CN102607815A - Method and device for measuring lateral magnification of optical system based on jointing of point target images - Google Patents
Method and device for measuring lateral magnification of optical system based on jointing of point target images Download PDFInfo
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Abstract
The invention relates to a method and a device for measuring the lateral magnification of an optical system based on joining of point target images, belonging to the field of metering equipment taking an optical method as a characteristic. The method is characterized in that a point target is in different fields of view and is imaged for twice, and a linear image is constructed according to two point target images; and in a frequency domain, by a principle that a frequency at which a modulation transfer function value obtained by actual measurement reaches a minimum value for the first time is equal to a theoretical cutoff frequency, the lateral magnification of the optical system is calculated. According to the device, a sliding block for bearing the point target is arranged on a first guide rail and a second guide rail, and the motion of the sliding block on the first guide rail is matched with the motion of the sliding block on the second guide rail, so that in any field of view, the point target can be accurately focused to be imaged onto the surface of an image sensor. According to the method and the device for measuring the lateral magnification of the optical system, the errors between single-time measurement results can be reduced, and further, the repeatability of measurement results can be improved.
Description
Technical field
Belonging to the employing optical means based on point target as the optical system lateral magnification measuring method of amalgamation and device is the metering outfit field of characteristic; Relating in particular to a kind of is target with the static point light source, utilizes two frame static point target images to measure the method and apparatus of optical system lateral magnification at frequency domain.
Background technology
The optical system lateral magnification is a very important parameter in medical science and the precision measurement field, and it not only indicates the technical indicator of optical system, can utilize this technical indicator to carry out other Parameter Precise Measuring equally.Yet, how to obtain the lateral magnification of an optical system, be the matter of utmost importance of carrying out this work.
One, optical system lateral magnification measuring method problem
1987 07 month; " medical physics " publish an article " magnification of object lens in the opinion microscope "; Found the contradiction that produces in lateral magnification experimental formula and the actual measurement process of object lens in the microscope; Though this article does not provide the measuring method of object lens lateral magnification, this contradiction has but been drawn the problems of measurement of optical system lateral magnification.
And some follow-up articles all show the necessity that the optical system lateral magnification is measured.
1999 03 month; " Huangshan Higher Training School's journal " the 1st the 2nd phase of volume publish an article " about the discussion of lateral magnification in the geometrical optics "; This article has been discussed the mathematic(al) representation of optical system lateral magnification; The applicable elements of this method is the perfect optical system imaging under the paraxial condition, and when these conditions do not satisfy, but not explanation of the error between formula that this paper summed up and the actual optical system lateral magnification; More lack for this error, how to measure the explanation of optical system lateral magnification method.
2000 05 month; " South China Normal University's journal (natural science edition) " the 2nd phase publish an article " about the analysis and the utilization of desirable optical system lateral magnification curve "; This paper sums up the computing formula of desirable optical system lateral magnification according to the definition of optical system lateral magnification; And draw out lateral magnification-object distance image distance curve, the condition that this method is suitable for remains the perfect optical system paraxial rays, and under the non-ideal condition; Error between lateral magnification of pointing out in the experimental formula and the actual lateral magnification is not explanation but, and the necessity of measuring optical system lateral magnification method more has been described.
2002 06 month; " Jiangxi Teaching College's journal (natural science) " the 23rd the 3rd phase of volume publish an article " the object image distance formula and the lateral magnification formula of deriving lens under the paraxial condition with position phase inversion function "; This article is the basis with the Fourier optics; Utilize the phase tranformation effect of lens to derive image range formula and the optical system lateral magnification formula under the paraxial condition; Yet the applicable elements of this piece article remains the perfect optical system imaging under the paraxial approximation condition, has together two pieces of problems that article is identical before equally.
Because the active demand that exists the optical system lateral magnification to measure is so in fields such as medical domain and precision measurements, all have the scholar to propose the measuring method of oneself.
2010 09 month; " medical image technology " the 26th volume supplementary issue 1 publish an article " mensuration of the intrinsic magnification of digital X-ray machine " a kind of assay method of magnification is provided; This assay method at first is fixed on small ball on the X line detector, takes the photograph the scale that carries with machine behind the sheet and measures the diameter of little spheric projection; Print photo, readding under the sheet lamp with the divider amount steel ball size of projection on the good photo, and accurately measuring its data, contrast two groups of wrong differences of data with vernier caliper.Measure the actual diameter of corresponding steel ball equally with vernier caliper, can draw two diameter ratios, i.e. X line hachure magnification.Because this article is not to be write by precision measurement field personnel, so the measuring method that article adopted is more ancient, what continue to use is the tape measure object height, and this tape measure has certain subjectivity, bigger to the measurement result influence.
