CN102658543A - Mechanical arm with detector - Google Patents
Mechanical arm with detector Download PDFInfo
- Publication number
- CN102658543A CN102658543A CN2012101279997A CN201210127999A CN102658543A CN 102658543 A CN102658543 A CN 102658543A CN 2012101279997 A CN2012101279997 A CN 2012101279997A CN 201210127999 A CN201210127999 A CN 201210127999A CN 102658543 A CN102658543 A CN 102658543A
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- leading screw
- support
- gripper
- motion mechanism
- installing hole
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The invention relates to a mechanical arm with a detector, in particular to the mechanical arm with the detector applicable to a light-emitting diode (LED) epitaxial wafer detecting industry. The mechanical arm with the detector mainly comprises a horizontal movement mechanism (12), a vertical movement mechanism (13), a rotation movement mechanism (14), a mechanical claw (11), a detecting element (15) and a frame (16). The mechanical arm with the detector has the advantages of being simple in structure, low in cost and convenient to control, three shafts can move simultaneously, time is greatly saved, one end of the mechanical claw is provided with an air sucking hole matching with an air circuit auxiliary system so as to clamp an epitaxial wafer effectively, the other end of the mechanical claw is provided with the detecting element for detecting whether the epitaxial wafer exists in a detecting bunker and detecting the position of the epitaxial wafer before working, time of idle work is reduced, and the epitaxial wafer is prevented from being damaged.
Description
Technical field
The present invention relates to a kind of manipulator, be applicable to that especially the LED epitaxial wafer detects a kind of manipulator with detector in the industry.
Background technology
Detect in the industry at the LED epitaxial wafer at present, need epitaxial wafer is accurate, fast, the transmission of safety.Transmit with artificial in the past, with the transmission of tweezers gripping epitaxial wafer, such shortcoming is that tweezers damage the epontic rete of epitaxial wafer easily, and is also dangerous in transport process in the magazine of epitaxial wafer and checkout equipment.Development along with society has now had manipulator; The maximum of usefulness are a kind of three folding-jib manipulators; For example; The Chinese patent document discloses a kind of name on September 10th, 2008 and has been called " a kind of robot device " patent publication No. CN10259613A, and this manipulator comprises: first and second arms articulate each other and can move collectively to stretch along baseline and shrink; The connecting rod maintaining body is used for keeping respectively said first arm and second arm and keeps first jiao to be substantially equal to second angle, and said first angle is by the straight line basis angulation that runs through said first arm; Said second angle is the angle that is formed by straight line that runs through said second arm and baseline, and wherein said connecting rod maintaining body comprises: first a universal joint linkage of forming by four pole crank chains, and this first universal joint linkage comprises: first short connecting rod; First long connecting rod, longer than said first short connecting rod, and articulate with first short connecting rod; Second short connecting rod; First short connecting rod, same length also articulates second stock with said first long connecting rod; With the said first stock same length; And with each pivot joint in said first and second short connecting rods, said second long connecting rod intersects with said first long connecting rod, in said first and second short connecting rods one with first and second arms in one be fixedly connected; A second universal joint linkage of forming by four pole crank chains; This second universal joint linkage comprises: the 3rd short connecting rod, and the 3rd long connecting rod, longer than said the 3rd short connecting rod; The 4th short connecting rod; With said the 3rd short connecting rod same length, and articulate with the 3rd long connecting rod, one in third and fourth short connecting rod one first and second long connecting rod with the said first universal joint linkage is fixedly connected; With the 4th long connecting rod; With said the 3rd long connecting rod same length, and with said the 3rd short connecting rod and the 4th connecting rod in each pivot joint, said the 4th long connecting rod intersects with said the 3rd long connecting rod; In said third and fourth long connecting rod one with first and second arms in another be fixedly connected; With said one that is selected from said first and second short connecting rods, and at least one connecting rod is fixedly connected among in said third and fourth long connecting rod said one, and with respect to running through said at least one arm; Along said at least one connecting rod and said at least one roll over, favour with the direction of rotation certain angle forward that collectively contacts described first and second arms and be selected from another at least one arm described in described in said first and second arms and said first and second arms.Its structure more complicated, power source is rearmounted, and distance stability far away is lower to the working end for power source, safeguards inconvenience, costs an arm and a leg.Because this type of manipulator is according to the setting of magazine shape preset program, because the error of epitaxial wafer magazine and magazine, or the operator puts the epitaxial wafer position error arranged in especially working, and the uncertainty appearance of the distance between sheet and the sheet causes breaking epitaxial wafer.Just can be before work if detecting element is housed, survey in the epitaxial wafer magazine and have or not epitaxial wafer and epitaxial wafer position, avoid flogging a dead horse and prevent to break epitaxial wafer.
Summary of the invention
To the problems referred to above, the objective of the invention is based on single armed robot manipulator structure and principle, a kind of manipulator with detector is proposed.
To achieve these goals, the present invention takes following technical scheme:
The present invention relates to and mainly comprises horicontal motion mechanism 12, vertical movement mechanism 13, rotational motion mechanism 14, gripper 11, detecting element 15, frame 16; Wherein, Vertical movement mechanism 13 is fixed on the frame 16; And with respect to stretching on the short transverse on ground, rotational motion mechanism 14 is connected on the vertical movement mechanism 13, and with respect to rotating on the horizontal direction on ground; Horicontal motion mechanism 12 is connected on the rotational motion mechanism 14; And with respect to stretching on the horizontal direction on ground, gripper 11 is connected on the horicontal motion mechanism 12, and gripper 11 comprises gripper mainboard 111; Pressing plate 112 and sucker 113; One end of gripper mainboard 111 has the U type groove thin-walled partial fixing detecting element 15 vertical with length direction, and the middle part has installing hole, and the other end has connection holes and communicates with the connection holes of said sucker 113; The connection holes of gripper mainboard 111 extends to the side and connects pneumatic element, is fixed on sucker 113 on the gripper mainboard 111 through said pressing plate 112 at last; Be fixed with through pressing plate on described gripper 11 working ends that to have suction hole on the sucker 113 be four; Described horicontal motion mechanism 12 comprises horizontal support 121, motor cabinet 122, and leading screw supports 123; Horizontal motor 124, leading screw 125, feed screw nut 126; Wherein horizontal support 121 inside have groove, and all there is installing hole at two ends, and an end is corresponding with motor cabinet 122 installing holes and be fixedly connected; The other end and leading screw support that 123 installing holes are corresponding and be fixedly connected, and motor cabinet 122 supports on 123 with leading screw all to be had the bearing mounting groove and make it coaxial, and horizontal motor 124 installed surfaces and motor cabinet 122 are fixedly connected; Leading screw 125 connects through shaft coupling with horizontal motor 124 output shafts; Leading screw 125 simultaneously and support 123 with leading screw and connects through the bearing rotation with motor cabinet 122, motor cabinet 122 and leading screw 125 installation ends are that stiff end makes the leading screw can not axial float, leading screw support 123 and leading screw 125 installation ends are support end; Feed screw nut 126 is special-shaped; Be located on the leading screw 125, and cooperate sliding-contact with horizontal support 121 inner groovies, make feed screw nut 126 all the time with support 121 keeping parallelism states; There is installing hole and gripper 11 fixing on the feed screw nut 126, make that when horizontal motor 122 drives leading screws 126 and rotates feed screw nut 126 drive grippers 11 can be along rectilinear motion on the length direction of support 121; Described rotational motion mechanism 14 comprises spill spin block 141, reductor 142, rotation support 143; Electric rotating machine 144, wherein, there is installing hole spill spin block 141 upper surfaces; Corresponding with installing hole on the horizontal support 121 of horicontal motion mechanism 12 and be fixedly connected; The lower end has the output shaft of hole through expansion set and reductor 142 and is fixedly connected, and makes horicontal motion mechanism 12 vertical with speed reducer output shaft, and the input that the output shaft of electric rotating machine 144 gos deep into reductor 142 is fixedly connected with it; Reductor 142 installed surfaces are vertically fixing with rotation support 143 upper end installed surfaces; Make spill spin block 141 up, electric rotating machine 144 below, the bottom of rotation support 143 has the installing hole of installing hole and the feed screw nut of vertical movement mechanism 13 corresponding and be fixedly connected.
Advantage of the present invention: simple in structure, cost is low, control is convenient, three axles can move simultaneously; Saved the time greatly; Described gripper one end has suction hole and cooperates the gas circuit accessory system can more effectively firmly grasp epitaxial wafer; The other end of gripper is equipped with detecting element, surveys the position that feed bin has or not epitaxial wafer and epitaxial wafer before the work, reduces the time that flogs a dead horse and prevents to damage epitaxial wafer.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the sketch map of gripper in the accompanying drawing 1;
Fig. 3 is a horicontal motion mechanism sketch map in the accompanying drawing 1;
Fig. 4 is a rotational motion mechanism sketch map in the accompanying drawing 1;
Fig. 5 is the action sketch map of accompanying drawing 1.
The specific embodiment
Through embodiment the present invention is carried out detailed description below in conjunction with accompanying drawing:
Like accompanying drawing 1,2,3,4,5 signals; Label among the figure is represented respectively: 11-gripper, 12-horicontal motion mechanism, 13-vertical movement mechanism, 14-rotational motion mechanism, 15-detecting element, 16-frame, 111-gripper mainboard; The 112-pressing plate, 113-sucker, the horizontal support of 121-, 122-motor cabinet, the support of 123-leading screw, the horizontal motor of 124-, 125-leading screw, 126-feed screw nut, 141-spill spin block, 142-reductor, 143-rotation support, 144-electric rotating machine, 17-epitaxial wafer, 18-magazine.
As shown in Figure 1; The function that manipulator of the present invention can be realized horizontal movement, moves both vertically, rotatablely moves and survey is so the present invention includes horicontal motion mechanism 12, vertical movement mechanism 13, rotational motion mechanism 14, gripper 11, detecting element 15, frame 16.Frame 16 is done and is used for ground or miscellaneous equipment installed surface, and fixes with respect to ground or miscellaneous equipment installed surface; Vertical movement mechanism 13 is fixed on the frame 16, and with respect to stretching on the short transverse on ground; Rotational motion mechanism 14 is connected on the vertical movement mechanism 13, and with respect to rotating on the horizontal direction on ground; Horicontal motion mechanism 12 is connected on the rotational motion mechanism 14, and with respect to stretching on the horizontal direction on ground; Gripper 11 is connected on the horicontal motion mechanism 12 sportswear and gets workpiece.As shown in Figure 2, the gripper 11 of manipulator of the present invention comprises gripper mainboard 111, pressing plate 112 and sucker 113; Said sucker 113 is rectified face for cavity part one and is had four suction holes; Other end bottom surface has connection holes; One end of said gripper mainboard 111 has the U type groove thin-walled partial fixing detecting element 15 vertical with length direction; The middle part has installing hole, and the other end has connection holes and communicates with the connection holes of said sucker 113, and the connection holes of gripper mainboard 111 extends to the side and connects pneumatic element; Be fixed on sucker 113 on the gripper mainboard 111 through said pressing plate 112 at last, guaranteed the sealing of gripper; As shown in Figure 3, the horicontal motion mechanism 12 of manipulator of the present invention comprises horizontal support 121, motor cabinet 122, and leading screw supports 123, horizontal motor 124, leading screw 125, feed screw nut 126; Said horizontal support 121 inside have groove; All there is installing hole at two ends; One end is corresponding with motor cabinet 122 installing holes and be fixedly connected, and it is corresponding and be fixedly connected that the other end and leading screw support 123 installing holes, and said motor cabinet 122 supports on 123 with leading screw all to be had the bearing mounting groove and make it coaxial; Said horizontal motor 124 installed surfaces and motor cabinet 122 are fixedly connected; Said leading screw 125 connects through shaft coupling with horizontal motor 124 output shafts; Leading screw 125 simultaneously and support 123 with leading screw and connects through the bearing rotation with motor cabinet 122, motor cabinet 122 and leading screw 125 installation ends are that stiff end makes the leading screw can not axial float, leading screw support 123 and leading screw 125 installation ends are support end; Said feed screw nut 126 is special-shaped, is located on the leading screw 125, and cooperates sliding-contact with horizontal support 121 inner groovies, make feed screw nut 126 all the time with support 121 keeping parallelism states, have installing hole and gripper 11 to fix in addition on the feed screw nut 126.When horizontal motor 122 drives leading screws 126 and rotates feed screw nut 126 drive grippers 11 can be along rectilinear motion on the length direction of support 121, this structure feed screw nut 126 and horizontal support 122 contact directly that to have omitted guide rail simpler by mechanical mechanism; The frame for movement of vertical movement mechanism 13 is identical with the frame for movement of horicontal motion mechanism 12; As shown in Figure 4, the rotational motion mechanism 14 of manipulator of the present invention comprises spill spin block 141, reductor 142, rotation support 143, electric rotating machine 144; There is installing hole said spill spin block 141 upper surfaces; Corresponding with installing hole on the horizontal support 121 of horicontal motion mechanism 12 and be fixedly connected; The lower end has the output shaft of hole through expansion set and reductor 142 and is fixedly connected, and makes horicontal motion mechanism 12 vertical with speed reducer output shaft; The input that the output shaft of said electric rotating machine 144 gos deep into reductor 142 is fixedly connected with it, and said reductor 142 installed surfaces are vertically fixing with rotation support 143 upper end installed surfaces, make spill spin block 141 up, electric rotating machine 144 below; The bottom of said rotation support 143 has the installing hole of installing hole and the feed screw nut of vertical movement mechanism 13 corresponding and be fixedly connected, so because vertical movement mechanism 13 sees Fig. 3 for details with the feed screw nut position of horicontal motion mechanism 12 similar vertical movement mechanism 13; When electric rotating machine 144 drive speed reducer 142, reductor 142 is rotated with slow-speed of revolution driven rotary piece 141; As shown in Figure 5; The present invention is when work; Horicontal motion mechanism 12, vertical movement mechanism 13 and rotational motion mechanism 14 through the adjustment manipulator make detecting element 15 to and magazine 18 corresponding working position, regulate 13 pairs of magazines of vertical movement mechanism again and survey and check the position that has or not tested epitaxial wafer 17 and epitaxial wafer 17.Horicontal motion mechanism 12, vertical movement mechanism 13 and the rotational motion mechanism 14 of adjusting manipulator then go deep in the magazine 18 gripper 11, cooperate the gas circuit accessory system to hold epitaxial wafer 17, and epitaxial wafer 17 is transported to desired location and carries out further work.
It below only is preferred embodiment of the present invention; Be not that the present invention is done any pro forma restriction; Every foundation technical spirit of the present invention all still belongs in the scope of technical scheme of the present invention any simple modification, equivalent variations and modification that above embodiment did.
Claims (4)
1. manipulator with detector; It is characterized in that: mainly comprise horicontal motion mechanism (12), vertical movement mechanism (13), rotational motion mechanism (14), gripper (11), detecting element (15), frame (16); Wherein, vertical movement mechanism (13) is fixed on the frame (16), and with respect to stretching on the short transverse on ground; Rotational motion mechanism (14) is connected on the vertical movement mechanism (13), and with respect to rotating on the horizontal direction on ground; Horicontal motion mechanism (12) is connected on the rotational motion mechanism (14); And with respect to stretching on the horizontal direction on ground; Gripper (11) is connected on the horicontal motion mechanism (12); Gripper (11) comprises gripper mainboard (111), and pressing plate (112) and sucker (113), an end of gripper mainboard (111) have the U type groove thin-walled partial fixing detecting element (15) vertical with length direction; The middle part has installing hole; The other end has connecting hole and communicates with the connecting hole of said sucker (113), and the connecting hole of gripper mainboard (111) extends to the side and connects pneumatic element, is fixed on sucker (113) on the gripper mainboard (111) through said pressing plate (112).
2. the manipulator of band detector as claimed in claim 1 is characterized in that: being fixed with the suction hole that has on the sucker (113) through pressing plate on described gripper (11) working end is 2-4.
3. the manipulator of band detector as claimed in claim 1; It is characterized in that: described horicontal motion mechanism (12) comprises that horizontal support (121), motor cabinet (122), leading screw support (123), horizontal motor (124), leading screw (125), feed screw nut (126); Wherein horizontal support (121) inside has groove; All there is installing hole at two ends, and an end is corresponding with motor cabinet (122) installing hole and be fixedly connected the other end and the corresponding and fixed connection of leading screw support (123) installing hole; Motor cabinet (122) and leading screw support on (123) all to be had the bearing mounting groove and makes it coaxial; Horizontal motor (124) installed surface is fixedly connected with motor cabinet (122), and leading screw (125) is connected through shaft coupling with horizontal motor (124) output shaft, and leading screw (125) is rotatably connected through bearing simultaneously and with leading screw support (123) and motor cabinet (122); Motor cabinet (122) and leading screw (125) installation end are that stiff end makes the leading screw can not axial float; It is support end with leading screw (125) installation end that leading screw supports (123), and feed screw nut (126) is special-shaped, is located on the leading screw (125); And cooperate sliding-contact with horizontal support (121) inner groovy; Make feed screw nut (126) all the time with support (121) keeping parallelism state, have installing hole and gripper (11) fixing on the feed screw nut (126), make that when horizontal motor (122) drives leading screw (126) and rotates feed screw nut (126) drive grippers (11) can be along rectilinear motion on the length direction of support (121).
4. the manipulator of band detector as claimed in claim 1; It is characterized in that: described rotational motion mechanism (14) comprises spill spin block (141), reductor (142); Rotation support (143), electric rotating machine (144), wherein, there is installing hole spill spin block (141) upper surface; Corresponding with installing hole on the horizontal support (121) of horicontal motion mechanism (12) and be fixedly connected; The lower end has the hole and is fixedly connected with the output shaft of reductor (142) through expansion set, makes horicontal motion mechanism 12 vertical with speed reducer output shaft, and the input that the output shaft of electric rotating machine (144) gos deep into reductor (142) is fixedly connected with it; Reductor (142) installed surface is vertically fixing with rotation support (143) upper end installed surface; Make spill spin block (141) up, electric rotating machine (144) below, the corresponding also fixed connection of the installing hole of installing hole and the feed screw nut of vertical movement mechanism (13) is arranged at the bottom of rotation support (143).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101279997A CN102658543A (en) | 2012-04-27 | 2012-04-27 | Mechanical arm with detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101279997A CN102658543A (en) | 2012-04-27 | 2012-04-27 | Mechanical arm with detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102658543A true CN102658543A (en) | 2012-09-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012101279997A Pending CN102658543A (en) | 2012-04-27 | 2012-04-27 | Mechanical arm with detector |
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| Country | Link |
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| CN (1) | CN102658543A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103196483A (en) * | 2013-03-19 | 2013-07-10 | 沈阳理工大学 | Double-bracket five-degree-of-freedom millimeter wave detection device test platform |
| CN105397828A (en) * | 2015-11-27 | 2016-03-16 | 大连理工大学 | Large-size variable-diameter robot clamp used for processing tubular pile end plates |
| CN105616038A (en) * | 2015-12-25 | 2016-06-01 | 深圳艾尼尔角膜工程有限公司 | Automatic classifying and collecting system and method for cornea packaging bodies |
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| CN1383199A (en) * | 2001-04-25 | 2002-12-04 | 株式会社爱科技 | Driving gear of manipulator |
| US6826977B2 (en) * | 2000-10-24 | 2004-12-07 | Innovative Robotic Solutions | Drive system for multiple axis robot arm |
| CN101383313A (en) * | 2008-10-24 | 2009-03-11 | 陈百捷 | Manipulator for fetching and delivering silicon chip |
| CN102064127A (en) * | 2010-10-11 | 2011-05-18 | 北京自动化技术研究院 | Mechanical hand for fetching and delivering silicon wafers |
| CN202592383U (en) * | 2012-04-27 | 2012-12-12 | 北京中拓机械有限责任公司 | Manipulator with detector |
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2012
- 2012-04-27 CN CN2012101279997A patent/CN102658543A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1195602A (en) * | 1997-04-04 | 1998-10-14 | 三星电子株式会社 | Transfer device and method in handler system |
| US6826977B2 (en) * | 2000-10-24 | 2004-12-07 | Innovative Robotic Solutions | Drive system for multiple axis robot arm |
| CN1383199A (en) * | 2001-04-25 | 2002-12-04 | 株式会社爱科技 | Driving gear of manipulator |
| CN101383313A (en) * | 2008-10-24 | 2009-03-11 | 陈百捷 | Manipulator for fetching and delivering silicon chip |
| CN102064127A (en) * | 2010-10-11 | 2011-05-18 | 北京自动化技术研究院 | Mechanical hand for fetching and delivering silicon wafers |
| CN202592383U (en) * | 2012-04-27 | 2012-12-12 | 北京中拓机械有限责任公司 | Manipulator with detector |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103196483A (en) * | 2013-03-19 | 2013-07-10 | 沈阳理工大学 | Double-bracket five-degree-of-freedom millimeter wave detection device test platform |
| CN103196483B (en) * | 2013-03-19 | 2015-04-08 | 沈阳理工大学 | Double-bracket five-degree-of-freedom millimeter wave detection device test platform |
| CN105397828A (en) * | 2015-11-27 | 2016-03-16 | 大连理工大学 | Large-size variable-diameter robot clamp used for processing tubular pile end plates |
| CN105397828B (en) * | 2015-11-27 | 2017-03-29 | 大连理工大学 | A kind of large scale variable diameters robot clamp for pile end board processing |
| CN105616038A (en) * | 2015-12-25 | 2016-06-01 | 深圳艾尼尔角膜工程有限公司 | Automatic classifying and collecting system and method for cornea packaging bodies |
| CN105616038B (en) * | 2015-12-25 | 2018-01-30 | 深圳艾尼尔角膜工程有限公司 | The mechanized classification collection system and method for a kind of cornea package body |
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Application publication date: 20120912 |