201237270 六、發明說明： 【發叼所屬之技術領域】 運動氣缸内的活塞的往復 塞上的密封構件之種安裝於在氣红内滑動的活 【先前技術】 方法及適合其之成形裝置。 塞，矛2錢缸㈣移動的活 容積移送私赋真^_縣來父錢行魏與排氣的 性。要求氣缸内面與活塞周面之間的密封201237270 VI. Description of the invention: [Technical field to which the hairpin belongs] The reciprocating plug of the piston in the moving cylinder is mounted on the sliding member in the gas red. [Prior Art] The method and the forming device suitable therefor. Plug, spear 2 money tank (four) mobile live volume transfer privately true ^_ county to father money line Wei and exhaust sex. Requires a seal between the inner face of the cylinder and the circumference of the piston
Pac^)! ^ 塞m感Λ 形概塾係具有在對於由氣缸與活 i封π係1Γ室遠離的方向延伸的輔助密封部。上述辅助 、4係凸緣狀地—體形成於杯形缝的緣部。 [先前技術文獻] [專利文獻] [專利文獻1]特開2〇〇3 —328937號公報 【發明内容】 [發明欲解決之課題] 密封！Γ &年θ對於活塞真空泵浦要求提升氣紅與活塞之間的 的、、舌夷升真空泵4的耐久性。麵，錢缸内面滑動 ，二的销部會隨著泵_運轉時間叫時間變化地磨 損，，密封性越有下降的傾向。其結果，排氣性 月t*下降，泵浦的壽命變短。 5/25 201237270 有鑑於如以上的情況，本發明之目的在於提供—種可維 持氣缸與活塞之間的密紐並且謀求泵_敎性提升的 密封構件之製造方法及成形裝置。 [解決課題之手段] 為了達成上述目的，關於本發明__形態的密封構件之製 造方法’雜造-種安裝於麵㈣往復運動的活塞上的密 封構件’其具有圓形的平面部與形成於上述平面部周緣的環 狀密封部，且包括：在具有第丨内徑的第丨圓筒部、及形成 於上述第丨圓筒部1的第1底面部之第1夾具(jig)上安裝 具有比上述第1 1½大的第i外徑之圓形的樹脂片。 含有具有比上述第i内徑小的第2外徑的第2圓筒部应 形成於上述第2 _部—端的第2底面部之第 裝 於上述第1夾具上。 、了文衣 —利用上述第1底面部與上述第2底面部將上述片構件以 ，疋壓力夾壓並將上述第i夾具與上述第2夾具加熱至預定 溫度，在上述第1底面部與上述第2底面部之間形成上述平 面部’在上述第1圓筒部與上述第2圓筒部之間形成上述密 關於本發明-形態的成形農置具備金屬製的第ι爽 具、金屬製的第2夾具、及緊固機構。 上述f 1夾⑽包含具有帛丨端部並 第1圓筒部、及形成於、+、势，山 ^ ^ 及开y成於上述第1端部上的第1底面部，且安 、者八有比上述第1内徑大的第i外徑之圓形的樹脂片。 上述第2夾具係包含具有第2端部並以比上述第！内徑 小的第2外徑形成的第2圓筒部、及形成於上述第2端部上 6/25 201237270 的第2底面部。上述第2夾具係以上述第丨 2,部來夾持上述樹脂片，以上述第丨圓筒部與； 圓同部來夾持上述樹脂片的周緣。 料固機構係在上述第1底面部與上述第2底面部接 近的方向緊固上述第1夾具與上述第2失具。 【實施方式】 關於本發明-實施形態的密封構件之製造方法， 一種安裝於在氣缸内往復運動的活塞上的密封構件，以 =形的平面部與形成於上述平面部周緣環狀的密封部，、題 ^在具有第1内徑的第1圓筒部、及形成於上述第！圓„ 二=二底面部之第1夾具上安裝具有比上述第 大的第1外徑之圓形的樹脂片。 开上述第1内徑小的第2外徑的第2圓筒部盘 =成於上2 _部—端的第2底面部 、 於上述第1夾具上。 人八加女衣 預定底面部將·構件以 1产，第1纽與上述第2纽加熱至預定 :又在上赫1底面部與上述第2底 ::在上述第1圓筒部與上述第卿卩之間 夾二::===夾=_力 _環狀密封部之密封二==形= 域_方面成形’所以可調整朝向密封部的 L 6、彈性力。即，藉由將密封構件加熱成形，相較於 7/25 201237270 以非加熱成形的情況， 降低。 可使朝向密封部的直經外方的彈性力 囚此 用之際，謂構件絲於乾式真空泵_活塞上而使 性力來壓接1 的内面使密封構件的密封部以適度的彈 缸與活塞之間封部不必要的磨損。11此，可維持氣 由於可〇並且謀求提升泵浦的耐久性。此外， 耗電^ 封部良好邮封性，所以可謀求減少泵浦的消 上，定溫度不特觀定，可按照密封構件的大小、所 封特性及耐久性設定。加熱溫度越是低溫， 声1:的直徑外方的彈性力越有變大的傾向，加熱溫 疋面’凰，上迷彈性力越有降低的傾向。在一實施形態 ’上述預定溫度為例如16(TC以上250。(：以下。 上述樹脂片的構成材料也不特別限定，以例如聚四氟乙 烯片構成。 、關於本發明—實施形態的成形裝置，其係將圓形樹脂片 成形的成形裝置，具備金屬製的第1失具、金屬製的第2夾 具、及緊固機構。 上述第1夾具係包含：具有第1端部並以第1内徑形成 =第1圓筒部、及形成於上述第1端部上的第1底面部，且 安裝著具有比上述第丨内徑大的第i外徑之圓形的樹脂片。 ^ 上述第2夾具係包含：具有第2端部並以比上述第1内 他小的第2外徑形成的第2圓筒部、及形成於上述第2端部 上的第2底面部。上述第2夾具係以上述第丨底面部與上述 第2底面部來夾持上述樹脂片，以上述第1圓筒部與上述第 8/25Pac^)! ^ The plug-in type has an auxiliary seal extending in a direction away from the cylinder and the π-system 1 chamber. The auxiliary and 4-series flange-like ground bodies are formed on the edge of the cup-shaped slit. [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] JP-A-2002-328937 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] Sealed! Γ & year θ is required for the piston vacuum pump to increase the durability of the tongue-and-light vacuum pump 4 between the gas red and the piston. On the surface, the inner surface of the cylinder slides, and the pin portion of the second cylinder tends to wear as the pump_running time changes, and the sealing property tends to decrease. As a result, the exhaust gas t* is lowered, and the life of the pump is shortened. 5/25 201237270 In view of the above circumstances, an object of the present invention is to provide a sealing member manufacturing method and a forming apparatus which can maintain a close relationship between a cylinder and a piston and improve pumping efficiency. [Means for Solving the Problem] In order to achieve the above object, a method for manufacturing a sealing member according to the present invention is a hybrid member which is attached to a surface (four) reciprocating piston, which has a circular flat portion and is formed. The annular seal portion on the periphery of the flat portion includes a second cylindrical portion having a second inner diameter and a first jig formed on the first bottom portion of the second cylindrical portion 1. A resin sheet having a circular shape having an ith outer diameter larger than the above-mentioned first 11⁄2 is mounted. The second cylindrical portion including the second outer diameter smaller than the i-th inner diameter is mounted on the first jig to be formed on the second bottom surface portion of the second partial portion. In the clothes, the first bottom surface portion and the second bottom surface portion are pressed by the sheet member, and the i-th jig and the second jig are heated to a predetermined temperature, and the first bottom surface portion is The flat portion is formed between the second bottom surface portion. The first cylindrical portion and the second cylindrical portion are formed between the first cylindrical portion and the second cylindrical portion. The second clamp and the fastening mechanism. The fi 1 clip (10) includes a first cylindrical portion having a meandering portion, and a first bottom portion formed on the first end portion, and the +, the potential, the mountain, and the opening y, and the There is a circular resin sheet having an ith outer diameter larger than the first inner diameter. The second jig includes the second end portion and is more than the above-mentioned first! A second cylindrical portion formed by a second outer diameter having a small inner diameter, and a second bottom surface portion formed on the second end portion 6/25 201237270. In