CN102674378A - Method for preparing silicon dioxide micropowder from natural vein quartz - Google Patents

Method for preparing silicon dioxide micropowder from natural vein quartz Download PDF

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CN102674378A
CN102674378A CN2012101412476A CN201210141247A CN102674378A CN 102674378 A CN102674378 A CN 102674378A CN 2012101412476 A CN2012101412476 A CN 2012101412476A CN 201210141247 A CN201210141247 A CN 201210141247A CN 102674378 A CN102674378 A CN 102674378A
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vein quartz
micro mist
ball
ball milling
micropowder
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廖其龙
谈高
刘来宝
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Southwest Jiaotong University
Southwest University of Science and Technology
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Southwest University of Science and Technology
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Abstract

The invention discloses a method for preparing silicon dioxide micropowder from natural vein quartz, which is characterized by comprising the following steps: crushing a raw material vein quartz raw ore, of which the mass percentage of SiO2 is greater than or equal to 99%, by a crusher to obtain vein quartz raw ore particles of which the diameters are 1-2cm; heating to 950-1000 DEG C, keeping the temperature for 20-40 minutes, quickly putting the vein quartz raw ore particles in deionized water or distilled water, stirring and filtering; putting the ore particles subjected to water quenching into a polyurethane ball milling tank, carrying out ball milling with agate balls by using mixed hydrochloric acid/sulfuric acid as a ball milling medium, and filtering to obtain micropowder; putting the micropowder in an ultrasonic environment, and washing with deionized water or distilled water; and drying the cleaned micropowder, dispersing the micropowder by ball milling with a ball mill, and collecting to obtain the silicon micropowder. The silicon micropowder product has wide application prospects as a raw material in the fields of aviation, spaceflight, fine chemical industry, recordable disks, special ceramics, large-scale integrated circuits, cosmetics and the like.

Description

A kind of method of utilizing natural vein quartz to prepare fine silica powder
Technical field
The invention belongs to the preparation of silicon-dioxide; Relate to a kind of method of utilizing natural vein quartz to prepare fine silica powder; Be specially adapted to the preparation of high purity ultra-fine silicon dioxide micro mist, the fine silica powder that makes can be used as starting material and has wide practical use in high-tech areas such as Aeronautics and Astronautics, fine chemistry industry, erasable disk, special cermacis, large-scale integrated circuit and makeup.
Background technology
Developing effect in the electronics technology field is conspicuous to silicon as the semiconductor foundation raw material, and silicon-dioxide has irreplaceable effect as the core material of silicon product in the production of silicon product.The physicochemical property of the uniqueness that it had; Make it in the IT industry of Aeronautics and Astronautics, electronics, machinery and develop rapidly, all occupy critical role; Particularly it is high temperature resistant, thermal expansivity is little, high-insulation, corrosion-resistant, piezoelectric effect, resonance effect and unique optical property; Make its resonator, new type electro source, high insulating packaged material, aircraft watch flooring, military industrial technology product, special optical glass, chemical analysis instrument or the like, irreplaceable effect is all arranged in the core product of IT industry such as computer chip, photoconductive fiber, electronic industry.What be worth explanation is that though the reserves of silicon-dioxide are not problems, as the basic material of IT industry, many aspects such as its purity, crystal formation still become the subject matter of silicon raw material production and supply.China surpasses 100,000 tons for the demand of high purity silica powder in recent years, and annual rate of increase surpasses 20%, and along with the development of microelectronics industry, large-scale integrated circuit is also increasingly high to the requirement of packaged material.
Since the seventies in 20th century; With U.S. Unimin Corp. (US) is the outstanding representative of raw material of quartz glass factory; Satisfied the raw material of quartz glass supply of the world more than 90%; Produce purification techniques and quality certification system because it has the higher mineral resources of world's purity with advanced raw material of quartz glass, make the raw material of quartz glass of Unimin Corp. (US) become the standard raw materials of world's raw material of quartz glass.And the production of China's glass sand starts from the end of the nineties in last century; Up to the present the basic raw material of selecting for use is mainly crystal; YO is less, kind is single, quality is low is its principal feature; Can't satisfy the demand of domestic relevant enterprise, so glass sand mainly still relies on import.In the prior art, the glass sand production technique generally is divided into two types of working methods, is respectively chemical method and physics method.Wherein chemical method is synthetic can obtain the quality high product, and owing to the restriction of technological process, output can't improve, and cost also is difficult to reduce.The physics method is through natural high-quality silica basically, obtains the product of stay in grade through steps such as pulverizing, but will adopt complicated technological process, is unfavorable for industrialization production.
