CN102626985B

CN102626985B - Manufacturing method of sealing component and forming device

Info

Publication number: CN102626985B
Application number: CN201210021616.8A
Authority: CN
Inventors: 糸山龙二; 长野元泰; 古贺裕明; 牧之濑泰裕
Original assignee: Ulvac Kiko Inc
Current assignee: Ulvac Kiko Inc
Priority date: 2011-02-01
Filing date: 2012-01-31
Publication date: 2014-11-05
Anticipated expiration: 2032-01-31
Also published as: TWI471486B; CN102626985A; JP5764337B2; KR101338773B1; JP2012159041A; TW201237270A; KR20120089194A

Abstract

The invention provides a manufacturing method of a sealing component realizing the sealing performance between a cylinder and a piston and improving the durability of a pump, and a forming device. In the manufacturing method, the sealing component is provided with a flat part (50a) and a sealing part (50b). The method includes installing a round resin plate (50S) having larger innder diameter than a first cylinder part (111) on a first tool (110) provided with the first cylinder part (111) and the first bottom face part (112); installing a second tool (120) provided with a second cylinder part (121) and a second bottom face part (122) on the first tool (110); clamping and pressing a plate component (50S) with a predetermined pressure through the first bottom face part (111) and the second bottom face part (122) and heating to a predetermined temperature. Thus, the flat part (50a) is formed between the first bottom face part (112) and the second bottom face part (122). The sealing part (50b) is formed between the first cylinder part (111) and the second cylinder part (121).

Description

The manufacture method of containment member and shaped device

Technical field

The present invention relates to the containment member that a kind of reciprocating motion by the piston in cylinder carries the piston vacuum pump (vibrating armature pump) of gas to use, more specifically, relate to a kind of manufacture method of the containment member on the piston sliding and shaped device adapting with it of being installed in cylinder.

Background technology

Piston vacuum pump refers to the piston that possesses cylinder and can move at cylinder internal, and by the reciprocating motion of the piston in cylinder, carries out alternately the volume handover formula dry vacuum pump of air-breathing and exhaust.

This vavuum pump requires to have sealing between cylinder inner face and piston side face.For example, in following patent documentation 1, recorded a kind of vavuum pump, it possesses cup washer, this cup washer have to the air-breathing exhaust chamber with respect to being formed by cylinder and piston away from the direction auxiliary seal portion of extending.Described auxiliary seal portion is integrally formed as flange-like in the edge of cup washer.

[prior art document]

[patent documentation]

[patent documentation 1] TOHKEMY 2003-328937 communique

Summary of the invention

In recent years, for piston vacuum pump, require to improve the sealing between cylinder and piston, and improve the durability of vavuum pump.But the sealing of the piston sliding at cylinder inner face exists time dependent wearing and tearing, the tendency that the more sealings of wear extent are lower occurred along with the duration of runs of pump.Its result, exhaust performance reduces, the lifetime of pump.

In view of above situation, the object of the present invention is to provide a kind of manufacture method and the shaped device that can realize the containment member of the durability that maintains the sealing between cylinder and piston and improve pump.

For reaching described object, in the manufacture method of the containment member that an embodiment of the invention relate to, the annular seal portion that sealing member is installed in cylinder on reciprocating piston and has circular flat face and be formed at described planar portions periphery, the method comprises: possessing on the first tool of the first bottom surface sections that has the first cylindrical portion of the first internal diameter and be formed at described first cylindrical portion one end, the circular resin plate with first external diameter larger than described the first internal diameter is installed;

By possessing the second tool that there is the second cylindrical portion of second external diameter less than described the first internal diameter and be formed at second bottom surface sections of described second cylindrical portion one end, be installed on described the first tool;

By described the first bottom surface sections and described the second bottom surface sections, with authorized pressure, clamp described board member, and described the first tool and described the second tool are heated to set point of temperature, thereby between described the first bottom surface sections and described the second bottom surface sections, form described planar portions, between described the first cylindrical portion and described the second cylindrical portion, form described sealing.

