CN102621910A - Four-blade slit control system based on experimental physics and industrial control system (EPICS) and control method thereof - Google Patents
Four-blade slit control system based on experimental physics and industrial control system (EPICS) and control method thereof Download PDFInfo
- Publication number
- CN102621910A CN102621910A CN201210111385XA CN201210111385A CN102621910A CN 102621910 A CN102621910 A CN 102621910A CN 201210111385X A CN201210111385X A CN 201210111385XA CN 201210111385 A CN201210111385 A CN 201210111385A CN 102621910 A CN102621910 A CN 102621910A
- Authority
- CN
- China
- Prior art keywords
- blade
- slit
- position information
- bore
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
The invention relates to a four-blade slit control system based on an experimental physics and industrial control system (EPICS) and a control method thereof. The four-blade slit control system comprises an upper computer and an inversion of control (IOC) controller connected between the upper computer and a first slit motor, a second slit motor, a third slit motor and a fourth slit motor. According to caliber values of four-blade slits and/or caliber central point position information provided by the upper computer and a relation model of preset positions of a first blade, a second blade, a third blade and a fourth blade and aperture and caliber central point position of the four-blade slits, target position information of the first blade, the second blade, the third blade and the fourth blade is obtained through calculating, and corresponding control signals are output to the first slit motor, the second slit motor, the third slit motor and the fourth slit motor according to the target position information of the first blade, the second blade, the third blade and the fourth blade. Based on independent driving of the slit motors, the four-blade slit control system achieves linkage control on the slit motors, accordingly the size of calibers of the slits can be adjusted, offset control on the caliber central point position is achieved, further adjusting on beam current facula shape is achieved, and physical requirements of scientific experiments are met.
Description
Technical field
The present invention relates to a kind of four blade slit control system and control method thereof based on EPICS.
Background technology
Experimental Physics and Industrial Control System (experimental physics and industrial control system; Abbreviation EPICS) software platform is a based on network dcs; It is the free Control Software of science device such as large-scale accelerator in the world; Its source code is open, can freely download.First batch of 7 the light beam line control system of SSRF all adopt EPICS, set up standardized light beam line control system, and such system also has only on a few Synchrotron Radiation in the world and uses, at home brand-new trial especially.
All there are a white light four blade slit, one or more accurate monochromatic light double-pole or four blade narrow slit structure in each line station of SSRF.Each blade of these slits is all driven by a motor; As shown in Figure 1; The four blade narrow slit structure comprises four motors, the difference called after first motor X1, the second motor X2, the 3rd motor Y1, the 4th motor Y2, and these four motors are respectively on the direction of oneself controlling; Drive a blade and do the straight line motion in one dimension, and in positive and negative limit switch prescribed stroke scope rectilinear motion.In addition, the RP switch has also been installed in certain position in the middle of the positive and negative limit switch, and this position of the switch is used to seek zero, promptly arrives the initial zeros position to reset motor.
Synchrotron radiation light beam passes from the square slit that 4 blades are encircled into.When blade by state away from each other, slowly relatively near, when overlap condition, light beam just stops by passing through to gradually fully, is prevented from fully at last.Usually, some motors are moved in slit control seldom separately, but carry out the caliber size control of directions X or Y direction or the skew control at bore center, two motors on this certain direction of just need moving simultaneously.In light of this situation, press for a kind of control system that realizes down based on the EPICS platform of exploitation now to satisfy its work requirements.
Summary of the invention
In order to solve the problem that above-mentioned prior art exists, the present invention aims to provide a kind of four blade slit control system and control method thereof based on EPICS, with bore control and the bore central point skew control that under the EPICS platform, realizes all kinds of accurate four blade slits.