Summary of the invention
The object of the invention is intended to overcome deficiency of the prior art, and a kind of method of utilizing natural vein quartz to prepare fine silica powder is provided.This method production technique is simple, and production efficiency is high, and production cost is low, and is pollution-free basically, the silicon-dioxide high pure and ultra-fine of preparation.
Content of the present invention is: a kind of method of utilizing natural vein quartz to prepare fine silica powder is characterized in that comprising the following steps:
A, fragmentation: with SiO 2The vein quartz raw ore of quality percentage composition>=99% be raw material, be ground into the vein quartz raw ore particle that diameter is 1~2cm through crusher (being preferably jaw crusher);
B, high-temperature water quenching: after vein quartz raw ore particle is heated to 950~1000 ℃ temperature and is incubated 20~40 minutes, put into deionized water or zero(ppm) water rapidly,, obtain ore particles after the shrend through stirring, filtering; The filtrating that to contain vein quartz raw ore particle surface dust discards;
C, ball milling pickling: ore particles after the shrend is put into urethane ball grinder (or other nonmetal ball grinder and ball-grinding machine); With hydrochloric acid and vitriolic mixing acid as ball-milling medium, with the agate ball ball milling after 4~8 hours; Filter, filtrating discards, and obtains micro mist;
D, ultrasonic washing: with micro mist place ultrasound environments (adopt ultrasonic cleaning machine or other ultrasonic cleaning equipment), with deionized water or distilled water wash 2~5 times, the micro mist that obtains cleaning;
E, drying and grind: with the micro mist of cleaning under 80~100 ℃ temperature, dry 5~15 minutes (also can adopt nature to dry and wait other drying mode of the prior art); Remove the water in the clean micro mist; Obtain the exsiccant micro mist; Adopt ball mill with exsiccant micro mist Ball milling, collection again, promptly make d 50Be 300~600nm, SiO 2The content of quality percentage composition>=99.99%, iron contamination less than the content of 2.12ppm, aluminium impurity silicon powder less than 10.06ppm.
In the content of the present invention: hydrochloric acid described in the step c and vitriolic mixing acid are preferably: get the hydrochloric acid of 4~6mol/L, the sulfuric acid of 4~6mol/L, 1:1 mixes by volume, promptly is made into hydrochloric acid and vitriolic mixing acid.
In the content of the present invention: adopt ball mill that exsiccant micro mist ball milling is preferably described in the step e: the rotating speed that adopts planetary ball mill and control planetary ball mill is 300~600 rev/mins, and the ball milling time is 4~8 hours.
In the content of the present invention: ultrasonic washing described in the steps d be preferably washing to the pH that washs the water behind the micro mist be 6.5~7.5.
Compared with prior art, the present invention has following characteristics and beneficial effect:
(1) adopts the present invention; After with (jaw formula) crusher the ore reduction of fine vein quartz being small-particle; Utilize the phase transformation meeting of quartz crystal under the high temperature to cause the principle of volume change; Break because of the rapid change of volume through shrend raw ore granule interior fault location (like bubble, impurity interlayer, crackle etc.), both can go out the impurity of fault location, can improve the efficient of ball milling again; Utilize urethane ball grinder and agate ball ball milling to reduce mixing of impurity greatly during ball milling; In the process of pickling, do not use single acid and be to use hydrochloric acid and vitriolic mixing acid, can better remove the foreign matter content in the product, and reduce the time of acidleach, improved production efficiency; Equally, also be to have considered the adsorptive capacity of maximum reduction impurity utilizing on the technological process of ultrasonic washing at sample surfaces, improve the quality of product; The most key is to utilize mixing acid as ball-milling medium; Both reduce technological process, also reduced leaching time simultaneously, significantly improved production efficiency; And isolating mixing acid can reduce the pollution to environment greatly through simply recycling after the processing;
(2) adopt the present invention, utilize fine vein quartz ore to be raw material,, promptly obtain d through grinding again after fragmentation, shrend, ball milling, pickling, ultrasonic washing, the drying 50Be the high-purity silicon dioxide micro mist of 300-600nm, wherein SiO 2The quality percentage composition greater than 99.99%, the quality percentage composition of iron contamination is less than 2.12ppm, the quality percentage composition of aluminium impurity is less than 10.06ppm, and whiteness, flowability, dispersiveness are all better;
(3) preparation technology of the present invention is simple, and operation is easy, and operation is practical easily.
Embodiment
Embodiment given below intends so that the present invention is described further; But can not be interpreted as it is restriction to protection domain of the present invention; The technician in this field to some nonessential improvement and adjustment that the present invention makes, still belongs to protection scope of the present invention according to the content of the invention described above.
Embodiment 1:
A kind of method of utilizing natural vein quartz to prepare fine silica powder comprises the following steps:
(1) fragmentation: select SiO for use 2The quality percentage composition be high-quality vein quartz raw ore more than 99% as raw material, utilize jaw crusher that it is crushed to the particle of diameter about for 1-2cm;
(2) high-temperature water quenching: will go up that the raw ore particle that obtains be incubated half a hour in the step under 950 ℃ of high temperature, and put into ultrapure water (deionized water or zero(ppm) water) rapidly, and, obtain ore particles after the shrend through stirring, filtration; The filtrating that to contain vein quartz raw ore particle surface dust discards;
(3) ball milling pickling: ore particles is put into the urethane ball grinder after will going up the shrend that obtains in the step; The mixing acid that utilizes hydrochloric acid (5mol/L) sulfuric acid (6mol/L) volume ratio 1:1 preparation is as ball-milling medium; Agate ball ball milling 6 hours, rotating speed are 500 rev/mins, at last with the acid solution venting;
(4) ultrasonic washing: will go up the micro mist that obtains in the step and in ultrasound environments, utilize ultrapure water (deionized water or zero(ppm) water) to be washed till the pH value for neutral;
(5) dry and grinding: after will going up the silicon powder drying that obtains in the step, put into the urethane ball grinder and utilize the agate ball Ball milling, technical ability obtains d 50Be the high-purity silicon dioxide micro mist of 300-600nm, its SiO 2Quality percentage composition>=99.99%, iron contamination content is less than 2.12ppm, the aluminium foreign matter content is less than 10.06ppm.
Embodiment 2:
A kind of method of utilizing natural vein quartz to prepare fine silica powder comprises the following steps:
A, fragmentation: with SiO 2The vein quartz raw ore of quality percentage composition>=99% be raw material, be ground into the vein quartz raw ore particle that diameter is 1~2cm through crusher (being preferably jaw crusher);
B, high-temperature water quenching: after vein quartz raw ore particle is heated to 950 ℃ temperature and is incubated 40 minutes, put into deionized water or zero(ppm) water rapidly,, obtain ore particles after the shrend through stirring, filtering; The filtrating that to contain vein quartz raw ore particle surface dust discards;
C, ball milling pickling: ore particles after the shrend is put into urethane ball grinder (or other nonmetal ball grinder and ball-grinding machine), and as ball-milling medium,, filter after 4 hours with the agate ball ball milling, filtrating discards, and obtains micro mist with hydrochloric acid and vitriolic mixing acid;
D, ultrasonic washing: with micro mist place ultrasound environments (adopt ultrasonic cleaning machine or other ultrasonic cleaning equipment), with deionized water or distilled water wash 2~5 times, the micro mist that obtains cleaning;
E, drying and grind: with the micro mist of cleaning under 80 ℃ temperature, dry 15 minutes (also can adopt nature to dry and wait other drying mode of the prior art); Remove the water in the clean micro mist; Obtain the exsiccant micro mist; Adopt ball mill with exsiccant micro mist Ball milling, collection again, promptly make d 50Be 300~600nm, SiO 2The content of quality percentage composition>=99.99%, iron contamination less than the content of 2.12ppm, aluminium impurity silicon powder less than 10.06ppm.
