CN102652384A - Method and device for fabricating volume bragg gratings - Google Patents
Method and device for fabricating volume bragg gratings Download PDFInfo
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- CN102652384A CN102652384A CN2010800353111A CN201080035311A CN102652384A CN 102652384 A CN102652384 A CN 102652384A CN 2010800353111 A CN2010800353111 A CN 2010800353111A CN 201080035311 A CN201080035311 A CN 201080035311A CN 102652384 A CN102652384 A CN 102652384A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
- G03H1/024—Hologram nature or properties
- G03H1/0248—Volume holograms
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/0675—Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
- G03H2001/026—Recording materials or recording processes
- G03H2001/0268—Inorganic recording material, e.g. photorefractive crystal [PRC]
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/20—Copying holograms by holographic, i.e. optical means
- G03H2001/205—Subdivided copy, e.g. scanning transfer
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/26—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique
- G03H1/30—Processes or apparatus specially adapted to produce multiple sub- holograms or to obtain images from them, e.g. multicolour technique discrete holograms only
- G03H2001/306—Tiled identical sub-holograms
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H2222/00—Light sources or light beam properties
- G03H2222/36—Scanning light beam
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H2260/00—Recording materials or recording processes
- G03H2260/50—Reactivity or recording processes
- G03H2260/54—Photorefractive reactivity wherein light induces photo-generation, redistribution and trapping of charges then a modification of refractive index, e.g. photorefractive polymer
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
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- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
A system for recording multiple volume Bragg gratings (VBGs) in a photo thermo- refractive material is configured to implement a method which provides for irradiating the material by a coherent light through a phase mask. The system has a plurality of actuators operative to displace the light source, phase mask and material relative to one another so as to mass produce multiple units of the material each having one or more uniformly configured VBGs.
Description
Technical field
The present invention relates to a kind of method of in the photo-thermal refracting glass, making the volume diffraction element.More specific, the present invention relates to a kind of holographic optical elements (HOE), and in particular to a kind of volume Bragg grating of in doping photo-thermal refraction (PFR) glass, making (VBG).
Background technology
Diffraction optical element comprises the refractive index structures that VBG and UV light cause, diffraction optical element is made in the photo-thermal refracting glass, in opto-electronic device, is widely accepted recently.For example, VBG is effective optical solutions of stablizing the output wavelength of commercial lasers diode.
The typical method of a kind of VBG of record relates to the interferometer (referring to United States Patent (USP) 7,391,703, it is incorporated herein by reference in full) based on prism, and said interferometer has the thin microscler photosensitive glass plate of the prism facets of being coupled to.Prism is by under setted wavelength, processing for material transparent.Prism is exposed to incident light wave and causes the record of VBG along the plate surface.
May run into some inconveniences during stating the VBG processing procedure of interferometer method in the use.For example, in order to have homogeneous refractive index variation and index modulation along plate and straddle, exposure intensity should be even.Yet this technically maybe be challenging.And challenge possibly be the spatial stability between light beam and the plate that is coupled to prism, grating repeat to make the said spatial stability of same needs.Coupling between prism and the plate possibly and need favorable mechanical stability to the misalignment sensitivity.Another inconvenience that proposes through this method can comprise said plate is cut into piece taking in indivedual VBG, and this is because when the angle that needs between grating planar and the glass surface, this is to accomplish through the longitudinal direction septum transverse to grating edge.The Volume Grating manufacturing approach of another kind of use face interferometer record (referring to United States Patent (USP) 5,491,570, it is incorporated herein by reference in full) allows to make big and thick volume hologram.As method mentioned above, this method is owing to being difficult to keep the required aligning between the assembly, so possibly be poor efficiency aspect a large amount of productions.In addition, this method does not have teaching to be cut into sheet glass, and this is because final products comprise big and thick volume hologram, but not little VBG.
A kind of method of making Fiber Bragg Grating FBG than the simpler more high-efficiency method of said method of using.Usually use fused silica phase grating mask (referring to United States Patent (USP) 5,367,588, it is incorporated herein by reference in full) that grating is stamped in the fiber optic core." the phase mask laser radiation with ultraviolet light of vertical incidence is impressed into fiber optic core, produces interference pattern by phase mask " (referring to United States Patent (USP) 5,367,588).Structurally, the equipment disposition that is used to carry out this method has radiation to have the fixed light source of the light of Gaussian distribution, and light is incident on the mask, then with optical fiber and put.