The shaped device that embodiments of the present invention relate to possesses metal the first tool, metal the second tool and clamping device.

Described the first tool comprises having first end the first cylindrical portion forming with the first internal diameter and the first bottom surface sections that is formed at described first end, and the circular resin plate with first external diameter larger than described the first internal diameter is installed;

Described the second tool comprises having the second end the second cylindrical portion forming with the second external diameter less than described the first internal diameter and the second bottom surface sections that is formed at described the second end.Described the second tool clamps described resin plate by described the first bottom surface sections and described the second bottom surface sections, clamps the periphery of described resin plate by described the first cylindrical portion and described the second cylindrical portion;

Described clamping device makes described the first bottom surface sections and the approaching direction of described the second bottom surface sections clamp described the first tool and described the second tool.

Accompanying drawing explanation

Fig. 1 is the summary generalized section that shows the vacuum pump structure that possesses the piston that the containment member that embodiments of the present invention relate to has been installed;

Fig. 2 is the enlarged drawing that shows described piston and Margin structure thereof;

Fig. 3 is the schematic diagram of the action of the described piston of explanation;

Fig. 4 is the exploded perspective view of the shaped device of containment member described in moulding;

Fig. 5 is the summary generalized section of described shaped device;

Fig. 6 is the summary section of explanation from the operation of described shaped device taking-up containment member;

Fig. 7 is the experimental result that shows the wear extent of each containment member while using a plurality of containment members made from different conditions of molding to form vavuum pump;

Fig. 8 is the experimental result that shows the power consumption of this vavuum pump while using a plurality of containment members made from different conditions of molding to form vavuum pump;

Fig. 9 shows the forming temperature of described containment member and the experimental result of the relation between wear extent;

Figure 10 is the experimental result that shows the relation between the forming temperature of described containment member and the power consumption of vavuum pump;

Figure 11 is the experimental result that shows the relation between the forming temperature of described containment member and the temperature ascending amount of vavuum pump.

Description of reference numerals

1 vavuum pump

5 pistons

50 containment members

50a planar portions

50b sealing

50S resin plate

100 shaped devices

110 first tools

111 first cylindrical portion

112 first bottom surface sections

113 first fitting portions

120 second tools

121 second cylindrical portion

122 second bottom surface sections

123 second fitting portions

130 securing members

The specific embodiment

In the manufacture method of the containment member that embodiments of the present invention relate to, the annular seal portion that sealing member is installed in cylinder on reciprocating piston and has circular flat face and be formed at the periphery of described planar portions, the method comprises: possessing on the first tool of the first bottom surface sections that has the first cylindrical portion of the first internal diameter and be formed at described first cylindrical portion one end, the circular resin plate with first external diameter larger than described the first internal diameter is installed;

Possessing the second tool that has the second cylindrical portion of second external diameter less than described the first internal diameter and be formed at second bottom surface sections of described second cylindrical portion one end is installed on described the first tool;

Described resin plate is clamped with authorized pressure by the first tool and the second tool, and is heated to set point of temperature, thereby forms the containment member that has planar portions and be formed at the annular seal portion of described planar portions periphery.By described manufacture method, due to one side heated sealant member forming seal member thereby can adjust the elastic force for the footpath foreign side of sealing on one side.That is, by hot briquetting containment member, compare the situation of non-hot briquetting, can reduce to the elastic force of the footpath foreign side of sealing.

Therefore, while using on the piston that sealing member is installed on to dry vacuum pump, can make the sealing of containment member with the inner face of suitable press connecting cylinder, thereby suppress the unnecessary wearing and tearing of sealing.Thus, can realize the durability that maintains the sealing between cylinder and piston and improve pump.In addition, owing to can maintaining the good sealing property of sealing, so can realize the reduction of the power consumption of pump.

Described set point of temperature is not particularly limited, and can suitably set according to the sealing characteristics of the size of containment member, requirement and durability.There is heating-up temperature lower to the larger tendency of elastic force of the footpath foreign side of sealing, and the lower tendency of the higher described elastic force of heating-up temperature.In an embodiment, described set point of temperature for for example 160 ℃ above, below 250 ℃.

