CN102589419A - Measurement method and measurement device based on PSD (Phase Sensitive Demodulator) - Google Patents
Measurement method and measurement device based on PSD (Phase Sensitive Demodulator) Download PDFInfo
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- CN102589419A CN102589419A CN2011103598348A CN201110359834A CN102589419A CN 102589419 A CN102589419 A CN 102589419A CN 2011103598348 A CN2011103598348 A CN 2011103598348A CN 201110359834 A CN201110359834 A CN 201110359834A CN 102589419 A CN102589419 A CN 102589419A
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Abstract
The invention discloses a measurement method and a measurement device based on a PSD (Phase Sensitive Demodulator). The method includes the following steps that: (1) frequency modulation is conducted on all optical signal sources; (2) the modulated mixed signals output two circuits of photo-generated current by the PSD; (3) the current signals are converted into voltage signals and the voltage signals are amplified; (4) analog-to-digital conversion is conducted; (5) filtering is conducted to obtain the alternating voltage signals of all the optical signal sources; (6) the effective values of the alternating signals of all the optical signal sources are obtained through measuring; and (7) the effective values are inputted to a position computing module and the distances of the light spots of all the optical signal sources deviating from the center of the PSD are computed. The measurement device comprises a signal generator, a PSD position sensor, a signal amplifier, an AD (analog-to-digital) conversion module and a filtering, frequency measuring and computing module. The measurement method and the measurement device can effectively remove the strong background interference and the interference from other optical signals, a plurality of spots in a space can be measured simultaneously under a complex environment, and the measurement method and the measurement device have the characteristics of high recognition degree and fast computing speed.
Description
Technical field
The invention belongs to photoelectric detection technology field, particularly a kind of measuring method and measurement mechanism based on PSD.
Background technology
PSD (Position Sensitive Detector) photoelectrical position sensor; Be a kind of photoelectric device responsive to launching spot centre of gravity place on its light-sensitive surface; Can measure the centre of gravity place of light signal, therefore, PSD often is applied in the spatial position measuring system.Its principle of work is: launching spot drops on the light-sensitive surface of PSD, on the PN junction of device, produce the lateral light electrical effect, thereby PSD exports electric signal with current system.This electric signal comprises the irradiation position information of incident luminous point, through the processing to above-mentioned output electric signal, can calculate the position of launching spot at PSD.
At present, Using P SD carries out the measurement of locus, mainly contains sampling-maintenance method and modulation method.
Be illustrated in figure 1 as the principle of work of sampling-maintenance method.PSD output signal amplifies through dc amplification circuit.Signal control circuit is provided with optical signal source one bright and goes out.When signal optical source extinguishes; Detect the output signal magnitude that bias light produces and charge to sampling and keep 1, put bright light source then, detected output signal is deducted the bias light signal that a last pacing gets and charges to sampling maintenance 2; At this moment, the output signal is effective optical signal source position signalling.Above-mentioned effective optical signal source position signalling input computing circuit is carried out position calculation.
Be illustrated in figure 2 as the principle of work of modulation method, this method is at first modulated the optical signal source signal, promptly through signal generator, makes optical signal source send the light signal of equidistance square wave.PSD exports detected signal with current forms, after dc amplification circuit amplifies, and again via synchronous detection, LPF, the direct current signal of the active position of the background signal that can be eliminated.
There are many deficiencies in above-mentioned two kinds of measuring methods based on PSD:
The first, antijamming capability is bad.
Usually, in the working environment of PSD, always have the bias light of certain intensity, comprise with the natural light be main direct current light signal (being called static background disturbs) with artificial light sources such as daylight lamp, incandescent lamps be master exchange light signal (being called the dynamic background interference).The bias light signal will cause measuring error.When the bias light intensity enhancing arrived to a certain degree, measuring error caused the result of calculation deviation also big too greatly, even makes calculated value lose meaning.
Sampling-maintenance method adopts dc amplification circuit, and when the optical signal source signal is amplified, all static state, dynamic background signal all will be synchronized amplification, and the background interference signal that amplifies so becomes stronger, will cause the result of calculation deviation bigger.
The second, working environment is required height, signal to noise ratio (S/N ratio) is required high.