the second jig, the resin sheet is sandwiched by the second portion, and the peripheral edge of the resin sheet is sandwiched by the second cylindrical portion and the round portion. The material fixing mechanism fastens the first jig and the second nose in a direction in which the first bottom surface portion and the second bottom surface portion are close to each other. [Embodiment] The method for producing a sealing member according to the present invention is a sealing member attached to a piston that reciprocates in a cylinder, and a flat portion formed in a shape of a shape and a sealing portion formed on a circumference of the flat portion The problem is that the first cylindrical portion having the first inner diameter is formed in the above-mentioned first! A circular resin sheet having a diameter larger than the first first outer diameter is attached to the first jig of the second and second bottom portions. The second cylindrical portion having the second outer diameter having the first inner diameter is opened. The second bottom surface portion of the upper portion and the second end portion is formed on the first jig. The bottom surface portion of the person's clothing is ordered to be produced, and the first button and the second button are heated to a predetermined position: The bottom surface of the Hern 1 and the second bottom: between the first cylindrical portion and the first ridge: two =: = = = clamp = _ force _ annular seal seal 2 = = shape = domain _ The aspect is shaped so that the L 6 and the elastic force toward the sealing portion can be adjusted. That is, by heat-forming the sealing member, it is lowered in the case of non-heat forming as compared with 7/25 201237270. When the elastic force of the outer side is used, it means that the member is wired on the dry vacuum pump _ piston and the force is pressed to the inner surface of the sealing member 1 so that the sealing portion of the sealing member is not necessary between the appropriate cylinder and the piston. Wear and tear. 11 This can maintain the durability of the pump due to the sturdiness of the gas. In addition, the power consumption is good, and the seal is good. Reduce the pumping, the temperature is not specified, can be set according to the size of the sealing member, the sealing characteristics and durability. The lower the heating temperature, the greater the elastic force of the outer diameter of the sound 1: In the embodiment, the predetermined temperature is, for example, 16 (TC or more and 250 Å or more). The constituent material of the resin sheet is not particularly limited. The molding apparatus according to the present invention is a molding apparatus for molding a circular resin sheet, and includes a metal first fastener, a metal second clamp, and a compacting device. The first jig includes: a first end portion having a first end portion, a first cylindrical portion, and a first bottom portion formed on the first end portion, and having the same a circular resin sheet having an i-th outer diameter having a large inner diameter. ^ The second jig includes a second cylinder having a second end portion and having a second outer diameter smaller than the first inner portion a second bottom portion formed on the second end portion, the second bottom portion In the jig, the resin sheet is sandwiched between the second bottom surface portion and the second bottom surface portion, and the first cylindrical portion and the eighth/25th portion are
S 201237270 2圓筒部來夾持上述樹脂片的周緣。 上述緊固機構係在上述第！底面部與上述第2底面 近的方向緊固上述第1夾具與上述第2夾具。_ ° 上述樹脂片具有大於上述第i内徑的外徑。第 苐2夾具以預定壓力來夾璧上述樹月旨片。此外，由於及 ^及第2夹具均為金屬製，所以將由外部供應的㈣=爽 達給樹脂片。因此’藉由上述成縣置，由於可在 傳 =狀職的狀態下進行樹料的加祕理，所以:片 二=直徑外方的彈性力已被適度調整的密封部之密‘ 上述成形裝置也可以更具備用來加敎上述 ίΓ加f·上述加熱機構可以設置於第2 、上述第;、ΓΐΓτ方，也可以和此等夹具分別構成广 :且可與上麵片的中 可斜=，可在樹脂片的周緣部均勻地形成密封部。此外 了對於第1夾具精度良好地定位樹則及第2夾且。卜， 面ί閱圖面，—方面說明本發明的實施形能 真空 例二舉縣活塞型乾式真空“為來進’ L異空泵浦的概略結構〕 如同圖所示，真空泵浦1具有馬達2、軸3、連椁 9/25 201237270 (connecting rod)4、活塞5、氣缸6、吸氣室7及排氣室8。 連桿4、活塞5、氣缸6、吸氣室7及排氣室8構成「氣缸， 該真空泵浦1具有2座氣缸。圖2為放大氣缸而顯示的圖^ 再者，氣缸數量不限於各2座，也可以為丨座或3座以上 於真空泵浦1中，在連接於馬達2的軸3上連接著連桿 4/在連桿4上連接著活塞5。活塞5收容於氣虹6内。: 氣缸6上鄰接地設有吸氣室7及排氣室8。上述結構之中， 軸3、連桿4、活塞5、氣缸ό收容於殼體9内。 馬達2使旋轉動力產生’使軸3繞轴旋轉。馬達2係以 一般的馬達，例如以DC無刷馬達構成。 軸3從馬達2直線狀地延伸至殼體9的内部，經由軸承 10而可旋轉地支持於殼體9上。 工 連桿4的一端藉由偏心車由12與轴承u而連接， 另一端連接祕塞5。連桿4與如轴12絲3的旋轉運 動轉換為往復(搖動)運動。 活塞5藉由連桿4而在氣缸6内往復運動，且 士排氣。真空泵浦1具備將活塞5與氣虹6之間予以密封的 抗封構件50。_構件5G絲於活塞5上。活塞$ 塞本體51與固定物52。 〃 活塞本體51 -體地形成於連桿4的前端部。該固定物 2安農於活塞本體51上，且岐該密封構件％。該密封構 =50被鱗於活塞本體51無定物52之間。密封構㈣ 的樹脂片，对本實施職中以聚四氟乙烯等 脂構成。 該密封構件50構成杯形齡，該杯形襯㈣具有：被 10/25 201237270 夾持於活塞本體51與固定物52之間的平面部50a、及形成 於平面部50a周緣的密封部50b。密封部50b從平面部50a 的周面部向連桿4側延伸，且介於氣缸6的内面與活塞5的 周面之間。而且’當氣缸6内的活塞5往復運動之際，密封 部50b達成將活塞5與氣缸6之間予以密封的功能。 氣缸6為具有接近活塞5外徑的内徑的筒狀室，且構成 為可嵌插該活塞5。在氣缸6上設有吸氣閥13及排氣閥14, 此等閥會隨著活塞5的往復運動而進行開閉。 吸氣室7經由吸氣閥13而與氣缸6連通，在且吸氣室 7上連接著吸氣管15。吸氣管15連接於腔室等的排氣對象 物。 排氣室8經由排氣閥14而與氣缸6連通，在排氣室8 上連接排氣管16。排氣管16連接於大氣或排氣設備等。 再者，雖然圖2為從與轴3平行的方向來看氣紅的圖， 但為了說明方便起見，吸氣室7及排氣室8的方向係和圖i 不同地被顯示。 〔真空泵浦的動作〕 ^其次，就真空泵浦1的動作進行說明。再者，雖然此處 係就真线浦1的—座氣缸進行說明，但對於其他氣缸，動 乍也同樣® 3為顯示§纟活塞5的搖動運動的示意圖。依圖 3⑷、圖3(b)、圖3(c)、圖3(d)之順序來驅動該活塞5，再回 到圖3(a)所示的狀態。 在S 3(a)中，活塞5位於上死點。在此狀態下，活塞$ 1近氣缸6的底部。軸3 —旋轉，就如圖3⑻所示，連才^ 4 '、二由偏〜軸12與軸承n而一方面傾斜一方面下降，且活塞 11/25 201237270 5離開氣缸6。此時’由於氣缸6與活塞5之間的容積擴大， 所以排氣對象氣體從吸氣室7及連通的吸氣管15經由吸氣 閥13而流入至氣缸6内。 、 右軸3再旋轉’就如圖3⑷所示，活塞$到達下死點。 此日，排氣對象氣體存在於氣紅6内。若轴3再旋轉，就如 ^柳所不連桿4經由偏心軸12與軸承11而-方面傾斜 方，上升。此時，由於氣红6與活塞5之間的容積減少， 14而從排氣室8及 活塞5傾斜的上= 3的旋轉而使伴隨 示的腔室_氣體。 物難進行，轉出未圖 50圖3所不’在活塞5的搖動運動中，密封構件 、、j=5〇b經常抵接於氣虹6的内壁，且將氣虹6斑 上ί糊題心封。