CN102659114B - Air flow distributor for cold hydrogenation reactor - Google Patents

Air flow distributor for cold hydrogenation reactor Download PDF

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Publication number
CN102659114B
CN102659114B CN 201210115712 CN201210115712A CN102659114B CN 102659114 B CN102659114 B CN 102659114B CN 201210115712 CN201210115712 CN 201210115712 CN 201210115712 A CN201210115712 A CN 201210115712A CN 102659114 B CN102659114 B CN 102659114B
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CN
China
Prior art keywords
nozzle
air flow
hydrogenation reactor
pipe
cold hydrogenation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201210115712
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Chinese (zh)
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CN102659114A (en
Inventor
钟晓锋
邓家爱
王一德
周景蓉
茆国文
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Nanjing Duble Metal Equipment Engineering Co Ltd
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Nanjing Duble Metal Equipment Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing Duble Metal Equipment Engineering Co Ltd filed Critical Nanjing Duble Metal Equipment Engineering Co Ltd
Priority to CN 201210115712 priority Critical patent/CN102659114B/en
Publication of CN102659114A publication Critical patent/CN102659114A/en
Application granted granted Critical
Publication of CN102659114B publication Critical patent/CN102659114B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to an air flow distributor for a cold hydrogenation reactor. The air flow distributor is arranged above a silicon tetrachloride and hydrogen inlet of the cold hydrogenation reactor. The air flow distributor is spray nozzles uniformly distributed on a distribution plate; and the spray nozzles are arranged below an air flow distribution plate. The air flow distributor is characterized in that the spray nozzles are in threaded connection with the distribution plate and are tubular, and the inner wall of each spray nozzle is of an internal thread structure. The total length of each of spray nozzle pipes is 100-150 mm, each of threads formed on the inner wall of the pipe has a length of 80-120 mm, the diameter of an inlet of the pipe is 22 or 28mm, and the diameter of an outlet small hole of the spray nozzle pipe is 10 or 14mm. The response time of eddy current extended gas can be generated.

Description

Cold hydrogenation reactor air distributor
Technical field
The present invention relates to a kind of silicon tetrachloride changes the cold hydrogenation technology reactor apparatus of trichlorosilane, and air distributor tuyere arrangement especially wherein makes device interior silicon tetrachloride and hydrogen augmenting response area and reduces gas flow rate, thus fully reaction.
Background technology
Cold hydrogenation technology transformation is that the silicon tetrachloride as by-product that will produce in the polysilicon production process is converted into the needed intermediate raw material trichlorosilane of production polysilicon synchronously, the circulation of realization streams closed, not only thoroughly solved production of polysilicon tail gas problem of environmental pollution, and realized comprehensively recyling of by products such as silicon tetrachloride, greatly reduce cost.Corresponding also corresponding production domesticization of cold hydrogenation reactor, and carried out repeatedly improving, but still there are phenomenons such as reaction is not thorough, gas flow rate is too fast in the mixed gas of its cold hydrogenation equipment inside, thus greatly reduce the output of trichlorosilane.
Summary of the invention
The present invention seeks to, propose a kind of cold hydrogenation reactor air distributor.By increasing nozzle internal surface area and the nozzle interior structure on the cold hydrogenation reactor sparger, increase the reaction times of material and reducing medium (silicon tetrachloride and hydrogen) and reduce gas flow rate, more thorough to satisfy the circulation of equipment streams closed, solve mixed gas and still have the halfway problem of reaction.
Technical scheme of the present invention is: cold hydrogenation reactor air distributor, especially silicon tetrachloride changes the air distributor nozzle in the cold hydrogenation reactor of trichlorosilane, it is characterized in that, air distributor evenly is installed on a horizontal section of inside reactor, air distributor is above silicon tetrachloride and hydrogen inlet, air distributor is the nozzle on the even distribution grid distributor, nozzle is that tubulose is arranged in the airflow-distribution board below, nozzle adopts with grid distributor and is threaded, and nozzle inner walls is female thread structure, internal thread especially adopts 60 ° of equilateral helicitic textures, increases about one times internal surface area and prolongs the reaction times with this.
The invention has the beneficial effects as follows: too short in the equipment internal reaction time in order to overcome existing silicon tetrachloride and hydrogen gas mixture, and defectives such as gas flow rate is too fast, by increasing nozzle internal surface area and the nozzle interior structure on the cold hydrogenation reactor sparger, increase the reaction times of material and reducing medium and reduce gas flow rate.Crucial airflow nozzle structure, can satisfy the streams closed circulation of equipment, this nozzle arrangements can make gas augmenting response area by sparger the time, prolong the reduction reaction time, especially reactant gases produces the obstruction generation eddy current of eddy flow and ejection aperture at nozzle inner walls internal thread place, the acting in conjunction of turbulent flow makes reactant gases fully mixed, reduce gas flow rate, thereby fully react, react more thorough.Can improve the output of trichlorosilane more than 5%.
Description of drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is the cross section structure synoptic diagram of Fig. 1.
Specific embodiments
The air distributor nozzle arrangements is shown in Fig. 1-2, spray nozzle density is probably 7%~10%, the right is the outlet of air-flow, left side aperture is the import of air-flow, and nozzle is a pipe, and total length is at 100-150mm, inside pipe wall is provided with the length 2 of screw thread at 80-120mm, inlet diameter 25 ± 3mm, outlet is the diameter 12 ± 2mm of aperture, cone angle 4(profile in the exit) the 75-90 degree; Be provided with on the pipe outer wall screw thread 1 and installation step 3 are installed.Screw thread 5 is the screw thread at 60 ° of angles, the wide 5 ± 1mm of screw thread.Reaction gas flow can make gas augmenting response area by sparger the time through nozzle arrangements of the present invention, and the differential pressure range of nozzle inlet and outlet is about 0.3 ~ 0.8Mpa.Internal thread of the present invention can make reaction gas flow produce eddy current, can prolong the reduction reaction time with the acting in conjunction of turbulent flow, obviously improves reaction efficiency.
Specify concrete processing and implementation scheme of the present invention below: by bar (SB-408 N08800/N08810) under the diagram, about 5mm process redundancy is stayed at the end thread place; The inside and outside overall size of Vehicle Processing is to compact dimensions and utilize machining center (CNC) processing inside and outside size moulding in end; Utilize the moulding of machining center (CNC) processing internal whorl; With distribute firm and hardly with addition of worker's connecting thread 1, and be threaded with sparger and be screwed to the end, be installed in the grid distributor plane, guarantee that all nozzles are on same plane.