The described a kind of four blade slit control system of one of the present invention based on EPICS, said four blade slit is surrounded by first to fourth blade that on the XY coordinate system, moves, wherein; Said first blade is positioned at X coordinate negative direction; Second blade is positioned at X coordinate positive dirction, and the 3rd blade is positioned at Y coordinate negative direction, and the four blade sheet is positioned at Y coordinate positive dirction; And through the control of first to fourth slit motor, said system comprises respectively in the position of said first to fourth blade:
Host computer; And
Be connected the IOC controller between said host computer and first to fourth slit motor; Bore value and/or the bore center position information and preset first to fourth blade position and the aperture of four blade slit and the relational model of bore center position of the said four blade slit that it provides according to said host computer on the one hand; Calculate the target position information of first to fourth blade; And according to this first to fourth blade target position information to said first to fourth slit motor output control signal corresponding; With bore and/or the center position of controlling said four blade slit; It is on the other hand to the actual position information of said host computer feedback according to first to fourth blade that receives from said first to fourth slit motor, and the actual bore value and/or the actual bore center position information of the four blade slit that calculates according to the actual position information and the said relational model of this first to fourth blade.
In the above-mentioned four blade slit control system based on EPICS, said IOC controller comprises:
The central control unit that is connected with said host computer; It receives the bore value and/or the bore center position information of said four blade slit on the one hand; Calculate the target position information of said first to fourth blade, it feeds back the actual position information of said first to fourth blade and the actual bore value and/or the actual bore center position information of four blade slit to said host computer on the other hand; And
The motion control unit that is connected with said central control unit; Its one side is according to the target position information of said first to fourth blade; Export said control signal to said first to fourth slit motor, the actual position information of first to fourth blade that it collects from said first to fourth slit motor to the output of said central control unit on the other hand.
In the above-mentioned four blade slit control system based on EPICS, said central control unit is connected with said motion control unit through the VME bus.
In the above-mentioned four blade slit control system based on EPICS, said central control unit is connected with said upper machine communication through network.
In the above-mentioned four blade slit control system based on EPICS, said motion control unit is connected with said first to fourth slit motor with motor driver through signal interface board successively.
The control method of the present invention's two described a kind of as above-mentioned four blade slit control system based on EPICS may further comprise the steps:
Step S1 sets up the aperture of said first to fourth blade position and said four blade slit and the relational model of bore center position in said IOC controller;
Step S2; The bore value of the four blade slit that said IOC controller provides according to host computer and/or the relational model among bore center position information and the said step S1; Calculate the target position information of first to fourth blade, and export control signal corresponding to said first to fourth slit motor according to the motor target position information of first to fourth blade;
Step S3, said IOC controller feeds back the actual position information of said first to fourth blade and the actual bore value and/or the actual bore center position information of the four blade slit that calculates according to the actual position information and the relational model among the said step S1 of this first to fourth blade to host computer.
In the above-mentioned four blade slit control method based on EPICS, the relational model of said step S1 comprises:
-(x2+x1)+a＝size_x (1)
(x2-x1)/2+b＝center_x (2)
-(y2+y1)+c＝size_y (3)
(y1-y2)/2+d＝center_y (4)
Wherein, x1, x2, y1, y2 are respectively the positional information of said first to fourth blade; Size_x is the bore value of said four blade slit on the X coordinate direction; Center_x is the bore center position information of said four blade slit on the X coordinate direction; Size_y is the bore value of said four blade slit on the Y coordinate direction; Center_y is the bore center position information of said four blade slit on the Y coordinate direction; A, b, c, d are constant, and expression respectively: when said first, second blade all is in the initial zeros position four blade slit the bore value on the X coordinate direction, when said first, second blade all is in the initial zeros position bore central point of four blade slit on the X coordinate direction side-play amount, when said the 3rd, the bore value of four blade slit on the Y coordinate direction when four blade sheet all is in the initial zeros position, when side-play amount said the 3rd, the bore central point of four blade slit on the Y coordinate direction when four blade sheet all is in the initial zeros position.
In the above-mentioned four blade slit control method based on EPICS, the constant a in the said relational model, b, c, d calculate through peripheral optics instrumental calibration.