因此’密封部地的磨損在長期使用 性，作的彈性力越大’越可得到高的密封 部的磨 外，密封性降低，則_直空相耐久性降低。此 果，使粟浦的对久性降低。女更換在封構件，結 本實施形態係藉由將密封部 為目的之密封性的適度大小，以整為可得到作 久性提高。以下，就密封構件50之二：么且使栗浦的财 〔密封構件的成形裝置〕^方法進行說明。 12/25 201237270 圖4為顯示用於製造密封構件5〇的成形裝置之結構的 分解斜視圖。圖5為該成形裝置之組合狀態的剖面圖。首 先’就成形裝置100進行說明。 成形裝置100具有第1夾具110、第2夾具120、及緊 固物130。成形裝置1〇〇係在第i夾具11〇與第2夾具]2〇 之間收容樹脂片50S ’利用緊固物13〇使兩夾具11〇、12〇 相互緊固，藉由加熱樹脂片5〇s而使樹脂片5〇s成形。 第1夾具no係以不銹鋼、鋁合金等的金屬製的圓筒構 件構成。第1夾具110具有第i圓筒部ηι、及形成於第J 圓筒部111下端的第1底面部112。 第1圓筒部111係以小於樹脂片50S外徑(第1外徑)的 内徑(第1内徑)形成’其内徑的大小被設定為密封構件％ 之平面部5〇a的大小(直徑）。因此，在第1夾具110上安裝 =旨片50S時’如圖5所示，樹脂片的周緣部係在被折 弓大約90度的狀態下被收容於第1圓筒部⑴的内部。 且有具有第1嵌合部m。第1嵌合部113 1 底面部112的中心並且與第1圓筒部m同 二㈣=狀:第1嵌合部⑴可與形成於樹脂片50S中心 其外徑被設定為和中心錄的内徑大 致相同的大小。藉此，可對私笙 該樹脂請。物1夾具11G精度良好地組裝 弟2夾具120係以不錄鋼、銘合 件構成。第2夾具12〇且有第？ ^i屬I的®同構 筒部⑵下端㈣、121、形成於第2圓 令心的第2嵌合部⑵。如圖5所二成f第2底面部丨22 所不，弟2夾具120係使第 13/25 201237270 2底面部122與第 上。 _ 。丨12對向而被組裝於第1夾具n〇 第2圓同部121係以|卜 2外徑)形成，其外徑、於第1圓筒部111内徑的外徑(第 50b内徑以下的大小 小被堍定為密封構件50之密封部 具110上安裝第2夾具12此’在安裝有樹脂片50S的第Ϊ夾 周緣部係被收容於第R 時’如圖5所示’樹脂片50S的 第2嵌合部123係二=部U1與第2圓筒部121之間。 與第1嵌合部U3 #八^叹於第2底面部122的中心部並可 於組裝第i夾具處所構成。即，第2嵌合部123 相互嵌合。藉此，可對夾具12G時’和第1嵌合部113 具120。此外，由於i夹具110精度良好地組裝第2夾 夾具120，所以可在篆1夾具110精度良好地定位第2 形成-定大小的環狀空:，出與第2圓筒部12丨之間 於第=;==2釘等的零件構成，且分別安裝 110上在第]七人泣夾具120的中心部。此處，第1夾具 邱131 f人Λ。邛113的中心部形成有和緊固物130的軸 疋合的安震孔114，第2夹具12。上在口 形成有插通轴部131的插通孔124。藉此，第】及 “具110、120被緊固物13〇相互固定，並且在第工底 面。M」2與第2底面部122相互接近的方向被緊固。緊固物 130安震孔114及插通孔124構成使第1及第2夾具11〇、 120相互緊固的緊固機構。 第1及第2底面部112、122係相互平行地形成，於利 用緊固物130來緊固第1及第2夾具11〇、120時爽持樹脂 14/25S 201237270 2 cylindrical portion to hold the periphery of the above resin sheet. The above fastening mechanism is in the above! The first jig and the second jig are fastened to the bottom surface portion in a direction close to the second bottom surface. _ ° The above resin sheet has an outer diameter larger than the above-described ith inner diameter. The second jaw clamps the above-mentioned tree moon with a predetermined pressure. Further, since both the ^ and the second jig are made of metal, (4) = supplied to the resin sheet is supplied from the outside. Therefore, by the above-mentioned Chengxian County, since the tree material can be added to the secret state in the state of the pass, the film 2 = the elastic force of the outer diameter of the diameter has been appropriately adjusted to the tightness of the seal portion. The device may further be provided with the above-mentioned heating device. The heating mechanism may be disposed on the second and the first; the ΓΐΓτ side, or may be formed separately from the jigs: =, the sealing portion can be uniformly formed on the peripheral portion of the resin sheet. In addition, the first fixture accurately positions the tree and the second clamp.卜, ί 图 , , , , , , , , , , , 本 本 本 本 本 本 本 本 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 县 活塞 活塞2, shaft 3, flail 9/25 201237270 (connecting rod) 4, piston 5, cylinder 6, suction chamber 7 and exhaust chamber 8. Connecting rod 4, piston 5, cylinder 6, suction chamber 7 and exhaust The chamber 8 constitutes a "cylinder, and the vacuum pump 1 has two cylinders. Fig. 2 is a view showing the enlarged cylinder. ^ Further, the number of cylinders is not limited to two, and may be a squat or three or more in the vacuum pump 1. The connecting rod 4 is connected to the shaft 3 connected to the motor 2. The piston 5 is connected to the connecting rod 4. The piston 5 is housed in the gas rainbow 6. The cylinder 6 is provided adjacent to the suction chamber 7 and the exhaust gas. Chamber 8. In the above configuration, the shaft 3, the connecting rod 4, the piston 5, and the cylinder bore are housed in the casing 9. The motor 2 causes the rotational power to generate 'rotating the shaft 3 around the shaft. The motor 2 is a general motor, for example The DC motor is linearly extended from the motor 2 to the inside of the casing 9, and is rotatably supported by the casing 9 via the bearing 10. One end of the connecting rod 4 is connected to the bearing u by the eccentric car 12, and the other end is connected to the secret plug 5. The rotational motion of the connecting rod 4 and the wire 12 such as the shaft 12 is converted into a reciprocating (shaking) motion. The piston 5 is connected by a connecting rod. 4, reciprocating in the cylinder 6, and exhausting the air. The vacuum pump 1 is provided with an anti-sealing member 50 for sealing between the piston 5 and the gas rainbow 6. The member 5G is threaded on the piston 5. The piston $ plug body 51 and The fixture 52. The piston body 51 is integrally formed at the front end portion of the connecting rod 4. The fixture 2 is implanted on the piston body 51 and the sealing member is %. The sealing structure = 50 is scaled to the piston body 51. Between the amorphous materials 52. The resin sheet of the sealing structure (4) is composed of a grease such as polytetrafluoroethylene in the present embodiment. The sealing member 50 constitutes a cup-shaped age, and the cup-shaped lining (4) has: is held by 10/25 201237270 a flat portion 50a between the piston body 51 and the fixture 52, and a seal portion 50b formed on the periphery of the flat portion 50a. The seal portion 50b extends from the circumferential surface portion of the flat portion 50a toward the link 4 side, and is interposed between the cylinders 6. Between the inner surface and the circumferential surface of the piston 5. And 'when the piston 5 in the cylinder 6 reciprocates, the seal 50b achieves a function of sealing between the piston 5 and the cylinder 6. The cylinder 