CN102627255A - Micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel and preparation method thereof - Google Patents
Micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel and a preparation method thereof. The preparation method comprises the steps of: directly preparing a high density and high aspect ratio nano forest structure on each surface of a silicon-based micron dimension groove by utilizing DRIE (Deep Reactive Ion Etching) without mask optimization; then transferring the silicon-based micron dimension groove and the nano forest structure on the surface thereof to PDMS (Polydimethylsiloxane) by utilizing a casting mould method; then carrying out a surface physicochemical treatment on the PDMS by utilizing a DRIE post-treatment technology to reduce a surface energy, thereby realizing the PDMS three-dimensional anti-drag micro-channel with super-hydrophobic properties. The micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel, disclosed by the invention, can improve surface to volume ratio extremely, reduce the surface energy, thereby enabling the surface of the micro-channel to have the super-hydrophobic properties, realize an excellent anti-drag effect, and further improve steady super-hydrophobic properties of the surface, thereby extremely improving the anti-drag effect thereof; and the micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel, disclosed by the invention, has the advantages of simple technology, low cost and easy industrialization.
Description
Technical field
The present invention relates to the micro-processing technology field, particularly a kind of implantable three-dimensional drag reduction fluid channel and preparation method based on the integrated process technology of micro-nano.
Background technology
MEMS (Microelectro mechanical system; MEMS) since last century, the eighties occurred; As a multi-field cross discipline emerging, new and high technology, be described as the new technology revolution that the new century leads the microelectronic industry development, receive domestic and international extensive concern.Wherein, Biomedical MEMS (Bio-medical MEMS) is as one of most important branch of MEMS; Receive the close attention of scientific research institution and industrial circle; Wherein the most noticeable is that micro-total analysis system (micro total analysi ssystems, i.e. μ TAS) is also claimed chip lab (Lab-on-a-chip).It is sample preparation, biochemical reaction and result to be detected three steps be integrated on the single device, and can carry out particular analysis functional integrity micro-system, can be divided into two big types of chip type and non-chip types.The real chip type micro-total analysis system of present its development priority; Comprise two types of micro-array chip (Microarray Chip) and micro-fluidic chips (Microfluidic chip), it is low to have the sample detection threshold value, highly sensitive; Analysis speed is fast; Advantage with low cost has realized industrialization abroad, and the enterprise that produces biochip is thousands of.
The decline core of analysis system of said chip is on substrate, to use micro-processing technology to prepare groove structure, is the basis with analytical chemistry and analytical biochemistry, real-time detection, analysis and the processing of realization biological sample.Its groove structure characteristic size arrives the hundreds of micron tens usually, and is different with the groove of macro-scale, because the influence of dimensional effect; When fluid flowed in the groove structure of micro-nano magnitude, it is very huge that its viscosity resistance becomes, and makes liquid flow difficult unusually; According to Poiseuille's law; The biquadratic of required pressure reduction of passage and size is inversely proportional to, and this means that the driving of microfluid needs very big external motivating force and corresponding driving device (need could smooth and easyly flow by the effect of external motivating force usually), such as Micropump, little valve and little energy etc.; This brings a series of shortcomings, like complex structure, the stability of a system is low, power consumption is high, be difficult to realize microminaturization.Therefore, the fluid channel that realizes having drag-reduction effect is one of key scientific problems of needing to be resolved hurrily of micro-total analysis system research field.
And because the particularity of biomedical sector demand, implantable drag reduction fluid channel more becomes the most important thing of micro-total analysis system research, and wherein modal material is dimethyl silicone polymer (is Polydimethylsiloxane, is abbreviated as PDMS).It is a kind of macromolecule organo-silicon compound, the organosilicon that is otherwise known as, and it is low to have a cost; Nontoxic, nonflammable, bio-compatibility is good; Therefore and characteristics such as light transmission excellence, in technical field of micro and nano fabrication, directions such as particularly micro-fluidic, biomedical micro-system are widely used.Though PDMS material itself promptly has hydrophobicity (contact angle is about 105 °-120 °), under micro-scale, because the remarkable enhancing of laminar flow effect, surface force and capillary effect etc., its viscosity resistance is very big.
