CN101806580A - Motion control system and method for high-precision image measuring apparatus - Google Patents

Motion control system and method for high-precision image measuring apparatus Download PDF

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Publication number
CN101806580A
CN101806580A CN 201010129710 CN201010129710A CN101806580A CN 101806580 A CN101806580 A CN 101806580A CN 201010129710 CN201010129710 CN 201010129710 CN 201010129710 A CN201010129710 A CN 201010129710A CN 101806580 A CN101806580 A CN 101806580A
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load
carry out
control
zero
motion
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周虎
杨建国
杨晓义
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Donghua University
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Donghua University
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Abstract

The invention relates to a motion control system and a motion control method for a high-precision image measuring apparatus. The motion control system comprises a GALIL control card (2), a driver (3), a servo motor (4) and loads (5) which are connected in sequence and are connected with a grating ruler (6) arranged on a working platform to form a closed loop control system, wherein the GALIL control card (2) is also connected with an industrial control computer (1); the industrial control computer (1) comprises a monitoring module, a displacement control module, a zeroing module and an error compensation module, wherein the monitoring module is used for monitoring the states of the loads before running and when running on X/Y/Z axes on the image measuring apparatus; the displacement control module sends a command to the GALIL control card, and a stepping motor is controlled by the control card to rotate, thereby the loads are driven to move; the zeroing module is used for zeroing when each axis on the image measuring apparatus is not zeroed; and the error compensation module is used for reducing positioning errors between the actual position and the specified position. The invention can enable the high-precision motion of the loads to be positioned and meanwhile can monitor the motion states of the loads.