Owing to adopted above-mentioned technical solution, the present invention receives the bore value and/or the bore center position information of the four blade slit that host computer provides through central processing unit, calculates the motor position desired value; And, order the certain step number of each slit motor rotation, promptly according to result of calculation; On based on the basis of realization to the drive of slit motor; Realize the interlock control of slit motor, let each blade move to desirable position, thus the skew control of regulating the size of slit bore and realizing the bore center position; And then realized the adjusting of halved tie time shape of spot, satisfied the physical requirement of scientific experiment.The present invention also has simple in structure, and is easy to operate, and control accuracy is high, easy care, advantage such as design cost is low.
Description of drawings
Fig. 1 is that narrow slit structure and motor position concern synoptic diagram;
Fig. 2 is the structural representation of a kind of four blade slit bore control system based on EPICS of the present invention.
Embodiment
Below in conjunction with accompanying drawing, provide preferred embodiment of the present invention, and describe in detail.
As shown in Figure 1; The four blade slit is surrounded by first to fourth blade 1,2,3,4 that on the XY coordinate system, moves, and wherein, first blade 1 is positioned at X coordinate negative direction; Second blade 2 is positioned at X coordinate positive dirction; The 3rd blade 3 is positioned at Y coordinate negative direction, and four blade sheet 4 is positioned at Y coordinate positive dirction, and the position of first to fourth blade 1,2,3,4 is respectively through first to fourth slit motor X1, X2, Y1, Y2 control.In the present embodiment, definition: sawtooth wall direction is an X coordinate positive dirction, and the experiment hall is an X coordinate negative direction; The shed top is Y coordinate positive dirction, and the earth is a Y coordinate negative direction.
Shown in Figure 2, one of the present invention, promptly a kind of four blade slit bore control system based on EPICS comprises host computer 10 and IOC controller 20.
Control principle in the face of above-mentioned control system describes down.
Visible by Fig. 1; Regulate the position of first, second blade 1,2 respectively through first, second slit motor X1, X2; Can accomplish the control of the bore value of four blade slit on the X coordinate direction; When first, second blade 1,2 simultaneously toward a direction mobile phase with apart from the time, be X central point offset adjusted (caliber size on the X coordinate direction remains unchanged).Through the 3rd, the 4th slit motor Y1, Y2 regulate the 3rd respectively, the position of four blade sheet 3,4; Can accomplish the control of the bore value of four blade slit on the Y coordinate direction; When the 3rd, four blade sheet 3,4 simultaneously toward a direction mobile phase with apart from the time, be Y central point offset adjusted (caliber size on the Y coordinate direction remains unchanged).
Each slit motor all have separately positive and negative spacing+Lim ,-Lim, slit motor positive rotation or negative rotation change, and are different to the size influence of four blade slit bore.As shown in Figure 1, the first slit motor X1 drives first blade 1 and drives second blade 2 toward negative spacing-Lim direction motion toward the negative spacing-Lim direction motion or the second slit motor X2, and the bore value of four blade slit on the X coordinate direction becomes big; The first slit motor X1 drives first blade 1 and drives second blade 2 toward just spacing+Lim direction motion toward the just spacing+Lim direction motion or the second slit motor X2, and the bore value of four blade slit on the X coordinate direction diminishes.The 3rd slit motor Y1 drives the 3rd blade 3 and drives four blade sheet 4 toward negative spacing-Lim direction motion toward negative spacing-Lim direction motion or the 4th slit motor Y2, and the bore value of four blade slit on the Y coordinate direction becomes big; The 3rd slit motor Y1 drives the 3rd blade 3 and drives four blade sheet 4 toward just spacing+Lim direction motion toward just spacing+Lim direction motion or the 4th slit motor Y2, and the bore value of four blade slit on the Y coordinate direction diminishes.
