CN102589685A - Optical field phase distribution detection system and detection method - Google Patents
Optical field phase distribution detection system and detection method Download PDFInfo
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- CN102589685A CN102589685A CN2012100625297A CN201210062529A CN102589685A CN 102589685 A CN102589685 A CN 102589685A CN 2012100625297 A CN2012100625297 A CN 2012100625297A CN 201210062529 A CN201210062529 A CN 201210062529A CN 102589685 A CN102589685 A CN 102589685A
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Abstract
The invention relates to an optical field phase distribution detection system and a detection method. The optical field phase distribution detection system comprises an optical fiber beam splitter, a photoelectric detector, a scanning driving module and a scanning part, wherein the optical fiber beam splitter is provided with at least two input ends; and the front ends of the input ends of the optical fiber beam splitter are respectively arranged to conical shapes, so as to form optical fiber probes; the optical fiber probes are closely arranged in parallel and are fixed; optical fiber transmission parts of the optical fiber probes are mutually fixed to prepare a phase detection probe; the phase detection probe and a near field optical coupling part of the optical fiber beam splitter are fixedly arranged in the same scanning part and an optical signal output end of the optical fiber beam splitter is located outside the scanning part; the scanning driving module is connected with the scanning part; and an optical signal output end of the optical fiber beam splitter is connected with the photoelectric detector. A light intensity signal of the output end of the optical fiber beam splitter is detected through the photoelectric detector and wave-front phase distribution of focusing light beams is analyzed, so as to realize the measurement of the optical field phase distribution. The optical field phase distribution detection system disclosed by the invention is simple in structure and convenient to use, and can realize the phase detection with a high space resolution ratio.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of light field PHASE DISTRIBUTION detection system and detection method.The light field PHASE DISTRIBUTION that is mainly used in the fields such as light field analysis, adaptive optics, optical element tolerance, ophthalmology, Photoelectric Detection, optical measurement, instrument assessment, uranology detects.
Background technology
The demand that the light field PHASE DISTRIBUTION detects extensively is present in the fields such as light field analysis, adaptive optics, optical element tolerance, ophthalmology, Photoelectric Detection, optical measurement, instrument assessment, uranology.For example, in adaptive optics, light field PHASE DISTRIBUTION senser element is one of unit important in the adaptive optics system; It is a primary link of accomplishing adaptive ability in the ADAPTIVE OPTICS SYSTEMS, according to the result of wavefront distortion detection, through control module; The strained Wave-front phase of FEEDBACK CONTROL distributes; Make it return to ideal situation as far as possible, the major function of Here it is Beam Wave-Front phase-detection device, and essential.In the light field analysis field; Wave-front phase detects and plays important effect; Particularly in complete analysis strong focusing light field process, indispensable especially, Wave-front phase distributes to detect and can make the light beam description more complete; Understanding to the light beam focus characteristics is more deep, and the application of focused beam is played important directive guidance effect.
Formerly in the technology, there is the method that detects the light field PHASE DISTRIBUTION, referring to United States Patent (USP) 7,595,729.Patent name is Wavefront sensor (the English Wavefront sensor of being); The inventor is Van Heugten and Anthony Y, method be light beam to be detected successively through two screens that are parallel to each other, each screen all has a circular aperture that two-dimensional array is arranged; There is rotation angle relatively between two screens; Light passes through can produce Moire effect (English is Moire effect) behind two sheets like this, realizes the measurement of Beam Wave-Front phase place through detecting transmitted beam, though this method has certain advantage; But exist essence not enough; 1) this method can't realize that in essence the Beam Wave-Front of high spatial resolution detects, and promptly the distance between two horizontal check points of continuous Beam Wave-Front can not reach nanometer scale, receives the restriction of light wave diffraction theory and the restriction on the circular aperture array manufacture craft in essence; 2) this method can't realize that the Wave-front phase of the focused beam in the high-NA optical system detects; Particularly when numerical aperture was higher than 0.70, the vector effect of light beam became significantly, when when incident beam is laser beam; Because laser beam is a coherent light; Interference of light and diffraction effect are fairly obvious, further cause the detection signal-to-noise ratio of this method low, can't realize that Wave-front phase detects; 3) can't realize that the penlight Wave-front phase detects, when beam diameter during less than the circular aperture on the screen, this method detects principle to be false, and can't realize the detection of Wave-front phase at all; 4) entire system complex structure, structural orientation requires high, is prone to receive external interference, and needs 2 D photoelectric by surveying the device images acquired, and ripple strong phase accuracy of detection receives the restriction of photoelectric sensor parameter like this, can't realize highly sensitive phase distribution measuring.