6 is a cylindrical chamber having an inner diameter close to the outer diameter of the piston 5, and is configured to be insertable into the piston 5. The cylinder 6 is provided with suction. The valve 13 and the exhaust valve 14 are opened and closed as the piston 5 reciprocates. The suction chamber 7 communicates with the cylinder 6 via the intake valve 13, and the intake duct 7 is connected to the intake duct. 15. The intake pipe 15 is connected to an exhaust object such as a chamber. The exhaust chamber 8 communicates with the cylinder 6 via the exhaust valve 14, and the exhaust pipe 16 is connected to the exhaust chamber 8. The exhaust pipe 16 is connected to Atmosphere or exhaust equipment. Further, although FIG. 2 is a view of the gas red as seen from a direction parallel to the shaft 3, the direction of the suction chamber 7 and the discharge chamber 8 is differently shown in FIG. [Operation of Vacuum Pumping] ^ Next, the operation of the vacuum pump 1 will be described. In addition, although the cylinder of the true line 1 is described here, the same is also applied to the other cylinders. 3 is a schematic diagram showing the rocking motion of the piston 5. The piston 5 is driven in the order of Fig. 3 (4), Fig. 3 (b), Fig. 3 (c), and Fig. 3 (d), and returns to the state shown in Fig. 3 (a). In S 3 (a), the piston 5 is at the top dead center. In this state, the piston $1 is near the bottom of the cylinder 6. The shaft 3 - rotates, as shown in Fig. 3 (8), is connected to the cylinder 6 on the one hand, and the shaft 11 and the bearing n are inclined on the one hand, and the piston 11/25 201237270 5 leaves the cylinder 6. At this time, since the volume between the cylinder 6 and the piston 5 is increased, the exhaust target gas flows into the cylinder 6 from the intake chamber 7 and the connected intake pipe 15 via the intake valve 13. The right axis 3 is rotated again. As shown in Fig. 3 (4), the piston $ reaches the bottom dead center. On this day, the exhaust gas is present in the gas red 6. If the shaft 3 is rotated again, the rod 4 is tilted by the eccentric shaft 12 and the bearing 11 in an inclined manner. At this time, since the volume between the gas red 6 and the piston 5 is reduced, 14 is rotated from the exhaust chamber 8 and the piston 5 by the upper = 3 to cause the accompanying chamber_gas. The object is difficult to carry out, and it is not shown in Figure 50. Figure 3: In the shaking motion of the piston 5, the sealing member, j=5〇b often abuts against the inner wall of the gas rainbow 6, and the gas rainbow 6 spot The title is sealed. Therefore, the wear of the sealing portion is long-term use, and the elastic force is increased. The higher the sealing portion is, the lower the sealing property is, and the durability of the strop phase is lowered. As a result, the long-term durability of the milli is reduced. When the female member is replaced with the sealing member, the embodiment is improved in durability by the appropriate size of the sealing portion for the purpose of the sealing portion. Hereinafter, the second sealing member 50 will be described with reference to the method of [the sealing device forming device] of Lipu. 12/25 201237270 Fig. 4 is an exploded perspective view showing the structure of a forming apparatus for manufacturing the sealing member 5''. Fig. 5 is a cross-sectional view showing a combined state of the forming apparatus. First, the molding apparatus 100 will be described. The molding apparatus 100 includes a first jig 110, a second jig 120, and a fixing member 130. In the molding apparatus 1 , the resin sheet 50S is accommodated between the i-th clamp 11 〇 and the second jig 2 〇 ′, and the two clamps 11 〇 and 12 〇 are fastened to each other by the fastening material 13 , by heating the resin sheet 5树脂s to form the resin sheet 5〇s. The first jig no is made of a metal cylindrical member such as stainless steel or aluminum alloy. The first jig 110 has an i-th cylindrical portion ηι and a first bottom surface portion 112 formed at a lower end of the J-th cylindrical portion 111. The first cylindrical portion 111 is formed to have an inner diameter (first inner diameter) smaller than the outer diameter (first outer diameter) of the resin sheet 50S. The size of the inner diameter is set to the size of the flat portion 5〇a of the sealing member %. (diameter). Therefore, when the slab 50S is attached to the first jig 110, the peripheral portion of the resin sheet is housed inside the first cylindrical portion (1) in a state of being folded by about 90 degrees as shown in Fig. 5 . Further, it has the first fitting portion m. The first fitting portion 113 1 has the same center as the first cylindrical portion m and has the same shape as the first cylindrical portion 112. The first fitting portion (1) can be set to the center of the resin sheet 50S and the outer diameter thereof is set to be centered. The inner diameter is approximately the same size. By this, you can ask for the resin. The object 1 jig 11G is assembled with high precision. The 2nd jig 120 is constructed without a steel or a joint. The second clamp 12 has the first? ^i I is the isomorphic tubular portion (2) lower end (four), 121, and the second fitting portion (2) formed in the second circular center. As shown in Fig. 5, the second bottom portion 22 is not formed, and the second clamp 120 is used to make the bottom portion 122 and the first portion of the 13/25 201237270 2 . _.