The structural material of described resin plate is also not particularly limited, for example, polyfluortetraethylene plate, consist of.

The shaped device that embodiments of the present invention relate to is the shaped device of the circular resin plate of moulding, possesses metal the first tool, metal the second tool and clamping device.

Described the first tool comprises having first end the first cylindrical portion forming with the first internal diameter and be formed at the first bottom surface sections on described first end, and the circular resin plate with first external diameter larger than described the first internal diameter is installed;

Described the second tool comprises having the second end the second cylindrical portion forming with the second external diameter less than described the first internal diameter and be formed at the second bottom surface sections on described the second end.Described the second tool clamps described resin plate by described the first bottom surface sections and described the second bottom surface sections, clamps the periphery of described resin plate by described the first cylindrical portion and described the second cylindrical portion;

Described resin plate has than the large external diameter of described the first internal diameter.The first tool and the second tool clamp described resin plate with authorized pressure.In addition, because the first tool and the second tool are all metal systems, the heat of therefore supplying with from outside can be passed to resin plate effectively.Therefore, by described shaped device, can carry out resin plate is pressed into the state of regulation shape the heat treated of resin plate, so can have the elastic force of radius vector foreign side through the containment member of the sealing of appropriateness adjustment by forming device.

Described shaped device can also possess the heating arrangements of described the first tool of heating and described the second tool.Described heating arrangements can be installed at least one of the first tool and the second tool, also can form respectively with described tool.

Described the first tool can also possess the center that is arranged at described the first cylindrical portion first fitting portion that can be embedded in the centre bore of described resin plate.On the other hand, described the second tool can also possess the center that is arranged at described the second cylindrical portion second fitting portion that can be embedded in described the first fitting portion.

Thus, can be formed uniformly sealing at the circumference of resin plate.In addition, can relative the first tool, locate fully accurately resin plate and the second tool.

Below, by reference to the accompanying drawings embodiments of the present invention are described.

Fig. 1 shows the generalized section of an example of the applicable vavuum pump of containment member that embodiments of the present invention relate to.In present embodiment, vavuum pump be take and shaken piston-type dry vacuum pump and describe as example.

[schematic configuration of vavuum pump]

As shown in the drawing, vavuum pump 1 possesses motor 2, power transmission shaft 3, connecting rod 4, piston 5, cylinder 6, induction chamber 7 and exhaust chamber 8.Connecting rod 4, piston 5, cylinder 6, induction chamber 7 and exhaust chamber 8 form " inflator ", and this vavuum pump 1 has two inflators.Fig. 2 is the enlarged drawing of inflator.And the quantity of inflator is not limited to two, can be more than one or three.

In vavuum pump 1, be connected with connecting rod 4 being connected on the power transmission shaft 3 of motor 2, on connecting rod 4, be connected with piston 5.Piston 5 is contained in cylinder 6.In cylinder 6, induction chamber 7 and exhaust chamber 8 are in abutting connection with arranging.In described structure, power transmission shaft 3, connecting rod 4, piston 5, cylinder 6 are contained in framework 9.

Motor 2 produces rotary power, and power transmission shaft 3 is pivoted.Motor 2 consists of general motor, for example DC brushless motor.

The internal direct wire of power transmission shaft 3 from motor 2 to framework 9 extended, and can be situated between and is rotatably supported in framework 9 by bearing 10.

One end of connecting rod 4 is connected in power transmission shaft 3 by eccentric shaft 12 and bearing 11, and the other end is connected in piston 5.Connecting rod 4 and eccentric shaft 12 are converted to rotatablely moving of power transmission shaft 3 back and forth (to shake) motion.

Piston 5 in the interior reciprocating motion of cylinder 6, carries out air-breathing and exhaust by connecting rod 4.Vavuum pump 1 possesses the containment member 50 of sealing between piston 5 and cylinder 6.Containment member 50 is installed on piston 5.Piston 5 has piston main body 51 and fixing tool 52.

