CN102680160B - Novel isolation structure of differential motion metal capacitance membrane box - Google Patents
Novel isolation structure of differential motion metal capacitance membrane box Download PDFInfo
- Publication number
- CN102680160B CN102680160B CN201110055811.8A CN201110055811A CN102680160B CN 102680160 B CN102680160 B CN 102680160B CN 201110055811 A CN201110055811 A CN 201110055811A CN 102680160 B CN102680160 B CN 102680160B
- Authority
- CN
- China
- Prior art keywords
- glass
- cambered surface
- base
- ceramic
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a novel isolation structure of a differential motion metal capacitance membrane box and belongs to the capacitance membrane box in a pressure sensor. The novel isolation structure is characterized in that a protection ring and an isolation membrane are arranged at the outer end of a base, and a ceramic gasket, a half-cup body and glass are connected with the inner surface of the base. A concave cambered surface is arranged in the middle of the center of the half-cup body and the glass, and an oil filling pipe is arranged in the glass. A multi-through-hole ceramic pipe is axially arranged in the middle of the base, the ceramic gasket, the half-cup body and the glass. The end surfaces of the oil filling pipe in the glass and the multi-through-hole ceramic pipe and the half-cup body and the glass are located on the same concave cambered surface, an electric conductor layer is plated on the inner end surface of the concave cambered surface, an insulation protection layer is further plated at the upper end of the electric conductor layer, and a central metal membrane is further arranged at the inner end of the concave cambered surface. The novel isolation structure solves problems that the existing differential pressure transmitter is poor in interference resistance, measurement accuracy and stability, and is of a suspension structure for isolating sensing elements of a capacitance type differential pressure transmitter and a metal casing of the capacitance type differential pressure transmitter by using ceramics and other insulation materials.
Description
Technical field
The present invention relates to the structure of the differential metal capacitance membrane box using in the pressure transducer series of industrial automation product, specifically a kind of Novel isolating structure of differential metal capacitance membrane box.
Background technology
Electronic equipment, Switching Power Supply, computing machine etc. in use can produce the interference such as noise, especially when acquisition of information in the course of the work, transmission, conversion, when signal circuit two ends are all when ground connection, because place, two ends exists potential difference (PD), will form vagabond current loop, vagabond current, through signal wire resistance, becomes interference voltage, causes interference for the differential pressure transmitter metering circuit that uses differential metal capacitance membrane box manufacture.Therefore adopt differential pressure transmitter that the sensing element of the Novel isolating structure of differential metal capacitance membrane box manufactures to improve aobvious very important of the antijamming capability of metal capacitance differential pressure transmitter and the reliability of system.
Existing metal capacitance differential pressure transmitter is mainly by silicone oil, the variation of external pressure is delivered to central metal diaphragm by connecting pipe, make central metal diaphragm produce certain displacement, like this central metal diaphragm with it the electric capacity between the conductive layer pole plate of both sides change, the variable quantity of electric capacity links through wire separately the current signal that is converted to again standard on electronic circuit, what will specify here is existing metal capacitance differential pressure transmitter aufbauprinciple, make central metal diaphragm and transmitter use the ground wire of mounting points or connect together greatly all the time, therefore the on-the-spot electric signal that disturbs is easy to make the electric capacity of central metal diaphragm both sides to change, cause differential pressure transmitter anti-interference, measuring accuracy and stability are all poor.
Summary of the invention
In order to overcome the defect of prior art, the object of the invention is to provide a kind of simple in structure, easy to make, use the Novel isolating structure of safe and reliable a kind of differential metal capacitance membrane box.
The technical solution adopted for the present invention to solve the technical problems is: a kind of Novel isolating structure of differential metal capacitance membrane box, it is characterized in that: have a base, the outer end of base is provided with protective ring and isolation diaphragm, the inner face of base is connected with ceramic gasket, ceramic gasket the inner is connected with half cup, the inner of half cup is glass, in the middle of the center of half cup and glass, is the cambered surface of a spill, is provided with oil filler pipe in glass; The intermediate shaft of base, ceramic gasket, half cup and glass is to being provided with multi-through hole ceramic pipe; In glass, the head end of the head end of oil filler pipe, the interior multi-through hole ceramic pipe of glass and half cup and glass are on same cancave cambered surface, on cancave cambered surface inner face, are coated with conductor layer, and the upper end of conductor layer is coated with insulating protective layer again; Cancave cambered surface the inner is also provided with central metal diaphragm.
Described ceramic gasket, two end face is the potsherd after metalized; Potsherd after treatment is welded as a whole with base and half cup respectively, its objective is and makes to reach insulation between base and half cup.
Described multi-through hole ceramic pipe, is provided with 1～20 through hole in the middle of it.