Based on above-mentioned control system and control principle,, promptly a kind of as introducing based on the four blade slit control method of EPICS down in the face of the present invention's two.This control method may further comprise the steps:
Step S1 in IOC controller 20, is specially the aperture of in central control unit 201, setting up first to fourth blade position and four blade slit and the relational model of bore center position, and this relational model comprises:
-(x2+x1)+a＝size_x (1)
(x2-x1)/2+b＝center_x (2)
-(y2+y1)+c＝size_y (3)
(y1-y2)/2+d＝center_y (4)
Wherein, x1, x2, y1, y2 are respectively the positional information of first to fourth blade 1,2,3,4; Size_x is the bore value of four blade slit on the X coordinate direction; Center_x is the bore center position information of four blade slit on the X coordinate direction; Size_y is the bore value of four blade slit on the Y coordinate direction; Center_y is the bore center position information of four blade slit on the Y coordinate direction; A, b, c, d are constant (can calculate through peripheral optics instrumental calibration); And wherein; A representes: the bore value of four blade slit on the X coordinate direction when first, second blade 1,2 all is in initial zeros position (0,0) (a be on the occasion of, the expression slit opening is not closed fully; A is 0, and the expression slit opening is just closed; A is a negative value, and the expression slit opening has overlapping); B representes: the side-play amount of the bore central point of four blade slit on the X coordinate direction is (with respect to the machine center gauge point when first, second blade 1,2 all is in initial zeros position (0,0); During center deflection sawtooth wall b be on the occasion of, b is a negative value during misalignment sawtooth wall, b is 0 when center and datum line coincidence); C representes: the bore value of four blade slit on the Y coordinate direction when the 3rd, when four blade sheet 3,4 all is in initial zeros position (0,0) (c be on the occasion of, the expression slit opening is not closed fully; C is 0, and the expression slit opening is just closed; C is a negative value, and the expression slit opening has overlapping); D representes: the side-play amount of the bore central point of four blade slit on the Y coordinate direction is (with respect to the machine center gauge point when the 3rd, when four blade sheet 3,4 all is in initial zeros position (0,0); When the center is higher than datum line (as 1.3 meters) d on the occasion of; D was a negative value when center was lower than datum line; D was 0 when center and datum line overlapped);
Step S2; IOC controller 20; Be specially the bore value of the four blade slit that central control unit 201 provides according to host computer 10 and/or the relational model among bore center position information and the step S1; Calculate the target position information of first to fourth blade 1,2,3,4, and, export control signal corresponding to first to fourth slit motor X1, X2, Y1, Y2 through motion control unit 202 according to the motor target position information of first to fourth blade 1,2,3,4;
Step S3; IOC controller 20 is specially the actual position information of first to fourth blade 1,2,3,4 that central control unit 201 gathers through motion control unit 202 to host computer 10 feedback and the actual bore value and/or the actual bore center position information of the four blade slit that calculates according to the actual position information and the relational model among the step S1 of this first to fourth blade 1,2,3,4.
Can know by the above-mentioned relation model:
Formula (1) and formula (3) are be respectively the four blade slit on the X coordinate direction with the Y coordinate direction on the computing formula of the caliber size of four blade slit on the X coordinate direction;
Formula (2) and formula (4) are be respectively the four blade slit on the X coordinate direction with the Y coordinate direction on the computing formula of bore central point skew.
Therefore, when bore value that the four blade slit is set on host computer 10 and/or bore center position information, the target location of first to fourth blade sheet 1,2,3,4 can calculate through the inverse operation of above-mentioned formula.For example:
Can make A=size_x, be the bore value of four blade slit on the X coordinate direction in setting on the host computer 10; Make B=center_x, be the bore center position information of four blade slit on the X coordinate direction in setting on the host computer 10; Make that C is constant a; Make that D is constant b; A, B, C, D all in formula as given value;
Then have:
X1_target＝(C-A)/2-(B-D) (5)
X2_target＝(C-A)/2+(B-D) (6)
Wherein, X1_target representes the target location of first blade 1, and X2_target representes the target location of second blade 2.
Can make E=size_y, be the bore value of four blade slit on the Y coordinate direction in setting on the host computer 10; Make F=center_y, be the bore center position information of four blade slit on the Y coordinate direction in setting on the host computer 10; Make that G is constant c; Make that H is constant d; E, F, G, H all in formula as given value;
Then have:
Y1_target＝(G-E)/2+(F-H) (7)
Y2_target＝(G-E)/2-(F-H) (8)
Wherein, Y1_target representes the target location of the 3rd blade 3, and Y2_target representes the target location of four blade sheet 4.
According to the target location of above-mentioned each blade, and cooperate IOC controller 20 realizing independently controlling on the basis of each slit motor, carry out slit motor interlock control, thereby realize control the four blade slit.
In the present embodiment, EPICS software platform capable of using is created a Motor application project, in its database D b file, adds the Motor record of 4 Electric Machine Control.White light slit Slit with SSRF photoetching branch line XIL line station is an example, and these 4 motors are named as " X08U1B:OP:Slit:X1 ", " X08U1B:OP:Slit:X2 ", " X08U1B:OP:Slit:Y1 ", " X08U1B:OP:Slit:Y2 ".These 4 Motor records need design according to mechanical drive, configure essential kinematic parameter, such as segmentation, motor resolution, encoder resolution, initial velocity, normal speed, signal output channels or the like; Download to the good application project of compiling in the flash memory of CPU of VME, CPU starts operation VxWorks real time operating system, loads the motor movement control program in the flash memory, can realize IOC controller 20.Utilize the EDM module of EPICS software platform then, design the Electric Machine Control interface, and at a networking PC who adorns Linux; It is this interface of operation on the host computer 10; Channel Archive through the EPICS platform is the CA agreement, and the information on the interface just can be passed through network automatically, and is mutual with IOC controller 20; Obtain motor information, or pass on target position information etc.
Above-described, be merely preferred embodiment of the present invention, be not in order to limiting scope of the present invention, the above embodiment of the present invention can also be made various variations.Be that every simple, equivalence of doing according to the claims and the description of application of the present invention changes and modification, all fall into the claim protection domain of patent of the present invention.The present invention not detailed description be the routine techniques content.
Claims (8)
1. four blade slit control system based on EPICS, said four blade slit is surrounded by first to fourth blade that on the XY coordinate system, moves, wherein; Said first blade is positioned at X coordinate negative direction, and second blade is positioned at X coordinate positive dirction, and the 3rd blade is positioned at Y coordinate negative direction; The four blade sheet is positioned at Y coordinate positive dirction; And the position of said first to fourth blade through the control of first to fourth slit motor, is characterized in that said system comprises respectively:
Host computer; And
Be connected the IOC controller between said host computer and first to fourth slit motor; Bore value and/or the bore center position information and preset first to fourth blade position and the aperture of four blade slit and the relational model of bore center position of the said four blade slit that it provides according to said host computer on the one hand; Calculate the target position information of first to fourth blade; And according to this first to fourth blade target position information to said first to fourth slit motor output control signal corresponding; With bore and/or the center position of controlling said four blade slit; It is on the other hand to the actual position information of said host computer feedback according to first to fourth blade that receives from said first to fourth slit motor, and the actual bore value and/or the actual bore center position information of the four blade slit that calculates according to the actual position information and the said relational model of this first to fourth blade.
2. the four blade slit control system based on EPICS according to claim 1 is characterized in that said IOC controller comprises:
The central control unit that is connected with said host computer; It receives the bore value and/or the bore center position information of said four blade slit on the one hand; Calculate the target position information of said first to fourth blade, it feeds back the actual position information of said first to fourth blade and the actual bore value and/or the actual bore center position information of four blade slit to said host computer on the other hand; And
The motion control unit that is connected with said central control unit; Its one side is according to the target position information of said first to fourth blade; Export said control signal to said first to fourth slit motor, the actual position information of first to fourth blade that it collects from said first to fourth slit motor to the output of said central control unit on the other hand.
3. the four blade slit control system based on EPICS according to claim 2 is characterized in that, said central control unit is connected with said motion control unit through the VME bus.
4. according to claim 2 or 3 described four blade slit control system, it is characterized in that said central control unit is connected with said upper machine communication through network based on EPICS.
5. the four blade slit control system based on EPICS according to claim 4 is characterized in that, said motion control unit is connected with said first to fourth slit motor with motor driver through signal interface board successively.
6. the control method like the described four blade slit control system based on EPICS of claim 1-5 is characterized in that, said method comprising the steps of:
Step S1 sets up the aperture of said first to fourth blade position and said four blade slit and the relational model of bore center position in said IOC controller;
Step S2; The bore value of the four blade slit that said IOC controller provides according to host computer and/or the relational model among bore center position information and the said step S1; Calculate the target position information of first to fourth blade, and export control signal corresponding to said first to fourth slit motor according to the motor target position information of first to fourth blade;
Step S3, said IOC controller feeds back the actual position information of said first to fourth blade and the actual bore value and/or the actual bore center position information of the four blade slit that calculates according to the actual position information and the relational model among the said step S1 of this first to fourth blade to host computer.
7. the four blade slit control method based on EPICS according to claim 6 is characterized in that the relational model of said step S1 comprises:
-(x2+x1)+a＝size_x (1)
(x2-x1)/2+b＝center_x (2)
-(y2+y1)+c＝size_y (3)
(y1-y2)/2+d＝center_y (4)
Wherein, x1, x2, y1, y2 are respectively the positional information of said first to fourth blade; Size_x is the bore value of said four blade slit on the X coordinate direction; Center_x is the bore center position information of said four blade slit on the X coordinate direction; Size_y is the bore value of said four blade slit on the Y coordinate direction; Center_y is the bore center position information of said four blade slit on the Y coordinate direction; A, b, c, d are constant, and expression respectively: when said first, second blade all is in the initial zeros position four blade slit the bore value on the X coordinate direction, when said first, second blade all is in the initial zeros position bore central point of four blade slit on the X coordinate direction side-play amount, when said the 3rd, the bore value of four blade slit on the Y coordinate direction when four blade sheet all is in the initial zeros position, when side-play amount said the 3rd, the bore central point of four blade slit on the Y coordinate direction when four blade sheet all is in the initial zeros position.
8. the four blade slit control method based on EPICS according to claim 7 is characterized in that the constant a in the said relational model, b, c, d calculate through peripheral optics instrumental calibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210111385XA CN102621910A (en) | 2012-04-16 | 2012-04-16 | Four-blade slit control system based on experimental physics and industrial control system (EPICS) and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210111385XA CN102621910A (en) | 2012-04-16 | 2012-04-16 | Four-blade slit control system based on experimental physics and industrial control system (EPICS) and control method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102621910A true CN102621910A (en) | 2012-08-01 |
Family
ID=46561878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210111385XA Pending CN102621910A (en) | 2012-04-16 | 2012-04-16 | Four-blade slit control system based on experimental physics and industrial control system (EPICS) and control method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102621910A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103176417A (en) * | 2013-02-04 | 2013-06-26 | 华中科技大学 | Programmable automation control method and device compatible with EPICS (experimental physics and industrial control system) |
| CN106094583A (en) * | 2016-06-13 | 2016-11-09 | 中国科学院等离子体物理研究所 | A kind of control system cross-platform data transmission realizing method based on EPICS |
| CN106205317A (en) * | 2016-06-29 | 2016-12-07 | 中国科学院上海应用物理研究所 | Rotary-type without scattering four cutter slit arrangements |
| CN108427750A (en) * | 2018-03-13 | 2018-08-21 | 中国科学院合肥物质科学研究院 | A kind of data filing and browsing method based on EPICS |
| CN110646450A (en) * | 2019-10-18 | 2020-01-03 | 散裂中子源科学中心 | Diaphragm device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2251136Y (en) * | 1994-05-27 | 1997-04-02 | 地质矿产部宜昌地质矿产研究所 | Mini-beam light source numerically controlled transmissometer |
| US20020145713A1 (en) * | 2001-02-21 | 2002-10-10 | Canon Kabushiki Kaisha | Scanning exposure apparatus, scanning exposure method, and device manufacturing method |