The integrated leading section that is formed at connecting rod 4 of piston main body 51.Fixedly tool 52 is installed on piston main body 51, fixing seal member 50.Containment member 50 is held on piston main body 51 and fixedly between tool 52.Containment member 50 is circular resin plate, in present embodiment, fluororesin such as polytetrafluoroethylene (PTFE), consists of.

Containment member 50 is configured to have and is held on piston main body 51 and the fixing planar portions 50a between tool 52 and be formed at the cup washer of sealing 50b of the periphery of planar portions 50a.Sealing 50b extends to connecting rod 4 sides from the week face of planar portions 50a, between the inner face of cylinder 6 and the side face of piston 5.Then, during the reciprocating motion of the piston 5 of sealing 50b in cylinder 6, the function of performance packed-piston 5 and cylinder 6.

Cylinder 6 is the cylindrical chamber with the internal diameter approaching with the external diameter of piston 5, is configured to and can inserts piston 5.In cylinder 6, be provided with inlet valve 13 and air bleeding valve 14, these valves open and close corresponding to the reciprocating motion of piston 5.

Induction chamber 7 is communicated with cylinder 6 via inlet valve 13, is connected with air intake duct 15 in induction chamber 7.Air intake duct 15 is connected in the exhaust objects such as chamber.

Exhaust chamber 8 is communicated with cylinder 6 via air bleeding valve 14, is connected with blast pipe 16 in exhaust chamber 8.Blast pipe 16 is connected in atmosphere or exhaust equipment etc.

In addition, Fig. 2 observes the figure of inflator from the direction parallel with power transmission shaft 3, for convenience of explanation induction chamber 7 and exhaust chamber 8 towards, differently represent with Fig. 1.

[action of vavuum pump]

Then, the action for vavuum pump 1 describes.In addition, at this, for an inflator of vavuum pump 1, describe, the action of other inflators is identical.Fig. 3 shows the schematic diagram of the swing movement of piston 5.Order driven plunger 5 according to Fig. 3 (a), Fig. 3 (b), Fig. 3 (c), Fig. 3 (d), then returns to the state shown in Fig. 3 (a).

In Fig. 3 (a), piston 5 is positioned at top dead centre.Under this state, piston 5 approaches the bottom of cylinder 6.When power transmission shaft 3 rotation, as shown in Fig. 3 (b), via eccentric shaft 12 and bearing 11, connecting rod 4 tilts to decline, and piston 5 leaves cylinder 6.At this moment, the volume between cylinder 6 and piston 5 expands, and therefore, exhaust object gas flows in cylinders 6 via inlet valve 13 from the air intake duct 15 of induction chamber 7 and connection.

When power transmission shaft 3 continues rotation, as shown in Fig. 3 (c), piston 5 arrives lower dead center.At this moment, the interior exhaust object gas that exists of cylinder 6.When power transmission shaft 3 continues rotation, as shown in Fig. 3 (d), via eccentric shaft 12 and bearing 11, connecting rod 4 tilts to rise.At this moment, because the volume reducing between cylinder 6 and piston 5, so the exhaust object gas in cylinder is discharged from the blast pipe 16 of exhaust chamber 8 and connection via air bleeding valve 14.So, by the rotation of power transmission shaft 3, the inclination that repeats piston 5 is risen and is declined (swing movement), discharges the gas in not shown chamber.

Wherein, as shown in Figure 3, in the swing movement of piston 5, the sealing 50b of containment member 50 is the inwall of butt cylinder 6 usually, by sealing between cylinder 6 and piston 5.Therefore, the long-term problem that has wearing and tearing sealing 50b of using.

Generally speaking, the elastic force of sealing is larger just more can obtain higher sealing, but the elastic force of sealing is when excessive, will unnecessarily increase the wear extent that sealing phase countercylinder moves, and reduces thus the durability of sealing.In addition, due to the reduction of sealing, the vacuum reaching also reduces, and then the power consumption of pump is risen.Therefore, sealing reduces, and has to change containment member, and result causes the durability of pump to reduce.