2003 09 month; " Hebei Vocational Technology Normal College's journal " the 17th the 3rd phase of volume publishes an article " compare the plate method and survey magnification of telescope "; This article has been introduced a kind of new method of optical system lateral magnification; This method is compared with existing Lab of General Physics method therefor, and not only principle is simple, data are accurate, and has more operability.Yet this method is appointed the constraint of so not breaking away from classic method, and the method that rule reads target length is still continued to use in the judgement of image height, therefore has the problem of subjectivity equally.
Yet this problem solves along with the developing and being widely applied to the precision measurement field rapidly of CCD, and simultaneously, the measuring accuracy of optical system lateral magnification is also corresponding to be improved.
1998 06 month, " photoelectric project " the 25th the 3rd phase of volume published an article " CCD surveys the telescopic system magnification ", and the method principle that this article is introduced is simple; Directly utilize the image height object height recently to measure the magnification of telescopic system; The method that this article is introduced is compared with classic method, and image height no longer accepted scale is measured, but judges through the product of shared CCD number of pixels of groove and pel spacing; This method has reduced the subjective factor in the measuring process, makes measurement result more accurate.
2002 03 month; " Physical Experiment " the 22nd the 3rd phase of volume publishes an article in " basic point that the lateral magnification method is confirmed complex optics ", and 2006 08 month, " College Physics " the 25th the 8th phase of volume publish an article " basic point that the lateral magnification method is measured optical system "; These two pieces of articles have expanded to a new application with lateral magnification; Confirm the basic point of complex optics with it, and draw important conclusion, basic point is the function of optical system lateral magnification.It is whether accurate directly relevant with the order of accuarcy of optical system lateral magnification that this conclusion explanation basic point is confirmed, therefore, is necessary accurately to measure the optical system lateral magnification.And this paper still continues to use the definition of lateral magnification, and promptly image height and object height ratio are measured, and wherein, the measuring principle of above chapter article is still continued to use in the measurement of image height, according to double slit across number of pixels and the product of pel spacing confirm.
Statement to art methods can sum up to draw a conclusion, and for the problems of measurement of optical system lateral magnification, is nothing but to adopt two kinds of methods:
1) utilize the definition of optical system lateral magnification, promptly the ratio of image height and object height is directly measured;
2), obtain the indirect measurement of realization to the optical system lateral magnification through picture altitude according to optical system lateral magnification and the particular kind of relationship of certain picture altitude in certain optical systems.
No matter be any method, all need judge, and the determination methods of present stage have identical technical characterictic image height:
Utilize image obtain the elevation information of image across the product of the number of pixel and pel spacing.
Though this technical characterictic can be avoided in the classic method with the subjective factor in the process of rule measurement image height; But this method also has the problem of self, because for the judgement of number of pixels, can only be that integer is judged; The judgement of each side exists at most ± error of 0.5 pixel; Two edges just possibly exist ± error of 1 pixel, and size of images is more little, and error will be big more.Though can increase the length of line source in theory; Remedied through sharing error equally with more pixel; But for big distortion optical system, the different optical system of enlargement ratio under the promptly different visual fields, the length that increases line source can be brought new problem equally:
1) increases target size, may make image that serious deformation takes place on length, in this case; Not only can not share error equally; Can make the error in judgement of number of pixels bigger on the contrary, therefore for big distortion optical system, this method is not suitable in big field range, measuring;
2) to big distortion optical system; Ought to be in each small field of view scope; Accurately measure the lateral magnification under this field range; Finally obtain the lateral magnification curve under the different visual fields, but since measuring method that background technology adopted in the small field of view scope between the single measurement result error bigger, therefore big distortion optical system lateral magnification measuring repeatability is low.