Under the situation of a plurality of optical signal sources; Sampling-maintenance method is through adopting the mode of commutation circuit; Light source is carried out alternately lights, and between lighting slot reservation a period of time measure the bias light signal intensity, measured signal strengths deducts the bias light signal intensity that the time closes on when lighting certain light source; Can obtain the signal intensity of this light source, and calculate the position.Influenced by circuit stability, switch too fast meeting and cause influencing each other and increase error.The complexity and the cost of the integrated circuit that the while commutation circuit can increase.In addition, modulation method lacks the circuit solution that multiple light courcess is measured, and can't carry out position measurement simultaneously to multisignal source.
The 3rd, determinand and measuring system conjunction coupling, the measuring system structure is dumb.
The signal generating circuit of optical signal source must be strictly keeps synchronously with the PSD circuitry for signal measurement, and promptly signal source and treatment circuit are synchronous in time, on physical space, must directly link to each other on signal generating circuit and the signal processing circuit.It is thus clear that optical signal source can not independently exist, optical signal source and metering circuit seriously are coupled.This coupling causes the structural dirigibility of measuring system to reduce greatly.
Measuring system structure underaction needs directly signal generating source to be connected through physics mode with metering circuit, makes these two kinds of methods be only applicable to the fixing or little situation of moving range of determinand target.For the determinand fast for moving, that moving range is big, the measuring process of present two kinds of methods is inconvenient.
The 4th, cost is high.
The PSD metering circuit of existing two kinds of methods needs specialized designs, and commercially available PSD metering circuit plate is also only provided by producer of several family, and volume production is few, and price is high, correspondingly, uses these two kinds of method costs also high in the spatial position measuring.
Summary of the invention
To the deficiency of prior art, the object of the present invention is to provide and a kind ofly can effectively remove undesired signal, can carry out concurrent measurement to a plurality of optical signal sources, determinand freedom and flexibility, low-cost measuring method and measurement mechanism.
For realizing above-mentioned purpose, following technical scheme is adopted in the invention: a kind of measuring method based on PSD, and can be simultaneously to several independent light signal source (optical signal sources 1; Optical signal source 2;, optical signal source n) and carry out position measurement, it is characterized in that this method comprises successively:
(1) signal modulation: respectively each optical signal source is carried out sinusoidal pulse width modulation, make frequency and other optical signal source of each optical signal source after the modulation all inequality;
(2) PSD handles: the signal of all optical signal sources and the mixed signal of bias light are projeced into the PSD light-sensitive surface and form hot spot, and export two-way photogenerated current I at the PSD two ends
1, I
2
The photogenerated current computing formula is following:
(3) conversion of signals and amplification: through I-V change-over circuit and amplifying circuit, with current signal I
1, I
2Convert voltage signal into and it is amplified on year-on-year basis, the voltage signal of conversion back output satisfies U
1=kI
1, U
2=kI
2, wherein, k is the constant strong and weak relevant with signal processing circuit with the signal source signal, under the different working scene, because the difference of light signal strength and treatment circuit, enlargement factor k value differs;
(4) analog to digital conversion:, convert analog voltage signal into digital voltage signal through A/D convertor circuit;
(5) filtering: receive digital voltage signal from a last step; Respectively each optical signal source is carried out digital narrow-band filtering; With the signal of other optical signal sources in the filtering blended voltage signals and the undesired signal in the bias light, obtain the ac voltage signal U of each optical signal source
I1, U
I2(i=1,2 ..., n), the voltage signal of each optical signal source is separate after the filtering;
(6) amplitude measurement: to the filtered ac voltage signal U of each optical signal source
I1, U
I2(i=1,2 ..., n) carry out amplitude measurement, obtain the effective value A of the AC signal of each optical signal source
I1, A
I2(i=1,2 ..., n), this effective value and signal wave amplitude are directly proportional;
(7) position calculation: read the signal effective value of each optical signal source of input, the hot spot that calculates each optical signal source departs from the distance X at PSD center
1, X
2..., X
n, said distance X satisfies formula:
X
i=(L/2)*(A
i1-A
i2)/(A
i2+A
i1)
Wherein, L is a PSD light-sensitive surface length, i=1, and 2 ..., n.
Further, the amplifying circuit in the said step (3) is the alternating voltage amplifying circuit, and signal can be removed the static interference signal in the background after amplifying through ac amplifier circuit, improves signal to noise ratio (S/N ratio).