Present embodiment is by the elastic force of sealing being adjusted to the suitable size that can access object sealing, thus the sealing of maintaining, the durability of raising pump.Below, the manufacture method of containment member 50 is described.

[shaped device of containment member]

Fig. 4 shows the exploded perspective view of the structure of the shaped device using in the manufacture of containment member 50.Fig. 5 is the generalized section of the assembled state of this shaped device.First, for shaped device 100, describe.

Shaped device 100 has the first tool 110, the second tool 120 and securing member 130.Shaped device 100 holds resin plate 50S between the first tool 110 and the second tool 120, and by securing member 130, two tools 110,120 are mutually fastening, by heating resin plate 50S, thus moulding resin plate 50S.

The first tool 110 consists of metal cylinder elements such as stainless steel, aluminium alloys.The first bottom surface sections 112 that the first tool 110 has the first cylindrical portion 111 and is formed at the first cylindrical portion 111 lower ends.

The first cylindrical portion 111 forms with the internal diameter (the first internal diameter) less than the external diameter of resin plate 50S (the first external diameter), and the size of its internal diameter is set as the size (diameter) of the planar portions 50a of containment member 50.Therefore,, when resin plate 50S is installed on the first tool 110, the circumference of resin plate 50S as shown in Figure 5, is contained in the inside of the first cylindrical portion 111 roughly to bend the state of 90 degree.

The first tool 110 also has the first fitting portion 113.The first fitting portion 113 is formed at the first bottom surface sections 112 center, has the cylindrical shape concentric with the first cylindrical portion 111.The first fitting portion 113 can be chimeric with the centre bore 50c that is formed at resin plate 50S center, and the external diameter of the first fitting portion 113 is set as the size roughly the same with the internal diameter of centre bore 50c.Thus, can fully accurately assemble resin plate 50S with respect to the first tool 110.

The second tool 120 consists of metal cylinder elements such as stainless steel, aluminium alloys.The second fitting portion 123 that the second tool 120 has the second cylindrical portion 121, is formed at the second bottom surface sections 122 of the second cylindrical portion 121 lower ends and is formed at the second bottom surface sections 122 center.As shown in Figure 5, the second tool 120 is installed on the first tool 110 and makes the second bottom surface sections 122 relative with the first bottom surface sections 112.

The second cylindrical portion 121 forms with the external diameter less than the internal diameter of the first cylindrical portion 111 (the second external diameter), and the size of its external diameter is set as the size below the internal diameter of sealing 50b of containment member 50.Therefore,, while the second tool 120 being installed on the first tool 110 of resin plate 50S is installed, the circumference of resin plate 50S as shown in Figure 5, is contained between the first cylindrical portion 111 and the second cylindrical portion 121.

The second fitting portion 123 is arranged at the central part of the second bottom surface sections 122, recess that can be chimeric with the first fitting portion 113, consists of.That is,, when assembling the first tool 110 and the second tool 120, the second fitting portion 123 and the first fitting portion 113 are mutually chimeric.Thus, can fully accurately assemble the second tool 120 with respect to the first tool 110.In addition, in order fully accurately to locate the second tool 120 with respect to the first tool 110, therefore can between the first cylindrical portion 111 and the second cylindrical portion 121, form a certain size annulus.

Securing member 130 consists of parts such as bolt or screws, is installed on respectively the central part of the first tool 110 and the second tool 120.Wherein, in the first tool 110, be formed with and in installing hole 114, the second tools 120 that screw togather at the central part of the first fitting portion 113 and the axial region 131 of securing member 130, be formed with the inserting hole 124 of inserting axis portion 131 at the central part of the second fitting portion 123.Thus, the first tool 110 and the second tool 120 are when interfixing by securing member 130, fastened in the first bottom surface sections 112 and the second bottom surface sections 122 direction close to each other.Securing member 130, installing hole 114 and inserting hole 124 form the retention mechanism of mutual fastening the first tool 110 and the second tool 120.

The first bottom surface sections 112 and the second bottom surface sections 122 form in parallel to each other, when by fastening the first tool 110 of securing member 130 and the second tool 120, and clamping resin plate 50S.The clamping force of the first bottom surface sections 112 and 122 couples of resin plate 50S of the second bottom surface sections is adjusted by the tightening torque of securing member 130.