丨12 is assembled in the first jig n〇, the second circle is the same as the outer diameter 121, and the outer diameter is the outer diameter of the inner diameter of the first cylindrical portion 111 (the 50b inner diameter). The following small size is determined so that the second jig 12 is attached to the sealing member 110 of the sealing member 50. This is the case where the periphery of the third clip to which the resin sheet 50S is attached is accommodated in the Rth 'as shown in FIG. 5'. The second fitting portion 123 of the resin sheet 50S is between the second portion U1 and the second cylindrical portion 121. The first fitting portion U3 is sighed by the center portion of the second bottom surface portion 122 and can be assembled. In other words, the second fitting portions 123 are fitted to each other. Therefore, the clamp 12G can be provided with the first fitting portion 113. The second clamp 130 can be assembled with high precision. 120, so that the 篆1 jig 110 can accurately position the second formed-size annular space: and the second cylindrical portion 12 于 is formed between the second and the second; The center portion of the seventh seven-person weaning jig 120 is mounted on the 110. Here, the first jig 13 is a person. The center portion of the crucible 113 is formed with an anti-shock hole 114 that is coupled to the shaft of the fastener 130. Second clamp 12 The insertion hole 124 is formed with the insertion shaft portion 131. Thereby, the first and the first members 110 and 120 are fixed to each other, and the second bottom portion 122 is close to each other. The fastening direction 130 is provided with a fastening mechanism for fastening the first and second clamps 11 and 120 to each other. The first and second bottom portions 112 and 122 are fastened. Formed in parallel with each other, when the first and second jigs 11 and 120 are fastened by the fastener 130, the resin 14/25 is held.
S 201237270 片50S。第1及第2底面部U2、122對樹脂片5〇s所造成 的挾壓力係以緊固物130的緊固扭力來調整。 〔密封構件的成形方法〕 接著，說明使用如上述所構成的成形裝置1〇〇來製造密 封構件50的方法。 、 首先，準備成為密封構件50的原型的樹脂片5〇s。如 圖4所示’樹脂片5〇S典型地被冲孔而形成為圓環狀。樹脂 片50S的大小（外徑)可按照所適用的活塞的大小而適當設 定’例如設為直徑93mm。樹脂片5〇s的厚度也不特別限田定^ 例如為LOmm。中心孔50c白勺孔徑也不特別限定 活塞5的結構。 Μ於 接著，如圖4及圖5所示 /丨彳π不i穴兴1川及第2夾 具丄2〇來夹入樹脂片50S，藉由夾壓並加熱該樹脂片鄕至 預定溫度’製作該密封構件5〇。 此時就程言’首先在第1夾具110上安裝樹脂片㈣。 人片5GS的中心孔5GC與第1嵌合部⑴的嵌 5作用來確保樹脂片鄉對於第1夾具1】心定位精产。因 此’第1嵌合部H3的外徑與樹脂片5 又 徑之差越小，越可得到高的定位精度。i孔施的孔 广此外，由於第1圓筒部⑴的内徑小於樹脂片50S的外 徑’所以樹脂片娜的周緣部抵接於第丨圓筒部iu的内面。 上組==上，片_’在第1夹具⑽ 合部123的嵌合作用來石_^/目^合部113與第2嵌 的定苐夾具12G對於第1夾且no 的讀精度。此情況也是第1嵌合細的外徑與第2嵌合 15/25 201237270 部12=内徑之差越小，越可得 在苐1夾具110上組裝第2夾具 120藉由緊固物130來緊固匕時f 所夾具110、 ΰ 了如圖5所示，藉由樹脂 二S的周緣相外的區域被夾持於第1底面部⑴盘第2 底面邛122之間來確保預定的平面度。 〃 …另-方面’如圖5所示，樹脂片5GS的周緣部進 圓筒部111與第2圓筒部121之間的淨狀 2底面指2的擠壓作用來向對於μ底面部η】成垂直的 方向折回。 ★此處，S 1圓筒部m與第2圓筒部121之間的間隙的 見度被设定為大於樹脂片50S的周緣部厚度的值。藉此，可 將樹脂片50S的周緣部遍及其全區域而圓滑且均曰等地折 回。此外，上述間隙的寬度越大，朝向所製作的密封構件 50之岔封部50b的直徑外方的彈性力有越高的傾向。 使第2夾具120對於第1夾具11〇達成緊固之力至少需 要使樹脂片50S密合於第1底面部112的程度之壓力。藉 此，可將樹脂片50S的周緣部適當地向垂直方向折回。此情 況下，樹脂片50S也可以使第1底面部112與第2底面部 122之間產生預定的壓縮力。藉此，可將樹脂片5〇s的周緣 部圓滑地向垂直方向折回。上述預定的壓縮力不特別限定， 例如為IMPa，若換算成緊固物130的緊固扭力，則在本實 施形態中為13N.m。 貝 藉由緊固物130來相互緊固的成形裝置100被加熱至預 定溫度。藉此，樹脂片50S被成形為具有平面部5〇a與密封 部50b的密封構件50(圖5)。 16/25S 201237270 piece 50S. The entanglement pressure of the first and second bottom surface portions U2, 122 against the resin sheet 5 〇 s is adjusted by the fastening torque of the fastener 130. [Method of Forming Sealing Member] Next, a method of manufacturing the sealing member 50 using the forming apparatus 1A configured as described above will be described. First, a resin sheet 5〇s which is a prototype of the sealing member 50 is prepared. As shown in Fig. 4, the resin sheet 5〇S is typically punched to form an annular shape. The size (outer diameter) of the resin sheet 50S can be appropriately set in accordance with the size of the piston to be applied. For example, the diameter is 93 mm. The thickness of the resin sheet 5 〇s is not particularly limited to the field setting, for example, LOmm. The aperture of the center hole 50c does not particularly limit the structure of the piston 5. Then, as shown in FIG. 4 and FIG. 5, / π π i 兴 及 及 及 及 及 及 及 及 及 及 及 及 及 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂 树脂This sealing member 5 is produced. At this time, the resin sheet (four) is first mounted on the first jig 110. The center hole 5GC of the human piece 5GS and the first fitting portion (1) are engaged to secure the center of the first jig 1 in the resin sheet. Therefore, the smaller the difference between the outer diameter of the first fitting portion H3 and the diameter of the resin sheet 5, the higher the positioning accuracy can be obtained. Further, since the inner diameter of the first cylindrical portion (1) is smaller than the outer diameter of the resin sheet 50S, the peripheral portion of the resin sheet Na abuts against the inner surface of the second cylindrical portion iu. In the upper group == upper, the sheet _' is fitted to the first jig (10), and the reading accuracy of the first clamp and the second clamped clamp 12G for the first clamp and no. In this case, the smaller the difference between the outer diameter of the first fitting portion and the second fitting 15/25 201237270 portion 12 = inner diameter, the more the second jig 120 can be assembled on the crucible 1 fixture 110 by the fastener 130. When the clamp 110 is tightened, as shown in Fig. 5, the region outside the peripheral edge