Summary of the invention
The objective of the invention is to deficiency to above-mentioned technology; A kind of light field PHASE DISTRIBUTION detection system and detection method are provided, have and realize that simple, as can to analyze focused beam wavefront distributes, can realize that the Beam Wave-Front of high spatial resolution is measured, structural orientation requires characteristics such as low, that usable range is wide.
Basic design of the present invention is: the near field of light coupling coherent technique and optical fiber probe scanning technique arranged side by side of utilizing fiber optic splitter; Based on phase of light wave can appreciable impact optical interference signal principle, two light signal input ends of fiber optic splitter are utilized chemical fusion method or hot-drawn method, be made into two optical fiber probes; It is close to side by side fixes; Form the phase-detection probe, the near field of light coupling unit of phase-detection probe and fiber optic splitter all is fixed in the same sweep unit, the turntable driving module is connected with sweep unit; Driving sweep unit moves; Realize that the phase-detection probe scans in tested light field, the light intensity signal of the light signal output end through the detection fiber beam splitter obtains the light field PHASE DISTRIBUTION.That Wave-front phase simple, that can analyze focused beam distributes, can realize phase measurement, the structural orientation of high spatial resolution that the method realizes requires is low, usable range is wide, workable.
A kind of light field PHASE DISTRIBUTION detection system; Comprise fiber optic splitter, photodetector, turntable driving module and sweep unit; Be characterized in: the input end of said fiber optic splitter is at least two, and the front end of each fiber optic splitter input end is set to cone shape respectively, constitutes optical fiber probe; All optical fiber probes are close to side by side and are fixing, and the optical fiber of all optical fiber probes passes to part and interfixes, and processes the phase-detection probe; The near field of light coupling unit of phase-detection probe and fiber optic splitter all is fixed in the same sweep unit, and the light signal output end of fiber optic splitter is positioned at outside the sweep unit; The turntable driving module is connected with sweep unit, and the light signal output end of fiber optic splitter is connected with photodetector.
Described fiber optic splitter is a kind of of single-mode fiber beam splitter, multimode optical fiber beam splitter, single mode-multimode mixed type optical fiber beam splitter.
Its input end quantity of described fiber optic splitter is more than or equal to two, and output terminal quantity is more than or equal to one.
Described turntable driving module is a piezoelectric ceramics nanometer mobile platform.
Described photodetector is photodiode, snowslide pipe, photomultiplier a kind of of single sensitive face.
A kind of detection method of light field PHASE DISTRIBUTION detection system; Be characterized in: the near field of light coupling coherent technique and the optical fiber probe scanning technique arranged side by side of utilization fiber optic splitter; Light intensity signal through photodetector detection fiber beam splitter output terminal; The Wave-front phase of analyzing focused beam distributes, and obtains the phase information of tested light field, realizes the measurement of light field PHASE DISTRIBUTION.
Compared with prior art, the present invention has following advantage and good effect:
1, the present invention is owing to use optical fiber probe to scan; The existing mature technology of the front end clear aperature utilization of optical fiber probe can reach the yardstick of 30-50 nanometer; The present invention simultaneously utilizes sweep unit to drive the phase-detection probe to scan; If sweep unit adopts High Precision Piezoelectric Ceramic nanometer platform, scanning accuracy can reach 0.5 nanometer, even adopt stepper motor as sweep unit; Also can reach sub-micrometer scale, detect so the present invention can realize the Beam Wave-Front of high spatial resolution.
2, the present invention adopts the near field of light coupling coherent technique of fiber optic splitter and optical fiber probe scanning technique arranged side by side to combine; Tested light field had no restriction; It can be parallel beam; Also can be convergent beam,, can realize that the Wave-front phase of the focused beam in the high-NA optical system is measured so the present invention has solved the limitation of technology formerly in itself.
3, the present invention adopts optical fiber probe to carry out the light signal input, can reach the yardstick of tens nanometers, much smaller than the diffraction limit of light wave, can carry out the penlight Wave-front phase and measure.
