CN102590973B - Numerical aperture matching device of synchronous radiation infrared microscope - Google Patents
Numerical aperture matching device of synchronous radiation infrared microscope Download PDFInfo
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- CN102590973B CN102590973B CN201210096476.0A CN201210096476A CN102590973B CN 102590973 B CN102590973 B CN 102590973B CN 201210096476 A CN201210096476 A CN 201210096476A CN 102590973 B CN102590973 B CN 102590973B
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Abstract
The invention provides a numerical aperture matching device of a synchronous radiation infrared microscope. The device comprises two off-axis parabolic mirrors, an outgoing beam translation mechanism and an off-axis parabolic mirror translation mechanism or an incident beam translation mechanism, wherein the two off-axis parabolic mirrors are arranged oppositely and have superposed focuses and superposed rotary symmetric axes, and incident beams parallel to the rotary symmetric axes are incident to the first off-axis parabolic mirror and sequentially reflected by the first and second off-axis parabolic mirrors to form outgoing beams; the outgoing beam translation mechanism comprises at least one outgoing plane mirror arranged opposite to the second off-axis parabolic mirror to change the direction of the outgoing beams and an outgoing translation table for installing an outgoing plane mirror; and the off-axis parabolic mirror translation mechanism comprises an off-axis parabolic mirror translation table, the incident beam translation mechanism comprises at least one incident plane mirror and an incident translation table, and the moving direction of the off-axis parabolic mirror translation table or the incident translation table is vertical to the rotary symmetric axes. The device ensures continuous adjustment of the size of synchronous radiation infrared beams, is easy to operate, and saves manpower and working time.
Description
Technical field
The present invention relates to synchrotron radiation infrared microscopy field, particularly relate to a kind of numerical aperture coalignment of synchrotron radiation infrared microscope.
Background technology
On synchrotron radiation infrared microscopy light beam line station, the emission angle of the infrared beam sending due to synchrotron radiation is little, and in spill process, to pass through a plurality of optical elements, need in the transmission range of several meters, introduce Fourier transform spectrometer, and then introduce infrared microscope.Infrared microscope generally adopts Schwartz Anthony Heald (Schwarzschild) object lens of total-reflection type, the feature requirement of this object lens, the light beam of incident must meet input aperture, if incident beam size is too large, has photon and cannot incide protruding spherical mirror and lose; If the size of incident beam is too little, though have greatly light beam, can incide protruding spherical mirror and can not incide concave spherical mirror and lose, even can make focus place not have photon to arrive.And there is very big difference the input aperture of the infrared micro-objective of different amplification.When adopting traditional infrared light supply, because the large light source area of its emission angle is large, just not there is not Beam matching problem; And while adopting synchrotron radiation infrared beam as light source, because its emission angle is little, if do not carry out strict coupling, there will be problem above.The emission angle of synchrotron radiation infrared beam is different and different with wavelength in addition, therefore, the requirement of beam sizes is also had to relation with the interested wave band of experiment.
On current synchrotron radiation infrared microscopy light beam line station in the world, general numerical aperture coalignment is to adopt one 90 degree off axis paraboloidal mirrors and a level crossing to form, wherein the ratio of the 90 degree focal lengths of off axis paraboloidal mirror and the focal length of preposition focus lamp has determined the magnification of beam sizes, and level crossing is for regulating outgoing position and the direction of light beam.In existing numerical aperture coalignment, by changing 90 degree off axis paraboloidal mirrors of different focal, and the whole position that changes off axis paraboloidal mirror and level crossing is to adapt to the focal length variations of off axis paraboloidal mirror, thereby change the magnification of beam sizes, and then realize the object that regulates beam sizes.But because the focal length of changed off axis paraboloidal mirror is discrete value, therefore can only obtain according to the focal length of changed off axis paraboloidal mirror the light beam of several fixed measures, and cannot obtain the continuously adjustable light beam of size, and because these optical elements are mounted in vacuum environment, therefore change optical element and change the operation of position cumbersome, waste of manpower and time.