of the resin two S is sandwiched between the first bottom surface portion (1) and the second bottom surface 122 of the disk to ensure a predetermined Flatness. In the other hand, as shown in Fig. 5, the peripheral portion of the resin sheet 5GS enters the bottom surface portion η of the net shape 2 between the cylindrical portion 111 and the second cylindrical portion 121. Fold back in a vertical direction. Here, the visibility of the gap between the S 1 cylindrical portion m and the second cylindrical portion 121 is set to be larger than the thickness of the peripheral portion of the resin sheet 50S. Thereby, the peripheral edge portion of the resin sheet 50S can be folded back smoothly and evenly over the entire region. Further, the larger the width of the gap, the higher the elastic force toward the outside of the diameter of the sealing portion 50b of the sealing member 50 to be produced. The force at which the second jig 120 is tightened to the first jig 11 is at least the pressure at which the resin sheet 50S is adhered to the first bottom portion 112. Thereby, the peripheral edge portion of the resin sheet 50S can be appropriately folded back in the vertical direction. In this case, the resin sheet 50S may generate a predetermined compressive force between the first bottom surface portion 112 and the second bottom surface portion 122. Thereby, the peripheral portion of the resin sheet 5〇s can be smoothly folded back in the vertical direction. The predetermined compressive force is not particularly limited, and is, for example, IMPa. In the case of the tightening torque of the fastener 130, it is 13 N.m in the present embodiment. The forming apparatus 100, which is fastened to each other by the fasteners 130, is heated to a predetermined temperature. Thereby, the resin sheet 50S is formed into the sealing member 50 (Fig. 5) having the flat portion 5A and the sealing portion 50b. 16/25
S 201237270 熱。預定溫度的烘箱内部被加 「也*TU在第丨夾具11〇及 ^方中喊有加熱H等的加熱源 、1至 110、120分別為金屬 了弟1及第2失具 50S上。 &所以7將熱有效地傳送到樹脂片 $預=不特別限定’對於樹脂片5 ;度，例如在l6〇t以上25(rc以什大 保持，也不特職定，為例如40分鐘。麵疋溫度的 岔封構件50之平面部5〇a係藉由 _用與上述純作用而料於镇^又到緊固物130的壓 部122夕門/ 底面部112與第2底面 之間。另一方面，密封部50b係_ 二 用及加熱作用而形成於第 Μ 、I又以堅縮作 々珉於第1圇同邰111與第2圓筒部121之 ^ °特別疋利用加熱處理來緩和密封構件％的内部 可穩定地形成對於平面部5〇a成彎曲的密封部鄕。心 100、Γ=時間保持樹脂片5QS的力唉處理後，成形裝置 2被冷部。冷卻方料特職定，可叫自然冷卻也可 ^疋強制冷卻。冷卻後，成形裝置⑽被分離為第i夾呈110 =2夹具120 ’從第！夾具11〇取出密封構件5〇(樹脂片 圖6為說明從第i夾具11〇取出密封構件刈之方法的 剖面圖。在本實施形態中，使用如圖6所示的取出夾具如〇。 該取出夾具200具有本體2(n、及設於本體2〇1的一面上的 複數個銷(Pi_2。在第丨底㈣112上預絲成插通各銷 202的複數個孔，藉由在此等各孔中分別插通各銷2〇2而在 第i夾具110上安裝本體20卜在圖6中，第1底面部ιΐ2 17/25 201237270 上的密封構件5〇 110被取出。 向上方推出，且從第1夹具 有密封戶ι!述了製作在平面部5〇a的周緣部環狀地形成 封構件50-方=1構件5〇。藉由本實施形態，由於將密 整朝向直徑外⑼=7；面成形，所以可對密封部働調 形丄精5〇加熱成形’相較於以非加熱成 此，將密封構件卩^直徑外方的彈性力降低。因 就可對於氣紅6ήΓ真泵浦1的活塞5上使用之際， 的彈性力來壓接' 自使密封構件5G之密封部5%以適度 此，可維m’以抑制密封部5%的不必要的磨損。藉 的耐久性、。'、與活塞：之間的密封性並且謀求提高泵浦 二耐的製品規格的要素來適當設定。成形溫度越= 向的彈性力越有變大的傾 本發明者传力越有降低的傾向。 外_、成η ®同部111的内徑、第2圓筒部ι21的 該:„士不同而製作複數個密封構件50的樣品，將 各樣：：二際女裝於活塞5上，然後使泵浦受到驅動，且斜 消耗電力。此外，使泵浦驅動， 對各樣口口測定該密封部50b的磨損量。 交 9」^==構件Γ的原朗樹脂片鄕，使用直徑 X mm的聚四敗乙烯片。在成形溫度的保持時 18/25 201237270 間為40分鐘，其後花20分鐘以上進行冷卻。關於真空泵浦’ 使用優貝克(ULVAC)機工公司製造的搖動活塞型乾式真空 泵浦。 表1中顯示用於製作各樣品的第1圓筒部ill的内徑、 第2圓筒部121的外徑、成形溫度之條件。此外，圖7及圖 8中分別顯示各樣品的磨損量及泵浦的消耗電力之測定值。 [表1] 樣品No. 1 2 3 4 5 6 7 第1圓 筒部内徑(mm) </>87.4 087.4 087.8 087.8 088.0 088.0 088.0 第2圓 筒部内徑(mm) 084.45 084.45 084.45 084.45 084.0 (/)84.0 084.45 成形 200°C 160°C^ 200°C 160°C 130°C 200°C 200°C I荆π像品 ^ 在封一 的磨損量在各樣品中為最大， 極限[力也n。其理由被認為是由於成形溫度為，比 高度地維持密封部5%的彈性恢復力，對於氣缸 6的弹性力在各樣品中為最高。 關於樣品1〜4、6、7私从― . ，雖然磨損量有偏差，但極限真 的磨損量越少^此外，ώ ’皿㈣的樣ασ ’則②封部50b 以可謀求減少泵浦的消耗電°力維持密封部良好的密封性，所 此處，確認了如同例如 第1圓筒部⑴的内徑斑第3、6及7那樣，即使是 同的情況，也可得到同樣『12ι的外徑在樣品間不 的密封性對成形溫度具特性。由此可認為密封構件 徑卻不強烈相依。、’、'、相依性，而對成形用夾具的直 19/25 201237270 。其次，使用製作樣品7時所用的各夾具， 。 C的成形溫度範圍内製作了複數個密封構件160 c〜250 各樣品評估了包含極限壓力、開放大氣睹 然後，對 流量、消耗電力、泵浦殼體的溫度上升量、;未荷旬的嘴出 之泵浦特性。表2中顯示其結果。此外9封部的磨損量 11中分別顯示成形溫度與密封部的磨損量、;圖10及圖 及溫度上升量之關係。 、南的消耗電力 第1圓筒部内徑(mm) 3 2圓筒部内徑(mm) —成形赋(°〇 活塞安裝後的密封部夕卜徑〔mm〕 1 虽雜力〔kPa〕 ' 】献氣時流量〔Niymin〕 —電力〔W〕 ' 7跋上升〔K〕 [表2] 160 088.34 08823 125 125 4.5 丨磨損量〔g〕 如表2、圖9〜圖11所示，可確認成形溫古 部的磨損量、，浦的雜電力及溫度上升量都越^低的j 向。此被涊為是由於成形溫度越高，越可緩和該封盖杜 50的内部應力’可穩定地形成對於平面部5〇a成彎 = 部50b。即’成形溫度越高，密封部的形 = 高，活塞安裝後的密封部的外徑減少。藉此，密^的= 力降低，藉由作用於密封部的滑動摩擦力降低，可抑制磨 損。關於密雜’也可輕··由於、;肖耗電力伴隨成形溫产的 高溫化而降低，所以確保了氣紅6與活塞5之間穩定的^封 性。 如以上所述，藉由以密封構件的成形溫度為16〇它以上 20/25S 201237270 Hot. The inside of the oven at the predetermined temperature is added "also * TU in the first clamp 11 〇 and ^ square shouting heating source such as heating H, 1 to 110, 120 are respectively metal 1 and 2, 50S. Therefore, 7 heat is efficiently transferred to the resin sheet. The amount of the resin sheet is not particularly limited to the resin sheet 5; for example, at 16 〇t or more 25 (rc is kept at a large extent, and is not particularly specified, for example, 40 minutes. The planar portion 5〇a of the 岔 sealing member 50 of the facial enthalpy temperature is used between the sill/bottom portion 112 and the second bottom surface of the pressing portion 122 of the fastener 130 by the pure action described above. On the other hand, the sealing portion 50b is formed by the second and the heating, and is formed by the heating, and is further tightened by the first 囵 111 and the second cylindrical portion 121 by heating. The treatment to relax the inside of the sealing member % can stably form the sealing portion 成 which is curved toward the flat portion 5〇a. After the core 100, Γ = time to hold the resin sheet 5QS, the forming device 2 is cooled. The special task can be called natural cooling