CN102610984A

CN102610984A - Dehumidifying and drying device of high-power all-solid-state laser

Info

Publication number: CN102610984A
Application number: CN2012100749016A
Authority: CN
Inventors: 农光壹; 赵鹏飞; 林培晨; 林学春; 侯玮
Original assignee: JIANGSU ZKSX LASER TECHNOLOGY Co Ltd
Current assignee: JIANGSU ZKSX LASER TECHNOLOGY Co Ltd
Priority date: 2012-03-20
Filing date: 2012-03-20
Publication date: 2012-07-25

Abstract

The invention relates to a dehumidifying and drying device of a high-power all-solid-state laser. The dehumidifying and drying device comprises a first sealed chamber (6) and a second sealed chamber (1); the first sealed chamber (6) comprises a sealed box I (7), a sealed box II (8), a sealed box III (9) and a sealed box IV (10) which are used for containing laser modules and partial optical components and parts; the sealed boxes are in series connection with one another through a pipeline and are in sealed soft connection with a N2 guide pipe; the second sealed chamber (1) comprises the first sealed chamber (6), optical lenses and a lens frame (16); and constant-temperature dehumidification hosts (14) are mounted at the two side faces of the second sealed chamber (1). The dehumidifying and drying device is characterized in that temperature and humidity detection sensors (12) are arranged in both the first sealed chamber (6) and the second sealed chamber (1), and the opening and closing of N2 are automatically controlled by a control system of the laser. According to the dehumidifying and drying device of the high-power all-solid-state laser, due to the dual-layer airtight seal protection formed by the first sealed chamber and the second sealed chamber, the sealing of an IP67 level, the drying scheme that the constant-temperature dehumidification hosts are combined with the N2, and the design that the opening and the closing of the N2 are automatically controlled, the effect of rapid dehumidification and long-term drying is realized, and meanwhile the consumption of the N2 is saved and the application cost is lowered.

Description

A kind of dehumidification drying device of high power all solid state laser

Technical field

The present invention relates to a kind of dehumidification drying device of high power all solid state laser, belong to the superpower laser applied technical field.

Technical background

In recent years because the developing rapidly of semiconductor laser; Make the shared market share of all solid state laser process equipment of semiconductor laser pumping increasing, it is predicted, the global demand amount is with annual speed increment more than 20%; The all solid state laser volume is little, efficient is high, the life-span is long, good beam quality, can realize flexible processing; It is with the obvious advantage, has become the mainstream development direction of field of laser processing, and its typical case's representative has: fiber laser, video disc laser and bar-shaped laser.

Moisture, dust etc. can have a strong impact on the stability and the reliability of laser to the pollution of laser optical components and parts; Therefore all solid state laser is to the requirement for height of the low humidity of using environment, low dust, low greasy dirt etc.; Seriously restricted its application at industrial circle; For guaranteeing stable, the operation safely of laser, the removal moisture drying method that present laser generally adopts is: 1, laser application does not become the industrial plant application product in the ultra-clean chamber laboratory; 2, build the clean room that satisfies the laser service requirement in the application workshop; 3, the laser casing is carried out seal, in laser, deposit drier then, change drier in good time; 4, charge into N toward laser resonant cavity ₂

The major defect of existing laser removal moisture drying and dust quarantine measures is: the experiment product in the Superclean Lab can't be walked out the laboratory, uses in industrial environment; 1, sets up the clean room in industrial plant, strengthened the not convenient property of application cost and laser operation; 2, in laser, deposit drier and cure the symptoms, not the disease, ceaselessly change drier and also make troubles and the cost increase; Simultaneously, also do not reach dry requirement up to 80% applied environment in humidity throughout the year; Though 3 fill N ₂Method on certain degree, guaranteed effect on moisture extraction, but since the laser rack can't accomplish strict airtight, so cause N ₂Consumption is very big, and cost increases.

Summary of the invention

To above deficiency, the object of the present invention is to provide a kind of dehumidification drying device of high power all solid state laser, comprise first closed chamber and second closed chamber, form double-deck hermetic seal protection, accomplish the isolation of laser light path, optical element and external environment condition; Fill N ₂Dehumidifying fast, N ₂Get into first closed chamber through air admission hole, discharge, form one-way gas flow, reach faster and better effect on moisture extraction to second closed chamber.

Technical scheme of the present invention realizes in the following manner: a kind of dehumidification drying device of high power all solid state laser; Comprise first closed chamber and second closed chamber; First closed chamber comprises seal box I, II, III, the IV that places laser module and part optical component, passes through pipeline series connection N between each seal box ₂The wireway sealing is flexible coupling, and second closed chamber comprises first closed chamber, optical mirror slip and mirror holder, and the constant temperature dehumidification main frame is installed in two sides, and wherein an air admission hole, N are opened in a side ₂Air inlet divides two-way; One the tunnel links to each other with the air admission hole of first closed chamber; Inflate to seal box I through electromagnetic valve I control; Directly inflate to second closed chamber through electromagnetic valve II on another road, it is characterized in that: be equipped with the humiture detecting sensor in described first closed chamber and second closed chamber, control N automatically by the control system of laser ₂Opening and closing.

Have air admission hole among described first seal box I, last seal box IV offers venthole, and automatic decompression valve is installed before the venthole.