Past, a lot of technology were developed in order to realize having the body structure surface of drag-reduction effect during the decade, comprised technology such as polymer drag reducing agent, drag reduction coating, biomimetic features duplicate, the two size granule modifications of micro-nano.Polymer drag reducing agent and drag reduction coating [example: Choi K S; Appl Sci Res, 1989,46:209-216] be to use one type the most widely; Its process is simple; But this injection polymer drag reducing agent or apply the method that the drag reduction coating forms the drag reduction interface, the drag reducer waste is serious, service life wretched insufficiency.
It is through micro-processing technology the natural surface texture with drag-reduction effect to be repeated out that biomimetic features duplicates [example: Bechert D W, AIAA Shear Flow Control Conference, 1985], but its drag reduction efficiency is lower.Recent study personnel proposed a kind of drag reduction runner design based on the two size granule finishinges of micro-nano [example: Lu Si, Chinese science: G collects, 2010; 40:916-924]; Can realize efficient drag-reduction effect, but realize that the two size granule structures of above-mentioned micro-nano need the multistep complicated technology usually, cost is high; What is more important is difficult on sidewall and the end face of groove and realizes the drag reduction structure, promptly can't realize real three-dimensional drag reduction fluid channel.
Summary of the invention
In order to overcome the deficiency of prior art structure, the present invention provides implantable three-dimensional drag reduction fluid channel and the preparation method based on the integrated process technology of micro-nano.
The objective of the invention is to propose a kind of implantable three-dimensional drag reduction fluid channel and preparation method based on the integrated process technology of micro-nano; Utilize no mask to optimize deep reaction ion etching (DRIE) technology; Directly realize high density high-aspect-ratio nanoforest structure in each surface preparation of micro-meter scale groove; Utilize molding method that the nanoforest structure on micro-meter scale groove and surface thereof is transferred on the PDMS then; Utilize the DRIE aftertreatment technology that PDMS is carried out Surface Physical Chemistry again and handle, reduce the surface ability, thereby realize having the three-dimensional drag reduction fluid channel of PDMS of superhydrophobic characteristic; This preparation method's technology is simple, cost is low, drag reduction efficiency is high, and what is more important has implantable.
For achieving the above object, the invention provides a kind of implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of micro-nano, this structure comprises: PDMS substrate, PDMS cover plate, micron groove, nanometer sieve aperture array.
The thickness of PDMS substrate and PDMS cover plate is 50 μ m-1000 μ m;
The PDMS cover plate is bonded on the PDMS substrate;
The micron groove is made on the PDMS substrate, forms closed cavity by PDMS substrate and PDMS cover plate, and cross section is del or falls trapezoidally or semicircle that its characteristic size is 10 μ m-1000 μ m;
Nanometer sieve aperture array is made in a micron flute surfaces, is that diameter is 10nm-1000nm, degree of depth 10nm-5000nm, the sieve aperture of spacing 10nm-1000nm.
The present invention also provides a kind of implantable three-dimensional drag reduction fluid channel preparation method based on the integrated process technology of micro-nano, and this method comprises:
Step 1: through combining the corrosion of photoetching and chemistry or physics, on silicon-based substrate, make micron ditch groove mould, cross section is that triangle is trapezoidal or semicircle;
Step 2: utilize no mask to optimize deep reaction ion etching technology, directly on silica-based micron ditch groove mould and smooth silicon chip surface, make high density high-aspect-ratio nanoforest;
Step 3: utilize PDMS mold technology, the modulation process parameter is a template with silica-based micron ditch groove mould and nanoforest, realizes having the PDMS cover plate of nanometer sieve aperture array, PDMS substrate and micron groove;
Step 4: utilize the DRIE aftertreatment technology, the regulation and control parameter is carried out the physical chemistry processing to PDMS cover plate and PDMS substrate, wherein comprises a micron groove on the PDMS substrate, reduces its surface ability, improves its stable ultra-hydrophobic characteristic;
Step 5: exert pressure through high temperature bonding or normal temperature physics,, form the sealing fluid channel with PDMS substrate and PDMS cover plate bonding.