or forced cooling. After cooling, the forming device (10) is separated into the i-th clamp and 110 = 2 clamp 120 ' The sealing member 5 is removed from the first jig 11 (resin sheet) Fig. 6 is a cross-sectional view showing a method of taking out the sealing member 从 from the i-th jig 11 . In the present embodiment, a take-out jig as shown in Fig. 6 is used. The take-out jig 200 has a body 2 (n, and a plurality of pins (Pi_2) disposed on one side of the body 2〇1, and pre-wired on the second bottom (four) 112 to form a plurality of holes through which the pins 202 are inserted. The pins 2〇2 are inserted into the respective holes, and the body 20 is attached to the i-th jig 110. In Fig. 6, the sealing member 5〇110 on the first bottom surface portion 172 17/25 201237270 is taken out. It is described that the first member has a seal member !! It is described that the sealing member 50-square = member 5 is formed annularly at the peripheral portion of the flat portion 5A. In this embodiment, the compacting direction is Outside the diameter (9) = 7; the surface is formed, so the sealing portion can be adjusted to the shape of the crucible, and the elastic force of the outer diameter of the sealing member can be reduced. The elastic force of the gas red 6ήΓ true pump 1 is used to crimp the 'sealing portion of the sealing member 5G' 5% is moderate, and it is possible to suppress the unnecessary wear of 5% of the seal portion. The durability between the seal, the seal with the piston, and the element of the product specification for improving the pump resistance The more the forming temperature is, the more the elastic force of the direction becomes larger, and the inventors tend to have a lower force. The outer diameter of the same portion 111 and the second cylindrical portion ι 21 : [Different samples of a plurality of sealing members 50 are produced, and various samples are made: the second woman is on the piston 5, and then the pump is driven, and the power is consumed obliquely. Further, the pump was driven, and the amount of wear of the sealing portion 50b was measured for each port. The original resin sheet of the 9"^== component 鄕 is used, and a polytetracyclite sheet having a diameter of X mm is used. When the forming temperature is maintained, it is 40 minutes between 18/25 and 201237270, and then it is cooled for 20 minutes or more. About vacuum pumping Using a shaker type dry vacuum pump manufactured by ULVAC. Table 1 shows the conditions of the inner diameter of the first cylindrical portion ill, the outer diameter of the second cylindrical portion 121, and the molding temperature for preparing each sample. Further, the measured values of the amount of wear of each sample and the power consumption of the pump are shown in Figs. 7 and 8, respectively. [Table 1] Sample No. 1 2 3 4 5 6 7 Inner diameter (mm) of the first cylindrical portion </> 87.4 087.4 087.8 087.8 088.0 088.0 088.0 Inner diameter (mm) of the second cylindrical portion 084.45 084.45 084.45 084.45 084.0 ( /) 84.0 084.45 Forming 200 ° C 160 ° C ^ 200 ° C 160 ° C 130 ° C 200 ° C 200 ° CI Jing π image ^ The amount of wear in the seal is the largest in each sample, the limit [force is also n. The reason for this is considered to be that the elastic restoring force of the sealing portion is 5% higher than the forming temperature, and the elastic force for the cylinder 6 is the highest among the samples. Regarding the samples 1 to 4, 6, and 7 privately from ".", although the amount of wear is deviated, the limit is actually less the amount of wear. In addition, the sample ασ of the dish (4) is 2 parts 50b to reduce the pumping. The electric power consumption of the sealing portion maintains a good sealing property. Here, for example, as in the case of the inner diameter spots 3, 6 and 7 of the first cylindrical portion (1), it is confirmed that the same can be obtained even in the same case. The outer diameter of 12 ι does not have a seal between the samples and is characteristic of the forming temperature. Therefore, it can be considered that the diameter of the sealing member is not strongly dependent. , ', ', dependence, and the straightening of the forming fixture 19/25 201237270. Next, each of the jigs used in the preparation of the sample 7 was used. A plurality of sealing members 160 c to 250 were fabricated in the forming temperature range of C. Each sample was evaluated to contain a limit pressure, an open atmosphere, then a flow rate, a power consumption, a temperature rise of the pump casing, and a nozzle that was not charged. Pump characteristics. The results are shown in Table 2. Further, the wear amount 11 of the nine seals shows the relationship between the molding temperature and the wear amount of the seal portion, and Fig. 10 and the temperature rise amount. The south inner power consumption first cylindrical inner diameter (mm) 3 2 cylindrical inner diameter (mm) - forming allowance (° 〇 piston sealing portion after the installation of the diameter [mm] 1 although the hybrid [kPa] ' 】 Flow rate during gas supply [Niymin] - electric power [W] '7跋 rise [K] [Table 2] 160 088.34 08823 125 125 4.5 丨 wear amount [g] As shown in Table 2, Figure 9 to Figure 11, the formation can be confirmed. The wear amount of the Wengu part, the hybrid electric power and the temperature rise of the Pu are all lower in the j direction. This is because the higher the forming temperature, the more the internal stress of the cap Du 50 can be alleviated steadily. Forming a curved portion = portion 50b for the flat portion 5a. That is, the higher the forming temperature, the shape of the sealing portion is high, and the outer diameter of the sealing portion after the piston is mounted is reduced. Thereby, the force = the force is reduced by The sliding frictional force acting on the sealing portion is reduced, and the abrasion can be suppressed. The "different" can also be lighter, and the power consumption is reduced with the increase in temperature of the forming temperature, so that the gas red 6 and the piston 5 are secured. Stable sealability. As described above, by forming the sealing member at a temperature of 16 〇 it is 20/25 or more