Claims (2)

1. cold hydrogenation reactor air distributor, air distributor is above cold hydrogenation reactor silicon tetrachloride and hydrogen inlet, air distributor is the nozzle that is evenly distributed on the grid distributor, nozzle placement is below airflow-distribution board, it is characterized in that nozzle is threaded with the grid distributor employing, and nozzle is tubulose, and inwall is female thread structure; The pipe total length of nozzle is 100-150mm, and the inside pipe wall of nozzle is provided with the length of screw thread at 80-120mm, inlet diameter 25 ± 3mm, the diameter 12 ± 2mm of the outlet aperture of the pipe of nozzle; The interior cone angle in the exit of the pipe of nozzle is 75~90 degree.
2. cold hydrogenation reactor air distributor according to claim 1 is characterized in that the pipe outer wall of nozzle is provided with installation screw thread and installation step.
CN 201210115712 2012-04-19 2012-04-19 Air flow distributor for cold hydrogenation reactor Expired - Fee Related CN102659114B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201210115712 CN102659114B (en) 2012-04-19 2012-04-19 Air flow distributor for cold hydrogenation reactor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201210115712 CN102659114B (en) 2012-04-19 2012-04-19 Air flow distributor for cold hydrogenation reactor

Publications (2)

Publication Number Publication Date
CN102659114A CN102659114A (en) 2012-09-12
CN102659114B true CN102659114B (en) 2013-08-28

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201210115712 Expired - Fee Related CN102659114B (en) 2012-04-19 2012-04-19 Air flow distributor for cold hydrogenation reactor

Country Status (1)

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CN (1) CN102659114B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213573C2 (en) * 1991-04-26 2003-08-14 Hemlock Semiconductor Corp Process for the separation of particulate silicon from a liquid by-product stream containing silanes
US20100061912A1 (en) * 2008-09-08 2010-03-11 Stephen Michael Lord Apparatus for high temperature hydrolysis of water reactive halosilanes and halides and process for making same
CN201645023U (en) * 2010-05-08 2010-11-24 王仲勋 Improved plasma cutting torch
CN201906597U (en) * 2010-12-08 2011-07-27 湖北江钻天祥化工有限公司 Gas distributor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213573C2 (en) * 1991-04-26 2003-08-14 Hemlock Semiconductor Corp Process for the separation of particulate silicon from a liquid by-product stream containing silanes
US20100061912A1 (en) * 2008-09-08 2010-03-11 Stephen Michael Lord Apparatus for high temperature hydrolysis of water reactive halosilanes and halides and process for making same
CN201645023U (en) * 2010-05-08 2010-11-24 王仲勋 Improved plasma cutting torch
CN201906597U (en) * 2010-12-08 2011-07-27 湖北江钻天祥化工有限公司 Gas distributor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
气液两相流体润滑技术在滑动轴承中应用的研究;闫通海等;《中国机械工程学会摩擦学分会润滑技术专业委员会第九届润滑技术年会论文集》;20041231;第109-112页 *
闫通海等.气液两相流体润滑技术在滑动轴承中应用的研究.《中国机械工程学会摩擦学分会润滑技术专业委员会第九届润滑技术年会论文集》.2004,第109-112页.

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20120912

Assignee: JIANGSU DUBLE ENGINEERING Co.,Ltd.

Assignor: NANJING DUBLE METAL EQUIPMENT ENGINEERING Co.,Ltd.

Contract record no.: 2015320000058

Denomination of invention: Air flow distributor for cold hydrogenation reactor

Granted publication date: 20130828

License type: Common License

Record date: 20150312

LICC Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130828

CF01 Termination of patent right due to non-payment of annual fee