Two, optical system lateral magnification measurement mechanism problem
The field tests of international Patent classificating number G01M 11/02 optical property discloses forming of moving image modulation transfer function measurement mechanism by two patents of invention:
Patent No. ZL200810137150.1; At on 09 29th, 2010 Granted publication day; Patent of invention " dynamic target modulation transfer function measurement method and device "; Disclose a kind of moving image modulation transfer function measurement mechanism of high-accuracy multifunctional, also had the structure of light source, optical system and imageing sensor in this device, and be that light source arrives image sensor surface through optical system imaging equally.
Patent No. ZL201010252619.3; At on 01 11st, 2012 Granted publication day; Patent of invention " moving image modulation transfer function measurement mechanism " on the basis of a last disclosed device of patent, further defines the coupling scheme of optical lens in the device and the method for synchronization of measurement.
But the movement locus that these two characteristic feature of an inventions are light sources is perpendicular to the straight line of optical axis; For the optical system that the curvature of field is arranged, in the process of light source motion, will inevitably cause the out of focus of image; If these two the disclosed measurement mechanisms of invention are applied directly among the present invention; Can't overcome problem of image blurring and gradation of image value variation issue that out of focus causes, this problem can cause the locational skew of cutoff frequency, and the accuracy of measurement result is affected.
Summary of the invention
The present invention is exactly to big distortion optical system to above-mentioned existing measuring method; Be not suitable for measuring in the big field range, and in the small field of view scope, have the low problem of lateral magnification measuring repeatability again; And there is the problem of out of focus in existing measurement mechanism; Proposed a kind of measuring method and device of optical system lateral magnification, this method can improve measurement result repeatability in the small field of view scope, be more suitable for measuring big distortion optical system lateral magnification; This device can be eliminated the influence of out of focus to measurement result, further improves measurement result repeatability.
The objective of the invention is to realize like this:
Based on the optical system lateral magnification measuring method of point target as amalgamation, step is following:
A. imageing sensor forms images to the static point target for the first time, obtains the first frame initial static point target image, and extracts point target picture place pixel coordinate position (x
1, y
1);
Point target is moved along image sensor line or column direction, and displacement is d, and keeping point target afterwards is stationary state;
C. keep the imageing sensor time shutter constant, imageing sensor forms images to the static point target for the second time, obtains the second frame initial static point target image, and extracts point target picture place pixel coordinate position (x
2, y
2);
D. remove point target and keep the imageing sensor time shutter constant, imageing sensor forms images to background, obtains interfering picture, and with the maximal value of gray-scale value in the interfering picture as threshold value;
E. a goes on foot the first frame initial static point target image that obtains, and gray-scale value is modified to 0 less than the gray-scale value that d goes on foot the pixel of gained threshold value, obtains the first frame correction static point target image; The second frame initial static point target image that the c step obtains is modified to 0 with gray-scale value less than the gray-scale value that d goes on foot the pixel of gained threshold value, obtains the second frame correction static point target image; The first frame correction static point target image and the second frame correction static point target image is superimposed, and all grey scale pixel value phase adductions that two point target pictures are expert at or are listed as in the new images of stack back obtain new gray-scale value divided by 2; And the pixel coordinate position (x that a step is obtained
1, y
1) and the pixel coordinate position (x that obtains of c step
2, y
2) gray-scale value of line institute covered pixels replaces with new gray-scale value, obtains constructing the point spread function image;
Perhaps:
The second frame initial static point target image that first frame initial static point target image that a step is obtained and c step obtain is superimposed; And gray-scale value is modified to 0 less than the gray-scale value that d goes on foot the pixel of 2 times of gained threshold values in the back image that will superpose, and obtains revising superimposed image; With revising in the superimposed image all grey scale pixel value phase adductions that two point target pictures are expert at or are listed as, obtain new gray-scale value divided by 2; And the pixel coordinate position (x that a step is obtained
1, y
1) and the pixel coordinate position (x that obtains of c step
2, y
2) gray-scale value of line institute covered pixels replaces with new gray-scale value, obtains constructing the point spread function image;
F. e goes on foot the structure point spread function image that obtains, and the full line or the permutation information that the wire hot spot are belonged to row or row extract, and as tectonic line spread function image, this tectonic line spread function image has n element;
G. the tectonic line spread function image that the f step is obtained carries out discrete Fourier transformation and delivery; Obtain the modulation transfer function image; This modulation transfer function image has the identical element number n of tectonic line spread function image that obtains with the f step; Be n discrete spectrum component, be respectively M according to spatial frequency order from small to large
0, M
1, M
2..., M
N-1, at this in proper order down, it is M that modulating transfer function value reaches the pairing modulating transfer function value of minimal value for the first time
i, footnote sequence number is i under it, the pel spacing l of combining image sensor obtains M
iPairing spatial frequency values is: f=i/ (nl);
H. according to modulation transfer function model M TF (f)=| sinc (π fd) |, in conjunction with the frequency values f that g step obtains, obtain wire hot spot length and be: d '=1/f=nl/i;
I. the wire hot spot length d that obtains according to b beans-and bullets shooter displacement of targets amount d and the h step ', obtain the optical system lateral magnification and be: β=d '/d=nl/ (id).
