU; Be used for when said CPU receives said injection run signal, picking up counting and showing, and when the timing duration arrives the said second duration threshold value, notify said CPU to arrive the second duration threshold value.
7. according to claim 1 or claim 2 device is characterized in that, also comprises:
Reset unit is connected with said CPU, is used for after confirming unusual the elimination, sending the audio alert erasure signal to said CPU, stops to report to the police to indicate the said voice alarm of said central processing unit controls unit.
8. the method that the monitoring ion implanter is unusual is characterized in that, comprising:
The injection run signal that the abnormal alarm signal that the dosage control device of input isolated location reception ion implantor sends and the biography sheet controller of said ion implantor send, and export said abnormal alarm signal and said injection run signal;
CPU when receiving the abnormal alarm signal of said input isolated location output, is exported the audio alert notification message after the injection run signal that receives said input isolated location output;
The audio alert unit carries out audio alert according to the said audio alert notification message of said CPU output.
9. method as claimed in claim 8 is characterized in that, also comprises:
Said CPU is being exported the audio alert notification message before according to the abnormal alarm signal of storage and the corresponding relation of sound-type; The corresponding sound-type of abnormal alarm signal of determining and receiving, and the identification information of the sound-type that interpolation is determined in said audio alert notification message; Said audio alert unit carries out audio alert, is specially: adopt with said audio alert notification message in the corresponding voice of identification information carry out audio alert;
Perhaps, said CPU was added the abnormal alarm signal message in said audio alert notification message before the said audio alert notification message of output; Said audio alert unit carries out audio alert; Be specially: according to the abnormal alarm signal of storage and the corresponding relation of sound-type; Determine with said audio alert notification message in the corresponding sound-type of abnormal alarm signal, and adopt the corresponding voice of this sound-type to carry out audio alert.
10. like claim 8 or 9 described methods, it is characterized in that, also comprise:
When said CPU is carried out audio alert in said audio alert unit duration arrives the first preset duration threshold value, start the output isolated location;
The output isolated location forbids injecting signal to the biography sheet controller transmission of said ion implantor, stops to inject to control said biography sheet controller.
11. method as claimed in claim 10; It is characterized in that; Also comprise: said CPU is further used for; Confirm in the second duration threshold value after the injection run signal that receives said input isolated location output that said ion implantor does not start when injecting flow process, starts said output isolated location.
12. like claim 8 or 9 described methods, it is characterized in that, also comprise:
Reset unit sends the audio alert erasure signal to said CPU after confirming unusual the elimination, stop to report to the police to indicate the said voice alarm of said central processing unit controls unit.
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| CN201110057520.2A CN102683164B (en) | 2011-03-10 | 2011-03-10 | Method and device for monitoring abnormality of ion implanter |
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| CN201110057520.2A CN102683164B (en) | 2011-03-10 | 2011-03-10 | Method and device for monitoring abnormality of ion implanter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104851819A (en) * | 2014-02-17 | 2015-08-19 | 无锡华润上华科技有限公司 | Method for temperature monitoring in ion implantation process |
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| CN1208245A (en) * | 1997-01-17 | 1999-02-17 | 易通公司 | Dose control for use in ion implanter |
| TW419728B (en) * | 1999-11-25 | 2001-01-21 | Taiwan Semiconductor Mfg | Externally chained alarm system |
| US20040002173A1 (en) * | 2002-06-26 | 2004-01-01 | Yeon-Ha Cho | Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system |
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Patent Citations (3)
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|---|---|---|---|---|
| CN1208245A (en) * | 1997-01-17 | 1999-02-17 | 易通公司 | Dose control for use in ion implanter |
| TW419728B (en) * | 1999-11-25 | 2001-01-21 | Taiwan Semiconductor Mfg | Externally chained alarm system |
| US20040002173A1 (en) * | 2002-06-26 | 2004-01-01 | Yeon-Ha Cho | Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104851819A (en) * | 2014-02-17 | 2015-08-19 | 无锡华润上华科技有限公司 | Method for temperature monitoring in ion implantation process |
| CN104851819B (en) * | 2014-02-17 | 2018-07-24 | 无锡华润上华科技有限公司 | Temperature monitoring method in ion implantation process |
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| CN102683164B (en) | 2015-05-20 |
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Effective date of registration: 20220720 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871, Beijing, Haidian District Cheng Fu Road 298, founder building, 9 floor Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |
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