4, the present invention uses the photoelectric sensor of single sensitive face, and the photoelectric sensing signal to noise ratio (S/N ratio) is high, and based on Fibre Optical Sensor, system architecture is simple, and structural orientation requires low, and strong interference immunity can be realized highly sensitive phase distribution measuring.
Description of drawings
Fig. 1 is a kind of light field PHASE DISTRIBUTION of the present invention detection system example structure synoptic diagram.
1, first optical fiber probe, 2, the first light signal input end, 3, the near field of light coupling unit of fiber optic splitter; 4, first light signal output end, 5, photodetector one, 6, second optical fiber probe; 7, the second light signal input end, 8, sweep unit, 9, second light signal output end; 10, photodetector two, 11, turntable driving module, 12, the aperture convergent beam.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is elaborated.
As shown in Figure 1: a kind of light field PHASE DISTRIBUTION detection system; Comprise fiber optic splitter, photodetector, turntable driving module and sweep unit; Present embodiment has been selected the single-mode fiber beam splitter of 2x2, and the input end of fiber optic splitter is two, and the output terminal of fiber optic splitter is two; Photodetector is two, and concrete structure is following:
(1) the first light signal input end 2 of fiber optic splitter and the front end of the second light signal input end 7 are utilized chemical fusion method, the optical fiber front end is processed cone shape, constitute first optical fiber probe 1 and second optical fiber probe 6.Selected the single-mode fiber beam splitter of 2x2 in the present embodiment, through chemical fusion method, with two light signal input end melt into cone shapes, the top end diameter that detects optical fiber probe through electron microscope is 50 nanometers;
(2) first optical fiber probe 1 and second optical fiber probe 6 row are close to fix, the optical fiber of first optical fiber probe 1 and second optical fiber probe 6 passes to partly and interfixes, and processes the phase-detection probe.Utilize in the present embodiment ultra-violet curing glue with two optical fiber probes arrange be close to fixing;
The phase-detection probe that (3) will be made up of first optical fiber probe 1 and second optical fiber probe 6 and the near field of light coupling unit 3 of fiber optic splitter all are fixed in the same sweep unit 8; The light signal output end of fiber optic splitter is positioned at outside the sweep unit, comprises first light signal output end 4 and second light signal output end 9.Sweep unit 8 is the aluminum rectangular housing in the present embodiment, and the fixing gummed that all adopts between device and housing is fixing.
(4) turntable driving module 11 is connected with sweep unit 8, drives sweep unit 8 and moves, and realizes that the phase-detection probe that is made up of first optical fiber probe 1 and second optical fiber probe 6 scans in tested light field.The three-dimensional piezoelectric ceramics nanometer mobile platform of the German PI of the turntable driving module 11 employings company in the present embodiment fixes the moving-member of sweep unit 8 with turntable driving module 11.
(5) owing to adopted the single-mode fiber beam splitter of 2x2; Two light signal output ends are arranged; Optical fiber connector at first light signal output end 4 and second light signal output end 9 in the present embodiment has been connected photodetector 1 and photodetector 2 10 respectively, and photodetector 1 is the photomultiplier that produce the river in Jiangsu Province which flows into the Huangpu River of Shanghai, Japanese shore with photodetector 2 10 employings.
The near field of light coupling coherent technique and the optical fiber probe scanning technique arranged side by side of utilization fiber optic splitter; Driving sweep unit by the turntable driving module moves; In the process that the phase-detection probe scans in tested light field; Detect the light intensity signal of photodetector 1 or photodetector 2 10, the Wave-front phase of analyzing focused beam distributes, and has just obtained the phase information of tested light field.
Fiber optic splitter of the present invention can also adopt multimode optical fiber beam splitter or single mode-multimode mixed type optical fiber beam splitter.
Photodetector of the present invention can also adopt photodiode or snowslide pipe.
Present embodiment adopts the light field PHASE DISTRIBUTION detection system of the present invention's design; The PHASE DISTRIBUTION that has completed successfully 0.25 numerical aperture convergent beam 12 detects; Compare with technology formerly; It is not enough that the present invention has overcome essence of the prior art, has that implementation method simple and flexible, structural orientation require low, system reliability and stability is high, workable, the wavefront distribution that can analyze focused beam, the characteristics such as Beam Wave-Front measurement that can realize high spatial resolution.