| CN101149566A (en) * | 2005-02-05 | 2008-03-26 | 上海微电子装备有限公司 | Step scan projection stepper synchronous control system |
-
2012
- 2012-04-16 CN CN201210111385XA patent/CN102621910A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2251136Y (en) * | 1994-05-27 | 1997-04-02 | 地质矿产部宜昌地质矿产研究所 | Mini-beam light source numerically controlled transmissometer |
| US20020145713A1 (en) * | 2001-02-21 | 2002-10-10 | Canon Kabushiki Kaisha | Scanning exposure apparatus, scanning exposure method, and device manufacturing method |
| CN101149566A (en) * | 2005-02-05 | 2008-03-26 | 上海微电子装备有限公司 | Step scan projection stepper synchronous control system |
Non-Patent Citations (1)
| Title |
|---|
| 胡勇: "同步辐射光束线中的运动控制系统的研究", 《中国科学院上海应用物理研究所2008年度博士学位论文》, 19 July 2010 (2010-07-19) * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103176417A (en) * | 2013-02-04 | 2013-06-26 | 华中科技大学 | Programmable automation control method and device compatible with EPICS (experimental physics and industrial control system) |
| CN103176417B (en) * | 2013-02-04 | 2016-02-24 | 华中科技大学 | The automation control method able to programme of a kind of compatible EPICS and device |
| CN106094583A (en) * | 2016-06-13 | 2016-11-09 | 中国科学院等离子体物理研究所 | A kind of control system cross-platform data transmission realizing method based on EPICS |
| CN106205317A (en) * | 2016-06-29 | 2016-12-07 | 中国科学院上海应用物理研究所 | Rotary-type without scattering four cutter slit arrangements |
| CN106205317B (en) * | 2016-06-29 | 2018-10-23 | 中国科学院上海应用物理研究所 | It is rotary-type without scattering four knife slit arrangements |
| CN108427750A (en) * | 2018-03-13 | 2018-08-21 | 中国科学院合肥物质科学研究院 | A kind of data filing and browsing method based on EPICS |
| CN110646450A (en) * | 2019-10-18 | 2020-01-03 | 散裂中子源科学中心 | Diaphragm device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102621910A (en) | Four-blade slit control system based on experimental physics and industrial control system (EPICS) and control method thereof | |
| CN103676787B (en) | A kind of center of circle model space circular interpolation method for kinetic control system | |
| CN105159227A (en) | Biaxial motion platform positioning and dynamic locus tracking control device and method | |
| CN108527359B (en) | Control system, setting device, setting method, and storage device | |
| CN102183355A (en) | Nonlinearly controlled high-precision wave generation system and method | |
| CN101789734B (en) | Arc line driving control system of large astronomical telescope | |
| CN106292290B (en) | A kind of calm rolling optimization control method of wheeled mobile robot point | |
| CN103308337A (en) | Machine tool loading device and machine tool loading test method based on planar two-linear force mechanism | |
| CN104483897A (en) | Direct-drive gantry type motion platform contour control device and method | |
| JP2012226749A (en) | Method for avoiding unwanted collision between workpiece and tool in machine tool | |
| CN105929791B (en) | The direct contour outline control method of plane rectangular coordinates kinematic system | |
| CN105892412A (en) | Multi-axis motion control hardware configuration based on custom bus | |
| Zhang et al. | Research on stepper motor motion control based on MCU | |
| CN108139731B (en) | Stepping motor control circuit and method for controlling stepping motor | |
| CN102222143A (en) | Spatial spiral line numerical control interpolation system and method of parallel machine tool for machining marine propeller | |
| CN101806580A (en) | Motion control system and method for high-precision image measuring apparatus | |
| CN103268381B (en) | A kind of method for double-workpiece-platform semi-physical simulation based on virtual reality technology | |
| CN104267598A (en) | Method for designing fuzzy PI controller of Delta robot movement mechanism | |
| EP3304228B1 (en) | Robot system for synchronizing the movement of the robot arm | |
| CN202694193U (en) | High-precision one-dimensional automatic calibration device | |
| CN104635757A (en) | Confocal microscopy pinhole positioning control method | |
| CN103592892A (en) | Method and system for controlling multi-axis motion | |
| CN206020986U (en) | Based on modulus mixing FPAG and the kinetic control system of visual sensing technology | |
| CN203883727U (en) | Integrated mini-sized stepping motor control system | |
| CN204759207U (en) | High accurate positioning control ware of gas suspension system with higher speed |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120801 |