The present invention utilizes existing known technology that glass and multi-through hole ceramic pipe and half cup and oil filler pipe are sintered into one; Then grind a cancave cambered surface by grinding technics, then on cancave cambered surface, plate respectively conductor layer by technique for vacuum coating and plate again insulating protective layer.
The present invention utilizes welding that isolation diaphragm, protective ring, center diaphragm and half cup assembly are welded into one.Introducing silicone oil by oil filler pipe again makes silicone oil be full of whole room by multi-through hole ceramic pipe.
When work in the time that external pressure is applied to isolation diaphragm, by silicone oil, pressure is passed to central metal diaphragm, central metal diaphragm will produce certain displacement, therefore the electric capacity being made up of the conductor layer on central metal diaphragm and its both sides will change, and electric capacitance change offers circuit by central metal diaphragm extension line and conductor layer via oil filler pipe extension line.The variation of final external pressure is converted to capacitance variation.Be converted into again the output signal of standard by circuit.
The invention has the beneficial effects as follows: the invention solves existing differential pressure transmitter anti-interference, all poor problems of measuring accuracy and stability, utilize insulating material as pottery etc. by the sensing element of capacitance differential pressure cell (bellows) the metal shell isolation suspension structure with capacitance differential pressure cell.Weld respectively access insulating material---ceramic gasket at both sides base and half cup inter-module, the another side of base is together with isolation diaphragm and protective ring welding, the cup of dead center metallic membrane has just insulated with the protective ring of its both sides like this, play the effect of isolation electric signal, when by pressure measurement with while being applied to respectively on the isolation diaphragm of differential capacitor diaphragm capsule both sides, silicone oil in bellows is by multi-through hole ceramic pipe, be delivered to central metal diaphragm both sides with liquid pressure transmission form, both kept the constant of differential capacitor diaphragm capsule principle of work.Therefore, the invention solves the problem that the sensing element of capacitance differential pressure cell and the metal shell of capacitance differential pressure cell and the earth need to be isolated suspension, greatly improved antijamming capability and the stability of capacitance differential pressure cell.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is conducted further description.
Fig. 1 is the topology view of full section of the present invention.
Fig. 2 is the left view of Fig. 1 of the present invention.
Fig. 3 is the A-A zoomed-in view of Fig. 1 of the present invention.
In figure: 1 isolation diaphragm, 2 multi-through hole ceramic pipes, 3 protective rings, 4 bases, 5 ceramic gaskets, 6 half cups, 7 oil filler pipes, 8 glass, 9 silicone oil, 10,13,14 circumferential welds, 11,12 face bonding contacts, 15 central metal diaphragm extension lines, 16 oil filler pipe extension lines, 17 central metal diaphragms, 18 conductor layers, 19 insulating protective layers.
Embodiment
Embodiment 1:
Refer to accompanying drawing, there is a base 4, the outer end of base is provided with protective ring 3 and isolation diaphragm 1, the inner face of base is connected with ceramic gasket 5, ceramic gasket the inner is connected with half cup 6, the inner of half cup is that the centre, center of glass 8, half cups and glass is the cambered surface of a spill, is provided with oil filler pipe 7 in glass; The intermediate shaft of base, ceramic gasket, half cup and glass is to being provided with multi-through hole ceramic pipe 2; In glass, the head end of the head end of oil filler pipe, the interior multi-through hole ceramic pipe of glass and half cup and glass are on same cancave cambered surface, are coated with conductor layer 18 on cancave cambered surface inner face, and the upper end of conductor layer is coated with insulating protective layer 19 again; Cancave cambered surface the inner is also provided with central metal diaphragm 17.
In embodiment, 9 is silicone oil; 10,13,14 pads that are circumferencial direction; 11 and 12 is the solder joint of in-plane; Metallic membrane extension line centered by 15; 16 is oil filler pipe extension line.
Claims (3)
1. the Novel isolating structure of a differential metal capacitance membrane box, it is characterized in that: have a base, the outer end of base is provided with protective ring and isolation diaphragm, the inner face of base is connected with ceramic gasket, ceramic gasket the inner is connected with half cup, the inner of half cup is glass, in the middle of the center of half cup and glass, is the cambered surface of a spill, is provided with oil filler pipe in glass; The intermediate shaft of base, ceramic gasket, half cup and glass is to being provided with multi-through hole ceramic pipe; In glass, the head end of the head end of oil filler pipe, the interior multi-through hole ceramic pipe of glass and half cup and glass are on same cancave cambered surface, on cancave cambered surface inner face, are coated with conductor layer, and the upper end of conductor layer is coated with insulating protective layer again; Cancave cambered surface the inner is also provided with central metal diaphragm.
2. the Novel isolating structure of a kind of differential metal capacitance membrane box according to claim 1, is characterized in that: described ceramic gasket, and two end face is the potsherd after metalized; Potsherd after treatment is welded as a whole with base and half cup respectively.