S 201237270 250°C以下，可維持穩定的密封性並且抑制密封部的磨損， 同時可謀求減少泵浦的消耗電力。 此外，雖然成形溫度的上限設為25〇。(2，但可按明構成 岔封構件的材料的熱穩定性或作為目的之密封性等來適者 設定。 以上，雖然就本發明的實施形態進行了說明，但本發明 不限於此實施形態’可根據本發明的技術思想進行各種變 更。 例如，雖然在以上的實施形態中，舉出適用於搖動活夷 型乾式真空泵浦用之活塞的密封構件之製造方法及其成步 敦置為例進行了說明’但不限於此’本發明也可以適用於製 造適用於其他容積移送型真空泵浦的密封構件。 & 此外，雖然在以上的實施形態中將第丨及第2夾具11〇、 120的嵌合部113、123都形成為圓筒或圓柱形狀，但也可以 形成為相互具有嵌合關係的其他幾何學的形狀，例如多角才主 形狀，以取代此圓筒或圓柱形狀。此外，此等嵌合部也可以 按照需要而被省略。 再者’雖然使用緊固物13〇以作為緊固第】及第2失具 110、120的緊固機構’但也可以使用夾具等其他的構件以取 代此緊固機構。 【圖式簡單說明】 圖1為顯不具備安裝有關於本發明一實施形態的密封 構件之活塞的真空泵浦之結構的概略剖面圖。 圖2為顯示上述活塞及其周邊構造的放大圖。 圖3(a)至圖3(d)為說明上述活塞動作的示意圖。 21/25 201237270 圖4為將上述密封構件成形之成形裝置的分解斜視圖。 圖5為上述成形裝置的概略剖面圖。 圖6為說明從上述成形裝置取出密封構件之步驟的概 略剖面圖。 圖7為顯示使用使成形條件不同而製作的複數個密封 構件來構成真空泵浦時之各密封構件的磨損量的一實驗結 果。 圖8為顯示使用使成形條件不同而製作的複數個密封 構件來構成真空泵浦時之該真空泵浦的消耗電力的一實驗 結果。 圖9為顯示上述密封構件的成形溫度與磨損量之關係 的一實驗結果。 圖10為顯示上述密封構件的成形溫度與真空泵浦的消 耗電力之關係的一實驗結果。 圖11為顯示上述密封構件的成形溫度與真空泵浦的溫 度上升量之關係的一實驗結果。 【主要元件符號說明】 1真空泵浦 5 活塞 50 密封構件 50a 平面部 50b 密封部 50c 中心孔 50S 樹脂片 100 成形裝置 22/25S 201237270 Below 250 °C, it maintains stable sealing and suppresses wear of the seal. At the same time, it can reduce the power consumption of the pump. Further, although the upper limit of the forming temperature is set to 25 〇. (2) However, it can be set as appropriate according to the thermal stability of the material constituting the sealing member, or the intended sealing property, etc. Although the embodiment of the present invention has been described above, the present invention is not limited to the embodiment. Various modifications can be made in accordance with the technical idea of the present invention. For example, in the above embodiments, a method of manufacturing a sealing member suitable for a piston for swaying a dry vacuum pump and a stepping method thereof are taken as an example. The description of the present invention is also applicable to the manufacture of a sealing member suitable for other volume transfer type vacuum pumping. Further, in the above embodiment, the third and second jigs 11 and 120 are used. The fitting portions 113, 123 are all formed in a cylindrical or cylindrical shape, but may be formed in other geometric shapes having a fitting relationship with each other, for example, a polygonal shape to replace the cylindrical or cylindrical shape. The fitting portion may be omitted as needed. Further, 'the fastening mechanism 13 is used as the fastening mechanism' and the fastening mechanisms of the second and second clutches 110 and 120' Other components such as a jig can be used instead of the fastening mechanism. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a structure in which a vacuum pump having a piston to which a sealing member according to an embodiment of the present invention is attached is provided. 2 is an enlarged view showing the structure of the piston and its periphery. Fig. 3 (a) to Fig. 3 (d) are schematic views for explaining the operation of the above piston. 21/25 201237270 Fig. 4 is an exploded perspective view of the forming device for forming the above sealing member Fig. 5 is a schematic cross-sectional view showing the above-described molding apparatus. Fig. 6 is a schematic cross-sectional view showing a step of taking out a sealing member from the molding apparatus. Fig. 7 is a view showing a vacuum pump which is formed by using a plurality of sealing members which are formed by different molding conditions. An experimental result of the amount of wear of each of the sealing members of the present time. Fig. 8 is a view showing an experimental result of the power consumption of the vacuum pump when vacuum pumping is performed using a plurality of sealing members which are formed by different molding conditions. An experimental result showing the relationship between the forming temperature and the amount of wear of the above sealing member. Fig. 10 is a view showing the forming temperature of the above sealing member An experimental result relating to the power consumption of the vacuum pumping Fig. 11 is an experimental result showing the relationship between the forming temperature of the above-mentioned sealing member and the temperature rise amount of the vacuum pump. [Main component symbol description] 1 Vacuum pumping 5 Piston 50 sealing Member 50a Plane portion 50b Sealing portion 50c Center hole 50S Resin sheet 100 Forming device 22/25
S 201237270 110 111 112 113 114 120 121 122 123 124 130 131 第1夾具 第1圓筒部 第1底面部 第1嵌合部 安裝孔 第2夾具 第2圓筒部 第2底面部 第2嵌合部 插通孔 緊固物 軸部 23/25S 201237270 110 111 112 113 114 120 121 122 123 124 130 131 1st jig 1st cylindrical part 1st bottom part 1st fitting part mounting hole 2nd jig 2nd cylindrical part 2nd bottom part 2nd fitting part Inserting through hole fastening shaft portion 23/25