Further, in the said step (5), the centre frequency of each digital narrow-band filtering is the modulating frequency of corresponding optical signal source in step (1).
Further, filtering, effective value measurement and position calculation are carried out successively through the cpu chip with digital filtering module, amplitude measurement module and computing module in said step (5), (6), (7).
Generally, the quantity of the optical signal source of concurrent measurement generally only receives the restriction of CPU processing power, therefore, in concrete the application, can select CPU as required flexibly, to satisfy different demands.
A kind of measurement mechanism based on PSD comprises corresponding with determinand respectively several signal generators and PSD position transducer, and said signal generator is modulated optical signal source, and optical signal source is positioned on the determinand, it is characterized in that also comprising:
The signal amplification module links to each other with PSD sensor output terminal, is made up of I-V change-over circuit and ac amplifier circuit, is used for the signal of PSD output is amplified;
The AD modular converter links to each other with signal amplification module output terminal, converts amplified analog signal into digital signal;
Filtering-survey the width of cloth-computing module links to each other with AD modular converter output terminal, is used for handling all optical signal sources exchange undesired signal with background mixed signal, realizes that successively filtering, the effective value to each optical signal source measured and position calculation.
Further, the said filtering-survey width of cloth-computing module is the cpu chip that is integrated with digital filtering module, amplitude measurement module, computing module, wherein,
Said digital filtering module is used for extracting respectively from mixed signal the signal message of each optical signal source;
Said amplitude measurement module is used to measure the output signal of above-mentioned digital filtering module, obtains the signal effective value of each optical signal source respectively;
Said computing module, the signal effective value of each optical signal source that reception amplitude measurement module records is as input, and the hot spot that calculates and export each optical signal source departs from the distance at PSD center.
Further, be filtered into narrow-band filtering in the said filtering-survey width of cloth-computing module, the centre frequency of said narrow-band filtering is consistent with the modulating frequency of corresponding optical signal source.
What need spell out is that such scheme has only been described the situation of using one dimension PSD sensor to carry out position measurement.For the measurement of signal source two-dimensional position, only need the one dimension PSD in the such scheme is replaced with Two-dimensional PSD.Correspondingly, to each signal source, PSD exports four road photogenerated current I
1, I
2, I
3, I
4(the corresponding two-way electric current of each dimension), I-V conversion corresponding four road voltage signal U in back
I1, U
I2, U
I3, U
I4(i=1,2 ..., n), the AC signal effective value of measuring subsequently also is four A
I1, A
I2, A
I3, A
I4(i=1,2 ..., n), last, the hot spot that is calculated each signal source by computing module departs from the two-dimensional position (X at PSD center
i, Y
i), i=1,2 ..., n, satisfy formula:
X
i=(L/2)*(A
i1-A
i2)/(A
i2+A
i1)
Y
i=(L/2)*(A
i3-A
i4)/(A
i3+A
i4)
Wherein, L is a PSD light-sensitive surface length.
Amplify and digital narrow-band filtering owing to used to exchange; Method of the present invention can effectively remove stronger background static interference and background dynamics is disturbed; Reduce requirement greatly, PSD can well be used in daily environment the signal to noise ratio (S/N ratio) and the operative scenario of signal source.
In the measuring method of the present invention, can accomplish position measurement to a light source by narrow-band filtering, amplitude measurement and computing module.Because filtering, signal effective value calculate and the software program of position calculation all has multiple conventional method to realize; Therefore; When measuring a plurality of light source, as long as in above-mentioned three modules, increase corresponding computing respectively, the technician with general knowledge known in this field expects also can realizing easily.The number of light sources that can measure simultaneously depends on the processing power of CPU, can select configuration according to the measurement needs.Because the computing of narrow-band filtering, amplitude measurement and position calculation is all simpler, use common CP U just can realize concurrent fast measurement.
Measurement mechanism of the present invention uses a plurality of separate signal source; Have only the mutual of light signal between the metering circuit of signal generating circuit and PSD camera; Do not have the coupling of electric signal, thereby a plurality of signal source can be independent separately in complex environment, makes the one-piece construction of measurement mechanism simpler; The scope of activities of determinand will be free more, make a plurality of optical signal sources of telemeasurement become possibility.