Use some clear superiorities of phase mask to comprise use and reliable and grating length repeatably that (but being not limited to) is used for the low relevant excimer laser that grating makes.These advantages are most important for a large amount of productions efficiently.Perhaps, possible one of the result that do not want relevant with the fiber grating production process comes from fixed light source, and said fixed light source normally has the laser of long coherence wavelength.
Generally speaking, can shine the optical fiber of any length, as long as it is no more than mask used size.Yet, be Gaussian distribution in fact by monotype fixed laser radiation emitted, it is characterized in that: along the high strength field of laser axle with along with the avris of said distribution extends away from its axis of centres zone and the less field intensity that changes gradually.Therefore, mask evenly is not exposed to light, and this causes the variation of grating parameter (such as reflectivity and central wavelength).The field uniformity problem is by solving with respect to the laser of mask (referring to United States Patent (USP) 5,066,133, it is incorporated herein by reference in full) dislocation.
Therefore, there are a kind of needs: the method for making VBG with efficient way used in a large amount of production.
Exist another kind to need: make the method for VBG, it is even to it is characterized by exposure (UV).
Also have a kind of needs: make the method for VBG, it is characterized by repeatability, especially the grating cycle of grating parameter, it is quite important in a large amount of production.
Summary of the invention
Satisfy these needs through present disclosure, present disclosure utilizes phase mask and said mask and laser dislocation relative to each other to come a large amount of horizontal holographic elements (such as VBG) of producing in the photo-thermal refracting glass.Disclosed equipment allows homogeneous refractive index variation, central wavelength and radiation dose, high a large amount of productivity or the like, and a large amount of productivity of said height equal 95% of product at least, and it exceeds the quality standard set up and the repeatability of grating parameter.
According to an aspect of present disclosure, disclosed equipment provides the single-piece sheet is exposed to UV light, and UV light is incident between the microscler phase mask between light source and the sheet.Accomplish exposure to shine said equably through the relative dislocation of light source, radiation UV light and mask.Light source preferred (but be not must) moves with respect to fixing mask.
Configuration comprises phase mask and light source, and phase mask and light source be dislocation relative to each other, and said configuration produces a plurality of parallel volume Bragg gratings (VBG), and said VBG is along the exposed of material to be illuminated and extend through exposed and form.Allow cast-cutting saw along grating and non-perpendicular to the grating cutting blade, like institute's teaching in the known systems according to a characteristic stop position in the notable feature of disclosed equipment and method.
According to present disclosure on the other hand, be substituted in the single-piece sheet make VBG and further cutting blade be just to cut into a plurality of even unit at first with what produce indivedual Volume Grating with said.Said individual elements is stacked and is exposed to the UV source of the mode dislocation that can be similar to previous disclosed aspect.
Description of drawings
Can more easily understand the above of method of the present disclosure and other aspects, characteristic and advantage with the detailed description of alterations explaination from hereinafter, wherein:
Fig. 1 is a height sketch can operating the assembly that is used to carry out disclosure method.
Fig. 2 is the sketch of the basic conception of the disclosed method of graphic extension.
Fig. 2 A is the view that has according to the independent unit of the material of the VBG of the component record of Fig. 1.
Fig. 3 is the sketch in conceptive graphic extension known systems.
Fig. 4 graphic extension is according to the cutting bed of disclosed method configuration.
Fig. 5 graphic extension is according to the unit of the material to be illuminated that provides of an aspect of disclosed method.
The flow chart of the key step of disclosed method is represented in Fig. 6 graphic extension.
Embodiment
Now in detail with reference to disclosed system.Under possible situation, use identical or similar reference number to refer to identical similar parts or step with specification graphic.Said graphic be reduced form and with accurate dimension different.
Fig. 1 graphic extension system 10,10 configurations of said system are used for carrying out the method at photo-thermal refracting glass sheet 12 recording volume Bragg gratings (VBG).Said system 10 also comprises light generation component 14, and light generation component 14 can be operated and be used for radiation and be incident on the UV light beam 25 on the phase mask 18.Mask 18 is arranged as with sheet 12 and contacts or approach sheet 12, and sheet 12 and mask axially coextend and be configured to write down the main material of VBG haply.If with the size that is sized to of sheet 12, can arrange several masks along said so greater than mask 18.Mask 18 can be operated with the mode that the technical staff knew in the technical field of manufacturing semiconductors.Sheet 12 comprises the elongate body of extending and being installed to supporter 13 along axle A-A '.System 10 operation makes that mask 18, light source assembly 14 and 12 all can be through actuators 21 and dislocation relative to each other.Hereinafter in the preferred embodiment of explanation.Optical assembly 14 can be operated and be used on the direction of the elongated shaft A-A ' that is parallel to sheet 12 moving with respect to fixing mask 18.The dislocation of light source assembly and mask/sheet combination can be put upside down and make mask 18 and sheet 12 move with respect to UV light beam 25, and mask 18 is perhaps fixed to one another simply displaceablely with the supporter 13,19 that sheet 12 is installed to separately.Dislocation allows to form the grating region 24 of any random length relatively.Even what is more important, the roughly evenly distribution that is displaced in the high strength field that light beam 25 is provided on the grating region 24 relatively of these assemblies.Because irradiation sheet 12 produces a plurality of edges 23 (shown in dotted line) and defines grating region 24 in said, further along edge cuts grating region 24 with form other, unit separated from one another.
Configuration light generation component 14 writes VBG 22 with the desired depth place sheet 12 in and certain Len req along grating region 24.Said assembly comprises light source, and such as laser 26, it can be configured in fact the fiber laser with the fundamental mode radiation output beam 25 with Gaussian distribution.Light beam 25 is propagated along light path and is struck the first smooth reflection subassembly up to it, and such as upper reaches mirror 28, upper reaches mirror 28 is installed on the axle 36, with rotation as can be shown in double-head arrow 16.It is that mask 18 can write that assembly is removed and laser does not vertically have the required separation distance of actual dislocation from VBG that the angle dislocation of mirror 28 allows to be provided with laser 26.Light generation component 14 also disposes optical beam expander, and optical beam expander can comprise two light reflection elements, such as concave mirror 30 and 32.Optical beam expander configuration is used to revise the size of the luminous point that sheet 12 places are produced by interfering beam 38 and 40 respectively.Lap 42 between the interfering beam is big more, and the degree of depth that light propagates in the sheet 12 is big more.The beam spread factor is by the focal length ratio decision of element 30 separately and 32.Therefore, element 30 and 32 should have overlapping focus having collimated light beam output, and this can obtain through these elements of dislocation relative to each other.Finally, scan light reflecting element 34 is delivered extensible beam 25 towards the assembly 44 that writes that comprises mask 18 and sheet 12.Be the overall optical gate region 24 of uniform irradiation required size, can through actuator 21 controllably dislocation element 34 with the uniformity of optimization exposure dose.Perhaps, as stated, respectively with respect to assembly 14 dislocation supporters 13 and 19.
Fig. 2 writes assembly 44 by chart graphic extension VBG.Because the configuration of the system 10 of Fig. 1, to propagate simultaneously and pass mask 18 along with light beam 25 hits sheet 12, grating 22 impresses perpendicular to axle A-A '.This configuration allows simply sheet 12 to be cut into individual elements 50.As shown in Figure 2; The longitudinal size that promptly is parallel to grating 22 on perpendicular to the direction of axle A-A ' 23 is realized cutting along the edge; By contrast, as representing that known technology is (referring to United States Patent (USP) 7,391; 703) shown in Figure 3 striden grating 47 and carried out microscler 46 the cutting of extending and having a plurality of edges 47 along axle C-C '.Technically, along the edge 23 cutting blades 18 to stride the grating cut edge than prior art in fact easy.
Except with reference to figure 1 and Fig. 2, also with reference to figure 2A, mask 18 and main body 12 can be passed through the actuator 21 of Fig. 1 for example and the dislocation around angled ground of vertical direction relative to each other is promptly rotatable, shown in the double-head arrow among Fig. 2.This structure allows to form inclination VBG 22; Shown in Fig. 2 A; The rectangular shaped cells 50 (only showing a unit) that Fig. 2 A graphic extension respectively has (a plurality of) grating 22 is extended with edge 23 angledly, the longitudinal size that is parallel to VBG 22 perpendicular to the direction of the longitudinal axis A-A ' of Fig. 2 on cut edge 23.
With reference to figure 1 and Fig. 4, behind the record of accomplishing VBG 22, sheet 12 can be placed on the translation stage (not shown), and translation stage can be operated to pivot around axle A-A ', shown in the double-head arrow among Fig. 2.This structure allows through sawing 27 main body 12 to be cut into individual elements 50, and each unit 50 has the parallelepiped shape configuration, and wherein grating 22 is perpendicular to the relative end face and bottom surface extension of unit.Perhaps, saw 27 can pivot to produce parallelepiped shape unit 50 with respect to sheet 12.Repeatedly reflection is when making that the latter gets around light source (such as laser diode) when sloping edge 23 is used for not wanting ground, and this kind disposes usefulness.Certainly, but the position of stationary saw 27 and main body 12 is used to make rectangular shaped cells 50 '.
The general step that Fig. 6 graphic extension preceding text are discussed.In step 52, realize the required separation distance adjustment between optical assembly 14 and the mask 18.For providing grating 22 to write the desired depth in main body 12 or its unit 50, in step 54, adjust the light source expander.If desired, but so the relative rotation of execution in step 56 so that VBG 22 is parallel to edge 23 extends (like step 56 ' shown in) or rotate (like step 56 " shown in) with edge 23 angledly.Finally, the cutting bed of the disclosed processing procedure of step 58 graphic extension, wherein individual elements 50 can have like step 58 ' shown in rectangular shape or have like step 58 " shown in sloping edge 23.
Though graphic extension is also described operating structure, those skilled in the art should be expressly understood that this is to be used to explain purpose, and are not breaking away under the spirit and scope of the present invention, can easily make it changing and modification.
Claims (20)
1. method that is used at a plurality of volume Bragg gratings of photo-thermal refractive material main body record said method comprising the steps of:
Phase mask is exposed to coherent beam; And
Through said light beam pass said phase mask and the said photo-thermal refractive material of radiation main body in said main body, forming a plurality of edges that separate, thereby at least one volumes Bragg grating of record in the said body of material between every pair of neighboring edge.
2. method according to claim 1, it also is included in the said main body of cutting in the plane of the longitudinal size that is parallel to said volume Bragg grating, so that a plurality of unit that respectively have at least one volume Bragg grating to be provided.
3. method according to claim 1; It also comprises the relative to each other light source and the said phase mask of the said coherent beam of dislocation radiation, thus the high strength field of the said light beam that evenly distributes haply along the volume Bragg grating zone of the said material that on said a plurality of edges, extends.
4. method according to claim 1; Wherein form said volume Bragg grating and comprise relative to each other and rotate said phase mask and said main body, with the said a plurality of volume Bragg gratings of record in the said main body of extending angledly with respect to said vertical direction around vertical direction.
5. method according to claim 1, it also comprises said main body is cut into a plurality of unit, and at pre-irradiation with said a plurality of element stack together.
6. method according to claim 1; It also comprises relative to each other dislocation cast-cutting saw and said main body; Said main body is cut into a plurality of unit that respectively have the parallelepiped shape cross section, wherein each unit contains the volume Bragg grating that at least one extends perpendicular to the end face and the bottom surface of each unit.
7. method according to claim 1, it comprises also said main body is cut into a plurality of rectangular shaped cells that each unit has at least one volume Bragg grating.
8. method according to claim 1, wherein the said light beam of radiation comprises:
The monotype laser is given in energy supply, therefore launches said light beam, and said light beam is propagated along light path;
Adjustment upper reaches mirror to be to provide the Len req of said light path, and reflection simultaneously is further along the bump light beam of said light path;
The adjustment optical beam expander is to write down said a plurality of volume Bragg grating at the desired depth place in said body of material;
Receive said extensible beam guiding said extensible beam through the scanning reflection device towards said phase mask, and
Relative to each other said scanning reflection device of dislocation and said mask in the said extensible beam of guiding.
9. system that is used at a plurality of volume Bragg gratings of photo-thermal refractive material record, said system comprises:
The lasing light emitter assembly, it can be operated with along light path radiation coherent beam;
Phase mask, the impinging light beam in said lasing light emitter downstream is above that; And
The materials for support body; It is configured to receive from the downstream of said phase mask said photo-thermal refractive material; Wherein pass said mask and shine said material so that a plurality of parallel edges that separate to be provided; Said edge defines a plurality of subregions of said material betwixt, and each subregion in said a plurality of subregions has at least one and is recorded in volume Bragg grating wherein.
10. system according to claim 9, wherein said lasing light emitter assembly comprises: monotype laser, the said light beam of its radiation; Upper reaches reflector, its reflection is further along the light beam of said light path; Expander, it receives said folded light beam and configuration is used to expand said folded light beam; And the scanning reflection device, it guides said extensible beam towards said phase mask.
11. system according to claim 9; It also comprises first linear actuators; Said first linear actuators can be operated and be used for relative to each other said scanning reflection device of dislocation and said phase mask linearly; To shine the desired zone of said material, said desired zone comprises the said a plurality of subregions with uniform strength, and wherein said phase mask is installed on the mask support body that is fixed to said materials for support body displaceablely.
12. system according to claim 9; It also comprises second actuator; Said second actuator can be operated and be used for relative to each other rotating separately material and the supporter of mask around vertical direction, so that the said a plurality of volume Bragg gratings that extend transverse to said vertical direction to be provided; And cutter unit, it can be operated and be used for said material cut is become a plurality of monomeric units.
13. system according to claim 12, wherein said cutter unit can be operated the longitudinal direction that is used for along said edge and is parallel to haply said volume Bragg grating becomes respectively to have one or more volume Bragg gratings with said material cut a plurality of unit.
14. system according to claim 13; Wherein said second actuator can be operated and be used for said mask of dislocation and materials for support body; Make that each unit has the cross section that is selected from the group of being made up of parallelepiped shape unit and rectangular shaped cells after said material cut is become said a plurality of unit.
15. system according to claim 9, wherein said materials for support body configuration is used to support the single-piece sheet of said material.
16. system according to claim 12, wherein said materials for support body is configured to make monomer material spare to be stacked.
17. system according to claim 10, wherein said upper reaches reflector pivots, to adjust the distance between said laser and the said materials for support body.
18. system according to claim 14, wherein one or more volume Bragg gratings of extending of said mask of dislocation and the materials for support body opposite side that makes said rectangular shaped cells respectively have to be parallel to said unit.
19. system according to claim 14, wherein said mask of dislocation and materials for support body make said parallelepiped shape unit respectively have the one or more volume Bragg gratings that extend perpendicular to the relative end face and the bottom surface of said unit.
20. system according to claim 14, wherein said mask of dislocation and materials for support body make said rectangular shaped cells respectively have the one or more volume Bragg gratings that extend with the angle at the relative end face that is different from said unit and the right angle between the bottom surface.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2010/045853 WO2012023932A1 (en) | 2010-08-18 | 2010-08-18 | Method and device for fabricating volume bragg gratings |
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| Publication Number | Publication Date |
|---|---|
| CN102652384A true CN102652384A (en) | 2012-08-29 |
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| CN2010800353111A Pending CN102652384A (en) | 2010-08-18 | 2010-08-18 | Method and device for fabricating volume bragg gratings |
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|---|---|
| EP (1) | EP2606541A4 (en) |
| JP (1) | JP2013536469A (en) |
| KR (1) | KR20130098843A (en) |
| CN (1) | CN102652384A (en) |
| WO (1) | WO2012023932A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102902002A (en) * | 2012-09-25 | 2013-01-30 | 浙江大学 | Reflection type volume holographic Bragg grating ultraviolet exposure method |
| CN104133267B (en) * | 2014-08-19 | 2017-12-26 | 林安英 | The method for making multi-wavelength Volume Bragg grating |
| CN110275244A (en) * | 2019-06-26 | 2019-09-24 | 苏州大学 | A kind of preparation method of volume Bragg grating |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4305473A1 (en) * | 2021-03-08 | 2024-01-17 | Teraxion Inc. | Volume bragg grating in a cylindrical bulk medium |
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| JPH0472782A (en) * | 1990-07-13 | 1992-03-06 | Komatsu Ltd | Narrow band laser oscillation method |
| JPH0497201A (en) * | 1990-08-10 | 1992-03-30 | Matsushita Electric Ind Co Ltd | Production of beam expander and diffraction grating |
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- 2010-08-18 WO PCT/US2010/045853 patent/WO2012023932A1/en active Application Filing
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102902002A (en) * | 2012-09-25 | 2013-01-30 | 浙江大学 | Reflection type volume holographic Bragg grating ultraviolet exposure method |
| CN102902002B (en) * | 2012-09-25 | 2014-06-25 | 浙江大学 | Reflection type volume holographic Bragg grating ultraviolet exposure method |
| CN104133267B (en) * | 2014-08-19 | 2017-12-26 | 林安英 | The method for making multi-wavelength Volume Bragg grating |
| CN110275244A (en) * | 2019-06-26 | 2019-09-24 | 苏州大学 | A kind of preparation method of volume Bragg grating |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2606541A4 (en) | 2014-01-15 |
| JP2013536469A (en) | 2013-09-19 |
| EP2606541A1 (en) | 2013-06-26 |
| WO2012023932A1 (en) | 2012-02-23 |
| KR20130098843A (en) | 2013-09-05 |
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