In the such scheme, no mask is optimized deep reaction ion etching technology described in the step 2, may further comprise the steps: adopt plasma etching or non-plasma etching that silicon chip surface is carried out roughened; Control said DRIE technological parameter, directly prepare high density high-aspect-ratio nanoforest structure.
The technological parameter that said DRIE prepares nanoforest comprises: coil power is 800W-900W; Pressure is 20mTorr-30mTorr; Etching gas SF
6Flow is 20sccm-45sccm, passivation gas C
4F
8Flow is 30sccm-50sccm (SF
6And C
4F
8Gas flow ratio is 1: 1-1: 2); Dull and stereotyped power is 6W-12W; Etching/passivation time is than being 10s: 10s-4s: 4s; Etching/passivation cycle 60-200 time.
In the such scheme, technological parameter comprises described in the step 3: temperature is 50-100 ℃, and the time is 30 minutes-2 hours.
In the such scheme, the aftertreatment technology of DRIE described in the step 4 parameter comprises: coil power is 800W-900W; Pressure is 20mTorr-30mTorr; Etching gas SF
6Flow is 0sccm, passivation gas C
4F
8Flow is 30sccm-50sccm; Dull and stereotyped power is 6W-12W; Etching/passivation time is than being 0s: 10s-0s: 4s; Etching/passivation cycle 1-40 time.
Beneficial effect of the present invention:
1, the implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of micro-nano of the present invention's proposition; Optimize DRIE technology owing to adopt no mask; On the basis of not destroying original micro-meter scale structure; All but growing high density high-aspect-ratio nanoscale is bored sharp array on each surface of micron groove, realizes that nanoforest covers 100% of micron groove; And adopt the mold technology can above-mentioned micro-nano compound structure figure be transferred to the PDMS surface, thereby realize real three-dimensional drag reduction fluid channel.
2, the implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of micro-nano of the present invention's proposition; Owing to realized high density nanoscale sieve aperture array in each surface preparation of micron groove; Therefore can greatly improve its area-volume ratio; Thereby make the fluid channel surface have superhydrophobic characteristic, realize the effect of excellent drag reduction.
3, the implantable three-dimensional drag reduction fluid channel preparation method based on the integrated process technology of micro-nano of the present invention's proposition utilizes no mask to optimize DRIE technology and PDMS mold technology, only needs two step process; Can realize the PDMS micro-nano compound structure; Technology is simple, and is with low cost, is easy to industrialization.
4, the implantable three-dimensional drag reduction fluid channel preparation method based on the integrated process technology of micro-nano of the present invention's proposition; Utilize plasma technique that PDMS cover plate and micron groove are handled; Can increase its roughness from the physics angle of taking on a new look; And from its surface ability of the fluorine-based polymer reduction of chemical modification angle deposit, thereby further improve its stable ultra-hydrophobic characteristic, thus its drag-reduction effect greatly improved.
Description of drawings
When combining accompanying drawing to consider; Through with reference to following detailed, can more completely understand the present invention better and learn wherein many attendant advantages easily, but accompanying drawing described herein is used to provide further understanding of the present invention; Constitute a part of the present invention; Illustrative examples of the present invention and explanation thereof are used to explain the present invention, do not constitute to improper qualification of the present invention, wherein:
Fig. 1 (a) is one of the implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of a micro-nano of the present invention sketch map;
Fig. 1 (b) is two sketch mapes of the implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of micro-nano of the present invention;
Fig. 1 (c) is three sketch mapes of the implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of micro-nano of the present invention;
Fig. 2 is the implantable three-dimensional drag reduction fluid channel preparation method process chart based on the integrated process technology of micro-nano of the present invention;
Fig. 3 is the micron groove stereoscan photograph of the implantable three-dimensional drag reduction fluid channel based on the integrated process technology of micro-nano of the present invention;
Fig. 4 is the PDMS cover plate stereoscan photograph at the implantable three-dimensional drag reduction fluid channel top based on the integrated process technology of micro-nano of the present invention;
Fig. 5 is the implantable three-dimensional drag reduction fluid channel contact angle test result figure based on the integrated process technology of micro-nano of the present invention.