Claims (6)
1. light field PHASE DISTRIBUTION detection system; Comprise fiber optic splitter, photodetector, turntable driving module and sweep unit; It is characterized in that: the input end of said fiber optic splitter is at least two; The front end of each fiber optic splitter input end is set to cone shape respectively, constitutes optical fiber probe; All optical fiber probes are close to side by side and are fixing, and the optical fiber of all optical fiber probes passes to part and interfixes, and processes the phase-detection probe; The near field of light coupling unit of phase-detection probe and fiber optic splitter all is fixed in the same sweep unit, and the light signal output end of fiber optic splitter is positioned at outside the sweep unit; The turntable driving module is connected with sweep unit, and the light signal output end of fiber optic splitter is connected with photodetector.
2. a kind of light field PHASE DISTRIBUTION detection system according to claim 1 is characterized in that: described fiber optic splitter is a kind of of single-mode fiber beam splitter, multimode optical fiber beam splitter, single mode-multimode mixed type optical fiber beam splitter.
3. a kind of light field PHASE DISTRIBUTION detection system according to claim 1 is characterized in that: its input end quantity of described fiber optic splitter is more than or equal to two, and its output terminal quantity is more than or equal to one.
4. a kind of light field PHASE DISTRIBUTION detection system according to claim 1 is characterized in that: described turntable driving module is a piezoelectric ceramics nanometer mobile platform.
5. a kind of light field PHASE DISTRIBUTION detection system according to claim 1 is characterized in that: described photodetector is photodiode, snowslide pipe, photomultiplier a kind of of single sensitive face.
6. the detection method of a kind of light field PHASE DISTRIBUTION detection system according to claim 1; It is characterized in that: the near field of light coupling coherent technique and the optical fiber probe scanning technique arranged side by side of utilization fiber optic splitter; Light intensity signal through photodetector detection fiber beam splitter output terminal; The Wave-front phase of analyzing focused beam distributes, and obtains the phase information of tested light field, realizes the measurement of light field PHASE DISTRIBUTION.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106546324A (en) * | 2016-11-11 | 2017-03-29 | 上海理工大学 | The method of the little light beam interior three-dimensional light distribution of measurement random polarization state |
| WO2021134924A1 (en) * | 2020-01-03 | 2021-07-08 | 深圳大学 | Optical fiber type photoelectric detector, detection system, test system and preparation method |
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| US20060187451A1 (en) * | 2005-02-18 | 2006-08-24 | The Regents Of The University Of California | Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systems |
| JP2007303954A (en) * | 2006-05-11 | 2007-11-22 | Sumitomo Electric Ind Ltd | Interferometers sensor, optical measuring apparatus using it, and optical measuring method |
| CN101435928A (en) * | 2007-11-15 | 2009-05-20 | 财团法人工业技术研究院 | Multi-channel spectral measuring device and phase difference analysis method |
| CN101666750A (en) * | 2009-09-25 | 2010-03-10 | 上海大学 | Surface-enhanced raman scattering torquemaster based on optical fiber fuse-tapered coupler |
| CN101701913A (en) * | 2009-11-20 | 2010-05-05 | 清华大学 | Multi-probe optical fiber evanescent wave biological sensor with all-optical-fiber structure |
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2012
- 2012-03-09 CN CN2012100625297A patent/CN102589685A/en active Pending
Patent Citations (5)
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| US20060187451A1 (en) * | 2005-02-18 | 2006-08-24 | The Regents Of The University Of California | Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systems |
| JP2007303954A (en) * | 2006-05-11 | 2007-11-22 | Sumitomo Electric Ind Ltd | Interferometers sensor, optical measuring apparatus using it, and optical measuring method |
| CN101435928A (en) * | 2007-11-15 | 2009-05-20 | 财团法人工业技术研究院 | Multi-channel spectral measuring device and phase difference analysis method |
| CN101666750A (en) * | 2009-09-25 | 2010-03-10 | 上海大学 | Surface-enhanced raman scattering torquemaster based on optical fiber fuse-tapered coupler |
| CN101701913A (en) * | 2009-11-20 | 2010-05-05 | 清华大学 | Multi-probe optical fiber evanescent wave biological sensor with all-optical-fiber structure |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106546324A (en) * | 2016-11-11 | 2017-03-29 | 上海理工大学 | The method of the little light beam interior three-dimensional light distribution of measurement random polarization state |
| WO2021134924A1 (en) * | 2020-01-03 | 2021-07-08 | 深圳大学 | Optical fiber type photoelectric detector, detection system, test system and preparation method |
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Application publication date: 20120718 |