[forming method of containment member]

Then, for using the manufacture method of containment member 50 of the shaped device 100 of above-mentioned formation to describe.

First, prepare the resin plate 50S as the prototype of containment member 50.Resin plate 50S typically as shown in Figure 4 punching press form circular.The size of resin plate 50S (external diameter) is suitably set according to the size of applicable piston, for example diameter 93mm.The thickness of resin plate 50S is not particularly limited, for example 1.0mm.The aperture of centre bore 50c is also not particularly limited, and according to the structure of piston 5, determines.

Then as shown in Figures 4 and 5, by the first tool 110 and the second tool 120 clamping resin plate 50S, and resin plate 50S is heated to set point of temperature by cramping time, thereby makes containment member 50.

Order is first, resin plate 50S to be installed on to the first tool 110.At this moment, by the centre bore 50c of resin plate 50S and the packing interaction between the first fitting portion 113, can guarantee that resin plate 50S is with respect to the accurate location of the first tool 110.Therefore, the difference in the aperture of the centre bore 50c of the external diameter of the first fitting portion 113 and resin plate 50S is less, just more can obtain high position precision.

In addition, because the internal diameter of the first cylindrical portion 111 is less than the external diameter of resin plate 50S, so the circumference of resin plate 50S is connected to the inner face of the first cylindrical portion 111.

Resin plate 50S is installed on after the first tool 110, the second tool 120 is installed on to the first tool 110.At this moment, by the packing interaction between the first fitting portion 113 and the second fitting portion 123, can guarantee that the second tool 120 is with respect to the accurate location of the first tool 110.At this moment, the difference of the internal diameter of the external diameter of the first fitting portion 113 and the second fitting portion 123 is less, also just more can obtain high position precision.

On the first tool 110, assembled after the second tool 120, two tools 110,120 are fastened by securing member 130.At this moment, as shown in Figure 5, the region beyond the circumference of resin plate 50S is held between the first bottom surface sections 112 and the second bottom surface sections 122, can guarantee thus the flatness of regulation.

On the other hand, as shown in Figure 5, in the annular slot entering between the first cylindrical portion 111 and the second cylindrical portion 121, the vertical direction acting on respect to the first bottom surface sections 112 due to pressing of the second bottom surface sections 122 bends the circumference of resin plate 50S.

Wherein, the width in the gap between the first cylindrical portion 111 and the second cylindrical portion 121 is set as the value larger than the thickness of the circumference of resin plate 50S.Thus, can make circumference smooth and easy and bending equably at its Zone Full of resin plate 50S.In addition, exist the width in described gap larger, to the higher tendency of elastic force of the footpath foreign side of the sealing 50b of the containment member 50 of making.

The second tool 120 at least needs to reach with respect to the fastening force of the first tool 110 connects airtight in the pressure of the first bottom surface sections 112 degree resin plate 50S.Thus, the circumference of resin plate 50S suitably can be bent to vertical direction.At this moment, resin plate 50S also can produce the compression stress of regulation between the first bottom surface sections 112 and the second bottom surface sections 122.Thus, the circumference of resin plate 50S successfully can be bent to vertical direction.The compression stress of described regulation is not particularly limited, and for example 1MPa, if be scaled the tightening torque of securing member 130, is 13Nm in present embodiment.

To be heated to set point of temperature by the mutual fastening shaped device 100 of securing member 130.Thus, resin plate 50S is shaped to the containment member 50 (Fig. 5) with planar portions 50a and sealing 50b.

Shaped device 100 for example heats in the inside that is set as the baking box of set point of temperature.In addition, also can be at heating sources such as internal heater at least one of the first tool 110 and the second tool 120.Because the first tool 110 and the second tool 120 are respectively metal system, so can be effectively to resin plate 50S transferring heat.

Described set point of temperature is not particularly limited, for example, according to the material of resin plate 50S, size, thickness, more than being 160 ℃, below 250 ℃.The retention time of described set point of temperature is also not particularly limited, for example 40 minutes.