Description

A kind of kinetic control system and method that is used for high-precision image measuring apparatus
Technical field
The invention belongs to the radiographic measurement technical field, particularly relate to a kind of kinetic control system and method that is used for high-precision image measuring apparatus.
Background technology
The radiographic measurement technology is to be an emerging measuring technology on research basis with the computer vision.What its was represented is that digitized video science and technology is dissolved in metering field, carries out the advanced measuring technique of space geometry computing.Image measurer is based upon on the basis of the hardware of the accurate numerical control of micron order and hommization function software, and various function perfections are integrated, finally realizes high precision, multi-functional, intelligent.Modern measurement.The grown up contemporary optics noncontact measurement of artificial intelligence type of image measurer, the kinematic accuracy and the motion handling of digitized instrument excellence have been passed on, merge the feature of dirigibility, intellectuality and the robotization of machine vision software, belonged to the optical dimensions checkout equipment of current forefront.
Kinetic control system is the important component part in the image measuring system.In the practical application of image measurer, the bearing accuracy of motion control directly influences the quality of picture splicing.Therefore, a kind of kinetic control system efficiently that is used for image measurer of invention is most important.
Summary of the invention
Technical matters to be solved by this invention provides a kind of kinetic control system and method that is used on the image measurer, and the movement locus of its controllable load is monitored the various motion states of load simultaneously.
The technical solution adopted for the present invention to solve the technical problems is: a kind of kinetic control system that is used for high-precision image measuring apparatus is provided, comprise the GALIL control card, driver, servomotor and the load that link to each other successively, described GALIL control card, driver, servomotor and load that links to each other successively and the grating chi that is installed on the workbench connect to form closed-loop control system, described GALIL control card also links to each other with industrial computer, and described industrial computer comprises:
Monitoring module: the preceding and operating state of load running that is used to monitor the X/Y/Z axle on the image measurer;
Displacement control module: be used for input motion steering order on man-machine interface, and this instruction is sent to the GALIL control card, come the control step motor to rotate, thereby drive load movement by this control card;
Return zero module: be used for before load running, the axle of each on monitoring image measurer returns zero when not returning zero;
Error compensation module: be used to reduce the positioning error between physical location and the assigned address.
Also include the Position Tracking module in the described displacement control module: the read head of described grating chi is fixed in the load and load is moved together, and when load movement, the grating chi feeds back to industrial computer with the position of load movement in real time with the form of umber of pulse.
Before the described load running and operating state comprises: before the operation of load this system be provided with soft spacing, whether closed-loop control of servo-drive system, whether X, Y and Z axle return zero; In load running, the running status of the load on the monitoring X/Y/Z axle.
A kind of described a kind of method that is used for the kinetic control system of high-precision image measuring apparatus of claim 1 of using comprises the following steps:
(1) before the motion, be provided with soft spacing; Check the whether closed-loop control of this system,, then instruct setting again if servo-drive system there is not closed loop; Whether each of inspection load returns zero; If do not return zero, then starting load returns zero; X, Y and the interlock of Z axle are recentered;
(2) industrial computer sends instructions to the GALIL control card, and the motion of control load, this instruction comprise the position of given load motion, the speed and the directional information of load movement;
(3) judge to the appointed positions excess of stroke whether, if this appointed positions excess of stroke, then revision directive again according to the soft spacing position on X, Y and the Z axle; If this appointed positions does not have the excess of stroke, then carry out this instruction and make load move to appointed positions according to above-mentioned speed, acceleration, retarded velocity and directional information;
(4) carry out error compensation, when load movement exceeded the error allowed band of assigned address, system was with the automatic linear interpolation; When the error allowed band of load movement, then judge whether to carry out next instruction at assigned address; Carry out next instruction if desired, return and judge the whether excess of stroke of position that load specified in this instruction need reach; If do not need to carry out next bar instruction, process ends.
The load of described step (1) is returned zero and is comprised:
(1) polarity of configuration initial point Returning switch input point is provided with speed, acceleration, retarded velocity;
(2) industrial computer instructs by transmission search origin switch edge and comes the control load motion positions to the GALIL control card;
(3) judge whether to search the origin switch edge according to detected origin switch variable condition; If undetected origin switch variable condition, this system is with the wait information that puts in place; Search the mark pulse instruction if detected origin switch variable condition, this system will continue to carry out, judge whether to arrive the nearest pulse signal position of origin switch according to detected mark pulse signal;
(4) if this position of this no show, then this system is with the wait information step that puts in place; If this axle has arrived this position, what this position then is set is zero-bit and judge whether to carry out another returns zero; If it is zero to continue to carry out returning of another, this program will jump to step (1); If that does not carry out another returns zero, this program will finish.
7. a kind of described a kind of method that is used for the kinetic control system of high-precision image measuring apparatus of claim 1 of using according to claim 4, it is characterized in that: described step (4) error compensation comprises:
(1) the configuration codes device is provided with speed, and acceleration, retarded velocity are set;
(2) judge positioning error whether in the error allowed band, if positioning error is in the error allowed band, then system carries out the single shaft linear interpolation automatically; If positioning error in the error allowed band, then judges whether to carry out another error compensation;
(3) if need to carry out another error compensation, then will reconfigure scrambler, promptly return step (1); If do not need to carry out another error compensation, then round-off error compensation.