3. the Novel isolating structure of a kind of differential metal capacitance membrane box according to claim 1, is characterized in that: described multi-through hole ceramic pipe, is provided with 1～20 through hole in the middle of it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110055811.8A CN102680160B (en) | 2011-03-08 | 2011-03-08 | Novel isolation structure of differential motion metal capacitance membrane box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110055811.8A CN102680160B (en) | 2011-03-08 | 2011-03-08 | Novel isolation structure of differential motion metal capacitance membrane box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102680160A CN102680160A (en) | 2012-09-19 |
| CN102680160B true CN102680160B (en) | 2014-06-25 |
Family
ID=46812428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110055811.8A Active CN102680160B (en) | 2011-03-08 | 2011-03-08 | Novel isolation structure of differential motion metal capacitance membrane box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102680160B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108827526B (en) * | 2018-08-06 | 2024-02-13 | 宝鸡百事得控制技术有限公司 | Mechanical capacitance differential pressure sensor |
| CN112284426B (en) * | 2020-10-19 | 2023-03-24 | 上海恩邦自动化仪表股份有限公司 | High-precision metal capacitance sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6450813B1 (en) * | 1998-11-10 | 2002-09-17 | Dentsply Research & Development Corp. | Repair porcelain product, composition and method |
| CN2833526Y (en) * | 2005-05-27 | 2006-11-01 | 上海自动化仪表股份有限公司 | Multi-parameter sensor for measuring differential pressure, pressure and temperature |
| JP2011129688A (en) * | 2009-12-17 | 2011-06-30 | Tdk Corp | Electronic component and terminal electrode |
| CN201974268U (en) * | 2011-03-08 | 2011-09-14 | 福建上润精密仪器有限公司 | Novel isolating structure of differential metal capacitance membrane box |
-
2011
- 2011-03-08 CN CN201110055811.8A patent/CN102680160B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6450813B1 (en) * | 1998-11-10 | 2002-09-17 | Dentsply Research & Development Corp. | Repair porcelain product, composition and method |
| CN2833526Y (en) * | 2005-05-27 | 2006-11-01 | 上海自动化仪表股份有限公司 | Multi-parameter sensor for measuring differential pressure, pressure and temperature |
| JP2011129688A (en) * | 2009-12-17 | 2011-06-30 | Tdk Corp | Electronic component and terminal electrode |
| CN201974268U (en) * | 2011-03-08 | 2011-09-14 | 福建上润精密仪器有限公司 | Novel isolating structure of differential metal capacitance membrane box |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102680160A (en) | 2012-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103292947B (en) | A kind of capacitor plate suspension structure of differential metal capacitance membrane box | |
| CN102346084B (en) | Suspension structure of differential capacitance membrane box | |
| CN100545583C (en) | A kind of differential pressure, pressure, temperature simultaneously measuring multi-parameter sensor | |
| CN1296687C (en) | Telemetering high-temp pressure resistant / differential pressure sensor | |
| CN204924513U (en) | Silica -based pressure sensor | |
| CN202141554U (en) | Ceramic structure metal sensitive diaphragm capacitance pressure transducer | |
| CN104535228A (en) | LC (inductance-capacitance) wireless and passive pressure sensor without up-down interconnected electrodes | |
| CN203037405U (en) | Floated differential capacitance sensor | |
| CN2833526Y (en) | Multi-parameter sensor for measuring differential pressure, pressure and temperature | |
| CN207636232U (en) | A kind of strain-type differential pressure pickup | |
| CN102680160B (en) | Novel isolation structure of differential motion metal capacitance membrane box | |
| CN110553763B (en) | Coplanar suspension type full-isolation sensor | |
| CN201974268U (en) | Novel isolating structure of differential metal capacitance membrane box | |
| CN102435378A (en) | Compound type temperature pressure sensor | |
| CN101071084B (en) | Capacitance type micro mechanical temperature sensor for multi-layer beam structure | |
| CN202041342U (en) | Electric insulation structure of differential metal capacitance bellows and metal shell assembly | |
| CN105021325B (en) | Capacitance pressure transducer, | |
| CN207180910U (en) | A kind of ceramic capacitive pressure sensor of anti-conductor fluid and electromagnetic interference | |
| CN101738282A (en) | Ground-isolation pressure/differential pressure sensor | |
| CN101566640B (en) | Electronic voltage transducer | |
| CN202453136U (en) | Novel capacitance pole plate suspension structure of differential metal capacitance diaphragm capsule | |
| CN203259298U (en) | High static pressure piezoresistance differential pressure transmitter | |
| RU167905U1 (en) | CAPACITIVE PRESSURE DIFFERENTIAL SENSOR | |
| CN102749165A (en) | Electric insulation structure of differential metal capacitive film box and metal casing assembly | |
| CN201548366U (en) | Pressure sensitive chip package structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |