CN102659114B - Air flow distributor for cold hydrogenation reactor - Google Patents
Air flow distributor for cold hydrogenation reactor Download PDFInfo
- Publication number
- CN102659114B CN102659114B CN 201210115712 CN201210115712A CN102659114B CN 102659114 B CN102659114 B CN 102659114B CN 201210115712 CN201210115712 CN 201210115712 CN 201210115712 A CN201210115712 A CN 201210115712A CN 102659114 B CN102659114 B CN 102659114B
- Authority
- CN
- China
- Prior art keywords
- nozzle
- air flow
- hydrogenation reactor
- pipe
- cold hydrogenation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005984 hydrogenation reaction Methods 0.000 title claims abstract description 16
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000005049 silicon tetrachloride Substances 0.000 claims abstract description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000009826 distribution Methods 0.000 claims abstract description 6
- 239000001257 hydrogen Substances 0.000 claims abstract description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 5
- 238000009434 installation Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 14
- 239000007921 spray Substances 0.000 abstract description 7
- 230000004044 response Effects 0.000 abstract description 4
- 230000035484 reaction time Effects 0.000 description 6
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 5
- 239000005052 trichlorosilane Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003190 augmentative effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The utility model relates to an air flow distributor for a cold hydrogenation reactor. The air flow distributor is arranged above a silicon tetrachloride and hydrogen inlet of the cold hydrogenation reactor. The air flow distributor is spray nozzles uniformly distributed on a distribution plate; and the spray nozzles are arranged below an air flow distribution plate. The air flow distributor is characterized in that the spray nozzles are in threaded connection with the distribution plate and are tubular, and the inner wall of each spray nozzle is of an internal thread structure. The total length of each of spray nozzle pipes is 100-150 mm, each of threads formed on the inner wall of the pipe has a length of 80-120 mm, the diameter of an inlet of the pipe is 22 or 28mm, and the diameter of an outlet small hole of the spray nozzle pipe is 10 or 14mm. The response time of eddy current extended gas can be generated.
Description
Technical field
The present invention relates to a kind of silicon tetrachloride changes the cold hydrogenation technology reactor apparatus of trichlorosilane, and air distributor tuyere arrangement especially wherein makes device interior silicon tetrachloride and hydrogen augmenting response area and reduces gas flow rate, thus fully reaction.
Background technology
Cold hydrogenation technology transformation is that the silicon tetrachloride as by-product that will produce in the polysilicon production process is converted into the needed intermediate raw material trichlorosilane of production polysilicon synchronously, the circulation of realization streams closed, not only thoroughly solved production of polysilicon tail gas problem of environmental pollution, and realized comprehensively recyling of by products such as silicon tetrachloride, greatly reduce cost.Corresponding also corresponding production domesticization of cold hydrogenation reactor, and carried out repeatedly improving, but still there are phenomenons such as reaction is not thorough, gas flow rate is too fast in the mixed gas of its cold hydrogenation equipment inside, thus greatly reduce the output of trichlorosilane.
Summary of the invention
The present invention seeks to, propose a kind of cold hydrogenation reactor air distributor.By increasing nozzle internal surface area and the nozzle interior structure on the cold hydrogenation reactor sparger, increase the reaction times of material and reducing medium (silicon tetrachloride and hydrogen) and reduce gas flow rate, more thorough to satisfy the circulation of equipment streams closed, solve mixed gas and still have the halfway problem of reaction.
Technical scheme of the present invention is: cold hydrogenation reactor air distributor, especially silicon tetrachloride changes the air distributor nozzle in the cold hydrogenation reactor of trichlorosilane, it is characterized in that, air distributor evenly is installed on a horizontal section of inside reactor, air distributor is above silicon tetrachloride and hydrogen inlet, air distributor is the nozzle on the even distribution grid distributor, nozzle is that tubulose is arranged in the airflow-distribution board below, nozzle adopts with grid distributor and is threaded, and nozzle inner walls is female thread structure, internal thread especially adopts 60 ° of equilateral helicitic textures, increases about one times internal surface area and prolongs the reaction times with this.
The invention has the beneficial effects as follows: too short in the equipment internal reaction time in order to overcome existing silicon tetrachloride and hydrogen gas mixture, and defectives such as gas flow rate is too fast, by increasing nozzle internal surface area and the nozzle interior structure on the cold hydrogenation reactor sparger, increase the reaction times of material and reducing medium and reduce gas flow rate.Crucial airflow nozzle structure, can satisfy the streams closed circulation of equipment, this nozzle arrangements can make gas augmenting response area by sparger the time, prolong the reduction reaction time, especially reactant gases produces the obstruction generation eddy current of eddy flow and ejection aperture at nozzle inner walls internal thread place, the acting in conjunction of turbulent flow makes reactant gases fully mixed, reduce gas flow rate, thereby fully react, react more thorough.Can improve the output of trichlorosilane more than 5%.
Description of drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is the cross section structure synoptic diagram of Fig. 1.
Specific embodiments
The air distributor nozzle arrangements is shown in Fig. 1-2, spray nozzle density is probably 7%~10%, the right is the outlet of air-flow, left side aperture is the import of air-flow, and nozzle is a pipe, and total length is at 100-150mm, inside pipe wall is provided with the length 2 of screw thread at 80-120mm, inlet diameter 25 ± 3mm, outlet is the diameter 12 ± 2mm of aperture, cone angle 4(profile in the exit) the 75-90 degree; Be provided with on the pipe outer wall screw thread 1 and installation step 3 are installed.Screw thread 5 is the screw thread at 60 ° of angles, the wide 5 ± 1mm of screw thread.Reaction gas flow can make gas augmenting response area by sparger the time through nozzle arrangements of the present invention, and the differential pressure range of nozzle inlet and outlet is about 0.3 ~ 0.8Mpa.Internal thread of the present invention can make reaction gas flow produce eddy current, can prolong the reduction reaction time with the acting in conjunction of turbulent flow, obviously improves reaction efficiency.
Specify concrete processing and implementation scheme of the present invention below: by bar (SB-408 N08800/N08810) under the diagram, about 5mm process redundancy is stayed at the end thread place; The inside and outside overall size of Vehicle Processing is to compact dimensions and utilize machining center (CNC) processing inside and outside size moulding in end; Utilize the moulding of machining center (CNC) processing internal whorl; With distribute firm and hardly with addition of worker's connecting thread 1, and be threaded with sparger and be screwed to the end, be installed in the grid distributor plane, guarantee that all nozzles are on same plane.
Claims (2)
1. cold hydrogenation reactor air distributor, air distributor is above cold hydrogenation reactor silicon tetrachloride and hydrogen inlet, air distributor is the nozzle that is evenly distributed on the grid distributor, nozzle placement is below airflow-distribution board, it is characterized in that nozzle is threaded with the grid distributor employing, and nozzle is tubulose, and inwall is female thread structure; The pipe total length of nozzle is 100-150mm, and the inside pipe wall of nozzle is provided with the length of screw thread at 80-120mm, inlet diameter 25 ± 3mm, the diameter 12 ± 2mm of the outlet aperture of the pipe of nozzle; The interior cone angle in the exit of the pipe of nozzle is 75~90 degree.
2. cold hydrogenation reactor air distributor according to claim 1 is characterized in that the pipe outer wall of nozzle is provided with installation screw thread and installation step.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201210115712 CN102659114B (en) | 2012-04-19 | 2012-04-19 | Air flow distributor for cold hydrogenation reactor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201210115712 CN102659114B (en) | 2012-04-19 | 2012-04-19 | Air flow distributor for cold hydrogenation reactor |
Publications (2)
Publication Number | Publication Date |
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CN102659114A CN102659114A (en) | 2012-09-12 |
CN102659114B true CN102659114B (en) | 2013-08-28 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201210115712 Expired - Fee Related CN102659114B (en) | 2012-04-19 | 2012-04-19 | Air flow distributor for cold hydrogenation reactor |
Country Status (1)
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4213573C2 (en) * | 1991-04-26 | 2003-08-14 | Hemlock Semiconductor Corp | Process for the separation of particulate silicon from a liquid by-product stream containing silanes |
US20100061912A1 (en) * | 2008-09-08 | 2010-03-11 | Stephen Michael Lord | Apparatus for high temperature hydrolysis of water reactive halosilanes and halides and process for making same |
CN201645023U (en) * | 2010-05-08 | 2010-11-24 | 王仲勋 | Improved plasma cutting torch |
CN201906597U (en) * | 2010-12-08 | 2011-07-27 | 湖北江钻天祥化工有限公司 | Gas distributor |
-
2012
- 2012-04-19 CN CN 201210115712 patent/CN102659114B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4213573C2 (en) * | 1991-04-26 | 2003-08-14 | Hemlock Semiconductor Corp | Process for the separation of particulate silicon from a liquid by-product stream containing silanes |
US20100061912A1 (en) * | 2008-09-08 | 2010-03-11 | Stephen Michael Lord | Apparatus for high temperature hydrolysis of water reactive halosilanes and halides and process for making same |
CN201645023U (en) * | 2010-05-08 | 2010-11-24 | 王仲勋 | Improved plasma cutting torch |
CN201906597U (en) * | 2010-12-08 | 2011-07-27 | 湖北江钻天祥化工有限公司 | Gas distributor |
Non-Patent Citations (2)
Title |
---|
气液两相流体润滑技术在滑动轴承中应用的研究;闫通海等;《中国机械工程学会摩擦学分会润滑技术专业委员会第九届润滑技术年会论文集》;20041231;第109-112页 * |
闫通海等.气液两相流体润滑技术在滑动轴承中应用的研究.《中国机械工程学会摩擦学分会润滑技术专业委员会第九届润滑技术年会论文集》.2004,第109-112页. |
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CN102659114A (en) | 2012-09-12 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20120912 Assignee: JIANGSU DUBLE ENGINEERING Co.,Ltd. Assignor: NANJING DUBLE METAL EQUIPMENT ENGINEERING Co.,Ltd. Contract record no.: 2015320000058 Denomination of invention: Air flow distributor for cold hydrogenation reactor Granted publication date: 20130828 License type: Common License Record date: 20150312 |
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LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130828 |
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CF01 | Termination of patent right due to non-payment of annual fee |