Beneficial effect
The present invention sends the instruction control load by industrial computer and rapidly moves to appointed positions, by error compensation, makes the motion positions of load more accurate then, in addition, guarantees the reliability and the continuity of load movement by the motion state of real-time monitoring load.
Description of drawings
Fig. 1 is the hardware structure diagram that the present invention is used for the kinetic control system on the image measurer.
Fig. 2 is the functional block diagram that the present invention is used for the industrial computer of the kinetic control system on the image measurer.
Fig. 3 is the process flow diagram that the present invention is used for the example of the kinetic control system on the image measurer.
Fig. 4 returns zero process flow diagram to X, Y and Z axle respectively among Fig. 3.
Fig. 5 is the process flow diagram that respectively X, Y and Z axle is carried out error compensation among Fig. 3.
Embodiment
Below in conjunction with specific embodiment, further set forth the present invention.Should be understood that these embodiment only to be used to the present invention is described and be not used in and limit the scope of the invention.Should be understood that in addition those skilled in the art can make various changes or modifications the present invention after the content of having read the present invention's instruction, these equivalent form of values fall within the application's appended claims institute restricted portion equally.
As shown in Figure 1, be the hardware structure diagram that the present invention is used for the kinetic control system on the image measurer.It comprises industrial computer 1, GALIL control card 2, driver 3, servomotor 4, load 5 and grating chi 6.Wherein, industrial computer 1 is with speed, and parameter instructions such as acceleration, retarded velocity download to GALIL control card 2, and the GALIL control card is by the rotation of driver 3 control servomotors 4, thus the motion of drive load 5.Grating chi 6 plays the effect of position feedback, and the read head of this grating chi 6 is fixed in the load 5 and load 5 is moved together, and when load 5 motion, grating chi 6 feeds back to industrial computer 1 with the position of load 5 motions in real time with the form of umber of pulse.Industrial computer can also be monitored the motion state of load 5.
As shown in Figure 2, be the functional block diagram of the industrial computer of the kinetic control system on the image measurer.This industrial computer 1 comprises a plurality of functional modules: a monitoring module 11, a position control module 12, zero sending module 13 and an error compensation module 14.
Monitoring module, the running status that is used to monitor the X/Y/Z axle on the image measurer is to guarantee the stability of load movement.It comprises checks the whether closed-loop control of this system before the motion, and whether servo-drive system closed loop, and whether each that check load returns zero, monitors the motion state of load during motion.
The displacement control module is used for input motion steering order on man-machine interface, and this instruction is sent to GALIL control card 2, comes control step motor 4 to rotate by this control card 2, thereby drives load 5 motions.
The Position Tracking module is used for according to the current umber of pulse of grating chi 6 feedbacks, calculating the current location of load 5 by certain algorithm when load 5 motions.
As shown in Figure 3, be the process flow diagram of the example of the kinetic control system on the image measurer of the present invention.This method mainly comprises step:
Before the motion, soft spacing (step S301) is set; Check the whether closed-loop control (step S302) of this system,, then do instruction again (step S303) is set if servo-drive system there is not closed loop; Whether each of inspection load returns zero (step S304); If do not return zero with, the returning of starting load zero (step S3025) then, X, Y and Z axle recenter (the step S306) that link at last.Industrial computer 1 sends instructions to GALIL control card 2, thus the motion of control load (step S307), and this instruction comprises the position of given load motion, the speed and the directional information of load movement.Judge to the appointed positions excess of stroke (step S308) whether according to the soft spacing position on X, Y and the Z axle; If this appointed positions excess of stroke, then revision directive again (step S309); If this appointed positions does not have the excess of stroke, then carry out this instruction and make load move to appointed positions (step S310) according to above-mentioned speed, acceleration, retarded velocity and directional information; Then, carry out error compensation (step S311).If finish error compensation, then judge whether to carry out next instruction (step S312); Carry out next instruction if desired, return and judge the whether excess of stroke (step S308) of position that load specified in this instruction need reach; If do not need to carry out next bar instruction, process ends.
As shown in Figure 4, be that X, the Y of step S305 among Fig. 3 and Z coordinate axis are returned zero process flow diagram.This time zero is that the X in this kinetic control system, Y and Z coordinate axis are returned zero in order.At first, the polarity (step S401) of configuration initial point Returning switch input point is provided with speed, acceleration, retarded velocity (step S402).Industrial computer 1 comes control load 5 motion positions for GALIL control card 2 by sending search origin switch edge instruction (step S403).Judge whether to search origin switch edge (step S404) according to detected origin switch variable condition; If undetected origin switch variable condition, this system is with the wait information (step S405) that puts in place; Search mark pulse instruction (step S406) if detected origin switch variable condition, this system will continue to carry out, judge whether to arrive the nearest pulse signal position of origin switch according to detected mark pulse signal (step S407); If this position of this no show, then this system is with the wait information step (S408) that puts in place; If this axle has arrived this position, it is zero-bit (step S409) and return zero (the step S410) that judges whether to carry out another that this position then is set; If it is zero to continue to carry out returning of another, this program will jump to step S401; If that does not carry out another returns zero, this program will finish.
As shown in Figure 5, be X, the Y of step S311 among Fig. 3 and the process flow diagram that the Z coordinate axis is carried out error compensation.At first, configuration codes device (step S501), speed (step S502) is set, acceleration, retarded velocity (step S503) are set, judge that then positioning error is whether in the error allowed band (step S504), if positioning error is not in the error allowed band, then system carries out single shaft linear interpolation step S505 automatically); If positioning error in the error allowed band, then judges whether to carry out another error compensation.If need to carry out another error compensation, then will reconfigure scrambler (step S501); If do not need to carry out another error compensation, then round-off error compensation.