Compare the prior art scheme, the invention has the advantages that to can be implemented in the complex environment, to the concurrent measurement of a plurality of points in space, have that antijamming capability is strong, the characteristics of determinand freedom of movement, based on the simple in measurement system structure of this method, cost is low.Be not only applicable to the existing application of PSD, but also range of application is expanded to fields such as range observation, multiple spot Position Tracking, spatial attitude identification, human-computer interaction.
Description of drawings
Fig. 1 is the principle of work synoptic diagram of sampling-maintenance method;
Fig. 2 is the principle of work synoptic diagram of modulation method;
Fig. 3 is the work synoptic diagram of measuring method of the present invention;
Fig. 4 is the structural representation of a kind of embodiment of measurement mechanism of the present invention;
Fig. 5 is the application of measuring method of the present invention in moving range measurement system.
Embodiment
Further specify of the present invention below in conjunction with accompanying drawing.
As shown in Figure 3, a kind of embodiment for the concurrent measuring method of many signals that the present invention is based on PSD carries out position measurement to three signal sources simultaneously, and is specific as follows:
(1) signal modulation: through three corresponding signal generating circuits, respectively optical signal source 1, optical signal source 2, optical signal source 3 usefulness are carried out Sine Modulated, make modulation afterwards each signal source frequency have nothing in common with each other and be unique, be respectively f1, f2, f3;
(2) PSD handles: the signal after optical signal source 1, optical signal source 2 and optical signal source 3 modulation and the mixed signal of bias light, be incident upon on the PSD light-sensitive surface, and PSD is output two-way photogenerated current I at two ends
1, I
2
(3) conversion of signals and amplification: through the I-V change-over circuit in the signal processing circuit board, photogenerated current converts voltage signal to, through ac amplifier circuit voltage signal is amplified on year-on-year basis again, and the voltage signal of conversion, the output of amplification back is U
1, U
2, simultaneously, ac amplifier circuit can be removed the static interference signal in the background signal preferably;
(4) AD conversion: through the AD analog-to-digital conversion module, with the hybrid analog-digital simulation voltage signal U after amplifying
1, U
2Convert digital voltage signal U to
1', U
2';
(5) filtering: respectively in order to f
1, f
2, f
3For the digital narrow band filter of centre frequency, to the blended voltage signals U after the digitizing
1' and U
2' carry out filtering, through the dynamic disturbance signal in other optical signal sources of filtering and the bias light, obtain the ac voltage signal U of optical signal source 1
11, U
12, the ac voltage signal U of optical signal source 2
21, U
22, the ac voltage signal U of optical signal source 3
31, U
32
(5) amplitude measurement: through the digital amplitude measurement module to three filtered ac voltage signal U of signal source
11, U
12, U
21, U
22, U
31, U
32Carry out amplitude measurement respectively, correspondingly, obtain the AC signal effective value A of optical signal source 1 respectively
11, A
12, the AC signal effective value A of optical signal source 2
21, A
22, the AC signal effective value A of optical signal source 3
31, A
32
(6) position calculation: the signal effective value of above-mentioned three optical signal sources is input to computing module, and the hot spot that calculates each optical signal source departs from the distance X at PSD center
1, X
2And X
3, satisfy following formula respectively:
X
1=(L/2)*(A
11-A
12)/(A
12+A
11)
X
2=(L/2)*(A
21-A
22)/(A
22+A
21)
X
3=(L/2)*(A
31-A
32)/(A
32+A
31)
Wherein, L is a PSD photosurface length.
Measuring method of the present invention is simple fast, measuring accuracy is high, and is strong to the antijamming capability of bias light, all has good application prospects in a plurality of fields such as range observation, multiple spot Position Tracking, spatial attitude identification, human-computer interactions.
Shown in Figure 4 for the structural representation of a kind of embodiment of measurement mechanism of the present invention; Comprise three sine wave generating circuit and led drive circuits of forming by LM324 and triode; PSD sensor SD402, signal amplification module, AD modular converter and the filtering-survey width of cloth-computing module.
Said sine wave generating circuit and led drive circuit are corresponding one by one with determinand, drive three infrarede emitting diodes (940nm) with 1K, 2K, 3K respectively and send light modulated, are projected in respectively on the one dimension PSD sensor SD402 through behind the cylindrical mirror.