The planar portions 50a of containment member 50 is due to the compression and the described heat effect that are subject to from securing member 130, thereby is formed between the first bottom surface sections 112 and the second bottom surface sections 122.On the other hand, sealing 50b is owing to being subject to described compression and heat effect, thereby is formed between the first cylindrical portion 111 and the second cylindrical portion 121.Especially by heat treated, relax the internal stress of containment member 50, can stably form the sealing 50b with respect to planar portions 50a bending.

The heat treated of resin plate 50S was continued after the stipulated time to cooling forming device 100.Cooling means is not particularly limited, and can be that nature is cooling, can be also that pressure is cooling.After cooling, shaped device 100 is separated with the second tool 120 with the first tool 110, from the first tool 110, takes out containment member 50 (resin plate 50S).

Fig. 6 is that the generalized section of the method for containment member 50 is taken out in explanation from the first tool 110.In present embodiment, use taking-up tool 200 as shown in Figure 6.Taking out tool 200 has main body 201 and is arranged at many pins 202 on a face of main body 201.In the first bottom surface sections 112, be pre-formed to insert and lead to a plurality of holes of respectively selling 202, by each pin 202, insert respectively logical described each hole, thereby main body 201 is installed on the first tool 110.In Fig. 6, the containment member 50 in the first bottom surface sections 112 upwards extrudes by pin 202, and takes out from the first tool 110.

As mentioned above, be produced on the containment member 50 that forms sealing 50b on the circumference of planar portions 50a with ring-type.By present embodiment, due to one side heated sealant member 50 1 edge formings thereby can adjust the elastic force of sealing 50b radius vector foreign side.

That is, by hot briquetting containment member 50, compare the situation of non-hot briquetting, can reduce the elastic force of sealing radius vector foreign side.Therefore,, while using on the piston 5 that containment member 50 is installed on to vavuum pump 1, the sealing 50b that can make containment member 50 in the inner face of cylinder 6, suppresses the unnecessary wearing and tearing of sealing 50b with suitable press connecting.Thus, can realize the durability that maintains the sealing between cylinder 6 and piston 5 and improve pump.

Forming temperature is not particularly limited, and key element on the materials such as the material of containment member 50, size, thickness, in shape, the specification key element of the product such as sealing characteristics that can also be as requested, durability is suitably set.Exist forming temperature lower, to the elastic force of the footpath foreign side of sealing 50b larger tendency just, and forming temperature is higher, and described elastic force is lower tendency just.

The inventor makes the internal diameter of the first cylindrical portion 111, the external diameter of the second cylindrical portion 121, forming temperature different and make the sample of a plurality of containment members 50, and by their actual installation driving pump on piston 5, the power consumption to each sample determination pump.In addition, driving pump is after one hour, the wear extent to each sample determination sealing 50b.

As the resin plate 50S of the prototype of containment member 50, use the polyfluortetraethylene plate of diameter 93mm, thickness 1.0mm.Retention time under forming temperature is 40 minutes, carry out afterwards 20 minutes above cooling.As vavuum pump, that uses that Ai Fake Ji Gong company (アルバツクMachine Gong society) produces shakes piston-type dry vacuum pump.

The internal diameter of the first cylindrical portion 111 of using in the making of each sample, second external diameter of cylindrical portion 121 are, the condition of forming temperature is as shown in table 1.In addition, the measured value of the wear extent of each sample and the power consumption of pump respectively as shown in Figures 7 and 8.

[table 1]

About sample 5, the wear extent of sealing 50b is maximum in each sample, and the pressure reaching is also high.Thinking that its reason is that it is very high that the elastic-restoring force of sealing 50b maintains because 130 ℃ of forming temperatures are relatively low, is also the highest in each sample with respect to the elastic force of cylinder 6.

About sample 1 to 4,6,7, although wear extent is different, the main pump performance such as the vacuum reaching, power consumption is basic identical.From the evaluation result of these samples, can confirm that the wear extent of the sample sealing 50b that forming temperature is higher is fewer.In addition, owing to can maintaining the good sealing of sealing, therefore can realize the minimizing of the power consumption of pump.