Claims (6)

1. kinetic control system that is used for high-precision image measuring apparatus, comprise the GALIL control card (2), driver (3), servomotor (4) and the load (5) that link to each other successively, it is characterized in that: described GALIL control card (2), driver (3), servomotor (4) and the load (5) that links to each other successively connects to form closed-loop control system with the grating chi (6) that is installed on the workbench, described GALIL control card (2) also links to each other with industrial computer (1), and described industrial computer (1) comprising:
Monitoring module: the preceding and operating state of load running that is used to monitor the X/Y/Z axle on the image measurer;
Displacement control module: be used for input motion steering order on man-machine interface, and this instruction is sent to the GALIL control card, come the control step motor to rotate, thereby drive load movement by this control card;
Return zero module: be used for before load running, the axle of each on monitoring image measurer returns zero when not returning zero; Error compensation module: be used to reduce the positioning error between physical location and the assigned address.
2. a kind of kinetic control system that is used for high-precision image measuring apparatus according to claim 1, it is characterized in that: also include the Position Tracking module in the described displacement control module: the read head of described grating chi (6) is fixed in the load (5), and load (5) is moved together, when load (5) was moved, grating chi (6) fed back to industrial computer (1) with the position of load (5) motion in real time with the form of umber of pulse.
3. a kind of kinetic control system that is used for high-precision image measuring apparatus according to claim 1, it is characterized in that: comprise with operating state before the described load running: this system is provided with soft spacing before the operation of load, whether closed-loop control of servo-drive system, whether X, Y and Z axle return zero; In load running, the running status of the load on the monitoring X/Y/Z axle.
4. one kind is used the described a kind of method that is used for the kinetic control system of high-precision image measuring apparatus of claim 1, comprises the following steps:
(1) before the motion, be provided with soft spacing; Check the whether closed-loop control of this system,, then instruct setting again if servo-drive system there is not closed loop; Whether each of inspection load returns zero; If do not return zero, then starting load returns zero; X, Y and the interlock of Z axle are recentered;
(2) industrial computer sends instructions to the GALIL control card, and the motion of control load, this instruction comprise the position of given load motion, the speed and the directional information of load movement;
(3) judge to the appointed positions excess of stroke whether, if this appointed positions excess of stroke, then revision directive again according to the soft spacing position on X, Y and the Z axle; If this appointed positions does not have the excess of stroke, then carry out this instruction and make load move to appointed positions according to above-mentioned speed, acceleration, retarded velocity and directional information;
(4) carry out error compensation, when load movement exceeded the error allowed band of assigned address, system was with the automatic linear interpolation; When the error allowed band of load movement, then judge whether to carry out next instruction at assigned address;
Carry out next instruction if desired, return and judge the whether excess of stroke of position that load specified in this instruction need reach; If do not need to carry out next bar instruction, process ends.
5. a kind of described a kind of method that is used for the kinetic control system of high-precision image measuring apparatus of claim 1 of using according to claim 4 is characterized in that: the load of described step (1) is returned zero and is comprised:
(1) polarity of configuration initial point Returning switch input point is provided with speed, acceleration, retarded velocity;
(2) industrial computer instructs by transmission search origin switch edge and comes the control load motion positions to the GALIL control card;
(3) judge whether to search the origin switch edge according to detected origin switch variable condition; If undetected origin switch variable condition, this system is with the wait information that puts in place; Search the mark pulse instruction if detected origin switch variable condition, this system will continue to carry out, judge whether to arrive the nearest pulse signal position of origin switch according to detected mark pulse signal;
(4) if this position of this no show, then this system is with the wait information step that puts in place; If this axle has arrived this position, what this position then is set is zero-bit and judge whether to carry out another returns zero; If it is zero to continue to carry out returning of another, this program will jump to step (1); If that does not carry out another returns zero, this program will finish.
6. a kind of described a kind of method that is used for the kinetic control system of high-precision image measuring apparatus of claim 1 of using according to claim 4, it is characterized in that: described step (4) error compensation comprises:
(1) the configuration codes device is provided with speed, and acceleration, retarded velocity are set;
(2) judge positioning error whether in the error allowed band, if positioning error is in the error allowed band, then system carries out the single shaft linear interpolation automatically; If positioning error in the error allowed band, then judges whether to carry out another error compensation;
(3) if need to carry out another error compensation, then will reconfigure scrambler, promptly return step (1); If do not need to carry out another error compensation, then round-off error compensation.
CN 201010129710 2010-03-19 2010-03-19 Motion control system and method for high-precision image measuring apparatus Pending CN101806580A (en)

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CN102778895A (en) * 2012-07-02 2012-11-14 中国工程物理研究院总体工程研究所 System and method for accurate positioning control under overweight environment
CN103185548A (en) * 2011-12-31 2013-07-03 睿励科学仪器(上海)有限公司 Auxiliary device and method for measuring platform performance parameters of semiconductor machine
CN103795309A (en) * 2014-02-17 2014-05-14 武汉迅能光电科技有限公司 Disc type miniature servo motor system
CN108803493A (en) * 2018-07-23 2018-11-13 上海恒润申启多媒体有限公司 The memoryless multi-shaft interlocked rail system of bus-type and its change-giving device and odd change method
CN109676633A (en) * 2019-02-22 2019-04-26 哈尔滨工程大学 Three shaft mechanical arm position control system and methods

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Publication number Priority date Publication date Assignee Title
CN102354220A (en) * 2011-07-18 2012-02-15 李劲松 Multi-axis motion control system for image measurement
CN103185548A (en) * 2011-12-31 2013-07-03 睿励科学仪器(上海)有限公司 Auxiliary device and method for measuring platform performance parameters of semiconductor machine
CN103185548B (en) * 2011-12-31 2016-03-09 睿励科学仪器(上海)有限公司 Measure servicing unit and the method for the platform property parameter of semiconductor board
CN102778895A (en) * 2012-07-02 2012-11-14 中国工程物理研究院总体工程研究所 System and method for accurate positioning control under overweight environment
CN102778895B (en) * 2012-07-02 2014-07-02 中国工程物理研究院总体工程研究所 Method for accurate positioning control system under overweight environment
CN103795309A (en) * 2014-02-17 2014-05-14 武汉迅能光电科技有限公司 Disc type miniature servo motor system
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CN109676633A (en) * 2019-02-22 2019-04-26 哈尔滨工程大学 Three shaft mechanical arm position control system and methods
CN109676633B (en) * 2019-02-22 2022-05-20 哈尔滨工程大学 Fixed-point control system and method for three-axis mechanical arm

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