Described second closed chamber is corresponding with its air admission hole open one have an automatic decompression valve venthole, form the one-way gas flow direction.

The present invention, first, second closed chamber forms double-deck hermetic seal protection, accomplishes the isolation of laser light path, optical element and external environment condition; Strict hermetic seal design, the sealing of IP67 grade makes laser inside and external isolation, need not to set up ultra-clean workshop or dustless, low wet environment, has improved the adaptability of laser to industrial environment, guaranteed laser stable, reliably, operation safely; Without the dehumidifying measure that needs such as drier are changed, more practice thrift cost; The constant temperature dehumidification main frame combines N ₂Drying proposal and automatic control N ₂The design of On/Off realizes dehumidifying fast, long-term dry effect, practices thrift N simultaneously ₂Consumption reduces application cost; At the laser run duration, laser interior humidity (about 10 minutes) fast reaches in the D%, but D% is a set point, and the best can reach in 10%, and the laser internal temperature can keep 20 ± 2 ℃ state.

Description of drawings

Fig. 1 is a structural representation of the present invention.

Embodiment

As shown in Figure 1, a kind of dehumidification drying device of superpower laser comprises first closed chamber 6 and second closed chamber 1.First closed chamber 6 comprises seal box I7, II8, III9, the 10IV that places laser module and part optical component; Second closed chamber 1 comprises first closed chamber 6, optical mirror slip and mirror holder 16, constant temperature dehumidification main frame 14.An air admission hole 2, N are opened in second closed chamber, 1 side ₂Get into second closed chamber 1 through air pressure adjustment and pressure detector 3, be divided into two-way, the one tunnel through direct entering second closed chamber of electromagnetic valve II 5 control; Another road gets into seal box I7 through electromagnetic valve I 4, control; Come out to get into seal box II8 from the other end of seal box 7, be connected serially to seal box III9 successively, seal box IV10 open one have an automatic decompression valve 11 venthole; To 1 exhaust of second closed chamber; Second closed chamber 1 and its air admission hole 2 be corresponding to be opened one and has the venthole of automatic decompression valve 11, thereby forms one-way gas flow direction, arrow points as shown in fig. 1.

Constant temperature dehumidification main frame 14 is installed in the second closed chamber both sides, and the water-cooling system of constant temperature dehumidification host computer using laser self is according to the principle of dehumidification by condensation; Absorb air from second closed chamber 1; Behind the dehumidification by condensation,, reach the effect of long-term constant temperature dehumidification to the gas of second closed chamber, 1 discharge freeze-day with constant temperature.

Temperature Humidity Sensor 12 is installed in last seal box IV10 respectively and in second closed chamber 1, monitors humiture in real time, N ₂Control system form by electromagnetic valve I 4, II5 and control program, together be integrated in the control system of laser with the constant temperature dehumidification engine control system, when temperature is at 20 ℃ in second closed chamber 1; If humidity H is during greater than C%; System reports to the police automatically, and forbids operations such as laser bright dipping, when humidity during less than A% but greater than B%; The automatic opens solenoid valve of control system is injected N toward closed chamber ₂, when humidity drops to B% when following by A%, closed electromagnetic valve N ₂, when humidity is between A% and B%, a kind of state (open or close) before electromagnetically operated valve keeps, C%＞A%＞B% wherein, the requirement of humidity being confirmed of A, B, C value according to the temperature humidity condensation table of comparisons and laser self.The inventive method A, B, the accessible optimum state value of C are respectively 10,15,20.The seal request of each junction of laser reaches the sealing grade of IP67.

Because above airtight measure and control measure make laser inside and external environment condition that an effect of isolating relatively arranged, only need N ₂Bottle and power supply, laser can dehumidify fast, and keeps machine inner drying degree for a long time.Like this, laser itself has just formed self clean environment, is not required to be the ad hoc machine room of laser, has practiced thrift application cost, also strengthened laser to the adaptability of workshop condition with use flexibility, improve the commercial Application degree of all solid state laser greatly.

Claims

1. the dehumidification drying device of a high power all solid state laser; Comprise first closed chamber (6) and second closed chamber (1); First closed chamber (6) comprises seal box I (7), II (8), III (9), the IV (10) that places laser module and part optical component, passes through pipeline series connection N between each seal box ₂The wireway sealing is flexible coupling, and second closed chamber (1) comprises first closed chamber (6), optical mirror slip and mirror holder (16), and constant temperature dehumidification main frame (14) is installed in two sides, and wherein an air admission hole (2), N are opened in a side ₂Air inlet divides two-way; One the tunnel links to each other with the air admission hole (2) of first closed chamber (6); Inflate to seal box I (7) through electromagnetic valve I (4) control; Directly inflate to second closed chamber (1) through electromagnetic valve II (5) on another road, it is characterized in that: be equipped with humiture detecting sensor (12) in described first closed chamber (6) and second closed chamber (1), control N automatically by the control system of laser ₂Opening and closing.

2. the dehumidification drying device of a kind of high power all solid state laser according to claim 1 has air admission hole among described first seal box I (7), and last seal box IV (10) offers venthole, and automatic decompression valve (11) is installed before the venthole.

3. the dehumidification drying device of a high power all solid state laser, described second closed chamber (1) is corresponding with its air admission hole (2) open one have automatic decompression valve (11) venthole, form the one-way gas flow direction.