Wherein, for example decent product 1,3,6 and 7 are such, even if confirmed, in the situation that the internal diameter of the first cylindrical portion 111 is different in sample with the external diameter of the second cylindrical portion 121, also can obtain identical pump characteristics.Think that thus the sealing of containment member has very strong dependence to forming temperature, moulding is not had to very strong dependence by the footpath size of tool.

Then, use each tool using in the making of sample 7, within the scope of the forming temperature of 160 ℃ to 250 ℃, make a plurality of containment members 50.Then each sample is evaluated to pump characteristics, discharge flow, power consumption, the temperature ascending amount of pump framework and the wear extent of sealing of when zero load () while comprising the pressure that reaches, atmosphere opening.Its result is as shown in table 2.In addition, the wear extent of forming temperature and sealing, the relation of the power consumption of pump and temperature ascending amount is respectively as shown in Fig. 9, Figure 10 and Figure 11.

[table 2]

As shown in table 2, Fig. 9 to Figure 11, can confirm there is forming temperature higher, the wear extent of sealing is, the power consumption of pump and temperature ascending amount lower tendency all.This is just more can relax the internal stress of containment member 50 because forming temperature is higher, can stably form the sealing 50b with respect to planar portions 50a bending.That is, forming temperature is higher, and the shape maintains of sealing 50b is higher, and the external diameter of the sealing after piston is installed reduces.Thus, the elastic force of sealing reduces, and the force of sliding friction that acts on sealing reduces, and can suppress thus wearing and tearing.About sealing, be accompanied by the high temperature of forming temperature, power consumption meeting reduces, and can guarantee thus the stable sealing between cylinder 6 and piston 5.

As mentioned above, by make the forming temperature of containment member be 160 ℃ above, below 250 ℃, thereby can maintain stable sealing and suppress the wearing and tearing of sealing, can realize the reduction of the power consumption of pump simultaneously.

In addition, although the upper limit of forming temperature is set to 250 ℃, can according to form the material of containment member heat endurance, as the sealing of object etc., suitably set.

Above, embodiments of the present invention have been described, but have the invention is not restricted to this, based on technical conceive of the present invention, can implement various changes.

For example, in above embodiment, although for example understand manufacture method and the shaped device thereof shake the applicable containment member of piston that piston-type dry vacuum pump uses, but be not limited to this, the present invention also goes for the manufacture of the containment member that other volume handover type vavuum pumps use.

In addition, in above embodiment, the fitting portion of the first tool 110 and the second tool 120 113,123 is all formed to cylinder or cylindrical shape, but alternatively, also can form other geometries with mutual engomphosis relation, for example polygon prism shape.In addition, these fitting portions also can omit as required.

And, use securing member 130 as the retention mechanism of fastening the first tool 110 and the second tool 120, but alternatively, also can use other members such as fixture.

Claims

1. a manufacture method for containment member, is characterized in that:

The annular seal portion that sealing member is installed in cylinder on reciprocating piston and has circular flat face and be formed on the periphery of this planar portions;

The method comprises: possessing on the first tool of the first bottom surface sections that has the first cylindrical portion of the first internal diameter and be formed on this first cylindrical portion one end, the circular resin plate consisting of polyfluortetraethylene plate with first external diameter larger than this first internal diameter is installed;

By possessing the second tool that there is the second cylindrical portion of second external diameter less than this first internal diameter and be formed on second bottom surface sections of this second cylindrical portion one end, be installed on this first tool;

By this first bottom surface sections and this second bottom surface sections, with authorized pressure, clamp this resin plate, and this first tool and this second tool are heated to 160 ℃ above below 250 ℃, between this first bottom surface sections and this second bottom surface sections, form this planar portions, between this first cylindrical portion and this second cylindrical portion, form sealing portion

Wherein, the width in the gap between the first cylindrical portion and the second cylindrical portion is set as the value larger than the thickness of the circumference of described circular resin plate.