Summary of the invention
The numerical aperture coalignment that the object of this invention is to provide a kind of synchrotron radiation infrared microscope, for infrared microscope provides beam sizes continuously adjustable synchrotron radiation infrared beam within the specific limits, simple to operate, save manpower man-hour.
Based on above-mentioned purpose, the technical solution adopted in the present invention is:
A kind of numerical aperture coalignment of synchrotron radiation infrared microscope, comprise: the first and second off axis paraboloidal mirrors that are oppositely arranged, both have the focus of coincidence and the rotation axes of symmetry of coincidence, and incident beam is parallel to that this rotation axes of symmetry incides on the first off axis paraboloidal mirror and through the first and second off axis paraboloidal mirrors reflections, obtain outgoing beam successively; Outgoing beam translation mechanism, it comprises that at least one and the second off axis paraboloidal mirror are oppositely arranged to change the exit plane mirror of outgoing beam direction, and for the outgoing translation stage of exit plane mirror is installed; Off axis paraboloidal mirror translation mechanism, it comprises that the direction of motion of off axis paraboloidal mirror translation stage is perpendicular to described rotation axes of symmetry for the off axis paraboloidal mirror translation stage of the first and second off axis paraboloidal mirrors is installed.
Described off axis paraboloidal mirror translation stage and outgoing translation stage are one dimension translation stage.
Described off axis paraboloidal mirror translation stage comprises respectively guide rail with outgoing translation stage, along the slide block of guide rail movement and the leading screw being connected with slide block, the first and second off axis paraboloidal mirrors or exit plane mirror are fixedly connected on the slide block of translation stage separately by draw-in groove or buckle respectively, and one handle or motor are connected with leading screw by shaft coupling.
The off-axis angle of described the first and second off axis paraboloidal mirrors is 90 degree.
A kind of numerical aperture coalignment of synchrotron radiation infrared microscope, comprise: the first and second off axis paraboloidal mirrors that are oppositely arranged, both have the focus of coincidence and the rotation axes of symmetry of coincidence, and incident beam is parallel to that this rotation axes of symmetry incides on the first off axis paraboloidal mirror and through the first and second off axis paraboloidal mirrors reflections, obtain outgoing beam successively; Outgoing beam translation mechanism, it comprises that at least one and the second off axis paraboloidal mirror are oppositely arranged to change the exit plane mirror of outgoing beam direction, and for the outgoing translation stage of exit plane mirror is installed; Incident beam translation mechanism, it comprises that at least one and the first off axis paraboloidal mirror are oppositely arranged to change the plane of incidence mirror of incident beam direction, and for the incident translation stage of incident level crossing is installed, the direction of motion of incident translation stage is perpendicular to described rotation axes of symmetry.
Described incident translation stage and outgoing translation stage are one dimension translation stage.
Described incident translation stage comprises respectively guide rail with outgoing translation stage, along the slide block of guide rail movement and the leading screw being connected with slide block, plane of incidence mirror or exit plane mirror are fixedly connected on the slide block of translation stage separately by draw-in groove or buckle respectively, and one handle or motor are connected with leading screw by shaft coupling.
The off-axis angle of described the first and second off axis paraboloidal mirrors is 90 degree.
The numerical aperture coalignment of synchrotron radiation infrared microscope of the present invention, comprise coaxial confocal and two off axis paraboloidal mirrors and the outgoing beam translation mechanism that are oppositely arranged, by off axis paraboloidal mirror translation mechanism or incident beam translation mechanism are set, make synchrotron radiation infrared beam size adjustable continuously within the specific limits, simple to operate, save manpower man-hour.
Accompanying drawing explanation
The structural representation of Fig. 1 embodiments of the invention 1, wherein unidirectional arrow is indicated the direction of light beam, the moving direction of four-headed arrow indication translation stage;
The light path schematic diagram of Fig. 2 embodiments of the invention 1, wherein unidirectional arrow is indicated the direction of light beam, the moving direction of four-headed arrow indication translation stage;
The structural representation of Fig. 3 embodiments of the invention 2, wherein unidirectional arrow is indicated the direction of light beam, the moving direction of four-headed arrow indication translation stage.