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
The specific embodiment
Obviously, many modifications and the variation made based on aim of the present invention of those skilled in the art belongs to protection scope of the present invention.
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and the specific embodiment embodiment of the invention done further detailed explanation.
Set forth the concrete steps of a kind of implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of micro-nano provided by the invention and preparation method thereof below in conjunction with accompanying drawing 1 to Fig. 5.
With reference to Fig. 1, Fig. 1 (a) is the implantable three-dimensional drag reduction fluid channel structural representation based on the integrated process technology of micro-nano of the present invention to Fig. 1 (c), and its cross section is respectively: Fig. 1 (a) del structure, Fig. 1 (b) inverted trapezoidal structure, Fig. 1 (c) semicircular structure.Its structure comprises: PDMS substrate 1, PDMS cover plate 2, micron groove 3, nanometer sieve aperture array 4.
With reference to Fig. 2, Fig. 2 is the implantable three-dimensional drag reduction fluid channel preparation method process chart based on the integrated process technology of micro-nano of the present invention.Then Fig. 1 (a) is following to the preparation process of structure shown in Fig. 1 (c):
Step 110: through combining the corrosion of photoetching and chemistry or physics, on silicon-based substrate, make micron ditch groove mould, cross section is that triangle is trapezoidal or semicircle, and its characteristic size is 1 μ m-1000 μ m;
Step 120: utilize no mask to optimize deep reaction ion etching technology; Directly on silica-based micron ditch groove mould and smooth silicon chip surface, make high density high-aspect-ratio nanoforest structure; Be that diameter is 50nm-1000nm, height 100nm-5000nm, the silicon awl of spacing 100nm-1000nm;
Step 130: utilize PDMS mold technology; The modulation process parameter: temperature is 50-100 ℃; Time is 30 minutes-2 hours; With silica-based micron ditch groove mould and nanoforest is template, realizes having the PDMS cover plate 2 and PDMS substrate 1 of nanometer sieve aperture array 4, wherein comprises micron groove 3 on the PDMS substrate 1;
Step 140: utilize the DRIE aftertreatment technology, the regulation and control parameter is carried out physical chemistry to PDMS cover plate 2 and PDMS substrate 1 and is handled, and wherein comprises micron groove 3 on the PDMS substrate 1, reduces its surface ability, improves its stable ultra-hydrophobic characteristic;
Step 150: exert pressure through high temperature bonding or normal temperature physics,, form the sealing fluid channel with PDMS substrate 1 and PDMS cover plate 2 bondings.
With reference to Fig. 3, Fig. 3 is the micron groove stereoscan photograph of the implantable three-dimensional drag reduction fluid channel based on the integrated process technology of micro-nano of the present invention, and its cross section is a del, and base material is PDMS.Cross section described in the above-mentioned steps 130 is del or falls trapezoidally or semicircle that its groove depth is 1 μ m-500 μ m, and groove width is 1 μ m-1000 μ m.
With reference to Fig. 4, Fig. 4 is the PDMS cover plate stereoscan photograph at the implantable three-dimensional drag reduction fluid channel top based on the integrated process technology of micro-nano of the present invention.The array of nanometer sieve aperture described in the above-mentioned steps 130, diameter is 10nm-1000nm, degree of depth 10nm-5000nm, spacing 10nm-1000nm.
With reference to Fig. 5, Fig. 5 is the implantable three-dimensional drag reduction fluid channel contact angle test result figure based on the integrated process technology of micro-nano of the present invention, and its contact angle has excellent super-hydrophobic property of reduction drag greater than 170 °.
As stated, embodiments of the invention have been carried out explanation at length, but as long as not breaking away from inventive point of the present invention and effect in fact can have a lot of distortion, this will be readily apparent to persons skilled in the art.Therefore, such variation also all is included within protection scope of the present invention.
Claims (7)
1. implantable three-dimensional drag reduction fluid channel preparation method based on the integrated process technology of micro-nano; It is characterized in that: utilize no mask to optimize deep reaction ion etching (DRIE) technology; Directly realize high density high-aspect-ratio nanoforest structure in each surface preparation of micro-meter scale groove; Utilize molding method that the nanoforest structure on micro-meter scale groove and surface thereof is transferred on the PDMS then; Utilize the DRIE aftertreatment technology that PDMS is carried out Surface Physical Chemistry again and handle, reduce the surface ability, thereby realize having the three-dimensional drag reduction fluid channel of PDMS of superhydrophobic characteristic.