Said signal amplification module is made up of I-V conversion and ac amplifier circuit; Said circuit comprises the AD8544 chip with four groups of operational amplifiers; This module is connected in two output terminals of PSD sensor; Be used to receive the original signal of PSD sensor SD402 output, and the AC signal in this original signal is amplified.
Said AD modular converter is connected in signal amplification module output terminal, comprises the AD73360 process chip with 6 16 A/D ALT-CH alternate channels, and being used for the AC signal after amplifying is digital signal from analog signal conversion.
Said filtering-survey the width of cloth-computing module is that model is the cpu chip of LPC1114, is connected in the output terminal of AD modular converter, and digital signal is carried out subsequent treatment.LPC1114 inside comprises digital narrow-band filtering handling procedure, amplitude measurement program and position calculation program, successively 1K, 2K, 3K is carried out filtering and amplitude measurement processing, calculates and obtain the projected position of three light sources on PSD.
Fig. 5 is the application of measuring method of the present invention in moving range measurement system, and is as shown in the figure, measure two simultaneously and move horizontally determinand 1,2 and depart from the distance B at PSD center respectively
1, D
2, only need two LED signal sources are individually fixed on the determinand 1 and determinand 2 that moves horizontally, after through signal generating circuit the signal of LED signal source being modulated, the light signal that LED sends focuses on the PSD of one dimension through lens F, forms luminous point.If LED is h apart from lens F central shaft distance, lens F is m to the distance between the PSD surface, and the luminous point that focuses on the PSD is x from the central shaft distance of lens F, then can calculate testing distance through following measuring method:
1) through signal generating circuit the optical signal frequency of optical signal source LED1 and LED2 is modulated to f respectively
1And f
2
2) after light signal focused on the PSD photosurface, PSD is output two-way photogenerated current I at two ends
1And I
2
3) after the processing through current/voltage conversion and signal amplification circuit, form two-way voltage signal U
1And U
2
4) through the AD modular converter, convert analog voltage signal into digital voltage signal;
5) respectively with f
1And f
2For filter center frequency is carried out filtering to digital voltage signal,, thereby obtain the ac voltage signal U of LED1 respectively with the dynamic disturbance signal in other optical signal sources of digital filtering algorithm filtering and the bias light
11, U
12And the ac voltage signal U of LED2
21, U
22
6) through the digital amplitude measurement module, to filtered ac voltage signal U
11, U
12, U
21, U
22Carry out amplitude measurement respectively, obtain the AC signal effective value A of optical signal source 1
11, A
12, and the AC signal effective value A of optical signal source 2
21, A
22
6) the signal effective value with above-mentioned two optical signal sources is input to position computation module, and the hot spot that calculates each optical signal source departs from the distance X at PSD center
1, X
2, satisfy following formula respectively:
X
1=(L/2)*(A
11-A
12)/(A
12+A
11)
X
2=(L/2)*(A
21-A
22)/(A
22+A
21)
Wherein L is the length of PSD.
7) last, according to similar triangle theory, can calculate testing distance D
1And D
2:
D
1=mh/X
1
D
2=mh/X
2
Simultaneously more a plurality of determinands that move horizontally are measured if need; Then according to above measuring principle; Only need respectively the signal of other LED to be modulated with different frequencies; And in digital filtering, amplitude measurement and three modules of position calculation of CPU, correspondingly increase program code, can reach the function that more a plurality of targets are measured simultaneously.
It is understandable that above-mentioned embodiment and applicating example only are the more representational examples of the present invention.Though the present invention is through illustrating and describe with reference to preferred embodiment,, those of ordinary skills should understand, and can be not limited to the description of the foregoing description, in the scope of claims, can do the various variations on form and the details.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed by the invention all should be thought protection scope of the present invention.