Embodiment 3:
A kind of method of utilizing natural vein quartz to prepare fine silica powder comprises the following steps:
A, fragmentation: with SiO 2The vein quartz raw ore of quality percentage composition>=99% be raw material, be ground into the vein quartz raw ore particle that diameter is 1~2cm through crusher (being preferably jaw crusher);
B, high-temperature water quenching: after vein quartz raw ore particle is heated to 1000 ℃ temperature and is incubated 20 minutes, put into deionized water or zero(ppm) water rapidly,, obtain ore particles after the shrend through stirring, filtering; The filtrating that to contain vein quartz raw ore particle surface dust discards;
C, ball milling pickling: ore particles after the shrend is put into urethane ball grinder (or other nonmetal ball grinder and ball-grinding machine), and as ball-milling medium,, filter after 8 hours with the agate ball ball milling, filtrating discards, and obtains micro mist with hydrochloric acid and vitriolic mixing acid;
D, ultrasonic washing: with micro mist place ultrasound environments (adopt ultrasonic cleaning machine or other ultrasonic cleaning equipment), with deionized water or distilled water wash 2~5 times, the micro mist that obtains cleaning;
E, drying and grind: with the micro mist of cleaning under 100 ℃ temperature, dry 5 minutes (also can adopt nature to dry and wait other drying mode of the prior art); Remove the water in the clean micro mist; Obtain the exsiccant micro mist; Adopt ball mill with exsiccant micro mist Ball milling, collection again, promptly make d 50Be 300~600nm, SiO 2The content of quality percentage composition>=99.99%, iron contamination less than the content of 2.12ppm, aluminium impurity silicon powder less than 10.06ppm.
Embodiment 4:
A kind of method of utilizing natural vein quartz to prepare fine silica powder comprises the following steps:
A, fragmentation: with SiO 2The vein quartz raw ore of quality percentage composition>=99% be raw material, be ground into the vein quartz raw ore particle that diameter is 1~2cm through crusher (being preferably jaw crusher);
B, high-temperature water quenching: after vein quartz raw ore particle is heated to 970 ℃ temperature and is incubated 30 minutes, put into deionized water or zero(ppm) water rapidly,, obtain ore particles after the shrend through stirring, filtering; The filtrating that to contain vein quartz raw ore particle surface dust discards;
C, ball milling pickling: ore particles after the shrend is put into urethane ball grinder (or other nonmetal ball grinder and ball-grinding machine), and as ball-milling medium,, filter after 6 hours with the agate ball ball milling, filtrating discards, and obtains micro mist with hydrochloric acid and vitriolic mixing acid;
D, ultrasonic washing: with micro mist place ultrasound environments (adopt ultrasonic cleaning machine or other ultrasonic cleaning equipment), with deionized water or distilled water wash 2~5 times, the micro mist that obtains cleaning;
E, drying and grind: with the micro mist of cleaning under 90 ℃ temperature, dry 10 minutes (also can adopt nature to dry and wait other drying mode of the prior art); Remove the water in the clean micro mist; Obtain the exsiccant micro mist; Adopt ball mill with exsiccant micro mist Ball milling, collection again, promptly make d 50Be 300~600nm, SiO 2The content of quality percentage composition>=99.99%, iron contamination less than the content of 2.12ppm, aluminium impurity silicon powder less than 10.06ppm.
Embodiment 5:
A kind of method of utilizing natural vein quartz to prepare fine silica powder comprises the following steps:
A, fragmentation: with SiO 2The vein quartz raw ore of quality percentage composition>=99% be raw material, be ground into the vein quartz raw ore particle that diameter is 1~2cm through crusher (being preferably jaw crusher);
B, high-temperature water quenching: after vein quartz raw ore particle is heated to 980 ℃ temperature and is incubated 30 minutes, put into deionized water or zero(ppm) water rapidly,, obtain ore particles after the shrend through stirring, filtering; The filtrating that to contain vein quartz raw ore particle surface dust discards;
C, ball milling pickling: ore particles after the shrend is put into urethane ball grinder (or other nonmetal ball grinder and ball-grinding machine), and as ball-milling medium,, filter after 5 hours with the agate ball ball milling, filtrating discards, and obtains micro mist with hydrochloric acid and vitriolic mixing acid;
D, ultrasonic washing: with micro mist place ultrasound environments (adopt ultrasonic cleaning machine or other ultrasonic cleaning equipment), with deionized water or distilled water wash 2~5 times, the micro mist that obtains cleaning;
E, drying and grind: with the micro mist of cleaning under 85 ℃ temperature, dry 10 minutes (also can adopt nature to dry and wait other drying mode of the prior art); Remove the water in the clean micro mist; Obtain the exsiccant micro mist; Adopt ball mill with exsiccant micro mist Ball milling, collection again, promptly make d 50Be 300~600nm, SiO 2The content of quality percentage composition>=99.99%, iron contamination less than the content of 2.12ppm, aluminium impurity silicon powder less than 10.06ppm.
Embodiment 6:
A kind of method of utilizing natural vein quartz to prepare fine silica powder comprises the following steps:
A, fragmentation: with SiO 2The vein quartz raw ore of quality percentage composition>=99% be raw material, be ground into the vein quartz raw ore particle that diameter is 1~2cm through crusher (being preferably jaw crusher);
B, high-temperature water quenching: after vein quartz raw ore particle is heated to 950~1000 ℃ temperature and is incubated 20~40 minutes, put into deionized water or zero(ppm) water rapidly,, obtain ore particles after the shrend through stirring, filtering; The filtrating that to contain vein quartz raw ore particle surface dust discards;
C, ball milling pickling: ore particles after the shrend is put into urethane ball grinder (or other nonmetal ball grinder and ball-grinding machine); With hydrochloric acid and vitriolic mixing acid as ball-milling medium, with the agate ball ball milling after 4~8 hours; Filter, filtrating discards, and obtains micro mist;
D, ultrasonic washing: with micro mist place ultrasound environments (adopt ultrasonic cleaning machine or other ultrasonic cleaning equipment), with deionized water or distilled water wash 2~5 times, the micro mist that obtains cleaning;
E, drying and grind: with the micro mist of cleaning under 80~100 ℃ temperature, dry 5~15 minutes (also can adopt nature to dry and wait other drying mode of the prior art); Remove the water in the clean micro mist; Obtain the exsiccant micro mist; Adopt ball mill with exsiccant micro mist Ball milling, collection again, promptly make d 50Be 300~600nm, SiO 2The content of quality percentage composition>=99.99%, iron contamination less than the content of 2.12ppm, aluminium impurity silicon powder less than 10.06ppm.
In the foregoing description 2~6: hydrochloric acid described in the step c and vitriolic mixing acid can be: get the hydrochloric acid of 4~6mol/L, the sulfuric acid of 4~6mol/L, 1:1 mixes by volume, promptly is made into hydrochloric acid and vitriolic mixing acid.
In the foregoing description 2~6: adopt ball mill that exsiccant micro mist ball milling is preferably described in the step e: the rotating speed that adopts planetary ball mill and control planetary ball mill is 300~600 rev/mins, and the ball milling time is 4~8 hours.
In the foregoing description 2~6: ultrasonic washing described in the steps d be preferably washing to the pH that washs the water behind the micro mist be 6.5~7.5, promptly neutral.
In the foregoing description: each raw material that is adopted is the commercially available prod.
In the foregoing description: in the percentage that is adopted, do not indicate especially, be quality (weight) percentage.
In the foregoing description: the processing parameter in each step (temperature, time, concentration etc.) and each amounts of components numerical value etc. are scope, and any point is all applicable.
The not concrete same prior art of narrating of technology contents in content of the present invention and the foregoing description.
The invention is not restricted to the foregoing description, content of the present invention is said all can implement and have said good result.

Claims (6)

1. a method of utilizing natural vein quartz to prepare fine silica powder is characterized in that comprising the following steps:
A, fragmentation: with SiO 2The vein quartz raw ore of quality percentage composition>=99% be raw material, be ground into the vein quartz raw ore particle that diameter is 1~2cm through crusher;
B, high-temperature water quenching: after vein quartz raw ore particle is heated to 950~1000 ℃ temperature and is incubated 20~40 minutes, put into deionized water or zero(ppm) water rapidly,, obtain ore particles after the shrend through stirring, filtering;
C, ball milling pickling: ore particles after the shrend is put into the urethane ball grinder, as ball-milling medium, after 4~8 hours, filter, obtain micro mist with the agate ball ball milling with hydrochloric acid and vitriolic mixing acid;
D, ultrasonic washing: with micro mist place ultrasound environments, with deionized water or distilled water wash 2~5 times, the micro mist that obtains cleaning;
E, drying and grind: with the micro mist of cleaning under 80~100 ℃ temperature, dry 5~15 minutes, obtain the exsiccant micro mist, adopt ball mill with exsiccant micro mist Ball milling, collection again, promptly make silicon powder.
2. by the said method of utilizing natural vein quartz to prepare fine silica powder of claim 1; It is characterized in that: hydrochloric acid described in the step c and vitriolic mixing acid are: get the hydrochloric acid of 4~6mol/L, the sulfuric acid of 4~6mol/L; 1:1 mixes by volume, promptly is made into hydrochloric acid and vitriolic mixing acid.
3. by claim 1 or the 2 said methods of utilizing natural vein quartz to prepare fine silica powder; It is characterized in that: adopt ball mill with exsiccant micro mist ball milling to be described in the step e: the rotating speed that adopts planetary ball mill and control planetary ball mill is 300~600 rev/mins, and the ball milling time is 4~8 hours.
4. by claim 1 or the 2 said methods of utilizing natural vein quartz to prepare fine silica powder, it is characterized in that: ultrasonic washing described in the steps d be wash to the pH that washs the water behind the micro mist be 6.5~7.5.
5. by the said method of utilizing natural vein quartz to prepare fine silica powder of claim 3, it is characterized in that: ultrasonic washing described in the steps d be wash to the pH that washs the water behind the micro mist be 6.5~7.5.
6. by claim 1 or the 2 said methods of utilizing natural vein quartz to prepare fine silica powder, it is characterized in that: crusher described in the step a is a jaw crusher.
CN2012101412476A 2012-05-09 2012-05-09 Method for preparing silicon dioxide micropowder from natural vein quartz Pending CN102674378A (en)

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CN102887522A (en) * 2012-10-30 2013-01-23 成都理工大学 Process technology for processing 4N high-purity quartz by using vein quartz as raw material
CN102887521A (en) * 2012-10-30 2013-01-23 成都理工大学 Technology for processing 4N high-purity quartz by utilizing vein quartz as raw material
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CN102897772A (en) * 2012-10-30 2013-01-30 成都理工大学 Technology for preparing 4N high-purity quartz by adopting vein quartz as raw material
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CN103613103A (en) * 2013-12-04 2014-03-05 南京工业大学东海先进硅基材料研究院 Method for preparing filler-level silicon micropowder by using waste quartz crucibles as raw materials
CN103627215A (en) * 2013-11-27 2014-03-12 连云港东海硅微粉有限责任公司 Preparation method of submicron silica powder
CN105883820A (en) * 2016-04-19 2016-08-24 赵美玲 Method for preparing high-purity SiO2 ore sand
CN108178159A (en) * 2018-03-16 2018-06-19 湖州长鑫电工材料有限公司 A kind of silicon powder processing pickling grinding device
CN108821297A (en) * 2018-07-07 2018-11-16 河源市极致知管信息科技有限公司 A kind of preparation method of silicon powder
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CN102887521A (en) * 2012-10-30 2013-01-23 成都理工大学 Technology for processing 4N high-purity quartz by utilizing vein quartz as raw material
CN103482627A (en) * 2013-09-03 2014-01-01 大连长信碳化硅微粉有限公司 Production method of silicon carbide micro powder for recrystallization
CN103627215A (en) * 2013-11-27 2014-03-12 连云港东海硅微粉有限责任公司 Preparation method of submicron silica powder
CN103627215B (en) * 2013-11-27 2016-05-11 江苏联瑞新材料股份有限公司 A kind of preparation method of submicron order silicon powder
CN103613103A (en) * 2013-12-04 2014-03-05 南京工业大学东海先进硅基材料研究院 Method for preparing filler-level silicon micropowder by using waste quartz crucibles as raw materials
CN105883820A (en) * 2016-04-19 2016-08-24 赵美玲 Method for preparing high-purity SiO2 ore sand
CN105883820B (en) * 2016-04-19 2018-11-06 赵美玲 A method of preparing high-purity silicon dioxide ore in sand form
CN108178159A (en) * 2018-03-16 2018-06-19 湖州长鑫电工材料有限公司 A kind of silicon powder processing pickling grinding device
CN108821297A (en) * 2018-07-07 2018-11-16 河源市极致知管信息科技有限公司 A kind of preparation method of silicon powder
CN110681472A (en) * 2019-10-09 2020-01-14 广西大化汇邦石材有限公司 Quartz sand pickling-free wampee removing process
CN114074943A (en) * 2021-11-17 2022-02-22 江苏海格新材料有限公司 Preparation method of high-density spherical silicon micro powder for electronic packaging
CN114074943B (en) * 2021-11-17 2022-12-09 江苏海格新材料有限公司 Preparation method of high-density spherical silicon micro powder for electronic packaging

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Application publication date: 20120919