Based on the optical system lateral magnification measurement mechanism of point target as amalgamation, comprise axial first guide rail of point target, optical system, imageing sensor, slide block and vertical light, described point target arrives image sensor surface through optical system imaging; And; This device also comprises second guide rail along optical axis direction; The slide block of bearing point target is installed on first guide rail and second guide rail; Slide block matches with the motion of slide block on second guide rail in the motion on first guide rail, makes point target be imaged onto image sensor surface any all accurate Jiao of field positions.
The invention has the beneficial effects as follows:
1) measuring method of the present invention's employing is different from traditional spatial domain measuring method; This method is target with the pointolite; Point target is under the different visual fields and to its twice imaging; Look like to construct linear image according to two width of cloth point targets, pairing frequency equated with theoretical cutoff frequency when the modulating transfer function value that in frequency domain, utilizes actual measurement to obtain reached minimal value for the first time, calculated the optical system lateral magnification; When this characteristic make to adopt the short and small line source of length, can obtain higher cutoff frequency, thereby share the error of cutoff frequency equally, make that the error between the single measurement result is littler, and then improve measurement result repeatability;
2) measurement mechanism of the present invention's employing comprises second guide rail along optical axis direction; The slide block of bearing point target is installed on first guide rail and second guide rail; Slide block matches with the motion of slide block on second guide rail in the motion on first guide rail, makes point target be imaged onto image sensor surface any all accurate Jiao of field positions; This characteristic makes the modulation transfer function curve that measures more near true curve, and the cutoff frequency position that actual measurement obtains is more accurate, can further reduce the error between the single measurement result, improves measurement result repeatability.
Description of drawings
Fig. 1 is based on the optical system lateral magnification measurement mechanism structural representation of point target as amalgamation
Fig. 2 is based on the optical system lateral magnification measuring method process flow diagram of point target as amalgamation
Fig. 3 is the first frame initial static point target image local figure
Fig. 4 is the second frame initial static point target image local figure
Fig. 5 is structure point spread function image local figure
Fig. 6 is a tectonic line spread function image
Among the figure: 1 point target, 2 optical systems, 3 imageing sensors, 4 slide blocks, 5 first guide rails, 6 second guide rails
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the invention is done and to be described in further detail.
Fig. 1 is based on the optical system lateral magnification measurement mechanism structural representation of point target as amalgamation; This device comprises axial first guide rail 5 of point target 1, optical system 2, imageing sensor 3, slide block 4 and vertical light, and described point target 1 is imaged onto imageing sensor 3 surfaces through optical system 2; And; This device also comprises second guide rail 6 along optical axis direction; The slide block 4 of bearing point target 1 is installed on first guide rail 5 and second guide rail 6; Slide block 4 matches with the motion of slide block 4 on second guide rail 6 in the motion on first guide rail 5, makes point target 1 be imaged onto imageing sensor 3 surfaces any all accurate Jiao of field positions; Wherein, point target 1 is the pin hole of diameter 15 μ m, and the pel spacing of imageing sensor 3 is 5.6 μ m.
Based on the optical system lateral magnification measuring method of point target as amalgamation, process flow diagram is as shown in Figure 2, and this method step is following:
A. 3 pairs of static point targets of imageing sensor 1 imaging for the first time obtains the first frame initial static point target image, and its partial view is as shown in Figure 3, and extracts point target picture place pixel coordinate position (x
1, y
1)=(371,539);
Point target 1 is moved along imageing sensor 3 line directions, and displacement is d=6.104mm, keeps point target 1 to be stationary state afterwards;
C. keep 3 time shutter of imageing sensor constant, 3 pairs of static point targets of imageing sensor 1 imaging for the second time obtains the second frame initial static point target image, and its partial view is as shown in Figure 4, and extracts point target picture place pixel coordinate position (x
2, y
2)=(371,601);
D. remove point target 1 and keep 3 time shutter of imageing sensor constant, the imaging of the 3 pairs of backgrounds of imageing sensor obtains interfering picture, and with the maximal value of gray-scale value in the interfering picture as threshold value, this threshold value is 10;
E. a goes on foot the first frame initial static point target image that obtains, and gray-scale value is modified to 0 less than the gray-scale value that d goes on foot the pixel of gained threshold value, obtains the first frame correction static point target image; The second frame initial static point target image that the c step obtains is modified to 0 with gray-scale value less than the gray-scale value that d goes on foot the pixel of gained threshold value, obtains the second frame correction static point target image; The first frame correction static point target image and the second frame correction static point target image is superimposed, and all grey scale pixel value phase adductions that two point target pictures are expert at or are listed as in the new images of stack back obtain new gray-scale value divided by 2; And the pixel coordinate position (x that a step is obtained
1, y
1)=(371,539) and the pixel coordinate position (x that obtains of c step
2, y
2)=(371,601) gray-scale value of line institute covered pixels replaces with new gray-scale value, obtains constructing the point spread function image, and its partial view is as shown in Figure 5;
Perhaps:
The second frame initial static point target image that first frame initial static point target image that a step is obtained and c step obtain is superimposed; And gray-scale value is modified to 0 less than the gray-scale value that d goes on foot the pixel of 2 times of gained threshold values in the back image that will superpose, and obtains revising superimposed image; With revising in the superimposed image all grey scale pixel value phase adductions that two point target pictures are expert at or are listed as, obtain new gray-scale value divided by 2; And the pixel coordinate position (x that a step is obtained
1, y
1)=(371,539) and the pixel coordinate position (x that obtains of c step
2, y
2)=(371,601) gray-scale value of line institute covered pixels replaces with new gray-scale value, obtains constructing the point spread function image, and its partial view is as shown in Figure 5;
F. e goes on foot the structure point spread function image that obtains, and the full line information of being gone in wire hot spot place extracts, and as shown in Figure 6 as tectonic line spread function image, this tectonic line spread function image has n=1280 element;
G. the tectonic line spread function image that the f step is obtained carries out discrete Fourier transformation and delivery; Obtain the modulation transfer function image; This modulation transfer function image has the identical element number n=1280 of tectonic line spread function image that obtains with the f step; Promptly 1280 discrete spectrum components are respectively M according to spatial frequency order from small to large
0, M
1, M
2..., M
1279, at this in proper order down, it is M that modulating transfer function value reaches the pairing modulating transfer function value of minimal value for the first time
21, footnote sequence number is i=21 under it, the pel spacing l=5.6 μ m of combining image sensor 3 obtains M
21Pairing spatial frequency values is: f=i/ (nl)=21/ (1280 * 5.6 * 10
-3)=2.9297lp/mm;
H. according to modulation transfer function model M TF (f)=| sinc (π fd) |, in conjunction with the frequency values f=2.9297lp/mm that g step obtains, obtain wire hot spot length and be: d '=1/f=nl/i=1280 * 5.6 * 10
-3/ 21=0.3413mm;
I. the wire hot spot length d that obtains according to b beans-and bullets shooter target 1 displacement d=6.104mm and the h step '=0.3413mm, obtain optical system 2 lateral magnifications and be: β=d '/d=nl/ (id)=1280 * 5.6 * 10
-3/ (21 * 6.104)=0.0559.
Claims (2)
1. based on the optical system lateral magnification measuring method of point target, it is characterized in that said method step is following as amalgamation:
A. imageing sensor forms images to the static point target for the first time, obtains the first frame initial static point target image, and extracts point target picture place pixel coordinate position (x
1, y
1);
Point target is moved along image sensor line or column direction, and displacement is d, and keeping point target afterwards is stationary state;
C. keep the imageing sensor time shutter constant, imageing sensor forms images to the static point target for the second time, obtains the second frame initial static point target image, and extracts point target picture place pixel coordinate position (x
2, y
2);
D. remove point target and keep the imageing sensor time shutter constant, imageing sensor forms images to background, obtains interfering picture, and with the maximal value of gray-scale value in the interfering picture as threshold value;
E. a goes on foot the first frame initial static point target image that obtains, and gray-scale value is modified to 0 less than the gray-scale value that d goes on foot the pixel of gained threshold value, obtains the first frame correction static point target image; The second frame initial static point target image that the c step obtains is modified to 0 with gray-scale value less than the gray-scale value that d goes on foot the pixel of gained threshold value, obtains the second frame correction static point target image; The first frame correction static point target image and the second frame correction static point target image is superimposed, and all grey scale pixel value phase adductions that two point target pictures are expert at or are listed as in the new images of stack back obtain new gray-scale value divided by 2; And the pixel coordinate position (x that a step is obtained
1, y
1) and the pixel coordinate position (x that obtains of c step
2, y
2) gray-scale value of line institute covered pixels replaces with new gray-scale value, obtains constructing the point spread function image;
Perhaps:
The second frame initial static point target image that first frame initial static point target image that a step is obtained and c step obtain is superimposed; And gray-scale value is modified to 0 less than the gray-scale value that d goes on foot the pixel of 2 times of gained threshold values in the back image that will superpose, and obtains revising superimposed image; With revising in the superimposed image all grey scale pixel value phase adductions that two point target pictures are expert at or are listed as, obtain new gray-scale value divided by 2; And the pixel coordinate position (x that a step is obtained
1, y
1) and the pixel coordinate position (x that obtains of c step
2, y
2) gray-scale value of line institute covered pixels replaces with new gray-scale value, obtains constructing the point spread function image;
F. e goes on foot the structure point spread function image that obtains, and the full line or the permutation information that the wire hot spot are belonged to row or row extract, and as tectonic line spread function image, this tectonic line spread function image has n element;
G. the tectonic line spread function image that the f step is obtained carries out discrete Fourier transformation and delivery; Obtain the modulation transfer function image; This modulation transfer function image has the identical element number n of tectonic line spread function image that obtains with the f step; Be n discrete spectrum component, be respectively M according to spatial frequency order from small to large
0, M
1, M
2..., M
N-1, at this in proper order down, it is M that modulating transfer function value reaches the pairing modulating transfer function value of minimal value for the first time
i, footnote sequence number is i under it, the pel spacing l of combining image sensor obtains M
iPairing spatial frequency values is: f=i/ (nl);
H. according to modulation transfer function model M TF (f)=| sinc (π fd) |, in conjunction with the frequency values f that g step obtains, obtain wire hot spot length and be: d '=1/f=nl/i;
I. the wire hot spot length d that obtains according to b beans-and bullets shooter displacement of targets amount d and the h step ', obtain the optical system lateral magnification and be: β=d '/d=nl/ (id).
2. based on the optical system lateral magnification measurement mechanism of point target as amalgamation; Comprise point target (1), optical system (2), imageing sensor (3), slide block (4) and axial first guide rail of vertical light (5), described point target (1) is imaged onto imageing sensor (3) surface through optical system (2); It is characterized in that: this device also comprises second guide rail (6) along optical axis direction; The slide block (4) of bearing point target (1) is installed on first guide rail (5) and second guide rail (6); Slide block (4) matches with the motion of slide block (4) on second guide rail (6) in the motion on first guide rail (5), makes point target (1) be imaged onto imageing sensor (3) surface any all accurate Jiao of field positions.
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| CN102620911A (en) * | 2012-03-17 | 2012-08-01 | 哈尔滨工业大学 | Method and device for measuring transverse magnification of optical system by means of point target image splicing |
| CN102620667A (en) * | 2012-03-17 | 2012-08-01 | 哈尔滨工业大学 | Method and device for measuring pixel pitch of image sensor based on point-target image splicing technology |
| CN102620912A (en) * | 2012-03-17 | 2012-08-01 | 哈尔滨工业大学 | Lateral magnification measuring method for point target image-spliced optical system and lateral magnification measuring device |
| CN102620668A (en) * | 2012-03-17 | 2012-08-01 | 哈尔滨工业大学 | Method and device for measuring pixel pitch of image sensor based on point-target image splicing technology |
| CN108106818A (en) * | 2017-12-11 | 2018-06-01 | 中国科学院上海光学精密机械研究所 | Optical imaging system multiplying power and distortion high precision measuring device and measuring method |
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