Claims (7)
1. measuring method based on PSD, can be simultaneously to several independent light signal sources (optical signal source 1, optical signal source 2 ..., optical signal source n) and carry out position measurement, it is characterized in that this method comprises successively:
(1) signal modulation: respectively each optical signal source is carried out Sine Modulated, make frequency and other optical signal source of each optical signal source after the modulation all inequality;
(2) PSD handles: the signal of all optical signal sources and the mixed signal of bias light are projeced into the PSD light-sensitive surface and form hot spot, and export two-way photogenerated current I at the PSD two ends
1, I
2
(3) conversion of signals and amplification: through I-V change-over circuit and amplifying circuit, with current signal I
1, I
2Convert voltage signal into and it is amplified on year-on-year basis, the voltage signal of conversion back output satisfies U
1=kI
1, U
2=kI
2, wherein, k is the constant strong and weak relevant with signal processing circuit with the signal source signal;
(4) analog to digital conversion:, convert analog voltage signal into digital voltage signal through A/D convertor circuit;
(5) filtering: receive digital voltage signal from a last step; Respectively each optical signal source is carried out digital narrow-band filtering; With the signal of other optical signal sources in the filtering blended voltage signals and the undesired signal in the bias light, obtain the ac voltage signal U of each optical signal source
I1, U
I2(i=1,2 ..., n), the voltage signal of each optical signal source is separate after the filtering;
(6) amplitude measurement: to the filtered ac voltage signal U of each optical signal source
I1, U
I2(i=1,2 ..., n) carry out amplitude measurement, obtain the effective value A of the AC signal of each optical signal source
I1, A
I2(i=1,2 ..., n);
(7) position calculation: read the signal effective value of each optical signal source of input, the hot spot that calculates each optical signal source departs from the distance X at PSD center
1, X
2..., X
n, said distance X satisfies formula:
X
i=(L/2)*(A
i1-A
i2)/(A
i2+A
i1)
Wherein, L is a PSD light-sensitive surface length, i=1, and 2 ..., n.
2. the measuring method based on PSD as claimed in claim 1 is characterized in that: the amplifying circuit in the said step (3) is an ac amplifier circuit.
3. the measuring method based on PSD as claimed in claim 1 is characterized in that: in the said step (5), the centre frequency of each digital narrow-band filtering is the modulating frequency of corresponding optical signal source in step (1).
4. like claim 1 or 3 described measuring methods based on PSD, it is characterized in that: filtering, effective value measurement and position calculation are carried out successively through the cpu chip with digital filtering module, amplitude measurement module and computing module in said step (5), (6), (7).
5. the measurement mechanism based on PSD comprises corresponding with determinand respectively several signal generators and PSD position transducer, and said signal generator is modulated optical signal source, and optical signal source is positioned on the determinand, it is characterized in that also comprising:
The signal amplification module links to each other with PSD sensor output terminal, is made up of I-V change-over circuit and ac amplifier circuit, is used for the signal of PSD output is amplified;
The AD modular converter links to each other with signal amplification module output terminal, converts amplified analog signal into digital signal;
Filtering-survey the width of cloth-computing module links to each other with AD modular converter output terminal, is used for handling all optical signal sources exchange undesired signal with background mixed signal, realizes that successively filtering, the effective value to each optical signal source measured and position calculation.
6. the measurement mechanism based on PSD as claimed in claim 5 is characterized in that the said filtering-survey width of cloth-computing module is the cpu chip that is integrated with digital filtering module, amplitude measurement module, computing module, wherein,
Said digital filtering module is used for extracting respectively from mixed signal the signal message of each optical signal source;
Said amplitude measurement module is used to measure the output signal of above-mentioned digital filtering module, obtains the signal effective value of each optical signal source respectively;
Said computing module, the signal effective value of each optical signal source that reception amplitude measurement module records is as input, and the hot spot that calculates and export each optical signal source departs from the distance at PSD center.
7. the measurement mechanism based on PSD described in claim 5 or 6 is characterized in that: be filtered into narrow-band filtering in the said filtering-survey width of cloth-computing module, the centre frequency of said narrow-band filtering is consistent with the modulating frequency of corresponding optical signal source.
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CN109171960A (en) * | 2018-07-25 | 2019-01-11 | 杭州三坛医疗科技有限公司 | Method for positioning light beam, guide channel localization method and positioning mechanism |
CN109883324A (en) * | 2019-02-21 | 2019-06-14 | 大连理工大学 | The method that research background light influences the 3 d space coordinate measurement based on PSD |
CN112212789A (en) * | 2019-07-12 | 2021-01-12 | 上海沃尔沃汽车研发有限公司 | Position detection system and position detection method |
CN112212789B (en) * | 2019-07-12 | 2021-12-21 | 上海沃尔沃汽车研发有限公司 | Position detection system and position detection method |
CN111121626A (en) * | 2019-12-30 | 2020-05-08 | 广东博智林机器人有限公司 | Signal detection circuit, position sensitive detector and position detection system |
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