2. a kind of implantable three-dimensional drag reduction fluid channel preparation method based on the integrated process technology of micro-nano according to claim 1 comprises:
Step 1: through combining the corrosion of photoetching and chemistry or physics, on silicon-based substrate, make micron ditch groove mould, cross section is that triangle is trapezoidal or semicircle;
Step 2: utilize no mask to optimize deep reaction ion etching technology, directly on silica-based micron ditch groove mould and smooth silicon chip surface, make high density high-aspect-ratio nanoforest;
Step 3: utilize PDMS mold technology, the modulation process parameter is a template with silica-based micron ditch groove mould and nanoforest, realizes having the PDMS cover plate of nanometer sieve aperture array, PDMS substrate and micron groove;
Step 4: utilize the DRIE aftertreatment technology, the regulation and control parameter is carried out the physical chemistry processing to PDMS cover plate and PDMS substrate, wherein comprises a micron groove on the PDMS substrate, reduces its surface ability, improves its stable ultra-hydrophobic characteristic;
Step 5: exert pressure through high temperature bonding or normal temperature physics,, form the sealing fluid channel with PDMS substrate and PDMS cover plate bonding.
3. a kind of implantable three-dimensional drag reduction fluid channel preparation method according to claim 1 and 2 based on the integrated process technology of micro-nano; It is characterized in that: no mask is optimized deep reaction ion etching technology described in the step 2, may further comprise the steps: adopt plasma etching or non-plasma etching that silicon chip surface is carried out roughened; Control said DRIE technological parameter, directly prepare high density high-aspect-ratio nanoforest structure.
4. a kind of implantable three-dimensional drag reduction fluid channel preparation method according to claim 1 and 2 based on the integrated process technology of micro-nano, it is characterized in that: the technological parameter that said DRIE prepares nanoforest comprises: coil power is 800W-900W; Pressure is 20mTorr-30mTorr; Etching gas SF
6Flow is 20sccm-45sccm, passivation gas C
4F
8Flow is 30sccm-50sccm (SF
6And C
4F
8Gas flow ratio is 1: 1-1: 2); Dull and stereotyped power is 6W-12W; Etching/passivation time is than being 10s: 10s-4s: 4s; Etching/passivation cycle 60-200 time.
5. a kind of implantable three-dimensional drag reduction fluid channel preparation method according to claim 1 and 2 based on the integrated process technology of micro-nano, it is characterized in that: technological parameter comprises described in the step 3: temperature is 50-100 ℃, the time is 30 minutes-2 hours.
6. a kind of implantable three-dimensional drag reduction fluid channel preparation method according to claim 1 and 2 based on the integrated process technology of micro-nano, it is characterized in that: the aftertreatment technology of DRIE described in the step 4 parameter comprises: coil power is 800W-900W; Pressure is 20mTorr-30mTorr; Etching gas SF
6Flow is 0sccm, passivation gas C
4F
8Flow is 30sccm-50sccm; Dull and stereotyped power is 6W-12W; Etching/passivation time is than being 0s: 10s-0s: 4s; Etching/passivation cycle 1-40 time.
7. the implantable three-dimensional drag reduction fluid channel structure based on the integrated process technology of micro-nano is characterized in that comprising: PDMS substrate, PDMS cover plate, micron groove, nanometer sieve aperture array;
Substrate and cover plate are dimethyl silicone polymer, and thickness is 50 μ m-1000 μ m;
Cover plate is bonded on the substrate;
The micron groove is made on the substrate, forms closed cavity by substrate and cover plate, and cross section is del or falls trapezoidally or semicircle that its characteristic size is 10 μ m-1000 μ m;
Nanometer sieve aperture array is made in a micron flute surfaces, is that diameter is 10nm-1000nm, degree of depth 10nm-5000nm, the sieve aperture of spacing 10nm-1000nm.
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