Embodiment
Below with reference to the accompanying drawings, provide preferred embodiment of the present invention, and be described in detail, enable to understand better function of the present invention, feature.
Embodiment 1
Fig. 1 shows an embodiment of the numerical aperture coalignment of synchrotron radiation infrared microscope of the present invention, it comprises coaxial confocal and two off axis paraboloidal mirrors 1,2 that are oppositely arranged, wherein, confocally refer to that two off axis paraboloidal mirrors 1,2 have the focus 9 of coincidence, confocal setting guaranteed that two off axis paraboloidal mirrors 1,2 are operated in the perfect condition of pointolite to parallel beam or parallel beam to pointolite; Coaxially refer to that two off axis paraboloidal mirrors 1,2 have the rotation axes of symmetry 8 of coincidence, incident beam 6 is parallel to that rotation axes of symmetry 8 incides on the first off axis paraboloidal mirror 1 and through the first off axis paraboloidal mirror 1 and the second off axis paraboloidal mirror 2 reflections, obtain outgoing beam 7 successively, and coaxial setting guaranteed incident beam 6 but opposite direction parallel with outgoing beam 7.Preferably, the off-axis angle of off axis paraboloidal mirror 1,2 is 90 degree.In the present embodiment, this numerical aperture coalignment also comprises an outgoing beam translation mechanism, this outgoing beam translation mechanism comprises that at least one and the second off axis paraboloidal mirror 2 are oppositely arranged to change the exit plane mirror 3 of outgoing beam direction, and for the outgoing translation stage 5 of exit plane mirror 3 is installed.In addition, this numerical aperture coalignment further comprises an off axis paraboloidal mirror translation mechanism, this off axis paraboloidal mirror translation mechanism comprises that the direction of motion of this off axis paraboloidal mirror translation stage 4 is perpendicular to rotation axes of symmetry 8 for the off axis paraboloidal mirror translation stage 4 of two off axis paraboloidal mirrors 1,2 is installed.
As shown in Figure 2, be of a size of L
1incident beam 6 rotation axes of symmetry 8 that is parallel to two off axis paraboloidal mirrors 1,2 incide on the first off axis paraboloidal mirror 1, after the reflection of the first off axis paraboloidal mirror 1 and the second off axis paraboloidal mirror 2, obtain being of a size of L successively
2 outgoing beam 7, the magnification of beam sizes is L
2with L
1ratio equal the ratio of the effective focal length of light beam on two off axis paraboloidal mirrors, thereby realized beam sizes from L
1to L
2variation.Finally, by exit plane mirror 3, the direction of outgoing beam 7 is adjusted to the exit direction needing.
When changing the size L of outgoing beam 7
2time, according to required size, controlling off axis paraboloidal mirror translation stage 4 drives off axis paraboloidal mirror 1,2 along the direction translation certain distance perpendicular to rotation axes of symmetry 8, in this process, because the incidence point of light beam on two off axis paraboloidal mirrors is moved, cause the ratio of the effective focal length of light beam on two off axis paraboloidal mirrors to change, the magnification of beam sizes is changed, thereby change the size L of outgoing beam 7
2.Meanwhile, control the light beam translation that outgoing translation stage 5 drives exit plane mirror 3 translation certain distances to cause with the translation of proofreading and correct due to off axis paraboloidal mirror 1,2, thereby keep the invariant position of outgoing beam 7.
In the present embodiment, two translation stages 4,5 are all one dimension translation stage, it comprises respectively guide rail, along the slide block of guide rail movement and the leading screw being connected with slide block, two off axis paraboloidal mirrors 1,2 or exit plane mirror 3 are fixedly connected on the slide block of translation stage separately by draw-in groove or buckle respectively, and one handle or motor are connected with leading screw by shaft coupling for realizing the manual or electronic control to translation stage.During use, only need pass through handle or Electric Machine Control translation stage 4,5 continuous movings, the size that can realize outgoing beam 7 continuously adjustable and exit direction, position all remains unchanged, like this avoided changing the optical element in vacuum environment and the troublesome operation brought, saved manpower and time.
Fig. 3 shows another embodiment of the numerical aperture coalignment of synchrotron radiation infrared microscope of the present invention, similar to Example 1, this numerical aperture coalignment comprises coaxial confocal and two off axis paraboloidal mirrors 101,102 that are oppositely arranged, and the rotation axes of symmetry (not shown) that incident beam 106 is parallel to two off axis paraboloidal mirrors 101,102 incides on the first off axis paraboloidal mirror 101 and successively and obtains outgoing beam 107 through the first off axis paraboloidal mirror 101 and the second off axis paraboloidal mirror 102 reflections.Preferably, the off-axis angle of off axis paraboloidal mirror 101,102 is 90 degree.This numerical aperture coalignment also comprises an outgoing beam translation mechanism, this outgoing beam translation mechanism comprises that at least one and the second off axis paraboloidal mirror 102 are oppositely arranged to change the exit plane mirror 103 of outgoing beam direction, and for the outgoing translation stage 105 of exit plane mirror 103 is installed.As different from Example 1, this numerical aperture coalignment further comprises an incident beam translation mechanism, this incident beam translation mechanism comprises that at least one and the first off axis paraboloidal mirror 101 are oppositely arranged to change the plane of incidence mirror 108 of incident beam direction, and for the incident translation stage 104 of incident level crossing 108 is installed, the direction of motion of incident translation stage 104 is perpendicular to the rotation axes of symmetry of two off axis paraboloidal mirrors 101,102.
Similar to Example 1, be of a size of L
1incident beam 106 through plane of incidence mirror 108, change directions, then the rotation axes of symmetry that is parallel to two off axis paraboloidal mirrors 101,102 incides on the first off axis paraboloidal mirror 101, obtains being of a size of L successively after the reflection of the first off axis paraboloidal mirror 101 and the second off axis paraboloidal mirror 102
2 outgoing beam 107, the magnification of beam sizes is L
2with L
1ratio equal the ratio of the effective focal length of light beam on two off axis paraboloidal mirrors, thereby realized beam sizes from L
1to L
2variation.Finally, then by exit plane mirror 103, the direction of outgoing beam 107 is adjusted to the exit direction needing.
When changing the size L of outgoing beam 107
2time, according to required size, controlling incident translation stage 104 drives plane of incidence mirror 108 along the direction translation certain distance perpendicular to rotation axes of symmetry, in this process, because the incidence point of light beam on two off axis paraboloidal mirrors is moved, cause the ratio of the effective focal length of light beam on two off axis paraboloidal mirrors to change, the magnification of beam sizes is changed, thereby change the size L of outgoing beam 107
2.Meanwhile, control the light beam translation that outgoing translation stage 105 drives exit plane mirror 103 translation certain distances to cause with the translation of proofreading and correct due to plane of incidence mirror 108, thereby keep the outgoing invariant position of outgoing beam 107.
Similarly, two translation stages 104,105 are all one dimension translation stage, it comprises respectively guide rail, along the slide block of guide rail movement and the leading screw being connected with slide block, plane of incidence mirror 108 or exit plane mirror 103 are fixedly connected on the slide block of translation stage separately by draw-in groove or buckle respectively, and one handle or motor are connected with leading screw by shaft coupling for realizing the manual or electronic control to translation stage.During use, only need pass through handle or Electric Machine Control translation stage 104,105 continuous movings, the size that can realize outgoing beam 107 continuously adjustable and exit direction, position all remains unchanged, like this avoided changing the optical element in vacuum environment and the troublesome operation brought, saved manpower and time.
Above-described, be only preferred embodiment of the present invention, not in order to limit scope of the present invention, the above embodiment of the present invention can also make a variety of changes.Be that simple, the equivalence that every claims according to the present patent application and description are done changes and modify, all fall into the claim protection domain of patent of the present invention.
Claims (8)
1. a numerical aperture coalignment for synchrotron radiation infrared microscope, is characterized in that, comprising:
The first and second off axis paraboloidal mirrors that are oppositely arranged, both have the focus of coincidence and the rotation axes of symmetry of coincidence, and incident beam is parallel to that this rotation axes of symmetry incides on the first off axis paraboloidal mirror and through the first and second off axis paraboloidal mirrors reflections, obtain outgoing beam successively;
Outgoing beam translation mechanism, it comprises that at least one and the second off axis paraboloidal mirror are oppositely arranged to change the exit plane mirror of outgoing beam direction, and for the outgoing translation stage of exit plane mirror is installed;
Off axis paraboloidal mirror translation mechanism, it comprises for the off axis paraboloidal mirror translation stage of the first and second off axis paraboloidal mirrors is installed, the direction of motion of off axis paraboloidal mirror translation stage is perpendicular to described rotation axes of symmetry, by described outgoing beam translation mechanism and off axis paraboloidal mirror translation mechanism are set, make synchrotron radiation infrared beam size adjustable continuously within the specific limits, and outgoing invariant position.
2. the numerical aperture coalignment of synchrotron radiation infrared microscope as claimed in claim 1, is characterized in that, described off axis paraboloidal mirror translation stage and outgoing translation stage are one dimension translation stage.
3. the numerical aperture coalignment of synchrotron radiation infrared microscope as claimed in claim 2, it is characterized in that, described off axis paraboloidal mirror translation stage comprises respectively guide rail with outgoing translation stage, along the slide block of guide rail movement and the leading screw being connected with slide block, the first and second off axis paraboloidal mirrors or exit plane mirror are fixedly connected on the slide block of translation stage separately by draw-in groove or buckle respectively, and one handle or motor are connected with leading screw by shaft coupling.
4. the numerical aperture coalignment of the synchrotron radiation infrared microscope as described in claim 1 or 2 or 3, is characterized in that, the off-axis angle of described the first and second off axis paraboloidal mirrors is 90 degree.
5. a numerical aperture coalignment for synchrotron radiation infrared microscope, is characterized in that, comprising:
The first and second off axis paraboloidal mirrors that are oppositely arranged, both have the focus of coincidence and the rotation axes of symmetry of coincidence, and incident beam is parallel to that this rotation axes of symmetry incides on the first off axis paraboloidal mirror and through the first and second off axis paraboloidal mirrors reflections, obtain outgoing beam successively;
Outgoing beam translation mechanism, it comprises that at least one and the second off axis paraboloidal mirror are oppositely arranged to change the exit plane mirror of outgoing beam direction, and for the outgoing translation stage of exit plane mirror is installed;
Incident beam translation mechanism, it comprises that at least one and the first off axis paraboloidal mirror are oppositely arranged to change the plane of incidence mirror of incident beam direction, and for the incident translation stage of incident level crossing is installed, the direction of motion of incident translation stage is perpendicular to described rotation axes of symmetry, by described outgoing beam translation mechanism and incident beam translation mechanism are set, make synchrotron radiation infrared beam size adjustable continuously within the specific limits, and outgoing invariant position.
6. the numerical aperture coalignment of synchrotron radiation infrared microscope as claimed in claim 5, is characterized in that, described incident translation stage and outgoing translation stage are one dimension translation stage.
7. the numerical aperture coalignment of synchrotron radiation infrared microscope as claimed in claim 6, it is characterized in that, described incident translation stage comprises respectively guide rail with outgoing translation stage, along the slide block of guide rail movement and the leading screw being connected with slide block, plane of incidence mirror or exit plane mirror are fixedly connected on the slide block of translation stage separately by draw-in groove or buckle respectively, and one handle or motor are connected with leading screw by shaft coupling.
8. the numerical aperture coalignment of the synchrotron radiation infrared microscope as described in claim 5 or 6 or 7, is characterized in that, the off-axis angle of described the first and second off axis paraboloidal mirrors is 90 degree.
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| CN112924480B (en) * | 2021-01-27 | 2023-04-07 | 中国科学院上海高等研究院 | Measuring device for synchronous radiation X-ray and asynchronous infrared light combined use |
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| US4922104A (en) * | 1987-11-30 | 1990-05-01 | 501 Hitachi, Ltd. | Infrared microspectrometer |
| CN201300520Y (en) * | 2008-09-26 | 2009-09-02 | 铭板精密科技(中山)有限公司 | Multi-layer injection molding single-parting-surface mould |
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